CN108584285A - A kind of stand alone type wafer detection and selection machine feeding mechanism and detection and selection machine - Google Patents

A kind of stand alone type wafer detection and selection machine feeding mechanism and detection and selection machine Download PDF

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Publication number
CN108584285A
CN108584285A CN201810650285.1A CN201810650285A CN108584285A CN 108584285 A CN108584285 A CN 108584285A CN 201810650285 A CN201810650285 A CN 201810650285A CN 108584285 A CN108584285 A CN 108584285A
Authority
CN
China
Prior art keywords
detection
feeder
selection machine
slide plate
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810650285.1A
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Chinese (zh)
Inventor
张乔栋
袁泉
陈业
朱威莉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Nepes Semiconductor Co Ltd
Original Assignee
Jiangsu Nepes Semiconductor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Nepes Semiconductor Co Ltd filed Critical Jiangsu Nepes Semiconductor Co Ltd
Priority to CN201810650285.1A priority Critical patent/CN108584285A/en
Publication of CN108584285A publication Critical patent/CN108584285A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/22Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising a series of co-operating units
    • B65G15/24Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising a series of co-operating units in tandem
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/30Belts or like endless load-carriers
    • B65G15/58Belts or like endless load-carriers with means for holding or retaining the loads in fixed position, e.g. magnetic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/34Devices for discharging articles or materials from conveyor 
    • B65G47/44Arrangements or applications of hoppers or chutes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention discloses a kind of free-standing wafer detection and selection machine feeding mechanism and detection and selection machines, including bindiny mechanism and position-limit mechanism, the bindiny mechanism includes feeder, described feeder one end is equipped with slide plate by snap fit, the slide plate is equipped with fixture block towards one end of feeder, and the feeder side is equipped with fixing groove compatible with fixture block, the sled surface both sides are equipped with baffle b, and the bottoms the baffle b are bolted relative to fixture block side equipped with fastening bolt;By being equipped with slide plate in feeder one end, pass through the telescopic effect of expansion plate, detection and selection machine convenient for feeder and different size is attached, the off-gauge because of feeder and detection and selection machine is avoided, wafer is caused to be fallen during transport, effectively reduces cost for user, and improve the working efficiency of feeder, by being equipped with limit conveyer belt at the top of feeder the stability of wafer during transport is effectively raised using limiting slot to the limit effect of wafer.

