CN108593648A - A kind of 3D micro-structure observation device and its observation procedure - Google Patents
A kind of 3D micro-structure observation device and its observation procedure Download PDFInfo
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- CN108593648A CN108593648A CN201810525696.8A CN201810525696A CN108593648A CN 108593648 A CN108593648 A CN 108593648A CN 201810525696 A CN201810525696 A CN 201810525696A CN 108593648 A CN108593648 A CN 108593648A
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- G01N21/84—Systems specially adapted for particular applications
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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Abstract
The present invention relates to a kind of 3D micro-structure observation device, including microscope ontology, the mirror ontology includes observation component, focusing component, objective table and can drive the described objective table adjusting part into action.Further include control circuit board and the position adjusting mechanism for driving the glass slide progress rotational motion for being loaded with micro-structure, position adjusting mechanism is arranged on the objective table, position adjusting mechanism includes the drive component that support component for fixing glass slide and driving support component are rotated relative to objective table, and drive component is electrically connected with control circuit board.The invention further relates to the observation procedures of 3D micro-structure observation device, the distributed areas of micro-structure are marked in first choice, then label is searched out to determine the Position Approximate of micro-structure using microscope ontology, and then it is finely adjusted again and realizes observation, position adjusting mechanism drives glass slide to be rotated, and then the image of micro-structure Difference angles is obtained, the final 3D rendering for obtaining micro-structure.
Description
Technical field
The present invention relates to micro structure testing technical field, more particularly to a kind of 3D micro-structure observation device further relates to the 3D
The observation procedure of microstructure observation device.
Background technology
In recent years, with the development of various micro-processing technologies, Fs laser double photon micro-processing technology is obtained in various fields
Quick development and application are arrived.Microstructure size generally all in 1 μm of -1000 μ m, can not visually observe micro-structure
Specific morphology and size.So before preparing micro-structure, it usually needs using various limit technologies to micro-structure carry out observation or
Detection.The main method of observation micro-structure is to use two kinds of conventional microscope and scanning electron microscope at present.Traditional is common
Light microscope is at low cost, simple to operation.But a two dimensional surface of micro-structure can only be observed when being observed, it can not
Realize that multiple angles are observed micro-structure.And micro-machined space pattern is complicated, one flat image of observation often can not
Accurately show the specific three-dimensional configuration of micro-structure.Therefore, 3D micro Process products are seen using common light microscope
Measuring tool has significant limitation.Scanning electron microscope can then realize comprehensive observation to micro-structural 3 D form, while can
Accurately to measure the size of micro-structure.But electronic scanner microscope is expensive, operating process is complicated, and needs when in use
Will on sample gold-plated ability Observable, this considerably increases sample observation cost, also destroy original property of sample
And pattern, generally only just used in professional skill field.
Authorization Notice No. is the Chinese invention patent of CN104655626B (application No. is 201510083566.X)《One kind is aobvious
The device of micro- microscopic observation stereochemical structure》, it is disclosed that device is used by the way that three mobile platforms and rotary unit is arranged
When, rotation treatment carries out 360 degree rotation by drive sample to be tested, and then the pattern and size that omnibearing observation is structure.The dress
The component parts set is more, and it is relatively complicated to build step.In addition the device is used independently of microscope, it is difficult to integrally be taken with microscope
Band, it is difficult to carry out volume production as product, corresponding its uses popularization also larger.In addition, the device is when in use, rotary shaft is easy
Microscopical light source is blocked, it is more demanding to the placement location of micro-structure.Simultaneously need that sample is fixed on rotary shaft with adhesive tape
On, in addition, in rotation process, when sample is gone to below rotary shaft, then it can not observe the micro-structure at sample back, and incite somebody to action
It is then cumbersome on the rotary shaft that sample removes again reversed fixation.If dismantled simultaneously, adhesive tape has residue glue to stay on sample, then
It will necessarily influence the observation of subsequent sample microstructure so that error occurs in observed result.
