CN108807602A - A kind of retracting device and recovery method of thin film solar substrate battery material - Google Patents
A kind of retracting device and recovery method of thin film solar substrate battery material Download PDFInfo
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- CN108807602A CN108807602A CN201810811267.7A CN201810811267A CN108807602A CN 108807602 A CN108807602 A CN 108807602A CN 201810811267 A CN201810811267 A CN 201810811267A CN 108807602 A CN108807602 A CN 108807602A
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- cell substrates
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- 239000000758 substrate Substances 0.000 title claims abstract description 155
- 239000000463 material Substances 0.000 title claims abstract description 48
- 239000010409 thin film Substances 0.000 title claims abstract description 44
- 238000000034 method Methods 0.000 title claims description 18
- 238000011084 recovery Methods 0.000 title claims description 11
- 239000010408 film Substances 0.000 claims abstract description 105
- 239000000428 dust Substances 0.000 claims abstract description 35
- 230000033001 locomotion Effects 0.000 claims abstract description 24
- 230000007246 mechanism Effects 0.000 claims description 16
- 238000007667 floating Methods 0.000 claims description 14
- 238000010521 absorption reaction Methods 0.000 claims description 11
- 230000005611 electricity Effects 0.000 claims description 6
- 239000003463 adsorbent Substances 0.000 claims 1
- 238000004064 recycling Methods 0.000 abstract description 8
- 238000002309 gasification Methods 0.000 abstract description 4
- 229910001385 heavy metal Inorganic materials 0.000 abstract description 4
- 230000007613 environmental effect Effects 0.000 abstract description 3
- 229910052751 metal Inorganic materials 0.000 description 8
- 238000005488 sandblasting Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 4
- 101100441413 Caenorhabditis elegans cup-15 gene Proteins 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 4
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 230000008569 process Effects 0.000 description 4
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- 239000002994 raw material Substances 0.000 description 3
- 230000001052 transient effect Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
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- 238000003912 environmental pollution Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
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- 229910052733 gallium Inorganic materials 0.000 description 1
- QNWMNMIVDYETIG-UHFFFAOYSA-N gallium(ii) selenide Chemical compound [Se]=[Ga] QNWMNMIVDYETIG-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
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- 229910000510 noble metal Inorganic materials 0.000 description 1
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- 239000010970 precious metal Substances 0.000 description 1
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- 229910052711 selenium Inorganic materials 0.000 description 1
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- 229910052709 silver Inorganic materials 0.000 description 1
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- 239000012780 transparent material Substances 0.000 description 1
- 239000010926 waste battery Substances 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/361—Removing material for deburring or mechanical trimming
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The embodiment of the present invention discloses a kind of retracting device of thin film solar substrate battery material, including processing platform, processing unit (plant), first driving means and the second driving device, processing platform is for carrying cell substrates to be processed and including chamber portion and the support sector positioned at chamber portion both sides；Processing unit (plant) is set to inside chamber portion and for eliminating the failure film layer on cell substrates；First driving means are set to inside chamber portion and for driving processing unit (plant) to carry out straight reciprocating along first direction or moved according to the progress stepping of the position of cell substrates；Second driving device is set in support sector and for driving cell substrates to carry out straight reciprocating in a second direction or carrying out stepping movement according to the position of processing unit (plant).The failure film layer on cell substrates can be removed by way of gasification through the invention, film layer is reprocessed in realization, additionally it is possible to which dust of the recycling containing a large amount of valuable heavy metal elements solves environmental issue.
Description
Technical field
The present invention relates to a kind of film layer retracting device and methods.Specifically, the present invention relates to one kind being used for the film sun
The retracting device and recovery method of energy substrate battery material.
Background technology
Thin-film solar cells, such as copper indium gallium selenide (CIGS) thin-film solar cells, cadmium telluride (CdTe) film sun
Energy battery, GaAs (GaAs) thin-film solar cells, amorphous silicon battery, dye-sensitized cell etc.) it is usually in substrate material
Above (such as：Soda-lime glass, stainless steel, polyimides PI etc.), by the way that either physically or chemically, plating multilayer film forms film layer, is formed
Substrate battery, then by encapsulation technology, form the Thinfilm solar cell assembly that can be generated electricity.
In thin-film solar cells production process because production process is more, may because of various uncertain factors,
Cause the plated film of substrate battery bad, manufacturing process caused to fail, efficiency reduce or cannot be satisfied technology requirement, formation scrap or
The bad substrate battery of low-power.In addition, normal product also can gradual generation efficiency after long-time service reaches service life
The problems such as reduction, becomes the substrate battery that nature is lost.
