CN108754406A - A kind of die surface compounding method - Google Patents
A kind of die surface compounding method Download PDFInfo
- Publication number
- CN108754406A CN108754406A CN201810661772.8A CN201810661772A CN108754406A CN 108754406 A CN108754406 A CN 108754406A CN 201810661772 A CN201810661772 A CN 201810661772A CN 108754406 A CN108754406 A CN 108754406A
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- Prior art keywords
- nitriding
- die surface
- workpiece
- treatment
- compounding method
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/24—Nitriding
- C23C8/26—Nitriding of ferrous surfaces
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
- C23C8/38—Treatment of ferrous surfaces
Abstract
The present invention relates to a kind of die surface compounding methods.Gas nitriding or ion nitriding method is used to carry out Nitrizing Treatment in die surface first, then carrying out vacuum deposition in nitride layer surface, there is the superhard coating of amorphous nano-crystalline coupled structure, the nitride hard coating to have good Lattice Matching and high-bond with the nitride layer that nitrogen treatment is formed.The compounding method can construct the nitride layer of super thick in die surface, be remarkably improved the surface abrasion resistance of mold, extend the service life of mold.The hard coat prepared simultaneously is regulated and controled by constituent structure, can reduce mold surface roughness, is applied with excellent anti-molten aluminum adhesion effect for aluminium alloy molding die.
Description
Technical field
The present invention relates to field of metal surface treatment technology, are related to a kind of die surface compounding method, are suitable for machine
Tool is processed and parts are molded various die steel iron materials.
Background technology
Equipment manufacture just develops towards high speed, high load, high-accuracy and green processing direction at present, to equipping critical component
The mold of processing is also put forward higher requirements, it is desirable that mold has higher intensity, the longer service life, bright and clean to die surface
Degree and stripping result are it is also proposed that more stringent requirement.It is to improve mold matter to develop high-end die surface strengthening and guard technology
Amount extends service life and improves the key technology of its reliability.Membrane structure prepared by physical vapour deposition (PVD) is fine and close, has height
The characteristics of hardness and high film-substrate cohesion, but the film of physical vapour deposition (PVD) is difficult to prepare thick film.It is accordingly used in high speed and high load
The surfacecti proteon of mold is easy to fail.Although ionic nitriding can form the nitride layer that thickness is hundreds of microns, the nitrogen
The hardness for changing layer is not high, is less than 1200HV more.Ionic nitriding and vacuum coating are combined, may be implemented to prepare hardness gradient change
The surface modification layer for changing super thick can meet high speed and the high active demand for carrying die surface strengthening.
Patent of invention content
It is a primary object of the present invention in order to overcome deficiency in the prior art, provide a kind of die surface combined processing
Method, the workpiece prepared by the composite surface treatment method are remarkably improved the wear-resisting property of mold, extend the use of workpiece
In the service life, this method is suitable for mechanical processing and parts are molded various die steel iron materials.
The technical solution that patent of the present invention solves above-mentioned technical problem is as follows：
A kind of die surface compounding method, it is characterised in that：Include the following steps：
(1) surface degreasing processing of rust removing is carried out to mold；
(2) nitrogen treatment is carried out to mold, nitrogen treatment can select gas nitriding or ion nitriding technology to be handled；
(3) after taking out step (2) gas nitriding treated workpiece, sandblasting and cleaning treatment are carried out to surface, then
It is put into vacuum coating equipment and carries out deposition hard nitride film；Or by the workpiece after ion Plasma Nitriding Treatment immediately in Vacuum Deposition
In-situ deposition film processing is carried out in film room；Wherein coating process parameter is that back end vacuum is less than 5 × 10-3Pa, depositing temperature
350-450 DEG C, sedimentation time 2-8h, 2-5 μm of thicknesses of layers, film hardness 20-40Gpa；
(4) workpiece after vacuum coating cools to 200 DEG C or less taking-ups with the furnace.
Preferably, the gas nitriding treatment process described in step (2) includes：Pending workpiece through over cleaning air-dry after,
It is fitted into gas nitriding furnace；Nitriding furnace is evacuated to back end vacuum and is less than 6 × 10-3After Pa, it is filled with nitrogenous gas in stove, gas in stove
Voltage-controlled system is in 0.05-0.15MPa；Heat-treatment furnace is warming up to 450-600 DEG C, carries out Nitrizing Treatment, nitriding time 1-8h, after nitriding
Sample furnace cooling to get nitrogen treatment die workpiece.
