CN108631063B - Electrostatic-driven terahertz metamaterial modulator - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0013—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
- H01Q15/002—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices being reconfigurable or tunable, e.g. using switches or diodes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/0009—Materials therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0013—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
- H01Q15/0026—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices having a stacked geometry or having multiple layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0086—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials
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- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
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Abstract
The invention discloses an electrostatically driven terahertz metamaterial modulator. The modulator is composed of two metamaterials which are parallel to each other and an insulating film which is positioned between the two metamaterials. The two metamaterials have the same metal grating, and the distribution period of the metal resonant structure between the metal gratings is also the same. The distance between the electrostatic attraction and the repulsive force can be adjusted by using the electrostatic attraction and the repulsive force, so that the coupling state between the resonant structures is changed, and the modulation of the terahertz waves with the target frequency is realized. The modulator disclosed by the invention has a simple processing technology, but still has a higher modulation amplitude and a wider effective frequency band. The invention can be applied to microwave bands and terahertz bands.
Description
Technical Field
The invention relates to a terahertz wave band metamaterial modulator driven by electrostatic force, belonging to the technical field of artificial metamaterial and electromagnetic wave modulation.
Background
The artificial metamaterial formed by the sub-wavelength periodic structure provides a brand new direction for the design of the terahertz wave modulator. A variety of metamaterial-based terahertz modulators have been validated in the fields of communication, imaging, etc.
According to the principle, the adjustable metamaterial can be divided into two types, namely material adjustment and reconstruction adjustment. Material adjustment, such as a light-operated semiconductor scheme, an electric graphene scheme, a temperature-controlled vanadium oxide scheme, a temperature-controlled superconducting material scheme and the like, is realized by utilizing the adjustability of the dielectric constant of the natural material. The conditioning properties are therefore limited by the properties of the material. The reconstruction adjustment is to process the metamaterial resonance unit into a fixed part and a movable part which are mutually coupled, and the position change of the metamaterial resonance unit and the movable part is utilized to realize the modulation of the electromagnetic wave with the target frequency. The resonant unit can be designed and optimized manually, so that the adjusting capability of the reconstruction mode is high.
According to different driving modes, the reconstruction adjustment is divided into mechanical driving, electrostatic driving, magnetic driving, pneumatic driving and the like. The static driving mainly utilizes the characteristics of repulsion and opposite attraction of static electricity, and different static voltages are respectively applied to the fixed part and the movable part of the resonance unit so as to realize the adjustment of the relative positions of the fixed part and the movable part, thereby finally realizing the adjustment of the metamaterial. The electrostatic driven adjustable metamaterial has the advantages of high adjustment precision, high speed and the like. However, as with other approaches to reconstruction tuning, electrostatic tuning also requires the fabrication of the movable portion of the resonant cell using a complex multi-layer MEMS process. The electrostatic tuning scheme also requires a wire line to be designed for each resonant cell, and thus the process is more complicated. Therefore, how to design the metamaterial structure and simplify the processing technology on the basis of realizing the adjusting function is a difficult problem faced by researchers at present.
Disclosure of Invention
In order to solve the technical problems, the invention provides the electrostatic-driven terahertz metamaterial modulator, which directly adjusts the integral distance between two pieces of mutually coupled metamaterial by using electrostatic attraction and repulsion, so as to realize the modulation of terahertz waves with target frequency.
The invention provides the following technical scheme: an electrostatically driven terahertz metamaterial modulator, characterized by: comprises a first metamaterial, a second metamaterial, a first electrode, a second electrode and an insulating film; the insulating film is positioned between the first metamaterial and the second metamaterial; the first metamaterial and the second metamaterial are both formed by a sheet-shaped substrate, one-dimensional metal gratings distributed on one surface of the substrate, and metal resonance units periodically distributed among grating metal strips along the direction of the grating metal strips; the grating period and the grating direction on the first metamaterial and the second metamaterial are the same; the tail ends of the metal grating bars on the first metamaterial are connected to a first electrode through wires; the tail ends of the metal grating bars on the second metamaterial are connected to a second electrode through wires; the distribution period of the metal resonance units on the first metamaterial and the second metamaterial is the same; at least one of the first metamaterial and the second metamaterial adopts a flexible material as a substrate.
Further, the first metamaterial edge and the insulating film are bonded, but are not sealed; the second metamaterial edge is bonded with the insulating film but is not sealed; when in bonding, the metal grating strips on the first metamaterial and the metal grating strips on the second metamaterial are required to be ensured to be overlapped.
Further, the thickness of the insulating film is less than 1/6 of the wavelength of the modulated terahertz wave.