In current technology, for low-power substrate battery, it can be generally cut to specified small size, be used for Lawn lamp
Deng in other fields not high to power requirement, but application field range is relatively narrow, and compared with the battery component of stock size, wave
The material that expense is fallen is more, causes economic benefit bad.In addition, scrapping and the substrate battery lost naturally is generally directly by as useless
Glass is simultaneously directly disposed as rubbish, but the failure film layer because containing multiple plated film in its substrate battery, on the one hand, failure film
If the metallic element of various serious pollution environment may be contained in layer can give to a certain extent without handling and recycling
Environment brings the pollution and destruction of unrepairable, and the high value element contained in the failure film layer of plated film can also be wasted
Fall.On the other hand, the failure film layer in the film layer on cell substrates surface can be eliminated, to recycle cell substrates and effective film thereon
Layer can bring the production cost of great number if the environmental protection treatment for carrying out profession to enterprise, reduce profit margin.
Above two situation can all influence its economic benefit for giving for cell production companies, and may cause tight
The environmental pollution of weight.Therefore, the processing and recycling of high value element be in the substrate material of substrate battery and plated film film layer
As it is current and it is following suddenly wait for solve the problems, such as.
Invention content
The present invention provides a kind of retracting device and recovery method being simple and efficient, for thin-film solar cells, especially
It is the bad and waste battery in production process, and the recycling for losing plated film film material in battery naturally after circulation.
It is an object of the present invention to provide a kind of retracting device of thin film solar substrate battery material, including processing are flat
Platform, processing unit (plant), first driving means and the second driving device, wherein processing platform adds in carrying cell substrates to be processed
Work platform includes positioned at centre and forming the chamber portion of recess portion and the support sector positioned at chamber portion both sides；Processing unit (plant) is set to chamber
Inside portion, processing unit (plant) is used to eliminate the failure film layer on cell substrates；First driving means are set to inside chamber portion；First drives
Dynamic device is for driving processing unit (plant) to carry out straight reciprocating along first direction or walked according to the position of cell substrates
Into movement；Second driving device is set in support sector, and the second driving device is for driving cell substrates to carry out in a second direction directly
Line moves back and forth or carries out stepping movement according to the position of processing unit (plant).
In some embodiments, first direction is mutually perpendicular to second direction.
In some embodiments, processing unit (plant) is laser processing device, for emitting laser beam to failure film layer to eliminate
Fail film layer, and laser processing device includes laser and the laser head that is connected with laser, first driving means and laser head
It is connected.
In some embodiments, the front of laser head is equipped with focus lamp, and laser head is internally provided with polariscope.
In some embodiments, processing platform further includes air floating platform device or vacuum absorption device, air floating platform dress
It sets or vacuum absorption device is for carrying and fixing cell substrates and cell substrates is enable to move linearly in a second direction.
In some embodiments, air floating platform device includes the air supporting plate for several parallel arrangements being arranged in chamber portion
With the first support sliding rail on the inside of support sector, multiple stomatas, the second driving device and the first support are set on air supporting plate
Sliding rail is connected.
In some embodiments, vacuum absorption device includes the second support sliding rail being arranged in support sector, at second
It supports sliding rail and is equipped with fixing device, be equipped with multiple vacuum cups on the securing means, vacuum cup is connected with negative pressure generating device
It connects, the second driving device is connected with the second support sliding rail.
In some embodiments, further include dedusting mechanism, the dust to be formed, dedusting mechanism are eliminated for absorbing failure film layer
It is fixed at the top of processing platform.
It is a further object to provide a kind of recovery methods of thin film solar substrate battery material, use
The retracting device in any one technical solution is stated, step includes：
Cell substrates to be recycled are placed and are fixed on processing platform；
First driving means drive cell substrates straight line step motion in a second direction, and the second driving device is according to battery base
The position driving processing unit (plant) of plate along first direction straight reciprocating or
First driving means drive cell substrates straight reciprocating in a second direction, the second driving device driving processing dress
It sets along first direction step motion, to realize that cell substrates intersect and as be overlapped as possible with the movement locus of processing unit (plant), wherein
First direction and second direction are mutually perpendicular to；
In cell substrates and processing unit (plant) relative motion, control processing unit (plant) eliminates the failure film layer on cell substrates.
In some embodiments, processing unit (plant) is laser processing device, on control laser processing device alignment cell substrates
Failure film layer emit laser beam to eliminate failure film layer.
