CN108818418B - Device convenient for mounting graphite boat ceramic ring on plating boat - Google Patents

Device convenient for mounting graphite boat ceramic ring on plating boat Download PDF

Info

Publication number
CN108818418B
CN108818418B CN201810878426.5A CN201810878426A CN108818418B CN 108818418 B CN108818418 B CN 108818418B CN 201810878426 A CN201810878426 A CN 201810878426A CN 108818418 B CN108818418 B CN 108818418B
Authority
CN
China
Prior art keywords
boat
sleeve
lifting
rotating
connecting rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201810878426.5A
Other languages
Chinese (zh)
Other versions
CN108818418A (en
Inventor
潘勇
朱浩
彭春林
吴朋朋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tongwei Solar Anhui Co Ltd
Original Assignee
Tongwei Solar Anhui Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tongwei Solar Anhui Co Ltd filed Critical Tongwei Solar Anhui Co Ltd
Priority to CN201810878426.5A priority Critical patent/CN108818418B/en
Publication of CN108818418A publication Critical patent/CN108818418A/en
Priority to PCT/CN2018/118248 priority patent/WO2020024494A1/en
Application granted granted Critical
Publication of CN108818418B publication Critical patent/CN108818418B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25BTOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B27/00Hand tools, specially adapted for fitting together or separating parts or objects whether or not involving some deformation, not otherwise provided for
    • B25B27/14Hand tools, specially adapted for fitting together or separating parts or objects whether or not involving some deformation, not otherwise provided for for assembling objects other than by press fit or detaching same
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Furnace Charging Or Discharging (AREA)

Abstract

The invention discloses a device for conveniently mounting a graphite boat ceramic ring on a plating boat, which comprises a threaded column, wherein a lifting sleeve is sleeved on the threaded column in a sliding manner, a rotating nut is arranged below the lifting sleeve, the rotating nut is sleeved on the threaded column in a rotating manner through threaded matching, and a plurality of boat lifting mechanisms are arranged on a fixing rod; the boat lifting mechanism comprises a sleeve connecting rod, a rotating sleeve and a boat lifting plate, wherein the sleeve connecting rod is arranged on the fixed rod at intervals, the diameter of the sleeve connecting rod is smaller than that of the fixed rod, the sleeve connecting rod is rotationally connected with the rotating sleeve, the connecting rod is fixedly arranged on the rotating sleeve, and one end of the connecting rod, far away from the rotating sleeve, is fixedly provided with the boat lifting plate. According to the device, the ceramic ring can be mounted on the process clamping point of the graphite boat under the condition that the graphite boat does not need to be dismounted through the matching of the rotating nut and the lifting sleeve, so that the time for mounting the ceramic ring can be greatly shortened, the practicability is high, and the device is very worth popularizing.

