CN108717927B - Multichannel glow discharge penning ion source device - Google Patents
Multichannel glow discharge penning ion source device Download PDFInfo
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- CN108717927B CN108717927B CN201810498794.7A CN201810498794A CN108717927B CN 108717927 B CN108717927 B CN 108717927B CN 201810498794 A CN201810498794 A CN 201810498794A CN 108717927 B CN108717927 B CN 108717927B
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- 239000000919 ceramic Substances 0.000 claims abstract description 48
- 238000010438 heat treatment Methods 0.000 claims abstract description 43
- 239000012159 carrier gas Substances 0.000 claims abstract description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 8
- 238000004949 mass spectrometry Methods 0.000 abstract description 6
- 150000002500 ions Chemical class 0.000 description 83
- 210000004027 cell Anatomy 0.000 description 18
- 210000002381 plasma Anatomy 0.000 description 13
- 238000002347 injection Methods 0.000 description 8
- 239000007924 injection Substances 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 2
- 238000000375 direct analysis in real time Methods 0.000 description 2
- 238000012063 dual-affinity re-targeting Methods 0.000 description 2
- 239000012491 analyte Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/04—Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The invention discloses a multichannel glow discharge penning ion source device, which comprises a shell, a cathode disc, an anode honeycomb column, an air flow heating chamber and a repulsive electrode, wherein one end in the horizontal direction is an air inlet end, the other end opposite to the air inlet end is an air outlet end, the cathode disc, the anode honeycomb column, the air flow heating chamber and the repulsive electrode are sequentially arranged in an inner cavity of the shell along the air flow direction, a carrier gas inlet pipe communicated with the inner cavity of the shell is arranged on the air inlet end of the shell, the cathode disc consists of a ceramic disc and a plurality of needle-free cathode needles uniformly arranged on the ceramic disc, the ceramic disc is vertically arranged, the needle-free cathode needles are perpendicular to the ceramic disc, each needle-free cathode needle is inserted into a corresponding hole of the anode honeycomb column, so that the cathode disc and the anode honeycomb column are matched to form a multi-needle honeycomb structure, each needle-free cathode needle is grounded through a current limiting resistor, the anode honeycomb column is connected with direct current high voltage, and the repulsive electrode is connected with direct current voltage; the ionization efficiency of the sample can be greatly improved when the ionization device is used together with mass spectrometry technology.
Description
Technical Field
The invention relates to an ion source device, in particular to a multichannel glow discharge penning ion source device.
Background
The technologies of desorption electrospray ion source (DESI) and direct real-time ion source (DART) make it possible to directly and rapidly analyze a sample or a sample surface in an atmospheric pressure environment, solve the problems of complex sample pretreatment or easy sample pollution and the like existing in the traditional ion source, but also have the following defects:
1) DESI technology: the ionization solvent used can cause certain pollution to the environment, the ionization effect of the weak-polarity sample is poor, the polymer, multi-charge ions and the like generated in the ionization process make the finally obtained spectrogram complex, the operation condition is severe, high-voltage power supply is needed, and a high-voltage electrostatic field is needed to be constructed.
2) DART technique: for some unstable or easily-decomposed compounds, more fragment ions still can be generated in analysis, so that the identification and analysis of the analyte are affected, the structure is complex, the discharge mode is corona discharge, the current amount is small, the generated plasmas are also less, and the ionization efficiency of the sample is low.
Disclosure of Invention
The invention aims to solve the technical problem of providing a multichannel glow discharge penning ion source device which can greatly improve ionization efficiency of a sample when being used together with a mass spectrometry technology.