Further, the metal resonant cells on the first metamaterial and the metal resonant cells on the second metamaterial can be coupled to each other, and the coupling is sensitive to a pitch of the first metamaterial and the second metamaterial.
Further, the metal resonance unit on the first metamaterial and the metal resonance unit on the second metamaterial excite electromagnetic resonance by electromagnetic waves with polarization directions perpendicular to the grating directions.
Further, the first metamaterial is provided with a metal grating and a metal resonance unit on the surface close to one side of the insulating film; and the second metamaterial is provided with a metal grating and a metal resonance unit distributed on the surface of one side close to the insulating film.
When in use, the first electrode and the second electrode are respectively connected with a voltage source. When the polarities of the voltages applied by the two electrodes are opposite, the first metamaterial and the second metamaterial attract each other, and the first metamaterial and the second metamaterial reach the strongest coupling state. When the polarities of the voltages applied by the two electrodes are the same, the first metamaterial and the second metamaterial are far away from each other, and the coupling strength of the first metamaterial and the second metamaterial is reduced. The terahertz wave transmittance of the modulator to the target frequency is different due to the different coupling strengths, so that the modulation operation is realized.
Compared with the prior art, the invention has the following advantages:
the terahertz metamaterial modulator with the air pressure adjustment function provided by the invention has the advantages that the processing technology is greatly simplified, and the processing cost is reduced. Because the electrostatic attraction and repulsion are used for directly changing the distance between the two pieces of metamaterial to realize the adjusting effect, the micro-sized assembly and supporting components are not required to be designed and processed for each metal resonator in the conventional reconstruction adjusting scheme, and only the two pieces of metamaterial are required to be processed and then subjected to macroscopic assembly, so that the processing technology is greatly simplified, and the processing cost is reduced.
The metamaterial modulator provided by the invention has a large position adjustment range. The current common adjustment scheme is to directly adjust the relative position between the two mutually coupled parts of the metal resonator on a microscopic scale. The range of positional adjustment is generally much smaller than the size of the resonator itself, due to the limitations of the size of the metal resonator itself and the manufacturing process. In the invention, the adjustment of the relative position between the two mutually coupled parts of the resonator is realized by adjusting the distance between the substrates, and the adjustment is not limited by the size of the resonator, so the adjustment range is larger.
Drawings
FIG. 1 is a schematic diagram of a structure of an electrostatically driven terahertz metamaterial modulator according to the present invention;
FIG. 2 is a schematic diagram of a metal resonator unit in embodiment 1 (a) being a metal resonator unit on a first metamaterial, (b) being a metal resonator unit on a second metamaterial, and (c) being the relative positions of two metal resonator units when the two metamaterials are tightly adhered to an insulating film;
FIG. 3 is a graph showing the spectral response of the modulator of example 1 at both homopolar and reverse voltages;
fig. 4 modulation amplitudes of terahertz waves of different frequencies by the modulator in embodiment 1;
FIG. 5 is a schematic diagram of a metal resonator unit in embodiment 2 (a) being a metal resonator unit on a first metamaterial, (b) being a metal resonator unit on a second metamaterial, and (c) being the relative positions of two metal resonator units when the two metamaterials are tightly adhered to an insulating film;
FIG. 6 is a graph showing the spectral response of the modulator of example 2 at both homopolar and reverse voltages;
the modulator in embodiment 2 of fig. 7 modulates the amplitude of terahertz waves of different frequencies.
Detailed Description
The following describes specific embodiments of the present invention in detail with reference to the drawings.
Example 1:
an electrostatically driven terahertz metamaterial modulator comprises a first metamaterial (1), a second metamaterial (2), a first electrode (11), a second electrode (21) and an insulating film (3). The insulating film (3) is positioned between the first metamaterial (1) and the second metamaterial (2). The first metamaterial (1) is composed of a sheet-shaped substrate (10), one-dimensional metal gratings (12) distributed on one surface of the substrate, and metal resonance units (13) periodically distributed along the direction of the grating metal strips between the grating metal strips. The second metamaterial is also composed of a sheet-shaped substrate, one-dimensional metal gratings distributed on one surface of the substrate and metal resonance units periodically distributed among the grating metal strips along the direction of the grating metal strips. The grating directions of the first metamaterial (1) and the second metamaterial (2) are the same, the widths of the grating metal strips are 20 mu m, and the grating periods are 200 mu m. The tail end of the metal grating (11) on the first metamaterial (1) is connected to the first electrode (11) through a lead (14); the metal grating end on the second metamaterial (2) is connected to a second electrode (21) by a wire. The distribution period of the metal resonance units on the first metamaterial (1) and the second metamaterial (2) is 200 mu m. Polyimide flexible film with thickness of 12.5 μm is selected as the substrate for both metamaterials.
