CN108807071B - plane multilayer inertia switch - Google Patents
plane multilayer inertia switch Download PDFInfo
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- CN108807071B CN108807071B CN201810543393.9A CN201810543393A CN108807071B CN 108807071 B CN108807071 B CN 108807071B CN 201810543393 A CN201810543393 A CN 201810543393A CN 108807071 B CN108807071 B CN 108807071B
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- planar
- spring
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- multilayer
- shell
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H35/00—Switches operated by change of a physical condition
- H01H35/14—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch
- H01H35/141—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H35/00—Switches operated by change of a physical condition
- H01H35/14—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch
- H01H35/146—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch operated by plastic deformation or rupture of structurally associated elements
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- Switches Operated By Changes In Physical Conditions (AREA)
- Micromachines (AREA)
Abstract
The invention discloses a planar multilayer inertia switch which comprises a shell (4), a partition plate (3), a spring mass block (1) and electrode components (2), wherein the partition plate (3) is arranged in a groove (402) in a matched mode, the spring mass block (1) comprises a planar spring (101), a mass block (102) and a cylinder (103), the electrode components (2) are arranged in through holes in the partition plate (3), a lead (203) is welded to the groove of each electrode component (2), and the lead (203) penetrates through the through hole (405) of the shell (4). According to the planar multilayer inertia switch, when the inertia switch senses external acceleration, the spring mass block is in contact with the electrode component along the sensitive direction of the spring mass block, so that the external circuit is switched on and off, and switching under different overload threshold values can be realized by adjusting spring parameters, the distance between the spring mass block and the electrode component and other measures.
Description
Technical Field
The invention belongs to the technical field of inertial switches, and particularly relates to a planar multilayer inertial switch.
background
the inertial switch is also called inertial closer or G switch, and is an important inertial device for sensing acceleration in space flying body, and its basic working principle is that a spring (or cantilever beam) is connected with suspended mass block as movable electrode, and under the action of external acceleration it can quickly move along its sensitive direction, and can be collided with fixed electrode, so that the on-off of external circuit can be implemented. It is required to quickly close a conducting circuit after sensing a threshold acceleration signal and to simultaneously ensure the closing time of a switch and contact reliability of a contact. In some products, in order to prevent accidental impact, self-locking is required to be realized after the switch is closed, and the continuous and stable power connection of the switch is ensured so as to ensure the stable work of a power supply and a load circuit.
the existing inertial switch adopts a spring and mass block structure, the spring and the mass are used as movable electrodes, and fixed electrodes which are separated from the movable electrodes by a certain distance are additionally arranged, when the movable electrodes are overloaded, the spring extends, and the mass block collides with the fixed electrodes, so that the switch is switched from off to on, and after the mass block collides with the fixed electrodes, the mass block of the inertial switch is bounced off, so that the closing time and contact of the inertial switch are unreliable.
The micro-electromechanical (MEMS) inertial switch is an acceleration sensor manufactured by adopting a micro-processing technology, and an inertia sensitive element is utilized to convert acceleration load into the change of an electrode gap, and then a corresponding electric signal is triggered through the contact state between electrodes to realize the function of distinguishing an acceleration signal. Due to the advantages of small volume, light weight, low energy consumption, strong high overload resistance, strong electromagnetic interference resistance, convenience for integration with a digital circuit and the like, the MEMS inertial switch has great application potential in the fields with harsh environmental requirements such as industrial vibration detection, weapons and ammunition, aerospace and the like.
Most of the existing inertial switches are single-threshold inertial switches, but in application environments where different accelerations need to be distinguished, such as fuze target identification and earthquake monitoring, the use of the single-threshold switches is limited, the acceleration sensors cannot meet the requirement of low power consumption, and the multi-threshold switches become the first choice.
