CN108608422A - A kind of high-precision attitude rotary system - Google Patents
A kind of high-precision attitude rotary system Download PDFInfo
- Publication number
- CN108608422A CN108608422A CN201810558624.3A CN201810558624A CN108608422A CN 108608422 A CN108608422 A CN 108608422A CN 201810558624 A CN201810558624 A CN 201810558624A CN 108608422 A CN108608422 A CN 108608422A
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- China
- Prior art keywords
- speed reducer
- harmonic speed
- servo motor
- rotary shaft
- belt wheel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 45
- 230000033001 locomotion Effects 0.000 claims description 13
- 238000007789 sealing Methods 0.000 claims description 11
- 230000001360 synchronised effect Effects 0.000 claims description 8
- 230000000386 athletic effect Effects 0.000 claims description 5
- 238000012544 monitoring process Methods 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
- B25J9/126—Rotary actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J17/00—Joints
- B25J17/02—Wrist joints
- B25J17/0258—Two-dimensional joints
Abstract
The present invention provides a kind of high-precision attitude rotary system, including firm banking, harmonic speed reducer, servo motor and main rotary shaft, harmonic speed reducer is mounted on firm banking, servo motor is mounted on the shell of harmonic speed reducer, the driving end of servo motor is provided with step belt wheel, the input terminal of harmonic speed reducer is also equipped with step belt wheel, and the step belt wheel on harmonic speed reducer is connect with the step belt wheel on servo motor by toothed belt transmission；Main rotary shaft is fixedly connected with the output end of harmonic speed reducer, and the output end of main rotary shaft and harmonic speed reducer rotates synchronously, and main rotary shaft is used for as load mounting platform.The high-precision attitude rotary system of the present invention, its is simple in structure, positioning accuracy is high, stability is good, it is at low cost, it is moved easily, which high-precision can be achieved compared with existing general relevant device and quickly rotate gesture stability and positioning, and the needs such as wafer carrying being particularly suitable in semiconductor production industry carry out the high-precision application field that quickly rotation attitude controls.
Description
Technical field
The present invention relates to high precision technical field of automation in industry more particularly to a kind of high-precision attitude rotary systems.
Background technology
With the development and progress of science and technology, robot technology is widely used in modern manufacturing industry, and majority is to pass through
Mechanical arm device carries out that material is mobile or materiel machining.But the rotational structure work(in existing robot architecture
Energy unit, control accuracy is low, and movement speed is slower.And most mechanical arm devices can not complete the object of high precision
Material movement or materiel machining, it is even more impossible to complete the continuous work of long-time, high stability.
Especially in the semicon industry high to required precision, by taking the wafer production of semicon industry as an example, partly leading
From Silicon Wafer final production at chip in body production field, to pass through procedures up to a hundred, wherein to pass through it is a series of " carve, erosion,
The processes such as mill ", each procedure are transported toward next process after the completion, are to go to complete by wafer transport robot, wafer
Transfer robot has to reach the requirements such as high control accuracy, long time continuous working high stability.
Invention content
In view of the present situation of the prior art, the purpose of the present invention is to provide a kind of high-precision attitude rotary system, structures
Simply, positioning accuracy is high, and stability is good, at low cost, which can be achieved high-precision quickly compared with existing general relevant device
Rotation gesture stability and positioning.
To achieve the above object, technical scheme is as follows：
A kind of high-precision attitude rotary system, including：
Firm banking；
Harmonic speed reducer, the harmonic speed reducer are mounted on the firm banking；
Servo motor, the servo motor are mounted on the shell of the harmonic speed reducer, the driving of the servo motor
End is provided with step belt wheel, and the input terminal of the harmonic speed reducer is also equipped with step belt wheel, the step belt wheel on the harmonic speed reducer
It is connect by toothed belt transmission with the step belt wheel on the servo motor；
Main rotary shaft, the main rotary shaft are fixedly connected with the output end of the harmonic speed reducer, the main rotary shaft with
The output end of the harmonic speed reducer rotates synchronously, and the main rotary shaft is used for as load mounting platform.
