CN108594502B - 液晶调谐等离激元诱导透明与法布里腔杂化模式的滤波器 - Google Patents
液晶调谐等离激元诱导透明与法布里腔杂化模式的滤波器 Download PDFInfo
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Abstract
本发明涉及一种液晶调谐等离激元诱导透明与法布里腔杂化模式的滤波器，包括两片各覆盖一层氧化铟锡ITO膜的玻璃，以及组装在两片玻璃之间的液晶，液晶厚度为1μm，两层ITO膜分别称为T1膜和T2膜，T1膜的膜厚为T1＝970nm；在T1膜与玻璃之间还镀有厚度50nm的Au膜；在T1膜上制作有周期性排布的金属‑电介质‑金属型MIM纳米棒阵列；沿MIM纳米棒长轴方向周期为500nm，沿其短轴方向周期为300nm，每个MIM纳米棒单元的材料为Au‑SiO2‑Au，MIM纳米棒长度为125nm，宽度为50nm，上下两层Au厚度分别为30nm，中间SiO2厚度为20nm。
Description
技术领域
本发明属于光电子技术领域，涉及一种液晶调谐的滤波器
背景技术
随着纳米技术的兴起，液晶作为出色的光电活性绝缘介质，逐渐开始被应用于纳米光学器件的研究与制备。通常，液晶作为调制层，通过外加电场控制其分子的指向来改变其介观相，即纳米结构的介质环境，随之改变器件的光学响应。并且电光调谐具有良好的可逆性与重复性，所以，液晶与纳米结构的这种刺激—响应过程，将大大提高纳米器件应用的灵活度。国内外对液晶与光子晶体、光栅、表面等离激元的耦合机理与效果进行了大量的研究，并用于光开关、滤波和导波等器件的设计与制备[G.Y.Si,Y.H.Zhao,S.P.Leong,Y.J.Liu,Liquid-crystal-enabled active plasmonics:a review,Materials,2014,7,1296-1317.]。
然而，对于金属纳米结构的局域表面等离激元共振(Localized Surface PlasmonResonance,LSPR)效应，辐射阻尼大，共振谱线宽。所以当利用液晶进行LSPR光谱的电光可调谐滤波时，光谱可调谐程度并不明显。另一方面，利用液晶进行窄带光谱的电光调谐，相较而言则具有一定的优势。其中，类似量子效应中的电磁诱导透明(Electromagneticallyinduced transparency,EIT)现象，基于金属纳米结构的等离激元诱导透明(Plasmoninduced transparency,PIT)窗口与法布里-珀罗(Fabry-Perot,FP)共振模式的杂化，会产生窄带高Q的反射/吸收谱。因此，利用液晶对其进行可见光-近红外波段的电光调谐成为可能，并可应用于可调谐慢光传输等。
发明内容
本发明的目的是提供一种液晶调谐PIT与FP杂化模式的滤波器，利用液晶的电光效应，实现基于纳米结构PIT与FP模式杂化的可调谐窄带滤波。技术方案如下：
一种液晶调谐等离激元诱导透明与法布里腔杂化模式的滤波器，包括两片各覆盖一层氧化铟锡ITO膜的玻璃，以及组装在两片玻璃之间的液晶，其特征在于，液晶厚度为1μm，两层ITO膜分别称为T1膜和T2膜，T1膜的膜厚为T1＝970nm；在T1膜与玻璃之间还镀有厚度50nm的Au膜；在T1膜上制作有周期性排布的金属-电介质-金属型MIM纳米棒阵列；沿MIM纳米棒长轴方向周期为500nm，沿其短轴方向周期为300nm，每个MIM纳米棒单元的材料为Au-SiO2-Au，MIM纳米棒长度为125nm，宽度为50nm，上下两层Au厚度分别为30nm，中间SiO2厚度为20nm。
附图说明
图1液晶调谐PIT与FP杂化模式的窄带滤波器结构示意图
图2电压0V时滤波器反射谱
图3电压可调谐滤波器反射谱，灰度值：反射率
具体实施方式
本发明的液晶调谐PIT与FP杂化模式的窄带滤波器，其结构如图1所示：将厚度为1μm的液晶(liquid crystal,LC)组装于两片氧化铟锡(indium tin oxide,ITO)玻璃中，其中ITO膜厚T1＝970nm。其中，在T1＝970nm厚的ITO膜与玻璃(SiO2)之间，镀一层厚度50nm的金(Au)膜。在T1＝970nm厚的ITO膜上，金属-电介质-金属(metal-insulator-metal,MIM)型纳米棒结构周期性排布，沿MIM纳米棒长轴方向周期为500nm，沿MIM纳米棒短轴方向周期为300nm。MIM纳米棒单元结构材料为Au-SiO2-Au，MIM纳米棒长度为125nm，宽度为50nm，上下两层Au厚度为30nm，中间SiO2厚度20nm。
