CN108709913A - Gas sensor sensitive material and preparation method thereof - Google Patents
Gas sensor sensitive material and preparation method thereof Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
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- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
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Abstract
The invention discloses a kind of gas sensor sensitive materials and preparation method thereof.Wherein, the gas sensor sensitive material contains following component：SnO289~96wt%, Sb2O32.5~4.5wt%, ZrO20.5~4wt%, SiO20.5~2.5wt%, CaF20.5~2.5wt%.For technical solution of the present invention by being formulated reasonable design, prepared air-sensitive slurry is uniform, and introduces ZrO2And CaF2, coordinate Sb2O3And SiO2Deng further improving sensitive membrane stability and improve the gas-sensitive reaction activity of sensitive membrane；Meanwhile the size of each recipe ingredient is rationally controlled, improve gas sensor sensitivity and long-term working stability.
Description
Technical field
The present invention relates to gas sensor materials, more particularly to gas sensor sensitive material and preparation method thereof.
Background technology
Core one of of the gas sensitive material as semiconductor gas sensor, to the actually detected ability of sensor
Play an important roll.When preparing semiconductor gas sensor, the formula of size of sensitive material prepares most important, directly affects
The characteristic of sensor.Currently, the formula of the sensitive material slurry of the overwhelming majority designs and prepares method and cannot meet sensor
Requirement, the sensitivity of the sensor of preparation is relatively low and long-term working stability is poor, this directly affects and limit these biographies
The practical application area of sensor.
Invention content
The main object of the present invention is to provide gas sensor sensitive material, it is intended to solve existing gas sensor sensitive material and exist
When being applied to semiconductor gas sensor, the sensitivity of prepared sensor is relatively low, the poor problem of long-term working stability.
To achieve the above object, the present invention proposes that a kind of gas sensor sensitive material, the gas sensor sensitive material contain
There is following component：SnO289~96wt%, Sb2O32.5~4.5wt%, ZrO20.5~4wt%, SiO20.5~
2.5wt%, CaF20.5~2.5wt%.
Optionally, the gas sensor sensitive material contains following component：SnO292~95wt%, Sb2O32.5~
4wt%, ZrO21~3wt%, SiO20.5~1.5wt%, CaF20.5~1.5wt%.
Optionally, the SnO2In powdered, and grain size is 50~100nm.
Optionally, the Sb2O3In powdered, and grain size is 20~50nm.
Optionally, the ZrO2In powdered, and grain size is 30~60nm.
Optionally, the SiO2In powdered, and grain size is 20~40nm.
Optionally, the CaF2In powdered, and grain size is 30~50nm.
Optionally, the gas sensor sensitive material also includes and the SnO2, Sb2O3, ZrO2, SiO2And CaF2It is mutually mixed
The liquid carrier of conjunction.
Optionally, the liquid carrier is water-ethanol-pine tar mixed alkoxide solution.
The invention also discloses a kind of preparation methods of gas sensor sensitive material, include the following steps：
By SnO2, Sb2O3, ZrO2, SiO2And CaF2It mixes and is scattered in liquid carrier, obtain gas sensor sensitivity material
Material.
Optionally, described by SnO2, Sb2O3, ZrO2, SiO2And CaF2Mixing is scattered in liquid carrier：It will
SnO2, Sb2O3, ZrO2, SiO2、CaF2It is mixed with liquid carrier, and carries out wet-milling.
Optionally, the liquid carrier is water-ethanol-pine tar mixed alkoxide solution.
For technical solution of the present invention by being formulated reasonable design, prepared air-sensitive slurry is uniform, and introduces ZrO2And CaF2,
Coordinate Sb2O3And SiO2Deng further improving sensitive membrane stability and improve the gas-sensitive reaction activity of sensitive membrane；Meanwhile rationally control
The size of each recipe ingredient is made, gas sensor sensitivity and long-term working stability are improved.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
The structure shown according to these attached drawings obtains other attached drawings.
Fig. 1 is the sensitivity of gas sensor and 1 sample of comparative example to 100ppm alcohol gas prepared by Examples 1 to 5
With temperature change curve graph；
Fig. 2 is the long-term working stability curve of 1 sample of gas sensor and comparative example prepared by Examples 1 to 5；
Fig. 3 is the long-term working stability curve of 2 gas sensor of comparative example；
Fig. 4 is the scanning electron microscope (SEM) photograph of sensitive membrane after 2 gas sensor of embodiment continuously works on power 2 months；
Fig. 5 is the scanning electron microscope (SEM) photograph of sensitive membrane after 2 gas sensor of comparative example continuously works on power 2 months.
