CN108646208B - Automatic de-embedding method for multi-port clamp - Google Patents

Automatic de-embedding method for multi-port clamp Download PDF

Info

Publication number
CN108646208B
CN108646208B CN201810583683.6A CN201810583683A CN108646208B CN 108646208 B CN108646208 B CN 108646208B CN 201810583683 A CN201810583683 A CN 201810583683A CN 108646208 B CN108646208 B CN 108646208B
Authority
CN
China
Prior art keywords
calibration piece
clamp
piece
formula
calibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201810583683.6A
Other languages
Chinese (zh)
Other versions
CN108646208A (en
Inventor
袁国平
年夫顺
庄志远
刘丹
杨明飞
梁胜利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CLP Kesiyi Technology Co Ltd
Original Assignee
CETC 41 Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CETC 41 Institute filed Critical CETC 41 Institute
Priority to CN201810583683.6A priority Critical patent/CN108646208B/en
Publication of CN108646208A publication Critical patent/CN108646208A/en
Application granted granted Critical
Publication of CN108646208B publication Critical patent/CN108646208B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references

Abstract

The invention discloses an automatic de-embedding method for a multi-port clamp, and belongs to the field of communication. The invention enhances the passivity, causality and symmetry of the S parameter of the multi-port clamp, improves the de-embedding accuracy, further improves the testing precision of the S parameter, reduces the requirement on a multi-port calibration piece, is simple to realize and improves the testing efficiency.