The edge of the first metamaterial (1) is bonded with the insulating film (3) but is not sealed; the edge of the second metamaterial (2) is bonded with the insulating film (3) and is also not sealed. During bonding, a microscope is required to be used for adjusting the relative position between the two metamaterials so as to ensure that the metal grating on the first metamaterials (1) and the metal grating on the second metamaterials (2) are overlapped. In order to reduce the distance between the two metal resonance units and increase the coupling effect, when the metal grating is assembled, two metamaterial-distributed metal gratings and one surface of the metal resonance units are close to the insulating film. The processing of the two metamaterials can be completed only by a conventional photoetching process, and the assembly is carried out integrally, so that the processing and the assembly of the modulator are very simple, and the processing cost of the reconstruction adjustment metamaterials is greatly reduced.
The insulating film (3) is a polyimide film having a thickness of 10. Mu.m. This thickness is equal to 1/6 of the wavelength of the electromagnetic wave at a frequency of 5THz, so the modulator is suitable for electromagnetic waves at a frequency of less than 5 THz.
Fig. 2 (a) shows a metallic resonator element (12) on a first metamaterial. The U-shaped open resonant ring has the length and width of the periphery of 100 μm and the width of 10 μm. Fig. 2 (b) shows a metallic resonator element on a second metamaterial. The U-shaped split ring is formed by adding a notch in the center of the bottom edge of the U-shaped split ring. The length and width of the ring periphery were 100 μm, the width of the ring was 10 μm, and the width of the notch was 10 μm. Fig. 2 (c) shows the relative positions of two metal resonance units when the electrodes are electrified with different polarity voltages and the two metamaterials are clung to the insulating film. In the figures of fig. 2, the metal strips around the metal resonator element are part of a metal grating. When terahertz waves with polarization directions perpendicular to the metal grating are incident, both U-shaped split rings can excite LC resonance and dipole resonance. When the two metamaterials are far apart, the coupling effect between each other is weak, and the two split rings each maintain their own resonance. When two metamaterials are closely attached to the insulating film, the coupling effect between the metamaterials is enhanced, and the spectrum response after coupling is different from that of two independent metal resonance units.
In use, the modulator is inserted vertically into the modulated terahertz beam. The two electrodes are connected to voltage sources with opposite polarities, the two metamaterials are tightly attached to the insulating film, and the spectral response curve of the modulator is shown as a solid line in fig. 3. The two electrodes are connected to a voltage source of the same polarity, the two metamaterials are far apart from each other, and the spectral response curve of the modulator is shown in dashed lines in fig. 3. As can be seen from fig. 3, the two frequency response curves are completely different, so that the modulator can be switched between two states, thereby achieving the modulation effect. Fig. 4 shows the modulation amplitude of the terahertz waves of different frequencies by this modulator. As can be seen from fig. 4, the modulator has two effective frequency bands in the range of 0-0.65 THz, and the modulation amplitude is high. The modulation amplitude is more than 90% in two frequency bands of 0.315-0.330 THz and 0.407-0.437 THz. Such high modulation amplitudes benefit from an effective adjustment of the relative position of the two metamaterials.
Although fig. 3 and fig. 4 are both theoretical results calculated numerically using a finite element algorithm, the above theoretical results can be verified in practice based on the proven effectiveness of the finite element algorithm in the field of electromagnetic wave simulation.
Example 2:
an electrostatically driven terahertz metamaterial modulator comprises a first metamaterial (1), a second metamaterial (2), a first electrode (11), a second electrode (21) and an insulating film (3). The insulating film (3) is positioned between the first metamaterial (1) and the second metamaterial (2). The two metamaterials are composed of a sheet-shaped substrate, one-dimensional metal gratings distributed on one surface of the substrate and metal resonance units periodically distributed along the direction of the grating metal strips between the grating metal strips. The grating directions on the two metamaterials are the same, the grating metal strips are 10 mu m in width, and the grating period is 150 mu m. The ends of the metal gratings on the two metamaterials are connected to the electrodes through wires. The distribution period of the metal resonance units on the two metamaterials is 150 mu m, and polyimide flexible films with the thickness of 12.5 mu m are selected as substrates.
Both metamaterial edges are bonded to the insulating film but do not seal to ensure that the metamaterial center region can be driven away from and towards the insulating film by electrostatic forces. When in bonding, the metal gratings on the two metamaterials need to be ensured to be overlapped. During assembly, one surfaces of the two metamaterial-distributed metal gratings and the metal resonance unit are close to the insulating film. The processing of the two metamaterials can be completed only by a conventional photoetching process, and the assembly is carried out integrally, so that the processing and the assembly of the modulator are very simple, and the processing cost of the reconstruction adjustment metamaterials is greatly reduced. The insulating film is polyimide film with thickness of 5 μm.
