CN108731708A - The matched multichannel low coherence interference demodulation method in the arbitrary channel of sensor can be achieved - Google Patents
The matched multichannel low coherence interference demodulation method in the arbitrary channel of sensor can be achieved Download PDFInfo
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Abstract
本发明公开了一种可实现传感器任意通道匹配的多通道低相干干涉解调方法,第一步、通过傅里叶变换法计算求出低精度包络峰值位置Kp;计算低精度绝对相位估计值根据相对相位恢复干涉条纹的条纹级次n,恢复出低相干干涉条纹的绝对相位求出低相干干涉条纹的真实包络峰值位置Kd;第二步、选择任一传感通道作为标定通道;在该通道下得到一个与扫描压力数组对应的真实包络峰值位置数组;建立F‑P传感器低相干干涉条纹包络峰值位置和外界压力的对应关系;第三步、计算偏振低相干干涉解调仪产生的扫描光程差OPD和不同传感通道间包络峰值位置补偿量ΔK;第四步、计算补偿后的包络峰值位置Kr,利用包络峰值位置Kr和外界压力的对应关系,解调出对应传感通道的测量压力值。本发明实现了F‑P传感器多通道适用解调。
The invention discloses a multi-channel low-coherence interference demodulation method capable of matching any channel of a sensor. The first step is to calculate and obtain the low-precision envelope peak position K p through the Fourier transform method; calculate the low-precision absolute phase estimation value Recover the absolute phase of the low-coherence interference fringe by recovering the fringe order n of the interference fringe according to the relative phase Calculate the real envelope peak position K d of the low-coherence interference fringes; the second step is to select any sensing channel as the calibration channel; obtain a real envelope peak position array corresponding to the scanning pressure array under this channel; establish F ‑P sensor low-coherence interference fringe envelope peak position and the corresponding relationship with the external pressure; the third step is to calculate the scanning optical path difference OPD generated by the polarization low-coherence interferometer and the envelope peak position compensation amount ΔK between different sensing channels ; The fourth step is to calculate the compensated envelope peak position K r , and use the corresponding relationship between the envelope peak position K r and the external pressure to demodulate the measured pressure value of the corresponding sensing channel. The invention realizes the multi-channel applicable demodulation of the F-P sensor.
Description
技术领域technical field
本发明涉及光纤传感技术领域,特别涉及一种适用于法布里-珀罗(F-P)传感器的多通道应用的低相干干涉解调方法。The invention relates to the technical field of optical fiber sensing, in particular to a low-coherence interference demodulation method suitable for multi-channel application of Fabry-Perot (F-P) sensors.
背景技术Background technique
低相干干涉法是光学干涉领域中重要的测量方法,被广泛用于三维形貌检测、光学相干断层扫描以及光纤传感领域,例如,压力、温度、折射率测量等。Low-coherence interferometry is an important measurement method in the field of optical interference, and is widely used in the fields of three-dimensional shape detection, optical coherence tomography, and optical fiber sensing, such as pressure, temperature, and refractive index measurements.