In some embodiments, processing platform further includes air floating platform device or vacuum absorption device, is put down by air supporting
Table apparatus or vacuum absorption device carry and fix cell substrates and cell substrates are moved linearly in a second direction.
In some embodiments, the dust formed when being eliminated to failure film layer by dedusting mechanism is handled and is recycled.
Advantageous effect
It according to the embodiment of the present invention, can be successfully by laser processing device and other film layer processing unit (plant)s
The failure film layer on cell substrates that are scrapping, undesirable or losing is removed by gasification or other modes, retains effective film
Layer.Since the processing size of general film layer processing apparatus is limited, driven by driving device so that cell substrates and film layer are processed
Device relative motion is processed the film layer of wide scope to realize, the mistake in film layer to eliminate cell substrates surface
Film layer is imitated, to recycle cell substrates and effective film layer thereon.
The present invention also recycles the dust containing a large amount of valuable heavy metal elements by dedusting mechanism, then can should
Dust send to profession the producer for carrying out heavy metal or noble metal recycling, is recycled, avoids to recycling element
The element of pollution environment enters in environment, solves environmental issue, and recycled the element that can be recycled.
In process, pass through the hard of the focus and energy of control laser beam, the kinetic energy of sand-blast material and hardness and scraper
Degree and motion mode, adjust corresponding technological parameter, can make after removing bad film layer, it is complete retain substrate material so that
It is again used to the plated film of process before thin-film solar cells, can save the cost of a large amount of raw material, and being brought for enterprise can
The economic benefit of sight.
Description of the drawings
Fig. 1 is the structural schematic diagram of the retracting device of the thin film solar substrate battery material of the embodiment of the present invention；
Fig. 2 shows for the structure of processing platform in the retracting device of the thin film solar substrate battery material of the embodiment of the present invention
It is intended to；
Fig. 3 be the embodiment of the present invention thin film solar substrate battery material retracting device in laser processing device knot
Structure schematic diagram；
Fig. 4 shows for the structure of dedusting mechanism in the retracting device of the thin film solar substrate battery material of the embodiment of the present invention
It is intended to；
Fig. 5 be the embodiment of the present invention thin film solar substrate battery material retracting device in air floating platform device knot
Structure schematic diagram.
Fig. 6 is vacuum absorption device in the retracting device of the thin film solar substrate battery material of the embodiment of the present invention
Schematic diagram.
Fig. 7 is retracting device cell substrates and the laser processing of the thin film solar substrate battery material of the embodiment of the present invention
Device moves schematic diagram；
Fig. 8 is the step schematic diagram of the recovery method of the thin film solar substrate battery material of the embodiment of the present invention.
Reference numeral：
1- processing platforms；2- chambers portion；3- support sectors；4- first driving means；5- laser processing devices；6- lasers；
7- laser heads；The second driving devices of 8-；9- optical fiber；10- cell substrates；11- air supporting plates；12- stomatas；13- first supports sliding rail；
14- fixing devices；15- vacuum cups；16- lead screw modules；17- fixtures；20- dedusting mechanisms；21- supporting racks；22- dust removal ports；
23- cleaning shafts；24- dust suction modules.
Specific implementation mode
To make this field that there are the personnel of general knowledge can be appreciated that the features of the present invention and effect, below sincerely with regard to specification and
The term and term referred in claim carries out general explanation and definition.Unless otherwise specified, otherwise make in text
All technologies and scientific words, the ordinary meaning all understood for the present invention with those skilled in the art, when
When having collision scenario, it should be subject to the definition of this specification.
Herein, term "comprising", " comprising ", " having ", " containing " or other any similar terms belong to open
Property conjunction (open-ended transitional phrase), be intended to cover nonexcludability include object.For example,
A composition or product containing plural element are not limited in these elements listed herein, but may also include not
Be expressly recited but the usually intrinsic other element of the composition or product.In addition to this, unless expressly stated to the contrary,
Otherwise term "or" refers to the "or" of covering property, without referring to exclusive "or".For example, following any type situation is satisfied by
Condition " A or B "：A is true (or presence) and B is pseudo- (or being not present), A is pseudo- (or being not present) and B is true (or presence), A and B
It is true (or presence).In addition, herein, the deciphering of term "comprising", " comprising ", " having ", " containing " should be regarded as having had
Body disclose and cover simultaneously " by ... formed " and closed or semi-enclosed conjunction such as " substantially by ... formed ".