Description

A kind of stand alone type wafer detection and selection machine feeding mechanism and detection and selection machine
Technical field
The invention belongs to conveyer technical fields, and in particular to a kind of stand alone type wafer detection and selection machine feeding mechanism and pick Machine.
Background technology
With a long history, the overturning of high the rotating cylinder vehicle and water lift of ancient Chinese of conveyer is modern bucket elevator and is scraped The blank of plate conveyer.Ribbon conveyer is the major way of current bulk material conveying.The conveyer system of modernization is to anti- Dirt has higher requirement, for this purpose, being equipped with the device of watering dust at each switching, can be equipped with along rubber conveyer windproof Cover or wind shield, system are made of single machine, should be based on for the operation to work in machine system and mender The single machine oneself being in charge of, connecting each other between understanding system again, single machine is made of many components again, is only carried out each The daily maintenance of component, is at good working order, just can ensure that the safe operation of equipment, existing wafer inspection Machine conveyer is selected to can transport eight inch wafers and 12 inch wafers.
However there are still some shortcomings, existing crystalline substances during use for existing wafer detection and selection machine feeding mechanism Circle detection and selection machine feeding mechanism is when in use:
1. existing wafer detection and selection machine feeding mechanism is during use, for the wafer detection and selection machine of different size, it is not easy to Wafer is smoothly transported to the suitable position of wafer detection and selection machine by feed mechanism, and wafer may be made to dissipate during conveying It falls, or even leads to wafer compromised quality because falling, not only influence the working efficiency of feed mechanism, also add using burden.
2. existing wafer detection and selection machine feeding mechanism is during use because wafer be round shape object and specification compared with It is small so that wafer will produce displacement during transport, and be packed together so that wafer detection and selection machine is carrying out pick work When be more troublesome, reduce the working efficiency of wafer detection and selection machine.
Invention content
The purpose of the present invention is to provide a kind of free-standing wafer detection and selection machine feeding mechanism and detection and selection machines, to solve the above-mentioned back of the body Existing wafer detection and selection machine feeding mechanism is proposed in scape technology during use, for the wafer detection and selection machine of different size, It is not easy to feed mechanism and wafer is smoothly transported to the suitable position of wafer detection and selection machine, may make to justify during conveying Crystalline substance is scattered, or even leads to wafer compromised quality because falling, and not only influences the working efficiency of feed mechanism, also adds using negative Load, existing wafer detection and selection machine feeding mechanism during use because wafer is round shape object and specification is smaller so that brilliant Circle will produce displacement during transport, and be packed together so that wafer detection and selection machine is more numb when carrying out pick work The problem of being tired of, reducing the working efficiency of wafer detection and selection machine.
To achieve the above object, the present invention provides the following technical solutions:It is a kind of stand alone type wafer detection and selection machine feeding mechanism and Detection and selection machine, including bindiny mechanism and position-limit mechanism, the bindiny mechanism include feeder, and described feeder one end passes through engaging side Formula is equipped with slide plate, and the slide plate is equipped with fixture block towards one end of feeder, and the feeder side is equipped with and is adapted with fixture block Fixing groove, the sled surface both sides be equipped with baffle b, the bottoms the baffle b are bolted relative to fixture block side and set There are fastening bolt, the slide plate to be equipped with connecting plate away from one end of fixture block, described connecting plate one end is internally provided with relative to slide plate Expansion plate, the feeder top are equipped with baffle a at both sides of the edge, have been bolted outside the feeder side electronic Cabinet, the feeder bottom four corners are equipped with feeding machine support, and the connecting plate side is equipped with detection and selection machine, and the connecting plate bottom Portion is equipped with workbench relative to detection and selection machine side, and the workbench side is equipped with button relative to detection and selection machine surface.
Preferably, the position-limit mechanism includes limit conveyer belt, is bolted and is equipped with inside the limit conveyer belt Several rubber strips, and limit conveying is composed with several rubber strips, the rubber belt surface is equipped with integral type The limiting slot of structure, connection sheet is equipped between the rubber strip, and the connection sheet surface is equipped with the bolt hole of integral structure.
Preferably, the outer wall of the expansion plate connects with the inner wall of slide plate, the fastening bolt totally two, in slide plate Both sides, position correspond, and the fastening bolt can squeeze expansion plate side by rotating clockwise.
Preferably, the limit conveyer belt is formed by connecting by 20 rubber strips, and is seamless company between the rubber strip It connects.
Preferably, the cross section of the limiting slot is the circular configuration of 13 inches of diameter, and the limiting slot is with three lis Rice is spaced substantially equidistant in rubber belt surface.