Description

Automatic de-embedding method for multi-port clamp
Technical Field
The invention belongs to the field of communication, and particularly relates to an automatic de-embedding method for a multi-port clamp.
Background
With the rapid development of fifth-generation mobile communication and the higher requirement of the internet and the internet of things on information transmission bandwidth, the microwave millimeter wave effect in the digital link becomes a bottleneck factor restricting high-quality data transmission more and more, and the vector network analyzer and other traditional microwave millimeter wave instruments are applied more and more widely in the design of digital circuits. First, in the testing of high-speed digital circuits, many tested devices do not have a coaxial connector (e.g., a high-speed backplane), and the tested devices can only be connected with a coaxial cable by a test fixture, and further, the testing can be performed in a coaxial environment. However, to obtain the true characteristics of the measured object, the fixture effect must be removed accurately. Although TRL, SOLT, etc. calibration, characterization and removal of the clamp effect can be performed by modeling the clamp with electromagnetic simulation software, or building multiple calibration standards on a non-coaxial substrate of the tested piece, these methods are very cumbersome and time consuming. Furthermore, the tested device of the high-speed digital circuit generally adopts a differential mode to transmit signals of multiple ports, and the traditional method has low efficiency of performing the clamp effect of the multiple ports.
An automatic fixture removal option (AFR) is a science and technology that can help engineers quickly and accurately remove fixture effects in a non-coaxial device measurement environment, and the main principle is to compensate for input and output mismatch and loss by using time domain measurement of a fixture, and work even if the input and output mismatches are different. With this option, the reference surface at the input end of the fixture must first be coaxially aligned; then one or more standard components are measured and used as two-port through channels of the clamp.
The prior multi-port clamp de-embedding technology mainly comprises two types, one type is to manufacture a plurality of standard calibration pieces and carry out complicated SOLT, TRL and other calibrations, the operation is complicated, the steps are easy to make mistakes, in addition, how to represent the calibration pieces is also the difficulty of the method, and if the processing is careless, the calibration error is large; furthermore, the cost of manufacturing multiple calibration pieces is high.
Another type of method is the automatic jig removal method of the german technology company, which is simple to operate and requires only twice as many straight-through alignment members to remove the effects of the jig. However, due to the influence of test errors, the original fixture test data has the problems of passivity, causality and symmetry, and the test errors are introduced when the data with the problems are subjected to de-embedding.
Disclosure of Invention
Aiming at the technical problems in the prior art, the invention provides an automatic de-embedding method for a multi-port clamp, which is reasonable in design, overcomes the defects of the prior art and has a good effect.
In order to achieve the purpose, the invention adopts the following technical scheme:
an automatic de-embedding method for a multi-port clamp comprises the following steps:
step 1: preparing a symmetrical clamp and a twice straight line calibration piece, wherein the distance between transmission lines on the symmetrical clamp is more than 3 times of the line width;
step 2: connecting the tested piece and the multi-port vector network analyzer together through a test cable, completing the calibration of the multi-port vector network analyzer by adopting an electronic calibration piece, and extending the test end face of the whole multi-port vector network analyzer to the position of a coaxial connector of the test cable;
and step 3: connecting the symmetrical clamp to the coaxial port of the test cable, accessing the tested piece at the other port of the symmetrical clamp, and obtaining the original S parameter matrix S of the symmetrical clamp and the tested piece through the calibrated multi-port vector network analyzerRaw；