Fig. 5 (a) shows a metallic resonant cell on a first metamaterial. It is a length of 100 μm long and 10 μm wide cubic metal strip, at a distance of 5 μm from the left grating. Fig. 5 (b) shows a metallic resonator element on a second metamaterial, which is identical to the first metallic resonator element, but at a distance of 35 μm from the left grating. Fig. 5 (c) shows the relative positions of the metal resonant cells when the two metamaterials are in close contact with each other. In fig. 5, the metal strips around the metal resonator element are part of a metal grating. When terahertz waves with polarization directions perpendicular to the metal grating are incident, dipole resonance can be excited by both metal strips. When the two metamaterials are far apart, the coupling effect between each other is weak, and the two split rings each maintain their own resonance. When two metamaterials are closely attached to the insulating film, the coupling effect between the metamaterials is enhanced, and the spectrum response after coupling is different from that of two independent metal resonance units.
When the two electrodes are connected to voltage sources with opposite polarities, the two metamaterials are close to the insulating film, and the spectral response curve of the modulator is shown as a solid line in fig. 6. The two electrodes are connected to a voltage source of the same polarity, the two metamaterials are far apart from each other, and the spectral response curve of the modulator is shown in dashed lines in fig. 6. As can be seen from fig. 6, the two frequency response curves are completely different, so that the modulator can be switched between two states to achieve the modulation effect. Fig. 7 shows the modulation amplitude of the terahertz waves of different frequencies by this modulator. As can be seen from fig. 7, the modulator has two effective frequency bands in the range of 0-1.3THz, and the modulation amplitude is high. The modulation amplitude is more than 90% in two frequency bands of 0.734-0.778 THz and 0.881-1.026 THz.
Although fig. 6 and fig. 7 are both theoretical results calculated numerically using a finite element algorithm, the above theoretical results can be verified in practice based on the proven effectiveness of the finite element algorithm in the field of electromagnetic wave simulation.
In the present invention, the material of the metal resonant structure may be gold, silver, copper, aluminum, nickel, zinc, molybdenum, iron, magnesium, etc., which is not limited in the present invention.
In summary, the electrostatic-driven terahertz metamaterial modulator has simple processing technology, but still has higher modulation amplitude and wider effective frequency band. The invention can be applied to microwave bands and terahertz bands.
Claims (6)
1. An electrostatically driven terahertz metamaterial modulator, characterized by: comprises a first metamaterial, a second metamaterial, a first electrode, a second electrode and an insulating film; the insulating film is positioned between the first metamaterial and the second metamaterial; the first metamaterial and the second metamaterial are both formed by a sheet-shaped substrate, one-dimensional metal gratings distributed on one surface of the substrate, and metal resonance units periodically distributed among grating metal strips along the direction of the grating metal strips; the grating period and the grating direction on the first metamaterial and the second metamaterial are the same; the tail ends of the metal grating bars on the first metamaterial are connected to a first electrode through wires; the tail ends of the metal grating bars on the second metamaterial are connected to a second electrode through wires; the distribution period of the metal resonance units on the first metamaterial and the second metamaterial is the same; at least one of the first metamaterial and the second metamaterial adopts a flexible material as a substrate.
2. The electrostatically driven terahertz metamaterial modulator according to claim 1, wherein the first metamaterial edge and the insulating film are bonded but not sealed; the second metamaterial edge is bonded with the insulating film but is not sealed; when in bonding, the metal grating strips on the first metamaterial and the metal grating strips on the second metamaterial are required to be ensured to be overlapped.
3. The electrostatically driven terahertz metamaterial modulator according to claim 1, wherein the thickness of the insulating film is less than 1/6 of the wavelength of the modulated terahertz wave.
4. The electrostatically driven terahertz metamaterial modulator according to claim 1, wherein the metallic resonating unit on the first metamaterial and the metallic resonating unit on the second metamaterial are capable of coupling to each other, and the coupling is sensitive to a spacing of the first metamaterial and the second metamaterial.
5. The electrostatically driven terahertz metamaterial modulator according to claim 1, wherein the metal resonant unit on the first metamaterial and the metal resonant unit on the second metamaterial excite electromagnetic resonance by electromagnetic waves with polarization directions perpendicular to the grating direction.
6. The electrostatically driven terahertz metamaterial modulator according to claim 1, wherein the first metamaterial distributes a metal grating and a metal resonance unit on a side surface close to the insulating film; and the second metamaterial is provided with a metal grating and a metal resonance unit distributed on the surface of one side close to the insulating film.
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| CN107479215A (en) * | 2017-07-13 | 2017-12-15 | 华中科技大学 | A kind of Terahertz Meta Materials modulator approach and products thereof |
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