CN108593979B - Ceramic wafer variable-temperature electric performance test fixture matched with tubular furnace - Google Patents
Ceramic wafer variable-temperature electric performance test fixture matched with tubular furnace Download PDFInfo
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- CN108593979B CN108593979B CN201810667347.XA CN201810667347A CN108593979B CN 108593979 B CN108593979 B CN 108593979B CN 201810667347 A CN201810667347 A CN 201810667347A CN 108593979 B CN108593979 B CN 108593979B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0425—Test clips, e.g. for IC's
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Abstract
The invention discloses a ceramic wafer temperature-changing electric performance test fixture matched with a tube furnace, which comprises an adjusting cap, a middle quartz tube, an outer quartz tube and an inner quartz tube, wherein the middle quartz tube is arranged in the outer quartz tube, the inner quartz tube is arranged in the middle quartz tube, the left end of the inner quartz tube is sleeved with the adjusting cap, a clamping groove is fixed on the left side surface of the inner quartz tube where the outer edge of a first through hole is located, an open groove is arranged on the right side surface of the middle quartz tube, a detachable negative plate is arranged in the middle of the inner wall of the right side of the middle quartz tube, and a detachable positive plate is arranged in the middle of the outer wall of the right side of the inner quartz tube. According to the invention, the problems that the traditional clamp cannot clamp the ceramic wafer stably and is inconvenient to operate when the electrical property of the ceramic wafer is tested in the tubular furnace are solved by arranging the adjusting cap, the middle quartz tube, the outer quartz tube and the inner quartz tube.
Description
Technical Field
The invention relates to the technical field of electrical performance testing devices, in particular to a ceramic wafer variable-temperature electrical performance testing clamp matched with a tube furnace.
Background
The tubular furnace can be applied to the fields of metallurgy, heat treatment, preparation synthesis of materials and the like, and in addition, the tubular furnace can be also suitable for experiments such as chemical analysis, physical measurement and the like, the electrical property test of the ceramic sheet at a higher temperature can be also performed in the tubular furnace, however, the auxiliary electrical property test clamp matched with the tubular furnace is less, the stability is not high when the ceramic sheet is clamped by other clamps, the requirement of high temperature resistance test cannot be met, and the clamping operation is complex, so that the test clamp with simple structure and low production cost is necessary to design, and the test clamp with high temperature resistance, convenient operation and stable placement in the tubular furnace can be realized.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides the ceramic wafer temperature-changing electrical performance testing clamp matched with the tube furnace, and solves the problems that the traditional clamp can not clamp the ceramic wafer stably and is inconvenient to operate when the electrical performance of the ceramic wafer is tested in the tube furnace.
In order to achieve the above purpose, the present invention provides the following technical solutions: the ceramic wafer temperature-changing electric performance test fixture matched with the tube furnace comprises an adjusting cap, a middle quartz tube, an outer quartz tube and an inner quartz tube, wherein a second internal thread is arranged on the inner side wall of the left end head of the outer quartz tube, the middle quartz tube is arranged in the outer quartz tube, a second external thread is arranged at the position of the outer side wall of the middle quartz tube corresponding to the second internal thread on the outer quartz tube, the second external thread is arranged at the left side of the middle quartz tube, a first external thread is arranged on the outer side wall of the left end of the middle quartz tube, a nut sleeve is arranged between the first external thread and the second external thread on the middle quartz tube, the nut sleeve is fixed on the middle quartz tube, an inner quartz tube is arranged in the middle quartz tube, quartz flanges are respectively fixed at the left end of the middle quartz tube and the left end of the inner quartz tube, the quartz flange on the inner quartz tube is connected with the quartz flange on the middle quartz tube through a clamping spring, an adjusting cap is sleeved at the left end of the inner quartz tube, an anti-slip groove is arranged on the outer side face of the adjusting cap, a first internal thread is arranged on the inner side wall of the right end of the adjusting cap, a first through hole is arranged in the middle of the left end face of the inner quartz tube, a clamping groove is fixed on the left side face of the inner quartz tube where the edge of the outer side of the first through hole is located, a clamping groove is fixed at the middle position of the left side wall of the adjusting cap corresponding to the clamping groove in the middle of the left side face of the inner quartz tube, a first through hole is arranged on the wall of the adjusting cap corresponding to the middle of the clamping groove in the left side wall of the adjusting cap, clamping tables are arranged in the clamping groove in the left side wall of the adjusting cap and the left side face of the inner quartz tube, clearance fit is formed between the clamping tables, a second through hole is formed in the middle of the clamping tables, the clamping table inside the clamping groove on the inner wall of the left side of the adjusting cap is connected with the clamping table inside the clamping groove on the left side face of the inner quartz tube through an adjusting spring, an opening groove is formed in the side face of the right end of the middle quartz tube, a detachable negative plate is arranged in the middle of the inner wall of the right side of the middle quartz tube, a detachable positive plate is arranged in the middle of the outer wall of the right side of the inner quartz tube, and a negative terminal is arranged between a nut sleeve on the left side of the middle quartz tube and a second external thread.
