CN108614493A - A kind of condensation head control system for realizing ultravacuum state - Google Patents
A kind of condensation head control system for realizing ultravacuum state Download PDFInfo
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- CN108614493A CN108614493A CN201810604405.4A CN201810604405A CN108614493A CN 108614493 A CN108614493 A CN 108614493A CN 201810604405 A CN201810604405 A CN 201810604405A CN 108614493 A CN108614493 A CN 108614493A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
- G05B19/0423—Input/output
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/20—Pc systems
- G05B2219/24—Pc safety
- G05B2219/24215—Scada supervisory control and data acquisition
Abstract
The present invention proposes a kind of condensation head control system for realizing ultravacuum state, including：Cold head controller isolating valve control terminal connects isolating valve working end, cold head controller heating work end connects heater working end, cold head controller vacuum gauge control terminal connects vacuum gauge working end, cold head controller cleaning end connects purge valve working end, cold head controller slightly takes out control terminal connection roughing valve working end, cold head controller motor working end connects cold head motor working end, cold head controller shows that working end connection touch screen working end, cold head controller remote control terminal connect remote terminal working end.
Description
Technical field
The present invention relates to electronic circuit field more particularly to a kind of condensation head control systems for realizing ultravacuum state.
Background technology
In the prior art, realize that mainly by the way of condensation, the air in drainer is cooled down for ultravacuum state
Condensation makes gas after cooling form solid-state, is adsorbed on condensation head, but the gaseous substance of the solid state after adsorbing,
It can not be purged, this has been resulted in, and condensation head can not reuse or the ability of adsorbed gas reduces, and be unable to reach in advance
The vacuum environment of setting, this just solves corresponding technical problem there is an urgent need for those skilled in the art.
Invention content
The present invention is directed at least solve the technical problems existing in the prior art, especially innovatively proposes a kind of realize and surpass
The condensation head control system of vacuum state.
In order to realize the above-mentioned purpose of the present invention, the present invention provides a kind of condensation heads for realizing ultravacuum state to control system
System, including：Cold head controller isolating valve control terminal connects isolating valve working end, and cold head controller heating work end connects heater
Working end, cold head controller vacuum gauge control terminal connect vacuum gauge working end, and cold head controller cleaning end connects purge valve
Working end, cold head controller slightly take out control terminal connection roughing valve working end, and cold head controller motor working end connects cold head motor
Working end, cold head controller show that working end connection touch screen working end, cold head controller remote control terminal connect remote terminal
Working end；
Temperature measuring circuit signal output end connects MCU temperature signal inputs, and vacuum measurement circuit signal output end connects
MCU vacuum signal input terminals are connect, long-range isolation input circuit signal end connects MCU input signals end, long-range spacing output circuit
Signal end connects MCU output signal ends, and cold head motor signal end connects motor frequency conversion driving circuit signal output end, motor frequency conversion
Driving circuit signal input part connects MCU motor working signals end.
The condensation head control system of the realization ultravacuum state, it is preferred that the temperature measuring circuit includes：First
Temperature sensor first end is separately connected the 31st diode cathode and the 32nd resistance one end, and the 31st diode cathode is separately connected
34 resistance one end and the first voltage-stablizer power cathode end, the 32nd resistance other end connect the 31st adjustable resistance one end, and the 31st is adjustable
Resistance adjustment end connects the 33rd resistance one end, and the 33rd resistance other end connects the 34th resistance other end, and the 31st adjustable resistance is another
The first voltage-stablizer resistance terminal of end connection, the first voltage-stablizer power positive end are separately connected the 31st capacitance one end and the 30th resistance one
End, the 31st capacitance other end ground connection, the 30th resistance other end are separately connected the 31st resistance one end and the 30th capacitance one end, the 30th electricity
Hold other end ground connection, the 30th capacitance one end is also connected with the 10th inductance one end, and the 10th inductance other end connects 5V power ends, the 31st electricity
The resistance other end is separately connected the second voltage-stablizer power positive end and the 32nd capacitance one end, the 32nd capacitance other end ground connection, the first temperature
It spends sensor second end and connects the 34th capacitance one end, the 34th capacitance other end is separately connected the 35th resistance one end and the first operation is put
The first electrode input end of big device, the 35th resistance other end are separately connected the 31st diode cathode and the 33rd capacitance one end, the 33rd electricity
Hold the other end and be separately connected the 34th capacitance one end and ground connection, second temperature sensor first end is separately connected the 32nd diode cathode
With the 36th resistance one end, the 36th resistance other end is separately connected the 32nd adjustable resistance one end and the 32nd adjustable resistance adjustable side, the
The 32 adjustable resistance other ends the second voltage-stablizer resistance terminal of connection, the 32nd adjustable resistance adjustable side the 37th resistance one end of connection, the 37th
The resistance other end connects the 38th resistance one end, and the 38th resistance other end is separately connected 32 diode cathode of place and the second voltage-stablizer
Power cathode end, the 36th capacitance one end are separately connected first the second electrode input end of operational amplifier and the 39th resistance one end, the
The 39 resistance other ends are separately connected the 32nd diode cathode and the 35th capacitance one end, and the 35th capacitance other end is separately connected the 36th electricity
Holding the other end and second temperature sensor second end, first the first output end of operational amplifier connects the 310th resistance one end, the
310 resistance other ends connection first is weighed chip signal input terminal, and the first operational amplifier second output terminal connects the 312nd resistance
One end, the 312nd resistance other end are separately connected the 313rd resistance one end and the 39th capacitance one end, and the 39th capacitance other end connects respectively
The 313rd resistance other end and the 38th capacitance one end are connect, the 38th capacitance other end is separately connected the 311st resistance one end and the 310th electricity
The other end is hindered, the 311st resistance other end is separately connected the 38th capacitance one end and the 37th resistance other end, and first weighs chip signal
Output end connects MCU temperature measurement signals end.