The embodiments will be further described with reference to the accompanying drawings for the realization, the function and the advantages of the object of the present invention.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiment is only a part of the embodiment of the present invention, instead of all the embodiments.Base
Embodiment in the present invention, those of ordinary skill in the art obtained without creative efforts it is all its
His embodiment, shall fall within the protection scope of the present invention.
It is to be appreciated that the directional instruction (such as up, down, left, right, before and after ...) of institute is only used in the embodiment of the present invention
In explaining relative position relation, motion conditions etc. under a certain particular pose (as shown in the picture) between each component, if should
When particular pose changes, then directionality instruction also correspondingly changes correspondingly.
In addition, the description for being such as related to " first ", " second " in the present invention is used for description purposes only, and should not be understood as
It indicates or implies its relative importance or implicitly indicate the quantity of indicated technical characteristic.Define as a result, " first ",
The feature of " second " can explicitly or implicitly include at least one of the features.In addition, the technical side between each embodiment
Case can be combined with each other, but must can be implemented as basis with those of ordinary skill in the art, when the combination of technical solution
Conflicting or cannot achieve when occur will be understood that the combination of this technical solution is not present, also not the present invention claims guarantor
Within the scope of shield.
The present invention proposes that a kind of gas sensor sensitive material, the gas sensor sensitive material contain following component：SnO2
89~96wt%, Sb2O32.5~4.5wt%, ZrO20.5~4wt%, SiO20.5~2.5wt%, CaF20.5~
2.5wt%.
With SnO2Nano particle is sensitive material, and large specific surface area, gap structure is abundant, and surface and internal activity are high,
In air, surface energy largely adsorbs oxygen molecule, and under certain heating temperature, the oxygen of chemisorption will be with O- or O2-
Formation exist, due to the absorption of these negative oxygen ions, sensitive material surface forms certain electronics dissipation layer, leads to SnO2Grain
High potential barrier is generated between son, and sensitive material sheet resistance is caused to increase.When sensitive material encounters reducibility gas (such as H2、CO、CH4
Deng) after, reducibility gas reacts with the negative oxygen ion for being adsorbed on sensitive material surface, and the electronics that oxygen captures is released back into
Sensitive material surface, to make the reduction of sensitive material resistance.Therefore, when being prepared into sensing element by above-mentioned sensitive material, lead to
The conductance variation of detection sensing element is crossed to realize the detection to gas.
Due to SnO2For nano particle under long-term hot environment, crystal grain will appear growth, and air-sensitive performance will appear drift,
Long-term working stability is poor, in order to improve SnO2The long-term working stability of base sensitive membrane needs formula incorporated in the present invention,
In, Binder Phase is introduced, main function is to connect, tense in the sintering process of gas sensor, fixing sensitive material particle so that
The sensitive membrane of formation is strongly adhered to together with matrix, the advantageous long-term working stability for promoting gas sensor.SiO2It plays
The basic framework of Binder Phase；Sb2O3The potential barrier for reducing excitable material pellet interface, reduces the resistance of sensitive membrane, favorably improves material
Expect sensitivity.By introducing CaF2, surface melting temperature of each component in sintering process in Binder Phase can be effectively reduced, together
When, ensure the electrical property and chemical property of entire Binder Phase.This is conducive to improve the long-term working stability of sensitive membrane and sensitive
Degree.In addition, generally use doped catalyst (such as Pd, Pt etc.) is used to improve the sensitivity of semiconductor sensitive material, but it is catalyzed
Agent is of high cost, and the application is by introducing ZrO2Instead of PdCl2, cost is on the one hand reduced, on the other hand, and can ensure to be formed
Sensitive membrane sensitivity and improve sensitive membrane long-term working stability.ZrO2Introducing, can it is significantly more efficient inhibit it is quick
The growth for feeling crystal grain in film ensure that the job stability and a large amount of reactivity point of the sensitive film surface of holding of sensitive membrane, and
And adsorption reaction rate of the sensitive membrane to VOC gas can be enhanced, the advantageous operating temperature for reducing gas sensor, meanwhile, ZrO2
It is appropriate doping can reduce sensitive film resistance, favorably improve sensitivity.
