CN108818206A - A kind of silicon target facing attachment - Google Patents
A kind of silicon target facing attachment Download PDFInfo
- Publication number
- CN108818206A CN108818206A CN201810985094.0A CN201810985094A CN108818206A CN 108818206 A CN108818206 A CN 108818206A CN 201810985094 A CN201810985094 A CN 201810985094A CN 108818206 A CN108818206 A CN 108818206A
- Authority
- CN
- China
- Prior art keywords
- silicon target
- workbench
- facing attachment
- pedestal
- chamfering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The present invention relates to a kind of silicon target facing attachments, belong to silicon target manufacturing technology field.The present invention includes pedestal and the workbench on pedestal, silicon target is set on workbench, the pedestal includes the thrust block of perpendicular support pedestal and perpendicular support pedestal side, the perpendicular support pedestal is equipped with guide rail, the workbench bottom is equipped with the guide groove matched with the guide rail, the motor that the thrust block is equipped with chamfering abrasive wheel and connect with the chamfering abrasive wheel, the present invention is by changing the workbench of facing attachment and the relative motion mode of silicon target in chamfer process, guarantee the stabilization of silicon target in chamfer process, silicon target chipping caused by being greatly reduced because of chamfering, collapse the damage such as angle phenomenon, simultaneously, due to the stabilization of silicon target in chamfer process, ensure the stabilization of chamfering, unanimously.
Description
Technical field
The present invention relates to a kind of silicon target facing attachments, belong to silicon target manufacturing technology field.
Background technique
Due to the feature that silicon target is hard, crisp, breakage easily occurs in mechanical processing process, leads to scrap of the product.By
Under routine, therefore how the smart chamfering that the silicon target product of processing is required to carry out 0.3-0.5mm accurately controls chamfering
Precision, while improving chamfering efficiency, guaranteeing that product yield needs to carry out strict control.Under conventional beveler, due to chamfering mistake
Silicon target needs opposite workbench to move in journey, leads in chamfer process that silicon target is easily damaged to scrap, meanwhile, the precision of chamfering
Not easy to control, if carrying out chamfer machining on grinding machine, processing efficiency is low, and processing cost is significantly increased.
Summary of the invention
It is an object of the invention to overcome drawbacks described above existing for existing facing attachment, a kind of guarantee chamfer process is proposed
The stabilization of middle silicon target, to guarantee the stable silicon target facing attachment of chamfering.
The present invention, which is that the following technical solution is employed, to be realized：
A kind of silicon target facing attachment, the workbench including pedestal and on pedestal, silicon target are set to the work
On platform, the pedestal includes the thrust block of perpendicular support pedestal and perpendicular support pedestal side, and the perpendicular support pedestal is equipped with guide rail, institute
State workbench bottom and be equipped with the guide groove that matches with the guide rail, the thrust block be equipped with chamfering abrasive wheel and with it is described fall
The motor of angle grinding wheel connection.
Further, it is equipped with platform base below the workbench, the workbench passes through with the platform base
It is oriented to bond structure connection, the trend of the guiding bond structure is vertical with the trend of the guide rail.
Further, the platform base is fixedly connected with adjusting screw rod by connector I, the workbench with it is described
Adjusting screw rod is fixedly connected by connector II.
Further, the adjusting screw rod is connect by the Limit Bearing in connector I with platform base.
Further, the workbench and the close fluting being provided on one side with silicon target thickness matching of chamfering abrasive wheel.
Further, the workbench is equipped with baffle along the two sides of guide rail direction.
Further, the tilt angle of the thrust block is 30-45 degree.
Further, the thrust block is equipped with limit plate, and the motor is set between the limit plate, the limit
Plate matches with the contact surface of motor with the outer surface of motor.
The beneficial effects of the invention are as follows：
Change the workbench of facing attachment and the relative motion mode of silicon target in chamfer process, in chamfer process, silicon
Target keeps opposing stationary with workbench, therefore, reduces the breakage in silicon target chamfer process, is greatly reduced because chamfering causes
Silicon target chipping, the damage phenomenon such as collapse angle, simultaneously as in chamfer process silicon target stabilization, it is ensured that the stabilization of chamfering, one
It causes, finished product rate is increased to 98% or more.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention.
Fig. 2 is structural schematic diagram of the invention.
In figure：1 perpendicular support pedestal；2 thrust blocks；3 workbenches；4 chamfering abrasive wheels；5 motors；6 guide rails；7 guide grooves；8 connections
Part I；9 adjusting screw rods；10 flutings；11 platform bases；12 connectors II.
Specific embodiment
The present invention will be further explained below with reference to the attached drawings.
As depicted in figs. 1 and 2, silicon target facing attachment of the invention, the workbench including pedestal and on pedestal
3, silicon target is set on workbench 3, and pedestal includes the thrust block 2 of perpendicular support pedestal 1 and perpendicular support 1 side of pedestal, erects support pedestal 1
It is equipped with guide rail 6,3 bottom of workbench is equipped with the guide groove 7 matched with guide rail 6, and thrust block 2 is equipped with 4 He of chamfering abrasive wheel
The motor 5 connecting with chamfering abrasive wheel 4, the tilt angle of thrust block 2 are 30-45 degree.Motor 5 is bolted on diagonal brace bottom
Seat 2, while thrust block 2 is equipped with three pieces of limit plates, motor 5 is set between the two pieces of limit plates in left and right and bottom limit plate, limit
Position plate is matched to motor 5 with the contact surface of motor 5 with the outer surface of motor 5 to support.
Platform base 11 is equipped with below workbench 3, workbench 3 is connect with platform base 11 by being oriented to bond structure,
The trend for being oriented to bond structure is vertical with the trend of guide rail 6, and workbench 3 can be along guiding bond structure along the side vertical with guide rail 6
To movement.