The technical scheme adopted for solving the technical problems is as follows: the multichannel glow discharge penning ion source device is characterized by comprising a shell, a cathode disc, an anode honeycomb column, an air flow heating chamber and a repulsive electrode, wherein one end of the shell in the horizontal direction is an air inlet end, the other end of the shell is an air outlet end, the cathode disc, the anode honeycomb column, the air flow heating chamber and the repulsive electrode are sequentially arranged in the inner cavity of the shell along the air flow direction, a carrier gas inlet pipe communicated with the inner cavity of the shell is arranged on the air inlet end of the shell, the cathode disc consists of a ceramic disc and a plurality of needleless cathode needles uniformly arranged on the ceramic disc, the ceramic disc is vertically arranged, the needleless cathode needles are perpendicular to the ceramic disc, each needleless cathode needle is inserted into a corresponding honeycomb hole of the anode honeycomb column, so that the cathode disc is matched with the anode honeycomb column to form a multi-needle honeycomb structure, each needleless cathode needle is grounded through a current limiting resistor, and the anode honeycomb column is connected with direct current high voltage, and the repulsive electrode is connected with direct current high voltage.
The air outlet end of the shell is connected with a conical ion delivery pipe with two open ends, the wide opening end of the conical ion delivery pipe is connected with the air outlet end of the shell and is communicated with the inner cavity of the shell, the repulsion electrode is arranged on the air outlet end of the shell, and the narrow opening end of the conical ion delivery pipe is used as an ion jet opening. Because an opening is directly formed on the air outlet end of the shell and is used as an ion outlet, the conducted ions are scattered, the air outlet end of the shell is connected with a conical ion outlet pipe, and the narrow opening end of the conical ion outlet pipe is used as an ion jet orifice, so that the jetted ions are gathered more.
The air flow heating chamber is provided with openings at two ends along the air flow direction, a heating device is arranged in the air flow heating chamber, the heating device is a plurality of horizontally arranged ceramic heating rods, and the ceramic heating rods are arranged on the wall of the air flow heating chamber along the periphery Xiang Bu. Here, the ceramic heating rods are circumferentially arranged on the wall of the airflow heating chamber, so that the heating is more uniform, and the airflow and ions are not affected.
The length of the ceramic heating rod is 10-300 mm.
The pitch between needleless cathode needles is 1-10 mm, the aperture of the hole of the anode honeycomb column is 1-6 mm, the hole depth of the hole of the anode honeycomb column is 1-30 mm, the central axis of the needleless cathode needle is consistent with the central axis of the corresponding hole of the anode honeycomb column, the needle point of the needleless cathode needle is 1-8 mm away from the tail end of the corresponding hole of the anode honeycomb column after being inserted into the corresponding hole of the anode honeycomb column, so as to normally receive the discharge generated at each place of the needleless cathode needle, and the pitch range between the tail end of the hole of the anode honeycomb column and the repulsive electrode is 10-500 mm. In general, the radial cross-sectional area of the cell holes of the anode honeycomb columns can be designed to be pi square millimeters, so that the cell holes of the anode honeycomb columns are denser, and the discharge generated by the needleless cathode needle can be maximized, thereby enabling the multichannel glow discharge penning ion source device to generate more plasmas.
The ceramic disc and the repulsion electrode are disc-shaped, the anode honeycomb column is cylindrical, the central axes of the ceramic disc, the anode honeycomb column and the repulsion electrode are consistent, and the peripheral walls of the ceramic disc, the anode honeycomb column and the repulsion electrode are in insulating connection with the cavity wall of the inner cavity of the shell.
The resistance value of the current limiting resistor is 100-10 MΩ; the anode honeycomb column is connected with direct current high voltage of 1 KV-6 KV; the repulsive electrode is connected with direct-current voltage of 50-500V, such as 180V.
The carrier gas introduced by the carrier gas inlet pipe is one of helium, nitrogen, hydrogen and argon, and the flow rate of the carrier gas is 0.01L/min-20L/min.
The number of the cathode needles without needle heads is 1-20.
