CN105514803A - Array micro-hollow cathode discharge-triggered gas switch - Google Patents
Array micro-hollow cathode discharge-triggered gas switch Download PDFInfo
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- CN105514803A CN105514803A CN201610028555.6A CN201610028555A CN105514803A CN 105514803 A CN105514803 A CN 105514803A CN 201610028555 A CN201610028555 A CN 201610028555A CN 105514803 A CN105514803 A CN 105514803A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T14/00—Spark gaps not provided for in groups H01T2/00 - H01T13/00
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Abstract
The invention belongs to the technical field of pulse power, and particularly relates to an array micro-hollow cathode discharge-triggered gas switch. The switch structure mainly comprises an external insulating cylinder, main electrodes, array micro-hollow cathode discharge generators, pneumatic connectors, connecting and reinforcing parts and the like. As a trigger of the gas switch, the array micro-hollow cathode discharge generator is of an anode-medium layer-cathode structure, and a plurality of micropore arrays are perforated on the array micro-hollow cathode discharge generator by laser. The generator carries out micro-hollow cathode discharge under the action of pulsed voltage, and by utilizing a large area of high-density electrons as initial induction electrons produced by array discharge, the breakdown conduction of the gas switch is realized ultimately. Because the trigger is implemented by adopting microplasma discharge, compared with the triggering mechanism of conventional three-electrode field distortion and multi-pole multi-channel switches, the gas switch requires low triggering voltage and little energy for triggering, which is favorable for the miniaturization of switch-triggered power supplies; moreover, multi-trigger multi-point synchronous triggering can realize the multi-channel breakdown conduction of the switch and decrease the conduction inductance of the gas switch.
Description
Technical field
The invention belongs to technical field of pulse power, be specifically related to a kind of gas switch.
Background technology
Gas switch is the switch using gas as dielectric, its main feature is that operating voltage is high, through-current capability is strong, be widely used in highpowerpulse power technology, be more typically applied on linear transformer driver (LinearTransformerDriver, hereinafter referred to as LTD).LTD is a kind of voltage module utilizing multichannel relatively low, and obtained the pulse power supply of high-voltage great-current nanosecond pulse by induced voltage superimposing technique, extensive LTD is made up of tens thousand of discharge modules, therefore proposes requirements at the higher level to switch trigger characteristic.Many employings three electrode field distortions or multipole multi-channel switch in current LTD device, its general principle triggered utilizes trigger impulse voltage to realize overvoltage avalanche breakdown to the change that switch gap electrical field distributes, and the pulse voltage amplitude changed needed for switch internal Electric Field Distribution is very high, fundamental sum switch voltage, a magnitude, makes the circuits for triggering of a switch inherently very difficult fast pulse power supply realized.
Also there is the triggering mode of a lot of novelty in recent years, ultraviolet pre-trigger and laser triggering are as the triggering mode of novelty, trigger mechanism is different with multipole multi-channel switch from three electrode field distortions, it irradiates switch gap by ultraviolet or laser and forms high density ionized space, produce initiating electron and induced gap avalanche breakdown conducting, but it needs ultraviolet that configuration energy is very high or laser generator equally, and for extensive LTD device, trigger equipment is equally very complicated huge.Same to produce photoinduced electron for target, by plasma means, photo ionization is replaced with gas discharge plasma, by electrode structure reasonable in design, trigger voltage is reduced while realizing high-density plasma electric discharge, and then the miniaturization realizing trigger can be helped, will be a kind of feasible effective technological means.
Micro-hollow cathode (Micro-hollowCathode, hereinafter referred to as MHC) be a kind of electrode structure that can produce micro discharge plasma at high pressure, its structure is made up of the anode of arbitrary shape and micro-hollow negative electrode, according to the theory that hollow cathode pD value product is certain, (p refers to the air pressure of discharge gas component, D refers to the inflated diameter of negative electrode), because pore size is in submillimeter magnitude, it can realize glow discharge under atmospheric pressure; On the other hand, the annular electrode structure of micro-hollow cathode makes electronics under the effect of negative electrode radial electric field, achieves oscillatory process, considerably increases the chance of ionization by collision, so this electric discharge can realize very high electron density; Meanwhile, in order to obtain more massive electric discharge, usually in a planar cathode, processing multiple micropore, realizing the electric discharge of array micropore; Finally, because size is small, the trigger voltage required for electric discharge is very low, usually only needs several kilovolts.Hyperbar electric discharge, large area array discharge plasma, high electron density and these characteristics of low trigger voltage, for it provides good theoretical foundation as gas switch trigger source.