And 4, step 4: performing passivity, causality and symmetry detection on the original S parameter matrix obtained in the step 3, performing passivity detection according to a formula (1), performing causality detection according to a formula (2), and performing symmetry detection according to a formula (3); if the obtained S parameter does not satisfy any one of passivity, causality and symmetry, the characteristic is compensated, and a corrected S parameter matrix S is obtained after detection and compensation are completedupdate；
eigvalue(S*·S)≤1 (1)；
Si,j(t)＝0,t≤tij(2)；
S＝ST(3)；
Wherein eigvalue (-) represents the matrix eigenvalue, Si,j(t) represents the time domain response of the ith row and jth column element of the S parameter matrix;
and 5: connecting the double straight-through line calibration element to a cable of a multi-port vector network analyzer, and measuring an original S parameter matrix of the double straight-through line calibration element
Figure GDA0002415177650000021
Then, carrying out passivity detection according to a formula (1), carrying out causality detection according to a formula (2), and carrying out symmetry detection according to a formula (3); if the obtained S parameter does not satisfy any one of passivity, causality and symmetry, the characteristic is compensated, and after the detection and compensation are completed, a corrected S parameter matrix is obtained
Figure GDA0002415177650000022
Step 6: obtaining a corrected S parameter matrix of the double straight-through line calibration piece by adopting a vector matching method
Figure GDA0002415177650000023
Transfer function matrix of
Figure GDA0002415177650000024
Obtaining the state space form according to the linear system theory, and discretizing the formula (4) to obtain the discrete state space as shown in the formula (4)An intermediate form, as shown in equation (5);
Figure GDA0002415177650000025
Figure GDA0002415177650000026
wherein, A, B, C and D are coefficient matrixes of state space, and G and H are coefficient matrixes in a discrete state space form;
and 7: the time domain response matrix of the double straight line calibration piece can be obtained by equation (5) as shown in equation (6), and then the time domain response matrix in equation (6) is utilized
Figure GDA0002415177650000027
Measuring the time domain response of the double straight-through line calibration piece so as to determine the total time delay of the double straight-through line calibration piece, then measuring the time domain response of the double straight-through line calibration piece, wherein the left half of the double straight-through line calibration piece is defined as a left side calibration piece, the right half of the double straight-through line calibration piece is defined as a right side calibration piece, and the gating response of the left side calibration piece is obtained by a time domain gate method
Figure GDA0002415177650000031
Obtaining left-hand calibration pieces by time-to-frequency conversion
Figure GDA0002415177650000032
A parameter; then measuring the time domain response of the double straight-through line calibration piece in the opposite direction, and obtaining the gating response of the right side calibration piece by a time domain gating method
Figure GDA0002415177650000033
Obtaining right-hand calibration pieces by time-to-frequency conversion
Figure GDA0002415177650000034
A parameter;
let the four parameters of the left calibration piece be
Figure GDA0002415177650000035
The four parameters of the right calibration piece are
Figure GDA0002415177650000036
Figure GDA0002415177650000037
2 known quantities for a double straight through line calibration piece
Figure GDA0002415177650000038
And
Figure GDA0002415177650000039
and the S parameter matrix corrected in step 5
Figure GDA00024151776500000310
Four elements in the middle, i.e.
Figure GDA00024151776500000311
Assuming that the left and right calibration pieces are symmetrical, respectively, i.e.
Figure GDA00024151776500000312
From the foregoing, only 4 unknown quantities remain:
Figure GDA00024151776500000313
4 unknown quantities can be solved by a Meisen formula and S parameters of four straight-through calibration pieces;
Figure GDA00024151776500000314
and 8: from step 7, four parameters of the left calibration piece are obtained
Figure GDA00024151776500000315
And four parameters of the right calibration piece
Figure GDA00024151776500000316
While doubling the length of the transmission line on the straight line alignment memberThe width and the used plate are completely consistent with the clamp, so that the response of the single-side calibrating piece represents the response of the single-side clamp, and an S parameter matrix S of the clamp is formed according to the number of the transmission lines on the clamp, four parameters of the left-side calibrating piece and four parameters of the right-side calibrating pieceFixAAnd SFixBAnd converting the two S parameter matrixes into a form T of a T parameter matrixFixAAnd TFixB；