Preferably, the high-precision attitude rotary system further includes positioning driving lever and sheave locating piece, the positioning driving lever
It is arranged on the main rotary shaft, the sheave locating piece is arranged on the shell of the harmonic speed reducer, the positioning driving lever
Sheave lever body is formed with the sheave locating piece, the positioning driving lever is stirred described with the rotation of the main rotary shaft
Sheave locating piece rotates.
Further, the high-precision attitude rotary system further includes servo-driver and main controller, the servo-drive
Device is used to send out corresponding drive signal to the servo motor according to the control signal of the main controller, to realize to described
The motion state of servo motor carries out accurate control.
Further, the high-precision attitude rotary system further includes position detector, and the position detector passes through prison
The athletic posture of the sheave locating piece is surveyed to judge whether the main rotary shaft turns to predetermined limit position, if will then sentence
Disconnected result feeds back to the main controller.
Further, the position detector is photoelectric sensor.
Preferably, the shell of the harmonic speed reducer includes box-like body and flange, and the flange is arranged described box-like
On the lateral wall of ontology, the servo motor is arranged on the flange, and the flange has for running through the servo motor
Output shaft through-hole.
Preferably, the profile of the firm banking is in convex shape, and the main rotary shaft is multi-diameter shaft.
Preferably, the high-precision attitude rotary system further includes location sealing plate, and the location sealing plate is mounted on institute
It states on the shell of harmonic speed reducer, the location sealing plate is used to assist the positioning of the step belt wheel and dust-proof.
The beneficial effects of the invention are as follows：
The high-precision attitude rotary system of the present invention, simple in structure, positioning accuracy is high, and stability is good, at low cost, uses
Servo motor drives step belt wheel, synchronous belt and harmonic speed reducer, realizes the rotation of the horizontal direction of main rotary shaft, the system with
Existing general relevant device has good continuous work compared to high-precision quickly rotation gesture stability and positioning can be achieved
Property, it is particularly suitable for the needs such as wafer carrying and carries out the high-precision application field that quickly rotation attitude controls.Main controller equipped with
High-accuracy high-efficiency control software, can be accurately controlled under the driving of dedicated servo driver the rotating speed of servo motor, acceleration,
The movable informations such as position, brake are completed the high-precision of main rotary shaft athletic posture, are efficiently controlled with the help of harmonic speed reducer
System.
Description of the drawings
Fig. 1 is the decomposition diagram of the high-precision attitude rotary system of one embodiment of the invention；
Reference sign：
1 main rotary shaft；2 servo motors；3 position detectors；4 harmonic speed reducers；5 step belt wheels；
6 synchronous belts；7 location sealing plates；8 main controllers；9 servo-drivers；10 firm bankings；
11 sheave locating pieces；12 positioning driving levers.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, right with reference to the accompanying drawings and embodiments
The high-precision attitude rotary system of the present invention is further elaborated.It should be appreciated that specific embodiment described herein
It is only used for explaining the present invention, be not intended to limit the present invention.
Referring to Fig.1, the high-precision attitude rotary system of one embodiment of the invention include firm banking 10, harmonic speed reducer 4,
Servo motor 2 and main rotary shaft 1.
Harmonic speed reducer 4 is mounted on firm banking 10, and servo motor 2 is mounted on the shell of harmonic speed reducer 4, servo
The driving end of motor 2 is provided with step belt wheel 5, and the input terminal of harmonic speed reducer 4, which is also equipped with, walks belt wheel 5, on harmonic speed reducer 4
Step belt wheel 5 is sequentially connected with the step belt wheel 5 on servo motor 2 by synchronous belt 6.The output of main rotary shaft 1 and harmonic speed reducer 4
End (flexbile gear) is fixedly connected, and main rotary shaft 1 and the output end of harmonic speed reducer 4 rotate synchronously, and main rotary shaft 1 is used to be used as and load
Mounting platform.Preferably, the shell of harmonic speed reducer 4 includes box-like body and flange, the flange is arranged at described box-like
On the lateral wall of body, servo motor 2 is arranged on the flange, and the flange has for the output shaft through servo motor 2
Through-hole, so can effectively save space.