将低相干干涉法和多通道复用传感应用结合起来,具有多点同时测量、传感精度高、传感器扩展成本低等优点。目前比较常见的有波分复用和时分复用等,其中波分复用方法利用具有不同光谱中心波长的光源作为不同的传感器的光源,进而实现多个传感器的复用,但是该方法的复用和解调方式均较复杂,且能复用的传感器数量受到可用光源光谱的限制。相较而言,基于多通道偏振低相干干涉解调仪的时分复用方式使用一个多通道光纤阵列连接多路传感器,利用同一个解调光路对多路传感器信号在时间上顺序解调,复用方式简单,可复用传感器数量较多。然而,受到光楔光束非垂直入射、传感通道位置不同、晶体加工非理想化以及批量制作的F-P传感器腔长不一致等因素的影响,为保证法布里-珀罗(F-P)传感器解调的精度和可靠性,通常需要将F-P传感器与一个特定的传感通道进行标定操作。标定操作使F-P传感器仅能在对应的标定通道上进行解调,而无法应用于其他解调通道,这严重限制了F-P传感器在多通道复用传感中的应用。The combination of low-coherence interferometry and multi-channel multiplexing sensing applications has the advantages of simultaneous measurement of multiple points, high sensing accuracy, and low cost of sensor expansion. At present, wavelength division multiplexing and time division multiplexing are relatively common. Among them, the wavelength division multiplexing method uses light sources with different spectral center wavelengths as light sources for different sensors, and then realizes the multiplexing of multiple sensors. However, the multiplexing method of this method The use and demodulation methods are complex, and the number of sensors that can be multiplexed is limited by the spectrum of the available light source. In comparison, the time-division multiplexing method based on a multi-channel polarization low-coherence interferometer uses a multi-channel optical fiber array to connect multiple sensors, and uses the same demodulation optical path to sequentially demodulate the signals of multiple sensors in time. The method is simple, and the number of reusable sensors is large. However, affected by factors such as non-vertical incidence of the wedge beam, different positions of the sensing channels, non-ideal crystal processing, and inconsistent cavity lengths of mass-produced F-P sensors, in order to ensure the accuracy of Fabry-Perot (F-P) sensor demodulation Accuracy and reliability usually require calibration of F-P sensors with a specific sensing channel. The calibration operation makes the F-P sensor demodulate only on the corresponding calibration channel, but cannot be applied to other demodulation channels, which severely limits the application of the F-P sensor in multi-channel multiplexing sensing.
发明内容Contents of the invention
为了克服上述现有技术存在的技术问题,本发明提出了一种可实现传感器任意通道匹配的多通道低相干干涉解调方法,采用傅里叶变换法求得任一传感通道下精度较低的低相干干涉信号的原始包络峰值位置,然后利用该位置根据低相干干涉条纹相位分布特性恢复出选定单色波长干涉条纹的绝对相位,进而恢复出高精度真实包络峰值位置;根据建立的偏振低相干干涉解调仪位置-光程差分布模型,利用真实包络峰值位置求出对应传感通道相对于标定通道的位置补偿量,将该传感通道下的真实包络峰值位置补偿到标定通道下,从而实现F-P传感器的多通道应用。In order to overcome the above-mentioned technical problems in the prior art, the present invention proposes a multi-channel low-coherence interference demodulation method that can realize any channel matching of sensors, and adopts the Fourier transform method to obtain low accuracy in any sensing channel. The original envelope peak position of the low-coherence interference signal, and then use this position to restore the absolute phase of the selected monochromatic wavelength interference fringe according to the phase distribution characteristics of the low-coherence interference fringe, and then restore the high-precision real envelope peak position; according to the established The position-optical path difference distribution model of the polarization low-coherence interferometer is used to calculate the position compensation amount of the corresponding sensing channel relative to the calibration channel by using the real envelope peak position, and compensate the real envelope peak position under the sensing channel To the calibration channel, so as to realize the multi-channel application of F-P sensor.
本发明的一种可实现传感器任意通道匹配的多通道低相干干涉解调方法,包括以下步骤:A multi-channel low-coherence interference demodulation method capable of matching any channel of a sensor according to the present invention comprises the following steps:
第一步、对于任意解调通道下任一低相干干涉传感信号,通过傅里叶变换法计算求出低精度包络峰值位置Kp;计算低精度绝对相位估计值 The first step, for any low-coherence interference sensing signal under any demodulation channel, calculate the low-precision envelope peak position K p by Fourier transform method; calculate the low-precision absolute phase estimation value
其中,q表示选定的离散傅里叶变换(DFT)序号,其对应于某一单色波长,此处选择61;N表示DFT离散序列总数,等于一帧低相干干涉信号数据点总数,数值为3000;Among them, q represents the serial number of the selected discrete Fourier transform (DFT), which corresponds to a certain monochromatic wavelength, and 61 is selected here; N represents the total number of DFT discrete sequences, which is equal to the total number of data points of a frame of low-coherence interference signal, the value is 3000;