The condensation head control system of the realization ultravacuum state, it is preferred that remotely spacing output circuit includes：Third
Voltage-stablizer input terminal connects 24V power ends, and third output end of voltage stabilizer connects the 47th resistance one end, the 47th resistance other end difference
Third voltage-stablizer correction end and the 24th diode cathode, the 24th diode cathode ground connection are connected, the 47th resistance other end is also connected with
Vacuum gauge controls relay normally open contact one end, and vacuum gauge controls relay normally open contact other end connection purge valve and controls relay
Device normally opened contact one end, purge valve control relay normally open contact other end connection roughing valve and control relay normally open contact one
End, vacuum gauge control relay coil one end and connect IC the first output ends of controller, and purge valve controls relay coil one end and connects
IC controller second output terminals are connect, roughing valve controls relay coil one end and connects IC controller third output ends, vacuum gauge control
It is another that the relay coil other end processed is separately connected the purge valve control relay coil other end, roughing valve control relay coil
End, switch control relay coil one end and 24V power supplys, switch control relay coil other end connection IC controllers the 4th are defeated
Outlet, the 5th output end of IC controllers connect the 23rd resistance one end, and the 23rd resistance other end connects the single-phase solid-state of primary heater
The 4th end of relay, primary heater single-phase solid relay third end are separately connected primary heater control relay coil one
End and secondary heater control relay coil one end, primary heater single-phase solid relay second end are separately connected switch control
Relay normally open contact one end processed and secondary heater single-phase solid relay second end, primary heater single-phase solid relay
First end connects the 22nd fuse one end, and the 22nd fuse other end connects primary heater, and the 6th output end of IC controllers connects
The 24th resistance one end is connect, the 24th resistance other end connects the 4th end of secondary heater single-phase solid relay, IC controllers the 7th
Output end connects primary heater and controls the relay coil other end, and the 8th output end of IC controllers connects secondary heater control
The relay coil other end, secondary heater single-phase solid relay first end connect the 21st fuse one end, the 21st fuse
The other end connects secondary heater.
The condensation head control system of the realization ultravacuum state, it is preferred that the vacuum measurement circuit includes：Pass through
Vacuum control signal end connects the 42nd resistance one end, and the 42nd resistance other end is separately connected the 43rd resistance one end and the 43rd capacitance one
End, the 43rd resistance one end are also connected with second and weigh chip electrode input end, and second weighs chip operation signal end connection MCU vacuum
Measuring signal end.
The condensation head control system of the realization ultravacuum state, it is preferred that long-range isolating interface power end connection the
Four output end of voltage stabilizer, the 4th voltage-stablizer input terminal connect DC isolation circuit output end, and long-range isolating interface output end also connects
The first optocoupler input is connect, the first optocoupler output connects the long-range isolation signals input terminals of MCU.
The condensation head control system of the realization ultravacuum state, it is preferred that the electric power management circuit includes：Wire jumper
One end is separately connected the 01st diode cathode and the 01st one-way SCR anode, and the 01st diode cathode is separately connected the 01st resistance
One end and the 03rd capacitance one end, the 01st resistance other end are separately connected the 02nd diode cathode and the second optocoupler input, and the 02nd
Diode cathode connect the 01st one-way SCR output end, the 01st one-way SCR cathode be separately connected the second optocoupler Enable Pin and
01st zener diode anode, the 01st zener diode cathode are separately connected the 02nd diode cathode and the 04th capacitance one end, the
The 04 capacitance other end is separately connected the 01st zener diode anode and the 03rd resistance one end, and the 03rd resistance other end is separately connected
Two optocoupler cathode output ends and the 02nd zener diode cathode, the 02nd zener diode anode are separately connected rectifier bridge negative power supply
End and the 03rd capacitance other end, cathode rectifier power end tie jumper one end, the 03rd zener diode anode are separately connected the
02 zener diode anode and the 06th resistance one end, the 06th resistance other end are separately connected the 03rd zener diode output end and
05 resistance one end, the 05th resistance other end are separately connected the 04th resistance one end, and the 04th resistance other end is separately connected the 03rd resistance
One end and the wire jumper other end, the wire jumper other end are also respectively connected with the 07th resistance one end and the 09th resistance one end, and the 07th resistance is another
End is separately connected the 04th zener diode cathode, the 08th resistance one end and overvoltage protector power end, overvoltage protector output end
Be separately connected the 012nd resistance one end and the 01st triode grid, the 012nd resistance other end be separately connected the 011st resistance one end and
05th zener diode anode, the 05th zener diode cathode is separately connected the 04th zener diode anode and the 03rd diode is negative
Pole, the drain electrode of the 01st triode are separately connected bus negative end and the 012nd resistance other end, the 01st triode source drain the 013rd
Resistance one end, the 013rd resistance other end are separately connected the 014th resistance one end and the 09th resistance one end, the leakage of the 09th resistance other end
The 010th resistance one end of pole, the 010th resistance other end are separately connected the 03rd diode cathode and overvoltage protector electrode input end,
The 014th resistance other end is separately connected bus positive end and the 06th capacitance one end, and the 06th capacitance other end connects bus negative end,
Power control relay coil one end is separately connected the 04th diode cathode and the 02nd triode source electrode, the 04th diode cathode point
Not Lian Jie 24V power ends and the power control relay coil other end, the 02nd triode drain electrode be separately connected the 021st resistance one end
With the 020th capacitance one end, the 021st resistance other end is separately connected the 020th capacitance other end and the 02nd triode grid, and the 021st
The resistance other end is also respectively connected with the 020th resistance one end and the 010th diode cathode, and the 010th diode cathode is separately connected
The 020 resistance other end and the first voltage stabilizing controlling transistor output end, the first voltage stabilizing controlling transistor power end connect the second voltage stabilizing
Controlling transistor power end, the second voltage stabilizing controlling transistor output end are separately connected the 09th capacitance one end and the 022nd resistance one end,
The 022nd resistance other end is separately connected the 03rd transistor collector and the 04th transistor base, the 04th transistor collector difference
The 011st zener diode anode and fan, the 03rd emitter ground connection are connected, the 03rd transistor base connects the 23rd resistance
One end, the 23rd resistance other end connect MCU fan control signals end, and rectifier bridge AC signal end connects power supply end.