Invention content
First technical problem to be solved by this invention is that offer one kind can more fully for the above-mentioned prior art
Using microscope body construction, can be directly disposed on microscope ontology can realize the stereopsis of micro-structure, and energy
With microscope ontology integrated setting to be more easy to the 3D micro-structure observation device of realization volume production, carrying, operation.
Second technical problem to be solved by this invention is to provide one kind for the above-mentioned prior art to be automatically performed
Microstructure observation and the fast observation procedure of observation speed.
Technical solution is used by the present invention solves above-mentioned first technical problem：A kind of 3D micro-structure observation device,
Including microscope ontology, the microscope ontology includes observation component, focusing component, objective table and can drive the objective table
Carry out objective table adjusting part that is front and back and moving left and right；
It is characterized in that：Further include control circuit board and for drive be loaded with micro-structure glass slide carry out rotational motion
Position adjusting mechanism, the position adjusting mechanism is arranged on the objective table；
The position adjusting mechanism includes the support component and the driving support component for fixing the glass slide
Relative to the drive component that objective table is rotated, the driving component is electrically connected with the control circuit board；
The observation component is electrically connected with control circuit board.
Steadily, the support component includes the first support element and the second support element to the simple in structure and course of work, described
One end of first support element is rotatably connected on objective table, and one end of second support element is rotatably connected on the first support element
The other end, the driving component and the other end of second support element are drivingly connected, the second support of the driving component driving
The second end of part is moved forward and backward, so that the first support element, the second support element rotate with respect to objective table, described first
The fixing piece for fixing glass slide, first support element and/or are provided on the upper surface of support member or the second support element
Fixed area on two support elements corresponding to glass slide is provided with transparent area.
Preferably, first support element includes the first support arm being separately positioned at left and right sides of objective table, two
One end of one support arm is rotatably connected on objective table；
Second support element includes the second support arm for being separately positioned on objective table both sides, and the one of each second support arm
End is connected to the other end of first support arm, and the other end of two the second support arms is connected by a body of rod, driving group
Part drives the other end of second support arm.
Simply, the driving component includes rack, driving wheel, gear and motor, the motor and control circuit board
Electrical connection, the rack are arranged on objective table along the longitudinal direction corresponding to the second support element, and the gear is connected to motor
End, the driving wheel is driven to be rotatably connected on the other end of the second support element, the driving wheel is engaged with gear and rack
Connection.
Another preferred embodiment, the support component include two support plates and two clips, two support plate difference
Setting is upwardly extended at left and right sides of from objective table, and a clip, the load are rotatablely connected on the medial surface of each support plate
Slide energy fixed clamp is between two clips.
More simply, each clip is rotatablely connected on the supporting plate structure by a shaft；
The driving component includes driving motor, driving wheel and driven wheel, and the driving motor is electrically connected with control circuit board
It connects, the driving wheel is connected to the driving end of driving motor, and the driven wheel fixation is set in shaft, the driven wheel and master
Driving wheel engagement connection.
It automatically adjusts for convenience, the objective table adjusting part includes being moved left and right for driving objective table
The Y-direction drive components that are moved forward and backward to drive component and for driving objective table of X；
Further include the first driver for driving X to be acted to drive component and for drive Y-direction drive component into
The second driver that action is made, first driver are electrically connected with control circuit board respectively with the second driver.
Preferably, the focusing component includes thick accurate burnt spiral and thin accurate burnt spiral；
Further include the coarse adjustment driver for driving thick accurate burnt spiral and the fine tuning driving for driving thin accurate burnt spiral
Device, the coarse adjustment driver and fine tuning driver are electrically connected with control circuit board respectively.