光垂直于ITO玻璃基底平面入射，波段为可见光-近红外波段。
MIM型纳米阵列结构可呈现单一PIT透射窗口，利用Au薄膜与MIM阵列结构耦合所实现的FP共振模式充当非辐射窄带暗模，利用MIM纳米结构PIT窗口与FP共振模式的耦合杂化，得到双波长高Q窄带反射/吸收谱。
液晶分子因其各向异性具有双折射特性。当施加电压时，液晶分子会朝着电场方向偏转，进而改变有效折射率。通过外加电场控制液晶分子的指向来改变其介观相，即纳米结构的介质环境，从而改变器件的光学响应。液晶材料可选取5CB型，其分子转动的阈值电压为1.075V，寻常折射率no＝1.5293，异常折射率ne＝1.7098。通过电压调谐改变液晶的有效折射率，使滤波输出曲线中波长位置可调谐。
采用有限元法进行数值模拟。图2给出了电压为0V时滤波器在可见光波段与近红外波段的反射谱线，在波长为700nm与820nm处，得到具有高Q因子的双共振模式，带宽约为50nm。
图3展示了该滤波器不同电压时的反射光谱。当电压从0V变化到6V时，两个共振模式分别从700nm处与820nm处变化到725nm与875nm处，调谐范围可达到50nm，实现了双次高Q共振模式的电压可调谐。
本发明利用MIM纳米结构PIT窗口与FP共振模式的耦合杂化，得到双波长高Q窄带反射/吸收谱。在液晶两侧玻璃上光刻电极，施加直流电压，通过电压调谐改变液晶的有效折射率，使滤波输出曲线中波长位置可调谐，调谐范围可达到50nm。
所设计的滤波器可采用超净室纳米加工与器件集成工艺进行制备(W.S.Chang,J.B.Lassiter,P.Swanglap,H.Sobhani,S.Khatua,P.Nordlander,N.J.Halas,S.Link,AplasmonicFano switch,Nano.Lett.,2012,12,4977-4982.)。其大概流程为：在SiO2玻璃上采用溅射或热蒸镀法依次镀一定厚度的Au和ITO膜；在其上利用电子束刻蚀法制备MIM结构周期阵列；利用玻璃微球充当间隔子，在此结构上覆盖另一ITO玻璃得到液晶盒；往液晶盒中并注入液晶及所需的取向剂，对液晶盒进行密封，最终完成滤波器的制备。
Claims (1)
1.一种液晶调谐等离激元诱导透明与法布里-珀罗腔杂化模式的滤波器，包括两片各覆盖一层氧化铟锡ITO膜的玻璃，以及组装在两片玻璃之间的液晶，其特征在于，液晶厚度为1µm，两层ITO膜分别称为T1膜和T2膜，T1膜的膜厚为T1=970nm；在T1膜与下层玻璃之间还镀有厚度50 nm的Au膜；在T1膜上制作有周期性排布的金属-电介质-金属型MIM纳米棒阵列；沿MIM纳米棒长轴方向周期为500 nm，沿其短轴方向周期为300 nm，每个MIM纳米棒单元的材料为Au-SiO2-Au，MIM纳米棒长度为125 nm，宽度为50 nm，上下两层Au厚度分别为30nm，中间SiO2厚度为20 nm。
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| CN110673241B (zh) * | 2019-09-16 | 2021-07-20 | 东南大学 | 一种基于表面等离激元与腔体共振模式耦合的滤色片结构 |
| CN111504947A (zh) * | 2020-04-14 | 2020-08-07 | 桂林电子科技大学 | 基于mim环形格点阵列的表面等离激元折射率传感器 |
| CN113281929B (zh) * | 2021-03-04 | 2022-07-12 | 桂林电子科技大学 | 一种电致可调的液晶间隙等离子体结构色滤波器 |
| CN113030026B (zh) * | 2021-03-07 | 2022-11-04 | 天津理工大学 | 一种lspr多波长窄带可调谐传感器 |
| CN113387318B (zh) * | 2021-06-11 | 2024-02-09 | 中国科学技术大学 | 一种基于纳米环形阵列的近红外带通滤波器及制备方法 |
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| CN103808691A (zh) * | 2014-02-19 | 2014-05-21 | 中国科学院半导体研究所 | 非对称Au粒子阵列和FP腔耦合的折射率传感器 |
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