CN108594603A - 基于双层气浮的悬臂式直线运动基准装置 - Google Patents

基于双层气浮的悬臂式直线运动基准装置 Download PDF

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CN108594603A
CN108594603A CN201810437738.2A CN201810437738A CN108594603A CN 108594603 A CN108594603 A CN 108594603A CN 201810437738 A CN201810437738 A CN 201810437738A CN 108594603 A CN108594603 A CN 108594603A
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吴剑威
温众普
张银
谭久彬
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Harbin Institute of Technology
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Abstract

本发明公开一种基于双层气浮的悬臂式直线运动基准装置；该装置通过双层的力封闭式气浮结构，实现了二维的气浮支承与导向，并提高了单位气浮工作面上的转动刚度，最终通过结合精密驱动与反馈控制，达到高速、高加速、高频运动的目的。本发明可建立一种体积小、悬臂长、转矩载荷大的二维运动基准装置。

Description

基于双层气浮的悬臂式直线运动基准装置
技术领域
本发明属于精密仪器及机械技术领域，特别涉及一种基于双层气浮的悬臂式直线运动基准装置。
背景技术
近年来，随着先进芯片制造业逐渐朝向功能集成化和体积微小化发展，气体静压直线运动基准以其高速度和高精度等显著优点而成为尖端光刻机中的关键部件之一；光刻机曝光系统中光阑片的高速、高加速以及高运动精度需求，对气体静压直线运动基准中的气体静压导轨提出了高承载能力、高转动刚度的要求；为避免直线运动机构遮挡光路或触碰光学器件，光阑片安装在直线运动基准的悬臂端，因此需要提高气体静压导轨的转动刚度，来抵抗光阑片高加速运动时产生的转动力矩；而光刻机曝光系统复杂而精密，其气体静压直线运动机构需要小型化，因此提高单位面积上的转动刚度，成为制约气体静压导轨在光刻机曝光系统中应用的主要技术难题。
2008年，荷兰ASML公司所研发的Twinscan XT 1950i型光刻机，可以实现38nm芯片激光刻蚀。其曝光系统中的直线运动基准采用机械导轨结构，并达到了40m/s2的加速度运动(Y.B.Patrick Kwan,Erik L.Loopstra.Nullifying Acceleration Forces in Nano-Positioning Stages for Sub-0.1mm Lithography Tool for 300mm Wafers[J].proceeding of SPIC：Optical Microlithography,2010,4346：544-557)；但随着芯片制造业的发展，传统的滑动/滚动导轨难以满足高加速度运动以及工作温度稳定性的要求。
专利CN201220540610“二维无摩擦长距离运动的多层气浮吊挂装置”提出了一种气浮导向的吊挂式运动装置，主要包括单层吊挂装置和展开实验架，单层吊挂装置包括支撑部件、气浮随动部件、检测部件和导轨系统，气浮随动部件包括纵向气浮套、两个横向气浮套、两个气浮座、伸缩气管、横向气浮轴和吊挂工装；该装置可以实现大位移长距离随动运动，并满足多层吊挂装置间的配合运动；但是该发明装置是一种随动运动装置，不能保证运动精度，且需要安装在展开实验架上使用，结构不够紧凑。
专利CN201310436356“气浮悬挂式三维展开实验装置”提出一种定位精度高响应速度快的三维运动装置，主要包括十几个气浮运动机构空间上对应分布，并借助滑轮、吊绳、配重等机构安装在支承框架内部；但是该装置虽然可以满足一定的运动精度，但是由于运动环节较多，在高频运动状态下，在输出端不能够确保快速而准确的位移响应，且结构不够紧凑。
专利CN201410839808“一种双气浮导轨式光栅刻划刀架驱动装置”提出一种小型的一维运动装置，主要包括平行安装的两组气浮导轨，并通过固连气浮滑套的方式来提高刻划刀架的运动稳定性；该装置可以实现高速、高频运动，但是相比与该装置的位移输出端，如刀架转接板及刻画刀架，其气浮导轨过于庞大，因此单位面积上的转动刚度较差，且需要刀架配重块来保持平衡。
专利CN201610130635“双面气浮运输台”和专利CN201710832517“一种基于H型气浮导轨的运动平台”分别提出了实现二维运动的气浮装置，可以在兼顾稳定性的同时实现较高的运动和定位精度，但是两种装置的使用方法均为搭载式，无法用于悬挂式或悬臂式的运动场合，且对于光刻机曝光系统来说，体积过于庞大。
上述发明的共同之处是均不能将小型的气浮导轨应用在高速、高加速、高频运动状况，然而在光刻机曝光系统中，光阑片的高速高精度运动需要通过气浮支承及导向的方式来实现，这就要求提高直线气浮导轨在单位面积上承载与的转动刚度，进而提高悬臂式直线运动基准的可靠准确性。
发明内容