Preferably, the nitrogenous gas includes any one in nitrogen, ammonia, can also be appropriate wherein in nitrogenous gas
Mixed with gases such as hydrogen or argon gas to improve nitrogenizing effect.
Preferably, the ion nitriding technology described in step (2) includes：Ionic nitriding back end vacuum is less than 5 × 10-3After Pa,
Nitrogenous gas is filled in stove, ionic nitriding pressure control applies back bias voltage 500-1000V in 100-150Pa, workpiece, generates aura
Plasma；It is 450-600 DEG C that ionic nitriding temperature, which is arranged, nitriding time 1-8h.
Preferably, the nitrogenous gas includes any one in nitrogen, nitrogen argon mixture gas, the nitrogen of hydrogen loading, ammonia.
Preferably, the workpiece negative bias voltage source is direct current, pulse or radio-frequency power supply；Nitride thickness is can be controlled in
0.02-0.05mm。
Preferably, step (3) described nitride film has amorphous and nanocrystalline across scale multilayer multiple solutions coupled structure,
Assign coating ultrahigh hardness and the affinity extremely low to metal liquid.
Preferably, the sample before step (3) described vacuum coating using ion etching to workpiece surface carry out cleaning and
Activation, wherein the ion etching is biased in 800-1200V, etching point multistep carries out, and etching voltage gradually increases from low to high
Add.
Compared with prior art, the advantageous effect of patent of the present invention is：
Compounding method of the present invention can construct the nitride layer of super thick in die surface, be remarkably improved the table of mold
Face wear-resisting property extends the service life of mold；The hard coat prepared simultaneously is regulated and controled by constituent structure, can reduce mold table
Surface roughness is applied for aluminium alloy molding die with excellent anti-molten aluminum adhesion effect.
Description of the drawings
Fig. 1 is the transmission plot of TiSiN coatings in embodiment 5.
Fig. 2 is the TiSiN coating hardness of nano-indenter test difference Si contents in embodiment 5.
Specific implementation mode
The principle and feature of patent of the present invention are described below in conjunction with attached drawing, the given examples are served only to explain the present invention
Patent is not intended to limit the range of patent of the present invention.
Embodiment 1
A kind of die surface compounding method, includes the following steps：
(1) surface degreasing processing of rust removing is carried out to mold；
(2) gas nitriding processing is carried out to mold：Pending workpiece is fitted into after over cleaning air-dries in heat-treatment furnace；
Heat-treatment furnace is evacuated to back end vacuum and is less than 6 × 10-3After Pa, high pure nitrogen is filled in stove, pressure control exists in stove
0.05MPa；Subsequent heat-treatment furnace is warming up to 450 DEG C, carries out Nitrizing Treatment, nitriding time 8h, sample furnace cooling after nitriding；
(3) after taking out step (2) gas nitriding treated workpiece, sandblasting and cleaning treatment are carried out to surface, then
It is put into vacuum coating equipment and carries out depositing Ti AlN films；It is that back end vacuum is less than 5 × 10 that technique for vacuum coating parameter, which is arranged,-3Pa,
350 DEG C, sedimentation time 8h of depositing temperature, 2 μm of thicknesses of layers, film hardness 20Gpa；
(4) workpiece after vacuum coating cools to 200 DEG C or less taking-ups with the furnace.
Embodiment 2
A kind of die surface compounding method, includes the following steps：
(1) surface degreasing processing of rust removing is carried out to mold；
(2) gas nitriding processing is carried out to mold：Pending workpiece is fitted into after over cleaning air-dries in heat-treatment furnace；
Heat-treatment furnace is evacuated to back end vacuum and is less than 6 × 10-3After Pa, high pure nitrogen is filled in stove, pressure control is in 0.1MPa in stove；
Subsequent heat-treatment furnace is warming up to 500 DEG C, carries out Nitrizing Treatment, nitriding time 2h, sample furnace cooling after nitriding；
(3) after taking out step (2) gas nitriding treated workpiece, sandblasting and cleaning treatment are carried out to surface, then
It is put into vacuum coating equipment and carries out depositing Ti AlN films；It is that back end vacuum is less than 5 × 10 that technique for vacuum coating parameter, which is arranged,-3Pa,
400 DEG C, sedimentation time 4h of depositing temperature, 3 μm of thicknesses of layers, film hardness 30Gpa；
(4) workpiece after vacuum coating cools to 200 DEG C or less taking-ups with the furnace.