Summary of the invention
The object of the invention is to propose a kind of new gas discharge switch, problem large with high, the synchronous triggering difficulty of trigger voltage solving traditional three electrode field distortions and multipole Multi-channe gas switch at present, be difficult to realize the miniaturization of triggering voltage in large-scale switches use field.
The new gas discharge switch structure that the present invention proposes, it is a kind of gas discharge switch utilizing array microhollow cathode discharge to trigger, the trigger voltage that the microplasma specifically utilizing array microhollow cathode discharge to produce has is low, produce electronics high density and can realize large area porous array electric discharge advantage, trigger means is it can be used as to be applied in gas switch, thus the trigger voltage solving traditional three electrode field distortions and multipole Multi-channe gas switch is at present high, synchronous triggering difficulty is large, the problem being difficult to the miniaturization realizing triggering voltage in field is used in large-scale switches.
The gas switch that array microhollow cathode discharge provided by the invention triggers, critical piece comprises: switch main electrode and connector, external insulation cylinder, array microhollow cathode discharge generator and gas path joint; Its structure as depicted in figs. 1 and 2, wherein:
Described external insulation barrel shape is hollow shape cylinder, inwall is for installing switch main electrode and array microhollow cathode discharge generator, and centre is provided with some through holes, provides the passage of the electrical connection of triggering voltage equipment, and gas channels, realize the control of switch internal air pressure; Outer wall has circle arc curve structure to be used for increasing surface distance, prevents switch creepage;
Described switch main electrode is upper and lower two cylindrical electrodes, switch main electrode connector is two, each connector is divided into disk and connecting thread bar two parts, two disks cover insulating cylinder upper/lower terminal outside respectively, and fixing with O-ring seal sealing, simultaneously as the electrical connection of switch and external circuit; One end of upper and lower two cylindrical electrodes connects, is fixed on the centre of two disks respectively by connecting thread bar, the other end of upper and lower two cylindrical electrodes is relative, form main electrode gap, be screwed into the degree of depth of connecting thread bar by adjustment, main electrode gap length can be changed flexibly with the application of applicable different voltage request; Shown in Figure 1.
Wherein, certain circular arc chamfering should be processed in the face of two electrode tips, so that the electric fields uniform distribution under realizing quiescent voltage.
Wherein, switch main electrode can adopt brass material, and connector can adopt stainless steel.
Described array microhollow cathode discharge generator is the core component of this switch as the trigger of switch, its general structure is three layers of column structure of " anode-dielectric layer-negative electrode ", negative electrode, at internal layer, is solid cylinder structure, cylindrical rearward end perforate tapping, for the electrical connection with connector, anode, at skin, is hollow cylinder structure, is wrapped in whole generator outside, two parts, in centre, are isolated and realize electric insulation by dielectric layer; At the micropore that cylindrical anode leading section surface has some laser drill to realize, these micropores run through anode, dielectric layer, and are deep in cathode face, form microwell array; Array microhollow cathode discharge generator has three, and end is fixed on the central region of external insulation cylinder inwall thereafter, and in 120 degree of angular distribution in same plane; Three negative electrode rearward end are drawn outside external insulation cylinder via negative electrode extraction electrode, three anode leading section surfaces are just to main electrode gap, make the plasma of generation can be accelerated to main electrode gap on shortest paths, three anode rearward end all connecting ring are interconnected, and draw external insulation cylinder via extraction electrode, shown in Figure 2.Generator realizes microhollow cathode discharge under pulse voltage effect, and utilize the large-area high density electronics of array electric discharge generation as initial photoinduced electron, what finally realize switch punctures conducting.
The negative electrode of generator and anode can adopt stainless steel, and dielectric layer adopts polytetrafluoroethylene material, and outside all interfaces are all through certain chamfered, realize rounding off.
Described gas path joint adopts fast pneumatic joint, and this gas path joint totally 2 is 1 air inlet connections, and 1 gas outlet joint, they are fixed on external insulation cylinder middle part by screw thread and sealing ring, shown in Figure 2.