The condensation head control system of the realization ultravacuum state, it is preferred that the motor frequency conversion driving circuit includes：
The pwm pulse signal control terminal of MCU is separately connected the first digital isolator pulse signal input terminal and the second digital isolator arteries and veins
Signal input part is rushed, first the first output end of digital isolator is separately connected first motor driver input end and the 11st resistance one
End, the 11st resistance other end are separately connected the 15th resistance one end and the drain electrode of the 12nd triode, and the 15th resistance other end is separately connected
12nd triode grid and first motor driver low level output end, first motor driver high level output end are separately connected
14th resistance one end and the 11st triode grid, the 11st triode source electrode connect the 13rd triode source electrode, the 14th resistance other end
It is separately connected first motor driver Enable Pin and first motor working end, first motor drive power supply end connects the 11st voltage stabilizing
Diode cathode, the 11st zener diode cathode connect the 13rd capacitance one end, and the 13rd capacitance other end is separately connected the 14th resistance
The other end and the 12nd triode source electrode；
First digital isolator second output terminal is separately connected the second motor driver input terminal and the 12nd resistance one end, the
The 12 resistance other ends are separately connected the 17th resistance one end and the drain electrode of the 14th triode, and the 17th resistance other end is separately connected the 14th 3
Pole pipe grid and the second motor driver low level output end, the second motor driver high level output end are separately connected the 16th electricity
One end and the 13rd triode grid are hindered, the 13rd triode source electrode connects the 15th triode source electrode, and the 16th resistance other end connects respectively
The second motor driver Enable Pin and the second motor working end are connect, the second motor driver power end connects the 12nd zener diode
Anode, the 12nd zener diode cathode connect the 14th capacitance one end, and the 14th capacitance other end is separately connected the 16th resistance other end
With the 14th triode source electrode；
First digital isolator third output end is separately connected third motor driver input terminal and the 13rd resistance one end, the
The 13 resistance other ends are separately connected the 19th resistance one end and the drain electrode of the 16th triode, and the 19th resistance other end is separately connected the 16th 3
Pole pipe grid and third motor driver low level output end, third motor driver high level output end are separately connected the 18th electricity
One end and the 15th triode grid are hindered, the 15th triode source electrode is also connected with bus signals positive terminal, the 18th resistance other end difference
Third motor driver Enable Pin and third motor working end are connected, third motor driver power end connects two pole of the 13rd voltage stabilizing
Pipe anode, the 13rd zener diode cathode connect the 15th capacitance one end, and it is another that the 15th capacitance other end is separately connected the 18th resistance
End and the 16th triode source electrode；
19th resistance is also respectively connected with the 120th resistance one end, the 121st resistance one end and the 122nd resistance one end, the 120th electricity
It hinders the other end, the 121st resistance other end and the 122nd resistance other end and connects the 127th resistance one end, the 127th resistance other end point
Not Lian Jie the 18th capacitance one end and the 126th resistance one end, first motor driver, the second motor driver and third motor driving
Device power end is also connected with isolation circuit power output end, and isolation circuit Enable Pin connects three terminal regulator power input, three ends
Voltage-stablizer power output end connects the 128th resistance one end, and the 128th resistance other end is separately connected the 126th resistance other end and the
19 capacitance one end, the 19th capacitance other end ground connection, the 126th resistance one end are also connected with current measurer power supply negative input terminal, electricity
Flow measurer power supply positive input is separately connected the 124th resistance one end and the 17th capacitance one end, the 124th resistance other end difference
The 17th capacitance other end and the 19th capacitance other end are connected, the second digital isolator output end connects current measurer input terminal.
In conclusion by adopting the above-described technical solution, the beneficial effects of the invention are as follows：
The condensation operation of condensation head is realized by the condensation head control system, and being capable of fast heating condensation head progress
Dust removal process carries out start-up and shut-down control by corresponding relay, which improves work efficiency.
The additional aspect and advantage of the present invention will be set forth in part in the description, and will partly become from the following description
Obviously, or practice through the invention is recognized.
Description of the drawings
The above-mentioned and/or additional aspect and advantage of the present invention will become in the description from combination following accompanying drawings to embodiment
Obviously and it is readily appreciated that, wherein：
Fig. 1 is apparatus of the present invention connection diagram；
Fig. 2 is circuit connection diagram of the present invention；
Fig. 3 is temperature measuring circuit figure of the present invention；
Fig. 4 is long-range output circuit figure of the invention；
Fig. 5 is WiFi schematic diagrames of the present invention；
Fig. 6 is inventive touch screen circuit diagram；
Fig. 7 is vacuum measurement circuit diagram of the present invention；
Fig. 8 is long-range isolation input circuit diagram of the invention；
Fig. 9 is power management module circuit diagram of the present invention；
Figure 10 is motor frequency conversion driving circuit figure of the present invention.
Specific implementation mode
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.
As shown in Fig. 1 to 10, the present invention provides a kind of condensation head control systems for realizing ultravacuum state, including：It is cold
Head controller isolating valve control terminal connects isolating valve working end, and cold head controller heating work end connects heater working end, cold
Head controller vacuum gauge control terminal connects vacuum gauge working end, and cold head controller cleaning end connects purge valve working end, cold
Head controller slightly takes out control terminal connection roughing valve working end, and cold head controller motor working end connects cold head motor working end, cold
Head controller shows that working end connection touch screen working end, cold head controller remote control terminal connect remote terminal working end.
Condensation or computer heating control, and the cleaning to product are carried out by cold head controller, so as to ultravacuum
Cold head cleaning and refrigerating operation are realized under state, ensure efficiently to complete condensation work.