Embodiment 3
A kind of die surface compounding method, includes the following steps：
(1) surface degreasing processing of rust removing is carried out to mold；
(2) gas nitriding processing is carried out to mold：Pending workpiece is fitted into after over cleaning air-dries in heat-treatment furnace；
Heat-treatment furnace is evacuated to back end vacuum and is less than 6 × 10-3After Pa, high pure nitrogen is filled in stove, pressure control exists in stove
0.15MPa；Subsequent heat-treatment furnace is warming up to 600 DEG C, carries out Nitrizing Treatment, nitriding time 1h, sample furnace cooling after nitriding；
(3) after taking out step (2) gas nitriding treated workpiece, sandblasting and cleaning treatment are carried out to surface, then
It is put into vacuum coating equipment and carries out depositing Ti AlN films；It is that back end vacuum is less than 5 × 10 that technique for vacuum coating parameter, which is arranged,-3Pa,
450 DEG C, sedimentation time 2h of depositing temperature, 5 μm of thicknesses of layers, film hardness 40Gpa；
(4) workpiece after vacuum coating cools to 200 DEG C or less taking-ups with the furnace.
Embodiment 4
A kind of die surface compounding method, includes the following steps：
(1) surface degreasing processing of rust removing is carried out to mold；
(2) ion Plasma Nitriding Treatment is carried out to mold：Pending workpiece is loaded on vacuum coating equipment after over cleaning air-dries
On sample stage, setting ionic nitriding back end vacuum is less than 5 × 10-3High Purity Nitrogen gas, glow discharge nitriding air pressure control are filled with after Pa, in stove
For system in 100Pa, workpiece applies DC negative bias voltage 500V, generates glow plasma, and ionic nitriding temperature is 450 DEG C, when nitriding
Between 1h；
(3) workpiece after ionic nitriding carries out vacuum deposition TiSiN coating treatments in situ, plating in vacuum coating room immediately
Membrane process parameter is that back end vacuum is less than 5 × 10-3Pa, 350 DEG C of depositing temperature, sedimentation time 2h；Coating hardness is 35GPa；
(4) workpiece after vacuum coating cools to 200 DEG C or less taking-ups with the furnace.
Embodiment 5
A kind of die surface compounding method, includes the following steps：
(1) surface degreasing processing of rust removing is carried out to mold；
(2) ion Plasma Nitriding Treatment is carried out to mold：Pending workpiece is loaded on vacuum coating equipment after over cleaning air-dries
On sample stage, setting ionic nitriding back end vacuum is less than 5 × 10-3High Purity Nitrogen gas, glow discharge nitriding air pressure control are filled with after Pa, in stove
For system in 120Pa, workpiece applies DC negative bias voltage 800V, generates glow plasma, and ionic nitriding temperature is 500 DEG C, when nitriding
Between 2h；Coating hardness 40GPa；
(3) workpiece after ionic nitriding carries out vacuum deposition TiSiN coating treatments in situ, plating in vacuum coating room immediately
Membrane process parameter is that back end vacuum is less than 5 × 10-3Pa, 500 DEG C of depositing temperature, sedimentation time 4h；Coating hardness is can be controlled in
40GPa；
(4) workpiece after vacuum coating cools to 200 DEG C or less taking-ups with the furnace.
From figure 1 it appears that TiSiN coatings have TiN nanocrystalline and Si3N4Amorphous coupled structure, using nano impress
The hardness of testing coating, by the regulation and control of Si contents, coating hardness can be controlled in 35-43GPa, when Si contents are 5%, coating
Hardness is 35GPa；When Si contents are 8%, coating hardness 40GPa；When Si contents are 10%, coating hardness can reach 43GPa.