Advantage of the present invention is mainly reflected in:
1, compare three traditional electrode field distortions and multistage multi-channel switch, trigger and no longer rely on the pulse voltage of huge amplitude (with switch voltage a magnitude) to realize overvoltage avalanche breakdown by changing switch internal Electric Field Distribution, but by large-area high density electronic induction gap breakdown that array microhollow cathode discharge produces, because microhollow cathode discharge is microplasma discharge, trigger voltage needed for it very low (several kilovolt), required trigger energy very little (joule is MJ magnitude even), greatly can reduce volume and the dielectric strength requirement of trigger impulse power supply, be conducive to the miniaturization of the trigger equipment realizing extensive LTD device,
2, micro-hollow cathode structure of array, can realize under a set of triggering voltage equipment, a trigger impulse effect, realize the synchronous discharge in parallel of multiple micropore, on the basis that single micropore discharges, use same power-supply device, but substantially increase the area of micro discharge plasma, promote to produce more more large-area initial photoinduced electron.The generation of large-area high-density initiating electron can the avalanche breakdown in easier inducing switch gap, from the parameter angle of switch, will be conducive to shortening switch time delay and shake; On the other hand, due to the generation of large area array electric discharge, switch is more easily triggered conducting, this makes switch can reduce its service factor (switch duty factor definition is: the ratio of the operating voltage of switch and the static self-breakdown voltage of switch) further, this will contribute to the stability improving switch, reduce the problem that switch repeatedly triggers the self breakdown probability rising brought;
3, three array microhollow cathode discharge generators are adopted to be that level 120 degree is arranged evenly, can in a trigger process, produce three large area array electric discharges, realize switch on main gap, form multiple avalanche breakdown passage, many arc channel can make the conducting inductance of switch reduce (parallel connection being equivalent to several conducting inductance), the effect that similar multipole multi-channel switch reaches can be played, and simpler than multipole multi-channel switch electrode structure, trigger and more easily realize;
4, three traditional electrode field distortions or multipole multi-channel switch, middle trigger electrode will play the effect of connection two sub-gaps (upper/lower electrode forms sub-gap with middle trigger electrode respectively) electric arc when switch conduction as transition electrode, now trigger electrode is the part in conducting loop, because during switch conduction, main electrode high pressure is introduced into trigger electrode, triggering voltage needs to take into full account electrical isolation, to prevent by large voltage and overcurrent damage.And adopt this switch plasma triggering mode, trigger architecture only produces photoinduced electron as a plasma generator, itself is not in switching circuitry, and generator is originally placed as perpendicular to switch gap, reduce switch conduction loop to greatest extent to the impact of trigger architecture, this can simplify the design of triggering voltage shielding system, is conducive to the miniaturization realizing switch triggering power supply equally, also reduces the insulating requirements to activating electrical circuit further.
Accompanying drawing explanation
Fig. 1 is the agent structure schematic diagram of this gas switch.
Fig. 2 is the top cross-sectional view of this gas switch.
Fig. 3 is array micro-hollow cathode surface texture figure.
Number in the figure: 1-switch upper electrode terminal pad, 2-Electrode connection dish fixed screw, 3-O-ring seal, 4-switch upper electrode, 5-Trigger generator negative electrode extraction electrode, 6-external insulation cylinder, 7-switch bottom electrode, 8-switch bottom electrode terminal pad, 9-Trigger generator anode, 10-Trigger generator dielectric layer, 11-microwell array structure, 12-Trigger generator holder, 13-Trigger generator negative electrode, 14-Trigger generator anode connecting ring, 15-pneumatic joint, 16-Trigger generator anode extraction electrode, 17-anode hold-down nut.