Rotary power source of the servo motor 2 as the rotary system.Harmonic speed reducer 4 is used for controlling rotating ratio, improves
To the control accuracy of turned position.It walks belt wheel 5 and matches the transmission that synchronous belt 6 realizes amount of spin, ensure the stability of rotation load.
In the present embodiment, the profile of firm banking 10 is in convex shape, and main rotary shaft 1 is multi-diameter shaft.It is convenient for assembly in this way, also
The stationarity of the movement of main rotary shaft 1 can be improved.Main rotary shaft 1 can be hollow multi-diameter shaft.On the shell of harmonic speed reducer 4
It is also equipped with location sealing plate 7, positioning that location sealing plate 7 is used to assist walking belt wheel 5 and dust-proof.Firm banking 10 is as rotation
The mounting seat of system, and can be fixed and link with other outer structural parts.
As a kind of preferable mode, the high-precision attitude rotary system further includes positioning driving lever 12 and sheave locating piece
11, positioning driving lever 12 is arranged on main rotary shaft 1, and sheave locating piece 11 is arranged on the shell of harmonic speed reducer 4, positions driving lever
12 form sheave lever body with sheave locating piece 11, and positioning driving lever 12 stirs the sheave with the rotation of main rotary shaft 1
Locating piece 11 rotates, to mark the rotation angle of main rotary shaft 1.
Preferably, high-precision attitude rotary system further includes servo-driver 9 and main controller 8, servo-driver 9 is used for root
Corresponding drive signal is sent out to servo motor 2 according to the control signal of main controller 8, to realize the movement shape to servo motor 2
State carries out accurate control.Main controller 8 is equipped with high-precision motion control software, and control servo-driver 9 sends out different control
Drive signal, to realize that the precision to 2 motion state of servo motor controls.Servo-driver 9 is to match with servo motor
Driver, the control signal by receiving main controller 8 (controller) sends out corresponding drive signal to servo motor 2.
In the present embodiment, high-precision attitude rotary system further includes position detector 3.Position detector 3 is by monitoring slot
The athletic posture of locating piece 11 is taken turns to judge whether main rotary shaft 1 turns to predetermined limit position, if then will determine that result is anti-
It feeds main controller 8.Position detector 3 is preferably photoelectric sensor.Position detector 3 is used for monitoring the movement appearance of sheave locating piece
State, so as to feed back the limit position signal of main rotary shaft 1 to main controller.Sheave locating piece 11 can be on main rotary shaft 1
Positioning driving lever 12 rotation and rotate, the rotational angle of rotary system can be monitored by coordinating with position detector 3.
The high-precision attitude rotary system of above example, global design structure are mainly made of following components：Gu
Determine pedestal 10, position detector 3, sheave locating piece 11, main rotary shaft 1, location sealing plate 7, drive control part, movement transmission
Part.Wherein drive control part includes main controller 8 and servo-driver 9；Movement transferring portion point includes servo motor 2, step band
Wheel 5, synchronous belt 6, harmonic speed reducer 4 etc.；
When rotational motion, control instruction is sent out to servo-driver 9 according to program from main controller 8, then by servo-driver 9
It sends out drive signal driving servo motor 2 to rotate, the step belt wheel 5 being fixed thereon is driven to rotate while servo motor 2 rotates,
Rotation is passed into the step belt wheel 6 being connected with the input terminal of harmonic speed reducer 4 (wave producer) by synchronous belt 6, via harmonic wave
Retarder 4 slows down, then drives main rotary shaft 1 to complete spinning movement by the output end of harmonic speed reducer 4.
Wherein, firm banking 10 is for fixing entire rotation system, and is fixed and connect with other external components, fixed
The other end of the position sealing 7 for auxiliary positioning step belt wheel, while playing dust-proof effect.Positioning driving lever 12 can follow main rotary shaft
1 rotation, while can stir sheave locating piece 11 after positioning driving lever 12 turns over certain angle and be rotated, position detector 3 is logical
The detection of 11 posture of sheave locating piece can be obtained the position limit of main rotary shaft 1 by crossing, to feed back to main controller 8, to
Realization is monitored the extreme position of main rotary shaft 1.
The high-precision attitude rotary system of the above various embodiments, simple in structure, positioning accuracy is high, and stability is good, cost
It is low, it is moved easily, drives step belt wheel, synchronous belt and harmonic speed reducer using servo motor, realize the level side of main rotary shaft
To rotation, which can be achieved high-precision quickly rotation gesture stability and fixed compared with existing general relevant device
Position is particularly suitable for the application field that the needs such as wafer carrying carry out the quick rotation attitude control of high-precision.Main controller equipped with
High-accuracy high-efficiency control software, can be accurately controlled under the driving of dedicated servo driver the rotating speed of servo motor, acceleration,
The movable informations such as position, brake are completed the high-precision of main rotary shaft athletic posture, are efficiently controlled with the help of harmonic speed reducer
System.The above high-precision attitude rotary system is as a rotational structure function in semiconductor production wafer transport robot structure
Unit, be capable of it is complicated complete action control that robot rotates horizontally, it can be achieved that long-time stable continuous work.
It should be noted that in the absence of conflict, the feature in the above various embodiments and embodiment can be mutual group
It closes.
Although the present invention and its advantage has been described in detail it should be appreciated that without departing from by the attached claims
Defined by can carry out various changes, replacement and transformation in the case of the spirit and scope of the present invention.Moreover, the model of the present invention
Enclose the specific embodiment for being not limited only to process, equipment, means, method and steps described in specification.In the art is common
Technical staff executes and corresponding reality described herein from the disclosure it will be readily understood that can be used according to the present invention
Apply the essentially identical function of example or obtain the result essentially identical with it, existing and process to be developed in future, equipment,
Means, method or step.Therefore, the attached claims are intended to include such process, equipment, hand in the range of them
Section, method or step.
Claims (8)
1. a kind of high-precision attitude rotary system, which is characterized in that including：
Firm banking (10)；
Harmonic speed reducer (4), the harmonic speed reducer (4) are mounted on the firm banking (10)；
Servo motor (2), the servo motor (2) are mounted on the shell of the harmonic speed reducer (4), the servo motor
(2) driving end is provided with step belt wheel (5), and the input terminal of the harmonic speed reducer (4) is also equipped with step belt wheel (5), described humorous
Step belt wheel (5) on wave retarder (4) is sequentially connected with the step belt wheel (5) on the servo motor (2) by synchronous belt (6)；
Main rotary shaft (1), the main rotary shaft (1) are fixedly connected with the output end of the harmonic speed reducer (4), the main rotation
Axis (1) and the output end of the harmonic speed reducer (4) rotate synchronously, and the main rotary shaft (1) is used for as load mounting platform.
2. high-precision attitude rotary system according to claim 1, which is characterized in that further include positioning driving lever (12) and slot
Locating piece (11) is taken turns, the positioning driving lever (12) is arranged on the main rotary shaft (1), and sheave locating piece (11) setting exists
On the shell of the harmonic speed reducer (4), the positioning driving lever (12) forms sheave pole jack with the sheave locating piece (11)
Structure, the positioning driving lever (12) stir sheave locating piece (11) rotation with the rotation of the main rotary shaft (1).
3. high-precision attitude rotary system according to claim 2, which is characterized in that further include servo-driver (9) and
Main controller (8), the servo-driver (9) are used to be sent out to the servo motor (2) according to the control signal of the main controller (8)
Go out corresponding drive signal, to realize that the motion state to the servo motor (2) carries out accurate control.