Disclosure of Invention
The invention provides a planar multilayer inertia switch aiming at the defects or the improvement requirements of the prior art, and aims to provide a planar multilayer inertia switch, wherein a groove of a shell is correspondingly provided with a clapboard in a matched manner and is separated by a certain gap, a spring mass block is arranged in the gap, cylinders at two ends of the spring mass block are respectively connected with a left small blind hole and a right small blind hole on the shell, a large blind hole is arranged in a square groove of the shell, through holes with the same size are arranged at corresponding positions on the clapboard, an electrode part is arranged in the through holes, and a lead of the electrode part penetrates through the through holes of the. When the inertial switch senses external acceleration, the spring mass block is in contact with the electrode component along the sensitive direction of the spring mass block, so that the external circuit is switched on and off. And the integrated design of the spring mass block is adopted, and the switching conversion under the conditions of different overload thresholds can be realized by measures of adjusting the spring parameters, the distance between the spring mass block and the electrode component and the like.
In order to achieve the purpose, the invention provides a planar multilayer inertia switch, which comprises a shell, a groove arranged in the shell, a plurality of small blind holes and large blind holes arranged on the shell, a partition plate, a spring mass block and an electrode component, wherein the partition plate is arranged on the shell;
The partition board is matched with the groove and is of a drawer-shaped multilayer structure, and through holes corresponding to the large blind holes are formed in the partition board;
The spring mass block comprises a planar spring, a mass block and a cylinder, two ends of the mass block are respectively connected with one planar spring, the other end of each planar spring is respectively connected with the cylinder, and the two cylinders are respectively connected with the small blind holes;
The electrode parts are arranged in the through holes in the partition plate, a lead is welded to the groove of each electrode part and penetrates through the through hole of the shell, and the spring mass block is in touch connection with the electrode parts along the sensitive direction of the spring mass block so as to realize the on-off of an external circuit.
Furthermore, two ends of the mass block are respectively connected with an S-shaped planar spring, and the central axis of the planar spring and the central axis of the mass block form an included angle of 30-60 degrees.
Further, the electrode part comprises a cylinder, and the cylinder is of a step-shaped structure.
Further, the electrode part comprises a metal ring, and the inner diameter of the metal ring is larger than the outer diameter of the groove of the cylinder.
Further, the cylinder is made of an insulating non-metallic material.
Further, the metal ring is made of elastic beryllium bronze materials.
Further, the sprung mass is disposed in a gap of the diaphragm.
Further, the spring mass block is prepared by micro machining of multiple-lamination electroplated metal nickel.
further, the separator is made of an insulating material with a smooth surface.
In general, compared with the prior art, the above technical solution contemplated by the present invention can achieve the following beneficial effects:
(1) the invention relates to a plane multilayer inertia switch.A groove of a shell is correspondingly provided with a clapboard in a matching way and is separated by a certain gap, a spring mass block is arranged in the gap, cylinders at two ends of the spring mass block are respectively connected with a left small blind hole and a right small blind hole on the shell, a large blind hole is arranged in a square groove of the shell, through holes with the same size are arranged at corresponding positions on the clapboard, an electrode part is arranged in the through holes, and a lead of the electrode part passes through the through holes of the shell. When the inertial switch senses external acceleration, the spring mass block is in contact with the electrode part along the sensitive direction of the inertial switch, so that the on-off of an external circuit is realized, and the switching conversion under different overload threshold values can be realized.
(2) According to the planar multilayer inertia switch, the spring mass block is used as a core component of the planar multilayer inertia switch, and the planar multilayer inertia switch is manufactured by adopting a micro-processing method of multi-time laminated electroplating of metal nickel (Ni), so that the volume of the whole mechanism is greatly reduced, and the consistency of the product quality is improved.
(3) According to the planar multilayer inertia switch, the grooves of the shell are correspondingly provided with the partition plates in a matched manner, and the unique design of a drawer-shaped multilayer structure is adopted, so that the planar multilayer inertia switch can be switched on and off in multiple ways, the spring mass blocks of each layer are subjected to different parameter designs, the closing of different thresholds can be realized, and the space is fully utilized.
