CN108679866A - Corrosion-resistant spectral selective absorbing coating and preparation method thereof - Google Patents
Corrosion-resistant spectral selective absorbing coating and preparation method thereof Download PDFInfo
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Abstract
Corrosion-resistant spectral selective absorbing coating provided by the invention and preparation method thereof is made of substrate, adhesive linkage, metal medium absorbed layer and medium antireflection layer with infrared external reflection function；Wherein, adhesive linkage is aluminium nano thin-film, can effectively improve the binding force of coating and substrate, enhance the corrosion resistance of coating；Metal medium absorbed layer is aluminum nanoparticles doped aluminum nitride film or aluminum nanoparticles doped aluminium film, can absorb sunlight strongly, improve the absorptivity of coating；Antireflection layer is non-crystalline aluminum nitride dielectric film or amorphous nickel/phosphorus/aluminium oxide dielectric film with superior chemical stability and optical transmission, improves the corrosive nature of coating.
Description
Technical field
The present invention relates to field of solar collectors, and in particular to corrosion-resistant spectral selective absorbing coating and its preparation side
Method.
Background technology
Solar energy heat utilization is most simple, the most direct effective way of human use's solar energy, is regenerative resource skill
One of art field degree of commercialization highest, the most common technology of popularization and application.It is to improve collection using spectral selective absorbing coating
The important measures of the cost performance of the collecting efficiency of hot device, operating temperature and system.
The performance characterization of spectral selective absorbing coating includes mainly two aspects.First, the optical property of absorber coatings, it is main
If its absorptivity and emissivity, the collecting efficiency of solar thermal collector is directly determined, therefore be a weight of performance characterization
Want aspect；Secondly, absorber coatings are used as the heat absorbent surface of heat collector, need to be in outdoor application, it has to be possible to be subjected in natural environment
Various conditions, such as ultraviolet light irradiation, the variation of temperature, the condensation of the spray of rainwater and dew, therefore it is required that absorber coatings
There must be higher weatherability to ensure its longer service life, this is particularly important to flat plate collector, especially on edge
The corrosion resistance in Haiti area, coating is most important.
It is resistance to that International Energy Agency " solar thermal collector material " work group (IEA MSTC) establishes characterization absorber coatings
The general procedure of time property.The program was submitted to 180 heliotechnics of International Organization for standardization ISO/TC in 1997 as standard
The committee, i.e. " solar energy-flat plate collector material-solar thermal collector surface weatherability test program ".This test program is suitable
Sorbent surface for domestic hot water's flat plate collector with single laying of plank covering.It mainly considers that Three natures condition is applied to absorbing
The influence of layer：(1) high temperature causes the degradation of coating, that is, aoxidizes；(2) destruction of moisture and condensation to coating；(3) high humility
The corrosiveness of pollutant sulfur dioxide in air to coating.The design service life of heat collector is 25 years, within this time
Since collector system optical property reduction caused by coating aging must not exceed 5%, i.e. performance indicator PC=- Δs αs+0.25
ΔεT≤ 0.05, wherein Δ αsWith Δ εTRespectively changing value (the Round robin on of coating absorptivity and emissivity
accelerated life testing of solar absorber surface durability.Solar Energy
Materials and Solar Cells 2000,61:239-253)。
Flat-plate solar collector coating material and the maximum difference of vacuum pipe coating are that have good weatherability.However
Since flat water heater will use under a variety of different weather conditions for a long time, flat-plate solar collector needs are subjected to each
The test of kind adverse circumstances, to flat plate collector coating, more stringent requirements are proposed.National standard GB/T26974-2011 is to tablet collection
The salt spray resistance ability of the heat absorbing coating of hot device claims, and causes to pay close attention to the salt fog resistance to tablet heat-absorbing body coating in industry
Energy.Coating used at present is amenable to the test of constant temperature mostly, but usually salt spray resistance ability is weaker.