Temperature measuring circuit signal output end connects MCU temperature signal inputs, and vacuum measurement circuit signal output end connects
MCU vacuum signal input terminals are connect, long-range isolation input circuit signal end connects MCU input signals end, long-range spacing output circuit
Signal end connects MCU output signal ends, and cold head motor signal end connects motor frequency conversion driving circuit signal output end, motor frequency conversion
Driving circuit signal input part connects MCU motor working signals end,
As shown in figure 3, the temperature measuring circuit includes：First temperature sensor first end is separately connected the 31st diode
Cathode and the 32nd resistance one end, the 31st diode cathode are separately connected the 34th resistance one end and the first voltage-stablizer power cathode end,
The 32nd resistance other end connects the 31st adjustable resistance one end, and the 31st adjustable resistance adjustable side connects the 33rd resistance one end, the 33rd electricity
It hinders the other end and connects the 34th resistance other end, the 31st adjustable resistance other end connects the first voltage-stablizer resistance terminal, the first voltage-stablizer
Power positive end is separately connected the 31st capacitance one end and the 30th resistance one end, and the 31st capacitance other end is grounded, and the 30th resistance is another
End is separately connected the 31st resistance one end and the 30th capacitance one end, the 30th capacitance other end ground connection, and the 30th capacitance one end is also connected with the
10 inductance one end, the 10th inductance other end connect 5V power ends, and the 31st resistance other end is being separately connected the second voltage-stablizer power supply just
Extreme and the 32nd capacitance one end, the 32nd capacitance other end ground connection, the first temperature sensor second end connect the 34th capacitance one end, the
The 34 capacitance other ends are separately connected the 35th resistance one end and first the first electrode input end of operational amplifier, the 35th resistance other end
It is separately connected the 31st diode cathode and the 33rd capacitance one end, the 33rd capacitance other end is separately connected the 34th capacitance one end and connects
Ground, second temperature sensor first end are separately connected the 32nd diode cathode and the 36th resistance one end, the 36th resistance other end point
Not Lian Jie the 32nd adjustable resistance one end and the 32nd adjustable resistance adjustable side, the 32nd adjustable resistance other end connect the second voltage-stablizer electricity
End is hindered, the 32nd adjustable resistance adjustable side connects the 37th resistance one end, and the 37th resistance other end connects the 38th resistance one end, the 38th electricity
The resistance other end is separately connected 32 diode cathode of place and the second voltage-stablizer power cathode end, and the 36th capacitance one end is separately connected the
One the second electrode input end of operational amplifier and the 39th resistance one end, the 39th resistance other end are separately connected the 32nd diode cathode
With the 35th capacitance one end, the 35th capacitance other end is separately connected the 36th capacitance other end and second temperature sensor second end, the
One the first output end of operational amplifier connects the 310th resistance one end, and the 310th resistance other end the first chip signal of weighing of connection is defeated
Enter end, the first operational amplifier second output terminal connects the 312nd resistance one end, and the 312nd resistance other end is separately connected the 313rd electricity
Hindering one end and the 39th capacitance one end, the 39th capacitance other end is separately connected the 313rd resistance other end and the 38th capacitance one end, and the 38th
The capacitance other end is separately connected the 311st resistance one end and the 310th resistance other end, and the 311st resistance other end is separately connected the 38th
Capacitance one end and the 37th resistance other end, first weighs chip signal output end connection MCU temperature measurement signals end.
As shown in figure 4, long-range spacing output circuit includes：Third voltage-stablizer input terminal connects 24V power ends, third voltage stabilizing
Device output end connects the 47th resistance one end, and the 47th resistance other end is separately connected third voltage-stablizer correction end and the 24th diode is negative
Pole, the 24th diode cathode ground connection, the 47th resistance other end are also connected with vacuum gauge control relay normally open contact one end, vacuum gauge
Relay normally open contact other end connection purge valve control relay normally open contact one end is controlled, purge valve controls relay normally open
Contact other end connection roughing valve control relay normally open contact one end, vacuum gauge control relay coil one end connection IC controls
The first output end of device, purge valve control relay coil one end and connect IC controller second output terminals, and roughing valve controls relay
Coil one end connect IC controller third output ends, vacuum gauge control the relay coil other end be separately connected purge valve control after
The electric apparatus coil other end, the roughing valve control relay coil other end, switch control relay coil one end and 24V power supplys, are opened
The 4th output end of control relay coil other end connection IC controllers is closed, the 5th output end of IC controllers connects the 23rd resistance one
End, the 23rd resistance other end connect the 4th end of primary heater single-phase solid relay, primary heater single-phase solid relay
Third end is separately connected primary heater control relay coil one end and secondary heater control relay coil one end, and first
Heater single-phase solid relay second end is separately connected switch control relay normally open contact one end and secondary heater is single-phase
Solid-state relay second end, primary heater single-phase solid relay first end connect the 22nd fuse one end, the 22nd fuse
The other end connects primary heater, and the 6th output end of IC controllers connects the 24th resistance one end, the 24th resistance other end connection the
The 4th end of two heater single-phase solid relays, it is another that the 7th output end of IC controllers connects primary heater control relay coil
One end, the 8th output end of IC controllers connect secondary heater and control the relay coil other end, the single-phase solid-state of secondary heater
Relay first end connects the 21st fuse one end, and the 21st fuse other end connects secondary heater.
It will show that information stores by memory, display operation then carried out by display screen.
As shown in fig. 7, the vacuum measurement circuit includes：The 42nd resistance one end is connected by vacuum control signal end, the
The 42 resistance other ends are separately connected the 43rd resistance one end and the 43rd capacitance one end, and the 43rd resistance one end is also connected with second and weighs chip
Electrode input end, second weigh chip operation signal end connection MCU vacuum measurement signal ends.
As seen in figs. 5-6, long-range isolating interface power end connects the 4th output end of voltage stabilizer, and the 4th voltage-stablizer input terminal connects
DC isolation circuit output end is connect, long-range isolating interface output end is also connected with the first optocoupler input, and the first optocoupler output connects
Connect the long-range isolation signals input terminals of MCU.