Embodiment
The processing and implementation of gas switch:
The gas switch agent structure that the present invention realizes is cylindrical (with reference to accompanying drawing 1), switch main electrode is divided into upper and lower two electrodes 4,7, be distributed in the upper and lower both sides of external insulation cylindrical shell 6, external insulation cylinder 6 bosom is the micro-hollow cathode generator of array, and enters air outlet adapter.External insulation cylinder adopts polymethyl methacrylate material, reference dimension is: the high 90mm of cylinder, the thick 15mm of barrel, inner and outer diameter are respectively 56mm and 86mm, also can design corresponding outside dimension according to specific works voltage and operational environment, outer surface anti-tracking screw thread can according to electric pressure respective design; Switch main electrode is solid cylinder, and diameter is 10mm, and adopt brass material, edge 3mm chamfering, this chamfer angle also can design corresponding numerical value according to the concrete size design of switch by electromagnetic field simulation software; The terminal pad 1 of switch main electrode adopts stainless steel, dish is dimensioned slightly smaller than external insulation cylinder, be covered in external insulation cylinder upper and lower surface, play the effect of fixing upper and lower main electrode and the inner confined space of formation, the perforate of terminal pad 1 marginal surface, fixed by fixed screw 2 and external insulation cylinder 6, terminal pad 1 realizes sealing by O-ring seal 3 with external insulation cylinder 6; Inlet, outlet joint 15 adopts the general fast pneumatic joint of ready-made purchase, and this joint is fixed sealing by screw thread and sealant tape, easy for installation, and the quick plug-in that can realize gas circuit connects, without the need to other sealing fixing means;
Negative electrode 13 and the anode 9 of the micro-hollow cathode generator of array are stainless steel, circular arc chamfering process is done on surface, dielectric layer 10 is polytetrafluoroethylene material, anode and thickness of dielectric layers control at 0.8 ~ 1mm, three parts adopt bonding way combination forming, and carry out the filling in reinforcing and gap with semi-solid insulating cement, and generator overall diameter is 8mm, tube length 15mm, concrete size during enforcement can make the appropriate adjustments according to switch size design; 3 generators are the mid-plane (with reference to accompanying drawing 2) that 120 degree of even angle are distributed in switch, wherein the negative electrode of each generator is all drawn by extraction electrode 5, the anode 9 of 3 generators is connected by stainless connecting ring 14, insulating cylinder inwall is pressed close in the design of connecting ring 14 as far as possible, and drawn by a stainless steel extraction electrode 16, the adherent design of annular can reduce the impact of trigger electrode on switch gap electrical field as far as possible; Microwell array structure adopts laser precision machining mode, single micropore 11 size is at 0.5 ~ 0.7mm, pitch of holes 0.8 ~ 1mm, the array way of micropore with reference to accompanying drawing 3, can also design the array way of other shapes, the through anode of micropore, dielectric layer, and enter the degree of depth of cathode portion 1mm, laser processing precision is high, and consistency is better, and other processing mode of reference can also comprise precision optical machinery processing and etching plasma processing etc.
The working method of gas switch:
This gas switch needs to coordinate corresponding pulse power equipment, gas circuit control equipment and high voltage installation to use when using.The upper and lower electrode of gas switch is connected with external high pressure circuit by Electrode connection dish, and external high pressure is generally the transmission line of high-tension storage capacitor or charging; Fast pneumatic joint connects extraneous gas control appliance, can the air pressure of adjustments of gas switch internal and gas component according to demand; The static self-breakdown voltage of different switches can be realized by adjusting upper and lower electrode spacing (i.e. switch puncture gap) and gas component and air pressure, this numerical value determines the upper limit of switch voltage, suitable value can be determined according to real work parameter when concrete use, definition base is Ba Shen theorem: under certain gas component, and the product puncturing gap and air pressure determines the self-breakdown voltage in gap; Array microhollow cathode discharge generator in the middle part of gas switch has 4 extraction electrodes, be respectively 3 negative electrodes and 1 common anode of 3 generators, during enforcement, general 3 negative electrodes link together, and realize the electrical connection with pulse power equipment by extraction electrode.During switch, when being provided a suitable trigger voltage pulse by pulse power equipment, can realize the array microhollow cathode discharge of Trigger generator, induced breakdown gap punctures, and realizes switch conduction.