And step 9: the S parameter matrix S corrected in the step 4updateConversion to T parameter matrix TupdateObtaining a T parameter matrix T of the tested piece through matrix inverse operation according to a formula (7)DUTAnd converting it into S parameter matrix SDUTCompleting de-embedding;
Tupdate＝TFixA·TDUT·TFixB(7)；
wherein, TFixATime domain response of the left hand clamp, TFixBTime domain response of the right clamp.
The invention has the following beneficial technical effects:
the method comprises the steps of obtaining S parameters of a symmetrical double-straight-through line calibration piece through a port vector network analyzer, processing the S parameters by using a vector fitting algorithm to obtain a transfer function of the S parameters, converting the transfer function into a state space form and obtaining an impact response of a clamp, obtaining a time domain response of a single-side clamp by using a time domain door clamp method, converting the time domain response into a frequency domain by using a Fourier transform, and finally applying the S parameters of the clamp to original S parameters by using a de-embedding algorithm to obtain the real characteristics of the clamp;
obtaining an algorithm of S parameters of the single-side clamp; fitting S parameters of the symmetrical clamp by using a vector fitting algorithm, converting the S parameters into a state space form, and obtaining the S parameters of the unilateral clamp by adopting a time domain door clamping method;
the invention reduces the requirement on the multi-port calibration piece, is simple to realize and improves the testing efficiency;
according to the invention, the S parameter of the multi-port clamp is subjected to passivity, causality and symmetry enhancement, so that the de-embedding accuracy is improved, and the testing precision of the S parameter is further improved.
Drawings
FIG. 1 is a schematic view of a symmetrical fixture and a calibration piece.
FIG. 2 is a test connection diagram.
FIG. 3 is a flow chart of the method of the present invention.
Detailed Description
The invention is described in further detail below with reference to the following figures and detailed description:
a multi-port fixture automatic de-embedding method is disclosed, the flow of which is shown in FIG. 3, and comprises the following steps:
step 1: preparing a symmetrical clamp and a twice straight line calibration piece, wherein the distance between transmission lines on the symmetrical clamp is more than 3 times of the line width as shown in figure 1;
step 2: connecting the tested piece and the multi-port vector network analyzer together through a test cable, completing the calibration of the multi-port vector network analyzer by adopting an electronic calibration piece, and extending the test end face of the whole multi-port vector network analyzer to the position of a coaxial connector of the test cable;
and step 3: connecting the symmetrical clamp shown in FIG. 1 to the coaxial port of the test cable, and accessing the tested piece at the other port of the symmetrical clamp, as shown in FIG. 2, obtaining the original S parameter matrix S of the symmetrical clamp and the tested piece through the calibrated multi-port vector network analyzerRaw；
And 4, step 4: performing passivity, causality and symmetry detection on the original S parameter matrix obtained in the step 3, performing passivity detection according to a formula (1), performing causality detection according to a formula (2), and performing symmetry detection according to a formula (3); if the obtained S parameter does not satisfy any one of passivity, causality and symmetry, the characteristic is compensated, and a corrected S parameter matrix S is obtained after detection and compensation are completedupdate；
eigvalue(S*·S)≤1 (1)；
Si,j(t)＝0,t≤tij(2)；
S＝ST(3)；
Wherein eigvalue (-) represents a matrix bitEigenvalues, Si,j(t) represents the time domain response of the ith row and jth column element of the S parameter matrix;
and 5: connecting the double straight-through line calibration element to a cable of a multi-port vector network analyzer, and measuring an original S parameter matrix of the double straight-through line calibration element
Figure GDA0002415177650000041