German TINOX coating technologies using electron beam evaporation method by titanium and quartz under the action of electron ray rifle quilt
Chemical reaction occurs after nitrogen and oxygen is added and generates titanium oxynitrides for vaporization, vaporizer, and finally deposition is condensed into coating on copper strips,
Coating has excellent optical property, and coating absorptivity is about 0.96, emissivity minimum only 0.05, however coating is anticorrosive
Poor ability, less than 6h, (flat-plate solar collector technical problem is sketched, solar energy, 2013 (5) for neutral salt spray test:30-
32)。
The Sunselect coatings of German Alanod companies equally have excellent optical property and high-temperature stability, however
The resistance to corrosion of coating is also very poor, and after neutral salt spray test 26h, coating all falls off (Corrosion protection
of Sunselect,a spectrally selective solar absorber coating,by(3-
mercaptopropyl)trimethoxysilane.Solar Energy Materials&Solar Cells 2009,93:
1733–1742)。
Hao Lei etc. reports a kind of Si3N4/Cr-CrNx/Si3N4 sandwich structures with more excellent corrosion protection energy
Coating, coating absorptivity are about 0.95, emissivity 0.051, but after salt mist experiment 120h, and coated optical performance declines to a great extent,
Absorptivity will be 0.908, and emissivity rises to 0.1 (Highly corrosion resistant and sandwich-like
Si3N4/Cr-CrNx/Si3N4coatings used for solar selective absorbing
applications.ACS Applied Materials Interfaces 2016,8,34008-34018)。
Currently, the patent in relation to spectral selective absorbing coating all concentrates on the high temperature resistance aspect of coating both at home and abroad,
And the corrosion resistance of coating is paid close attention to less.
Such as Chinese patent CN 102620456A (application number 201210098042.4) disclose a kind of middle low-temperature solar energy
Select absorbing membrane and preparation method thereof.The film is suitable for middle low-temperature solar energy heat-collecting plate core field, in 278 DEG C below
It can be used for a long time in cold atmospheric environment, 278 DEG C or more of application requirement can not be met.
Chinese patent CN 101922816B (application number 201010231151.X) disclose a kind of solar selectively absorption
Coating and preparation method thereof, due to replacing single metal material used in traditional high temperature coating using dystectic AlNi alloys
Expect, to constitute cermet absorbed layer, to have good high high-temp stability, can for a long time make in 600 DEG C of vacuum environments
With suitable for high temperature solar vacuum heat-collecting pipe.
106958005 A of Chinese patent CN (application number 201710211077.7) disclose a kind of refractory metal ceramics
Coating for selective absorption of sunlight spectrum.Coatings emissivity low (~10% 500 DEG C of@), absorptivity it is high (>92%), thermal stability is good,
When long-time is under 600 DEG C of hot conditions, its optical property is held essentially constant.
Invention content
The purpose of the present invention is to provide corrosion-resistant spectral selective absorbing coatings and preparation method thereof, solve existing
The problem of spectral selective absorbing coating emissivity height, corrosion resistance difference.
In order to achieve the above object, the technical solution adopted by the present invention is：
Corrosion-resistant spectral selective absorbing coating provided by the invention, including substrate, in the substrate from bottom to top successively
It is connected with adhesive linkage, metal medium absorbed layer and medium antireflection layer, wherein adhesive linkage is aluminium nano thin-film, and metal medium is inhaled
Receive the metal medium film for the aluminum nanoparticles doped aluminum nitride that layer is double-layer structure or the gold of aluminum nanoparticles doped aluminium
Belong to dielectric film, medium antireflection layer is amorphous aluminum nitride nanometer film or amorphous nickel/phosphorus/aluminium oxide nano thin-film.
Preferably, the thickness of adhesive linkage is 100~200nm.
Preferably, the thickness of metal medium absorbed layer is 220~250nm.
Preferably, the thickness of medium antireflection layer is 200~250nm.