(4) According to the planar multilayer inertia switch, the spring mass block is used as a core component of the planar multilayer inertia switch, and the planar multilayer inertia switch is manufactured by adopting a micro-processing method of multi-time laminated electroplating of metal nickel (Ni), so that the volume of the whole mechanism is greatly reduced, and the consistency of the product quality is improved.
drawings
FIG. 1 is an exploded view of a planar multilayer inertial switch according to an embodiment of the invention;
Fig. 2 is a schematic structural diagram of a proof mass of a planar multilayer inertial switch according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a planar multilayer inertial switch electrode assembly according to an embodiment of the present invention;
Fig. 4 is a schematic view of the overall structure of a housing of a planar multilayer inertial switch according to an embodiment of the present invention;
FIG. 5 is a front view of a housing of a planar multilayer inertial switch according to an embodiment of the invention;
Fig. 6 is a top view of a housing of a planar multilayer inertial switch according to an embodiment of the invention.
In all the figures, the same reference numerals denote the same features, in particular: 1-spring mass block, 101-planar spring, 102-mass block, 103-cylinder, 2-electrode component, 201-cylinder, 202-metal ring, 203-lead, 3-baffle, 4-shell, 401-square groove, 402-groove, 403-small blind hole, 404-large blind hole and 405-through hole.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Fig. 1 is an exploded view of a planar multilayer inertial switch according to an embodiment of the present invention, and as shown in fig. 1, the planar multilayer inertial switch includes spring masses 1, two electrode members 2, spacers 3, and a housing 4. The partition board 3 is made of an insulating material with a smooth surface, and two through holes are formed in the partition board. The invention relates to a plane multilayer inertia switch.A groove of a shell is correspondingly provided with a clapboard in a matching way and is separated by a certain gap, a spring mass block is arranged in the gap, cylinders at two ends of the spring mass block are respectively connected with a left small blind hole and a right small blind hole on the shell, a large blind hole is arranged in a square groove of the shell, through holes with the same size are arranged at corresponding positions on the clapboard, an electrode part is arranged in the through holes, and a lead of the electrode part passes through the through holes of the shell. When the inertial switch senses external acceleration, the spring mass block is in contact with the electrode component along the sensitive direction of the spring mass block, so that the external circuit is switched on and off. And the integrated design of the spring mass block is adopted, and the switching conversion under the conditions of different overload thresholds can be realized by measures of adjusting the spring parameters, the distance between the spring mass block and the electrode component and the like.
Fig. 2 is a schematic diagram of a spring mass structure of a planar multi-layer inertial switch according to an embodiment of the present invention, and as shown in fig. 1 and fig. 2, a planar multi-layer inertial switch spring mass 1 includes a planar spring 101, a mass 102, and a cylinder 103. Two ends of the mass block 102 are respectively connected with an S-shaped planar spring 101, the two S-shaped planar springs 101 are symmetrically distributed along the mass block 102, and the central axis of the planar spring 101 and the central axis of the mass block 102 form an included angle of 30-60 degrees. One end of each of the two S-shaped planar springs 101 is connected with the mass block 102, the other end of each of the two S-shaped planar springs is connected with the cylinder 103, the design of the spring mass block is integrated, and switching under different overload threshold values can be achieved by adjusting spring parameters, distances between the spring mass block and the electrode parts and other measures.
furthermore, the spring mass block 1 is manufactured by adopting a micro-processing process method of multi-lamination electroplating of metal nickel (Ni), so that the volume of the whole mechanism is greatly reduced, the consistency of the product quality is improved, and the main manufacturing process of the spring mass block 1 is as follows:
a) Sputtering Cr/Cu on a glass substrate to be used as a seed layer, spin coating, photoetching, and electroplating metal Ni to be used as two S-shaped springs 101, a mass block 102 and a cylinder 103;
b) repeating the electroplating process for multiple times until the spring mass block 1 reaches the designed thickness;
c) And the photoresist and seed layer are removed to release the spring mass block 1.
