CN108827346A - Resonant transducer temperature-compensation method based on continuous ring-down - Google Patents

Resonant transducer temperature-compensation method based on continuous ring-down Download PDF

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CN108827346A
CN108827346A CN201810328674.2A CN201810328674A CN108827346A CN 108827346 A CN108827346 A CN 108827346A CN 201810328674 A CN201810328674 A CN 201810328674A CN 108827346 A CN108827346 A CN 108827346A
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frequency
temperature
value
resonator
continuous ring
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CN108827346B (en
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王雅刚
朱欣华
苏岩
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Nanjing University of Science and Technology
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Nanjing University of Science and Technology
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
    • G01D3/036—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere

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  • General Physics & Mathematics (AREA)
  • Oscillators With Electromechanical Resonators (AREA)

Abstract

The invention discloses a kind of resonant transducer temperature-compensation methods based on continuous ring-down, first after resonator closed loop self-excited driving system amplitude detection, increasing degree comparator and trigger, the system for constructing continuous ring-down, to test the time of ring-down, Q value is characterized；Then continuous ring-down test is carried out in complete warm range, obtains Q value and corresponding resonant frequency, and linear fit is carried out to frequency with Q value, obtain frequency because of variable quantity caused by temperature error；The frequency and Q value of resonator are finally measured, and combines the temperature-compensating of the curve progress resonance frequency of fitting.It is different that this invention removes ambient temperature sensor temperature measurement points, and the temperature of test improves the stability of resonator there are caused thermometric ysteresis effect in error and temperature decline uphill process.