Description

Device convenient for mounting graphite boat ceramic ring on plating boat
Technical Field
The invention relates to the technical field of graphite boat equipment, in particular to a device for conveniently mounting graphite boat ceramic rings on a plating boat.
Background
At present, a newly washed graphite boat needs to be pre-coated before being normally used on line, and the flow is as follows: a. placing the graphite boat side on a table; b. loosening all graphite nuts at the top of the graphite boat; c. disassembling each boat leaf, reinstalling a graphite boat, and installing ceramic rings at all process clamping point positions; d. fastening all graphite nuts of the top graphite boat; e. and (5) performing graphite boat pre-plating film by using a PECVD machine.
When the graphite boat is reinstalled and the ceramic ring is installed at all the process clamping point positions, a piece of graphite boat is required to be installed at the process point position of the boat piece, and the operation is repeated until all the boat blades are installed, so that the time and labor are wasted, the labor is occupied, and the operation is inconvenient.
The device of the invention aims at installing the ceramic ring at the clamping point of the graphite boat without disassembling the graphite boat.
Disclosure of Invention
The invention aims to provide a device for conveniently mounting graphite boat ceramic rings on a plating boat, so as to solve the problems in the prior art.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the device for conveniently mounting the graphite boat ceramic ring on the plating boat comprises a threaded column, wherein a lifting sleeve is sleeved on the threaded column in a sliding manner, a rotating nut is arranged below the lifting sleeve, the rotating nut is sleeved on the threaded column in a rotating manner through threaded matching, and the rotating nut is movably connected with the lifting sleeve;
the two sides of the lifting sleeve are fixedly connected with cross bars, one side, far away from the lifting sleeve, of each cross bar is fixedly connected with a fixing rod, and a plurality of boat lifting mechanisms are arranged on each fixing rod;
the boat lifting mechanism comprises a sleeve connecting rod, a rotating sleeve and a boat lifting plate, wherein the sleeve connecting rod is arranged on the fixed rod at intervals, the diameter of the sleeve connecting rod is smaller than that of the fixed rod, the sleeve connecting rod is rotationally connected with the rotating sleeve, the connecting rod is fixedly arranged on the rotating sleeve, and one end of the connecting rod, far away from the rotating sleeve, is fixedly provided with the boat lifting plate.
Preferably, the threaded column is fixed on the bottom plate, sliding blocks are fixed on two sides of the bottom plate, sliding ways are arranged in the sliding blocks, and fixing rods are movably inserted in the sliding ways.
Preferably, the boat lifting mechanism comprises jacks which are arranged on the fixed rod at intervals and boat lifting rods which are movably inserted into the jacks.
Preferably, the rotating nut is fixed with operating rods, and the operating rods are arranged at intervals.
Compared with the prior art, the invention has the beneficial effects that:
according to the device, the ceramic ring can be installed under the condition that the boat piece does not need to be disassembled by matching the rotating nut and the lifting sleeve, and the ceramic ring can be installed at the position of the process clamping point of the graphite boat.
Drawings
FIG. 1 is a schematic view of a graphite boat in the prior art without ceramic rings;
FIG. 2 is a schematic view of the overall structure of the device of the present invention;
FIG. 3 is a schematic view showing a state structure of a ceramic ring mounted on a bottom boat sheet according to a first embodiment of the present invention;
FIG. 4 is a schematic view showing a state structure of a ceramic ring mounted on a second last boat piece according to the first embodiment of the present invention;
FIG. 5 is an enlarged schematic view of the structure of the area A of the present invention;
FIG. 6 is a schematic view of a socket rod structure according to the present invention;
FIG. 7 is a schematic diagram of the connection structure of the boat lifting plate and the rotating sleeve;
FIG. 8 is a schematic view of a slider structure according to the present invention;
FIG. 9 is a schematic view of the connection structure of the fixing rod and the lifting sleeve of the present invention;
FIG. 10 is a schematic view showing a state structure of a ceramic ring mounted on a bottom boat sheet according to a second embodiment of the present invention;
FIG. 11 is an enlarged view of the structure of zone B according to the present invention.
In the figure: 1 boat piece, 2 installation pole, 3 graphite screw cap, 4 technology clamping points, 5 screw thread post, 6 lifting sleeve, 7 rotating nut, 8 operating lever, 9 horizontal pole, 10 dead lever, 11 cover extension pole, 12 rotating sleeve, 13 connecting rod, 14 lift boat board, 15 bottom plate, 16 slider, 161 slide, 17 ceramic ring, 18 jack, 19 lift boat pole.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-11, the present invention provides a technical solution:
embodiment one:
the utility model provides a device convenient to plate boat installation graphite boat ceramic ring, including screw thread post 5, during the use, at first put graphite boat side, then place screw thread post 5 in one side of graphite boat, slide the cover on screw thread post 5 and be equipped with and play to rise cover 6, make and play to rise cover 6 and slide from top to bottom along screw thread post 5, and can not take place to rotate, play to rise and be provided with rotatory nut 7 below cover 6, rotatory nut 7 is through screw-thread fit rotation cover locate screw thread post 5, make rotatory nut 7 can realize rising and the function of decline when rotating along screw thread post 5, thereby it rises and descends to drive to play to rise to cover 6, and rotatory nut 7 and play to rise to cover 6 swing joint's setting, and rotatory nut 7 is when rotating, can not influence to play to rise to cover 6 promptly can not drive to play to cover 6, can not influence the effect of horizontal pole 9, be fixed with action bars 8 on rotatory nut 7, and action bars 8 are the interval setting, action bars 8 that the interval sets up, can be more convenient for rotate to play to rise to cover 6 to the operation personnel and rotate with the nearly control to rise to cover 6.