Claims (3)
1. a gas switch for array microhollow cathode discharge triggering, is characterized in that, comprising: switch main electrode and connector, external insulation cylinder, array microhollow cathode discharge generator and gas path joint; Wherein:
Described external insulation barrel shape is hollow shape cylinder, inwall is for installing switch main electrode and array microhollow cathode discharge generator, and centre is provided with some through holes, provides the passage of the electrical connection of triggering voltage equipment, and gas channels, realize the control of switch internal air pressure; Outer wall has circle arc curve structure to be used for increasing surface distance, prevents switch creepage;
Described switch main electrode is upper and lower two cylindrical electrodes, switch main electrode connector is two, each connector is divided into disk and connecting thread bar two parts, two disks cover insulating cylinder upper/lower terminal outside respectively, and fixing with O-ring seal sealing, simultaneously as the electrical connection of switch and external circuit; One end of upper and lower two cylindrical electrodes connects, is fixed on the centre of two disks respectively by connecting thread bar, the other end of upper and lower two cylindrical electrodes is relative, form main electrode gap, be screwed into the degree of depth of connecting thread bar by adjustment, main electrode gap length can be changed flexibly with the application of applicable different voltage request;
Described array microhollow cathode discharge generator is as the trigger of switch, for three layers of column structure of " anode-dielectric layer-negative electrode ", negative electrode, at internal layer, is solid cylinder structure, cylindrical rearward end perforate tapping, for the electrical connection with connector, anode, at skin, is hollow cylinder structure, is wrapped in whole generator outside, two parts, in centre, are isolated and realize electric insulation by dielectric layer; At the micropore that cylindrical anode leading section surface has some laser drill to realize, these micropores run through anode, dielectric layer, and are deep in cathode face, form microwell array; Array microhollow cathode discharge generator has three, and end is fixed on the central region of external insulation cylinder inwall thereafter, and in 120 degree of angular distribution in same plane; Three negative electrode rearward end are drawn outside external insulation cylinder via negative electrode extraction electrode, three anode leading section surfaces are just to main electrode gap, the plasma of generation is made to be accelerated to main electrode gap on shortest paths, three anode rearward end are interconnected by connecting ring, and draw external insulation cylinder via extraction electrode;
Described gas path joint adopts fast pneumatic joint, and this gas path joint totally 2 is 1 air inlet connections, and 1 gas outlet joint, they are fixed on external insulation cylinder middle part by screw thread and sealing ring.
2. the gas switch of array microhollow cathode discharge triggering according to claim 1, is characterized in that: the upper and lower two electrode front end faces of described switch main electrode are through circular arc chamfering process, so that the electric fields uniform distribution under realizing quiescent voltage.
3. the gas switch of array microhollow cathode discharge triggering according to claim 1 and 2, it is characterized in that: switch main electrode adopts brass material, the connector of electrode adopts stainless steel, external insulation cylinder adopts polymethyl methacrylate material, the anode of array microhollow cathode discharge generator and negative electrode adopt stainless steel, and dielectric layer adopts polytetrafluoroethylene material.
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| CN111029907A (en) * | 2019-12-09 | 2020-04-17 | 西安交通大学 | Main electrode for flexible direct current transmission and preparation method |
| CN111093312A (en) * | 2019-12-30 | 2020-05-01 | 北京应用物理与计算数学研究所 | Novel double-layer hole ion leading-out and accelerating system |
| CN111613971A (en) * | 2020-07-01 | 2020-09-01 | 哈尔滨理工大学 | High-voltage quick switch based on controllable gas environment and laser induced discharge |
| CN113237945A (en) * | 2021-05-14 | 2021-08-10 | 宁波江丰电子材料股份有限公司 | Sample preparation method of high-purity indium in glow discharge mass spectrum |
| CN115189234A (en) * | 2022-05-06 | 2022-10-14 | 国网湖北省电力有限公司电力科学研究院 | Low-energy laser triggered gas switch system |
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| CN111029907A (en) * | 2019-12-09 | 2020-04-17 | 西安交通大学 | Main electrode for flexible direct current transmission and preparation method |
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| CN111093312A (en) * | 2019-12-30 | 2020-05-01 | 北京应用物理与计算数学研究所 | Novel double-layer hole ion leading-out and accelerating system |
| CN111613971A (en) * | 2020-07-01 | 2020-09-01 | 哈尔滨理工大学 | High-voltage quick switch based on controllable gas environment and laser induced discharge |
| CN111613971B (en) * | 2020-07-01 | 2024-03-29 | 哈尔滨理工大学 | High-voltage fast switch based on controllable gas environment and laser-induced discharge |
| CN113237945A (en) * | 2021-05-14 | 2021-08-10 | 宁波江丰电子材料股份有限公司 | Sample preparation method of high-purity indium in glow discharge mass spectrum |
| CN115189234A (en) * | 2022-05-06 | 2022-10-14 | 国网湖北省电力有限公司电力科学研究院 | Low-energy laser triggered gas switch system |
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