Herein, for using option formula term to describe the situation of feature of present invention or example, people in the art
Member should be appreciated that the secondary group of all elements or any individual element also can be used for describing the present invention in option list.Citing and
Speech, if X be described as also indicating to be fully described out " selected from the group being made of X1, X2 and X3 " opinion that X is X1 with
X is the opinion of X1 and/or X2.Furthermore the case where for using option formula term to describe feature of the invention or example, ability
Field technique personnel should be appreciated that the secondary group of all elements or any combinations of individual element also can be used for describing in option list
The present invention.Accordingly, for example, if X is described as " selected from the group being made of X1, X2 and X3 ", and Y is described as " being selected from
In the group being made of Y1, Y2 and Y3 ", then it represents that it is fully described out that X is X1 or X2 or X3 and Y is Y1 or Y2 or Y3
Advocate.
Detailed description below is substantially only illustrative, and be not intended to the limitation present invention and application thereof.In addition, herein
It is not limited by any theory described in the aforementioned prior art or invention content or detailed description below or embodiment
System.
The present invention relates to a kind of recovery methods and retracting device of thin film solar substrate battery material, are mainly used for thin
Failure film layer on film solar substrate battery is processed, to get rid of the plated film film layer of failure, and to the film that fails
High value metals element in layer is handled and is recycled.Wherein, thin film solar substrate battery includes but not limited to copper and indium gallium
Selenium (CIGS) thin-film solar cells, cadmium telluride (CdTe) thin-film solar cells, GaAs (GaAs) thin-film solar cells,
Amorphous silicon battery, dye-sensitized cell etc..
In the present embodiment, the retracting device of thin film solar substrate battery material is carried out in conjunction with attached drawing by first detailed
Description.
As shown in Figure 1, Fig. 1 shows the structural schematic diagram of the retracting device of thin film solar substrate battery material, specifically
The retracting device on ground, the thin film solar substrate battery material includes processing platform 1, is configured to carry the electricity of processing to be processed
Pond substrate 10 with prepare the failure film layer of cell substrates 10 is processed, wherein cell substrates 10 including but not limited to
The materials such as soda-lime glass, stainless steel, polyimides (PI), can also be translucent material or non-transparent material, in cell substrates
Failure film layer is coated on 10.Shown in concrete structure combination Fig. 2 of processing platform 1, processing platform 1 has positioned at centre and is formed recessed
The chamber portion 2 in portion and support sector 3 positioned at 2 both sides of chamber portion, wherein setting first driving means 4 and processing in chamber portion 2
Device, wherein first driving means 4 are configured to driving processing unit (plant) and are moved or according to electricity along first direction progress reciprocating linear
The position of pond substrate 10 carries out stepping movement；Processing unit (plant) is configured to eliminate the failure film layer on cell substrates 10；Support sector 3 uses
In carrying and pending cell substrates 10 is made to carry out reciprocating linear movement in a second direction or according to the position of processing unit (plant)
It sets and carries out stepping movement.Herein, it should be noted that first direction and second direction are not limited, such as first direction
Can mutually it intersect at an angle with second direction.In the present embodiment, preferably, first direction is mutual with second direction
Vertically.
Further, processing unit (plant) for example can be laser processing device, sand-blasting machine or scraper, wherein laser processing
Device is acted on by transmitting laser beam and eliminates failure film layer in failure film layer in the form of by gasification；Others processing dress
It sets, such as sand-blasting machine can eliminate failure film layer by way of sandblasting, scraper can eliminate mistake by way of blade scratch layers
Imitate film layer.
In the present embodiment, as illustrated in fig. 1 and 2, processing unit (plant) uses laser processing device 5, laser processing device 5 to configure
Emit laser beam for the failure film layer on cell substrates 10 to eliminate failure film layer, wherein laser beam can act directly on
In film layer, it can also penetrate in the failure film layer that cell substrates 10 act on.
In the present embodiment, by moving laser processing device 5 and cell substrates 10 respectively in two different directions, make
The different location of the failure film layer on cell substrates 10 can be incident on by obtaining the laser beam that laser processing device 5 emits, to disappear
Except the failure film layer on cell substrates 10.In addition, in some cases, it can also be by the way that sand-blasting machine or scraper be arranged to battery base
Failure film layer on plate 10 is eliminated.
In the following, mainly for for being handled the failure film layer on cell substrates 10 by laser processing device 5 into
Row illustrates.