根据低精度绝对相位估计值结合DFT过程,计算恢复干涉条纹的条纹级次n:According to the low precision absolute phase estimate Combined with the DFT process, calculate the fringe order n of the restored interference fringe:
其中,φ表示低相干干涉条纹DFT过程获得的相对相位,round()函数返回距离括号中参数最近的整数;Among them, φ represents the relative phase obtained by the low-coherence interference fringe DFT process, and the round() function returns the nearest integer to the parameters in parentheses;
根据干涉条纹的条纹级次n及相对相位φ恢复出低相干干涉条纹的绝对相位 Recover the absolute phase of the low-coherence interference fringe according to the fringe order n and the relative phase φ of the interference fringe
根据已恢复的绝对相位求出低相干干涉条纹的真实包络峰值位置Kd;According to the recovered absolute phase Calculate the real envelope peak position K d of the low-coherence interference fringe;
第二步、选择标定传感通道s,在该通道下通过压力控制系统对F-P传感器的外界压力进行扫描,采集每一扫描压力下的低相干干涉条纹信号,按第一步的方式恢复出每一信号对应的真实包络峰值位置,得到一个与扫描压力数组对应的真实包络峰值位置数组;以真实包络峰值位置Kd的数组为横轴,扫描压力数组为纵轴进行4次多项式拟合,建立F-P传感器低相干干涉条纹包络峰值位置和外界压力的对应关系;The second step is to select the calibration sensing channel s, scan the external pressure of the FP sensor through the pressure control system under this channel, collect the low-coherence interference fringe signal under each scanning pressure, and restore each A real envelope peak position corresponding to a signal, to obtain a real envelope peak position array corresponding to the scanning pressure array; take the array of the real envelope peak position K d as the horizontal axis, and the scanning pressure array as the vertical axis to perform a 4-degree polynomial simulation Combined, the corresponding relationship between the peak position of the low-coherence interference fringe envelope of the FP sensor and the external pressure is established;
第三步、基于偏振低相干干涉解调仪的系统参数,根据传感通道包络峰值位置计算偏振低相干干涉解调仪产生的扫描光程差OPD:The third step is to calculate the scanning optical path difference OPD generated by the polarization low coherence interferometer based on the system parameters of the polarization low coherence interferometer according to the peak position of the envelope of the sensing channel:
OPD=Fko(K,m)OPD=F ko (K,m)
其中,函数Fko()表征了上述关系,m表示传感通道的通道序号,K表示传感通道包络峰值位置;Wherein, the function F ko () characterizes the above relationship, m represents the channel number of the sensing channel, and K represents the peak position of the sensing channel envelope;
计算不同传感通道间包络峰值位置补偿量ΔK;Calculate the envelope peak position compensation amount ΔK between different sensing channels;
ΔK=Fod(OPD,s,m)ΔK=F od (OPD,s,m)
s表示标定传感通道的通道序号。s represents the channel number of the calibration sensing channel.
第四步、计算补偿后的包络峰值位置Kr;The fourth step is to calculate the compensated envelope peak position K r ;
Kr=Kd+ΔKK r =K d +ΔK
利用标定通道下的包络峰值位置Kr和外界压力的对应关系,解调出对应传感通道的测量压力值。Using the corresponding relationship between the envelope peak position K r under the calibration channel and the external pressure, the measured pressure value of the corresponding sensing channel is demodulated.
与现有技术相比,本发明的有益效果及优点在于:Compared with prior art, beneficial effect and advantage of the present invention are:
1、本发明根据低相干干涉系统位置-光程差分布特征,通过包络峰值位置补偿的方式,实现了F-P传感器多通道适用解调,有效改善了F-P传感器的通道适应性;1. According to the position-optical path difference distribution characteristics of the low-coherence interference system, the present invention realizes the multi-channel applicable demodulation of the F-P sensor through the method of envelope peak position compensation, and effectively improves the channel adaptability of the F-P sensor;
2、本发明利用低精度的包络峰值位置确定低相干干涉条纹干涉级次,大大简化了干涉级次判定过程,并综合利用包络峰值法和相位法恢复真实包络峰值位置,解调精度高;2. The present invention uses the low-precision envelope peak position to determine the low-coherence interference fringe interference order, which greatly simplifies the interference order determination process, and comprehensively utilizes the envelope peak method and phase method to restore the real envelope peak position, and the demodulation accuracy high;
3、本发明仅需将F-P传感器标定于一个传感通道的条件下,无需重复标定过程,就能够将F-P传感器在任意传感通道上使用并实现高精度解调。3. The present invention only needs to calibrate the F-P sensor under the condition of one sensing channel, without repeating the calibration process, it can use the F-P sensor on any sensing channel and realize high-precision demodulation.