Technical solution is used by the present invention solves above-mentioned first technical problem：A kind of 3D micro-structure observation device
Observation procedure, it is characterised in that：Include the following steps：
The distributed areas of S1, mark on glass slide micro-structure, and there is notch for reserving micro- knot on the label
The laterally observed region of structure；
S2, position adjusting mechanism work, adjust placed angle of the glass slide relative to objective table；
Thick accurate burnt spiral in S3, focusing component is rotated, while observing component acquisition observed image, and by acquisition
Observed image is sent in control circuit board；
It whether there is tag image in the image that S4, control circuit plate analysis are observed, if it is not, then carrying out S5；If so,
Then carry out S6；
S5, the work of objective table adjusting part, drive the glass slide for being loaded with micro-structure to carry out left and right and/back-and-forth motion, until
There are tag images in the observed image of observation component acquisition；
S6, the work of objective table adjusting part drive the glass slide for being loaded with micro-structure to carry out annular microspur movement, observe simultaneously
Component acquires observed image, and the observed image of acquisition is sent in control circuit board, the figure of control circuit plate analysis observation
There are the blurred pictures of micro-structure as in；
Thin accurate burnt spiral in S7, focusing component is rotated, until being driven in control circuit board from observation component
There is micro-structure clearly image in observed image；
S8, by micro-structure, clearly image and glass slide are stored relative to the placed angle of objective table；
It is micro- when acquisition glass slide placed angle all relative to objective table that S9, cycle carry out S2, S3, S6, S7, S8
Structural images.
Compared with the prior art, the advantages of the present invention are as follows：3D micro-structure observation device in the present invention, makes full use of aobvious
The adjustment effect of micro mirror body construction realizes that objective table exists relative to observation component in observation process using microscope body construction
Movement on three-dimensional.And increases on objective table on the basis of microscope ontology in the present invention and be provided with for band dynamic load
There is the glass slide of micro-structure to carry out the position adjusting mechanism of rotational motion, so by the effect of the position adjusting mechanism, then matches
It closes microscope ontology and adjusts the observation that can complete the image of micro-structure multi-angle on glass slide, Jin Ershi to the position of objective table
The observation of the 3D rendering of existing micro-structure, structure is simpler, and regulating step is simple.In addition, very due to the position adjusting mechanism
Simply, and it can install or directly be made on objective table, facilitate the microscope for producing the structure in batches, relative to existing electronics
Flying-spot microscope cost greatly reduces.The position adjusting mechanism can integrally be carried with microscope ontology simultaneously, will not additionally be increased
Add occupied space, it is easy to carry, it is suitble to integrally be carried with microscope ontology extremely using ground, it is more convenient to use.
Description of the drawings
Fig. 1 is 3D micro-structure observation device stereogram in embodiment one in the embodiment of the present invention.
Fig. 2 is 3D micro-structure observation device stereogram in embodiment two in the embodiment of the present invention.
Specific implementation mode
Below in conjunction with attached drawing embodiment, present invention is further described in detail.
Embodiment one
As shown in Figure 1, the 3D micro-structure observation device in the present embodiment, including microscope ontology and position adjust machine
Structure.
Wherein microscope ontology uses various common microscopes in the prior art, i.e. microscope ontology includes observation
Component, focusing component, objective table 3 and objective table adjusting part.
Wherein observation component includes eyepiece 11, object lens 12, light source 13, light source adjuster etc..Observation group in the present embodiment
Part uses electronic observation component, the information that object lens 12 acquire that can be outward transmitted by the data-interface of setting.Accordingly
In microscope ontology or control circuit board, the data-interface of control circuit board and object lens 12 originally can be arranged in microscope in vitro
Communication connection, and then the image that object lens 12 observe can be obtained.Certain control circuit board can also use computer to replace.
