CN108598647A - A kind of coaxial automatic impedance tuner of wide-band microwave - Google Patents

A kind of coaxial automatic impedance tuner of wide-band microwave Download PDF

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Publication number
CN108598647A
CN108598647A CN201810195121.4A CN201810195121A CN108598647A CN 108598647 A CN108598647 A CN 108598647A CN 201810195121 A CN201810195121 A CN 201810195121A CN 108598647 A CN108598647 A CN 108598647A
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CN
China
Prior art keywords
coaxial
transmission line
main transmission
detection module
impedance
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CN201810195121.4A
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Chinese (zh)
Inventor
张朝阳
胡诗婕
傅文杰
鄢扬
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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Priority to CN201810195121.4A priority Critical patent/CN108598647A/en
Publication of CN108598647A publication Critical patent/CN108598647A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00Coupling devices of the waveguide type
    • H01P5/12Coupling devices having more than two ports

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  • Plasma Technology (AREA)

Abstract

The invention discloses a kind of coaxial automatic impedance tuners of wide-band microwave, belong to Microwave Impedance tuner technical field.Including standing wave detection module, frequency detection module, impedance scheduling module, micro treatment module and driving motor;Standing wave detection module measures the amplitude and phase of the reflectance factor in coaxial main transmission line, frequency detection module measures present operating frequency, it is the length reached needed for system matches that two coaxial matching details are calculated after microprocessor computing module reading reflectance factor and working frequency, and then it is converted into the position of two short-circuit sliding blocks, the position that two sliding blocks are adjusted by driving motor, to realize the Auto-matching of impedance;The present invention overcomes the relatively narrow defects of bandwidth of operation caused by effect of dispersion in the prior art to have widened the bandwidth of operation of automatic impedance tuner significantly on the basis of ensureing power volume and allotment range.