Specifically, with continued reference to shown in Fig. 2 and combination Fig. 3, laser processing device 5 includes being fixed at 2 bottom of chamber portion
The laser 6 and laser head 7 in portion, laser 6 are connected with laser head 7, wherein laser 6 is configured to be generated and transmitted by laser
Beam；As a preferred embodiment, powerful infrared laser, CO2 lasers, fixed laser or light may be used in laser 6
One kind in fibre laser；As it is further preferably, the wavelength of the transmitting laser of laser 6 is 1064nm, and laser
The transmission power of device 6 can adjust within the scope of 500w-1000W, and specifically, laser 6 can basis when emitting laser beam
The material for the film layer that fails on cell substrates 10 selects the absorptivity of laser different transmission powers.Laser 6 by optical fiber 9 with
Moveable laser head 7 is connected, in this way, when cell substrates 10 move, mobile laser head 7 is needed with being aligned on cell substrates 10
Want the position of failure film layer on the position of laser light incident, that is, cell substrates 10.Wherein, in order to enable laser head 7 can be just
In movement, first driving means 4 are connected with laser head 7, in this way, under the driving of first driving means 4, laser head 7 can be with
Along first direction straight reciprocating.
Further, in order to enable the energy for the laser beam being incident in the failure film layer of cell substrates 10 more gathers,
It is equipped with focus lamp (not shown) in the front of laser head 7, setting focus lamp enables to laser beam to be sent out by laser head 7
Gathered after injection and focused in the failure film layer of cell substrates 10, improves the eradicating efficacy to the film layer that fails.In addition,
Laser head 7 is internally provided with polariscope, and polariscope is configured to carry out position offset to laser beam, this is because the list that laser beam projects
A spot size is limited, can change the light direction of laser beam by polariscope, realizes and shakes the round-trip high speed of laser beam,
In this way, the processing efficiency that laser removes failure film layer can be improved by using polariscope.
As described above, under the driving of first driving means 4, laser head 7 can move linearly along first direction.Wherein,
First driving means 4 can be motor.In order to enable laser head 7 can in the chamber portion 2 along first direction straight reciprocating,
First driving means 4 are preferably linear motor either lead screw motor；Wherein, linear motor or lead screw motor are all existing skills
Common motor in art, structure do not repeat herein, as long as meeting under the driving of linear motor or lead screw motor, laser
First 7 can be along first direction straight reciprocating, naturally it is also possible to the other driving devices of selection as needed.For example,
As shown in figure 3, when first driving means 4 are using lead screw motor, the motor output shaft in lead screw motor and 16 phase of lead screw module
Connection, and lead screw module 16 is driven to rotate, laser head 7 is fixedly mounted on lead screw module 16, is exported by motor output shaft dynamic
Power drives lead screw module 16 to rotate so that laser head 7 is along first direction straight reciprocating.
When being processed to the failure film layer on cell substrates 10, mobile battery substrate 10 is needed.In order to drive battery
1 straight reciprocating in a second direction on processing platform of substrate 10 fills as shown in Fig. 2, being equipped with the second driving in support sector 3
8 are set, the second driving device 8 is configured to driving cell substrates 10 and moves linearly along the second direction different from first direction.As
A kind of preferred, the second driving device 8 can be linear motor or lead screw motor.
In order to be movably disposed cell substrates 10 in processing platform 1, processing platform 1 further include air floating platform device or
Person's vacuum absorption device, to carry cell substrates 10 and enable cell substrates 10 along the second party different from first direction
To straight reciprocating.
In one embodiment, with reference to shown in figure 1 and combination Fig. 5, when using air floating platform device carrying cell substrates 10
When, in order to enable cell substrates 10 can be stably placed in processing platform 1, air floating platform device includes in chamber portion 2
The air supporting plate 11 for several parallel arrangements being arranged, is arranged multiple stomatas 12, positioned at 2 both sides of chamber portion on air supporting plate 11
Inside setting the first support sliding rail 13 of support sector 3, cell substrates 10 are connected by fixture 17 with the first support sliding rail 13, electricity
Pond substrate 10 is supported by the first support 13 gentle kickboard 11 of sliding rail in processing and can be along the first support sliding rail 13
Air supporting plate 11 is arranged the lower section of cell substrates 10, is exported by stomata 12 by external gas compressing equipment by linear movement
Compressed gas, to jack up cell substrates 10, at this point, the both sides of cell substrates 10 are supported by the first support sliding rail 13.Make
To be a kind of preferred, cell substrates 10 can be jacked up by about 0.1-0.2mm by air supporting plate 11, to reduce cell substrates 10 in height
Friction in speed movement between processing platform 1.Second driving device 8 is connected with the first support sliding rail 13, is driven by second
Dynamic device 8, it is final to drive the straight reciprocating in a second direction of cell substrates 10 to drive the first support sliding rail 13 to move.