附图说明Description of drawings
图1为空间扫描型低相干干涉光纤传感大气压力解调装置示意图;Figure 1 is a schematic diagram of a space-scanning low-coherence interference optical fiber sensing atmospheric pressure demodulation device;
图2为实际解调装置中采集的F-P压力传感器在100kPa压强下的一帧干涉信号及其包络;Figure 2 is a frame of interference signal and its envelope of the F-P pressure sensor collected in the actual demodulation device under a pressure of 100kPa;
图3为结合原始包络峰值位置和相对相位恢复绝对相位的过程示意图;Fig. 3 is a schematic diagram of the process of recovering the absolute phase in combination with the original envelope peak position and the relative phase;
图4为选定传感通道4为标定通道时进行压力标定过程的原始包络峰值位置、真实包络峰值位置与扫描标定压力之间的关系曲线图;Fig. 4 is a graph showing the relationship between the original envelope peak position, the real envelope peak position and the scanning calibration pressure during the pressure calibration process when the sensing channel 4 is selected as the calibration channel;
图5为以偏振低相干干涉解调仪产生的扫描光程差为横坐标,以其他传感通道与标定通道4之间的位置补偿量为纵坐标的关系曲线图;Fig. 5 is a relationship graph with the scanning optical path difference generated by the polarization low-coherence interferometer as the abscissa, and the position compensation amount between other sensing channels and the calibration channel 4 as the ordinate;
图6为四个传感通道原始包络峰值位置曲线图;Figure 6 is a graph of the original envelope peak positions of the four sensing channels;
图7为四个传感通道干涉级次估计误差曲线图;Fig. 7 is a curve diagram of the estimation error of the interference order of the four sensing channels;
图8为四个传感通道恢复的真实包络峰值位置曲线图;Fig. 8 is a curve diagram of the real envelope peak position restored by four sensing channels;
图9为将四个传感通道的真实包络峰值位置补偿到标定通道后进行压力解调的压力解调误差曲线图;Fig. 9 is a pressure demodulation error curve diagram of pressure demodulation after the real envelope peak positions of the four sensing channels are compensated to the calibration channel;
附图标记:1、宽带光源,2、耦合器,3、F-P传感器,4、多通道光纤阵列,5、偏振低相干干涉解调仪,6、起偏器,7、双折射光楔,8、检偏器,9、线阵CCD,10、信号处理单元;11、低相干干涉信号,12、低相干干涉信号包络;13、相对相位,14、绝对相位估计值,15、真实绝对相位,16、通道一,17、通道二,18、通道三,19、通道四;Reference signs: 1. broadband light source, 2. coupler, 3. F-P sensor, 4. multi-channel optical fiber array, 5. polarization low-coherence interferometer, 6. polarizer, 7. birefringent wedge, 8 , polarizer, 9, linear array CCD, 10, signal processing unit; 11, low coherence interference signal, 12, envelope of low coherence interference signal; 13, relative phase, 14, absolute phase estimate value, 15, real absolute phase , 16, channel one, 17, channel two, 18, channel three, 19, channel four;
图10为本发明的可实现传感器任意通道匹配的多通道低相干干涉解调方法整体流程图。FIG. 10 is an overall flow chart of the multi-channel low-coherence interference demodulation method capable of matching any channel of the sensor according to the present invention.