Further, the gas sensor sensitive material contains following component：SnO292~95wt%, Sb2O32.5~
4wt%, ZrO21~3wt%, SiO20.5~1.5wt%, CaF20.5~1.5wt%.
Further, the SnO2In powdered, and grain size is 50~100nm.
Further, the Sb2O3In powdered, and grain size is 20~50nm.
Further, the ZrO2In powdered, and grain size is 30~60nm.
Further, the SiO2In powdered, and grain size is 20~40nm.
Further, the CaF2In powdered, and grain size is 30~50nm.
SnO used in this application2Nano particle is 50~100nm, can improve SnO2Dispersion, and ensure its surface live
Property point.Meanwhile Sb2O3, CaF2And SiO2Grain size compared to also slightly larger, improve respective dispersion to a certain degree, avoid itself
It is apparent to reunite, give full play to respective effect.
The application is by introducing ZrO2Instead of PdCl2, cost is on the one hand reduced, on the other hand, and can be ensured formed quick
Feel the sensitivity of film and improves the long-term working stability of sensitive membrane.ZrO2Introducing, being capable of significantly more efficient inhibition sensitive membrane
The growth of middle crystal grain ensure that the job stability of sensitive membrane and keep a large amount of reactivity point of sensitive film surface, also, energy
Enough enhancing sensitive membrane favorably reduces the operating temperature of gas sensor to the adsorption reaction rate of VOC gas, meanwhile, ZrO2It is suitable
Amount doping can reduce sensitive film resistance, favorably improve sensitivity.
Grain size described above is statistical data, is a value range, is such as tested using laser diffraction analyzer.
Further, the gas sensor sensitive material also includes and the SnO2, Sb2O3, ZrO2, SiO2And CaF2Phase
Mixed liquid carrier.Liquid carrier controls the rheological behavior of slurry, and gas sensor sensitive material is prepared into the form of slurry,
In order to make gas sensor.The dosage of liquid carrier can depend on the difference of the gas sensor type subsequently prepared and different.When
When the dosage of liquid carrier is more, slurry more dilutes, and when the dosage of liquid carrier is few, slurry is more thick.For this field
For technical staff, his dosage can depend on actual conditions and adjust.
Further, the liquid carrier is water-ethanol-pine tar mixed alkoxide solution.
The invention also provides a kind of preparation methods of gas sensor sensitive material, include the following steps：By SnO2,
Sb2O3, ZrO2, SiO2And CaF2It mixes and is scattered in liquid carrier, obtain gas sensor sensitive material.
Further, described by SnO2, Sb2O3, ZrO2, SiO2And CaF2Mixing is scattered in liquid carrier：It will
SnO2, Sb2O3, ZrO2, SiO2、CaF2It is mixed with liquid carrier, and carries out wet-milling.
The application due to introducing ZrO again2, number of components are more, for these more evenly dispersed components, using wet-milling
Dispersion ratio ultrasonic disperse is more effective.
Further, the liquid carrier is water-ethanol-pine tar mixed alkoxide solution.
During wet-milling (ball mill can be used), in the environment of working at high speed, strong shear action can make respectively
Inorganic component dispersion is more uniform.During wet-milling, a large amount of heat is will produce, if only with ethyl alcohol-terpinol
Mixed solution, since ethyl alcohol is readily volatilized, in the case where there is a large amount of shock heat, rate of volatilization faster, causes the consistency of slurry more next
It is higher, it is unfavorable for subsequent coated processing etc., therefore the water of introducing portion can avoid the too fast volatilization of ethyl alcohol, after ensureing wet-milling
Slurry consistency is moderate, is conducive to subsequent processing.
The consistency of ethyl alcohol is relatively low, but readily volatilized, causes the coating processes for preparing gas sensor more difficult, and quickly wave
Hair is easy to cause the sensitive membrane to be formed and crack occurs, influences the performance of gas sensor；The consistency of terpinol is higher, it is not easy to wave
Hair, the drying of sensitive membrane is slower, influences element making.Since ethyl alcohol is readily volatilized, during wet-milling, ethyl alcohol will be caused to volatilize
Rate faster, causes the consistency of slurry higher and higher, is unfavorable for following process etc., therefore, prepares water-ethanol-terpinol mixing
Solution as dispersion solvent, be conducive to improve coating processes, sensitive membrane stability and final gas sensor performance.
