CN108709678B - Automobile door sensor detection device and automobile door sensor - Google Patents
Automobile door sensor detection device and automobile door sensor Download PDFInfo
- Publication number
- CN108709678B CN108709678B CN201810829511.2A CN201810829511A CN108709678B CN 108709678 B CN108709678 B CN 108709678B CN 201810829511 A CN201810829511 A CN 201810829511A CN 108709678 B CN108709678 B CN 108709678B
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- Prior art keywords
- detection
- automobile door
- bevel gear
- ratchet
- door sensor
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- 238000001514 detection method Methods 0.000 title claims abstract description 58
- 229920001971 elastomer Polymers 0.000 claims abstract description 25
- 230000005540 biological transmission Effects 0.000 claims abstract description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 26
- 229910052710 silicon Inorganic materials 0.000 claims description 26
- 239000010703 silicon Substances 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 23
- 238000005530 etching Methods 0.000 claims description 17
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 16
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 16
- 230000003068 static effect Effects 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 9
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 6
- 239000011651 chromium Substances 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 238000001259 photo etching Methods 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims description 2
- 238000001312 dry etching Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 claims description 2
- 239000000806 elastomer Substances 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 9
- 230000009471 action Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/14—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means involving the displacement of magnets, e.g. electromagnets
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/10—Internal combustion engine [ICE] based vehicles
- Y02T10/40—Engine management systems
Abstract
The invention discloses an automobile door sensor detection device and an automobile door sensor, which comprise a second bevel gear meshed with a first bevel gear for rotation, a driving arc sleeve is coaxially arranged with the second bevel gear, an incomplete tooth ratchet wheel is sleeved outside the driving arc sleeve, a ratchet groove disc is arranged outside the incomplete tooth ratchet wheel, a transmission gear is integrally arranged on the back surface of the ratchet groove disc, the transmission gear is meshed with a rack on one side for transmission, and the bottom of the rack is linked with a detection elastomer. The output pressure value of the anti-pinch sensor and the rotating speed value of the rotating shaft are calibrated accurately to be fitted into a standard rotating speed-pressure curve, the rotating speed-pressure curve formed by the MEMS pressure sensor to be detected and the rotating speed value of the rotating shaft is compared with the standard rotating speed-pressure curve, the reliability of the MEMS pressure sensor to be detected is judged according to the comparison result, and the smaller the deviation from the standard rotating speed-pressure curve is, the higher the reliability is.
Description
Technical Field
The invention belongs to the field of automobile sensors, and particularly relates to an automobile door sensor detection device.
Background
For anti-pinch safety, more and more automobile doors begin to be provided with anti-pinch sensors, mainly through detecting the pressure change in an anti-pinch sealing strip, continuous measurement pressure values are obtained through accurate amplification of a follow-up circuit by means of unbalanced output signals of a strain gauge bridge arranged in the pressure sensor, but the existing automobile door anti-pinch sensing device is not effective in detection, and delivery reliability cannot be guaranteed.
Disclosure of Invention
The invention aims to provide an automobile door sensor detection device which is used for solving the problems in the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the utility model provides a car door sensor detection device, including detecting quiet frame and the articulated detection of this quiet frame of detection through the hinge move the frame, detect quiet frame fixed mounting and have first bevel gear, detect the pivot of moving the frame and install with this first bevel gear meshing pivoted second bevel gear, set up a drive arc cover with this second bevel gear coaxial, this drive arc cover rotates with second bevel gear is synchronous, the drive arc cover overcoat is equipped with incomplete tooth ratchet, the setting is around rotating shaft free rotation and have the ratchet trough dish of inboard ratchet trough outside this incomplete tooth ratchet, this ratchet trough dish back is integrative to be provided with drive gear, this drive gear meshes the transmission with the rack on one side, the rack bottom is with the detection elastomer linkage of installing in detecting moving the frame;
the incomplete tooth ratchet wheel is provided with a linkage bulge part, the driving arc sleeve is provided with a notch part matched with the linkage bulge part, when the linkage bulge part falls into the opening part of the driving arc sleeve, the ratchet teeth of the incomplete tooth ratchet wheel are clamped with the ratchet grooves of the ratchet groove disc, and the ratchet groove disc and the incomplete tooth ratchet wheel synchronously rotate.