具体实施方式Detailed ways
下面结合附图和具体实施例对本发明技术方案作进一步详细描述。The technical solutions of the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
本发明的可实现传感器任意通道匹配的多通道低相干干涉解调方法结合外界大气压力的测量。如图1所示,为空间扫描型低相干干涉光纤传感大气压力解调装置,工作过程说明如下:The multi-channel low-coherence interference demodulation method of the present invention, which can realize the matching of any channel of the sensor, is combined with the measurement of the external atmospheric pressure. As shown in Figure 1, it is a space-scanning low-coherence interference optical fiber sensing atmospheric pressure demodulation device. The working process is described as follows:
宽带光源(LED)1发出的光经过耦合器2到达F-P传感器3,F-P传感器3是感受外界大气压力的敏感元件,其F-P腔的两个反射面构成了传感干涉仪,传感干涉仪中F-P腔两个反射面之间的距离与大气压力成线性关系,被F-P传感器3调制过的光信号从耦合器2的出口导出,光信号通过多通道光纤阵列4导入偏振低相干干涉解调仪5,多通道光纤阵列4为单排一字点阵光纤结构,偏振低相干干涉解调仪由起偏器6、双折射光楔7和检偏器8组成,由于双折射光楔7的双折射效应,光信号通过双折射光楔7形成空间低相干干涉条纹并被线阵CCD9接收,信号处理单元10对线阵CCD9输出的干涉条纹信号进行处理。当双折射光楔7引起的光程差和F-P传感器3引起的光程差相匹配时,会在线阵CCD9相应的局部区域产生明显的低相干干涉条纹。The light emitted by the broadband light source (LED) 1 reaches the F-P sensor 3 through the coupler 2. The F-P sensor 3 is a sensitive element that senses the external atmospheric pressure. The two reflective surfaces of the F-P cavity constitute a sensing interferometer. The distance between the two reflecting surfaces of the F-P cavity has a linear relationship with the atmospheric pressure. The optical signal modulated by the F-P sensor 3 is exported from the outlet of the coupler 2, and the optical signal is introduced into the polarization low-coherence interferometer through the multi-channel optical fiber array 4. 5. The multi-channel fiber array 4 is a single row inline lattice fiber structure. The polarization low coherence interferometric demodulator is composed of a polarizer 6, a birefringent wedge 7 and an analyzer 8. Due to the dual Due to the refraction effect, the optical signal passes through the birefringent wedge 7 to form spatial low-coherence interference fringes and is received by the linear array CCD9, and the signal processing unit 10 processes the interference fringe signals output by the linear array CCD9. When the optical path difference caused by the birefringent wedge 7 matches the optical path difference caused by the F-P sensor 3 , obvious low-coherence interference fringes will be generated in the corresponding local area of the linear array CCD 9 .
所需的大气压强通过高精度、高稳定压力源产生,该压力源可以达到0.02kPa的控制精度,线阵CCD的有效像元数为3000点,每帧数据由3000个离散数据点构成。每个CCD像元对应一个固定的偏振低相干干涉解调仪产生的光程差,用CCD像元的位置K来表示该光程差。对于标定通道4,起始有效像元对应的光程差为31.302μm,相邻两个CCD像元间隔的光程差为0.0125μm。The required atmospheric pressure is generated by a high-precision and high-stable pressure source, which can reach a control accuracy of 0.02kPa. The effective pixel number of the linear array CCD is 3000 points, and each frame of data consists of 3000 discrete data points. Each CCD pixel corresponds to an optical path difference generated by a fixed polarization low-coherence interferometer, and the position K of the CCD pixel is used to represent the optical path difference. For calibration channel 4, the optical path difference corresponding to the initial effective pixel is 31.302 μm, and the optical path difference between two adjacent CCD pixels is 0.0125 μm.