Focusing component includes then thick accurate burnt spiral 21 and thin accurate burnt spiral 22, focusing component can adjust object lens 12 relative to
The height of objective table 3, so that object lens 12 can obtain clearly image.In order to realize to thick accurate burnt spiral in the present embodiment
21 and thin accurate burnt spiral 22 automatic adjustment, be also additionally provided with the coarse adjustment driver 81 of the thick accurate burnt spiral of driving 21 and use
In the fine tuning driver 82 for driving thin accurate burnt spiral 22.Coarse adjustment driver 81 in the present embodiment includes a coarse adjustment motor 811
And it is connected to the coarse adjustment gear 812 on the driving of coarse adjustment motor 811 end, coarse adjustment gear 812 is meshed with thick accurate burnt spiral 21.Slightly
The position that motor 811 corresponds to thick accurate burnt spiral 21 is adjusted to be fixedly mounted on the pedestal of microscope ontology.It is thin in the present embodiment
Driver 82 is adjusted to include a fine tuning motor 821 and the fine tuning gear 822 being connected on the driving of fine tuning motor 821 end, fine tuning
Gear 822 is meshed with thin accurate burnt spiral 22.Fine tuning motor 821 is fixedly mounted on micro- corresponding to the position of thin accurate burnt spiral 22
On the pedestal of mirror ontology.And coarse adjustment motor 811, fine tuning motor 821 are electrically connected with control circuit board, when work, in control electricity
Under the control of road plate, control coarse adjustment motor 811, fine tuning motor 821, and then realize the adjusting of 12 focal length of object lens.
Objective table adjusting part includes then the X that is moved left and right for driving objective table 3 to drive component 61 and uses
In the Y-direction drive component 62 that driving objective table 3 is moved forward and backward.X is to drive component 61, Y-direction drive component 62 then using existing
Have an existing mechanism in technology, usual X to drive component 61, Y-direction drive component 62 in the outside of objective table 3 it is corresponding there are one
The regulating wheel operated, actions of the X to drive component 61, Y-direction drive component 62 can be realized by operating corresponding regulating wheel then.
In the present embodiment, in order to realize automatic works of the X to drive component 61, Y-direction drive component 62, it has been correspondingly arranged for driving X
The first driver 71 acted to drive component 61 and the second driver for driving Y-direction drive component 62 to be acted
72, the first driver 71 is electrically connected with control circuit board respectively with the second driver 72.The first driver 71 in the present embodiment
Including first motor 711 and be connected to first motor 711 drive end first gear 712, the second driver 72 include second
Motor 722 and the second gear 722 for being connected to the second motor 722 driving end, wherein first motor 711 and the second motor 722
It is electrically connected respectively with control circuit board, first gear 712 and X are meshed to the corresponding regulating wheel of drive component 61, second gear
722 regulating wheels corresponding with Y-direction drive component 62 are meshed.When installation, a mounting plate is extended from objective table 3, the
One motor 711 and the second motor 722 are then fixedly mounted on a mounting board.When work, control circuit board controls 711 He of first motor
Second motor 722 works, and then X is driven to work to drive component 61, Y-direction drive component 62, corresponding realization objective table 3
Mobile adjusting on left and right directions and front-rear direction.
Position adjusting mechanism can be mounted on by being mounted in a fixed plate, and then by fixed plate on objective table 3.
The position adjusting mechanism can also be directly installed on 3 enterprising enforcement of objective table use.
Position adjusting mechanism in the present embodiment includes the support component 4 and driving support component for fixing glass slide
4 drive components 5 rotated relative to objective table 3, drive component 5 is electrically connected with control circuit board, and then drive component 5 exists
Support component 4 is driven to carry out rotational action under the control of control circuit board.
Wherein support component 4 includes the first support element and the second support element.Wherein the first support element includes being arranged at intervals on
First support arm 41 of 3 left and right sides of objective table, one end of two the first support arms 41 is rotatably connected on objective table 3.Tool
Body is that the rotational installation position corresponding to the first support arm 41 on objective table 3 can install a mounting blocks 411, Mei Ge
One support arm 41 is rotatably connected on by a shaft on a mounting blocks 411.And the length direction edge of the first support arm 41
The front-rear direction of objective table 3 extends.Second support element includes the second support arm 42 for being arranged at intervals on 3 both sides of objective table, each
One end of second support arm 42 is connected to the other end of first support arm 41, and the other end of two the second support arms 42 passes through
A piece body of rod 43 connects, in this way, two support arms can move synchronously.