Then, carrying out passivity detection according to a formula (1), carrying out causality detection according to a formula (2), and carrying out symmetry detection according to a formula (3); if the obtained S parameter does not satisfy any one of passivity, causality and symmetry, the characteristic is compensated, and after the detection and compensation are completed, a corrected S parameter matrix is obtained
Figure GDA0002415177650000051
Step 6: obtaining a corrected S parameter matrix of the double straight-through line calibration piece by adopting a vector matching method
Figure GDA0002415177650000052
Transfer function matrix of
Figure GDA0002415177650000053
Obtaining a state space form of the linear system according to a linear system theory, as shown in a formula (4), discretizing the formula (4) to obtain a discrete state space form, as shown in a formula (5);
Figure GDA0002415177650000054
Figure GDA0002415177650000055
wherein, A, B, C and D are coefficient matrixes of state space, and G and H are coefficient matrixes in a discrete state space form;
and 7: the time domain response matrix of the double straight line calibration piece can be obtained by equation (5) as shown in equation (6), and then the time domain response matrix in equation (6) is utilized
Figure GDA0002415177650000056
Measuring the time domain response of the double straight-through line calibration piece so as to determine the total time delay of the double straight-through line calibration piece, then measuring the time domain response of the double straight-through line calibration piece, wherein the left half of the double straight-through line calibration piece is defined as a left side calibration piece, the right half of the double straight-through line calibration piece is defined as a right side calibration piece, and the gating response of the left side calibration piece is obtained by a time domain gate method
Figure GDA0002415177650000057
Obtaining left-hand calibration pieces by time-to-frequency conversion
Figure GDA0002415177650000058
A parameter; then measuring the time domain response of the double straight-through line calibration piece in the opposite direction, and obtaining the gating response of the right side calibration piece by a time domain gating method
Figure GDA0002415177650000059
Obtaining right-hand calibration pieces by time-to-frequency conversion
Figure GDA00024151776500000510
A parameter;
let the four parameters of the left calibration piece be
Figure GDA00024151776500000511
The four parameters of the right calibration piece are
Figure GDA00024151776500000512
Figure GDA00024151776500000513
2 known quantities for a double straight through line calibration piece
Figure GDA00024151776500000514
And
Figure GDA00024151776500000515
and modified in step 5S parameter matrix
Figure GDA00024151776500000516
Four elements in the middle, i.e.
Figure GDA00024151776500000517
Assuming that the left and right calibration pieces are symmetrical, respectively, i.e.
Figure GDA00024151776500000518
From the foregoing, only 4 unknown quantities remain:
Figure GDA00024151776500000519
4 unknown quantities can be solved by a Meisen formula and S parameters of four straight-through calibration pieces;
Figure GDA00024151776500000520
and 8: from step 7, four parameters of the left calibration piece are obtained
Figure GDA00024151776500000521
And four parameters of the right calibration piece
Figure GDA00024151776500000522
Meanwhile, the length and the width of the transmission line on the double straight line calibration piece and the used plate are completely consistent with those of the clamp, so that the response of the single-side calibration piece represents the response of the single-side clamp, and an S parameter matrix S of the clamp is formed according to the number of the transmission lines on the clamp, four parameters of the left calibration piece and four parameters of the right calibration pieceFixAAnd SFixBAnd converting the two S parameter matrixes into a form T of a T parameter matrixFixAAnd TFixB；
And step 9: the S parameter matrix S corrected in the step 4updateConversion to T parameter matrix TupdateObtaining a T parameter matrix T of the tested piece through matrix inverse operation according to a formula (7)DUTAnd converting it into S parameter matrix SDUTCompleting de-embedding;
Tupdate＝TFixA·TDUT·TFixB(7)；
wherein, TFixATime domain response of the left hand clamp, TFixBTime domain response of the right clamp.
It is to be understood that the above description is not intended to limit the present invention, and the present invention is not limited to the above examples, and those skilled in the art may make modifications, alterations, additions or substitutions within the spirit and scope of the present invention.