As shown in figs. 9-10, the electric power management circuit includes：Wire jumper one end is separately connected the 01st diode cathode and
01 one-way SCR anode, the 01st diode cathode are separately connected the 01st resistance one end and the 03rd capacitance one end, and the 01st resistance is another
One end is separately connected the 02nd diode cathode and the second optocoupler input, and it is defeated that the 02nd diode cathode connects the 01st one-way SCR
Outlet, the 01st one-way SCR cathode are separately connected the second optocoupler Enable Pin and the 01st zener diode anode, the 01st voltage stabilizing two
Pole pipe cathode is separately connected the 02nd diode cathode and the 04th capacitance one end, and the 04th capacitance other end is separately connected the 01st voltage stabilizing two
Pole pipe anode and the 03rd resistance one end, the 03rd resistance other end are separately connected the second optocoupler cathode output end and two pole of the 02nd voltage stabilizing
Pipe cathode, the 02nd zener diode anode are separately connected rectifier bridge negative electricity source and the 03rd capacitance other end, cathode rectifier
Power end tie jumper one end, the 03rd zener diode anode are separately connected the 02nd zener diode anode and the 06th resistance one
End, the 06th resistance other end are separately connected the 03rd zener diode output end and the 05th resistance one end, the 05th resistance other end point
Not Lian Jie the 04th resistance one end, the 04th resistance other end is separately connected the 03rd resistance one end and the wire jumper other end, the wire jumper other end
It is also respectively connected with the 07th resistance one end and the 09th resistance one end, it is negative that the 07th resistance other end is separately connected the 04th zener diode
Pole, the 08th resistance one end and overvoltage protector power end, overvoltage protector output end are separately connected the 012nd resistance one end and the 01st
Triode grid, the 012nd resistance other end are separately connected the 011st resistance one end and the 05th zener diode anode, the 05th voltage stabilizing
Diode cathode is separately connected the 04th zener diode anode and the 03rd diode cathode, and the drain electrode of the 01st triode is separately connected total
Line negative pole end and the 012nd resistance other end, the 013rd resistance one end of the 01st triode source drain, the 013rd resistance other end difference
Connect the 014th resistance one end and the 09th resistance one end, the 09th resistance other end drains the 010th resistance one end, and the 010th resistance is another
End is separately connected the 03rd diode cathode and overvoltage protector electrode input end, and the 014th resistance other end is being separately connected bus just
Extreme and the 06th capacitance one end, the 06th capacitance other end connect bus negative end, and power control relay coil one end connects respectively
Connect the 04th diode cathode and the 02nd triode source electrode, the 04th diode cathode be separately connected 24V power ends and power supply control after
The electric apparatus coil other end, the drain electrode of the 02nd triode are separately connected the 021st resistance one end and the 020th capacitance one end, and the 021st resistance is another
One end is separately connected the 020th capacitance other end and the 02nd triode grid, and the 021st resistance other end is also respectively connected with the 020th electricity
One end and the 010th diode cathode are hindered, the 010th diode cathode is separately connected the 020th resistance other end and the first voltage stabilizing control
Transistor output, the first voltage stabilizing controlling transistor power end connect the second voltage stabilizing controlling transistor power end, the second voltage stabilizing control
Transistor output processed is separately connected the 09th capacitance one end and the 022nd resistance one end, and the 022nd resistance other end is separately connected the 03rd
Transistor collector and the 04th transistor base, the 04th transistor collector are separately connected the 011st zener diode anode and wind
Fan, the 03rd emitter ground connection, the 03rd transistor base connect the 23rd resistance one end, and the 23rd resistance other end connects MCU
Fan control signal end, rectifier bridge AC signal end connect power supply end.
As shown in Figure 10, the motor frequency conversion driving circuit includes：The pwm pulse signal control terminal of MCU is separately connected
One digital isolator pulse signal input terminal and the second digital isolator pulse signal input terminal, the first digital isolator first are defeated
Outlet is separately connected first motor driver input end and the 11st resistance one end, and the 11st resistance other end is separately connected the 15th resistance
One end and the drain electrode of the 12nd triode, the 15th resistance other end are separately connected the 12nd triode grid and the low electricity of first motor driver
Flat output end, first motor driver high level output end are separately connected the 14th resistance one end and the 11st triode grid, and the 11st
Triode source electrode connects the 13rd triode source electrode, and the 14th resistance other end is separately connected first motor driver Enable Pin and first
Motor working end, first motor drive power supply end connect the 11st zener diode anode, the connection of the 11st zener diode cathode
13rd capacitance one end, the 13rd capacitance other end are separately connected the 14th resistance other end and the 12nd triode source electrode；
First digital isolator second output terminal is separately connected the second motor driver input terminal and the 12nd resistance one end, the
The 12 resistance other ends are separately connected the 17th resistance one end and the drain electrode of the 14th triode, and the 17th resistance other end is separately connected the 14th 3
Pole pipe grid and the second motor driver low level output end, the second motor driver high level output end are separately connected the 16th electricity
One end and the 13rd triode grid are hindered, the 13rd triode source electrode connects the 15th triode source electrode, and the 16th resistance other end connects respectively
The second motor driver Enable Pin and the second motor working end are connect, the second motor driver power end connects the 12nd zener diode
Anode, the 12nd zener diode cathode connect the 14th capacitance one end, and the 14th capacitance other end is separately connected the 16th resistance other end
With the 14th triode source electrode；
First digital isolator third output end is separately connected third motor driver input terminal and the 13rd resistance one end, the
The 13 resistance other ends are separately connected the 19th resistance one end and the drain electrode of the 16th triode, and the 19th resistance other end is separately connected the 16th 3
Pole pipe grid and third motor driver low level output end, third motor driver high level output end are separately connected the 18th electricity
One end and the 15th triode grid are hindered, the 15th triode source electrode is also connected with bus signals positive terminal, the 18th resistance other end difference
Third motor driver Enable Pin and third motor working end are connected, third motor driver power end connects two pole of the 13rd voltage stabilizing
Pipe anode, the 13rd zener diode cathode connect the 15th capacitance one end, and it is another that the 15th capacitance other end is separately connected the 18th resistance
End and the 16th triode source electrode；
19th resistance is also respectively connected with the 120th resistance one end, the 121st resistance one end and the 122nd resistance one end, the 120th electricity
It hinders the other end, the 121st resistance other end and the 122nd resistance other end and connects the 127th resistance one end, the 127th resistance other end point
Not Lian Jie the 18th capacitance one end and the 126th resistance one end, first motor driver, the second motor driver and third motor driving
Device power end is also connected with isolation circuit power output end, and isolation circuit Enable Pin connects three terminal regulator power input, three ends
Voltage-stablizer power output end connects the 128th resistance one end, and the 128th resistance other end is separately connected the 126th resistance other end and the
19 capacitance one end, the 19th capacitance other end ground connection, the 126th resistance one end are also connected with current measurer power supply negative input terminal, electricity
Flow measurer power supply positive input is separately connected the 124th resistance one end and the 17th capacitance one end, the 124th resistance other end difference
The 17th capacitance other end and the 19th capacitance other end are connected, the second digital isolator output end connects current measurer input terminal.
