CN207367943U - A kind of new PECVD graphite boats - Google Patents
A kind of new PECVD graphite boats Download PDFInfo
- Publication number
- CN207367943U CN207367943U CN201721485576.7U CN201721485576U CN207367943U CN 207367943 U CN207367943 U CN 207367943U CN 201721485576 U CN201721485576 U CN 201721485576U CN 207367943 U CN207367943 U CN 207367943U
- Authority
- CN
- China
- Prior art keywords
- tabletting
- connecting rod
- graphite boat
- ceramic tube
- locking block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a kind of new PECVD graphite boats, includes multiple graphite boat pieces, multiple Quick releases, offers some perforates in graphite boat piece, and the perforate in different graphite boat pieces aligns one by one, is combined into and wears passage；Quick release includes ceramic tube, connecting rod, the first tabletting, the second tabletting, locking block, ceramic tube, which is arranged in, to be worn in passage, connecting rod is interspersed in the through hole of ceramic tube, one end of connecting rod connects the first tabletting, the other end of connecting rod is hinged after running through the second tabletting with locking block, lock block and be equipped with tight lock part, solution lock section, the side of tight lock part and the longest straight line distance of hinge joint are more than the side of solution lock section and the longest straight line distance of hinge joint.Compared with prior art, the utility model simplifies the disassembly process between graphite boat piece, saves the time.
Description
Technical field
It the utility model is related to solar silicon wafers production equipment field, more particularly to a kind of new PECVD graphite boats.
Background technology
Graphite boat is made of multi-disc graphite boat piece, is connected at present between graphite boat piece by the screwed ceramic rod in end
Connect, and be fixed in the end of ceramic rod plus nut.When installation is with dismounting, it is intended to using instrument ceramic rod both ends
Nut screws down, and process is cumbersome, wastes more time.It is the dismounting between simplified graphite boat piece the mesh of the utility model
Journey, saves the time.
Utility model content
The utility model is the existing technological deficiency of solution, there is provided a kind of new PECVD graphite boats, it can simplify stone
Connection procedure between black boat piece, saves the time.Its specific technical solution is as follows：
The utility model discloses a kind of new PECVD graphite boats, includes multiple graphite boat pieces, multiple Quick releases, graphite
Boat on piece offers some perforates, and the perforate in different graphite boat pieces aligns one by one, is combined into and wears passage；Quick release includes
Ceramic tube, connecting rod, the first tabletting, the second tabletting, locking block, ceramic tube, which is arranged in, to be worn in passage, the length of ceramic tube
Equal or longer than the length for wearing passage, through hole is equipped with ceramic tube, through hole is set, through ceramic tube along the axial direction of ceramic tube
End；Connecting rod is interspersed in through hole, and one end of connecting rod connects the first tabletting, and the other end of connecting rod is stretched out outside through hole, passed through
Wear the second tabletting；First tabletting, the area of the second tabletting are all higher than wearing the port area of passage；Lock block and be arranged on the second pressure
Side of the piece away from ceramic tube, the end for locking block and connecting rod are hinged；Locking block one end hinged with connecting rod is equipped with
Tight lock part, solution lock section, the side of tight lock part and the longest straight line distance of hinge joint be more than solution lock section side and hinge joint most
Long air line distance.
Further, it is all provided with fluted on the first pressing plate and the second pressing plate, the end of connecting rod is arranged in groove.
Further, elastic component is equipped with groove, elastic component is right against the end face side wall of connecting rod.
Further, connected between the first tabletting and the end of connecting rod by the first spring, the first spring is arranged on groove
It is interior.
Further, partition plate is equipped between the second tabletting and locking block, the second bullet is equipped between partition plate and the second tabletting
Spring, the end of connecting rod are hinged through partition plate, with locking block.
Further, the surface of tight lock part and solution lock section is plane, arc-shaped transition between solution lock section and the position of surrounding,
Lock arc-shaped transition between position and the position of surrounding.
Further, ceramic ring is equipped between adjoining graphite boat piece, ceramic ring is sheathed in connecting rod.
The beneficial effects of the utility model：The utility model instead of the threaded ceramic rod in end with Quick release, simplify
Disassembly process between graphite boat piece, saves the time.
Brief description of the drawings
Fig. 1 is the graphite boat piece side structure schematic diagram of the utility model embodiment；
Fig. 2 is the graphite boat piece cross-sectional view of the utility model embodiment；
Fig. 3 does not have the structure diagram of the Quick release of partition plate for the utility model embodiment；
Fig. 4 is the structure diagram for the Quick release that the utility model embodiment has partition plate.