Compared with prior art, the beneficial effects of the invention are as follows:
1. by being equipped with slide plate in feeder one end, by the telescopic effect of expansion plate, it is convenient for the inspection of feeder and different size It selects machine to be attached, avoids the off-gauge because of feeder and detection and selection machine, cause wafer to be fallen during transport, effectively Being user reduces cost, and improves the working efficiency of feeder;
2. being effectively raised using limiting slot to the limit effect of wafer by being equipped with limit conveyer belt at the top of feeder The stability of wafer during transport avoids wafer because olistostrome is to together, to reduce the working efficiency of detection and selection machine.
Description of the drawings
Fig. 1 is the structural diagram of the present invention;
Fig. 2 is the structural schematic diagram of connecting plate of the present invention;
Fig. 3 is the plan view of connecting plate of the present invention;
Fig. 4 is the structural schematic diagram of present invention limit conveyer belt;
In figure:1, detection and selection machine;2, button;3, workbench;4, slide plate;5, conveyer belt is limited;6, electric case;7, baffle a;8, it send Expect machine support;9, expansion plate;10, baffle b;11, connecting plate;12, fixture block;13, fastening bolt;14, limiting slot;15, connection sheet; 16, rubber strip;17, bolt hole;18, feeder.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
- Fig. 4 is please referred to Fig.1, the present invention provides a kind of technical solution:A kind of stand alone type wafer detection and selection machine feeding mechanism and inspection It includes feeder 18 to select machine, including bindiny mechanism and position-limit mechanism, bindiny mechanism, and 18 one end of feeder is equipped with by snap fit Slide plate 4, slide plate 4 is equipped with fixture block 12 towards one end of feeder 18, and 18 side of feeder is equipped with compatible with fixture block 12 solid Determine slot, 4 surface both sides of slide plate are equipped with baffle b10, and the bottoms baffle b10 are bolted relative to 12 side of fixture block equipped with fastening Bolt 13, slide plate 4 are equipped with connecting plate 11 away from one end of fixture block 12, and 11 one end of connecting plate is internally provided with flexible relative to slide plate 4 Plate 9 is equipped with baffle a7 at 18 top both sides of the edge of feeder, and feeder has been bolted electric case 6 outside 18 side, 18 bottom four corners of feeder be equipped with feeding machine support 8,11 side of connecting plate be equipped with detection and selection machine 1, and 11 bottom of connecting plate relative to 1 side of detection and selection machine is equipped with workbench 3, and 3 side of workbench is equipped with button 2 relative to 1 surface of detection and selection machine.
For the ease of connection feeder 18 and detection and selection machine 1, in the present embodiment, it is preferred that position-limit mechanism includes that limit conveys Band 5 is limited and is bolted inside conveyer belt 5 equipped with several rubber strips 16, and limit conveyer belt 5 has several rubber strips 16 are composed, and 16 surface of rubber strip is equipped with the limiting slot 14 of integral structure, and connection sheet 15, connection are equipped between rubber strip 16 15 surface of piece is equipped with the bolt hole 17 of integral structure.
For the ease of the length of adjusting slider 4, in the present embodiment, it is preferred that the inner wall of the outer wall and slide plate 4 of expansion plate 9 Connect, fastening bolt 13 totally two is in the both sides of slide plate 4, and position corresponds, and fastening bolt 13 can be by revolving clockwise Turn to squeeze 9 side of expansion plate.
For the ease of installing, dismantling limit conveyer belt 5, in the present embodiment, it is preferred that limit conveyer belt 5 is by 20 rubbers Adhesive tape 16 is formed by connecting, and is seamless connection between rubber strip 16.
For the ease of being limited to wafer during transport, in the present embodiment, it is preferred that limiting slot 14 it is transversal Face is the circular configuration of 13 inches of diameter, and limiting slot 14 is spaced substantially equidistant with three centimetres on 16 surface of rubber strip.
The operation principle and process for using of the present invention:By being equipped with slide plate 4 in 18 one end of feeder, and in slide plate 4 Portion is equipped with expansion plate 9, by rotating clockwise fastening bolt 13 so that fastening bolt 13 is moved and carried out to 9 side of expansion plate It squeezes and fixes, by being equipped with limit conveyer belt 5 at 18 top of feeder, and make limit conveyer belt 5 by 20 rubber strips 16, by the bolt hole 17 on 15 surface of connection sheet, be bolted, convenient for the dismounting of limit conveyer belt 5, installation, and 16 surface of rubber strip is equipped with limiting slot 14, and limit effect is played in the blocking by 14 surrounding of limiting slot to wafer.
After feeder 18 is moved to suitable position, slide plate 4 is connected together by fixture block 12 and feeder 18, Then by rotational fastener bolt 13 counterclockwise, and expansion plate 9 is pulled out so that connecting plate 11 connects with workbench 3, and suitable Hour hands rotational fastener bolt 13 is fixed until expansion plate 9, then wafer is placed into inside limiting slot 14, and open feeder 18 With detection and selection machine 1.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with Understanding without departing from the principles and spirit of the present invention can carry out these embodiments a variety of variations, modification, replace And modification, the scope of the present invention is defined by the appended.