本发明的目的就是针对上述已有技术存在的问题，提出一种基于双层气浮的悬臂式直线运动基准装置，通过双层的力封闭式气浮结构，进行二维的气浮支承与导向并提高单位气浮工作面上的转动刚度，最终通过结合精密驱动与反馈控制，达到高速、高加速、高频运动的目的。
上述目的通过以下的技术方案实现：
基于双层气浮的悬臂式直线运动基准装置，包括双层气浮滑套部件、垂向驱动电机、垂向导轨、从动导轨、悬挂配重部件；所述垂向导轨和垂向驱动电机安装在背板上，双层气浮滑套部件通过转接件与电机线圈固连，垂向导轨和从动导轨安装在双层气浮滑套部件内，水平向的从动导轨的悬臂端安装有悬挂配重部件；所述双层气浮滑套部件由U型底板、中板、U型盖板组成，其中U型底板与中板配合安装，并通过底层气封螺钉连接，垂向导轨安装在U型底板与中板之间并形成力封闭式气浮结构，中板与U型盖板配合安装，并通过顶层气封螺钉连接，从动导轨安装在中板与U型盖板之间并形成力封闭式气浮结构；所述双层气浮滑套部件上安装有光栅尺部件，与光栅尺配合使用的位移读数头通过俯仰调整座与位置调整座安装在垂向驱动电机上；双层气浮滑套部件上安装有水平向驱动装置，并通过传动部件与水平向从动导轨相连；所述垂向导轨的下端通过固定基座安装在背板上，垂向导轨的上端通过可调基座安装在背板上。
所述水平向驱动装置通过传动部件驱动从动导轨沿水平向运动；所述垂向驱动电机驱动电机线圈，带动双层气浮滑套部件和光栅尺部件沿垂向运动时，从动导轨和悬挂配重部件构成了悬臂式结构并随之运动。
所述双层气浮滑套部件的垂向位移，通过光栅尺部件与位移读数头配合进行测量与反馈控制。
通过俯仰调整座与位置调整座可以对位移读数头进行3个自由度的调整。
通过固定基座与可调基座可以垂向导轨进行2个自由度的调整。
本发明具有以下特点及有益效果：
1、本发明装置中的双层气浮滑套部件由U型底板、中板、U型盖板组成，可以实现二维的气浮支承与导向，可以减小摩擦及热损耗、提高运动精度、增加运动行程；双层气浮滑套部件配合垂向导轨、从动导轨、悬挂配重部件使用，可以在提高单位面积上转动刚度的同时，使该装置具有体积小、悬臂长、转矩载荷大等优势。
2、本发明装置中包含的俯仰调整座、位置调整座、可调基座可对装置进行多自由度的调整，确保装置本身在装配及校准阶段具有高精度的调节及定位功能，可以实现向更高直线基准进行溯源。
3、本发明装置在使用时，光栅尺部件及对应的位移读数头配合，可对双层气浮滑套部件的相对位移进行测量，并通过垂向驱动电机进行反馈控制，在高速高频运动状态下，实现输出端的精确定位。
本发明装置用途广泛，尤其适用于光刻机曝光系统中小型悬臂机构的高速、高频及高精度运动场合。
附图说明
图1为基于双层气浮的悬臂式直线运动基准装置示意图。
图2为双层气浮滑套部件示意图
图中：1、双层气浮滑套部件；2、背板；3、电机线圈；4、转接件；5、光栅尺部件；6、位移读数头；7、俯仰调整座；8、位置调整座；9、固定基座；10、垂向驱动电机；11、可调基座；12、垂向导轨；13、水平向驱动装置；14、传动部件；15、从动导轨；16、悬挂配重部件；17、U型底板；18、中板；19、U型盖板；20、底层气封螺钉；21、顶层气封螺钉。
具体实施方式
下面结合附图对本发明的实施例作详细说明。
参考图1，基于双层气浮的悬臂式直线运动基准装置，包括双层气浮滑套部件1、垂向驱动电机10、垂向导轨12、从动导轨15、悬挂配重部件16；所述垂向导轨12和垂向驱动电机10安装在背板2上，双层气浮滑套部件1通过转接件4与电机线圈3固连，垂向导轨10和从动导轨15安装在双层气浮滑套部件1内，从动导轨15的悬臂端安装有悬挂配重部件16。所述双层气浮滑套部件1上安装有光栅尺部件5，与光栅尺配合使用的位移读数头6通过俯仰调整座7与位置调整座8安装在垂向驱动电机10上；双层气浮滑套部件1上安装有水平向驱动装置13，并通过传动部件14与从动导轨15相连；所述垂向导轨12的下端通过固定基座9安装在背板2上，垂向导轨12的上端通过可调基座11安装在背板2上。
参考图2，所述双层气浮滑套部件1由U型底板17、中板18、U型盖板19组成，其中U型底板17与中板18配合安装，并通过4个底层气封螺钉20连接，垂向导轨12安装在U型底板17与中板18之间并形成力封闭式气浮结构，中板18与U型盖板19配合安装，并通过4个顶层气封螺钉21连接，从动导轨15安装在中板18与U型盖板19之间并形成力封闭式气浮结构。
基于双层气浮的悬臂式直线运动基准装置，以双层气浮滑套部件1为运动核心，可以实现支承导向、驱动控制、测量反馈的功能；其中支承导向功能通过双层气浮滑套部件1、垂向导轨12、从动导轨15来实现；驱动控制功能通过垂向驱动电机10、水平向驱动装置13来实现；测量反馈功能通过光栅尺部件5、位移读数头6来实现。
基于双层气浮的悬臂式直线运动基准装置在装配及校准阶段，通过俯仰调整座7与位置调整座8可以对位移读数头6进行3个自由度的调整；通过固定基座9与可调基座11可以垂向导轨12进行2个自由度的调整；以上高精度的调整和定位功能，可是使基于双层气浮的悬臂式直线运动基准装置通过向更高直线基准进行溯源，来校准装置本身。
基于双层气浮的悬臂式直线运动基准装置在使用阶段，水平向驱动装置13通过传动部件14驱动从动导轨15沿水平向运动；垂向驱动电机10驱动电机线圈3，并带动双层气浮滑套部件1和光栅尺部件5沿垂向运动时，从动导轨15和悬挂配重部件16构成了悬臂式结构并随之运动。