利用上述的空间扫描型低相干干涉光纤传感大气压力解调装置,通过腔长变化感受大气压力,使用起偏器、双折射光楔和检偏器构成的偏振低相干干涉解调仪,对F-P传感器调制的光信号进行解调,在零光程差的局部区域形成空间低相干干涉条纹。本发明的可实现传感器任意通道匹配的多通道低相干干涉解调方法,具体实施步骤如下:Using the above-mentioned space-scanning low-coherence interference optical fiber sensing atmospheric pressure demodulation device, the atmospheric pressure is sensed through the change of the cavity length, and the polarization low-coherence interference demodulation device composed of a polarizer, a birefringent wedge and a polarizer is used. The optical signal modulated by the F-P sensor is demodulated to form spatial low-coherence interference fringes in the local area of zero optical path difference. The multi-channel low-coherence interference demodulation method that can realize the matching of any channel of the sensor in the present invention, the specific implementation steps are as follows:
第一步、对于任意解调通道下任一低相干干涉传感信号,求出其低精度的原始包络峰值位置,并结合相位特性恢复出高精度的真实包络峰值位置;The first step, for any low-coherence interference sensing signal under any demodulation channel, find its low-precision original envelope peak position, and combine the phase characteristics to recover the high-precision real envelope peak position;
1.1、如图2所示,外界大气压强为100kPa时CCD输出的一帧低相干干涉信号,该帧低相干干涉信号包含3000个数据点。通过傅里叶变换法计算求出的低精度包络峰值位置Kp对应的CCD像元为1602。1.1. As shown in Figure 2, a frame of low-coherence interference signal output by the CCD when the external atmospheric pressure is 100kPa, the frame of low-coherence interference signal contains 3000 data points. The CCD pixel corresponding to the low-precision envelope peak position K p calculated by the Fourier transform method is 1602.
1.2、根据相位分布特性由低精度包络峰值位置Kp计算出低精度绝对相位估计值 1.2. Calculate the low-precision absolute phase estimation value from the low-precision envelope peak position K p according to the phase distribution characteristics
其中,q表示选定的离散傅里叶变换(DFT)序号,其对应于某一单色波长,此处选择61;N表示DFT离散序列总数,等于一帧低相干干涉信号数据点总数,数值为3000;Among them, q represents the serial number of the selected discrete Fourier transform (DFT), which corresponds to a certain monochromatic wavelength, and 61 is selected here; N represents the total number of DFT discrete sequences, which is equal to the total number of data points of a frame of low-coherence interference signal, the value is 3000;
1.3、根据低精度绝对相位估计值结合DFT过程得到相对相位恢复干涉条纹的条纹级次n:1.3. According to the low-precision absolute phase estimation value Combined with the DFT process, the fringe order n of the relative phase recovery interference fringe is obtained:
其中,φ表示低相干干涉条纹DFT过程获得的相对相位,round()函数返回距离括号中参数最近的整数;Among them, φ represents the relative phase obtained by the low-coherence interference fringe DFT process, and the round() function returns the nearest integer to the parameters in parentheses;
1.4、根据相对相位恢复干涉条纹的条纹级次n及相对相位φ恢复出低相干干涉条纹的绝对相位 1.4. Recover the absolute phase of the low-coherence interference fringe according to the relative phase recovery of the fringe order n and the relative phase φ of the interference fringe
如图3所示,为结合原始包络峰值位置和相对相位恢复绝对相位的过程示意图。绝对相位恢复过程包括:通过低精度的原始包络峰值位置Kp估计的绝对相位估计值与已恢复的绝对相位之间只存在轻微的偏移,根据相位分布的性质,通过结合相对相位φ即可恢复出准确的干涉级次n。As shown in FIG. 3 , it is a schematic diagram of the process of recovering the absolute phase by combining the peak position of the original envelope and the relative phase. The absolute phase recovery process includes: the absolute phase estimate estimated by the low-precision raw envelope peak position Kp Absolute phase with restored There is only a slight offset between them, and according to the nature of the phase distribution, the exact interference order n can be recovered by combining the relative phase φ.
1.5、根据已恢复的绝对相位求出低相干干涉条纹的真实包络峰值位置Kd;1.5. According to the restored absolute phase Calculate the real envelope peak position K d of the low-coherence interference fringe;
此处恢复的真实包络峰值位置Kd=1605.84。Here the recovered real envelope peak position K d =1605.84.