First voltage-stablizer and the second voltage-stablizer are LM334M, and third voltage-stablizer is REF196, and the first operational amplifier is
AD8629, chip of weighing are HX711.
MCU is STM32F103C8T6；
MCR8SN is one-way SCR；
IC controllers are TD62081AF；
Single-phase solid relay is SAE4005D；
WiFi chip is ESP8266；
Memory FM24C04；
DC isolation circuit is 24S24Y1-N1；
Optocoupler is TLP521-4；
Overvoltage protector is TLC3707；
First three-channel digital isolator is ADuM1300, and the second digital isolator is ADuM1201；
Current measurer is TM7711；
Motor driver is IR2183；
Three terminal regulator is 78L05；
Isolation circuit is 05D09Y4-N2；
The purposes of the present invention is that the ultralow temperature that ultravacuum testing equipment etc. uses condenses head,
Device characteristic：
A. Width funtion inputs AC120V-450V, 47-65Hz；
B. frequency conversion output control cold head motor, (controllable motor type：Asynchronous or permanent-magnet synchronous；Power 100-400W；Two-phase
Or three-phase；Controllable frequency 5-60Hz)；
C. it may be programmed automatic running；
D. configuration ethernet interface realizes remote control；
Although an embodiment of the present invention has been shown and described, it will be understood by those skilled in the art that：Not
In the case of being detached from the principle of the present invention and objective a variety of change, modification, replacement and modification can be carried out to these embodiments, this
The range of invention is limited by claim and its equivalent.
Claims (7)
1. a kind of condensation head control system for realizing ultravacuum state, which is characterized in that including：Cold head controller isolating valve controls
End connection isolating valve working end, cold head controller heating work end connect heater working end, the control of cold head controller vacuum gauge
End connection vacuum gauge working end, cold head controller cleaning end connect purge valve working end, and cold head controller slightly takes out control terminal
Roughing valve working end is connected, cold head controller motor working end connects cold head motor working end, and cold head controller shows working end
Touch screen working end is connected, cold head controller remote control terminal connects remote terminal working end；
Temperature measuring circuit signal output end connects MCU temperature signal inputs, and vacuum measurement circuit signal output end connects MCU
Vacuum signal input terminal, long-range isolation input circuit signal end connect MCU input signals end, long-range spacing output circuit signal end
MCU output signal ends are connected, cold head motor signal end connects motor frequency conversion driving circuit signal output end, motor frequency conversion driving electricity
Road signal input part connection MCU motor working signals end.
2. the condensation head control system according to claim 1 for realizing ultravacuum state, which is characterized in that the temperature is surveyed
Measuring circuit includes：First temperature sensor first end is separately connected the 31st diode cathode and the 32nd resistance one end, the 31st 2 pole
Pipe anode is separately connected the 34th resistance one end and the first voltage-stablizer power cathode end, and the 32nd resistance other end connects the 31st adjustable electric
One end is hindered, the 31st adjustable resistance adjustable side connects the 33rd resistance one end, and the 33rd resistance other end connects the 34th resistance other end, the
The 31 adjustable resistance other ends connect the first voltage-stablizer resistance terminal, and the first voltage-stablizer power positive end is separately connected the 31st capacitance one end
With the 30th resistance one end, the 31st capacitance other end ground connection, the 30th resistance other end is separately connected the 31st resistance one end and the 30th electricity
Hold one end, the 30th capacitance other end ground connection, the 30th capacitance one end is also connected with the 10th inductance one end, and the 10th inductance other end connects 5V
Power end, the 31st resistance other end are separately connected the second voltage-stablizer power positive end and the 32nd capacitance one end, and the 32nd capacitance is another
End ground connection, the first temperature sensor second end connect the 34th capacitance one end, and the 34th capacitance other end is separately connected the 35th resistance one
End and first the first electrode input end of operational amplifier, the 35th resistance other end are separately connected the 31st diode cathode and the 33rd electricity
Hold one end, the 33rd capacitance other end is separately connected the 34th capacitance one end and ground connection, and second temperature sensor first end is separately connected
32nd diode cathode and the 36th resistance one end, the 36th resistance other end are separately connected the 32nd adjustable resistance one end and the 32nd adjustable
Resistance adjustment end, the 32nd adjustable resistance other end connect the second voltage-stablizer resistance terminal, the 32nd adjustable resistance adjustable side connection the 37th
Resistance one end, the 37th resistance other end connect the 38th resistance one end, and the 38th resistance other end is being separately connected 32 diode of place just
Pole and the second voltage-stablizer power cathode end, the 36th capacitance one end are separately connected first the second electrode input end of operational amplifier and
39 resistance one end, the 39th resistance other end are separately connected the 32nd diode cathode and the 35th capacitance one end, the 35th capacitance other end
It is separately connected the 36th capacitance other end and second temperature sensor second end, first the first output end of operational amplifier connection the
310 resistance one end, the 310th resistance other end connection first are weighed chip signal input terminal, the output of the first operational amplifier second
End the 312nd resistance one end of connection, the 312nd resistance other end are separately connected the 313rd resistance one end and the 39th capacitance one end, the 39th electricity
Hold the other end and be separately connected the 313rd resistance other end and the 38th capacitance one end, the 38th capacitance other end is separately connected the 311st resistance
One end and the 310th resistance other end, the 311st resistance other end are separately connected the 38th capacitance one end and the 37th resistance other end, the
One weighs chip signal output end connection MCU temperature measurement signals end.