The horizontal rods 9 are fixedly connected to the two sides of the lifting sleeve 6, the horizontal rods 9 are horizontally fixed to the lifting sleeve 6, the fixing rods 10 are fixedly connected to one side of the horizontal rods 9 away from the lifting sleeve 6, the fixing rods 10 can be driven to synchronously lift and descend in the lifting and descending process of the lifting sleeve 6, the lifting and descending of the fixing columns 10 are used for driving the boat pieces 1 to lift and descend, and therefore the distance between the boat pieces 1 can be adjusted without disassembling the boat pieces 1, and the effect of installing the ceramic rings 17 is achieved.
The threaded columns 5 are fixed on the bottom plate 15, the sliding blocks 16 are fixed on two sides of the bottom plate 15, the sliding ways 161 are arranged in the sliding blocks 16, the fixing rods 10 are movably inserted in the sliding ways 161, so that the fixing rods 10 do not shake and deviate in the ascending and descending processes, the fixing rods 10 always move along the vertical direction, a plurality of boat lifting mechanisms are arranged on the fixing rods 10, the boat lifting mechanisms are used for achieving the effect of driving the boat pieces 1 to move up and down, and a plurality of boat lifting mechanisms can lift a plurality of boat pieces 1 at the same time.
As shown in fig. 2 of the specification, the boat lifting mechanism comprises a sleeve connecting rod 11, a rotating sleeve 12 and boat lifting plates 14, wherein the sleeve connecting rod 11 is arranged on a fixed rod 10 at intervals, the diameter of the sleeve connecting rod 11 is smaller than that of the fixed rod 10, the sleeve connecting rod 11 is rotationally connected with the rotating sleeve 12, a connecting rod 13 is fixed on the rotating sleeve 12, one end of the connecting rod 13, far away from the rotating sleeve 12, is fixedly provided with the boat lifting plates 14, in order to facilitate the up-and-down movement of the boat pieces 1 without influencing the installed boat pieces 1, after each boat piece 1 is lifted and the ceramic ring 17 is installed, the boat lifting plates 14 for lifting the boat pieces 1 can be rotated once, so that the boat pieces 1 can not be lifted again when the boat pieces 1 are lifted next time, the boat pieces 1 with the ceramic rings 17 are not installed on the upper parts are lifted, and the boat lifting plates 14 which are in contact with the boat pieces are rotated for an angle after the ceramic rings 17 are installed each time, so that the boat lifting plates 14 are not contacted with the boat pieces 1.
Firstly, the boat lifting plate 14 is transversely inserted at the bottom of each boat piece 1, the graphite screw cap 3 is loosened, then the boat lifting plate 14 is driven to move upwards by the rotating nut 7, the purpose of moving the boat pieces 1 upwards is achieved, the distance between the two boat pieces 1 is increased, and the ceramic rings 17 are conveniently and manually placed at the position of the process clamping point 4 of the boat piece 1.
Embodiment two:
the utility model provides a device convenient to plate boat installation graphite boat ceramic ring, including screw thread post 5, during the use, at first put graphite boat side, then place screw thread post 5 in one side of graphite boat, slide the cover on screw thread post 5 and be equipped with and play to rise cover 6, make and play to rise cover 6 and slide from top to bottom along screw thread post 5, and can not take place to rotate, play to rise and be provided with rotatory nut 7 below cover 6, rotatory nut 7 is through screw-thread fit rotation cover locate screw thread post 5, make rotatory nut 7 can realize rising and the function of decline when rotating along screw thread post 5, thereby it rises and descends to drive to play to rise to cover 6, and rotatory nut 7 and play to rise to cover 6 swing joint's setting, and rotatory nut 7 is when rotating, can not influence to play to rise to cover 6 promptly can not drive to play to cover 6, can not influence the effect of horizontal pole 9, be fixed with action bars 8 on rotatory nut 7, and action bars 8 are the interval setting, action bars 8 that the interval sets up, can be more convenient for rotate to play to rise to cover 6 to the operation personnel and rotate with the nearly control to rise to cover 6.
The horizontal rods 9 are fixedly connected to the two sides of the lifting sleeve 6, the horizontal rods 9 are horizontally fixed to the lifting sleeve 6, the fixing rods 10 are fixedly connected to one side of the horizontal rods 9 away from the lifting sleeve 6, the fixing rods 10 can be driven to synchronously lift and descend in the lifting and descending process of the lifting sleeve 6, the lifting and descending of the fixing columns 10 are used for driving the boat pieces 1 to lift and descend, and therefore the distance between the boat pieces 1 can be adjusted without disassembling the boat pieces 1, and the effect of installing the ceramic rings 17 is achieved.
The threaded columns 5 are fixed on the bottom plate 15, the sliding blocks 16 are fixed on two sides of the bottom plate 15, the sliding ways 161 are arranged in the sliding blocks 16, the fixing rods 10 are movably inserted in the sliding ways 161, so that the fixing rods 10 do not shake and deviate in the ascending and descending processes, the fixing rods 10 always move along the vertical direction, a plurality of boat lifting mechanisms are arranged on the fixing rods 10, the boat lifting mechanisms are used for achieving the effect of driving the boat pieces 1 to move up and down, and a plurality of boat lifting mechanisms can lift a plurality of boat pieces 1 at the same time.
As shown in fig. 10 and 11 of the specification, the boat lifting mechanism comprises insertion holes 18 formed in the fixed rod 10 at intervals, and boat lifting rods 19 movably inserted in the insertion holes 18, in order to facilitate the up-and-down movement of the boat pieces 1 and not to affect the mounted boat pieces 1, in order to prevent the boat lifting plate 14 from being affected by the mounting rods 2 when rotating in the first embodiment, so that after each boat piece 1 is lifted and mounted with the ceramic ring 17, the boat lifting rods 19 for lifting the boat piece 1 can be directly pulled out, so that the boat piece 1 is not lifted again when the boat piece 1 with the ceramic ring 17 mounted is lifted next time, only the boat piece 1 with no ceramic ring 17 mounted thereon is lifted, and after each ceramic ring 17 of the boat piece 1 is mounted, the boat lifting rods 19 in contact therewith are directly pulled out, so that the boat lifting rods 19 are no longer in contact therewith.
Firstly, the boat lifting rod 19 is transversely inserted into the bottom of each boat piece 1, the graphite screw cap 3 is loosened, then the boat lifting rod 19 is driven to move upwards by the rotating nut 7, the purpose of moving the boat pieces 1 upwards is achieved, the distance between the two boat pieces 1 is increased, and the ceramic rings 17 are conveniently and manually placed at the position of the process clamping point 4 of the boat piece 1.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (4)