The multichannel glow discharge penning ion source device is characterized by comprising a shell, a cathode disc, an anode grid, an air flow heating chamber and a repulsive electrode, wherein one end of the shell in the horizontal direction is an air inlet end, the other end of the shell is an air outlet end, the cathode disc, the anode grid, the air flow heating chamber and the repulsive electrode are sequentially arranged in the inner cavity of the shell along the air flow direction, a carrier gas inlet pipe communicated with the inner cavity of the shell is arranged on the air inlet end of the shell, the cathode disc consists of a ceramic disc and a plurality of needle-free cathode needles uniformly arranged on the ceramic disc, the ceramic disc is vertically arranged, the needle-free cathode needles are perpendicular to the ceramic disc, each needle-free cathode needle is inserted into the corresponding grid of the anode grid, so that the cathode disc and the anode grid are matched to form a multi-needle grid structure, each needle-free cathode needle is grounded through a current limiting resistor, and the anode honeycomb is connected with direct current high voltage, and the repulsive electrode is connected with direct current voltage.
Compared with the prior art, the invention has the advantages that:
1) Because the cathode disk is provided with a plurality of cathode needles without needle heads, the discharge channels are more and the area is large, so that the number of plasmas is increased, and the ionization of samples is facilitated.
2) The needle-free cathode needles are matched with the holes of the anode honeycomb columns, and the discharge between the needle-free cathode needles is promoted, so that the discharge voltage between the needle-free cathode needles and the anode honeycomb columns is reduced; in the same way, the grids of the needle-free cathode needles and the anode grids are matched, and the discharge between the needle-free cathode needles is promoted, so that the discharge voltage between the needle-free cathode needles and the anode grids is reduced, and therefore, under the same voltage condition, the sample ionization efficiency of the multi-channel glow discharge penning ion source device and the sample ionization efficiency of the mass spectrometry technology are far higher than that of the existing single-needle-plate structure ion source device and the sample ionization efficiency of the mass spectrometry technology.
3) The airflow heating chamber is utilized to heat the airflow first, so that the thermal movement speed can be increased, and the sample gasification and ionization are facilitated.
Drawings
Fig. 1 is a schematic diagram of the external structure of a multi-channel glow discharge penning ion source device according to the first embodiment;
FIG. 2 is a right side view of FIG. 1;
FIG. 3 is a left side view of FIG. 1;
FIG. 4 is a schematic cross-sectional view of the structure of FIG. 1 in the direction A-A;
FIG. 5 is an enlarged schematic view of portion H of FIG. 4;
FIG. 6 is a schematic cross-sectional view of the structure in the direction B-B in FIG. 4;
FIG. 7 is a schematic diagram showing the cooperation of a needleless cathode needle and a grid in a multi-channel glow discharge penning ion source apparatus according to the second embodiment;
FIG. 8 is a schematic diagram of a multi-channel glow discharge penning ion source apparatus of the present invention in use with a mass spectrometer;
fig. 9 is a schematic diagram of a multi-channel glow discharge penning ion source apparatus of the present invention in use with a mass spectrometer.
Detailed Description
The invention is described in further detail below with reference to the embodiments of the drawings.
Embodiment one:
as shown in fig. 1 to 6, the multi-channel glow discharge penning ion source device provided by the embodiment includes a housing 1 with one end in a horizontal direction being an air inlet end and the other opposite end being an air outlet end, and a cathode disc 2, an anode honeycomb column 3, an air flow heating chamber 4 and a repulsive electrode 5 sequentially arranged in an inner cavity of the housing 1 along an air flow direction, wherein the cathode disc 2 is composed of a ceramic disc 21 and a plurality of needle-free cathode needles (for example, 16) 22 uniformly arranged on the ceramic disc 21, the ceramic disc 21 is vertically arranged, the needle-free cathode needles 22 are perpendicular to the ceramic disc 21, the needle-free cathode needles 22 face the anode honeycomb column 3, each needle-free cathode needle 22 is inserted into a corresponding honeycomb hole 31 of the anode honeycomb column 3, so that the cathode disc 2 and the anode honeycomb