A kind of preparation method of corrosion-resistant spectral selective absorbing coating, includes the following steps：
Step 1, substrate is pre-processed；
Step 2, adhesive linkage is deposited in substrate；
Step 3, the deposited metal dielectric layer on adhesive linkage；
Step 4, the deposition medium antireflection layer on metal medium absorbed layer.
Preferably, it in step 2, when depositing adhesive linkage in substrate, is passed through into the vacuum chamber of vacuum composite film coating machine pure
The argon gas of degree 99.95% opens rafifinal target, aluminium target is bombarded using direct current, intermediate frequency or radio-frequency power supply magnetron sputtering method, in substrate
Upper deposition of aluminum nano thin-film, wherein argon flow amount is 100~200sccm, and air pressure is 0.1~0.2Pa；DC voltage be 300~
500V, electric current are 50~80A, and aluminium Nanometer thin film deposition thickness is 100~200nm.
Preferably, in step 3, when metal absorption layer is aluminum nanoparticles doped aluminum nitride metal medium film, viscous
Deposited metal dielectric layer on layer is connect, using rafifinal target as cathode, using high pure nitrogen as reaction gas；It is passed through into vacuum chamber
Gas opens direct current, intermediate frequency or radio-frequency power supply magnetron sputtering rafifinal target, and aluminum nanoparticles doping is deposited on aluminium nano thin-film
Metal aluminum nitride dielectric film；Wherein argon flow amount is 100~200sccm, and nitrogen flow is 50~100sccm, air pressure 0.1
The deposition thickness of~0.3Pa, metal medium absorbed layer are 220~250nm.
Preferably, in step 34, when metal absorption layer is aluminum nanoparticles doped aluminium metal medium film, viscous
Deposited metal dielectric layer on layer is connect, using rafifinal target as cathode, using high purity oxygen gas as reaction gas；It is passed through into vacuum chamber
Gas opens direct current, intermediate frequency or radio-frequency power supply magnetron sputtering rafifinal target, and aluminum nanoparticles doping is deposited on aluminium nano thin-film
Alumina metals dielectric film；Wherein argon flow amount is 100~200sccm, and oxygen flow is 50~100sccm, air pressure 0.1
~0.3Pa, time are 20~30 minutes.
Preferably, it in step 4, when medium antireflection layer is amorphous aluminum nitride nanometer film, sinks on metal absorption layer
Product medium antireflection layer, using rafifinal target as cathode, using high pure nitrogen as reaction gas；It is passed through gas into vacuum chamber, opens
Direct current, intermediate frequency or radio-frequency power supply magnetron sputtering rafifinal target, deposited amorphous aluminum nitride nanometer film, obtains on metal medium film
To medium antireflection layer；Wherein, argon flow amount be 100~200sccm, nitrogen flow be 100~200sccm, air pressure be 0.1~
The deposition thickness of 0.3Pa, medium anti-reflection layer are 200~250nm.
Preferably, it in step 4, when medium antireflection layer is amorphous nickel/phosphorus/aluminium oxide nano thin-film, sinks on metal absorption layer
Product medium antireflection layer, using rafifinal target as cathode, using high purity oxygen gas as reaction gas；It is passed through gas into vacuum chamber, opens
Direct current, intermediate frequency or radio-frequency power supply magnetron sputtering rafifinal target, deposited amorphous aluminium oxide nano film, obtains on metal medium film
To medium antireflection layer；Wherein, argon flow amount be 100~200sccm, oxygen flow be 100~200sccm, air pressure be 0.1~
0.3Pa, time are 30~50 minutes.