第二步、选定标定通道对F-P传感器进行标定,建立F-P传感器低相干干涉条纹包络峰值位置和外界压力的对应关系;The second step is to select the calibration channel to calibrate the F-P sensor, and establish the correspondence between the peak position of the low-coherence interference fringe envelope of the F-P sensor and the external pressure;
2.1、选择标定传感通道s,在该通道下通过压力控制系统对F-P传感器的外界压力进行扫描,采集每一扫描压力下的低相干干涉条纹信号,按第一步的方式恢复出每一信号对应的真实包络峰值位置,得到一个与扫描压力数组对应的真实包络峰值位置数组;如图4所示为选定传感通道4为标定通道时进行压力标定过程的原始包络峰值位置、真实包络峰值位置与扫描标定压力之间的关系曲线图,其中标定压力在100-200kPa范围内以5kPa的步长增加对应的原始包络峰值位置Kp及恢复后的真实包络峰值位置Kd。2.1. Select the calibration sensing channel s, scan the external pressure of the FP sensor through the pressure control system under this channel, collect the low-coherence interference fringe signal under each scanning pressure, and recover each signal according to the first step Corresponding to the real envelope peak position, obtain a real envelope peak position array corresponding to the scanning pressure array; as shown in Figure 4, the original envelope peak position of the pressure calibration process when the sensing channel 4 is selected as the calibration channel, The relationship curve between the true envelope peak position and the scanning calibration pressure, where the calibration pressure increases with a step size of 5kPa in the range of 100-200kPa, corresponding to the original envelope peak position K p and the restored true envelope peak position K d .
2.2、以真实包络峰值位置Kd的数组为横轴,扫描压力数组为纵轴进行4次多项式拟合,建立F-P传感器低相干干涉条纹包络峰值位置和外界压力的对应关系;2.2. Take the array of the real envelope peak position K d as the horizontal axis, and the scanning pressure array as the vertical axis to perform quadruple polynomial fitting, and establish the corresponding relationship between the envelope peak position of the low-coherence interference fringe of the FP sensor and the external pressure;
第三步、通过光路计算建立偏振低相干干涉解调仪产生的扫描光程差(OPD)与干涉条纹包络峰值位置的关系,并进一步导出扫描光程差(OPD)与不同传感通道包络峰值位置补偿量的关系;The third step is to establish the relationship between the scanning optical path difference (OPD) generated by the polarization low-coherence interferometer and the peak position of the interference fringe envelope through the calculation of the optical path, and further derive the scanning optical path difference (OPD) and different sensing channel packages. The relationship between the compensation amount of the network peak position;
3.1、基于偏振低相干干涉解调仪的系统参数,通过光路计算分析不同传感通道包络峰值位置K与偏振低相干干涉解调仪产生的扫描光程差OPD之间的关系:3.1. Based on the system parameters of the polarization low-coherence interferometer, the relationship between the envelope peak position K of different sensing channels and the scanning optical path difference OPD generated by the polarization low-coherence interferometer is analyzed through optical path calculation:
OPD=Fko(K,m)OPD=F ko (K,m)
其中,函数Fko()表征了上述关系,m表示传感通道的通道序号。Wherein, the function F ko () characterizes the above relationship, and m represents the channel number of the sensing channel.
3.2、基于偏振低相干干涉解调仪的系统参数,通过光路计算分析偏振低相干干涉解调仪产生的扫描光程差OPD与不同传感通道包络峰值位置之间的关系,并进一步导出偏振低相干干涉解调仪产生的扫描光程差OPD与不同传感通道间包络峰值位置补偿量ΔK的关系;3.2. Based on the system parameters of the polarization low-coherence interferometer, the relationship between the scanning optical path difference OPD generated by the polarization low-coherence interferometer and the peak position of the envelope of different sensing channels is analyzed through optical path calculation, and the polarization is further derived The relationship between the scanning optical path difference OPD generated by the low-coherence interferometer and the envelope peak position compensation ΔK between different sensing channels;
ΔK=Fod(OPD,s,m)ΔK=F od (OPD,s,m)
其中,函数Fod()表征了上述关系,s表示标定传感通道的通道序号。如图5所示,以偏振低相干干涉解调仪产生的扫描光程差为横坐标,以其他传感通道与标定通道4之间的位置补偿量为纵坐标的关系曲线图,光程差以0.1μm的间隔从30μm增加到70μm时标定通道4与其他传感通道之间的位置偏移量的仿真结果;Wherein, the function F od () characterizes the above relationship, and s represents the channel number of the calibration sensing channel. As shown in Figure 5, take the scanning optical path difference produced by the polarization low-coherence interferometer as the abscissa, and take the position compensation amount between other sensing channels and the calibration channel 4 as the relationship curve of the ordinate, the optical path difference Simulation results of the position offset between calibration channel 4 and other sensing channels when increasing from 30 μm to 70 μm at 0.1 μm intervals;
第四步、恢复真实包络峰值位置的过程和通道间包络峰值位置的补偿过程,将任意解调通道的原始包络峰值位置Kp补偿到标定通道,并用补偿后的包络峰值位置进行压力值解调。The fourth step, the process of restoring the real envelope peak position and the compensation process of the envelope peak position between channels, compensates the original envelope peak position K p of any demodulation channel to the calibration channel, and uses the compensated envelope peak position to carry out Pressure value demodulation.