Below with reference to specific embodiment, present invention is described, it should be noted that these embodiments are only to describe
Property, without limiting the invention in any way.
The preparation process of heater-type sintering-type gas sensor is as follows：
Step 1：By with a pair of of gold electrode and four Pt leads ceramic tube and the welding of Ni-Cr alloy heater strip
On six leg bases；
Step 2：Gas sensor sensitive material is coated on ceramic pipe surface, and 4h is sintered in 700 DEG C, heater-type is obtained and burns
Junction type gas sensor.
Following embodiment prepares corresponding heater-type sintering-type gas sensor according to above-mentioned preparation process.
Embodiment 1
A kind of preparation method of gas sensor sensitive material, includes the following steps：
Weigh SnO289wt%, Sb2O34wt%, ZrO22.5wt%, SiO22wt%, CaF22.5wt%, by each group
It is 1 point to be mixed in volume ratio:2:In the mixed solution of 2 water-ethanol-terpinol, ball mill wet-milling 5 hours obtains gas sensitive element
Part sensitive material.
Wherein, the SnO2In powdered, and grain size is 50~100nm.
Further, the Sb2O3In powdered, and grain size is 20~50nm.
Further, the ZrO2In powdered, and grain size is 30~60nm.
Further, the SiO2In powdered, and grain size is 20~40nm.
Further, the CaF2In powdered, and grain size is 30~50nm.
Using the gas sensor sensitive material of acquisition heater-type sintering-type gas sensor (tool is prepared by coating, being sintered
Body step referring to aforementioned heater-type sintering-type gas sensor preparation process).
Embodiment 2
A kind of preparation method of gas sensor sensitive material, includes the following steps：
Weigh SnO294wt%, Sb2O33.6wt%, ZrO21wt%, SiO20.6wt%, CaF20.8wt%, will be each
It is 1 that component, which is mixed in volume ratio,:2:In the mixed solution of 2 water-ethanol-terpinol, ball mill wet-milling 5 hours obtains air-sensitive
Element sensitive material.
Wherein, the SnO2In powdered, and grain size is 50~100nm.
Further, the Sb2O3In powdered, and grain size is 20~50nm.
Further, the ZrO2In powdered, and grain size is 30~60nm.
Further, the SiO2In powdered, and grain size is 20~40nm.
Further, the CaF2In powdered, and grain size is 30~50nm.
Using the gas sensor sensitive material of acquisition heater-type sintering-type gas sensor (tool is prepared by coating, being sintered
Body step referring to aforementioned heater-type sintering-type gas sensor preparation process).
Embodiment 3
A kind of preparation method of gas sensor sensitive material, includes the following steps：
Weigh SnO292wt%, Sb2O34.5wt%, ZrO21.5wt%, SiO20.5wt%, CaF21.5wt%, will
It is 1 that each component, which is mixed in volume ratio,:2:In the mixed solution of 2 water-ethanol-terpinol, ball mill wet-milling 5 hours obtains gas
Quick element sensitive material.
Wherein, the SnO2In powdered, and grain size is 50~100nm.
Further, the Sb2O3In powdered, and grain size is 20~50nm.
Further, the ZrO2In powdered, and grain size is 30~60nm.
Further, the SiO2In powdered, and grain size is 20~40nm.
Further, the CaF2In powdered, and grain size is 30~50nm.
Using the gas sensor sensitive material of acquisition heater-type sintering-type gas sensor (tool is prepared by coating, being sintered
Body step referring to aforementioned heater-type sintering-type gas sensor preparation process).
Embodiment 4
A kind of preparation method of gas sensor sensitive material, includes the following steps：
Weigh SnO293wt%, Sb2O32.5wt%, ZrO21.5wt%, SiO22.5wt%, CaF20.5wt%, will
It is 1 that each component, which is mixed in volume ratio,:2:In the mixed solution of 2 water-ethanol-terpinol, ball mill wet-milling 5 hours obtains gas
Quick element sensitive material.
Wherein, the SnO2In powdered, and grain size is 50~100nm.
Further, the Sb2O3In powdered, and grain size is 20~50nm.
Further, the ZrO2In powdered, and grain size is 30~60nm.