Further, the detection elastic body is slidably mounted in the detection movable frame through a sliding groove, and comprises an elastic main body connected with the rack at the top, and reset springs are mounted at the bottoms of two sides of the elastic main body.
Further, a closed rubber tube is installed at the bottom of the elastic main body, the closed rubber tube is connected with an MEMS pressure sensor through a connecting air tube, and the MEMS pressure sensor is electrically connected with a movable electromagnet installed at the top of the detection motor frame and a fixed electromagnet installed at the top of the detection static frame.
Further, the transmission gear is rotatably mounted on the rotating shaft through a bearing and positioned at both sides through shaft check rings.
Further, a baffle cover is arranged on the end face of the ratchet groove disc.
Further, a first bevel gear is mounted to the bottom of the fixed shaft of the hinge.
Further, the rotating shaft is arranged inside the detection moving frame, and two ends of the rotating shaft are supported by the detection moving frame through bearings.
Further, the rack is slidably mounted on the detection movable frame through the sliding groove.
Further, an angular displacement sensor is mounted on the rotation shaft.
The invention further aims to provide an automobile door sensor, which is composed of a closed rubber tube, an MEMS pressure sensor and a connecting air tube, wherein the closed rubber tube is integrally formed by a semi-cylindrical body part and a cuboid part with a groove, and the closed rubber tube is arranged at the bottom of the elastic main body through the groove; the gas pressure caused by the stress deformation of the semi-cylindrical body part of the airtight rubber tube is transmitted to the MEMS pressure sensor through the connecting air tube, and the MEMS pressure sensor comprises an upper electrode, a silicon nitride layer, a first silicon substrate, a lower electrode and a second silicon substrate.
The MEMS pressure sensor manufacturing process flow is as follows:
step one, growing a silicon nitride film on the two sides of a first silicon substrate by a low-pressure chemical vapor deposition method, wherein the thickness of the silicon nitride film is 1.5 mu m;
photoetching an upper electrode pattern, evaporating a chromium/gold film, and performing ultrasonic stripping to obtain the upper electrode pattern;
step three, etching the silicon nitride by a dry method to obtain a vibrating piece pattern and an etching hole;
etching the window pattern on the back by photoetching and etching the back silicon nitride layer thoroughly by dry method;
step five, placing the silicon wafer into KOH etching solution for etching, and removing the redundant silicon substrate below the vibrating piece to obtain a vibrating piece structure with a cantilever beam;
step six, evaporating a chromium/gold film on the second silicon substrate to serve as a lower electrode;
and step seven, bonding the first silicon substrate and the second silicon substrate to finish device manufacturing.
The rotating speed value of the rotating shaft is read through an angular displacement sensor arranged on the rotating shaft, the output pressure value of the MEMS pressure sensor calibrated accurately and the rotating speed value of the rotating shaft are subjected to function fitting through MATLAB, the fitted function curve is used as a standard rotating speed-pressure curve, the rotating speed-pressure curve formed by the MEMS pressure sensor to be detected and the rotating speed value of the rotating shaft is compared with the standard rotating speed-pressure curve, the reliability of the MEMS pressure sensor to be detected is judged according to the comparison result, and the smaller the deviation from the standard rotating speed-pressure curve is, the higher the reliability is.
Drawings
Fig. 1 is a schematic structural diagram of an automobile door sensor detection device according to an embodiment of the present invention.
Fig. 2 is a partial enlarged view at a provided in an embodiment of the present invention.
Fig. 3 is a schematic diagram of a partial structure of a detection device of an automobile door sensor according to an embodiment of the present invention.
Fig. 4 is a schematic view of the installation of a ratchet trough plate and an incomplete-tooth ratchet according to an embodiment of the present invention.
Fig. 5 is a top view of an automobile door sensor detection device according to an embodiment of the present invention.
FIG. 6 is a schematic diagram of an incomplete teeth ratchet structure according to an embodiment of the present invention.