Claims (1)

1. An automatic de-embedding method for a multi-port clamp is characterized by comprising the following steps: the method comprises the following steps:
step 1: preparing a symmetrical clamp and a twice straight line calibration piece, wherein the distance between transmission lines on the symmetrical clamp is more than 3 times of the line width;
step 2: connecting the tested piece and the multi-port vector network analyzer together through a test cable, completing the calibration of the multi-port vector network analyzer by adopting an electronic calibration piece, and extending the test end face of the whole multi-port vector network analyzer to the position of a coaxial connector of the test cable;
and step 3: connecting the symmetrical clamp to the coaxial port of the test cable, accessing the tested piece at the other port of the symmetrical clamp, and obtaining the original S parameter matrix S of the symmetrical clamp and the tested piece through the calibrated multi-port vector network analyzerRaw；
And 4, step 4: performing passivity, causality and symmetry detection on the original S parameter matrix obtained in the step 3, performing passivity detection according to a formula (1), performing causality detection according to a formula (2), and performing symmetry detection according to a formula (3); if the obtained S parameter does not satisfy any one of passivity, causality and symmetry, the characteristic is compensated, and a corrected S parameter matrix S is obtained after detection and compensation are completedupdate；
eigvalue(S*·S)≤1 (1)；
Si,j(t)＝0,t≤tij(2)；
S＝ST(3)；
Wherein eigvalue (-) represents the matrix eigenvalue, Si,j(t) represents the time domain response of the ith row and jth column element of the S parameter matrix;
and 5: connecting the double straight-through line calibration element to a cable of a multi-port vector network analyzer, and measuring an original S parameter matrix of the double straight-through line calibration element
Figure FDA0002415177640000011
Then, carrying out passivity detection according to a formula (1), carrying out causality detection according to a formula (2), and carrying out symmetry detection according to a formula (3); if the obtained S parameter does not satisfy any one of passivity, causality and symmetry, the characteristic is compensated, and after the detection and compensation are completed, a corrected S parameter matrix is obtained
Figure FDA0002415177640000012
Step 6: obtaining a corrected S parameter matrix of the double straight-through line calibration piece by adopting a vector matching method
Figure FDA0002415177640000013
Transfer function matrix of
Figure FDA0002415177640000014
Obtaining a state space form of the linear system according to a linear system theory, as shown in a formula (4), discretizing the formula (4) to obtain a discrete state space form, as shown in a formula (5);
Figure FDA0002415177640000015
Figure FDA0002415177640000016
wherein, A, B, C and D are coefficient matrixes of state space, and G and H are coefficient matrixes in a discrete state space form;
and 7: by the formula(5) It is possible to obtain a time domain response matrix of a double straight line calibration piece, as shown in equation (6), and then use the time domain response matrix in equation (6)
Figure FDA0002415177640000021
Measuring the time domain response of the double straight-through line calibration piece so as to determine the total time delay of the double straight-through line calibration piece, then measuring the time domain response of the double straight-through line calibration piece, wherein the left half of the double straight-through line calibration piece is defined as a left side calibration piece, the right half of the double straight-through line calibration piece is defined as a right side calibration piece, and the gating response of the left side calibration piece is obtained by a time domain gate method
Figure FDA0002415177640000022
Obtaining left-hand calibration pieces by time-to-frequency conversion
Figure FDA0002415177640000023
A parameter; then measuring the time domain response of the double straight-through line calibration piece in the opposite direction, and obtaining the gating response of the right side calibration piece by a time domain gating method
Figure FDA0002415177640000024
Obtaining right-hand calibration pieces by time-to-frequency conversion
Figure FDA0002415177640000025
A parameter;
let the four parameters of the left calibration piece be
Figure FDA0002415177640000026
The four parameters of the right calibration piece are
Figure FDA0002415177640000027
Figure FDA0002415177640000028
2 known quantities for a double straight through line calibration piece
Figure FDA0002415177640000029
And
Figure FDA00024151776400000210
and the S parameter matrix corrected in step 5
Figure FDA00024151776400000211
Four elements in the middle, i.e.
Figure FDA00024151776400000212
Assuming that the left and right calibration pieces are symmetrical, respectively, i.e.
Figure FDA00024151776400000213
From the foregoing, only 4 unknown quantities remain:
Figure FDA00024151776400000214
4 unknown quantities can be solved by a Meisen formula and S parameters of four straight-through calibration pieces;
Figure FDA00024151776400000215
and 8: from step 7, four parameters of the left calibration piece are obtained
Figure FDA00024151776400000216
And four parameters of the right calibration piece
Figure FDA00024151776400000217
Meanwhile, the length and the width of the transmission line on the double straight line calibration piece and the used plate are completely consistent with those of the clamp, so that the response of the single-side calibration piece represents the response of the single-side clamp, and an S parameter matrix S of the clamp is formed according to the number of the transmission lines on the clamp, four parameters of the left calibration piece and four parameters of the right calibration pieceFixAAnd SFixBAnd converting the two S parameter matrixes into a form T of a T parameter matrixFixAAnd TFixB；
And step 9: the S parameter matrix S corrected in the step 4updateConversion to T parameter matrix TupdateObtaining a T parameter matrix T of the tested piece through matrix inverse operation according to a formula (7)DUTAnd converting it into S parameter matrix SDUTCompleting de-embedding;
Tupdate＝TFixA·TDUT·TFixB(7)；
wherein, TFixATime domain response of the left hand clamp, TFixBTime domain response of the right clamp.
CN201810583683.6A 2018-06-08 2018-06-08 Automatic de-embedding method for multi-port clamp Active CN108646208B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810583683.6A CN108646208B (en) 2018-06-08 2018-06-08 Automatic de-embedding method for multi-port clamp