3. the condensation head control system according to claim 1 for realizing ultravacuum state, which is characterized in that be remotely isolated defeated
Going out circuit includes：Third voltage-stablizer input terminal connects 24V power ends, and third output end of voltage stabilizer connects the 47th resistance one end, the
The 47 resistance other ends are separately connected third voltage-stablizer correction end and the 24th diode cathode, and the 24th diode cathode is grounded, and the 47th
The resistance other end is also connected with vacuum gauge control relay normally open contact one end, and vacuum gauge controls the relay normally open contact other end and connects
Connect purge valve control relay normally open contact one end, purge valve control the connection roughing valve control of the relay normally open contact other end after
Electric appliance normally opened contact one end, vacuum gauge control relay coil one end and connect IC the first output ends of controller, purge valve control after
Electric apparatus coil one end connects IC controller second output terminals, and it is defeated that roughing valve controls relay coil one end connection IC controller thirds
Outlet, the vacuum gauge control relay coil other end are separately connected the purge valve control relay coil other end, roughing valve control
The relay coil other end, switch control relay coil one end and 24V power supplys, switch control relay coil other end connection
The 4th output end of IC controllers, the 5th output end of IC controllers connect the 23rd resistance one end, the 23rd resistance other end connection first
The 4th end of heater single-phase solid relay, primary heater single-phase solid relay third end are separately connected primary heater control
Relay coil one end processed and secondary heater control relay coil one end, primary heater single-phase solid relay second end
It is separately connected switch control relay normally open contact one end and secondary heater single-phase solid relay second end, primary heater
Single-phase solid relay first end connects the 22nd fuse one end, and the 22nd fuse other end connects primary heater, IC controls
The 6th output end of device connects the 24th resistance one end, and the 24th resistance other end connects secondary heater single-phase solid relay the 4th
End, the 7th output end of IC controllers connect primary heater and control the relay coil other end, and the 8th output end of IC controllers connects
The secondary heater control relay coil other end is connect, secondary heater single-phase solid relay first end connects the 21st fuse
One end, the 21st fuse other end connect secondary heater.
4. the condensation head control system according to claim 1 for realizing ultravacuum state, which is characterized in that the vacuum is surveyed
Measuring circuit includes：The 42nd resistance one end is connected by vacuum control signal end, the 42nd resistance other end is separately connected the 43rd resistance
One end and the 43rd capacitance one end, the 43rd resistance one end are also connected with second and weigh chip electrode input end, and second weighs chip operation
Signal end connects MCU vacuum measurement signal ends.
5. the condensation head control system according to claim 1 for realizing ultravacuum state, which is characterized in that long-range isolation connects
Mouth power end connects the 4th output end of voltage stabilizer, and the 4th voltage-stablizer input terminal connects DC isolation circuit output end, long-range to be isolated
Interface output end is also connected with the first optocoupler input, and the first optocoupler output connects the long-range isolation signals input terminals of MCU.
6. the condensation head control system according to claim 1 for realizing ultravacuum state, which is characterized in that the power supply pipe
Managing circuit includes：Wire jumper one end is separately connected the 01st diode cathode and the 01st one-way SCR anode, the 01st diode cathode
It is separately connected the 01st resistance one end and the 03rd capacitance one end, the 01st resistance other end is separately connected the 02nd diode cathode and second
Optocoupler input, the 02nd diode cathode connect the 01st one-way SCR output end, and the 01st one-way SCR cathode is separately connected
Second optocoupler Enable Pin and the 01st zener diode anode, the 01st zener diode cathode be separately connected the 02nd diode cathode and
04th capacitance one end, the 04th capacitance other end are separately connected the 01st zener diode anode and the 03rd resistance one end, the 03rd resistance
The other end is separately connected the second optocoupler cathode output end and the 02nd zener diode cathode, and the 02nd zener diode anode connects respectively
Connect rectifier bridge negative electricity source and the 03rd capacitance other end, cathode rectifier power end tie jumper one end, two pole of the 03rd voltage stabilizing
Pipe anode is separately connected the 02nd zener diode anode and the 06th resistance one end, and the 06th resistance other end is separately connected the 03rd voltage stabilizing
Diode output and the 05th resistance one end, the 05th resistance other end are separately connected the 04th resistance one end, the 04th resistance other end
It is separately connected the 03rd resistance one end and the wire jumper other end, the wire jumper other end is also respectively connected with the 07th resistance one end and the 09th resistance one
End, the 07th resistance other end are separately connected the 04th zener diode cathode, the 08th resistance one end and overvoltage protector power end, mistake
Pressure protector output end is separately connected the 012nd resistance one end and the 01st triode grid, and the 012nd resistance other end is separately connected the
011 resistance one end and the 05th zener diode anode, the 05th zener diode cathode are separately connected the 04th zener diode anode
With the 03rd diode cathode, the drain electrode of the 01st triode is separately connected bus negative end and the 012nd resistance other end, the 01st triode
The 013rd resistance one end of source drain, the 013rd resistance other end are separately connected the 014th resistance one end and the 09th resistance one end, and the 09th
The 010th resistance one end of resistance other end drain electrode, the 010th resistance other end are separately connected the 03rd diode cathode and overvoltage protector
Electrode input end, the 014th resistance other end are separately connected bus positive end and the 06th capacitance one end, the connection of the 06th capacitance other end
Bus negative end, power control relay coil one end are separately connected the 04th diode cathode and the 02nd triode source electrode, and the 04th
Diode cathode is separately connected 24V power ends and the power control relay coil other end, and the drain electrode of the 02nd triode is separately connected
021st resistance one end and the 020th capacitance one end, the 021st resistance other end are separately connected the 020th capacitance other end and the 02nd 3 pole
Tube grid, the 021st resistance other end are also respectively connected with the 020th resistance one end and the 010th diode cathode, and the 010th diode is negative
Pole is separately connected the 020th resistance other end and the first voltage stabilizing controlling transistor output end, the first voltage stabilizing controlling transistor power end
The second voltage stabilizing controlling transistor power end is connected, the second voltage stabilizing controlling transistor output end is separately connected the 09th capacitance one end and
022 resistance one end, the 022nd resistance other end are separately connected the 03rd transistor collector and the 04th transistor base, the 04th crystal
Pipe collector is separately connected the 011st zener diode anode and fan, the 03rd emitter ground connection, the 03rd transistor base
The 23rd resistance one end is connected, the 23rd resistance other end connects MCU fan control signals end, the connection power supply of rectifier bridge AC signal end
Power end.