In order to facilitate the installation of the body of rod 43 and drive component 5, one is equipped in the end of 42 other end of the second support arm
Fixation kit, fixation kit include being oppositely arranged on the mounting plate 32 of 42 other end both sides of the second support arm, and be connected to two
Connecting rod 33 between 32 lower end of a mounting plate, the body of rod 43 are threaded through in 42 other end of the second support arm and pass through two mounting plates
32,42 other end of the second support arm is reserved with the mounting groove for installing following driving wheels 52, and the body of rod 43 also passes through following transmissions
Wheel 52 so that driving wheel 52 is rotated for shaft relative to the second support arm 42 with the body of rod 43.Following motors 54 is then solid
Dingan County is on a mounting plate 32, as mounting plate 32 moves.It is following in order to provide guiding for the trend of the second support arm 42
The lower section of rack 51 offer the guide groove 31 being placed in for connecting rod, the row of the distance of guide groove 31 and 42 other end of the second support arm
Journey matches.
Drive component 5 drives the other end of second support arm 42, and then can drive the second end of the second support element
It is moved forward and backward, so that the first support element, the second support element are with the other end of the first support arm 41 and the second support arm 42
The tie point of one end can rotate for fulcrum and while relative motion relative to objective table 3.First support element or second
The fixing piece 44 for fixing glass slide is provided on the upper surface of support element.Fixing piece 44 in the present embodiment is connected to first
The upper surface of support arm 41, the fixing piece 44 is L-shaped, then then forming one between fixing piece 44 and the first support arm 41 can block
Enter the slot of glass slide, the both ends of glass slide are stuck on the fixing piece 44 on two the first support arms 41, and then are realized and carried glass
Fixation of the piece in support component 4.
Due to being spaced setting between two the first support arms, 41, two the second support arms 42, while glass slide is fixed on two
Between a first support arm 41, then the position between two the first support arms, 41, two the second support arms 42 forms glass slide
There is a transparent area, the light of light source 13 can impinge upon on glass slide in microscope ontology, and then realize observation.
Drive component 5 includes rack 51, driving wheel 52, gear 53 and motor 54, and wherein motor 54 can be fixedly mounted
On the body of rod 43 between two the second support arms 42, and motor 54 is electrically connected with control circuit board, and then motor 54 is being controlled
It works under the control of circuit board processed.Rack 51 in the present embodiment includes two, is set along the longitudinal direction per toothed rack 51
It sets on objective table 3 and matches with the walking path of the other end of second support arm 42, gear 53 is connected to motor
54 driving end, is rotatablely connected a driving wheel 52 on the other end of each second support arm 42, driving wheel 52 and gear 53 with
And the engagement connection of rack 51, and then drive gear 53 to rotate by motor 54, and then driving wheel 52 is driven to be rotated, Jin Ershi
Existing back-and-forth motion of the driving wheel 52 on rack 51, realizes the front and back driving to the second actuating arm other end, can so realize
Rotation of first actuating arm relative to 3 plane of objective table, so by object lens 12 it is observed that micro-structure is different on glass slide
The image of angle.By adjusting the position that glass slide is placed, glass slide can such as be faced up relative to object lens 12 and just be put,
It faces up and puts upside down, face down and just put, face down and put upside down, and then by micro- under glass slide difference placement location
Comprehensive observation to micro-structure 3D shapes is realized in the observation of structure multi-angle.