Fig. 7 is a schematic diagram showing the separation of a ratchet trough plate and an incomplete-tooth ratchet according to an embodiment of the present invention.
Fig. 8 is a schematic diagram of a ratchet trough plate and an incomplete-tooth ratchet according to an embodiment of the present invention.
Fig. 9 is a schematic diagram of a sealing rubber tube before deformation according to an embodiment of the present invention.
Fig. 10 is a schematic diagram of a deformed airtight rubber tube according to an embodiment of the present invention.
Fig. 11 is a schematic diagram of a vibrating reed structure of a pressure sensor according to an embodiment of the present invention.
Fig. 12 is a schematic structural diagram of a pressure sensor according to an embodiment of the present invention.
In the figure: 1. a first bevel gear; 2. a second bevel gear; 3. a hinge; 4. a transmission gear; 5. ratchet grooved plate; 6. a rack; 7. driving the arc sleeve; 8. a rotating shaft; 9. an elastic body; 10. a return spring; 11. sealing the rubber tube; 12. an incomplete tooth ratchet; 13. a linkage protrusion; 14. a movable electromagnet; 15. fixing an electromagnet; 16. detecting a static frame; 17. detecting a movable frame; 18. connecting an air pipe; 19. an upper electrode; 20. a cantilever beam; 21. a silicon nitride layer; 22. a first silicon substrate; 23. a lower electrode; 24. a second silicon substrate; 25. a semi-cylindrical body; 26. a rectangular parallelepiped portion; 27. etching holes.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Please refer to fig. 1-12:
the detection device of the automobile door sensor comprises a detection static frame 16 and a detection movable frame 17 hinged with the detection static frame 16 through a hinge 3, wherein the detection static frame 16 is fixedly provided with a first bevel gear 1, and the first bevel gear 1 is arranged at the bottom of a fixed shaft of the hinge 3; the rotating shaft 8 of the detection moving frame 17 is provided with a second bevel gear 2 which is meshed with the first bevel gear 1 for rotation, a driving arc sleeve 7 is coaxially arranged with the second bevel gear 2, the driving arc sleeve 7 and the second bevel gear 2 synchronously rotate, an incomplete tooth ratchet 12 is sleeved outside the driving arc sleeve 7, the incomplete tooth ratchet 12 is arranged outside a ratchet groove disc 5 which freely rotates around the rotating shaft 8 and is provided with an inner ratchet groove, the back surface of the ratchet groove disc 5 is integrally provided with a transmission gear 4, the transmission gear 4 is rotatably arranged on the rotating shaft 8 through bearings (not shown in the figure) and is positioned on two sides through shaft check rings (not shown in the figure), the transmission gear 4 is meshed with a rack 6 on one side for transmission, the rack 4 is slidably arranged on the detection moving frame 17 through a chute, the bottom of the rack 6 is linked with a detection elastic body arranged on the detection moving frame 17, the detection elastic body is slidably arranged inside the detection moving frame 17 through the chute, the detection elastic body comprises an elastic body 9 which is connected with the rack 6 at the top, and reset springs 10 are arranged at the bottoms of the two sides of the elastic body 9; the bottom of the elastic main body 9 is provided with a closed rubber tube 11, the closed rubber tube 11 is connected with an MEMS pressure sensor through a connecting air tube, and the MEMS pressure sensor is electrically connected with a movable electromagnet 14 arranged at the top of a detection movable rack 17 and a fixed electromagnet 15 arranged at the top of a detection static rack 16; the rotating shaft 8 is disposed inside the detecting movable frame 17, and both ends thereof are supported by the detecting movable frame 17 through bearings (not shown).
The incomplete tooth ratchet 12 is provided with a linkage protruding part 13, the driving arc sleeve 7 is provided with a notch part matched with the linkage protruding part, when the linkage protruding part 13 falls into the opening part of the driving arc sleeve 7, ratchet teeth of the incomplete tooth ratchet 12 are clamped with ratchet grooves of the ratchet groove disc 5, the ratchet groove disc 5 rotates synchronously with the incomplete tooth ratchet 12, and a blocking cover (not shown in the figure) is arranged on the end face of the ratchet groove disc 5 to axially position the incomplete tooth ratchet 12.