Preferably, the second external thread on the outer wall of the left side of the middle quartz tube is in meshed connection with the second internal thread on the inner wall of the left end of the outer quartz tube.
Preferably, the first internal thread on the inner side wall at the right end of the adjusting cap is in meshed connection with the first external thread on the outer side wall at the left end of the middle quartz tube.
Preferably, a guide rail is transversely fixed on the outer side wall of the inner quartz tube, a guide groove is formed in the inner side wall of the middle quartz tube corresponding to the guide rail on the inner quartz tube, and the guide rail is in clearance fit with the guide groove.
Preferably, the detachable negative plate is connected with the negative electrode binding post through a wire, the wire between the detachable negative plate and the negative electrode binding post is arranged in an interlayer between the internal quartz tube and the middle quartz tube, the left side of the adjusting cap is provided with the positive electrode binding post, the detachable positive electrode plate is connected with the wire, and the left end of the wire sequentially penetrates through a first through hole on the left side wall of the middle quartz tube, a second through hole in the middle of the clamping table on the left side wall of the middle quartz tube, an adjusting spring, a second through hole in the middle of the clamping table on the left side wall of the adjusting cap and a first through hole on the left side wall of the adjusting cap and is connected with the positive electrode binding post.
The invention provides a ceramic wafer variable-temperature electrical property test fixture matched with a tube furnace, which has the following beneficial effects:
(1) The main material of the invention is the quartz tube, which is high temperature resistant and high in stability after heating, and the arrangement of the outer quartz tube can form a sealing effect on the ceramic plate in the middle quartz tube inside, so that the adhesion of external impurities on the ceramic plate is avoided to interfere with the test.
(2) According to the invention, the middle quartz tube and the inner quartz tube are arranged in the outer quartz tube, the inner quartz tube and the middle quartz tube are connected through the clamping springs, when the ceramic plate is placed in the open slot at the right end of the middle quartz tube, the clamping springs push the inner quartz tube and the middle quartz tube to jointly act to clamp the ceramic plate, the operation is simple, the left end of the middle quartz tube is sleeved with the adjusting cap, the inner part of the adjusting cap is connected with the inner quartz tube through the adjusting springs, and when the ceramic plate is used, the rotating adjusting cap can be adjusted through the size of the actual ceramic plate, so that the clamping force transmitted to the ceramic plate by the clamping springs is moderate, and the clamping force on a sample is reduced under the condition of ensuring good contact.
(3) According to the invention, the lead between the negative electrode binding post and the detachable negative electrode plate is arranged in an interlayer between the inner quartz tube and the middle quartz tube, the lead between the positive electrode binding post and the detachable positive electrode plate is arranged in the inner quartz tube, and the positive electrode lead and the negative electrode lead are isolated through the inner quartz tube, so that short circuits are avoided.
Drawings
FIG. 1 is a schematic view of the external structure of the present invention;
FIG. 2 is a cut-away view of the present invention;
FIG. 3 is an enlarged left portion of FIG. 2 of the present invention;
FIG. 4 is an enlarged right-hand portion of FIG. 2 of the present invention;
FIG. 5 is a schematic diagram of the connection of the inner quartz tube and the middle quartz tube of the present invention;
FIG. 6 is a schematic view of the tuning cap and inner quartz tube connection mechanism of the present invention.