1. Device convenient to plate boat installation graphite boat ceramic ring, including screw thread post (5), its characterized in that: the screw column (5) is sleeved with a lifting sleeve (6) in a sliding manner, a rotating nut (7) is arranged below the lifting sleeve (6), the rotating nut (7) is sleeved on the screw column (5) in a rotating manner through threaded fit, and the rotating nut (7) is movably connected with the lifting sleeve (6);
the two sides of the lifting sleeve (6) are fixedly connected with cross rods (9), one side, far away from the lifting sleeve (6), of each cross rod (9) is fixedly connected with a fixing rod (10), and a plurality of boat lifting mechanisms are arranged on the fixing rods (10);
the boat lifting mechanism comprises a sleeve connecting rod (11), a rotating sleeve (12) and a boat lifting plate (14), wherein the sleeve connecting rod (11) is arranged on a fixed rod (10) at intervals, the diameter of the sleeve connecting rod (11) is smaller than that of the fixed rod (10), the sleeve connecting rod (11) is rotationally connected with the rotating sleeve (12), a connecting rod (13) is fixed on the rotating sleeve (12), and one end of the connecting rod (13) away from the rotating sleeve (12) is fixedly provided with the boat lifting plate (14).
2. The apparatus for facilitating the installation of ceramic rings of a graphite boat by a plating boat according to claim 1, wherein: the screw thread post (5) is fixed on the bottom plate (15), slider (16) are fixed on two sides of the bottom plate (15), slide ways (161) are arranged in the slider (16), and fixing rods (10) are movably inserted in the slide ways (161).
3. The apparatus for facilitating the installation of ceramic rings of a graphite boat by a plating boat according to claim 1, wherein: the boat lifting mechanism comprises inserting holes (18) which are arranged on the fixed rod (10) at intervals, and a boat lifting rod (19) which is movably inserted into the inserting holes (18).
4. The apparatus for facilitating the installation of ceramic rings of a graphite boat by a plating boat according to claim 1, wherein: an operating rod (8) is fixed on the rotating nut (7), and the operating rods (8) are arranged at intervals.
CN201810878426.5A 2018-08-03 2018-08-03 Device convenient for mounting graphite boat ceramic ring on plating boat Active CN108818418B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201810878426.5A CN108818418B (en) 2018-08-03 2018-08-03 Device convenient for mounting graphite boat ceramic ring on plating boat
PCT/CN2018/118248 WO2020024494A1 (en) 2018-08-03 2018-11-29 Device for facilitating installation of graphite boat ceramic ring in boat plating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810878426.5A CN108818418B (en) 2018-08-03 2018-08-03 Device convenient for mounting graphite boat ceramic ring on plating boat