column 3 are matched to form a multi-needle honeycomb structure, the ceramic disc 21 and the repulsive electrode 5 are disc-shaped, the anode honeycomb column 3 is cylindrical, the central axes of the ceramic disc 21, the anode honeycomb column 3 and the repulsive electrode 5 are consistent, and the axial directions of the ceramic disc 21, the anode honeycomb column 3 and the repulsive electrode 5 are consistent with the axial directions of the ceramic disc 21 and the inner cavity and the repulsive electrode 5 are consistent, and the outer cavity 1 is insulated with the housing wall 1; the gas inlet end of the shell 1 is provided with a carrier gas inlet pipe 6 communicated with the inner cavity of the shell 1, the carrier gas introduced by the carrier gas inlet pipe is one gas of helium, nitrogen, hydrogen and argon, the flow rate of the carrier gas is 0.01L/min-20L/min, if 2.5L/min is taken specifically, the gas outlet end of the shell 1 is connected with a conical ion delivery pipe 7 with two open ends, the wide opening end of the conical ion delivery pipe 7 is connected with the gas outlet end of the shell 1 and is communicated with the inner cavity of the shell 1, the repulsion electrode 5 is arranged on the gas outlet end of the shell 1, the narrow opening end of the conical ion delivery pipe 7 is used as an ion outlet 71, and since one opening is directly formed on the gas outlet end of the shell 1 as an ion outlet, the exported ions are scattered, the gas outlet end of the shell 1 is connected with the conical ion delivery pipe 7, and the narrow opening end of the conical ion delivery pipe 7 is used as the ion outlet 71, so that the ejected ions can be gathered more; each needleless cathode needle 22 is grounded through a current limiting resistor R, the resistance range of the current limiting resistor R is 1MΩ -10 MΩ, the anode honeycomb column 3 is connected with direct current high voltage of 1 KV-6 KV, such as 4KV, and the repulsion electrode 5 is connected with direct current voltage of 50-500V, such as 180V. In the multichannel glow discharge penning ion source device, as the cathode disk 2 is provided with the plurality of cathode needles 22 without needle heads, the discharge area is large, so that the number of plasmas is increased, and the ionization of a sample is more facilitated due to the increase of the number of plasmas; the needle-free cathode needles 22 are matched with the anode honeycomb columns 3, and the discharge between the needle-free cathode needles 22 is promoted, so that the discharge voltage between the needle-free cathode needles 22 and the anode honeycomb columns 3 is reduced, and under the same voltage condition, the sample ionization efficiency of the multi-needle-honeycomb-structured multi-channel glow discharge penning ion source device and the mass spectrometry technology is far higher than that of the existing single-needle-plate-structure ion source device and the mass spectrometry technology.
In this embodiment, the two ends of the air flow heating chamber 4 along the air flow direction are opened, a heating device (not shown in the figure) is arranged in the air flow heating chamber 4, the heating device is a plurality of horizontally placed ceramic heating rods, the ceramic heating rods are circumferentially arranged on the chamber wall of the air flow heating chamber 4, so that the heating is more uniform, the air flow and ions are not affected, the length of the ceramic heating rods is 10-300 mm, and for example, the length of the ceramic heating rods is 80mm. In this embodiment, the pitch between the needleless cathode needles 22 is 1 to 10mm, such as the pitch is specifically selected to be 3mm, the number of needleless cathode needles 22 is 1 to 20, such as 16 needleless cathode needles 22 are specifically set, the aperture of the cell holes 31 of the anode cell column 3 is 1 to 6mm, such as the aperture is designed to be 2mm, the hole depth of the cell holes 31 of the anode cell column 3 is 1 to 30mm, such as the hole depth is designed to be 10mm, the central axis of the needleless cathode needles 22 coincides with the central axis of the corresponding cell holes 31 of the anode cell column 3, and the needleless cathode needles 22 are inserted into the corresponding cell holes 31 of the anode cell column 3 with the needleless cathode needles 22 being 1 to 8mm, such as designed to be 4mm, from the ends of the corresponding cell holes 31 of the anode cell column 3 so as to normally receive the electric discharge generated everywhere of the needleless cathode needles 22; the spacing between the end of the cell hole 31 of the anode cell column 3 and the repulsive electrode 5 is in the range of 10 to 500mm, such as designed to be 200mm.