In the figure: 1. a positive terminal; 2. an adjustment cap; 3. a negative electrode binding post; 4. an anti-skid groove; 5. a nut sleeve; 6. a middle quartz tube; 7. an external quartz tube; 8. a wire; 9. a detachable positive plate; 10. an inner quartz tube; 11. an adjusting spring; 12. a clamping spring; 13. a quartz flange; 14. a first internal thread; 15. a second internal thread; 16. a first external thread; 17. a second external thread; 18. an open slot; 19. a removable negative plate; 20. a guide groove; 21. a guide rail; 22. a first through hole; 23. a clamping table; 24. a second through hole; 25. a clamping groove.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1-6, the present invention provides a technical solution: the ceramic wafer temperature-changing electric performance test fixture matched with a tube furnace comprises an adjusting cap 2, a middle quartz tube 6, an outer quartz tube 7 and an inner quartz tube 10, wherein a second internal thread 15 is arranged on the inner side wall of the left end head of the outer quartz tube 7, the middle quartz tube 6 is arranged inside the outer quartz tube 7, a second external thread 17 is arranged at the position of the outer side wall of the middle quartz tube 6 corresponding to the second internal thread 15 on the outer quartz tube 7, the second external thread 17 is arranged at the left side of the middle quartz tube 6, the second external thread 17 on the outer wall of the left side of the middle quartz tube 6 is in meshed connection with the second internal thread 15 on the inner wall of the left end of the outer quartz tube 7, the middle quartz tube 6 and the outer quartz tube 7 are connected through threads, the disassembly and the assembly are convenient, a first external thread 16 is arranged on the outer side wall of the left end of the middle quartz tube 6, a nut sleeve 5 is arranged between the first external thread 16 and the second external thread 17 on the middle quartz tube 6, the nut sleeve 5 can prevent the middle quartz tube 6 from sliding when the outer quartz tube 7 is screwed, the nut sleeve 5 is fixed on the middle quartz tube 6, the inner quartz tube 10 is arranged in the middle quartz tube 6, the guide rail 21 is transversely fixed on the outer side wall of the inner quartz tube 10, the guide rail 20 is arranged on the inner side wall of the middle quartz tube 6 corresponding to the guide rail 21 on the inner quartz tube 10, the guide rail 21 and the guide rail 20 are in clearance fit, the guide rail 21 and the guide rail 20 are arranged to avoid rotation between the inner quartz tube 10 and the middle quartz tube 6, the quartz flange 13 is fixed at the left end of the middle quartz tube 6 and the left end of the inner quartz tube 10, the quartz flange 13 on the inner quartz tube 10 is connected with the quartz flange 13 on the middle quartz tube 6 through the clamping spring 12, the clamping spring 12 pushes the inner quartz tube 10 to move rightwards, the ceramic plate in the opening groove 18 in the middle quartz tube 6 is clamped, the left end of the inner quartz tube 10 is sleeved with an adjusting cap 2, the outer side face of the adjusting cap 2 is provided with an anti-slip groove 4, the inner side wall at the right end of the adjusting cap 2 is provided with a first internal thread 14, the first internal thread 14 on the inner side wall at the right end of the adjusting cap 2 is in meshed connection with a first external thread 16 on the outer side wall at the left end of the middle quartz tube 6, the adjusting cap 2 pushes the inner quartz tube 10 to move left and right relative to the middle quartz tube 6 when the adjusting cap 2 is rotated, the clamping force of the inner quartz tube is conveniently adjusted according to the size of the actual ceramic plate, the middle part of the left end face of the inner quartz tube 10 is provided with a first through hole 22, the left side face of the inner quartz tube 10 where the edge is located at the outer side of the first through hole 22 is fixedly provided with a clamping groove 25, the middle part of the inner left side wall of the inner quartz tube 2 corresponding to the clamping groove 25 at the middle part of the left side face of the inner quartz tube 10 is fixedly provided with a clamping groove 25, a first through hole 22 is arranged on the wall of the adjusting cap 2 corresponding to the middle part of a clamping groove 25 on the left side wall of the inside of the adjusting cap 2, clamping tables 23 are arranged in the clamping groove 25 on the left side wall of the adjusting cap 2 and the clamping groove 25 on the left side surface of the inside quartz tube 10, clearance fit is realized between the clamping tables 23 and the clamping groove 25, a second through hole 24 is arranged in the middle part of the clamping tables 23, the clamping tables 23 in the clamping groove 25 on the left side wall of the adjusting cap 2 are connected with the clamping tables 23 in the clamping groove 25 on the left side surface of the inside quartz tube 10 through an adjusting spring 11, an opening groove 18 is arranged on the right side surface of the middle quartz tube 6, a detachable negative plate 19 is arranged in the middle part of the right side inner wall of the middle quartz tube 6, a detachable positive plate 9 is arranged in the middle part of the right side outer wall of the inside quartz tube 10, a negative electrode binding post 3 is arranged between a nut sleeve 5 and a second external thread 17 on the left side of the middle quartz tube 6, the detachable negative plate 19 is connected with the negative terminal 3 through a lead 8, and the lead 8 between the detachable negative plate 19 and the negative terminal 3 is arranged in an interlayer between the internal quartz tube 10 and the middle quartz tube 6, the left side of the adjusting cap 2 is provided with the positive terminal 1, the detachable positive plate 9 is connected with the lead 8, the left end of the lead 8 sequentially passes through a first through hole 22 on the left side wall of the middle quartz tube 6, a second through hole 24 in the middle of a clamping table 23 on the left side wall of the middle quartz tube 6, an adjusting spring 11, a second through hole 24 in the middle of the clamping table 23 on the left side wall of the adjusting cap 2, and a first through hole 22 on the left side wall of the adjusting cap 2 and is connected with the positive terminal 1.