Compared with prior art, the beneficial effects of the invention are as follows：
Corrosion-resistant spectral selective absorbing coating provided by the invention, by with infrared external reflection function substrate, adhesive linkage,
Metal medium absorbed layer and medium antireflection layer composition；Wherein, adhesive linkage is aluminium nano thin-film, can effectively improve coating and substrate
Binding force, enhance the corrosion resistance of coating；Metal medium absorbed layer is that aluminum nanoparticles doped aluminum nitride film or aluminium are received
Rice grain doped aluminium film, can absorb sunlight strongly, improve the absorptivity of coating；Antireflection layer is with superior chemical
The non-crystalline aluminum nitride dielectric film or amorphous nickel/phosphorus/aluminium oxide dielectric film of stability and optical transmission, improve the corrosivity of coating
Energy.
Simultaneously after tested, the solar absorptance of spectral selective absorbing coating of the invention is more than 0.94, and emissivity exists
Between 0.06~0.08, there is excellent optical property.In addition, durability of coating is strong, and neutral salt spray test 1000 hours, performance
It does not fail, is suitable for flat plate collector, and coating can use under 400 DEG C of vacuum environments.
Further, the preparation method of photothermal conversion coating of the invention is simple, and production cost is low, suitable for industry metaplasia
Production.
Description of the drawings
Fig. 1 is the structural schematic diagram of spectral selective absorbing coating of the present invention；
Specific implementation mode
Technical problem to be solved by the invention is to provide a kind of corrosion-resistant spectral selective absorbing coating and its preparation sides
Method is suitable for flat plate collector, high-temperature vacuum heat-collecting tube etc..The coating is with thermal stability is good, emissivity is low, corrosion resistance
The features such as excellent, and preparation process cheap and simple, favorable repeatability.
Realize that the technical solution of an object of the present disclosure is a kind of corrosion-resistant spectral selective absorbing coating, from substrate to table
Face successively include adhesive linkage, metal medium absorbed layer and medium antireflection layer, wherein the material of the substrate be aluminium, stainless steel,
Copper or glass, have the function of infrared external reflection；
The adhesive linkage is aluminium nano thin-film, and thickness is 100~200nm；
The thickness of the metal medium absorbed layer is 220~250nm, while being double-layer structure, and double-layer structure is respectively
Auto-dope high-selenium corn layer and auto-dope low absorption layer；Wherein, metal medium absorbed layer is the gold of aluminum nanoparticles doped aluminum nitride
Belong to the metal medium film of dielectric film or aluminum nanoparticles doped aluminium；It preferably uses aluminum nanoparticles doped aluminum nitride
Metal medium film；
The medium antireflection layer is amorphous aluminum nitride nanometer film or amorphous nickel/phosphorus/aluminium oxide nano thin-film, thickness 200
~250nm, it is preferred to use aluminum nitride nanometer film.
Realize that the technical solution of the second purpose of the invention is a kind of corrosion-resistant spectral selective absorbing coating as described above
Preparation method, include the following steps：
1. being pre-processed to substrate.
2. the deposition of aluminum nano thin-film in substrate.
3. depositing the double-deck aluminum nanoparticles doped aluminum nitride metal medium film or aluminum nanoparticles on aluminium nano thin-film
The metal medium film of doped aluminium.
4. deposited amorphous aluminum nitride nanometer film or amorphous nickel/phosphorus/aluminium oxide nano thin-film on metal medium film.
Above-mentioned steps 2. deposition of aluminum nano thin-film when, purity 99.95% is passed through into the vacuum chamber of vacuum composite film coating machine
Argon gas, open rafifinal target, using direct current, intermediate frequency or radio-frequency power supply magnetron sputtering method bombard aluminium target, deposit and receive in substrate
Rice aluminium film, wherein argon flow amount are 100~200sccm, and air pressure is 0.1~0.2Pa；DC voltage is 300~500V, electric current
For 50~80A, sputtering time is 10~20 minutes.