In another embodiment, with reference to shown in figure 1 and combination Fig. 6, when using vacuum absorption device carrying cell substrates
When 10, in order to enable cell substrates 10 can be stably placed on processing platform 1, it is equipped with the second support in support sector 3 and slides
Rail (not shown) is equipped with fixing device 14 on the second support sliding rail, multiple vacuum cups is equipped in fixing device 14
15, vacuum cup 15 is connected with external negative pressure generating device, and cell substrates 10 are placed in fixing device 14 and by true
Suction disk 15 is sucked.More specifically, it when cell substrates 10 being positioned on vacuum cup 15, is connected by vacuum cup 15 negative
Generation device is pressed, to form negative pressure between vacuum cup 15 and the surface of cell substrates 10, to inhale cell substrates 10
It is attached to be fixed in fixing device 14.Second driving device 8 is connected with the second support sliding rail, by the second driving device 8 to
The second support sliding rail movement is driven, it is final to drive the straight reciprocating in a second direction of cell substrates 10.
Due to after being processed to the failure film layer on cell substrates 10, what failure film layer generated after being eliminated by laser beam
Heavy metals or the precious metal elements such as copper, indium, gallium, selenium, molybdenum, silver, gold may be contained in dust, it is therefore desirable to these metals member
Element is handled and is recycled.
It referring to Fig.1 and combines shown in Fig. 4, the retracting device for the thin film solar substrate battery material that the present embodiment is related to is also
Including dedusting mechanism 20, the dust to be formed is eliminated for absorbing the failure film layer, dedusting mechanism 20 is fixed by supporting rack 21
It is arranged in the top of processing platform 1, the concrete structure of dedusting mechanism 20 is with reference to shown in Fig. 4, and specifically, dedusting mechanism 20 includes removing
Dirt mouth 22, dedusting fan and dust suction module 24, wherein dust removal port 22 is fixed on supporting rack 21 and and first driving means
4 are connected, and dust removal port 22 is connected by cleaning shaft 23 with dedusting fan, and dust removal port 22 is configured to the driving in dedusting fan
Under the dust for generation of gasifying in process is absorbed, dust suction module 24 is connected with cleaning shaft, and dust suction module 24 is matched
It is set to the dust that storage absorbs, in this way, the dust sucked by dust removal port 22 is delivered to dust suction module by dust sucting pipeline 23
It is recycled in 24.
Wherein, dust removal port 22 is with first driving means 4 by being connected, so as to 7 synchronizing moving of laser head.Example
Such as, when first driving means 4 are using lead screw motor, dust removal port 22 is arranged on the lead screw module of lead screw motor and passes through lead screw
Motor drives, to be moved synchronously with laser 7, in this way, it is vaporized simultaneously in failure film material, it is generated in gasification
Dust can be absorbed at any time by suction inlet 22, the pollution to environment will not be caused, can also recycle metallic dust in time.
The failure film layer in thin-film solar cell substrate can be processed using above-mentioned retracting device, to
It gets rid of failure film layer and the metallic element in failure film layer is recycled, specifically, according to solar cell substrate surface
Failure film layer situation, such as fail film layer thickness, material etc. adjusts the operating parameter of laser aid, such as the angle of laser aid
Degree, power emit laser beam, transient evaporation cell substrates by failure film layer of the laser processing device 5 on cell substrates 10
Plated film failure film layer on 10, and by dedusting mechanism 20, the dust containing a large amount of metallic elements is handled and collected, it is right
Recycling metallic element is recycled, and is avoided metallic element from entering and is caused environmental pollution in environment.