When the detection movable frame 17 rotates slowly, the second bevel gear 2 drives the rotating shaft 8 to rotate, the rotating shaft 8 drives the driving arc sleeve 7 to rotate, and the driving arc sleeve 7 drives the incomplete tooth ratchet 12 to rotate, in this case, the incomplete tooth ratchet 12 is separated from the tooth slot of the ratchet slot disc 5, the ratchet slot disc 5 does not rotate, the transmission gear 4 does not rotate, the rack 6 does not move, and fig. 7 shows a certain position when the incomplete tooth ratchet 12 is separated from the ratchet slot disc 5.
When the detection movable frame 17 rotates rapidly, the second bevel gear 2 drives the rotating shaft 8 to rotate, the rotating shaft 8 drives the driving arc sleeve 7 to rotate, the driving arc sleeve 7 drives the incomplete tooth ratchet 12 to rotate rapidly, under the action of centrifugal force, the linkage protruding part 13 of the ratchet groove disc 5 slips from the edge position of the notch part of the driving arc sleeve 7 and slips into the notch part of the driving arc sleeve 7 under the action of gravity, in this case, the teeth of the incomplete tooth ratchet 12 are clamped with the tooth grooves of the ratchet groove disc 5, the ratchet groove disc 5 is driven to rotate by the rotating shaft 8, the transmission gear 4 rotates, the rack 6 moves downwards and drives the elastic main body 9 downwards, the elastic main body 9 and the ground squeeze friction, so that the movement speed of the detection movable frame 17 drops rapidly, and the faster the rotation speed of the detection movable frame 17, the greater the degree of the extrusion friction between the elastic main body 9 and the ground is, and the deceleration effect of the detection movable frame 17 can be ensured.
When the elastic main body 9 is in extrusion friction with the ground, the airtight rubber tube 11 at the bottom of the elastic main body guides compressed gas inside to the MEMS pressure sensor through the connecting air tube to trigger the MEMS pressure sensor to act, the movable electromagnet 14 and the fixed electromagnet 15 are excited to be electrified through the singlechip, the movable electromagnet 14 and the fixed electromagnet 15 generate magnetic fields with the same polarity, the repulsive force of the two electromagnets further ensures that the detection movable frame 17 does not touch the detection static frame 16, a good anti-clamping effect is ensured, and the elastic main body 9 is reset under the action of the reset spring 10 after the detection movable frame 17 is stopped.
The automobile door sensor is composed of a closed rubber tube 11, an MEMS pressure sensor and a connecting air tube 18, wherein the closed rubber tube is formed by integrating a semi-cylindrical part 25 and a cuboid part 26 with a groove, and the closed rubber tube 11 is arranged at the bottom of the elastic main body 9 through the groove; the gas pressure caused by the forced deformation of the semi-cylindrical body 25 of the airtight rubber tube is conducted to the MEMS pressure sensor through the connecting gas tube 18, and the MEMS pressure sensor comprises an upper electrode 19, a silicon nitride layer 21, a first silicon substrate 22, a lower electrode 23 and a second silicon substrate 24.
The MEMS pressure sensor has a structure as shown in fig. 12, the periphery of the silicon nitride vibration piece with gold-plated surface is respectively supported on the cavity by bending cantilever beams 20, and when the vibration piece is acted by the electric field force generated by the electrode between the bottom and the vibration piece, the vibration piece vibrates downwards in a plane, the fluid in the cavity is extruded, and an electromagnetic signal for detecting the air pressure characteristic of the airtight rubber tube is generated.