When above-mentioned steps deposit aluminum nanoparticles doped aluminum nitride metal medium film 3., using rafifinal target as cathode, with
High pure nitrogen is reaction gas；It is passed through gas into vacuum chamber, opens direct current, intermediate frequency or radio-frequency power supply magnetron sputtering rafifinal
Target deposits aluminum nanoparticles doped aluminum nitride metal medium film on aluminium nano thin-film, obtains metal medium absorbed layer 3；Its
Middle argon flow amount is 100~200sccm, and nitrogen flow is 50~100sccm, and air pressure is 0.1~0.3Pa, and the time is 20~30
Minute；
In preparation process, the flow of nitrogen relative to the flow of argon gas be it is limited, limited nitrogen-atoms only with portion
The aluminium atom divided reacts to form aluminium nitride, therefore the doping of plasma aluminum nanoparticles enters in aluminium nitride dielectric base body, i.e., certainly
Adulterate absorber coatings；By adjusting the size of limited nitrogen flow, the quantity of limited Nitrogen ion is controlled, aluminium nanometer can be controlled
The difference of particle doping content, and then form auto-dope high-selenium corn layer and auto-dope low absorption layer.
Or 3. above-mentioned steps are when depositing aluminum nanoparticles doped aluminium metal medium film, using rafifinal target as cathode,
Using high purity oxygen gas as reaction gas；It is passed through gas into vacuum chamber, opens direct current, intermediate frequency or radio-frequency power supply magnetron sputtering rafifinal
Target deposits aluminum nanoparticles doped aluminium metal medium film on aluminium nano thin-film, obtains metal medium absorbed layer 3；Its
Middle argon flow amount is 100~200sccm, and oxygen flow is 50~100sccm, and air pressure is 0.1~0.3Pa, and the time is 20~30
Minute；
In preparation process, the flow of oxygen relative to the flow of argon gas be it is limited, limited oxygen atom only with portion
The aluminium atom divided reacts to form aluminium oxide, therefore the doping of plasma aluminum nanoparticles enters in alumina dielectric medium matrix, i.e., certainly
Adulterate absorber coatings；By adjusting the size of limited oxygen flow, the quantity of limited oxonium ion is controlled, aluminium nanometer can be controlled
The difference of particle doping content, and then form auto-dope high-selenium corn layer and auto-dope low absorption layer.
Above-mentioned steps 4. deposited amorphous aluminum nitride nanometer film when, using rafifinal target as cathode, with high pure nitrogen be reaction
Gas；It is passed through gas into vacuum chamber, opens direct current, intermediate frequency or radio-frequency power supply magnetron sputtering rafifinal target, it is thin in metal medium
Deposited amorphous aluminum nitride nanometer film on film, obtains medium antireflection layer 4；Wherein argon flow amount is 100~200sccm, nitrogen
Flow is 100~200sccm, and air pressure is 0.1~0.3Pa, and the time is 30~50 minutes；
Or above-mentioned steps 4. deposited amorphous aluminium oxide nano film when, be anti-with high purity oxygen gas using rafifinal target as cathode
Answer gas；It is passed through gas into vacuum chamber, direct current, intermediate frequency or radio-frequency power supply magnetron sputtering rafifinal target are opened, in metal medium
Deposited amorphous aluminium oxide nano film on film, obtains medium antireflection layer 4；Wherein argon flow amount is 100~200sccm, oxygen
Throughput is 100~200sccm, and air pressure is 0.1~0.3Pa, and the time is 30~50 minutes.
The present invention has the effect of positive：(1) anticorrosive spectral selective absorbing coating of the invention is by with infrared anti-
Penetrate substrate, adhesive linkage, metal medium absorbed layer and the medium antireflection layer composition of function.
Wherein adhesive linkage is aluminium nano thin-film, can effectively improve the binding force of coating and substrate, enhance the anticorrosive of coating
Performance.
Metal medium absorbed layer be aluminum nanoparticles doped aluminum nitride film or aluminum nanoparticles doped aluminium film, can
It is strong to absorb sunlight, improve the absorptivity of coating.