7. the condensation head control system according to claim 1 for realizing ultravacuum state, which is characterized in that the motor becomes
Frequency driving circuit includes：The pwm pulse signal control terminal of MCU is separately connected the first digital isolator pulse signal input terminal and
Two digital isolator pulse signal input terminals, first the first output end of digital isolator are separately connected the input of first motor driver
End and the 11st resistance one end, the 11st resistance other end are separately connected the 15th resistance one end and the drain electrode of the 12nd triode, the 15th resistance
The other end is separately connected the 12nd triode grid and first motor driver low level output end, first motor driver high level
Output end is separately connected the 14th resistance one end and the 11st triode grid, and the 11st triode source electrode connects the 13rd triode source electrode,
The 14th resistance other end is separately connected first motor driver Enable Pin and first motor working end, first motor drive power supply
End connection the 11st zener diode anode, the 11st zener diode cathode connect the 13rd capacitance one end, the 13rd capacitance other end point
It Lian Jie not the 14th resistance other end and the 12nd triode source electrode；
First digital isolator second output terminal is separately connected the second motor driver input terminal and the 12nd resistance one end, the 12nd electricity
The resistance other end is separately connected the 17th resistance one end and the drain electrode of the 14th triode, and the 17th resistance other end is separately connected the 14th triode
Grid and the second motor driver low level output end, the second motor driver high level output end are separately connected the 16th resistance one
End and the 13rd triode grid, the 13rd triode source electrode connect the 15th triode source electrode, and the 16th resistance other end is separately connected the
Two motor driver Enable Pins and the second motor working end, the second motor driver power end are connecting the 12nd zener diode just
Pole, the 12nd zener diode cathode connect the 14th capacitance one end, the 14th capacitance other end be separately connected the 16th resistance other end and
14th triode source electrode；
First digital isolator third output end is separately connected third motor driver input terminal and the 13rd resistance one end, the 13rd electricity
The resistance other end is separately connected the 19th resistance one end and the drain electrode of the 16th triode, and the 19th resistance other end is separately connected the 16th triode
Grid and third motor driver low level output end, third motor driver high level output end are separately connected the 18th resistance one
End and the 15th triode grid, the 15th triode source electrode are also connected with bus signals positive terminal, and the 18th resistance other end is separately connected
Third motor driver Enable Pin and third motor working end, third motor driver power end are connecting the 13rd zener diode just
Pole, the 13rd zener diode cathode connect the 15th capacitance one end, the 15th capacitance other end be separately connected the 18th resistance other end and
16th triode source electrode；
19th resistance is also respectively connected with the 120th resistance one end, the 121st resistance one end and the 122nd resistance one end, and the 120th resistance is another
One end, the 121st resistance other end and the 122nd resistance other end connect the 127th resistance one end, and the 127th resistance other end connects respectively
Connect the 18th capacitance one end and the 126th resistance one end, first motor driver, the second motor driver and third motor driver electricity
Source is also connected with isolation circuit power output end, and isolation circuit Enable Pin connects three terminal regulator power input, three-terminal voltage-stabilizing
Device power output end connects the 128th resistance one end, and the 128th resistance other end is separately connected the 126th resistance other end and the 19th electricity
Hold one end, the 19th capacitance other end ground connection, the 126th resistance one end is also connected with current measurer power supply negative input terminal, and electric current is surveyed
Measuring device power supply positive input is separately connected the 124th resistance one end and the 17th capacitance one end, and the 124th resistance other end is separately connected
The 17th capacitance other end and the 19th capacitance other end, the second digital isolator output end connect current measurer input terminal.
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| US5971711A (en) * | 1996-05-21 | 1999-10-26 | Ebara Corporation | Vacuum pump control system |
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| US20130227968A1 (en) * | 2012-03-01 | 2013-09-05 | Sumitomo Heavy Industries, Ltd. | Cryopump and method for regenerating the cryopump |
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| CN208752420U (en) * | 2018-06-13 | 2019-04-16 | 重庆金鹰自动化工程有限公司 | Realize the condensation head control system of ultravacuum state |
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- 2018-06-13 CN CN201810604405.4A patent/CN108614493A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5971711A (en) * | 1996-05-21 | 1999-10-26 | Ebara Corporation | Vacuum pump control system |
| JPH11324916A (en) * | 1998-05-14 | 1999-11-26 | Daikin Ind Ltd | Cryopump and method of regenerating cryopump |
| US20120304669A1 (en) * | 2011-06-03 | 2012-12-06 | Sumitomo Heavy Industries, Ltd. | Cryopump control apparatus, cryopump system, and method for evaluating vacuum retention of cryopumps |
| US20130227968A1 (en) * | 2012-03-01 | 2013-09-05 | Sumitomo Heavy Industries, Ltd. | Cryopump and method for regenerating the cryopump |
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