Description

Resonant transducer temperature-compensation method based on continuous ring-down
Technical field
The present invention relates to technique for temperature compensations, more particularly to a kind of resonant transducer based on continuous ring-down Temperature-compensation method.
Background technique
This several years, MEMS resonator obtained many concerns and research, but the resonance frequency of MEMS resonator be easy by To the influence of temperature drift, this restrict its practical applications.In order to improve the temperature performance of MEMS resonator, usually to resonance The temperature error of device compensates.So, the accuracy of thermometric determines the quality of temperature-compensating.
(Lee K I, Takao H, Sawada K, the et al.Improvement of thermal response of document one in temperature controlled precise three-axis accelerometer with stabilized characteristics over a wide temperature range[C]//The,International Conference on Solid-State Sensors,Actuators and Microsystems,2005.Digest of Technical Papers.Transducers.IEEE,2005:800-803Vol.1.) a kind of thermometry is disclosed, Temperature measurement unit is added outside combined system, the temperature error of sensor is compensated.But it is this based on the outer temperature of piece The method of sensor, the distance between temperature sensor and resonator are larger, and measurement accuracy is low.In order to reduce error and hysteresis, Research on piece thermometric, such as (K ose T, Azgin K, the Akin T.Temperature compensation of of document two a capacitive MEMS accelerometer by using a MEMS oscillator[C]//IEEE International Symposium on Inertial Sensors and Systems.IEEE,2016:33-36.) open A kind of scheme based on additional resonator as temperature sensor in piece.(Wang Fan, Dong Jingxin, the refined bright silicon of Zhao are micro- for document three The temperature detection of beam accelerometer and closed-loop control [J] optical precision engineering, 2014,22 (6):1590-1597.) open It is a kind of based on scheme of the additional metal layer as temperature sensor in piece is sputtered, although both schemes are to a certain extent Temperature measurement error is reduced, but also cannot achieve zero distance thermometric.
Summary of the invention
The purpose of the present invention is to provide a kind of resonant transducer temperature-compensation methods based on continuous ring-down.
The technical solution for realizing the aim of the invention is as follows：Resonant transducer temperature based on continuous ring-down is mended Compensation method includes the following steps：
Step 1, the continuous ring-down test macro of building：In resonator closed loop self-excited driving system amplitude detection Afterwards, increasing degree comparator and trigger, the system for constructing continuous ring-down characterize Q to measure the time of ring-down Value；
Step 2 carries out continuous ring-down test：Continuous ring-down test is carried out in complete warm range, obtains Q value With corresponding resonant frequency, and linear fit is carried out to frequency with Q value, obtains frequency because of variation caused by temperature error Amount；
Step 3, Q value temperature-compensating：The frequency and Q value of resonator are measured, and the curve of fitting is combined to carry out resonance frequency Temperature-compensating.
Compared with prior art, the present invention its remarkable advantage is：(1) present invention is characterized by resonator parameter Q value itself Temperature eliminates ambient temperature sensor temperature measurement point difference, and there are errors and temperature decline to rise for the temperature of test Caused thermometric ysteresis effect, improves the stability of resonator in journey；(2) principle that the present invention passes through continuous ring-down It converts the test of Q value to the test of frequency, frequency modulation(PFM) is carried out to Q value, reduces the influence that temperature error measures Q value, Improve the measuring accuracy of Q value；(3) present invention is not necessarily to additional temperature sensor, has saved cost, has reduced power consumption, (4) frequency In the measurement of rate, the present invention, which uses, is based on reset count device principle frequency counter, reduces quantizing noise.
Detailed description of the invention
Fig. 1 is temperature-compensation method block diagram of the present invention.
Fig. 2 is resonator close-loop driven control system block diagram.
Fig. 3 is ring-down signal schematic representation.
Fig. 4 is resonator free damping curve.
Fig. 5 is the frequency measurement schematic diagram based on reset count device principle.
Specific embodiment
Present invention is further described in detail with reference to the accompanying drawing.
Q value (quality factor) is to characterize an amount of system damping characteristic, reflects the attenuation characteristic of system.It is by very much Factors composition, including：Air damping (QAir), thermoelastic damping (QTED), anchor point damp (QAnchor point) etc..The calculation formula of Q value can be with It is expressed as：
These damping factors can all change with the variation of temperature, for example the thermoelastic damping of beam and the relationship of temperature can To be expressed as：
E in formulaadFor the Young's modulus under non-relaxation or adiabatic condition, E is the Young's modulus under relaxation or isothermy, α For the thermal expansion coefficient of material, T0For system temperature, CvFor specific heat at constant volume, w is deck-siding, τZRelaxation time.
The relationship of air damping and temperature can be expressed as：
H is Planck's constant in formula, and ρ is gas density, and f is structural vibration frequency, and P is gas pressure intensity, kbBoltzmann Constant, T are gas temperature, and m is gas gross mass, and n is number of moles of gas.
Therefore, Q value can be used as a parameter for being used to characterize temperature.
In general, carrying out the measurement and calculating of Q value using Ring-down method.Resonator is under electrostatic drive power with intrinsic frequency Rate is vibrated, and driving voltage is removed, and resonator free damping under the action of damping is vibrated, and attenuation curve is as shown in figure 4, packet Winding thread function is：
Wherein F (t) is the amplitude of vibration, and ζ is damping, ωnIt is resonator vibration angular frequency, Q is Q value.In view of continuous Ring-down characteristic only considers positive axis, logarithmic transformation is carried out, and take two points, then Q value can be write as：
Here F (t1) and F (t2) it is each set to the amplitude of the initial of vibration and end, ωnIt is resonator vibration angular frequency Rate can be obtained by frequency reading circuit.So Q value in order to obtain, the just only (t for needing to measure1-t2), the survey of Q value Amount has been also translated into the measurement of frequency.The test of Q value is converted to by the principle of continuous ring-down the test of frequency, to Q Value carries out frequency modulation(PFM), reduces circuit parameter caused by temperature error and fluctuates the influence measured Q value.
In conclusion the present invention proposes the resonant transducer temperature-compensation method based on continuous ring-down, using even Continuous ring-down principle measures resonator q, characterizes temperature, compensates to frequency, steps are as follows：
Step 1, the continuous ring-down test macro of building：In resonator closed loop self-excited driving system amplitude detection Afterwards, increasing degree comparator and trigger, the system for constructing continuous ring-down characterize Q to measure the time of ring-down Value；
Resonator closed loop self-excited driving system (such as Fig. 2) mainly includes electric discharge road (amplification and difference), ADC/DAC before simulation Conversion circuit, amplitude detection circuit, PI control, multiplier etc..Simulation before electric discharge road to resonator come out low current signal into Row amplification is converted into voltage signal, using difference, eliminates some common-mode errors, is further located into digital circuit Reason.Data conversion is carried out using 16 ADC and DAC between number and analog circuit.Amplitude detection and PI control and multiplier Link realizes that, in order to allow the amplitude of resonator to maintain a definite value, digital circuit the inside is first to resonance in digital circuit The amplitude of device is detected, and it is poor then to make with reference amplitude signal, forms error controling signal, into PI, is controlled PI output, is adjusted Whole drive signal value, so that the Oscillation Amplitude that detection obtains is maintained at fixed value.
In the loop of above-mentioned closed loop self-excited driving, increasing degree compare with trigger link, when amplitude rising reach When one value, trigger 0, driving signal is removed, as down, and when amplitude decline reaches a value, trigger 1 is driven Dynamic signal loading, as ring can then characterize Q value by measuring the time of ring-down.
Step 2 carries out continuous ring-down test：Continuous ring-down test is carried out in complete warm range, obtains Q value It with corresponding resonant frequency, is gone to handle a little louder to data are obtained, and linear fit is carried out to frequency with Q value, obtain frequency Rate is because of variable quantity caused by temperature error.
The calculation formula of Q value such as formula 5.Resonant frequency is measured based on the principle of reset count device, as shown in Figure 5.Pass through Counter continuously records the rising edge number of crystal oscillator reference clock, each rising edge of resonator output signal reaches When, the difference of two adjacent moment counters is calculated, determines the ratio between vibration device output signal frequency and reference clock frequency, The frequency of reference clock be it is known, thus may determine that the frequency of resonator.
Step 3, Q value temperature-compensating：The frequency and Q value of resonator are measured, and the curve of fitting is combined to carry out resonance frequency Temperature-compensating.The measurement of the frequency and Q value of resonator is identical as step 2.
Since the comformity relation between Q value and frequency is more preferable, using the method for the present invention, letter is carried out to frequency using Q value Single linear compensation, for resonator in the range of 37 DEG C to 52 DEG C, frequency stability is increased to 279ppm from 3771ppm, improves 7 times.