Claims (5)

1. a kind of stand alone type wafer detection and selection machine feeding mechanism and detection and selection machine, including bindiny mechanism and position-limit mechanism, it is characterised in that: The bindiny mechanism includes feeder(18), the feeder(18)One end is equipped with slide plate by snap fit(4), the slide plate (4)Towards feeder(18)One end be equipped with fixture block(12), and the feeder(18)Side is equipped with and fixture block(12)It is adapted Fixing groove, the slide plate(4)Surface both sides are equipped with baffle b(10), the baffle b(10)Bottom is relative to fixture block(12)Side It is bolted and is equipped with fastening bolt(13), the slide plate(4)Away from fixture block(12)One end be equipped with connecting plate(11), described Connecting plate(11)One end is relative to slide plate(4)It is internally provided with expansion plate(9), the feeder(18)Top is equipped at both sides of the edge Baffle a(7), the feeder(18)Electric case has been bolted outside side(6), the feeder(18)Bottom four Angle is equipped with feeding machine support(8), the connecting plate(11)Side is equipped with detection and selection machine(1), and the connecting plate(11)Bottom is opposite In detection and selection machine(1)Side is equipped with workbench(3), the workbench(3)Side is relative to detection and selection machine(1)Surface is equipped with button(2).
2. a kind of free-standing wafer detection and selection machine feeding mechanism according to claim 1 and detection and selection machine, it is characterised in that:It is described Position-limit mechanism includes limit conveyer belt(5), the limit conveyer belt(5)Inside is bolted equipped with several rubber strips (16), and the limit conveyer belt(5)There are several rubber strips(16)It is composed, the rubber strip(16)Surface is equipped with one The limiting slot of formula structure(14), the rubber strip(16)Between be equipped with connection sheet(15), the connection sheet(15)Surface is equipped with one The bolt hole of body formula structure(17).
3. a kind of free-standing wafer detection and selection machine feeding mechanism according to claim 1 and detection and selection machine, it is characterised in that:It is described Expansion plate(9)Outer wall and slide plate(4)Inner wall connect, the fastening bolt(13)Totally two, it is in slide plate(4)Both sides, Position corresponds, and the fastening bolt(13)It can be by rotating clockwise extruding expansion plate(9)Side.
4. a kind of free-standing wafer detection and selection machine feeding mechanism according to claim 2 and detection and selection machine, it is characterised in that:It is described Limit conveyer belt(5)By 20 rubber strips(16)It is formed by connecting, and the rubber strip(16)Between for be seamlessly connected.
5. a kind of free-standing wafer detection and selection machine feeding mechanism according to claim 4 and detection and selection machine, it is characterised in that:It is described Limiting slot(14)Cross section be 13 inches of diameter circular configuration, and the limiting slot(14)It is spaced substantially equidistant with three centimetres In rubber strip(16)Surface.
CN201810650285.1A 2018-06-22 2018-06-22 A kind of stand alone type wafer detection and selection machine feeding mechanism and detection and selection machine Pending CN108584285A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810650285.1A CN108584285A (en) 2018-06-22 2018-06-22 A kind of stand alone type wafer detection and selection machine feeding mechanism and detection and selection machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810650285.1A CN108584285A (en) 2018-06-22 2018-06-22 A kind of stand alone type wafer detection and selection machine feeding mechanism and detection and selection machine

Publications (1)

Publication Number Publication Date
CN108584285A true CN108584285A (en) 2018-09-28

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Application Number Title Priority Date Filing Date
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110371578A (en) * 2019-06-25 2019-10-25 盐城永鑫机械有限公司 A kind of processing of front axle housing body transport device and transportation resources
CN112298900A (en) * 2019-08-01 2021-02-02 因特利格雷特总部有限责任公司 Multi-belt conveyor system with removable cartridges
CN115167079A (en) * 2022-07-20 2022-10-11 江苏晶杰光电科技有限公司 Wafer conveying device of photoetching machine

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110371578A (en) * 2019-06-25 2019-10-25 盐城永鑫机械有限公司 A kind of processing of front axle housing body transport device and transportation resources
CN112298900A (en) * 2019-08-01 2021-02-02 因特利格雷特总部有限责任公司 Multi-belt conveyor system with removable cartridges
US11584591B2 (en) 2019-08-01 2023-02-21 Intelligrated Headquarters, Llc Multi-belt conveyor system with removable cartridges
CN115167079A (en) * 2022-07-20 2022-10-11 江苏晶杰光电科技有限公司 Wafer conveying device of photoetching machine
CN115167079B (en) * 2022-07-20 2023-10-27 江苏晶杰光电科技有限公司 Wafer conveying device of photoetching machine

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Application publication date: 20180928