Further, guiding bond structure includes the key positioned at the fluting of 3 bottom surface of workbench and positioned at platform base 11, is opened
Slot and key are respectively positioned on the center of workbench 3 and platform base 11, and from an end face to other end through setting, guide groove 7 is set
There are two, set on the two sides of guiding bond structure.
Platform base 11 is fixedly connected with adjusting screw rod 9 by connector I 8, and adjusting screw rod 9 passes through the limit in connector I 8
Position bearing is connect with platform base 11, and workbench 3 is fixedly connected with adjusting screw rod 9 by connector II 12, adjusting screw rod 9
Another end is connected with knob, drives adjusting screw rod 9 mobile by knob, and adjusting screw rod 9 passes through band follower link II 12 and moves
It moves to drive workbench 3 mobile, so as to adjust the relative spacing between chamfering abrasive wheel 4 and workbench 3.
Workbench 3 is halfpace structure close to one end of chamfering abrasive wheel 4, and the bottom surface of halfpace structure is provided with and silicon target thickness
Matched fluting 10, silicon target, which is contacted by fluting 10 with chamfering abrasive wheel 4, completes chamfering, and side gear is additionally provided on workbench 3
Plate.
It is of the invention use process is as follows：
The first step：The silicon target that front-end process is completed the process carries out removing surface, removes the bur on surface；
Second step：Start facing attachment；
Third step：The a piece of silicon target scrapped is selected, is placed on the workbench 3 of facing attachment, pre- chamfering is carried out, is examined
Chamfering angle size is looked into, the relative spacing of chamfering abrasive wheel 4 and workbench 3 is adjusted by adjusting screw rod 9, to make the chamfering of silicon target
It controls within the scope of processing request,
4th step：The silicon target cleaned out is placed on the workbench 3 of facing attachment；
5th step：Silicon target is fixed on facing attachment workbench 3, the platform 3 that pushes the work forward slowly is moved along guide rail 6
Dynamic, movement speed 5cm/s, silicon target completes chamfer machining by the chamfering abrasive wheel 4 of facing attachment；
6th step：Remove silicon target, check chamfering whether uniformity, whether have breakage；
7th step：After one side chamfering for completing silicon target, silicon target is rotated, the chamfer machining at other angles is carried out, it is final complete
At the chamfer machining process of entire silicon target.
Certainly, above content is only presently preferred embodiments of the present invention, be should not be construed as limiting to implementation of the invention
Example range.The present invention is also not limited to the example above, and those skilled in the art are in essential scope of the invention
Interior made all the changes and improvements etc., should all belong in patent covering scope of the invention.
Claims (8)
1. a kind of silicon target facing attachment, it is characterised in that：Workbench (3) including pedestal and on pedestal, silicon target
On the workbench (3), the pedestal includes the thrust block (2) of perpendicular support pedestal (1) and perpendicular support pedestal (1) side,
The perpendicular support pedestal (1) is equipped with guide rail (6), and workbench (3) bottom is equipped with the guide groove matched with the guide rail (6)
(7), the motor (5) that the thrust block (2) is equipped with chamfering abrasive wheel (4) and connect with the chamfering abrasive wheel (4).
2. a kind of silicon target facing attachment according to claim 1, it is characterised in that：It is set below the workbench (3)
Have platform base (11), the workbench (3) is connect with the platform base (11) by being oriented to bond structure, the feather key
The trend of structure is vertical with the trend of the guide rail (6).
3. a kind of silicon target facing attachment according to claim 2, it is characterised in that：The platform base (11) passes through company
Fitting I (8) is fixedly connected with adjusting screw rod (9), and the workbench (3) and the adjusting screw rod (9) pass through connector II
(12) it is fixedly connected.
4. a kind of silicon target facing attachment according to claim 3, it is characterised in that：The adjusting screw rod (9) passes through company
Limit Bearing in fitting I (8) is connect with platform base (11).
5. a kind of silicon target facing attachment according to claim 1, it is characterised in that：The workbench (3) and chamfering
Grinding wheel (4) is close to be provided with and the fluting of silicon target thickness matching (10) on one side.
6. a kind of silicon target facing attachment according to claim 5, it is characterised in that：The workbench (3) is along guide rail
(6) two sides in direction are equipped with baffle.
7. a kind of silicon target facing attachment according to claim 1, it is characterised in that：The inclination of the thrust block (2)
Angle is 30-45 degree.
8. a kind of silicon target facing attachment according to claim 1, it is characterised in that：The thrust block (2) is equipped with
Limit plate, the motor (5) are set between the limit plate, outside the contact surface and motor (5) of the limit plate and motor (5)
Surface matches.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810985094.0A CN108818206A (en) | 2018-08-28 | 2018-08-28 | A kind of silicon target facing attachment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810985094.0A CN108818206A (en) | 2018-08-28 | 2018-08-28 | A kind of silicon target facing attachment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108818206A true CN108818206A (en) | 2018-11-16 |
Family
ID=64150061
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810985094.0A Withdrawn CN108818206A (en) | 2018-08-28 | 2018-08-28 | A kind of silicon target facing attachment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108818206A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112207668A (en) * | 2020-09-26 | 2021-01-12 | 郑州竹蜻蜓电子科技有限公司 | Chip angle grinding device for manufacturing semiconductor device and using method thereof |
-
2018
- 2018-08-28 CN CN201810985094.0A patent/CN108818206A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112207668A (en) * | 2020-09-26 | 2021-01-12 | 郑州竹蜻蜓电子科技有限公司 | Chip angle grinding device for manufacturing semiconductor device and using method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20181116 |