In this embodiment, the radial cross-sectional area of the cells 31 of the anode cell pillars 3 may be designed to be pi square millimeters, so that the denser cells 31 of the anode cell pillars 3 may maximize the discharge generated by the needleless cathode needle 22, thereby enabling the multi-channel glow discharge ion source apparatus to generate more plasma. The working process of the multichannel glow discharge penning ion source device is as follows: nitrogen is introduced into the inner cavity of the shell 1 through the carrier gas introducing pipe 6 at the flow rate of 0.01L/min-20L/min to serve as carrier gas, each needleless cathode needle 22 is grounded through a current limiting resistor R, the anode honeycomb column 3 is connected with direct current high voltage of 1 KV-6 KV, the multichannel glow discharge penning ion source device requires discharge to be stabilized in a glow area, and the repulsion electrode 5 is connected with direct current voltage with the voltage value of 50-500V, such as 180V; the plasma generated by the discharge of the needleless cathode needle 22 and the anode honeycomb column 3 is fully received by the anode honeycomb column 3, the heating device is generally heated to 100-550 ℃ from room temperature, such as to 300 ℃, the energy of the plasma is enhanced by heating, the generated plasma finally passes through the repulsive electrode 5, the repulsive electrode 5 enhances the kinetic energy of the plasma, and the plasma from the repulsive electrode 5 is ejected from the ion ejection opening 71 for a longer ejection range.
Embodiment two:
the structure of the multi-channel glow discharge penning ion source device according to this embodiment is basically the same as that of the multi-channel glow discharge penning ion source device according to the first embodiment, and only the difference is that the first embodiment adopts a multi-needle-grid structure, as shown in fig. 7, that is, the multi-channel glow discharge penning ion source device comprises a shell 1 with one end in the horizontal direction as an air inlet end and the other opposite end as an air outlet end, and a cathode disc 2, an anode grid 8, an airflow heating chamber 4 and a repulsive electrode 5 sequentially arranged in the inner cavity of the shell 1 along the airflow direction, a carrier gas inlet pipe 6 communicated with the inner cavity of the shell 1 is arranged on the air inlet end of the shell 1, the cathode disc 2 is composed of a ceramic disc 21 and a plurality of needle-free cathode needles 22 uniformly arranged on the ceramic disc 21, the ceramic disc 21 is vertically arranged, each needle-free cathode needle 22 is inserted into a corresponding grid 81 of the anode grid 8, so that the cathode disc 2 and the anode grid 8 are matched to form the multi-needle-grid structure, each needle-free cathode needle 22 is grounded through a current limiting resistor R, the anode grid 8 is connected to the high-voltage direct current voltage of the repulsive electrode of 1KV 6, and the high voltage direct current voltage is connected to the repulsive electrode.
The schematic diagram of the use of the multi-channel glow discharge penning ion source device and the mass spectrometer is shown in fig. 8, the ion injection port 71 of the multi-channel glow discharge penning ion source device E faces the inlet of the mass spectrometer F, and the ion injection port 71 of the multi-channel glow discharge penning ion source device E and the inlet of the mass spectrometer F satisfy: taking the ion jet orifice 71 of the multichannel glow discharge penning ion source device E as a circle center, drawing a circle with a radius of 3cm as a circle length and being perpendicular to the axis of the ion jet orifice 71 of the multichannel glow discharge penning ion source device E, wherein the axial extension line of the inlet of the mass spectrometer F falls in the circumference of the circle with the radius of 3cm, and the distance between the ion jet orifice 71 of the multichannel glow discharge penning ion source device E and the inlet of the mass spectrometer F is less than or equal to 5cm; or the ion jet opening 71 of the multichannel glow discharge penning ion source device E is axially extended into the circumference of a circle with the radius of 3cm, the distance between the ion jet opening 71 of the multichannel glow discharge penning ion source device E and the inlet of the mass spectrometer F is less than or equal to 5cm. An outlet pipeline (not shown in the figure) of a sample to be detected is connected with an inlet of an atomizing needle G, an outlet of the atomizing needle G is positioned between an ion injection port 71 of the multichannel glow discharge penning ion source device E and an inlet of a mass spectrometer F, the outlet of the atomizing needle G faces to a connecting line of the ion injection port 71 of the multichannel glow discharge penning ion source device E and the inlet of the mass spectrometer F, the outlet of the atomizing needle G is 0 cm to 6cm away from the connecting line of the ion injection port 71 of the multichannel glow discharge penning ion source device E and the inlet of the mass spectrometer F, and the projection length of the connecting line of the outlet of the atomizing needle G and the inlet of the mass spectrometer F on an extension line of the inlet direction of the mass spectrometer F is smaller than or equal to 4cm. After the plasma ejected from the ion ejection opening 71 of the multichannel glow discharge penning ion source device E contacts with a sample to be detected, the sample is ionized through the processes of penning ionization (Penning ionization), proton transfer, charge exchange and the like, and then the sample is detected by using a mass spectrometer F.
