CN108631746A - A kind of SAW filter - Google Patents
A kind of SAW filter Download PDFInfo
- Publication number
- CN108631746A CN108631746A CN201810325614.5A CN201810325614A CN108631746A CN 108631746 A CN108631746 A CN 108631746A CN 201810325614 A CN201810325614 A CN 201810325614A CN 108631746 A CN108631746 A CN 108631746A
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- China
- Prior art keywords
- interdigital transducer
- saw filter
- interdigital
- transducer
- reflecting grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims description 8
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 5
- 238000003780 insertion Methods 0.000 abstract description 6
- 230000037431 insertion Effects 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 5
- 230000005764 inhibitory process Effects 0.000 abstract description 4
- 229910000679 solder Inorganic materials 0.000 abstract description 2
- 238000010897 surface acoustic wave method Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010295 mobile communication Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011038 discontinuous diafiltration by volume reduction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000012163 sequencing technique Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02637—Details concerning reflective or coupling arrays
- H03H9/02685—Grating lines having particular arrangements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
The invention discloses a kind of SAW filters, belong to filter field.The SAW filter includes piezoelectric substrate, interdigital transducer, reflecting grating and capacitance；Two cascade three interdigital transducers DMS structures, the interdigital transducer paraphase on both sides simultaneously access capacitance；Compared to traditional three interdigital transducer DMS structures, increases and be inserted into an appropriate number of reflecting grating on intermediate interdigital transducer both sides；Solve the problems, such as that existing SAW filter is difficult to meet narrow bandwidth high rectangle degree simultaneously；Having reached reduces the insertion loss of SAW filter, reduces the chip size of SAW filter and partial earthing lead or solder sphere is omitted with cost-effective, while improving the effect of stopband inhibition.
Description
Technical field
The present embodiments relate to filter field, more particularly to a kind of SAW filter.
Background technology
Surface acoustic wave is a kind of elastic wave propagated along body surface.With the continuous development of mobile communication technology, sound table
Surface wave filter is also more and more in the application of mobile communication field.
Existing SAW filter, due to being limited by material electromechanical coupling factor and design scheme, sound surface
The rectangular degree of wave filter is not high, and in the 2%-4% of centre frequency, it is also larger generally to lead to in-band insertion loss for bandwidth.With trapezoidal
For SAW filter, trapezoidal SAW filter is constituted by connecting with resonator cascade in parallel, although can obtain
Good rectangular degree is obtained, but stopband inhibits poor.
In following communication system, to high rectangle degree, narrow bandwidth, high stop band, low-loss, small filter need
Increase, existing SAW filter is asked to be difficult to meet above-mentioned multiple performance simultaneously.
Invention content
In order to solve problems in the prior art, an embodiment of the present invention provides a kind of SAW filters.The technical side
Case is as follows：
In a first aspect, provide a kind of SAW filter, including piezoelectric substrate, be arranged on piezoelectric substrate it is interdigital
Energy converter, reflecting grating and capacitance；
First interdigital transducer and the second interdigital transducer are connected by the first busbar；
Third interdigital transducer and the 4th interdigital transducer are connected by the second busbar；
5th interdigital transducer is arranged between the first interdigital transducer and third interdigital transducer, the 6th interdigital transducer
It is arranged between the second interdigital transducer and the 4th interdigital transducer；
Capacitance is connect by electrode with the first busbar and the second busbar；
First interdigital transducer differs 180 degree, third interdigital transducer and the 4th fork with the phase of the second interdigital transducer
The phase of finger transducer differs 180 degree；
Reflecting grating, the 5th interdigital transducer and third fork are provided between first interdigital transducer and the 5th interdigital transducer
It is provided with reflecting grating between finger transducer, is provided with reflecting grating between the second interdigital transducer and the 6th interdigital transducer, the 6th
It is provided with reflecting grating between interdigital transducer and the 4th interdigital transducer.
Optionally, the both ends of the first interdigital transducer, the both ends of the second interdigital transducer, third interdigital transducer two
End, the 4th interdigital transducer are provided at both ends with reflecting grating.