Further, the SiO2In powdered, and grain size is 20~40nm.
Further, the CaF2In powdered, and grain size is 30~50nm.
Using the gas sensor sensitive material of acquisition heater-type sintering-type gas sensor (tool is prepared by coating, being sintered
Body step referring to aforementioned heater-type sintering-type gas sensor preparation process).
Embodiment 5
A kind of preparation method of gas sensor sensitive material, includes the following steps：
Weigh SnO296wt%, Sb2O32.5wt%, ZrO20.5wt%, SiO20.5wt%, CaF20.5wt%, will
It is 1 that each component, which is mixed in volume ratio,:2:In the mixed solution of 2 water-ethanol-terpinol, ball mill wet-milling 5 hours obtains gas
Quick element sensitive material.
Wherein, the SnO2In powdered, and grain size is 50~100nm.
Further, the Sb2O3In powdered, and grain size is 20~50nm.
Further, the ZrO2In powdered, and grain size is 30~60nm.
Further, the SiO2In powdered, and grain size is 20~40nm.
Further, the CaF2In powdered, and grain size is 30~50nm.
Using the gas sensor sensitive material of acquisition heater-type sintering-type gas sensor (tool is prepared by coating, being sintered
Body step referring to aforementioned heater-type sintering-type gas sensor preparation process).
Comparative example 1
The heater-type sintering-type gas sensor MQ-3B of Zhengzhou Wei Sheng Science and Technology Ltd.s production.
Comparative example 2
This comparative example is similar to Example 1, and difference lies in gas sensor sensitive material is only by SnO2Wet-milling dispersion is in water-
It is prepared in the mixed solution of ethyl alcohol-terpinol.
Analysis test
Gas-sensitive property test is carried out using the WS-30A air-sensitive testers of Zhengzhou Wei Sheng Science and Technology Ltd.s production.First to
The sample room of tester is passed through zero level air, until the resistance of gas sensor is constant；Then, it is passed through tested gas to sample room
Body (e.g., ethyl alcohol etc.), this experiment is using 100ppm ethyl alcohol as test object, at this point, it is 5V to measure voltage.Recording voltage becomes at any time
The adsorption curve of change, curve to be adsorbed reach balance, stop injection gas, and test terminates.It can be calculated from adsorption curve
The sensitivity of gas sensor.
Since national standard does not have clear stipulaties for the ingredient of TVOC gases, it is contemplated that basic condition in the industry (ethyl alcohol
Gas is demarcated), therefore this experiment is test gas with alcohol gas.
The resistance of the gas sensor of 1 each embodiment and comparative example 2 of table
| Embodiment 1 | Embodiment 2 | Embodiment 3 | Embodiment 4 | Embodiment 5 | Comparative example 2 | |
| Resistance (M Ω) | 6.8 | 3.2 | 2.5 | 9.3 | 11.6 | 76 |
As shown in Figure 1, the heater-type sintering-type gas sensor best effort being prepared in embodiment 1 to embodiment 5
Temperature is 260 DEG C, hence it is evident that is less than 360 DEG C of comparative example 1, therefore can significantly reduce energy consumption.It is prepared in embodiment 1 to embodiment 5
Obtained heater-type sintering-type gas sensor sensitivity is respectively 14.3,18.9,16.5,13.4,12, is above comparative example 1
10.5.By Fig. 1 to Fig. 3 it is found that the spirit for the heater-type sintering-type gas sensor being prepared in embodiment 1 to embodiment 5
Sensitivity and long-term working stability are suitable with comparative example 1, are significantly better than comparative example 2.
The long-term working stability of gas sensor and the mechanical performance of sensitive membrane it is closely related, pass through 2 He of comparison diagram
Fig. 3 by being formulated it is found that designed, and the drift of the gas sensor sensitivity of the present embodiment significantly improves, i.e. job stability
It is significantly improved, wherein the SiO in formula2And CaF2Itself could act as fluxing agent and Binder Phase, be conducive to improve institute's shape
At sensitive membrane mechanical strength, so that sensitive membrane is not easy to burst apart under long-term work environment and is fallen off, and ensure entire bond
The electrical property and chemical property of phase are conducive to the long-term working stability and the sensitivity that improve sensitive membrane.Meanwhile Sb2O3And ZrO2
Introducing can effectively substitute the use of noble metal catalyst, the potential barrier of excitable material pellet interface can be reduced, reduced quick
Feel the resistance of film, and ensure that the job stability of sensitive membrane and keep a large amount of reactivity point of sensitive film surface, also, energy
For enough enhancing sensitive membranes to the adsorption reaction rate of VOC gas, the advantageous operating temperature for reducing gas sensor is advantageous to improve material spirit
Sensitivity and job stability.