Another schematic diagram of the use of the multichannel glow discharge penning ion source device E and the mass spectrometer F is shown in fig. 9, the ion injection port 71 of the multichannel glow discharge penning ion source device E is inclined by 10 ° to 60 ° clockwise, such as 30 °, the inlet end of the mass spectrometer F is inclined by the same angle anticlockwise, the extension line of the ion injection port 71 of the multichannel glow discharge penning ion source device E directly strikes the sample surface, the sample is reflected to the inlet of the mass spectrometer F through the sample surface, and the distance between the sample to be detected and the connection line of the ion injection port 71 of the multichannel glow discharge penning ion source device E and the inlet of the mass spectrometer F is 0 cm to 6cm. After the plasma ejected from the ion ejection opening 71 of the multichannel glow discharge penning ion source device E contacts with a sample to be detected, the sample is ionized through the processes of penning ionization (Penning ionization), proton transfer, charge exchange and the like, and then the sample is detected by using a mass spectrometer F.
Claims (10)
1. The multichannel glow discharge penning ion source device is characterized by comprising a shell, a cathode disc, an anode honeycomb column, an air flow heating chamber and a repulsive electrode, wherein one end of the shell in the horizontal direction is an air inlet end, the other end of the shell is an air outlet end, the cathode disc, the anode honeycomb column, the air flow heating chamber and the repulsive electrode are sequentially arranged in the inner cavity of the shell along the air flow direction, a carrier gas inlet pipe communicated with the inner cavity of the shell is arranged on the air inlet end of the shell, the cathode disc consists of a ceramic disc and a plurality of needleless cathode needles uniformly arranged on the ceramic disc, the ceramic disc is vertically arranged, the needleless cathode needles are perpendicular to the ceramic disc, each needleless cathode needle is inserted into a corresponding honeycomb hole of the anode honeycomb column, so that the cathode disc is matched with the anode honeycomb column to form a multi-needle honeycomb structure, each needleless cathode needle is grounded through a current limiting resistor, and the anode honeycomb column is connected with direct current high voltage, and the repulsive electrode is connected with direct current high voltage.
2. The multi-channel glow discharge penning ion source device according to claim 1, wherein the outlet end of the housing is connected with a tapered ion delivery tube with two open ends, the wide end of the tapered ion delivery tube is connected with the outlet end of the housing and is communicated with the inner cavity of the housing, the repulsive electrode is arranged on the outlet end of the housing, and the narrow end of the tapered ion delivery tube is used as an ion ejection opening.
3. The multi-channel glow discharge penning ion source device according to claim 1 or 2, wherein said air flow heating chamber has two openings along the air flow direction, a heating device is provided in said air flow heating chamber, said heating device is a plurality of horizontally placed ceramic heating rods, and a plurality of said ceramic heating rods are disposed on the wall of said air flow heating chamber along the periphery Xiang Bu.
4. A multi-channel glow discharge penning ion source device according to claim 3 wherein said ceramic heater rod has a length of 10-300 mm.