Antireflection layer is non-crystalline aluminum nitride dielectric film or amorphous oxygen with superior chemical stability and optical transmission
Change aluminium dielectric film, improves the corrosive nature of coating.
After tested, the solar absorptance of spectral selective absorbing coating of the invention is more than 0.94, emissivity 0.06~
Between 0.08, there is excellent optical property.In addition, durability of coating is strong, neutral salt spray test 1000 hours, performance does not decline
It moves back, is suitable for flat plate collector, and coating can use under 400 DEG C of vacuum environments.
(2) preparation method of photothermal conversion coating of the invention is simple, and production cost is low, suitable for industrialized production.
Embodiment 1
See that Fig. 1, the photothermal conversion coating of the present embodiment include being set gradually on the base 1 according to sequence from the bottom to top
Adhesive linkage 2, metal medium absorbed layer 3 and medium antireflection layer 4.
The substrate 1 is the substrate with excellent heat conducting performance, and the material of substrate 1 is aluminium, stainless steel, copper or glass；Tool
Body, can be one kind in aluminium strip or stainless steel (304,316L) band or copper strips or sheet glass, and the substrate 1 in the present embodiment is
Aluminium strip.
The adhesive linkage 2 is aluminium nano thin-film, and thickness is 100~200nm.The combination of coating and substrate can be effectively improved
Power enhances the corrosion resistance of coating.
The metal medium absorbed layer is that aluminum nanoparticles doped aluminum nitride film or aluminum nanoparticles doped aluminum nitride are thin
Film can absorb sunlight strongly, improve the absorptivity of coating.The composite absorption layer 3 of the present embodiment is that aluminum nanoparticles adulterate nitrogen
Change aluminium film, thickness 250nm.
The antireflection layer 4 is the non-crystalline aluminum nitride dielectric film or non-with superior chemical stability and optical transmission
Crystal alumina dielectric film improves the corrosive nature of coating.The antireflection layer 4 of the present embodiment is non-crystalline aluminum nitride dielectric film,
Thickness is 250nm.
The spectral selective absorbing coating of the present embodiment is detected according to GB/T25968-2010, measures sun suction
It receives than being 0.94, emissivity 0.06 illustrates that coating has excellent optical property.
The spectral selective absorbing coating of the present embodiment is detected according to GBT 26974-2011, neutral salt spray test
1000 hours, performance did not failed, illustrated that coating has very excellent corrosion resistance.
The preparation method of the photothermal conversion coating of the present embodiment is as follows：
1. being pre-processed to substrate 1.
Substrate 1 is fitted into magnetron sputtering coater (Shenyang distance of travel of roc 560C), and by the vacuum degree of magnetron sputtering sputtering chamber
It is evacuated to 2.0 × 10~8.0 × 10-5Pa；Then it is passed through the argon gas of purity 99.95% into vacuum chamber, makes the vacuum degree of vacuum chamber
It is 8.0 × 10-2~1.0 × 10-1Pa opens DC negative bias voltage, plasma cleaning is carried out to substrate 1, to remove 1 surface of substrate
Pollutant, improve substrate 1 and coating binding force.
2. depositing nanometer aluminium film on the base 1.
By step, 1. pretreated substrate 1 is placed on base, and aluminium Al (atomic percent 99.999%) is used as and is splashed
It shoots at the target material.It is passed through the argon gas and reaction gas nitrogen of purity 99.95% into vacuum chamber, opens aluminium target, is splashed using direct magnetic control
It penetrates, the nanometer aluminium film of 100nm thickness is deposited in substrate, this nanometer of aluminium film is adhesive linkage 2.
Parameter setting is as follows：Argon flow amount be 100~200sccm, nitrogen flow be 50~100sccm, air pressure be 0.1~
0.2Pa；DC voltage is 300~500V, and electric current is 50~80A, and sputtering time is 10~20 minutes, by controlling sputtering time
To control the thickness of nanometer aluminium film.