3D micro-structure observation device in the present invention will not additionally increase the storage volume of microscope ontology, be convenient for carrying,
The 3D micro-structure observation device can be carried to any desired place and be used, other component is carried without additional.Separately
Outside, which is that additional increased component is less on existing microscope ontology and simply easily realizes, manufacture
It is at low cost, it can be used for factory's volume production, can also voluntarily be transformed structure of modification.
In addition the observation procedure of the 3D micro-structure observation device, specifically includes following steps：
The distributed areas of S1, mark on glass slide micro-structure, in the present embodiment i.e. around the distributed areas of micro-structure
Rectangle frame is marked, and notch is respectively provided on four sides of rectangle frame, so in glass slide as position adjusting mechanism is turned
In dynamic process, object lens 12 is facilitated to be observed the side of micro-structure, i.e., notch leaves the laterally observed region of micro-structure；
Then the glass slide for being loaded with micro-structure and labeled cavity disperse characteristic region is placed on position adjusting mechanism, this
In embodiment, i.e., glass slide is placed on the fixing piece 44 of two the first support arms 41, realizes that glass slide adjusts machine in position
Placement on structure, and in the present embodiment, initial observation position is：In level between first support arm 41 and the second support arm 42
Angle between shape state, i.e. the first support arm 41 and the second support arm 42 is 180 °；
S2, position adjusting mechanism work, adjust placed angle of the glass slide relative to objective table 3；Glass slide is initially in
Horizontality, then in the course of work, motor 54 is rotated with moving gear 53, gear 53 and then 52 turns of driving wheel of driving
Dynamic, the driving wheel 52 made is moved backward relative to rack 51, is driven glass slide often to turn to a new angle and is carried out once
Observation, until angle between the first support arm 41 and the second support arm 42 becomes 90 °, i.e., glass slide state in a vertical shape when tie
Beam；
When S3, observation, control circuit board control coarse adjustment motor 811 works, and then drives the thick standard in focusing component
Burnt spiral 21 is rotated, while observing component acquisition observed image, and the observed image of acquisition is sent to control circuit board
In；
S4, when being observed to the glass slide on initial position, whether there is in the image of control circuit plate analysis observation
Tag image, if it is not, then carrying out S5；If it is, carrying out S6；
S5, control circuit board control first motor 711 and the second motor 722 work, and then control objective table and adjust
Component operation drives the glass slide for being loaded with micro-structure to carry out left and right and/back-and-forth motion, until in the observation chart of observation component acquisition
There are tag images as in；By S4 and S5, the general distributed areas of micro-structure can be quickly found out, observation speed faster, after
Continuous glass slide, since control circuit board controls the rotation of motor 54, it is accurate can to obtain motor 54 in carrying out rotation process
Operational data, you can the displacement distance for obtaining glass slide is calculated, it can be by accurately adjusting the mobile data of objective table 3, Jin Erfang
Just object lens 12 quickly search out the distributed areas of micro-structure, are found to the distributed areas of micro-structure without being required for every time,
Substantially increase observation speed；
S6, control circuit board control first motor 711 and the second motor 722 work, and control objective table adjusting part
Work, drives the glass slide for being loaded with micro-structure to carry out annular microspur movement, drives glass slide to carry out rectangle in the present embodiment micro-
Away from movement, while component acquisition observed image is observed, and the observed image of acquisition is sent in control circuit board, control circuit
There are the blurred pictures of micro-structure in the image of plate analysis observation；
S7, control circuit board control fine tuning motor 821 work, and then control the thin accurate burnt spiral 22 in focusing component
It is rotated, until micro-structure clearly image occurs in the observed image driven in control circuit board from observation component；
S8, by micro-structure, clearly image and glass slide are stored relative to the placed angle of objective table 3；
S9, cycle carry out S2, S3, S6, S7, S8 until obtain glass slide relative to 3 all placed angles of objective table when
Microstructure image.