Optionally, the 5th interdigital transducer and the 6th interdigital transducer are separately connected the input electrode of SAW filter
And output electrode.
Optionally, the first interdigital transducer, the second interdigital transducer, third interdigital transducer, the 4th interdigital transducer point
Grounding electrode is not connected.
Optionally, the material of piezoelectric substrate is lithium tantalate.
Optionally, the film thickness of SAW filter is identical.
The advantageous effect that technical solution provided in an embodiment of the present invention is brought is：
Interdigital transducer, reflecting grating and the electricity that the SAW filter includes piezoelectric substrate, is arranged on piezoelectric substrate
Hold, two groups of paraphase in three groups of interdigital transducers access capacitance, and reflecting grating is provided between interdigital transducer；It solves existing
SAW filter is difficult to the problem of meeting narrow bandwidth high rectangle degree simultaneously；Having reached reduces the insertion of SAW filter
Loss reduces the chip size of SAW filter and partial earthing lead or solder sphere is omitted with cost-effective, simultaneously
Improve the effect of stopband inhibition.
Description of the drawings
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those of ordinary skill in the art, without creative efforts, other are can also be obtained according to these attached drawings
Attached drawing.
Fig. 1 is a kind of structural schematic diagram of SAW filter shown according to an exemplary embodiment；
Fig. 2 is a kind of structural section figure of the SAW filter in directions A-B shown according to an exemplary embodiment；
Fig. 3 is a kind of simulation result diagram of SAW filter shown according to an exemplary embodiment.
Specific implementation mode
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with attached drawing to embodiment party of the present invention
Formula is described in further detail.
Referring to FIG. 1, it illustrates the structural schematic diagrams of SAW filter provided by one embodiment of the present invention.It should
As shown in Figure 1, the SAW filter includes piezoelectric substrate 1, the interdigital transducer, the reflecting grating that are arranged on piezoelectric substrate 1
With capacitance 2.
Interdigital transducer, reflecting grating and capacitance 2 are grown on piezoelectric substrate 1.
SAW filter shown in FIG. 1 is two cascade DMS (double mode saw for accessing capacitance 2
Filter, double mode SAW filter) structure.
Capacitance 2 is characterized as：The period of capacitance is the corresponding surface acoustic wave wavelength of SAW filter centre frequency
0.5 times to 1.2 times.
First interdigital transducer 3 and the second interdigital transducer 4 are connected by the first busbar 5.
Third interdigital transducer 6 and the 4th interdigital transducer 7 are connected by the second busbar 8.
5th interdigital transducer 9 is arranged between the first interdigital transducer 3 and third interdigital transducer 6, and the 6th interdigital changes
Energy device 10 is arranged between the second interdigital transducer 4 and the 4th interdigital transducer 7.
The both ends of capacitance 2 are electrode 11, and capacitance is connect by electrode 11 with the first busbar 5 and the second busbar 8.
First interdigital transducer 3 mutually accesses capacitance 2, i.e. the first interdigital transducer 3 with leaning now to one side, then to the other for the second interdigital transducer 4
180 degree is differed with the phase of the second interdigital transducer 4, it can be understood as is connect with capacitance 2 on the first interdigital transducer 3 interdigital
The polarity for the interdigital electrode being connect with capacitance 2 in the polarity of electrode and the second interdigital transducer 4 is in mirror image, in electrically phase phase
Poor 180 degree.
Third interdigital transducer 6 mutually accesses capacitance 2, i.e. third interdigital transducer 6 with leaning now to one side, then to the other for the 4th interdigital transducer 7
180 degree is differed with the phase of the 4th interdigital transducer 7, it can be understood as is connect with capacitance 2 on third interdigital transducer 6 interdigital
The polarity for the interdigital electrode being connect with capacitance 2 in the polarity of electrode and the 4th interdigital transducer 7 is in mirror image, in electrically phase phase
Poor 180 degree.
Reflecting grating 12,9 He of the 5th interdigital transducer are provided between first interdigital transducer 3 and the 5th interdigital transducer 9
It is provided with reflecting grating 12 between third interdigital transducer 6, is provided between the second interdigital transducer 4 and the 6th interdigital transducer 10
Reflecting grating 12 is provided with reflecting grating 12 between the 6th interdigital transducer 10 and the 4th interdigital transducer 7.