Marked in figure：Graphite boat piece 100, wears passage 101, Quick release 200, ceramic tube 201, the first tabletting 202, and second
Tabletting 203, locks block 204, tight lock part 205, solution lock section 206, connecting rod 207, groove 208, elastic component 209, the first spring
210, through hole 220, partition plate 230, second spring 240, ceramic ring 300.
Embodiment
The embodiment of the utility model is described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning
Same or similar element is represented to same or similar label eventually or there is same or like element.Below by ginseng
The embodiment for examining attached drawing description is exemplary, it is intended to for explaining the utility model, and it is not intended that to the utility model
Limitation.
The utility model is described in further detail below by embodiment combination attached drawing.Refer to attached drawing 1-
4。
The utility model discloses a kind of new PECVD graphite boats, as shown in Figures 1 and 2, includes multiple graphite boat pieces
100th, multiple Quick releases (200) 200, offer some circular perforates in graphite boat piece 100, in different graphite boat pieces 100
Perforate aligns one by one, is combined into and wears passage 101；As shown in Figures 3 and 4, Quick release (200) 200 include ceramic tube 201,
Connecting rod 207, the first tabletting 202, the second tabletting 203, locking block 204, ceramic tube 201, which is arranged in, to be worn in passage 101, pottery
The length of porcelain tube 201 is equal or longer than the length for wearing passage 101, and locking process is carried out to facilitate.It is equipped with ceramic tube 201 logical
Hole 230, through hole 230 are set, through the end of ceramic tube 201 along the axial of ceramic tube 201；Connecting rod 207 is interspersed in through hole 230
Interior, one end of connecting rod 207 connects the first tabletting 202, and the other end of connecting rod 207 is stretched out outside through hole 230, through the second tabletting
203；First tabletting 202, the area of the second tabletting 203 are all higher than wearing the port area of passage 101, to compress graphite boat piece
100；Locking block 204 is arranged on the second side of the tabletting 203 away from ceramic tube 201, the end of locking block 204 and connecting rod 207
Portion is hinged；Lock block 204 and be equipped with tight lock part 205, solution lock section 206 with the hinged one end of connecting rod 207, locking block 204
The other end is the handle for being used to pull locking block 204 of arc.Wherein, the side of tight lock part 205 and hinge joint is most long straight
Linear distance is more than the side of solution lock section 206 and the longest straight line distance of hinge joint, when tight lock part 205 is contacted with the second tabletting 203
When, locking block 204 pulls head rod 207, so that the distance between the first tabletting 202 and the second tabletting 203 are in contracting
Small trend, increases the pressing dynamics to graphite boat piece 100, reaches locking effect；When solution lock section 206 and the second tabletting 203 connect
When touching, the dynamics that locking block 204 pulls head rod 207 reduces or disappears, the first tabletting 202 and the second tabletting 203
Opposite pressing dynamics diminishes, and reduces the pressing dynamics to graphite boat piece 100, reaches unlock effect, is not required to borrow instrument, directly
Locking or unlock are realized by manually pulling locking block 204, and simplification removes and installs process, saves the time.
Further, be equipped with the groove 208 of annular shape on the first pressing plate and the second pressing plate, the end of connecting rod 207 with
Groove 208 coordinates, and can play the role of fixing the first pressing plate and the second press plate position, avoid the first pressing plate from being pressed with the second pressing plate
Misplace during conjunction, damage graphite boat piece 100.
Further, elastic component 209 is equipped with groove 208, elastic component 209 is right against the end face side wall of connecting rod 207, bullet
Property part 209 can not only buffer pressing dynamics to graphite boat piece 100 of abatement the first tabletting 202 and the second tabletting 203, prevent from pressing
The excessive damage graphite boat piece 100 of dynamics, can also play increase locking effect when Quick release (200) 200 is in locking state
Effect.
Further, as shown in figure 3, being connected between the first tabletting 202 and the end of connecting rod 207 by the first spring 210
Connect, the first spring 210 is arranged in groove 208.This can make the pressing of the first tabletting 202 and the second tabletting 203 to graphite boat piece 100
Power is changed into the power of flexible variable, avoids pressing dynamics variation in rigidity, damages graphite boat piece 100.
Further, in order to avoid the pressing dynamics variation in rigidity of the first tabletting 202 and the second tabletting 203, also in addition
A kind of scheme：As shown in figure 4, it is equipped with partition plate 230,230 and second tabletting of partition plate between the second tabletting 203 and locking block 204
It is equipped with second spring 240 between 203, the end of connecting rod 207 passes through hinged with locking block 204 again after partition plate 230.
Further, the surface of tight lock part 205 and solution lock section 206 is plane, can so increase locking block 204 with
Contact surface between second tabletting 203, stability of the increase locking block 204 in the state of locking or unlock.Solution lock section 206
The arc-shaped transition between the position of surrounding, 205 arc-shaped transitions between the position of surrounding of tight lock part, this can increase locking and pull
Simplification of the block 204 in transition state.