3. depositing the double-deck aluminum nanoparticles doped aluminum nitride metal medium film on aluminium nano thin-film.
Using rafifinal target as cathode, using high pure nitrogen as reaction gas；It is passed through gas into vacuum chamber, opens direct magnetic control
Rafifinal target is sputtered, aluminum nanoparticles doped aluminum nitride metal medium film is deposited on aluminium nano thin-film, obtains metal medium
Absorbed layer 3；Wherein argon flow amount is 100~200sccm, and nitrogen flow is 50~100sccm, and air pressure is 0.1~0.3Pa, when
Between be 20~30 minutes.The thickness of metal medium film is controlled by controlling sputtering time, by controlling argon gas and nitrogen
Flow controls the doping content of metal medium film, forms the double-layer structure of gradient.
4. the deposited amorphous aluminum nitride nanometer film on metal medium film.
Using rafifinal target as cathode, using high pure nitrogen as reaction gas；It is passed through gas into vacuum chamber, opens radio frequency magnetron
Rafifinal target is sputtered, the deposited amorphous aluminum nitride nanometer film on metal medium film obtains medium antireflection layer 4；Wherein argon
Throughput is 100~200sccm, and nitrogen flow is 100~200sccm, and air pressure is 0.1~0.3Pa, and the time is 30~50 points
Clock.
Claims (10)
1. corrosion-resistant spectral selective absorbing coating, which is characterized in that including substrate, be sequentially connected from bottom to top in the substrate
There are adhesive linkage, metal medium absorbed layer and medium antireflection layer, wherein adhesive linkage is aluminium nano thin-film, metal medium absorbed layer
It is situated between for the metal medium film of the aluminum nanoparticles doped aluminum nitride of double-layer structure or the metal of aluminum nanoparticles doped aluminium
Matter film, medium antireflection layer are amorphous aluminum nitride nanometer film or amorphous nickel/phosphorus/aluminium oxide nano thin-film.
2. corrosion-resistant spectral selective absorbing coating according to claim 1, which is characterized in that the thickness of adhesive linkage is
100~200nm.
3. corrosion-resistant spectral selective absorbing coating according to claim 1, which is characterized in that metal medium absorbed layer
Thickness is 220~250nm.
4. corrosion-resistant spectral selective absorbing coating according to claim 1, which is characterized in that the thickness of medium antireflection layer
Degree is 200~250nm.
5. a kind of preparation method of corrosion-resistant spectral selective absorbing coating as described in claim 1-4, which is characterized in that packet
Include following steps：
Step 1, substrate is pre-processed；
Step 2, adhesive linkage is deposited in substrate；
Step 3, the deposited metal dielectric layer on adhesive linkage；
Step 4, the deposition medium antireflection layer on metal medium absorbed layer.
6. the preparation method of corrosion-resistant spectral selective absorbing coating according to claim 5, which is characterized in that step 2
In, when depositing adhesive linkage in substrate, it is passed through the argon gas of purity 99.95% into the vacuum chamber of vacuum composite film coating machine, opens
Rafifinal target, using direct current, intermediate frequency or radio-frequency power supply magnetron sputtering method bombardment aluminium target, the deposition of aluminum nano thin-film in substrate,
In, argon flow amount is 100~200sccm, and air pressure is 0.1~0.2Pa；DC voltage is 300~500V, and electric current is 50~80A,
Aluminium Nanometer thin film deposition thickness is 100~200nm.
7. the preparation method of corrosion-resistant spectral selective absorbing coating according to claim 5, which is characterized in that step 3
In, when metal medium absorbed layer is aluminum nanoparticles doped aluminum nitride metal medium film, deposited metal is situated between on adhesive linkage
When matter absorbed layer, using rafifinal target as cathode, using high pure nitrogen as reaction gas；Be passed through gas into vacuum chamber, open direct current,
Intermediate frequency or radio-frequency power supply magnetron sputtering rafifinal target deposit aluminum nanoparticles doped aluminum nitride metal medium on aluminium nano thin-film
Film；Wherein argon flow amount is 100~200sccm, and nitrogen flow is 50~100sccm, and air pressure is 0.1~0.3Pa, and metal is situated between
The deposition thickness of matter absorbed layer is 220~250nm.