4.1、对于任意传感通道的原始包络峰值位置Kp,根据第一步恢复出其真实包络峰值位置Kd;4.1. For the original envelope peak position K p of any sensing channel, recover its true envelope peak position K d according to the first step;
4.2、根据3.1中的关系式OPD=Fko(K,m),利用Kd计算出该位置对应的解调仪扫描光程差OPD,然后根据3.2求出位置偏移量ΔK,将ΔK补偿到标定通道下。4.2. According to the relational expression OPD=F ko (K, m) in 3.1, use K d to calculate the demodulator scanning optical path difference OPD corresponding to this position, then calculate the position offset ΔK according to 3.2, and compensate ΔK Go to the calibration channel.
Kr=Kd+ΔKK r =K d +ΔK
其中Kr为补偿后的包络峰值位置。Where K r is the position of the envelope peak after compensation.
4.3、利用标定通道下的包络峰值位置Kr和外界压力的对应关系,即可解调出对应传感通道的测量压力值,实现任意通道下F-P传感器的高精度解调。4.3. Using the corresponding relationship between the envelope peak position K r and the external pressure under the calibration channel, the measured pressure value of the corresponding sensing channel can be demodulated, and high-precision demodulation of the FP sensor under any channel can be realized.
为了更全面地验证该方法的可行性,以4通道偏振低相干干涉解调仪为例,以通道4为标定通道,实验压力以0.5kPa的间隔从100kPa单调增长到200kPa。对每个传感通道每个实验压力下的干涉信号进行处理。图6、图7、图8分别为四个通道原始包络峰值、估计干涉级次误差、恢复的真实包络峰值位置曲线图,可以看出在整个测量范围(100kPa-200kPa)内,干涉级次估计误差小于0.15,其小于最大有效估计误差0.5,恢复的真实包络峰值位置线性度非常好,且没有发生干涉级次误判导致的阶跃性错误,而因此本发明方法对于恢复真实包络峰值位置具有很强的可靠性。图9为各传感通道进行位置补偿后的压力解调误差,可以很清楚地看出,本发明方法的解调误差在任意通道上均能保持在0.14kPa以内,实现了多通道下F-P传感器的高精度解调。In order to more comprehensively verify the feasibility of this method, a 4-channel polarization low-coherence interferometer is taken as an example, with channel 4 as the calibration channel, and the experimental pressure increases monotonously from 100kPa to 200kPa at intervals of 0.5kPa. The interference signal at each experimental pressure for each sensing channel is processed. Figure 6, Figure 7, and Figure 8 are graphs of the original envelope peak value, the estimated interference order error, and the restored real envelope peak position of the four channels respectively. It can be seen that within the entire measurement range (100kPa-200kPa), the interference level The secondary estimation error is less than 0.15, which is less than the maximum effective estimation error of 0.5, and the linearity of the restored real envelope peak position is very good, and there is no step error caused by the misjudgment of the interference order. The network peak position has strong reliability. Figure 9 shows the pressure demodulation error after position compensation for each sensing channel. It can be clearly seen that the demodulation error of the method of the present invention can be kept within 0.14kPa on any channel, realizing the F-P sensor under multi-channel High-precision demodulation.
本发明的解调方法通过实验进行了验证,参见图4至图9。The demodulation method of the present invention has been verified through experiments, see FIG. 4 to FIG. 9 .
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