The basic process flow is as follows:
(1) The low pressure chemical vapor deposition method grows a silicon nitride layer 21 on the two sides of a first silicon substrate 22, and the thickness is 1.5 mu m;
(2) Photoetching an upper electrode pattern, evaporating a chromium/gold film, and ultrasonically stripping to obtain an upper electrode 19 pattern;
(3) Dry etching the silicon nitride to obtain a vibration piece pattern and an etching hole 27;
(4) Etching the window pattern by back photoetching and etching the back silicon nitride layer 21 thoroughly by dry method;
(5) Placing the silicon wafer into KOH etching solution for etching, and removing the redundant silicon substrate below the vibrating piece to obtain a vibrating piece structure with a cantilever beam 20;
(6) Evaporating a chromium/gold film on the second silicon substrate 24 as the lower electrode 23;
(7) And bonding the first silicon substrate 22 and the second silicon substrate 24 to complete device manufacture.
The rotating speed value of the rotating shaft 8 is read through an angular displacement sensor arranged on the rotating shaft 8, the output pressure value of the MEMS pressure sensor calibrated accurately and the rotating speed value of the rotating shaft 8 are subjected to function fitting through MATLAB, the fitted function curve is used as a standard rotating speed-pressure curve, the rotating speed-pressure curve formed by the MEMS pressure sensor to be detected and the rotating speed value of the rotating shaft 8 is compared with the standard rotating speed-pressure curve, the reliability of the MEMS pressure sensor to be detected is judged according to the comparison result, and the smaller the deviation from the standard rotating speed-pressure curve is, the higher the reliability is.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (4)
1. The automobile door sensor detection device comprises a detection static frame (16) and a detection movable frame (17) hinged with the detection static frame (16) through a hinge (3), and is characterized in that the detection static frame (16) is fixedly provided with a first bevel gear (1), a rotating shaft (8) of the detection movable frame (17) is provided with a second bevel gear (2) meshed with the first bevel gear (1) for rotation, a driving arc sleeve (7) is coaxially arranged with the second bevel gear (2), the driving arc sleeve (7) and the second bevel gear (2) synchronously rotate, an incomplete tooth ratchet wheel (12) is sleeved outside the driving arc sleeve (7), the incomplete tooth ratchet wheel (12) freely rotates around the rotating shaft (8) and is provided with a ratchet wheel groove disc (5) with an inner ratchet wheel groove, the back surface of the ratchet wheel groove disc (5) is integrally provided with a transmission gear (4), the transmission gear (4) is meshed with a rack (6) at one side, and the bottom of the rack (6) is linked with a detection elastic body arranged on the detection movable frame (17);
the incomplete tooth ratchet wheel (12) is provided with a linkage protruding part (13), the driving arc sleeve (7) is provided with a notch part matched with the linkage protruding part, when the linkage protruding part (13) falls into the notch part of the driving arc sleeve (7), ratchet teeth of the incomplete tooth ratchet wheel (12) are clamped with ratchet grooves of the ratchet groove disc (5), and the ratchet groove disc (5) and the incomplete tooth ratchet wheel (12) synchronously rotate;
an angular displacement sensor is arranged on the rotating shaft (8);
the transmission gear (4) is rotatably arranged on the rotating shaft (8) through a bearing and positioned at two sides through shaft check rings;
a blocking cover is arranged on the end face of the ratchet groove disc (5);
the first bevel gear (1) is arranged at the bottom of the fixed shaft of the hinge (3);
the rotating shaft (8) is arranged in the detection movable frame (17), and two ends of the rotating shaft are supported on the detection movable frame (17) through bearings;
the rack (6) is slidably arranged on the detection movable frame (17) through a chute.
2. A door sensor detecting device for vehicles according to claim 1, characterized in that the detecting elastic body is slidably mounted in the detecting movable frame (17) through a chute, the detecting elastic body comprises an elastic body (9) connected with the rack (6) at the top, and the bottom of both sides of the elastic body (9) is provided with a return spring (10).
3. An automobile door sensor detection device according to claim 2, characterized in that the bottom of the elastic body (9) is provided with a closed rubber tube (11), the closed rubber tube (11) is connected with an MEMS pressure sensor through a connecting air tube, and the MEMS pressure sensor is electrically connected with a movable electromagnet (14) arranged at the top of the detection movable frame (17) and a fixed electromagnet (15) arranged at the top of the detection static frame (16).