Publications (2)

Publication Number Publication Date
CN108818418A CN108818418A (en) 2018-11-16
CN108818418B true CN108818418B (en) 2023-06-09

Family

ID=64153473

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810878426.5A Active CN108818418B (en) 2018-08-03 2018-08-03 Device convenient for mounting graphite boat ceramic ring on plating boat

Country Status (2)

Country Link
CN (1) CN108818418B (en)
WO (1) WO2020024494A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108818418B (en) * 2018-08-03 2023-06-09 通威太阳能(安徽)有限公司 Device convenient for mounting graphite boat ceramic ring on plating boat
CN114234827B (en) * 2021-11-26 2024-03-29 深圳市艾特自动化有限公司 Whole graphite boat detection system and detection method
CN117383651B (en) * 2023-12-08 2024-03-01 青岛吉美来科技有限公司 Photocatalysis sewage treatment device

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002314190A (en) * 2001-04-13 2002-10-25 Kyocera Corp Package for storing optical semiconductor element and optical semiconductor device
KR20030080365A (en) * 2002-04-08 2003-10-17 주식회사 아벡테크 The boat for high speed evaporation and the fabrication method for the same
CN204182358U (en) * 2014-11-04 2015-03-04 贵州欧瑞信环保科技有限责任公司 A kind of adjustable for height agitating device
CN204281858U (en) * 2014-03-20 2015-04-22 茂迪(苏州)新能源有限公司 A kind of graphite boat
CN104640665A (en) * 2012-07-12 2015-05-20 西门子公司 Spring assembly, machine, and weld head
CN204582023U (en) * 2015-03-18 2015-08-26 广州军区广州总医院 A kind of plaque virus inactivating device
CN205406550U (en) * 2016-03-23 2016-07-27 锦州华昌光伏科技有限公司 Graphite boat with adjustable lock distance
CN206602124U (en) * 2017-04-11 2017-10-31 常州亿晶光电科技有限公司 Graphite boat ceramic jacket rapid installation device
CN207367943U (en) * 2017-11-08 2018-05-15 中赣新能源股份有限公司 A kind of new PECVD graphite boats
CN208681484U (en) * 2018-08-03 2019-04-02 通威太阳能(安徽)有限公司 A kind of device convenient for plating boat installation graphite boat ceramic ring