Description

A kind of coaxial automatic impedance tuner of wide-band microwave
Technical field
The invention belongs to Microwave Impedance tuner technical fields, and in particular to a kind of coaxial automatic impedance allotment of wide-band microwave Device.
Background technology
Impedance matching in microwave transmission can make system stable, efficient, particularly important in Pulse width.In fixation Under load impedance conditions, generally use blocked impedance converter or manual impedance tuner are allocated and are matched to realize impedance.But In loading continually changing application (such as microwave plasma, microwave drying heat), loading condition can constantly generate variation, It is impossible to meet the needs of system change, only automatic impedance tuner can solve this and asks fixed or manual impedance tuner Topic.Traditional automatic impedance tuner is made of three pins in rectangular waveguide or passes through waveguide top slot by single pin Line realization is moved horizontally to control with insertion depth and be realized.The basic mode transmitted in waveguide is TE10 patterns, cutoff frequency and waveguide The length of broadside is related, if working frequency is excessively high, the higher order modes such as TE20 will have been encouraged, in order to enable impedance tuner to realize Steady operation, the operating frequency range of waveguide impedance tuner are usually the cut-off of the cutoff frequency and TE20 patterns of TE10 patterns Between frequency.This results in the impedance transformer working band of waveguide narrow.And it is different since rectangular waveguide is dispersive transmission line The guide wavelength of the microwave of frequency in the waveguide is in non-linear relation with free space wavelength, therefore impedance-tumed range also receives Greatly limitation.
Invention content
The purpose of the present invention is overcoming the defect of the above-mentioned prior art, a kind of coaxial automatic impedance allotment of wide-band microwave is provided Device.
Technical problem proposed by the invention solves in this way:
A kind of coaxial automatic impedance tuner of wide-band microwave, including standing wave detection module, frequency detection module, impedance allotment Module, micro treatment module and driving motor;
Impedance scheduling module includes coaxial main transmission line and two coaxial allotment details 6;Coaxial main transmission line includes first Main transmission line 1 and the second main transmission line 2;Second main transmission line 2 is the coaxial waveguide with turning;First main transmission line 1 and Two main transmission lines 2 are connected by ring flange;The other end of first main transmission line 1 be automatic impedance tuner input terminal, second Another terminating load of main transmission line 2;Standing wave detection module and frequency detection module are located at the top of the first main transmission line 1 Portion;First coaxial allotment detail 4 and the second main transmission line 2 are radially connected;Second coaxial allotment detail 3 and the second main transmission line 2 Corner extremities connection;There are one short-circuit sliding block 5 between the internal and external conductor of each coaxial matching detail, short-circuit sliding block 5 is good leads It body and well is contacted with the inner wire of coaxial matching detail and shell holding, it can be along the inner wire direction shifting of coaxial allotment detail It is dynamic;Each short circuit sliding block 5 connects a driving motor;The input terminal connection standing wave detection module and frequency of microprocessor computing module Rate detection module, output end connect two driving motors;
The total length of first coaxial allotment detail is more than 1/4 operation wavelength;
The total length of second coaxial allotment detail is more than 1/2 operation wavelength;
Standing wave detection module measures the amplitude and phase of the reflectance factor in coaxial main transmission line, and frequency detection module measures Two coaxial matching details are calculated after reading reflectance factor and working frequency in present operating frequency, microprocessor computing module To reach the length needed for system matches, and then it is converted into the position of two short-circuit sliding blocks, two cunnings are adjusted by driving motor The position of block, to realize the Auto-matching of impedance.
Matching detail has characteristic impedance identical with main transmission line, is and main transmission line same specification or different size Transmission line.
The beneficial effects of the invention are as follows:
Microwave automatic impedance tuner compared with the prior art, the present invention is using hollow double coaxial line detail realization Match, in the case of detail is length-adjustable, only need to adjust double coaxial line detail according to the working frequency and load impedance conditions measured The position of internal short-circuit sliding block can be realized under different operating frequency, the automatic impedance of arbitrary load is allocated;The prior art is because of color Effect is dissipated, when structure is fixed, very big variation can occur for pin equiva lent impedance under different operating frequency, and allotment range can become because of frequency Change and generate great variety, forfeiture matching feature can be reduced rapidly beyond range is allocated after operating frequency range, the present invention is allocating Under conditions of detail length and precision are enough, the automatic tune for any resistance for being much better than the prior art under broadband condition may be implemented Match, simple in structure, bandwidth of operation is greatly, allotment range is wide, robustness is good.
Description of the drawings
Fig. 1 is the three dimensional structure diagram that part is allocated in impedance of the present invention;
Fig. 2 is the three-dimensional structure perspective view that part is allocated in impedance of the present invention;
Fig. 3 is the plane longitudinal sectional drawing that part is allocated in impedance of the present invention;
Fig. 4 is the structural schematic diagram of automatic impedance tuner of the present invention.
Specific implementation mode
The present invention is further detailed with reference to the accompanying drawings and examples.
The present embodiment provides a kind of coaxial automatic impedance tuner of wide-band microwave, the three-dimensional structure of impedance allotment part is shown It is intended to, three-dimensional structure perspective view and plane longitudinal sectional drawing distinguish as shown in Figs. 1-3, the structural schematic diagram of automatic impedance tuner As shown in figure 4, including standing wave detection module, frequency detection module, impedance scheduling module, micro treatment module and driving motor;
Impedance scheduling module includes coaxial main transmission line and two coaxial allotment details 6;Coaxial main transmission line includes first Main transmission line 1 and the second main transmission line 2;Second main transmission line is the coaxial waveguide with turning;First main transmission line and second Main transmission line is connected by ring flange;The other end of first main transmission line is the input terminal of automatic impedance tuner, the second main biography Another terminating load of defeated line;Standing wave detection module and frequency detection module are located at the top of the first main transmission line;First Coaxial allotment detail 4 and the second main transmission line are radially connected;The corner extremities of second coaxial allotment detail 3 and the second main transmission line Connection;There are one short-circuit sliding block 5 between the internal and external conductor of each coaxial matching detail, short-circuit sliding block 5 be good conductor and with it is coaxial It matches the inner wire of detail and shell keeps good contact, can be moved along the inner wire direction of coaxial allotment detail;Each short circuit Sliding block connects a driving motor;The input terminal connection standing wave detection module and frequency detection module of microprocessor computing module, Output end connects two driving motors;
Standing wave detection module measures the amplitude and phase of the reflectance factor in coaxial main transmission line, and frequency detection module measures Two coaxial matching details are calculated after reading reflectance factor and working frequency in present operating frequency, microprocessor computing module To reach the length needed for system matches, and then it is converted into the position of two short-circuit sliding blocks, two cunnings are adjusted by driving motor The position of block, to realize the Auto-matching of impedance.
Choose operational frequency bandwidth 2-3GHz, 50 Ω of characteristic impedance;Coaxial main transmission line inner wire diameter 8mm is chosen, together Filled media is air inside axis, and outer conductor diameter should be 18.4mm.At this point, bandwidth of operation frequency lower end is 2GHz, it is corresponding Guide wavelength is 150mm, and the second coaxial allotment detail length selection is more than 1/2 wavelength (75), takes 100mm.Second coaxial allotment Detail selects length to be more than 1/4 guide wavelength (37.5), takes 40mm.
The position of first coaxial allotment detail conveniently can select its position also to be located at herein with unrestricted choice in order to design Coaxial main transmission line end.
The inner wire of coaxial allotment detail selects that smaller oxygen-free copper is lost with outer conductor shell and metal block.Metal is slided Block is the cylindrical metal block being sleeved on detail inner wire, inside has the trepanning of a diameter of 8mm, outer diameter to be kept with coaxial line outer diameter Unanimously, it is 18.4mm.
By adjusting the position of metal block in two coaxial allotment details, VSWR is maximum under the conditions of can reaching all phase For the allotment of 35 load.
Two coaxial allotment details are parallel relationship, it is only necessary to keep its inner wire with coaxial main transmission line vertical consistency i.e. Can, the first coaxial allotment detail needs not be at a specific direction perpendicular to coaxial main transmission line, according to tool The implementation environment of body can make further change.