4. An automobile door sensor, characterized in that the automobile door sensor is detected by an automobile door sensor detection device according to claim 3, wherein the airtight rubber tube (11), the MEMS pressure sensor and the connecting air tube form the automobile door sensor, the airtight rubber tube is integrally formed by a semi-cylindrical part and a cuboid part with a groove, and the airtight rubber tube (11) is arranged at the bottom of the elastic main body (9) through the groove; the gas pressure caused by the forced deformation of the semi-cylindrical body part of the airtight rubber tube is transmitted to the MEMS pressure sensor through the connecting air tube, and the MEMS pressure sensor comprises an upper electrode, silicon nitride, a first silicon substrate, a lower electrode and a second silicon substrate;
the MEMS pressure sensor comprises the following process flows:
(1) Growing a silicon nitride film on the two sides of the first silicon substrate by a low-pressure chemical vapor deposition method, wherein the thickness of the silicon nitride film is 1.5 mu m;
(2) Photoetching an upper electrode pattern, evaporating a chromium/gold film, and performing ultrasonic stripping to obtain the upper electrode pattern;
(3) Dry etching silicon nitride to obtain a vibrating piece pattern and an etching hole;
(4) Etching the window pattern by back photoetching and etching the back silicon nitride thoroughly by dry method;
(5) Placing the silicon wafer into KOH etching solution for etching, and removing the redundant silicon substrate below the vibrating piece to obtain a vibrating piece structure with a cantilever beam;
(6) Evaporating a chromium/gold film on the second silicon substrate as a lower electrode;
(7) And bonding the first silicon substrate and the second silicon substrate to finish the manufacture of the device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810829511.2A CN108709678B (en) | 2018-07-26 | 2018-07-26 | Automobile door sensor detection device and automobile door sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810829511.2A CN108709678B (en) | 2018-07-26 | 2018-07-26 | Automobile door sensor detection device and automobile door sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108709678A CN108709678A (en) | 2018-10-26 |
| CN108709678B true CN108709678B (en) | 2024-02-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810829511.2A Active CN108709678B (en) | 2018-07-26 | 2018-07-26 | Automobile door sensor detection device and automobile door sensor |
Country Status (1)
| Country | Link |
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| CN (1) | CN108709678B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112065218A (en) * | 2020-10-14 | 2020-12-11 | 赣州市桐鑫金属制品有限公司 | Automatic switching courtyard door |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19818650A1 (en) * | 1998-04-25 | 1999-11-04 | Leonische Drahtwerke Ag | Force sensor for trap prevention device in motor vehicle window |
| CN206190096U (en) * | 2016-10-25 | 2017-05-24 | 金龙联合汽车工业（苏州）有限公司 | Bus passenger door gasbag anti -pinch device |
| KR20180075745A (en) * | 2016-12-26 | 2018-07-05 | 강인필 | Automatic door for safety accident prevention |
| CN208635955U (en) * | 2018-07-26 | 2019-03-22 | 宜博科测控科技（苏州）有限公司 | A kind of car door sensor detecting device and automobile door sensor |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE202006013335U1 (en) * | 2006-08-30 | 2008-01-03 | Brose Fahrzeugteile Gmbh & Co. Kommanditgesellschaft, Coburg | anti-trap |
| EP2020339B1 (en) * | 2007-07-31 | 2012-03-28 | Micronas GmbH | Activation device for the safety device in a motor vehicle |
-
2018
- 2018-07-26 CN CN201810829511.2A patent/CN108709678B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19818650A1 (en) * | 1998-04-25 | 1999-11-04 | Leonische Drahtwerke Ag | Force sensor for trap prevention device in motor vehicle window |
| CN206190096U (en) * | 2016-10-25 | 2017-05-24 | 金龙联合汽车工业（苏州）有限公司 | Bus passenger door gasbag anti -pinch device |
| KR20180075745A (en) * | 2016-12-26 | 2018-07-05 | 강인필 | Automatic door for safety accident prevention |
| CN208635955U (en) * | 2018-07-26 | 2019-03-22 | 宜博科测控科技（苏州）有限公司 | A kind of car door sensor detecting device and automobile door sensor |
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| Publication number | Publication date |
|---|---|
| CN108709678A (en) | 2018-10-26 |
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