In aforementioned process, the structural images in 90 ° of angle changings of micro-structure on glass slide can be obtained, it is micro- in order to obtain
Glass slide can be faced up relative to object lens 12 and just put, faces up and put upside down, faces down simultaneously by the 3D rendering of structure
It just puts, face down and put upside down, glass slide is then overturn 90 ° clockwise or counter-clockwise along plane where glass slide again, into
And observation procedure above-mentioned, which is respectively adopted, using modes of emplacement above-mentioned obtains the image of micro-structure multi-angle again, and then pass through control
Circuit board or computer processed handle all observed images of micro-structure, and then obtain the 3D forms and tool of micro-structure
The dimensional parameters of body.
Embodiment two
As shown in Fig. 2, the present embodiment and embodiment one differ only in：Support component 4 include two support plates 44 with
And two clips 45, two support plates 44 upwardly extend setting, the inside of each support plate 44 from 3 left and right sides of objective table respectively
A clip 45 is rotatablely connected on face, each clip 45 is rotatably connected on by a shaft in support plate 44.It is loaded with micro-structure
Glass slide energy fixed clamp between two clips 45.
Drive component 5 includes then driving motor 55, driving wheel 56 and driven wheel 57, and driving motor 55 is electric with control circuit board
Connection.Driving wheel 56 is connected to the driving end of driving motor 55, and the fixation of driven wheel 57 is set in shaft, driven wheel 57 and active
56 engagement connection of wheel.When work, driving motor 55 respectively drives a clip 45 and is rotated, and then drives and be loaded with micro-structure
Glass slide carries out 360 ° of rotations relative to objective table 3.
When being specifically observed, the initial position after glass slide is clamped on clip 45 is in horizontal position, passes through loading
After getting the blurred picture of micro-structure under the work of platform adjusting part and thick accurate burnt spiral 21, then no longer need to carry out loading
The adjusting of platform 3, in the rotation process of glass slide, it is only necessary to which adjusting thick accurate burnt spiral 21 and thin accurate burnt spiral 22 can obtain
The image of each angle of micro-structure.Then by glass slide, the plane where the glass slide overturns 90 ° clockwise or counter-clockwise again, then
Glass slide is clamped in the observation of 360 ° of progress on clip 45, so can finally calculate the 3D forms and tool for obtaining micro-structure
The dimensional parameters of body.
Position adjusting mechanism in the present embodiment is simpler, and observation process is also easier.
Claims (9)
1. a kind of 3D micro-structure observation device, including microscope ontology, the microscope ontology includes observation component, focusing group
Part, objective table (3) and the objective table (3) can be driven into the objective table adjusting part of action；
It is characterized in that：Further include control circuit board and the position for driving the glass slide progress rotational motion for being loaded with micro-structure
Regulating mechanism is set, the position adjusting mechanism is arranged on the objective table (3)；
The position adjusting mechanism includes for fixing the support component of the glass slide (4) and the driving support component
(4) drive component (5) rotated relative to objective table (3), the driving component (5) are electrically connected with the control circuit board
It connects；
The observation component is electrically connected with control circuit board.
2. 3D micro-structure observation device according to claim 1, it is characterised in that：The support component (4) includes first
One end of support element and the second support element, first support element is rotatably connected on objective table (3), second support element
One end is rotatably connected on the other end of the first support element, and the driving component (5) and the other end of second support element drive
Connection, the driving component (5) drive the second support element second end be moved forward and backward so that the first support element, second
Support member rotates with respect to objective table (3), is provided on the upper surface of first support element or the second support element for fixing
The fixing piece of glass slide, the fixed area that glass slide is corresponded on first support element and/or the second support element are provided with
Light area.
3. 3D micro-structure observation device according to claim 2, it is characterised in that：First support element includes setting respectively
The first support arm (41) at left and right sides of objective table (3) is set, one end of two the first support arms (41) is rotatably connected on load
On object platform (3)；
Second support element includes the second support arm (42) for being separately positioned on objective table (3) both sides, each second support arm
(42) one end is connected to the other end of first support arm (41), and the other end of two the second support arms (42) passes through one
The body of rod (43) connects, and drive component (5) drives the other end of second support arm (42).