Optionally, the quantity of reflecting grating is that pre- first pass through optimizes calculating determination.
In conclusion it is provided in an embodiment of the present invention in SAW filter, including piezoelectric substrate, setting are in piezoelectricity base
Interdigital transducer, reflecting grating and the capacitance of on piece, two groups of paraphase in three groups of interdigital transducers access capacitance, interdigital transducer it
Between be provided with reflecting grating；Solve the problems, such as that existing SAW filter is difficult to meet narrow bandwidth high rectangle degree simultaneously；It reaches
Having arrived reduces the insertion loss of SAW filter, reduces the chip size of SAW filter, improves surface acoustic wave filter
The rectangular degree of wave device, reduces the bandwidth of SAW filter, while improving the effect of stopband inhibition.
By the way that reflecting grating is added between interdigital transducer, can enable the bandwidth of SAW filter reach 0.5% to
4%, it is narrower compared to 2% to 4% bandwidth of conventional SAW filter, while realizing and omitting ground lead or ground connection weldering
Ball enables compacter structure, volume reduction, effect that is cost-effective, facilitating production.
By by interdigital transducer paraphase and accessing capacitance, enables surface acoustic wave signal differ 180 degree with electrical signal phase, make
Capacitance plays a role matching impedance, and squareness factor and high-end stopband is enabled to inhibit more preferable.
It should be noted that " first, second, third, fourth, the five, the 6th " in the embodiment of the present invention are only used for referring to
The interdigital transducer for showing different location does not indicate that the sequencing between interdigital transducer, and the structure of each interdigital transducer
It is identical.
In the alternative embodiment based on embodiment illustrated in fig. 1, the both ends of the first interdigital transducer 3, the second interdigital transducing
The both ends of device 4, the both ends of third interdigital transducer 6, the 4th interdigital transducer both ends 7 be provided with reflecting grating 12；That is in Fig. 1
The top of one interdigital transducer 3 is also equipped with reflecting grating 12, and the top of the second interdigital transducer 4 is also provided with reflecting grating 12, third
The lower section of interdigital transducer 7 is also equipped with reflecting grating 12, and reflecting grating 12 is also equipped with below the 4th interdigital transducer.
Optionally, the 5th interdigital transducer 9 and the 6th interdigital transducer 10 are separately connected the input of SAW filter
Electrode and output electrode.
Such as：5th interdigital transducer 9 connects input electrode 13, and the 6th interdigital transducer 10 connects output electrode 14；Or
Person, the 5th interdigital transducer 9 connect output electrode 13, and the 6th interdigital transducer 10 connects input electrode 14.
Optionally, the first interdigital transducer 3, the second interdigital transducer 4, third interdigital transducer 6, the 4th interdigital transducer
7 are separately connected grounding electrode 15.
Optionally, the material of piezoelectric substrate is lithium tantalate, for example the material of piezoelectric substrate is 42 ° of lithium tantalate.
Since the electromechanical coupling factor of lithium tantalate is big, be conducive to the transmission of passband signal, it is ensured that surface acoustic wave filters
Device has low insertion loss in free transmission range.
Optionally, the material of piezoelectric substrate is any other piezoelectric material that can be used for SAW filter making.
Optionally, the material of electrode is aluminium or copper or gold or the metal materials such as tungsten or platinum in SAW filter.
Optionally, the film thickness of SAW filter is identical.
Fig. 2 shows the structural section figures of the SAW filter in the directions A-B in Fig. 1, it can be seen that surface acoustic wave is filtered
The film thickness of wave device is identical.
The film thickness of SAW filter can be determined according to actual design demand.
It should be noted that the number in the aperture, period, interdigital several film thickness, capacitance and reflecting grating in SAW filter
Mesh can be determined according to actual specific design requirement, to obtain different Out-of-band rejections, relative bandwidth, insertion loss and rectangle
Degree, the present invention are not construed as limiting the specific setting of above-mentioned parameter.