Embodiment 6
A kind of die surface compounding method, includes the following steps：
(1) surface degreasing processing of rust removing is carried out to mold；
(2) ion Plasma Nitriding Treatment is carried out to mold：Pending workpiece is loaded on vacuum coating equipment after over cleaning air-dries
On sample stage, setting ionic nitriding back end vacuum is less than 5 × 10-3High Purity Nitrogen gas, glow discharge nitriding air pressure control are filled with after Pa, in stove
For system in 150Pa, workpiece applies DC negative bias voltage 1000V, generates glow plasma, and ionic nitriding temperature is 600 DEG C, when nitriding
Between 1h；
(3) workpiece after ionic nitriding carries out vacuum deposition TiSiN coating treatments in situ, plating in vacuum coating room immediately
Membrane process parameter is that back end vacuum is less than 5 × 10-3Pa, 450 DEG C of depositing temperature, sedimentation time 2h, coating hardness is can be controlled in
43GPa；
(4) workpiece after vacuum coating cools to 200 DEG C or less taking-ups with the furnace.
It is obvious to a person skilled in the art that patent of the present invention is not limited to the details of above-mentioned exemplary embodiment, and
And without departing substantially from the spirit or essential attributes of patent of the present invention, it can realize in other specific forms of the invention special
Profit.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, the present invention is special
The range of profit is indicated by the appended claims rather than the foregoing description, it is intended that containing in the equivalent requirements of the claims will be fallen
All changes in justice and range are included in patent of the present invention, should not any reference numeral in claim be considered as limitation
Involved claim.
The foregoing is merely the preferred embodiments of patent of the present invention, are not intended to limit the invention patent, all in the present invention
Within the spirit and principle of patent, any modification, equivalent replacement, improvement and so on should be included in the guarantor of patent of the present invention
Within the scope of shield.
Claims (9)
1. a kind of die surface compounding method, it is characterised in that：Include the following steps：
(1) surface degreasing processing of rust removing is carried out to mold；
(2) nitrogen treatment is carried out to mold, nitrogen treatment can select gas nitriding or ion nitriding technology to be handled；
(3) after taking out step (2) gas nitriding treated workpiece, sandblasting and cleaning treatment is carried out to surface, are then placed in
Vacuum coating equipment carries out deposition hard nitride film；Or by the workpiece after ion Plasma Nitriding Treatment immediately in vacuum film coating chamber
Interior progress in-situ deposition film processing；Wherein coating process parameter is that back end vacuum is less than 5 × 10-3Pa, depositing temperature 350-450
DEG C, sedimentation time 2-8h, 2-5 μm of thicknesses of layers, film hardness 20-40Gpa；
(4) workpiece after vacuum coating cools to 200 DEG C or less taking-ups with the furnace.
2. die surface compounding method according to claim 1, it is characterised in that：The GN 2 described in step (2)
Changing treatment process includes：Pending workpiece is fitted into after over cleaning air-dries in gas nitriding furnace；Nitriding furnace is evacuated to back end
Vacuum is less than 6 × 10-3After Pa, nitrogenous gas is filled in stove, pressure control is in 0.05-0.15MPa in stove；Heat-treatment furnace is warming up to
450-600 DEG C, carry out Nitrizing Treatment, nitriding time 1-8h, after nitriding sample furnace cooling to get nitrogen treatment mold work
Part.
3. die surface compounding method according to claim 2, it is characterised in that：The nitrogenous gas includes nitrogen
Any one in gas, ammonia.
4. die surface compounding method according to claim 1, it is characterised in that：Ionic nitrogen described in step (2)
Chemical industry skill includes：Ionic nitriding back end vacuum is less than 5 × 10-3After Pa, nitrogenous gas is filled in stove, ionic nitriding pressure control exists
100-150Pa, workpiece apply back bias voltage 500-1000V, generate glow plasma；Setting ionic nitriding temperature is 450-600
DEG C, nitriding time 1-8h.
5. die surface compounding method according to claim 4, it is characterised in that：The nitrogenous gas includes nitrogen
Any one in gas, nitrogen argon mixture gas, the nitrogen of hydrogen loading, ammonia.
6. die surface compounding method according to claim 4, it is characterised in that：The workpiece negative bias voltage source is
Direct current, pulse or radio-frequency power supply.
7. die surface compounding method according to claim 1, it is characterised in that：Step (3) described nitride is thin
Film has amorphous and nanocrystalline across scale multilayer multiple solutions coupled structure.