8. the preparation method of corrosion-resistant spectral selective absorbing coating according to claim 5, which is characterized in that step 34
In, when metal medium absorbed layer is aluminum nanoparticles doped aluminium metal medium film, deposited metal is situated between on adhesive linkage
When matter absorbed layer, using rafifinal target as cathode, using high purity oxygen gas as reaction gas；Be passed through gas into vacuum chamber, open direct current,
Intermediate frequency or radio-frequency power supply magnetron sputtering rafifinal target deposit aluminum nanoparticles doped aluminium metal medium on aluminium nano thin-film
Film；Wherein argon flow amount is 100~200sccm, and oxygen flow is 50~100sccm, and air pressure is 0.1~0.3Pa, and the time is
20~30 minutes.
9. the preparation method of corrosion-resistant spectral selective absorbing coating according to claim 5, which is characterized in that step 4
In, when medium antireflection layer is amorphous aluminum nitride nanometer film, in deposition medium antireflection layer on metal medium absorbed layer,
Using rafifinal target as cathode, using high pure nitrogen as reaction gas；It is passed through gas into vacuum chamber, opens direct current, intermediate frequency or radio frequency
Power supply magnetron sputtering rafifinal target, the deposited amorphous aluminum nitride nanometer film on metal medium film obtain medium antireflection layer；
Wherein, argon flow amount is 100~200sccm, and nitrogen flow is 100~200sccm, and air pressure is 0.1~0.3Pa, medium anti-reflection
The deposition thickness of layer is 200~250nm.
10. the preparation method of corrosion-resistant spectral selective absorbing coating according to claim 5, which is characterized in that step 4
In, when medium antireflection layer is amorphous nickel/phosphorus/aluminium oxide nano thin-film, in deposition medium antireflection layer on metal medium absorbed layer,
Using rafifinal target as cathode, using high purity oxygen gas as reaction gas；It is passed through gas into vacuum chamber, opens direct current, intermediate frequency or radio frequency
Power supply magnetron sputtering rafifinal target, the deposited amorphous aluminium oxide nano film on metal medium film obtain medium antireflection layer；
Wherein, argon flow amount is 100~200sccm, and oxygen flow is 100~200sccm, and air pressure is 0.1~0.3Pa, time 30
~50 minutes.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111996491A (en) * | 2020-09-10 | 2020-11-27 | 中国电子科技集团公司第三十八研究所 | Thermal control coating with designable solar absorptivity and preparation method thereof |
| CN112899632A (en) * | 2021-05-07 | 2021-06-04 | 上海陛通半导体能源科技股份有限公司 | Vacuum coating process equipment and method capable of realizing convenient temperature control |
| CN115371272A (en) * | 2022-08-24 | 2022-11-22 | 云南师范大学 | Photo-thermal conversion film and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111996491A (en) * | 2020-09-10 | 2020-11-27 | 中国电子科技集团公司第三十八研究所 | Thermal control coating with designable solar absorptivity and preparation method thereof |
| CN112899632A (en) * | 2021-05-07 | 2021-06-04 | 上海陛通半导体能源科技股份有限公司 | Vacuum coating process equipment and method capable of realizing convenient temperature control |
| CN112899632B (en) * | 2021-05-07 | 2021-12-28 | 上海陛通半导体能源科技股份有限公司 | Vacuum coating process equipment and method capable of realizing convenient temperature control |
| CN115371272A (en) * | 2022-08-24 | 2022-11-22 | 云南师范大学 | Photo-thermal conversion film and preparation method thereof |
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