In one example, using a kind of high rectangle degree of the structure fabrication of SAW filter shown in the present invention
Narrow bandwidth SAW filter, the centre frequency of filter are 285MHz, the 1.19% of frequency centered on bandwidth, outside passband
1.7M inhibition can reach 40bB, and relative bandwidth reaches 1% to 5%, especially 0.5% to 2%, which imitates
True result figure is as shown in Figure 3.
It should be noted that：The embodiments of the present invention are for illustration only, can not represent the quality of embodiment.
The foregoing is merely a prefered embodiment of the invention, is not intended to limit the invention, all in the spirit and principles in the present invention
Within, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention.
Claims (6)
1. a kind of SAW filter, which is characterized in that including piezoelectric substrate, interdigital changing of being arranged on the piezoelectric substrate
It can device, reflecting grating and capacitance；
First interdigital transducer and the second interdigital transducer are connected by the first busbar；
Third interdigital transducer and the 4th interdigital transducer are connected by the second busbar；
5th interdigital transducer is arranged between first interdigital transducer and third interdigital transducer, the 6th interdigital transducer
It is arranged between second interdigital transducer and the 4th interdigital transducer；
The capacitance is connect by electrode with first busbar and second busbar；
First interdigital transducer differs 180 degree, the third interdigital transducer and institute with the phase of the second interdigital transducer
State the phase difference 180 degree of the 4th interdigital transducer；
It is provided with the reflecting grating between first interdigital transducer and the 5th interdigital transducer, the described 5th interdigital changes
The reflecting grating can be provided between device and the third interdigital transducer, second interdigital transducer and described 6th interdigital
It is provided with the reflecting grating between energy converter, is arranged between the 6th interdigital transducer and the 4th interdigital transducer
State reflecting grating.
2. SAW filter according to claim 1, which is characterized in that the both ends of first interdigital transducer,
The both ends of second interdigital transducer, the both ends of the third interdigital transducer, the 4th interdigital transducer both ends set
It is equipped with the reflecting grating.
3. SAW filter according to claim 1, which is characterized in that the 5th interdigital transducer and the 6th fork
Finger transducer is separately connected the input electrode and output electrode of the SAW filter.
4. SAW filter according to claim 1, which is characterized in that the first interdigital transducer, second interdigital are changed
Energy device, third interdigital transducer, the 4th interdigital transducer are separately connected grounding electrode.
5. SAW filter according to any one of claims 1 to 4, which is characterized in that the material of the piezoelectric substrate
For lithium tantalate.
6. SAW filter according to any one of claims 1 to 4, which is characterized in that the SAW filter
Film thickness it is identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810325614.5A CN108631746B (en) | 2018-04-12 | 2018-04-12 | Surface acoustic wave filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810325614.5A CN108631746B (en) | 2018-04-12 | 2018-04-12 | Surface acoustic wave filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108631746A true CN108631746A (en) | 2018-10-09 |
| CN108631746B CN108631746B (en) | 2021-10-29 |
Family
ID=63705166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810325614.5A Active CN108631746B (en) | 2018-04-12 | 2018-04-12 | Surface acoustic wave filter |
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| Country | Link |
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| CN (1) | CN108631746B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110429917A (en) * | 2019-08-09 | 2019-11-08 | 宜确半导体（苏州）有限公司 | SAW filter and its manufacturing method |