4. high-precision attitude rotary system according to claim 3, which is characterized in that further include position detector (3), institute
Position detector (3) is stated by monitoring the athletic posture of the sheave locating piece (11) whether to judge the main rotary shaft (1)
Predetermined limit position is turned to, if then will determine that result feeds back to the main controller (8).
5. high-precision attitude rotary system according to claim 4, which is characterized in that the position detector (3) is light
Electric transducer.
6. according to claim 1-5 any one of them high-precision attitude rotary systems, which is characterized in that the harmonic speed reducer
(4) shell includes box-like body and flange, and the flange is arranged on the lateral wall of the box-like body, the servo motor
(2) it is arranged on the flange, the flange has the through-hole for the output shaft through the servo motor (2).
7. according to claim 1-5 any one of them high-precision attitude rotary systems, which is characterized in that the firm banking
(10) profile is in convex shape, and the main rotary shaft (1) is multi-diameter shaft.
8. according to claim 1-5 any one of them high-precision attitude rotary systems, which is characterized in that further include location sealing
Plate (7), the location sealing plate (7) are mounted on the shell of the harmonic speed reducer (4), and the location sealing plate (7) is used for
Assist the positioning of the step belt wheel (5) and dust-proof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810558624.3A CN108608422A (en) | 2018-06-01 | 2018-06-01 | A kind of high-precision attitude rotary system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810558624.3A CN108608422A (en) | 2018-06-01 | 2018-06-01 | A kind of high-precision attitude rotary system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108608422A true CN108608422A (en) | 2018-10-02 |
Family
ID=63664619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810558624.3A Pending CN108608422A (en) | 2018-06-01 | 2018-06-01 | A kind of high-precision attitude rotary system |
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| Country | Link |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120103127A1 (en) * | 2010-10-27 | 2012-05-03 | Hon Hai Precision Industry Co., Ltd. | Robot arm assembly |
| CN202624434U (en) * | 2012-06-07 | 2012-12-26 | 中国东方电气集团有限公司 | Full driving magnetic attraction type multifunctional wall climbing robot with small-folding-size mechanical arm |
| CN104669261A (en) * | 2015-02-11 | 2015-06-03 | 北京航空航天大学 | Synchronous displacement adjustment type variable-stiffness joint driver and adjustment method for robot joint stiffness |
| KR101547760B1 (en) * | 2014-04-28 | 2015-08-26 | (주)대호텍 | Tilting index table |
| CN105818134A (en) * | 2016-05-12 | 2016-08-03 | 南京理工大学 | Intelligent mechanical arm with automatic button pressing function |
| CN208231801U (en) * | 2018-06-01 | 2018-12-14 | 昀智科技（北京）有限责任公司 | A kind of high-precision attitude rotary system |
-
2018
- 2018-06-01 CN CN201810558624.3A patent/CN108608422A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120103127A1 (en) * | 2010-10-27 | 2012-05-03 | Hon Hai Precision Industry Co., Ltd. | Robot arm assembly |
| CN202624434U (en) * | 2012-06-07 | 2012-12-26 | 中国东方电气集团有限公司 | Full driving magnetic attraction type multifunctional wall climbing robot with small-folding-size mechanical arm |
| KR101547760B1 (en) * | 2014-04-28 | 2015-08-26 | (주)대호텍 | Tilting index table |
| CN104669261A (en) * | 2015-02-11 | 2015-06-03 | 北京航空航天大学 | Synchronous displacement adjustment type variable-stiffness joint driver and adjustment method for robot joint stiffness |
| CN105818134A (en) * | 2016-05-12 | 2016-08-03 | 南京理工大学 | Intelligent mechanical arm with automatic button pressing function |
| CN208231801U (en) * | 2018-06-01 | 2018-12-14 | 昀智科技（北京）有限责任公司 | A kind of high-precision attitude rotary system |
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