When the ceramic plate testing device is used, the adjusting cap 2 is unscrewed, the inner quartz tube 10 moves leftwards relative to the middle quartz tube 6, the ceramic plate is placed in the open groove 18 at the right end of the middle quartz tube 6, the left end and the right end of the ceramic plate are respectively contacted with the detachable positive plate 9 and the detachable negative plate 19, then the adjusting cap 2 is screwed, the rotating adjusting cap 2 is properly adjusted according to the size of the ceramic plate, when the ceramic plate is longer, the clamping force of the clamping spring 12 is relatively large, the adjusting cap 2 is unscrewed, the adjusting cap 2 pulls the adjusting spring 11 at the left end of the inner quartz tube 10 to balance the clamping force of the clamping spring 12 rightwards, the clamping force can be randomly adjusted, then the middle quartz tube 6 is placed in the outer quartz tube 7 and screwed, and the positive terminal 1 and the negative terminal 3 are respectively connected with the positive electrode and the negative electrode of an external testing device for testing.
In summary, the invention solves the problems that the traditional clamp can not clamp the ceramic wafer stably and is inconvenient to operate when the electrical property test of the ceramic wafer is carried out in the tube furnace by arranging the adjusting cap 2, the middle quartz tube 6, the outer quartz tube 7 and the inner quartz tube 10.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (3)
1. The utility model provides a ceramic wafer alternating temperature electric performance test fixture with tubular furnace is supporting, includes adjusting cap (2), middle part quartz capsule (6), outside quartz capsule (7) and inside quartz capsule (10), its characterized in that: the utility model discloses a novel anti-slip cap for the left end of an outer quartz tube, which is characterized in that a second internal thread (15) is arranged on the inner side wall of the left end head of the outer quartz tube (7), a middle quartz tube (6) is arranged inside the outer quartz tube (7), a second external thread (17) is arranged at the position of the outer side wall of the middle quartz tube (6) corresponding to the second internal thread (15) on the outer quartz tube (7), the second external thread (17) is arranged on the left side of the middle quartz tube (6), a first external thread (16) on the middle quartz tube (6) and the second external thread (17), a nut sleeve (5) is arranged between the first external thread (16) on the middle quartz tube (6) and the second external thread (17), the nut sleeve (5) is fixed on the middle quartz tube (6), an inner quartz tube (10) is arranged inside the middle quartz tube (6), quartz flanges (13) are fixed at the left end of the middle quartz tube (6) and the left end of the inner quartz tube (10), a first external thread (16) is arranged on the left end of the middle quartz tube (6), a clamping cap (2) is arranged between the quartz flanges (13) on the middle quartz tube (6), an adjusting cap (2), the utility model discloses a quartz tube, including adjusting cap (2) and inner quartz tube (10), be provided with first internal thread (14) on adjusting cap (2) right-hand member inside wall, inner quartz tube (10) left end face middle part is provided with first through-hole (22), be fixed with draw-in groove (25) on inner quartz tube (10) left surface that first through-hole (22) outside edge was located, draw-in groove (25) at inner quartz tube (10) left surface middle part's draw-in groove (25) inside left side wall middle part department is fixed with draw-in groove (25), be provided with first through-hole (22) on adjusting cap (2) inside draw-in groove (25) middle part on left side wall's (2) wall on adjusting cap (2) middle part correspondence's draw-in groove (2), draw-in groove (25) on adjusting cap (2) left side inner wall and draw-in groove (25) inside on inner side face of inner quartz tube (10) all are provided with draw-in groove (23), be clearance fit between draw-in groove (23) and draw-in groove (25) on inner quartz tube (25), draw-in groove (23) inside groove (18) on adjusting cap (2) left side wall and side wall through-in groove (18), the middle part of the inner wall of the right side of the middle quartz tube (6) is provided with a detachable negative plate (19), the middle part of the outer wall of the right side of the inner quartz tube (10) is provided with a detachable positive plate (9), and a negative terminal (3) is arranged between a nut sleeve (5) and a second external thread (17) on the left side of the middle quartz tube (6); the second external thread (17) on the outer wall of the left side of the middle quartz tube (6) is in meshed connection with the second internal thread (15) on the inner wall of the left end of the outer quartz tube (7); the utility model discloses a negative plate (19) can dismantle, negative plate (19) link to each other with negative terminal (3) through wire (8), and can dismantle wire (8) between negative plate (19) and the negative terminal (3) set up in intermediate layer between inside quartz capsule (10) and middle part quartz capsule (6), adjusting cap (2) left side is provided with anodal terminal (1), can dismantle be connected with wire (8) on positive plate (9), first through-hole (22) on middle part quartz capsule (6) left wall, second through-hole (24) at the middle part in clamping table (23) middle part on quartz capsule (6) left wall, adjusting spring (11), second through-hole (24) at the middle part in clamping table (23) on adjusting cap (2) left side wall and first through-hole (22) on adjusting cap (2) left side wall link to each other with anodal terminal (1) in proper order.