| CN112511124A (en) * | 2021-02-07 | 2021-03-16 | 成都频岢微电子有限公司 | Grounding structure and filter for improving out-of-band rejection of DMS type receiving filter |
| CN112532196A (en) * | 2020-11-26 | 2021-03-19 | 北京航天微电科技有限公司 | Surface acoustic wave filter, manufacturing method thereof and electronic equipment |
| CN112787623A (en) * | 2020-12-28 | 2021-05-11 | 天通瑞宏科技有限公司 | Surface acoustic wave filter |
| CN113794458A (en) * | 2021-09-16 | 2021-12-14 | 无锡市好达电子股份有限公司 | Surface acoustic wave device with composite film layer |
| CN114421923A (en) * | 2022-01-11 | 2022-04-29 | 无锡市好达电子股份有限公司 | High-performance surface acoustic wave filter |
| CN116405003A (en) * | 2023-03-15 | 2023-07-07 | 北京航天微电科技有限公司 | Mirror image transducer electrode width determining method, device, equipment and filter |
| CN117081539A (en) * | 2023-10-13 | 2023-11-17 | 深圳新声半导体有限公司 | Surface acoustic wave resonator and MEMS device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1314746A (en) * | 2000-03-17 | 2001-09-26 | 富士通媒体器件株式会社 | Surface sound wave device |
| CN1578133A (en) * | 2003-07-02 | 2005-02-09 | 京瓷株式会社 | Surface acoustic wave device and communication apparatus using the same |
| CN1744433A (en) * | 2004-08-31 | 2006-03-08 | 富士通媒体部品株式会社 | Surface acoustic wave device |
-
2018
- 2018-04-12 CN CN201810325614.5A patent/CN108631746B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1314746A (en) * | 2000-03-17 | 2001-09-26 | 富士通媒体器件株式会社 | Surface sound wave device |
| CN1578133A (en) * | 2003-07-02 | 2005-02-09 | 京瓷株式会社 | Surface acoustic wave device and communication apparatus using the same |
| CN1744433A (en) * | 2004-08-31 | 2006-03-08 | 富士通媒体部品株式会社 | Surface acoustic wave device |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110429917A (en) * | 2019-08-09 | 2019-11-08 | 宜确半导体（苏州）有限公司 | SAW filter and its manufacturing method |
| CN112532196A (en) * | 2020-11-26 | 2021-03-19 | 北京航天微电科技有限公司 | Surface acoustic wave filter, manufacturing method thereof and electronic equipment |
| CN112532196B (en) * | 2020-11-26 | 2024-05-07 | 北京航天微电科技有限公司 | Surface acoustic wave filter, manufacturing method thereof and electronic equipment |
| CN112787623A (en) * | 2020-12-28 | 2021-05-11 | 天通瑞宏科技有限公司 | Surface acoustic wave filter |
| CN112787623B (en) * | 2020-12-28 | 2022-02-22 | 天通瑞宏科技有限公司 | Surface acoustic wave filter |
| CN112511124A (en) * | 2021-02-07 | 2021-03-16 | 成都频岢微电子有限公司 | Grounding structure and filter for improving out-of-band rejection of DMS type receiving filter |
| CN113794458B (en) * | 2021-09-16 | 2023-09-29 | 无锡市好达电子股份有限公司 | Surface acoustic wave device with composite film layer |
| CN113794458A (en) * | 2021-09-16 | 2021-12-14 | 无锡市好达电子股份有限公司 | Surface acoustic wave device with composite film layer |
| CN114421923A (en) * | 2022-01-11 | 2022-04-29 | 无锡市好达电子股份有限公司 | High-performance surface acoustic wave filter |
| CN116405003B (en) * | 2023-03-15 | 2023-12-26 | 北京航天微电科技有限公司 | Mirror image transducer electrode width determining method, device, equipment and filter |
| CN116405003A (en) * | 2023-03-15 | 2023-07-07 | 北京航天微电科技有限公司 | Mirror image transducer electrode width determining method, device, equipment and filter |
| CN117081539A (en) * | 2023-10-13 | 2023-11-17 | 深圳新声半导体有限公司 | Surface acoustic wave resonator and MEMS device |
| CN117081539B (en) * | 2023-10-13 | 2024-01-30 | 深圳新声半导体有限公司 | Surface acoustic wave resonator and MEMS device |
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| Publication number | Publication date |
|---|---|
| CN108631746B (en) | 2021-10-29 |
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| CB02 | Change of applicant information |
Address after: 214124 Jiangsu province Binhu District of Wuxi City Economic Development Zone, Road No. 115 Applicant after: Wuxi Haoda Electronic Co., Ltd Address before: 214124 Jiangsu province Binhu District of Wuxi City Economic Development Zone, Road No. 115 Applicant before: Shoulder Electronics Co.,Ltd. |
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| GR01 | Patent grant | ||
| GR01 | Patent grant |