As shown in fig. 3, the electrode part 2 of a planar multilayer inertial switch includes a cylinder 201, a plurality of metal rings 202, and a conductive wire 203. The cylinder 201 is stepped, each metal ring 202 is embedded in a corresponding groove of the stepped cylinder 201, so that each metal ring 202 is separated from each other by the cylinder 201, and the inner diameter of the metal ring 202 is larger than the outer diameter of the groove of the stepped cylinder 201, so that a certain gap is formed between the metal ring 202 and the groove of the stepped cylinder 201 on which the metal ring 202 is placed. A lead 203 is welded to the groove of each metal ring 202. The cylinder 201 is made of insulating nonmetal materials, the metal ring 202 is made of beryllium bronze materials with good elasticity, and due to the fact that a gap is formed between the metal ring and the groove for placing the metal ring, when the spring mass block collides with the metal ring, the metal ring has a variable space, the situation that the spring mass block collides with the metal ring to rebound is avoided, and the contact time of the spring mass block and the metal ring is prolonged.
As shown in fig. 4, the housing overall structure 4 of the planar multilayer inertial switch comprises a square groove 401, a groove 402, a small blind hole 403, a large blind hole 404 and a through hole 405. As shown in fig. 4-6, the housing 4 is a rectangular parallelepiped structure made of a non-conductive insulating material, a square groove 401 is formed inside the housing 4, a plurality of grooves 402 are formed in the inner side surface of the housing 4 at a certain distance, and the partition board 3 is placed in the grooves 402 in a matching manner. The left side and the right side of the square groove 401 are symmetrically distributed with two small blind holes 403 respectively, the two cylinders 103 on the spring mass block 1 are arranged in the two symmetrical small blind holes 403 in a matching way respectively, the bottom of the square groove 401 is provided with two large blind holes 404, and one side of each groove 402 on one side of the square groove 401 is also provided with a through hole 405. The groove of the shell is correspondingly provided with the partition board in a matched manner, and the special design of a drawer-shaped multilayer structure is adopted, so that the multi-path on-off can be realized, the closing of different thresholds can be realized by designing different parameters of the spring mass block on each layer, and the space is fully utilized.
a planar multilayer inertial switch comprises the following working processes:
In normal operation, the two electrode members 2 are spaced apart from each other and spaced apart from the spring mass 1, and the switch is in an off state. When the spring mass block 1 of each layer is overloaded, the spring mass block 1 of each layer overcomes the resistance force of the spring 101 to move until the mass block 102 is contacted with the metal rings 202 in the two electrode parts 2 on the layer, at the moment, the two electrode parts 2 are switched on from off, and the special design of the drawer-shaped multilayer structure is adopted, so that the invention can realize multi-path on-off, and the spring mass block of each layer is subjected to different parameter designs, so that the closing of different thresholds can be realized, and the space is fully utilized.
it will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (9)
1. A planar multilayer inertia switch comprises a shell (4), a groove (402) arranged in the shell (4), and a small blind hole (403) and a large blind hole (404) which are arranged on the shell (4), and is characterized by further comprising a partition plate (3), a spring mass block (1) and an electrode component (2);
The partition plate (3) is arranged in the groove (402) in a matched manner, the partition plate (3) is of a drawer-shaped multilayer structure, and a through hole corresponding to the large blind hole (404) is formed in the partition plate;
The spring mass block (1) comprises a planar spring (101), a mass block (102) and first cylinders (103), two ends of the mass block (102) are respectively connected with the planar spring (101), the other end of the planar spring (101) is respectively connected with the first cylinders (103), and the two first cylinders (103) are respectively connected with the small blind holes (403);
the electrode component (2) is arranged in a through hole in the partition plate (3), a lead (203) is welded at the groove of the electrode component (2), the lead (203) penetrates through the through hole (405) of the shell (4), and the spring mass block (1) is in collision connection with the electrode component (2) along the motion direction of the spring mass block to realize the on-off of an external circuit.