4. 3D micro-structure observation device according to claim 2 or 3, it is characterised in that：The driving component (5) includes tooth
Item (51), driving wheel (52), gear (53) and motor (54), the motor (54) are electrically connected with control circuit board, the tooth
Item (51) is arranged corresponding to the second support element on objective table (3) along the longitudinal direction, and the gear (53) is connected to motor (54)
Driving end, the driving wheel (52) is rotatably connected on the other end of the second support element, the driving wheel (52) and gear
(53) and rack (51) engagement connects.
5. 3D micro-structure observation device according to claim 1, it is characterised in that：The support component (4) includes two
Support plate (44) and two clips (45), two support plates (44) upwardly extend setting from left and right sides of objective table (3) respectively,
It is rotatablely connected a clip (45) on the medial surface of each support plate (44), the glass slide energy fixed clamp is pressed from both sides at two
Between sub (45).
6. 3D micro-structure observation device according to claim 5, it is characterised in that：Each clip (45) passes through a shaft
It is rotatably connected in support plate (44)；
The driving component (5) includes driving motor (55), driving wheel (56) and driven wheel (57), the driving motor (55) with
Control circuit board is electrically connected, and the driving wheel (56) is connected to the driving end of driving motor (55), and the driven wheel (57) is fixed
It is set in shaft, the driven wheel (57) engages connection with driving wheel (56).
7. 3D micro-structure observation device according to claim 1, it is characterised in that：The objective table adjusting part includes using
It is moved forward and backward to drive component (61) and for driving objective table (3) in the X that driving objective table (3) is moved left and right
Y-direction drive component (62)；
It further include the first driver (71) for driving X to be acted to drive component (61) and for driving Y-direction driving group
The second driver (72) that part (62) is acted, first driver (71) are electric with control respectively with the second driver (72)
Road plate electrical connection.
8. 3D micro-structure observation device according to claim 1, it is characterised in that：The focusing component includes thick accurate burnt spiral shell
Revolve (21) and thin accurate burnt spiral (22)；
Further include for driving the slightly coarse adjustment driver (81) of accurate burnt spiral (21) and for driving thin quasi- coke spiral (22)
Fine tuning driver (82), the coarse adjustment driver (81) and fine tuning driver (82) are electrically connected with control circuit board respectively.
9. a kind of observation procedure of 3D micro-structure observation device, it is characterised in that：Include the following steps：
The distributed areas of S1, mark on glass slide micro-structure, and there is notch for reserving micro-structure on the label
Laterally observed region；
S2, position adjusting mechanism work, adjust placed angle of the glass slide relative to objective table (3)；
Thick accurate burnt spiral (21) in S3, focusing component is rotated, while observing component acquisition observed image, and by acquisition
Observed image is sent in control circuit board；
It whether there is tag image in the image that S4, control circuit plate analysis are observed, if it is not, then carrying out S5；If it is, into
Row S6；
S5, the work of objective table adjusting part, drive the glass slide for being loaded with micro-structure to carry out left and right and/back-and-forth motion, until seeing
There are tag images in the observed image of survey component acquisition；
S6, the work of objective table adjusting part drive the glass slide for being loaded with micro-structure to carry out annular microspur movement, while observing component
Observed image is acquired, and the observed image of acquisition is sent in control circuit board, in the image of control circuit plate analysis observation
There are the blurred pictures of micro-structure；
Thin accurate burnt spiral (22) in S7, focusing component is rotated, until being driven in control circuit board from observation component
There is micro-structure clearly image in observed image；
S8, by micro-structure, clearly image and glass slide are stored relative to the placed angle of objective table (3)；
S9, cycle carry out S2, S3, S6, S7, S8 until micro- when obtaining glass slide relative to objective table (3) all placed angles
Structural images.
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