8. die surface compounding method according to claim 1, it is characterised in that：Step (3) described vacuum coating
Preceding sample uses ion etching being cleaned and being activated to workpiece surface.
9. die surface compounding method according to claim 8, it is characterised in that：The ion etching is biased in
800-1200V, etching point multistep carry out, and etching voltage gradually increases from low to high.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810661772.8A CN108754406A (en) | 2018-06-25 | 2018-06-25 | A kind of die surface compounding method |
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| CN201810661772.8A CN108754406A (en) | 2018-06-25 | 2018-06-25 | A kind of die surface compounding method |
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| CN108754406A true CN108754406A (en) | 2018-11-06 |
Family
ID=63976894
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109371217A (en) * | 2018-12-10 | 2019-02-22 | 江铃汽车股份有限公司 | A kind of surface treatment method of cold punching die |
| CN109852931A (en) * | 2019-01-07 | 2019-06-07 | 纳狮新材料(浙江)有限公司 | The film plating process of vacuum coating equipment and composite coating |
| CN110983242A (en) * | 2019-12-10 | 2020-04-10 | 中国航发贵州黎阳航空动力有限公司 | Preparation method of TiN coating of titanium alloy part of aircraft engine |
| CN111485233A (en) * | 2020-04-17 | 2020-08-04 | 安徽科蓝特铝业有限公司 | Method for preparing thick titanium nitride modified layer on surface of aluminum alloy |
| CN114892123A (en) * | 2022-05-23 | 2022-08-12 | 太原理工大学 | Ionic nitriding method for eliminating small hole arcing risk |
| CN115404458A (en) * | 2022-08-26 | 2022-11-29 | 晓睿真空设备(嘉兴)有限公司 | Stainless steel surface treatment process for improving durability of driving shaft |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103952660A (en) * | 2014-05-16 | 2014-07-30 | 中国科学院宁波材料技术与工程研究所 | Composite material with a nitride film as well as preparation method and application of composite material |
| CN106835055A (en) * | 2017-03-08 | 2017-06-13 | 南华大学 | A kind of nuclear grade stainless steel of wear resistant corrosion resistant |
| CN107937876A (en) * | 2017-12-29 | 2018-04-20 | 中国电子科技集团公司第四十三研究所 | A kind of TiAlN composite superhard coatings with the support of hardness gradient layer and preparation method thereof |
-
2018
- 2018-06-25 CN CN201810661772.8A patent/CN108754406A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103952660A (en) * | 2014-05-16 | 2014-07-30 | 中国科学院宁波材料技术与工程研究所 | Composite material with a nitride film as well as preparation method and application of composite material |
| CN106835055A (en) * | 2017-03-08 | 2017-06-13 | 南华大学 | A kind of nuclear grade stainless steel of wear resistant corrosion resistant |
| CN107937876A (en) * | 2017-12-29 | 2018-04-20 | 中国电子科技集团公司第四十三研究所 | A kind of TiAlN composite superhard coatings with the support of hardness gradient layer and preparation method thereof |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109371217A (en) * | 2018-12-10 | 2019-02-22 | 江铃汽车股份有限公司 | A kind of surface treatment method of cold punching die |
| CN109852931A (en) * | 2019-01-07 | 2019-06-07 | 纳狮新材料(浙江)有限公司 | The film plating process of vacuum coating equipment and composite coating |
| CN110983242A (en) * | 2019-12-10 | 2020-04-10 | 中国航发贵州黎阳航空动力有限公司 | Preparation method of TiN coating of titanium alloy part of aircraft engine |
| CN111485233A (en) * | 2020-04-17 | 2020-08-04 | 安徽科蓝特铝业有限公司 | Method for preparing thick titanium nitride modified layer on surface of aluminum alloy |
| CN114892123A (en) * | 2022-05-23 | 2022-08-12 | 太原理工大学 | Ionic nitriding method for eliminating small hole arcing risk |
| CN114892123B (en) * | 2022-05-23 | 2024-04-16 | 太原理工大学 | Ion nitriding method for eliminating risk of small hole arcing |
| CN115404458A (en) * | 2022-08-26 | 2022-11-29 | 晓睿真空设备(嘉兴)有限公司 | Stainless steel surface treatment process for improving durability of driving shaft |
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