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810583683.6A CN108646208B (en) 2018-06-08 2018-06-08 Automatic de-embedding method for multi-port clamp

Publications (2)

Publication Number Publication Date
CN108646208A CN108646208A (en) 2018-10-12
CN108646208B true CN108646208B (en) 2020-06-05

Family

ID=63751954

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810583683.6A Active CN108646208B (en) 2018-06-08 2018-06-08 Automatic de-embedding method for multi-port clamp

Country Status (1)

Country Link
CN (1) CN108646208B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109254217B (en) * 2018-11-12 2020-10-09 中电科仪器仪表有限公司 S parameter extraction method of unilateral clamp
CN110361685B (en) * 2019-07-01 2021-07-30 北京无线电计量测试研究所 Broadband oscilloscope probe transmission characteristic calibration method and system
CN112462178B (en) * 2020-11-17 2023-06-13 海光信息技术股份有限公司 Test structure and test method for S parameters of chip socket
CN113595658A (en) * 2021-07-26 2021-11-02 宋宏平 Greatly simplified calibration method for radio frequency or microwave multi-port expansion equipment
CN113960510B (en) * 2021-10-20 2024-01-19 北京环境特性研究所 Coaxial annular material electromagnetic parameter test seat and test system test method
CN116449183B (en) * 2023-04-24 2024-04-05 上海新微半导体有限公司 De-embedding structure and method for on-chip test of radio frequency chip, storage medium and terminal

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE408149T1 (en) * 2002-05-16 2008-09-15 Nxp Bv CALIBRATION AND DE-EMBEDDING METHOD, DE-EMBEDDING DEVICES AND NETWORK VECTOR ANALYZER
US7627028B1 (en) * 2008-10-18 2009-12-01 Sun Microsystems, Inc. Multi-port S-parameter and T-parameter conversion
JP6441604B2 (en) * 2014-07-30 2018-12-19 株式会社ダイヘン High frequency measuring device and calibration method of high frequency measuring device
CN106771709A (en) * 2016-11-15 2017-05-31 中国电子科技集团公司第四十研究所 A kind of S parameter De- embedding method of multiport network

Also Published As

Publication number Publication date
CN108646208A (en) 2018-10-12

Similar Documents

Publication Publication Date Title
CN108646208B (en) Automatic de-embedding method for multi-port clamp
CN109444717B (en) Novel on-chip S parameter error calibration method and device
KR102054874B1 (en) Method for calibrating a test rig
CN104237829B (en) Overall calibration method for high-accuracy noise factor measuring system
CN110954809B (en) Vector calibration quick correction method for large signal test
CN111142057A (en) Terahertz frequency band on-chip S parameter calibration method and terminal equipment
EP3275367A1 (en) Methods for calibrating microwave imaging systems
CN111983538B (en) On-chip S parameter measurement system calibration method and device
JP2006201172A (en) Method and apparatus for performing minimum connection multiport through-reflect-line calibration and measurement
Heuermann et al. Advanced on-wafer multiport calibration methods for mono-and mixed-mode device characterization
US5734268A (en) Calibration and measurment technique and apparatus for same
US7768271B2 (en) Method for calibration of a vectorial network analyzer having more than two ports
CN103760509A (en) Multi-port vector network analyzer calibrating method involved with switch compensating errors
CN111611765B (en) Clamp de-embedding method, system, storage medium, computer program and application
US20050256658A1 (en) Multi-port scattering parameter calibration system and method
CN108562769B (en) S parameter extraction method for differential clamp
US11385175B2 (en) Calibration method and terminal equipment of terahertz frequency band on-wafer S parameter
JP7153309B2 (en) Measurement method of reflection coefficient using vector network analyzer
CN108107392A (en) Multi-thread TRL calibration methods and terminal device
Adamian et al. A novel procedure for characterization of multiport high-speed balanced devices
Maeda et al. An indirect measurement method for S-parameters which is based on reduction to eigenvalue problem
Stenarson et al. A Reformulation and Stability Study of TRL and LRM Using $ S $-Parameters
Lu et al. The thru-line-symmetry (TLS) calibration method for on-wafer scattering matrix measurement of four-port networks
CN109254217B (en) S parameter extraction method of unilateral clamp
Wan et al. A mixed-mode TRL algorithm based on symmetrical reflection standards

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20220609

Address after: 266555 No. 98 Xiangjiang Road, Huangdao District, Qingdao City, Shandong Province

Patentee after: CLP kesiyi Technology Co.,Ltd.

Address before: No.98 Xiangjiang Road, economic and Technological Development Zone, Huangdao District, Qingdao City, Shandong Province 266555

Patentee before: THE 41ST INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY Group Corp.

TR01 Transfer of patent right