5. The multi-channel glow discharge penning ion source device of claim 4, wherein said needleless cathode pins are spaced 1-10 mm apart, said anode cell has a hole diameter of 1-6 mm, said anode cell has a hole depth of 1-30 mm, said needleless cathode pins have a central axis aligned with a central axis of said anode cell, said needleless cathode pins have a needle tip spaced 1-8 mm apart from an end of said anode cell after insertion into said anode cell, and said anode cell has a hole diameter ranging from 10-500 mm apart from an end of said anode cell to said repeller electrode.
6. The multi-channel glow discharge penning ion source device of claim 1, wherein said ceramic disk and said repeller electrode are both disk-shaped, said anode honeycomb column is cylindrical, the central axes of said ceramic disk, said anode honeycomb column and said repeller electrode are identical, and the peripheral walls of said ceramic disk, said anode honeycomb column and said repeller electrode are all in insulated connection with the inner cavity wall of said housing.
7. The multi-channel glow discharge penning ion source device according to claim 1, wherein the current limiting resistor has a resistance value of 100 Ω -10 mΩ; the anode honeycomb column is connected with direct current high voltage of 1 KV-6 KV; the repulsive electrode is connected with direct-current voltage of 50-500V.
8. The multi-channel glow discharge penning ion source device according to claim 1, wherein the carrier gas introduced into the carrier gas inlet pipe is one of helium, nitrogen, hydrogen and argon, and the flow rate of the carrier gas is 0.01L/min-20L/min.
9. The multi-channel glow discharge penning ion source device of claim 1, wherein the number of needleless cathode pins is 2-20.
10. The multichannel glow discharge penning ion source device is characterized by comprising a shell, a cathode disc, an anode grid, an air flow heating chamber and a repulsive electrode, wherein one end of the shell in the horizontal direction is an air inlet end, the other end of the shell is an air outlet end, the cathode disc, the anode grid, the air flow heating chamber and the repulsive electrode are sequentially arranged in the inner cavity of the shell along the air flow direction, a carrier gas inlet pipe communicated with the inner cavity of the shell is arranged on the air inlet end of the shell, the cathode disc consists of a ceramic disc and a plurality of needle-free cathode needles uniformly arranged on the ceramic disc, the ceramic disc is vertically arranged, the needle-free cathode needles are perpendicular to the ceramic disc, each needle-free cathode needle is inserted into the corresponding grid of the anode grid, so that the cathode disc and the anode grid are matched to form a multi-needle grid structure, each needle-free cathode needle is grounded through a current limiting resistor, and the anode grid is connected with direct-current high voltage, and the repulsive electrode is connected with direct-current voltage.
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| CN113488364B (en) * | 2021-07-13 | 2024-05-14 | 迈胜医疗设备有限公司 | Multi-particle hot cathode penning ion source and cyclotron |
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| JP4063784B2 (en) * | 2003-05-15 | 2008-03-19 | シャープ株式会社 | Ion generator, ion generator |
| WO2006093076A1 (en) * | 2005-02-28 | 2006-09-08 | Kyoto Institute Of Technology | Ion source |
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| JPH06231709A (en) * | 1993-02-03 | 1994-08-19 | Kobe Steel Ltd | Method for generating pulse ion beam |
| RU2205467C2 (en) * | 2001-06-22 | 2003-05-27 | Донец Евгений Денисович | Ion source |
| RU2002122008A (en) * | 2002-08-12 | 2004-02-27 | Федеральное государственное унитарное предпри тие Государственный научный центр Российской Федерации Институт теоретической и экспериментальной физики | A source with a cathode cone of high-frequency pulses of hydrogen ions |
| JP2004095284A (en) * | 2002-08-30 | 2004-03-25 | Toshiba Corp | Cathode-ray tube |
| JP2004169606A (en) * | 2002-11-19 | 2004-06-17 | National Aerospace Laboratory Of Japan | Hollow cathode |
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| CN108717927A (en) | 2018-10-30 |
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