Claims (4)

1.基于双层气浮的悬臂式直线运动基准装置，包括双层气浮滑套部件(1)、垂向驱动电机(10)、垂向导轨(12)、从动导轨(15)、悬挂配重部件(16)；所述垂向导轨(12)和垂向驱动电机(10)安装在背板(2)上，双层气浮滑套部件(1)通过转接件(4)与电机线圈(3)固连，垂向导轨(10)和从动导轨(15)安装在双层气浮滑套部件(1)内，水平向的从动导轨(15)的悬臂端安装有悬挂配重部件(16)；其特征在于：所述双层气浮滑套部件(1)由U型底板(17)、中板(18)、U型盖板(19)组成，U型底板(17)与中板(18)配合安装，并通过底层气封螺钉(20)连接，垂向导轨(12)安装在U型底板(17)与中板(18)之间并形成力封闭式气浮结构，中板(18)与U型盖板(19)配合安装，并通过顶层气封螺钉(21)连接，从动导轨(15)安装在中板(18)与U型盖板(19)之间并形成力封闭式气浮结构；所述双层气浮滑套部件(1)上安装有光栅尺部件(5)，与光栅尺配合使用的位移读数头(6)通过俯仰调整座(7)与位置调整座(8)安装在垂向驱动电机(10)上；双层气浮滑套部件(1)上安装有水平向驱动装置(13)，并通过传动部件(14)与从动导轨(15)相连；所述垂向导轨(12)的下端通过固定基座(9)安装在背板(2)上，垂向导轨(12)的上端通过可调基座(11)安装在背板(2)上；
所述水平向驱动装置(13)通过传动部件(14)驱动从动导轨(15)沿水平向运动；所述垂向驱动电机(10)驱动电机线圈(3)，带动双层气浮滑套部件(1)和光栅尺部件(5)沿垂向运动时，从动导轨(15)和悬挂配重部件(16)构成了悬臂式结构并随之运动。
2.根据权利要求1所述的基于双层气浮的悬臂式直线运动基准装置，其特征在于：所述双层气浮滑套部件(1)的垂向位移，通过光栅尺部件(5)与位移读数头(6)配合进行测量与反馈控制。
3.根据权利要求1所述的基于双层气浮的悬臂式直线运动基准装置，其特征在于：通过俯仰调整座(7)与位置调整座(8)可以对位移读数头(6)进行3个自由度的调整。
4.根据权利要求1所述的基于双层气浮的悬臂式直线运动基准装置，其特征在于：通过固定基座(9)与可调基座(11)可以垂向导轨(12)进行2个自由度的调整。
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