Claims (4)

1. the resonant transducer temperature-compensation method based on continuous ring-down, which is characterized in that include the following steps：
Step 1, the continuous ring-down test macro of building：After resonator closed loop self-excited driving system amplitude detection, increase Add amplitude comparator and trigger, the system for constructing continuous ring-down characterizes Q value to measure the time of ring-down；
Step 2 carries out continuous ring-down test：Continuous ring-down test is carried out in complete warm range, obtains Q value and right The resonant frequency answered, and linear fit is carried out to frequency with Q value, frequency is obtained because of variable quantity caused by temperature error；
Step 3, Q value temperature-compensating：The frequency and Q value of resonator are measured, and combines the temperature of the curve progress resonance frequency of fitting Degree compensation.
2. resonant transducer temperature-compensation method according to claim 1, which is characterized in that step 1 is according to utilization The measurement of Q value is converted to the measurement of frequency by ring-down principle, and formula is：
In formula, F (t1) and F (t2) respectively indicate resonator vibration carve t at the beginning1With finish time t2Amplitude, ωnIt is resonance Device vibrates angular frequency.
3. resonant transducer temperature-compensation method according to claim 1, which is characterized in that step 2 is based on resetting The principle of number device measures resonant frequency, specially：The rising edge of crystal oscillator reference clock is continuously recorded by counter Number when each rising edge of resonator output signal reaches, calculates the difference of two adjacent moment counters, determines vibration device Ratio between output signal frequency and reference clock frequency, and then determine the frequency of resonator.
4. resonant transducer temperature-compensation method according to claim 1, which is characterized in that step 2 is carrying out linearly Before fitting, the data of acquisition are gone to handle a little louder.
CN201810328674.2A 2018-04-13 2018-04-13 Resonant sensor temperature compensation method based on continuous ring-down Active CN108827346B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113343520A (en) * 2021-05-26 2021-09-03 北京大学 Method, system, equipment and storage medium for improving temperature stability of silicon-based resonant sensor

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CN103175634A (en) * 2013-02-06 2013-06-26 北京东方计量测试研究所 TDLAS (tunable diode laser absorption spectroscopy) temperature calibration system
CN103472259A (en) * 2013-09-18 2013-12-25 东南大学 Method for silicon micro-resonant type accelerometer temperature compensation
CN103582607A (en) * 2011-06-30 2014-02-12 惠普发展公司，有限责任合伙企业 Calibration of MEMS sensor
CN104535251A (en) * 2015-01-12 2015-04-22 中国科学院电子学研究所 Temperature self-compensating method and measuring mode for double-resonator pressure sensor
CN105071801A (en) * 2015-08-09 2015-11-18 浙江大学 Low-power-consumption tail current ring oscillation circuit resistant to process, voltage and temperature changes
CN106091973A (en) * 2016-07-05 2016-11-09 哈尔滨理工大学 Based on annular Research on Cavity Ring Down Spectroscopy strain transducer and strain detecting method
CN106872912A (en) * 2015-12-10 2017-06-20 哈尔滨理工大学 One kind is based on the remote fibre optic magnetic field sensing device of temperature-compensating high sensitivity
CN106932125A (en) * 2017-02-22 2017-07-07 中国科学院电子学研究所 A kind of compensation method of silicon resonance pressure sensor

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101859155A (en) * 2010-06-11 2010-10-13 南京理工大学 Microresonator temperature control system
CN103582607A (en) * 2011-06-30 2014-02-12 惠普发展公司，有限责任合伙企业 Calibration of MEMS sensor
CN103175634A (en) * 2013-02-06 2013-06-26 北京东方计量测试研究所 TDLAS (tunable diode laser absorption spectroscopy) temperature calibration system
CN103472259A (en) * 2013-09-18 2013-12-25 东南大学 Method for silicon micro-resonant type accelerometer temperature compensation
CN104535251A (en) * 2015-01-12 2015-04-22 中国科学院电子学研究所 Temperature self-compensating method and measuring mode for double-resonator pressure sensor
CN105071801A (en) * 2015-08-09 2015-11-18 浙江大学 Low-power-consumption tail current ring oscillation circuit resistant to process, voltage and temperature changes
CN106872912A (en) * 2015-12-10 2017-06-20 哈尔滨理工大学 One kind is based on the remote fibre optic magnetic field sensing device of temperature-compensating high sensitivity
CN106091973A (en) * 2016-07-05 2016-11-09 哈尔滨理工大学 Based on annular Research on Cavity Ring Down Spectroscopy strain transducer and strain detecting method
CN106932125A (en) * 2017-02-22 2017-07-07 中国科学院电子学研究所 A kind of compensation method of silicon resonance pressure sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113343520A (en) * 2021-05-26 2021-09-03 北京大学 Method, system, equipment and storage medium for improving temperature stability of silicon-based resonant sensor
CN113343520B (en) * 2021-05-26 2022-05-13 北京大学 Method, system, equipment and storage medium for improving temperature stability of silicon-based resonant sensor

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