As shown in Figures 4 and 5, using the sensitive membrane prepared by inventive formulation in the case where 2 months persistently work on power, sensitive membrane
Still comparatively dense and smooth (embodiment 2) generates without apparent crack, continued upper electrician at 2 months without inventive formulation
Under work, there is phenomenon (comparative example 2) of significantly bursting apart in sensitive membrane, this also further illustrates CaF2, Sb2O3And ZrO2It can improve quick
Feel the mechanical performance of film.Sb2O3Middle Sb adulterates Sn2+ lattices, and ZrO2It is appropriate doping favorably improve conductance, meanwhile, CaF2
Surface melting temperature of each component in sintering process in significantly more efficient reduction formula, it is easier to make sensitive material particle and each
Component particles closely bond forms fine and close network together, reduces intergranular surface contacted resistance, improves sensitive membrane electricity
It leads.
As shown in table 1, the comparative example 2 of inventive formulation is free of, sensitive film resistance is 76M Ω, the sensitivity of Examples 1 to 5
Film resistance is 6.8,3.2,2.5,9.3,11.6M Ω respectively, hence it is evident that is less than comparative example 2, this also illustrates that inventive formulation can improve
The electrical property of sensitive membrane.
The foregoing is merely the preferred embodiment of the present invention, are not intended to limit the scope of the invention, every at this
Under the inventive concept of invention, using equivalent structure transformation made by description of the invention and accompanying drawing content, or directly/use indirectly
In the scope of patent protection that other related technical areas are included in the present invention.
Claims (10)
1. a kind of gas sensor sensitive material, which is characterized in that the gas sensor sensitive material contains following component：SnO2 89
~96wt%, Sb2O32.5~4.5wt%, ZrO20.5~4wt%, SiO20.5~2.5wt%, CaF20.5~
2.5wt%.
2. gas sensor sensitive material as described in claim 1, which is characterized in that the gas sensor sensitive material contain as
Lower component：SnO292~95wt%, Sb2O32.5~4wt%, ZrO21~3wt%, SiO20.5~1.5wt%, CaF2
0.5~1.5wt%.
3. gas sensor sensitive material as claimed in claim 1 or 2, which is characterized in that the SnO2In powdered, and grain size
For 50~100nm.
4. gas sensor sensitive material as claimed in claim 1 or 2, which is characterized in that the Sb2O3In powdered, and grain size
For 20~50nm.
5. gas sensor sensitive material as claimed in claim 1 or 2, which is characterized in that the ZrO2In powdered, and grain size
For 30~60nm.
6. gas sensor sensitive material as claimed in claim 1 or 2, which is characterized in that the SiO2In powdered, and grain size
For 20~40nm；
And/or the CaF2In powdered, and grain size is 30~50nm.
7. gas sensor sensitive material as claimed in claim 1 or 2, which is characterized in that the gas sensor sensitive material is also
Include and the SnO2, Sb2O3, ZrO2, SiO2And CaF2The liquid carrier mixed.
8. gas sensor sensitive material as claimed in claim 7, which is characterized in that the liquid carrier is water-ethanol-pine tar
Mixed alkoxide solution.
9. a kind of preparation method of gas sensor sensitive material, which is characterized in that include the following steps：
By SnO2, Sb2O3, ZrO2, SiO2And CaF2It mixes and is scattered in liquid carrier, obtain gas sensor sensitive material.
10. the preparation method of gas sensor sensitive material as claimed in claim 9, which is characterized in that described by SnO2,
Sb2O3, ZrO2, SiO2And CaF2Mixing is scattered in liquid carrier：By SnO2, Sb2O3, ZrO2, SiO2、CaF2And liquid
Carrier mixes, and carries out wet-milling；
And/or the liquid carrier is water-ethanol-pine tar mixed alkoxide solution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810498621.5A CN108709913A (en) | 2018-05-22 | 2018-05-22 | Gas sensor sensitive material and preparation method thereof |
Applications Claiming Priority (1)
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