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005311038A (en) * 2004-04-21 2005-11-04 Shinko Electric Co Ltd Pallet cassette and carrying in/out device for glass-shaped plate
CN100462292C (en) * 2006-02-06 2009-02-18 友达光电股份有限公司 Conveyer
KR101239825B1 (en) * 2006-06-29 2013-03-06 엘지디스플레이 주식회사 cassette unit for LCD glass carrying
CN103057945B (en) * 2012-08-08 2015-07-15 深圳市华星光电技术有限公司 Storage device of multilayer substrates
CN105428286A (en) * 2015-12-16 2016-03-23 嵊州市西格玛科技有限公司 Lifting assembly mechanism for graphite boat loading and unloading wafers
CN206505899U (en) * 2017-02-22 2017-09-19 广东爱康太阳能科技有限公司 A kind of tubular film plating Horizontal graphite boat
CN107299334B (en) * 2017-08-14 2019-02-15 通威太阳能(安徽)有限公司 A kind of graphite boat of adjustable thickness and spacing
CN108818418B (en) * 2018-08-03 2023-06-09 通威太阳能(安徽)有限公司 Device convenient for mounting graphite boat ceramic ring on plating boat

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002314190A (en) * 2001-04-13 2002-10-25 Kyocera Corp Package for storing optical semiconductor element and optical semiconductor device
KR20030080365A (en) * 2002-04-08 2003-10-17 주식회사 아벡테크 The boat for high speed evaporation and the fabrication method for the same
CN104640665A (en) * 2012-07-12 2015-05-20 西门子公司 Spring assembly, machine, and weld head
CN204281858U (en) * 2014-03-20 2015-04-22 茂迪(苏州)新能源有限公司 A kind of graphite boat
CN204182358U (en) * 2014-11-04 2015-03-04 贵州欧瑞信环保科技有限责任公司 A kind of adjustable for height agitating device
CN204582023U (en) * 2015-03-18 2015-08-26 广州军区广州总医院 A kind of plaque virus inactivating device
CN205406550U (en) * 2016-03-23 2016-07-27 锦州华昌光伏科技有限公司 Graphite boat with adjustable lock distance
CN206602124U (en) * 2017-04-11 2017-10-31 常州亿晶光电科技有限公司 Graphite boat ceramic jacket rapid installation device
CN207367943U (en) * 2017-11-08 2018-05-15 中赣新能源股份有限公司 A kind of new PECVD graphite boats
CN208681484U (en) * 2018-08-03 2019-04-02 通威太阳能(安徽)有限公司 A kind of device convenient for plating boat installation graphite boat ceramic ring

Also Published As

Publication number Publication date
WO2020024494A1 (en) 2020-02-06
CN108818418A (en) 2018-11-16

Similar Documents

Publication Publication Date Title
CN108818418B (en) Device convenient for mounting graphite boat ceramic ring on plating boat
CN210703609U (en) Workbench lifting mechanism
CN204045448U (en) A kind of contact clamping device
CN103624187A (en) Rebar bending machine
CN208681484U (en) A kind of device convenient for plating boat installation graphite boat ceramic ring
CN114530779B (en) Low-voltage switch cabinet with adjustable installation size
CN215854625U (en) Replacement device for blast furnace top distribution chute
CN203656501U (en) Adjustable mounting frame body
CN210547751U (en) Forging device is used in environmental protection material production
CN208992862U (en) A kind of high intensity aspen fibers by using silicon substrate tapping machine
CN208951564U (en) A kind of backbone chain device for monitoring running
CN208644504U (en) For producing the tooling of ship control cabinet
CN207464572U (en) A kind of automatic soldering device for being used to produce metallic support
CN203621322U (en) Steel bar bending machine
CN221304374U (en) Resistor fixing and mounting device
CN203428849U (en) Detachable hoisting support
CN203836513U (en) Device bearing support convenient to disassemble and assemble
CN219993108U (en) Hoisting hole positioning template
CN203541122U (en) Automatic lifting mechanism of sheet metal part extrusion molding machine
CN213403605U (en) Multilayer circuit board
CN205246411U (en) Die sleeve stop device of plain bumper
CN203660740U (en) Motor installation structure
CN203656525U (en) Equipment mounting rack
CN204036295U (en) Material test position fix frame
CN210457334U (en) Jacking mechanism for bearing tool

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant