CN108631063A - A kind of Terahertz Meta Materials modulator of electrostatic drive - Google Patents
A kind of Terahertz Meta Materials modulator of electrostatic drive Download PDFInfo
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- 229910052751 metal Inorganic materials 0.000 claims abstract description 92
- 239000002184 metal Substances 0.000 claims abstract description 92
- 238000009413 insulation Methods 0.000 claims abstract description 33
- 230000008878 coupling Effects 0.000 claims description 11
- 238000010168 coupling process Methods 0.000 claims description 11
- 238000005859 coupling reaction Methods 0.000 claims description 11
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- 230000000737 periodic effect Effects 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 4
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- 238000005516 engineering process Methods 0.000 abstract description 9
- 230000008859 change Effects 0.000 abstract description 2
- 230000004044 response Effects 0.000 description 10
- 230000003595 spectral effect Effects 0.000 description 7
- 230000033228 biological regulation Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
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- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
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- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 241000216843 Ursus arctos horribilis Species 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
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- 239000005445 natural material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
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- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
- 229910001935 vanadium oxide Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0013—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
- H01Q15/002—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices being reconfigurable or tunable, e.g. using switches or diodes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/0009—Materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0013—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
- H01Q15/0026—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices having a stacked geometry or having multiple layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0086—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention discloses a kind of Terahertz Meta Materials modulators of electrostatic drive.Modulator is made of two Meta Materials being mutually parallel, the insulation film among two Meta Materials.The two Meta Materials metal grating having the same, and the metal resonance structure distribution period between metal grating is also identical.The distance between they can be adjusted using electrostatic attraction and repulsion, and then change the couple state between resonance structure, to realize target frequency Terahertz wave modulation.Although the modulator processing technology that the present invention announces is simple, still there is higher modulation amplitude and wider effective frequency range.Present invention could apply to microwave section, terahertz wave bands.
Description
Technical field
The present invention relates to a kind of terahertz wave band Meta Materials modulator driven using electrostatic force, belong to artificial super material
Material and electromagnetic wave modulation technical field.
Background technology
The artificial Meta Materials being made of sub-wavelength period structure are that the design of terahertz wave modulator proposes one entirely
New direction.A variety of Terahertz modulators based on Meta Materials are verified in fields such as communication, imagings.
According to principle difference, adjustable Meta Materials can be divided into material and adjust and reconstruct two classes of adjusting.Material is adjusted, and such as light-operated half
Conductor scheme, electronic graphene scheme, temperature control vanadium oxide scheme, temperature control superconductor scheme etc. are situated between using natural material
The adjusting of the adjustable realization Meta Materials of electric constant.Therefore its regulation performance is limited by material property.Reconstruct adjust be by
Meta Materials resonant element is processed into the fixation to intercouple and movable two parts, is realized to target frequency using the change in location of the two
Rate electromagnetism wave modulation.Due to that by engineer and can optimize resonant element, the regulating power for reconstructing mode is higher.
According to type of drive difference, reconstruct is adjusted to be divided into and be driven for Mechanical Driven, electrostatic drive, magnetic drive and air pressure
Deng.Wherein electrostatic drive mainly utilizes the electrostatic characteristic that identical charges repel each other, there is a natural attraction between the sexes, in the fixation of resonant element and two movable
Apply different electrostatic pressures respectively on point, to realize the adjustment of the two relative position, to finally realize the adjusting of Meta Materials.It is quiet
Electrically driven (operated) adjustable Meta Materials have many advantages, such as that degree of regulation is high, speed is fast.But it is the same with other schemes that reconstruct is adjusted, it is quiet
Electricity adjusts the moving part being also required to using complicated multilayer MEMS technology processing resonant element.And electrostatic regulation scheme also needs to
Wire line is designed for each resonant element, thus processing technology is more complicated.Therefore how metamaterial structure is designed, realized
On the basis of regulatory function, simplifies its processing technology, be the problem that current researcher is faced.
Invention content
In order to solve the above technical problems, the present invention provides a kind of Terahertz Meta Materials modulator of electrostatic drive, use
Electrostatic attraction and repulsion directly adjust the whole spacing for the Meta Materials that two panels intercouples, to realize target frequency THz wave
Modulation.
The present invention provides following technical solutions：A kind of Terahertz Meta Materials modulator of electrostatic drive, it is characterised in that：
Including the first Meta Materials, the second Meta Materials, first electrode, second electrode and insulation film；The insulation film is located at described the
Among one Meta Materials and second Meta Materials；First Meta Materials and second Meta Materials are by sheet form base, distribution
One-dimensional metal grating on one surface of substrate and between grating metal strip, along grating metal strip direction periodic distribution
Metal resonant element constitute；First Meta Materials and the screen periods on second Meta Materials are identical with grating orientation；
Metal grating end on first Meta Materials is connected to first electrode by conducting wire；Metal light on second Meta Materials
Grizzly bar end is connected to second electrode by conducting wire；The distribution of metal resonant element on first Meta Materials and the second Meta Materials
Cycle phase is same；At least one in first Meta Materials and second Meta Materials is using flexible material as substrate.
Further, first Meta Materials edge and insulation film bonding, but simultaneously blow-by；It is described the second to surpass
Edge of materials and insulation film bonding, but simultaneously blow-by；It needs to ensure the metal on first Meta Materials when bonding
Metal grating item in gratings strips and second Meta Materials overlaps.
Further, the thickness of the insulation film is less than by the 1/6 of modulation THz wave wavelength.
Further, the metal resonance list on the metal resonant element and second Meta Materials on first Meta Materials
Member can intercouple, and the coupling is sensitive to the spacing of first Meta Materials and second Meta Materials.
Further, the metal resonance list on the metal resonant element and second Meta Materials on first Meta Materials
Electromagnetic wave of the member by polarization direction perpendicular to grating orientation excites EMR electromagnetic resonance.
Further, first Meta Materials are close to a side surface of insulation film distribution metal grating and metal
Resonant element；Second Meta Materials are close to a side surface of insulation film distribution metal grating and metal resonance list
Member.
In use, first electrode and second electrode are connected with voltage source respectively.When the voltage pole that two electrodes are applied
When property is opposite, the first Meta Materials and the second Meta Materials attract each other, and the two reaches most close coupling state.When two electrodes are applied
Polarity of voltage it is identical when, the first Meta Materials and the second Meta Materials are located remotely from each other, and the stiffness of coupling of the two weakens.By stiffness of coupling
Difference causes modulator different to the THz wave transmitance of target frequency, to realize modulation operations.
Compared with prior art, the present invention has the following advantages：
A kind of Terahertz Meta Materials modulator of air pressure adjustment provided by the present invention, greatly simplifies processing technology, reduces
Processing cost.The spacing that two panels Meta Materials are directly changed due to the use of electrostatic attraction and repulsion realizes regulating effect, thus nothing
Need assembly and the branch as microscopic dimensions are needed for the design of each metal resonators and processed in reconstruct regulation scheme general at present
Support part part, it is only necessary to process two panels Meta Materials and then carry out macroscopical assembly, greatly simplifie processing technology, reduce and add
Work cost.
Meta Materials modulator provided by the present invention has larger position adjustable range.Regulation scheme general at present
All it is directly to adjust the relative position between two parts that metal resonators intercouple in micro-scale.Due to by metal resonance
The limitation of device size itself and processing technology, position adjustable range are generally far smaller than the size of resonator itself.And this hair
In bright, it is to realize the adjustment of relative position between two parts that resonator intercouples by adjusting the spacing of substrate, adjusts not
It is limited by resonator dimensions, thus adjustable range is larger.
Description of the drawings
Fig. 1 is the Terahertz Meta Materials modulator structure schematic diagram of electrostatic drive of the present invention；
Fig. 2 is metal resonant element schematic diagram in embodiment 1（a）For the metal resonant element on the first Meta Materials,（b）It is second
Metal resonant element on Meta Materials,（c）When being close to insulation film for two Meta Materials, the opposite position of two metal resonant elements
It sets；
Fig. 3 is spectral response curve of the modulator under same polarity voltage and bucking voltage in embodiment 1；
The modulation amplitude of modulator in Fig. 4 embodiments 1 to the THz wave of different frequency；
Fig. 5 is metal resonant element schematic diagram in embodiment 2（a）For the metal resonant element on the first Meta Materials,（b）It is second
Metal resonant element on Meta Materials,（c）When being close to insulation film for two Meta Materials, the opposite position of two metal resonant elements
It sets；
Fig. 6 is spectral response curve of the modulator under same polarity voltage and bucking voltage in embodiment 2；
The modulation amplitude of modulator in Fig. 7 embodiments 2 to the THz wave of different frequency.
Specific implementation mode
Below in conjunction with attached drawing, the specific implementation mode of the present invention is described in detail.
Embodiment 1：
A kind of Terahertz Meta Materials modulator of electrostatic drive, including the first Meta Materials（1）, the second Meta Materials（2）, first electrode
（11）, second electrode（21）And insulation film（3）.Insulation film（3）Positioned at the first Meta Materials（1）With the second Meta Materials（2）In
Between.First Meta Materials（1）By sheet form base（10）, the one-dimensional metal grating that is distributed on one surface of substrate（12）With in grating
Between metal strip, along the metal resonant element of grating metal strip direction periodic distribution（13）It constitutes.Second Meta Materials are also
By sheet form base, the one-dimensional metal grating being distributed on one surface of substrate and between grating metal strip, along grating metal
The metal resonant element of direction periodic distribution is constituted.First Meta Materials（1）With the second Meta Materials（2）On grating orientation phase
Together, grating strip width is all 20 μm, and screen periods are all 200 μm.First Meta Materials（1）On metal grating（11）End
By conducting wire（14）It is connected to first electrode（11）；Second Meta Materials（2）On metal grating end by conducting wire be connected to second electricity
Pole（21）.First Meta Materials（1）With the second Meta Materials（2）On metal resonant element distribution period all be 200 μm.Two super
It is 12.5 μm of polyimide flex film as substrate that material, which selects thickness,.
First Meta Materials（1）Edge and insulation film（3）Bonding, but simultaneously blow-by；Second Meta Materials（2）Edge and absolutely
Edge film（3）Bonding, equally also blow-by.When bonding, the relative position for using microscope to adjust between two Meta Materials is needed, with
Ensure the first Meta Materials（1）On metal grating and the second Meta Materials（2）On metal grating overlap.In order to reduce two metals
The spacing of resonant element increases coupling effect, and when assembly, two Meta Materials are distributed the one of metal gratings and metal resonant element
Face is close to insulation film.The processing of two Meta Materials only needs normal photolithographic process can be completed, and it is then whole progress to assemble, because
The processing and assembly of this this modulator are all very simple, greatly reduce the processing cost that reconstruct adjusts Meta Materials.
Insulation film（3）It is 10 μm of Kapton to select thickness.This thickness is equal to the electromagnetism that frequency is 5THz
The 1/6 of wave wavelength, therefore this modulator is suitable for the electromagnetic wave that frequency is less than 5THz.
Fig. 2（a）The metal resonant element showing on the first Meta Materials（12）.It is U-shaped opening resonant ring, ring periphery
It is long and it is wide be all 100 μm, the width of ring is 10 μm.Fig. 2（b）The metal resonant element showing on the second Meta Materials.It is in U
It adds a notch and constitutes in the bottom edge center of shape split ring.The length of ring periphery and it is wide be all 100 μm, the width of ring is 10 μm, is lacked
The width of mouth is 10 μm.Fig. 2（c）Lead to heteropolarity voltage, when two Meta Materials are close to insulation film, two metals for two electrodes
The relative position of resonant element.In each small figures of Fig. 2, the metal strip of metal resonant element or so is a part for metal grating.When
When polarization direction is perpendicular to the THz wave incidence of metal grating, two U-shaped opening rings can inspire LC resonance and dipole
Resonance.When two Meta Materials distance farther out when, mutual coupling is weaker, and two split rings respectively maintain the humorous of oneself
It shakes.When two Meta Materials are close to insulation film, mutual coupling enhances, and the spectral response after coupling is only with two
Vertical metal resonant element is different from.
In use, modulator is inserted perpendicularly into the terahertz wave beam modulated.It is opposite that two electrodes are connected to polarity
Voltage source on, two Meta Materials are close to insulation film, and the spectral response curve of modulator is as shown in figure 3 by the solid lines.By two electricity
Pole is connected on the identical voltage source of polarity, and two Meta Materials are located remotely from each other, dotted line in the spectral response curve such as Fig. 3 of modulator
It is shown.From figure 3, it can be seen that two frequency response curves are entirely different, modulator is enabled to switch between two states, so that it may with
Reach modulation effect.Fig. 4 gives modulation amplitude of this modulator to the THz wave of different frequency.As can be seen from Figure 4, this is modulated
Device has within the scope of 0-0.65 THz there are two effective frequency range, and its modulation amplitude is higher.In 0.315-0.330 THz and
In two frequency ranges of 0.407-0.437 THz, modulation amplitude is both greater than 90%.So high modulation amplitude has benefited from two Meta Materials
Effective adjusting of relative position.
Although Fig. 3 and Fig. 4 are the notional results obtained using finite element algorithm numerical computations, it is based on having confirmed
Finite element algorithm the validity in field is emulated in electromagnetic wave, above-mentioned theory result can be verified in practice.
Embodiment 2：
A kind of Terahertz Meta Materials modulator of electrostatic drive, including the first Meta Materials（1）, the second Meta Materials（2）, first electrode
（11）, second electrode（21）And insulation film（3）.Insulation film（3）Positioned at the first Meta Materials（1）With the second Meta Materials（2）In
Between.Two Meta Materials by sheet form base, the one-dimensional metal grating being distributed on one surface of substrate and grating metal strip it
Between, it is constituted along the metal resonant element of grating metal strip direction periodic distribution.Grating orientation on two Meta Materials is identical,
Grating strip width is all 10 μm, and screen periods are all 150 μm.Metal grating end on two Meta Materials is connected by conducting wire
It is connected on electrode.The distribution period of metal resonant element on two Meta Materials is all 150 μm, selects thickness for 12.5 μm
Polyimide flex film is as substrate.
Two Meta Materials edges are all bonded with insulation film, but simultaneously blow-by is to ensure that Meta Materials central area can be by
Static-electronic driving is separate and close to insulation film.When bonding, need to ensure that the metal grating on two Meta Materials overlaps.Assembly
When, two Meta Materials are distributed the one side of metal grating and metal resonant element close to insulation film.The processing of two Meta Materials
Only normal photolithographic process is needed to can be completed, and it is then whole progress to assemble, therefore the processing and assembly of this modulator are all very simple
It is single, greatly reduce the processing cost that reconstruct adjusts Meta Materials.It is 5 μm of Kapton that insulation film, which selects thickness,.
Fig. 5（a）The metal resonant element showing on the first Meta Materials.It is cube 100 μm one section long, that width is 10 μm
Body metal strip, the distance of grating is 5 μm From Left.Fig. 5（b）The metal resonant element showing on the second Meta Materials, it and
First metal resonant element is just the same, but the distance of grating is 35 μm From Left.Fig. 5（c）It is mutual for two Meta Materials
When being close to, the relative position of metal resonant element.In Fig. 5, the metal strip of metal resonant element or so is one of metal grating
Point.When THz wave incidence of the polarization direction perpendicular to metal grating, two metal strips can inspire dipole resonance.When
Two Meta Materials distance farther out when, mutual coupling is weaker, and two split rings respectively maintain the resonance of oneself.When two
When a Meta Materials are close to insulation film, mutual coupling enhances, the spectral response after coupling and two independent gold
Belong to resonant element to be different from.
When two electrodes are connected on opposite polarity voltage source, two Meta Materials are close to insulation film, the light of modulator
It is shown in solid to compose response curve such as Fig. 6.Two electrodes are connected on the identical voltage source of polarity, and two Meta Materials are located remotely from each other,
The spectral response curve of modulator is as shown in phantom in Figure 6.From fig. 6 it can be seen that two frequency response curves are entirely different,
Modulator is enabled to switch between two states, so that it may to reach modulation effect.Fig. 7 gives terahertz of this modulator to different frequency
Hereby wave modulation amplitude.As can be seen from Figure 7, this modulator has within the scope of 0-1.3THz there are two effective frequency range, and it is modulated
Amplitude is higher.In two frequency ranges of 0.734-0.778 THz and 0.881-1.026 THz, modulation amplitude is both greater than 90%.
Although Fig. 6 and Fig. 7 are the notional results obtained using finite element algorithm numerical computations, it is based on having confirmed
Finite element algorithm the validity in field is emulated in electromagnetic wave, above-mentioned theory result can be verified in practice.
In the present invention, the material of metal resonance structure can be gold, silver, copper, aluminium, nickel, zinc, molybdenum, iron, magnesium etc., the present invention couple
This is not limited.
In summary, although the Terahertz Meta Materials modulator processing technology of electrostatic drive of the invention is simple, according to
So there is higher modulation amplitude and wider effective frequency range.Present invention could apply to microwave section, terahertz wave bands.
Claims (6)
1. a kind of Terahertz Meta Materials modulator of electrostatic drive, it is characterised in that：Including the first Meta Materials, the second Meta Materials,
First electrode, second electrode and insulation film；The insulation film is located in first Meta Materials and second Meta Materials
Between；First Meta Materials and second Meta Materials are by sheet form base, the one-dimensional metal being distributed on one surface of substrate
Grating and between grating metal strip is constituted along the metal resonant element of grating metal strip direction periodic distribution；Described
One Meta Materials and the screen periods on second Meta Materials are identical with grating orientation；Metal grating on first Meta Materials
End is connected to first electrode by conducting wire；Metal grating end on second Meta Materials is connected to the second electricity by conducting wire
Pole；The distribution period of metal resonant element on first Meta Materials and the second Meta Materials is identical；First Meta Materials and
At least one in second Meta Materials is using flexible material as substrate.
2. the Terahertz Meta Materials modulator of electrostatic drive according to claim 1, which is characterized in that described the first to surpass material
Expect that edge and the insulation film are bonded, but simultaneously blow-by；Second Meta Materials edge and insulation film bonding, but
It is simultaneously blow-by；Need to ensure the metal on the metal grating item and second Meta Materials on first Meta Materials when bonding
Gratings strips overlap.
3. the Terahertz Meta Materials modulator of the electrostatic drive according to claim 1-2, which is characterized in that the insulation is thin
The thickness of film is less than by the 1/6 of modulation THz wave wavelength.
4. the Terahertz Meta Materials modulator of electrostatic drive according to claim 1, which is characterized in that described the first to surpass material
The metal resonant element on metal resonant element and second Meta Materials on material can intercouple, and the coupling is to institute
The spacing for stating the first Meta Materials and second Meta Materials is sensitive.
5. the Terahertz Meta Materials modulator of electrostatic drive according to claim 1, which is characterized in that described the first to surpass material
The metal resonant element on metal resonant element and second Meta Materials on material is by polarization direction perpendicular to grating orientation
Electromagnetic wave excites EMR electromagnetic resonance.
6. the Terahertz Meta Materials modulator of the electrostatic drive according to claim 1-3, which is characterized in that described the first to surpass
Material is close to a side surface of insulation film distribution metal grating and metal resonant element；Second Meta Materials by
The side surface distribution metal grating and metal resonant element of the nearly insulation film.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109326889A (en) * | 2018-10-19 | 2019-02-12 | 中国科学院重庆绿色智能技术研究院 | A kind of frequency-selective surfaces Electromgnetically-transparent amplitude modulator based on graphene |
| CN111710990A (en) * | 2020-07-06 | 2020-09-25 | 中国计量大学 | Dual-band terahertz polarization converter |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109326889A (en) * | 2018-10-19 | 2019-02-12 | 中国科学院重庆绿色智能技术研究院 | A kind of frequency-selective surfaces Electromgnetically-transparent amplitude modulator based on graphene |
| CN109326889B (en) * | 2018-10-19 | 2021-03-12 | 中国科学院重庆绿色智能技术研究院 | Frequency selection surface electromagnetic wave transmission amplitude modulator based on graphene |
| CN111710990A (en) * | 2020-07-06 | 2020-09-25 | 中国计量大学 | Dual-band terahertz polarization converter |
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| CN108631063B (en) | 2023-11-21 |
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