In conjunction with Fig. 8, the present invention recycles thin film solar substrate battery material by above-mentioned retracting device, recycling side
The step of method, is as follows：
Cell substrates 10 are placed on processing platform 1 by S1；Specifically, pass through air floating platform device or vacuum suction
Device so that cell substrates 10 are movably disposed on processing platform 1；
S2 makes 10 straight reciprocating of cell substrates, according to the position of substrate battery 10 in a second direction in processing platform 1
Driving processing unit (plant) is moved along first direction stepping；Or make processing unit (plant) straight line past in 1 upper edge first direction of processing platform
Multiple mobile, drive substrate battery 10 in a second direction move by stepping；Wherein, preferably, first direction and second direction are mutual
Vertically；Specifically, wherein first way is arranged by air floating platform device or vacuum absorption device on processing platform 1
Cell substrates 10, and driven by the second driving device 8 and make the straight reciprocating in a second direction of cell substrates 10, according to electricity
The position of pond substrate 10 drives the laser head 7 in processing unit (plant), such as driving laser processing device 5 by first driving means 4
Stepping is carried out along first direction to move, and sand-blasting machine or scraper is either driven to handle failure film layer；The second way is
The laser head 7 in processing unit (plant), such as laser processing device is driven to be moved along first direction linear reciprocation by first driving means 4
It is dynamic, and driven by the second driving device 8 according to the position of laser head 7 and so that cell substrates 10 in a second direction move by stepping,
Sand-blasting machine or scraper can also be driven to handle failure film layer；In this way, realizing the failure for large-size substrate battery
Film layer is processed.Wherein it is possible to the output rotating speed and power of first driving means 4 or the second driving device 8 be adjusted, to adjust
The movement velocity of whole laser head 7 or cell substrates 10, such as CIGS batteries, can say that the speed of laser head 7 is adjusted to
100-200m/s。
S3, control processing unit (plant) eliminate the failure film layer on cell substrates 10；Wherein processing unit (plant) is in addition to laser processing device
5 are set, can also be sand-blasting machine or scraper, as long as failure film layer can be eliminated；
When processing unit (plant) uses laser processing device 5, control laser processing device 5 is directed at the failure on cell substrates 10
Film layer emits laser beam；Wherein, laser beam can act directly in failure film layer, can also penetrate what cell substrates 10 acted on
In the film layer that fails；In this way, generating laser beam by laser 6 and being launched by laser head 7, it is focused by focus lamp,
Make focal point in the failure film layer on cell substrates 10, since the material of plated film failure film layer is for certain specified wavelengths
Laser beam there is good absorptivity, the plated film film layer that fails absorbs the high-energy of laser beam, to by transient evaporation；Wherein,
According to failure film material by adjust the polariscope in laser 6, laser head 7, focus lamp and laser head 7 can control it is sharp
Focus, energy accumulating and the relevant characterization parameter of light beam so that laser beam can be on the pending cell substrates of transient evaporation 10
Failure film layer, in this way, the cell substrates 10 as substrate material can be saved as well next time progress plated film behaviour
It prepares, meanwhile, progress coating operation again can be used again by the obtained dust that gasifies, to reduce raw material
Waste, reduce production cost, bring economic benefit.
In addition, when using other processing unit (plant)s, such as when sandblasting or scraper, by control sand-blast material kinetic energy and
The hardness and motion mode of hardness and scraper, adjust corresponding technological parameter, can removing undesirable failure film layer
Afterwards, completely retain substrate material so that it is again used to the plated film of process before thin-film solar cells, can also save a large amount of
The cost of raw material brings considerable economic benefit for enterprise；
S4 is handled and is recycled to the dust after processing by dedusting mechanism 20；Specifically, by dedusting mechanism 20
Dust removal port 22 suck dust, and dust is delivered in dust suction module 24 by dust sucting pipeline 23 and is recycled.
Embodiment of above be substantially only aid in illustrating, and be not intended to limit application target embodiment or these
The application of embodiment or purposes.Herein, term " illustrative " representative " as an example, example or explanation ".Herein
Any illustrative implementation form can not necessarily be read as other implementation forms being preferred or advantageously.
In addition, although proposing at least an exemplary embodiments or comparative example in aforementioned embodiments, it will be appreciated that this
A large amount of variation still may be present in invention.It is equally understood that embodiment as described herein is not intended to in any manner
Limit range, purposes or the configuration of requested application target.Opposite, aforementioned embodiments can provide this field with general
A kind of notice guide of simplicity of knowledge personnel is to implement one or more embodiments.Furthermore function that can be to element and row
Row carry out the range that various change is defined without departing from claim, and claim includes known equipollent
And it is all it is contemplated that equipollent when present application for patent is filed an application.
Claims (12)
1. a kind of retracting device of thin film solar substrate battery material, including processing platform (1), processing unit (plant), the first driving
Device (4) and the second driving device (8), wherein
The processing platform (1) includes being located at centre simultaneously for carrying cell substrates to be processed (10), the processing platform (1)
Form the chamber portion (2) of recess portion and the support sector (3) positioned at chamber portion (2) both sides；
The processing unit (plant) is set to the chamber portion (2) inside, and the processing unit (plant) is for eliminating the cell substrates (10)
Failure film layer；It is internal that the first driving means (4) are set to the chamber portion (2)；
The first driving means (4) for drive the processing unit (plant) along first direction carry out straight reciprocating or according to
The position of the cell substrates (10) carries out stepping movement；
Second driving device (8) is set in the support sector (3), and second driving device (8) is for driving the electricity
Pond substrate (10) carries out straight reciprocating or carries out stepping movement according to the position of the processing unit (plant) in a second direction.