2. The planar multilayer inertial switch of claim 1, wherein an S-shaped planar spring (101) is connected to each end of the mass (102), and an included angle of 30-60 ° is formed between a central axis of the planar spring (101) and a central axis of the mass (102).
3. A planar multilayer inertial switch according to claim 1, characterised in that the pole part (2) comprises a second cylinder (201), the second cylinder (201) being of stepped configuration.
4. A planar multilayer inertial switch according to claim 3, characterized in that the pole part (2) comprises a metal ring (202), and in that the inner diameter of the metal ring (202) is greater than the outer diameter of the recess of the second cylinder (201).
5. a planar multilayer inertial switch according to claim 4, characterised in that the second cylinder (201) is made of non-metallic insulating material.
6. A planar, multilayer inertial switch according to claim 4, characterized in that the metal ring (202) is made of elastic beryllium bronze material.
7. a planar multilayer inertial switch according to claim 1, characterized in that the sprung mass (1) is disposed in the gap of the diaphragm (3).
8. a planar multilayer inertial switch according to claim 1 or 7, characterized in that the proof-mass (1) is prepared by micromachining processes of multiple-stack electroplated metallic nickel.
9. a planar multilayer inertial switch according to claim 1, characterised in that the spacer (3) is made of insulating material with smooth surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810543393.9A CN108807071B (en) | 2018-05-31 | 2018-05-31 | plane multilayer inertia switch |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810543393.9A CN108807071B (en) | 2018-05-31 | 2018-05-31 | plane multilayer inertia switch |
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| Publication Number | Publication Date |
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| CN108807071A CN108807071A (en) | 2018-11-13 |
| CN108807071B true CN108807071B (en) | 2019-12-17 |
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| CN113161197B (en) * | 2021-04-12 | 2022-04-26 | 四川九洲电器集团有限责任公司 | Universal inertial switch with adjustable threshold value and closing method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7159442B1 (en) * | 2005-01-06 | 2007-01-09 | The United States Of America As Represented By The Secretary Of The Navy | MEMS multi-directional shock sensor |
| CN106024507A (en) * | 2016-07-12 | 2016-10-12 | 上海交通大学 | Electrostatic locking vertical sensitive micromechanical inertial switch |
| CN206194639U (en) * | 2016-11-18 | 2017-05-24 | 中国工程物理研究院电子工程研究所 | Little inertia switch of Z type girder construction |
| CN107015025A (en) * | 2017-05-12 | 2017-08-04 | 北京航空航天大学 | A kind of differential type graphene resonance beam acceleration transducer |
| CN107359057A (en) * | 2016-05-09 | 2017-11-17 | 南京理工大学 | A kind of universal inertia switches of MEMS in recognizable load orientation section |
-
2018
- 2018-05-31 CN CN201810543393.9A patent/CN108807071B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7159442B1 (en) * | 2005-01-06 | 2007-01-09 | The United States Of America As Represented By The Secretary Of The Navy | MEMS multi-directional shock sensor |
| CN107359057A (en) * | 2016-05-09 | 2017-11-17 | 南京理工大学 | A kind of universal inertia switches of MEMS in recognizable load orientation section |
| CN106024507A (en) * | 2016-07-12 | 2016-10-12 | 上海交通大学 | Electrostatic locking vertical sensitive micromechanical inertial switch |
| CN206194639U (en) * | 2016-11-18 | 2017-05-24 | 中国工程物理研究院电子工程研究所 | Little inertia switch of Z type girder construction |
| CN107015025A (en) * | 2017-05-12 | 2017-08-04 | 北京航空航天大学 | A kind of differential type graphene resonance beam acceleration transducer |
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