2. The ceramic wafer temperature changing electrical property testing fixture matched with the tube furnace as claimed in claim 1, wherein: the first internal thread (14) on the inner side wall of the right end of the adjusting cap (2) is in meshed connection with the first external thread (16) on the outer side wall of the left end of the middle quartz tube (6).
3. The ceramic wafer temperature changing electrical property testing fixture matched with the tube furnace as claimed in claim 1, wherein: guide rails (21) are transversely fixed on the outer side wall of the inner quartz tube (10), guide grooves (20) are formed in the inner side wall of the middle quartz tube (6) corresponding to the guide rails (21) on the inner quartz tube (10), and the guide rails (21) are in clearance fit with the guide grooves (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810667347.XA CN108593979B (en) | 2018-08-23 | 2018-08-23 | Ceramic wafer variable-temperature electric performance test fixture matched with tubular furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810667347.XA CN108593979B (en) | 2018-08-23 | 2018-08-23 | Ceramic wafer variable-temperature electric performance test fixture matched with tubular furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108593979A CN108593979A (en) | 2018-09-28 |
| CN108593979B true CN108593979B (en) | 2023-07-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810667347.XA Active CN108593979B (en) | 2018-08-23 | 2018-08-23 | Ceramic wafer variable-temperature electric performance test fixture matched with tubular furnace |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4002061A (en) * | 1976-04-30 | 1977-01-11 | The United States Of America As Represented By The Secretary Of The Navy | Capacitance transducer for the measurement of bending strains at elevated temperatures |
| CN202016867U (en) * | 2011-04-22 | 2011-10-26 | 徐州市九洲龙臭氧设备制造有限公司 | Quartz ozone generation tube |
| DE102014203100A1 (en) * | 2013-03-13 | 2014-09-18 | Shin-Etsu Chemical Co., Ltd. | CERAMIC HEATING DEVICE |
| CN208283434U (en) * | 2018-08-23 | 2018-12-25 | 河南师范大学 | A kind of potsherd alternating temperature testing fixture for electrical property matched with tube furnace |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW546399B (en) * | 2000-02-15 | 2003-08-11 | Macronix Int Co Ltd | Vertical low-pressure chemical vapor deposition furnace |
-
2018
- 2018-08-23 CN CN201810667347.XA patent/CN108593979B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4002061A (en) * | 1976-04-30 | 1977-01-11 | The United States Of America As Represented By The Secretary Of The Navy | Capacitance transducer for the measurement of bending strains at elevated temperatures |
| CN202016867U (en) * | 2011-04-22 | 2011-10-26 | 徐州市九洲龙臭氧设备制造有限公司 | Quartz ozone generation tube |
| DE102014203100A1 (en) * | 2013-03-13 | 2014-09-18 | Shin-Etsu Chemical Co., Ltd. | CERAMIC HEATING DEVICE |
| CN208283434U (en) * | 2018-08-23 | 2018-12-25 | 河南师范大学 | A kind of potsherd alternating temperature testing fixture for electrical property matched with tube furnace |
Non-Patent Citations (1)
| Title |
|---|
| 中温炉中新型石英管式炉膛的设计;靳化才;王友珍;王传金;;实验科学与技术(第03期);全文 * |
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