Claims (4)

1. a kind of coaxial automatic impedance tuner of wide-band microwave, which is characterized in that including standing wave detection module, frequency detecting mould Block, impedance scheduling module, micro treatment module and driving motor;
Impedance scheduling module includes coaxial main transmission line and two coaxial allotment details (6);Coaxial main transmission line includes the first master Transmission line (1) and the second main transmission line (2);Second main transmission line (2) is the coaxial waveguide with turning;First main transmission line (1) it is connected by ring flange with the second main transmission line (2);The other end of first main transmission line (1) is automatic impedance tuner Input terminal, another terminating load of the second main transmission line (2);Standing wave detection module and frequency detection module are located at the first master The top of transmission line (1);First coaxial allotment detail (4) and the second main transmission line (2) are radially connected;Second coaxial allotment detail (3) it is connect with the corner extremities of the second main transmission line (2);It is sliding that there are one short circuits between the internal and external conductor of each coaxial matching detail Block (5), short-circuit sliding block (5) well contact for good conductor and with the inner wire of coaxial matching detail and shell holding, can be along coaxial Allocate the inner wire direction movement of detail;Each short circuit sliding block (5) connects a driving motor;Microprocessor computing module it is defeated Enter end connection standing wave detection module and frequency detection module, output end connects two driving motors.
2. the coaxial automatic impedance tuner of wide-band microwave according to claim 1, which is characterized in that the first coaxial allotment branch The total length for saving (4) is more than 1/4 operation wavelength.
3. the coaxial automatic impedance tuner of wide-band microwave according to claim 1, which is characterized in that the second coaxial allotment branch The total length for saving (3) is more than 1/2 operation wavelength.
4. the coaxial automatic impedance tuner of wide-band microwave according to claim 1, which is characterized in that standing wave detection module is surveyed The amplitude and phase of the reflectance factor in coaxial main transmission line are measured, frequency detection module measures present operating frequency, microprocessor It is to reach needed for system matches that two coaxial matching details are calculated after computing module reading reflectance factor and working frequency Length, and then it is converted into the position of two short-circuit sliding blocks, the position of two sliding blocks is adjusted by driving motor, to realize impedance Auto-matching.
CN201810195121.4A 2018-03-09 2018-03-09 A kind of coaxial automatic impedance tuner of wide-band microwave Pending CN108598647A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112072237A (en) * 2020-08-27 2020-12-11 电子科技大学 Ceramic/air composite medium adjustable cavity filter
CN112533348A (en) * 2020-12-15 2021-03-19 成都迈频汇能科技有限公司 High-power microwave automatic blending device
CN114246964A (en) * 2020-09-21 2022-03-29 陕西青朗万城环保科技有限公司 Multimode mixed cavity adjusting method and control system thereof
CN114824712A (en) * 2022-05-23 2022-07-29 赛莱克斯微系统科技(北京)有限公司 Impedance matching structure of micro-coaxial transmission line

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101990724A (en) * 2008-04-04 2011-03-23 都柏林城市大学 Power splitter
CN105098307A (en) * 2014-05-04 2015-11-25 曾广兴 Microwave load pull fundamental wave and harmonic wave two-in-one tuner with high reflection coefficient

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101990724A (en) * 2008-04-04 2011-03-23 都柏林城市大学 Power splitter
CN105098307A (en) * 2014-05-04 2015-11-25 曾广兴 Microwave load pull fundamental wave and harmonic wave two-in-one tuner with high reflection coefficient

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
YANG LI等: "Adaptive Impedance Matching System", 《2010 INTERNATIONAL FORUM ON INFORMATION TECHNOLOGY AND APPLICATIONS》 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112072237A (en) * 2020-08-27 2020-12-11 电子科技大学 Ceramic/air composite medium adjustable cavity filter
CN112072237B (en) * 2020-08-27 2021-12-03 电子科技大学 Ceramic/air composite medium adjustable cavity filter
CN114246964A (en) * 2020-09-21 2022-03-29 陕西青朗万城环保科技有限公司 Multimode mixed cavity adjusting method and control system thereof
CN112533348A (en) * 2020-12-15 2021-03-19 成都迈频汇能科技有限公司 High-power microwave automatic blending device
CN114824712A (en) * 2022-05-23 2022-07-29 赛莱克斯微系统科技(北京)有限公司 Impedance matching structure of micro-coaxial transmission line
CN114824712B (en) * 2022-05-23 2024-02-23 赛莱克斯微系统科技(北京)有限公司 Impedance matching structure of micro coaxial transmission line

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