2. the retracting device of thin film solar substrate battery material according to claim 1, which is characterized in that described first
Direction is mutually perpendicular to the second direction.
3. the retracting device of thin film solar substrate battery material according to claim 2, which is characterized in that the processing
Device is laser processing device (5), for emitting laser beam to the failure film layer to eliminate the failure film layer, the laser
Processing unit (plant) (5) includes laser (6) and the laser head (7) being connected with the laser (6), the first driving means
(4) it is connected with the laser head (7).
4. the retracting device of thin film solar substrate battery material according to claim 3, which is characterized in that described to swash
The front of bare headed (7) is equipped with focus lamp, and the laser head (7) is internally provided with polariscope.
5. the retracting device of thin film solar substrate battery material according to claim 1 or 2, which is characterized in that described
Processing platform (1) further includes air floating platform device either the vacuum absorption device air floating platform device or vacuum suction dress
It sets for carrying and fixing the cell substrates (10) and so that the cell substrates (10) can be along the second direction straight line
It is mobile.
6. the retracting device of thin film solar substrate battery material according to claim 5, which is characterized in that the air supporting
Stage apparatus is included in the air supporting plate (11) for several parallel arrangements being arranged in the chamber portion (2) and is located at the support sector
(3) the first support sliding rail (13) on the inside of, is arranged multiple stomatas (12), second driving device on the air supporting plate (11)
(8) it is connected with the first support sliding rail (13).
7. the retracting device of thin film solar substrate battery material according to claim 5, which is characterized in that the vacuum
Adsorbent equipment is included in the second support sliding rail being arranged in the support sector (3), is equipped with and fixes on the second support sliding rail
Device (14), is equipped with multiple vacuum cups (15) in the fixing device (14), and the vacuum cup (15) generates with negative pressure
Device is connected, and second driving device (8) is connected with the second support sliding rail.
8. the retracting device of thin film solar substrate battery material according to claim 1 or 2, which is characterized in that also wrap
Dedusting mechanism (20) is included, eliminates the dust to be formed for absorbing the failure film layer, the dedusting mechanism (20) is fixed at
The top of the processing platform (1).
9. a kind of recovery method of thin film solar substrate battery material uses returning described in any one of claim 1-8
Receiving apparatus, step include：
Cell substrates (10) to be recycled are placed and are fixed on the processing platform (1)；
The first driving means (4) drive the cell substrates (10) straight line step motion in a second direction, and described second drives
Dynamic device (8) drive the processing unit (plant) along first direction straight reciprocating according to the position of the cell substrates (10) or
The first driving means (4) drive the cell substrates (10) straight reciprocating in a second direction, and described second drives
Dynamic device (8) drives the processing unit (plant) along first direction step motion, to realize the cell substrates (10) and the processing
The movement locus of device intersects and is overlapped as far as possible, wherein the first direction and the second direction are mutually perpendicular to；
The processing unit (plant), which is controlled, in the cell substrates (10) and the processing unit (plant) relative motion eliminates the battery base
The failure film layer on plate (10).
10. the recovery method of thin film solar substrate battery material according to claim 9, which is characterized in that described to add
Tooling is set to laser processing device (5), controls the mistake that the laser processing device (5) is aligned on the cell substrates (10)
It imitates film layer and emits laser beam to eliminate the failure film layer.
11. the recovery method of thin film solar substrate battery material according to claim 9, which is characterized in that described to add
Work platform (1) further includes that either vacuum absorption device passes through the air floating platform device or vacuum suction to air floating platform device
Device carries and fixes the cell substrates (10) and the cell substrates (10) can be moved along the second direction straight line
It is dynamic.
12. the recovery method of thin film solar substrate battery material according to claim 9, which is characterized in that pass through institute
The dust formed when dedusting mechanism (20) eliminates the failure film layer is stated to be handled and recycled.
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| CN201810811267.7A CN108807602A (en) | 2018-07-23 | 2018-07-23 | A kind of retracting device and recovery method of thin film solar substrate battery material |
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| CN114505302A (en) * | 2022-03-07 | 2022-05-17 | 华工法利莱切焊系统工程有限公司 | Laser cleaning device and cleaning method for blue membrane of new energy battery |
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