Further, ceramic ring 300 is equipped between adjoining graphite boat piece 100, ceramic ring 300 is sheathed in connecting rod 207,
The axial length of each ceramic ring 300 is equal, this can make the interval between adjoining graphite boat piece 100 equal, can also make graphite boat
Evenly, pressing effect is good for pressure between piece 100.
Above content is to combine specific embodiment further detailed description of the utility model, it is impossible to is assert
The specific implementation of the utility model is confined to these explanations.For the utility model person of an ordinary skill in the technical field
For, without departing from the concept of the premise utility, some simple deduction or replace can also be made.
Claims (7)
1. a kind of new PECVD graphite boats, include multiple graphite boat pieces (100), multiple Quick releases (200), the graphite boat
Offer some perforates on piece (100), the perforate on the different graphite boat pieces (100) aligns one by one, is combined into and wears passage
(101)；The Quick release (200) includes ceramic tube (201), connecting rod (207), the first tabletting (202), the second tabletting
(203), lock block (204), the ceramic tube (201) be arranged in it is described wear in passage (101), the ceramic tube (201)
Length equal or longer than the length for wearing passage (101), be equipped with through hole (220) in the ceramic tube (201), it is described to lead to
Hole (220) is set, through the end of the ceramic tube (201) along the axial of the ceramic tube (201)；The connecting rod (207)
It is interspersed in the through hole (220), one end of the connecting rod (207) connects the first tabletting (202), the connecting rod (207)
The other end stretch out the through hole (220) outside, through second tabletting (203)；First tabletting (202), described second
The area of tabletting (203) is all higher than the port area for wearing passage (101)；The locking block (204) is arranged on described the
Side of two tablettings (203) away from the ceramic tube (201), the locking block (204) and the end of the connecting rod (207)
It is hinged；The locking block (204) is equipped with tight lock part (205), solution lock section (206) with the hinged one end of the connecting rod (207),
The side of the tight lock part (205) and the longest straight line distance of hinge joint are more than side and the hinge joint of the solution lock section (206)
The longest straight line distance.
2. graphite boat as claimed in claim 1, it is characterised in that be equipped with first pressing plate and second pressing plate recessed
Groove (208), the end of the connecting rod (207) are arranged in the groove (208).
3. graphite boat as claimed in claim 2, it is characterised in that elastic component (209) is equipped with the groove (208), it is described
Elastic component (209) is right against the end face side wall of the connecting rod (207).
4. graphite boat as claimed in claim 3, it is characterised in that first tabletting (202) and the connecting rod (207)
Connected between end by the first spring (210), first spring (210) is arranged in the groove (208).
5. graphite boat as claimed in claim 3, it is characterised in that second tabletting (203) and the locking block (204)
Between be equipped with partition plate (230), second spring (240) is equipped between the partition plate (230) and second tabletting (203), it is described
The end of connecting rod (207) is hinged through the partition plate (230), with the locking block (204).
6. graphite boat as claimed in claim 1, it is characterised in that the table of the tight lock part (205) and the solution lock section (206)
Face is plane, solution lock section (206) arc-shaped transition between the position of surrounding, tight lock part (205) position and surrounding
Arc-shaped transition between position.
7. graphite boat as claimed in claim 1, it is characterised in that be equipped with ceramic ring between the adjacent graphite boat piece (100)
(300), the ceramic ring (300) is sheathed in the connecting rod (207).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721485576.7U CN207367943U (en) | 2017-11-08 | 2017-11-08 | A kind of new PECVD graphite boats |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721485576.7U CN207367943U (en) | 2017-11-08 | 2017-11-08 | A kind of new PECVD graphite boats |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207367943U true CN207367943U (en) | 2018-05-15 |
Family
ID=62345982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721485576.7U Expired - Fee Related CN207367943U (en) | 2017-11-08 | 2017-11-08 | A kind of new PECVD graphite boats |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207367943U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108818418A (en) * | 2018-08-03 | 2018-11-16 | 通威太阳能（安徽）有限公司 | A kind of device convenient for plating boat installation graphite boat ceramic ring |
-
2017
- 2017-11-08 CN CN201721485576.7U patent/CN207367943U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108818418A (en) * | 2018-08-03 | 2018-11-16 | 通威太阳能（安徽）有限公司 | A kind of device convenient for plating boat installation graphite boat ceramic ring |
| CN108818418B (en) * | 2018-08-03 | 2023-06-09 | 通威太阳能（安徽）有限公司 | Device convenient for mounting graphite boat ceramic ring on plating boat |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180515 Termination date: 20211108 |