CN108580445A - A kind of cleaning device and cleaning method of power battery head cover - Google Patents

A kind of cleaning device and cleaning method of power battery head cover Download PDF

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Publication number
CN108580445A
CN108580445A CN201810699371.1A CN201810699371A CN108580445A CN 108580445 A CN108580445 A CN 108580445A CN 201810699371 A CN201810699371 A CN 201810699371A CN 108580445 A CN108580445 A CN 108580445A
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CN
China
Prior art keywords
power battery
cleaning
head cover
plasma
cleaning chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810699371.1A
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Chinese (zh)
Inventor
覃涛
王亚
汤守巧
韩玮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Zenergy Battery Technologies Co ltd
Original Assignee
Dongguan Tafel New Energy Technology Co Ltd
Jiangsu Tafel New Energy Technology Co Ltd
Shenzhen Tafel New Energy Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dongguan Tafel New Energy Technology Co Ltd, Jiangsu Tafel New Energy Technology Co Ltd, Shenzhen Tafel New Energy Technology Co Ltd filed Critical Dongguan Tafel New Energy Technology Co Ltd
Priority to CN201810699371.1A priority Critical patent/CN108580445A/en
Publication of CN108580445A publication Critical patent/CN108580445A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M50/00Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
    • H01M50/10Primary casings; Jackets or wrappings
    • H01M50/147Lids or covers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Cleaning In General (AREA)

Abstract

The invention belongs to cleaning device technical fields, more particularly to a kind of cleaning device of power battery head cover, include the plasma cleaning mechanism (1) for cleaning power battery head cover and the conveyer (2) for transporting power battery to the plasma cleaning mechanism (1), the plasma cleaning mechanism (1) includes the cleaning chamber (11) coordinated with power battery and the plasma generator (12) that is connected to the cleaning chamber (11).The present invention can clean on power battery head cover the floating powder for carrying charge, and not damage power battery, while realize automation cleaning, human contact is avoided to influence cleaning performance, production efficiency is improved, and prevents from generating burst point in welding process, improves the quality of power battery.In addition, the invention also discloses a kind of cleaning methods of power battery head cover.

Description

A kind of cleaning device and cleaning method of power battery head cover
Technical field
The invention belongs to cleaning device technical fields, and in particular to a kind of cleaning device of power battery head cover and cleaning side Method.
Background technology
Along with the arriving of information-based cyberage, energy source use form is changing, renewable, pollution-free, Small-sized discrete removable high-performance power supply demand rapid growth.Each state is all greatly developing green, high efficient secondary battery.Lithium from Sub- battery as a kind of new secondary battery, have energy density and power density are big, operating voltage is high, it is light-weight, small, It has extended cycle life, the advantages that safety is good, environmentally protective, it is dynamic in portable electronics, electric tool, large-scale energy storage, electronic traffic Power power supply etc. has broad application prospects.Traditional manual cleaning way inefficiency, it is difficult to accomplish thoroughly to clean.
Wherein, Chinese patent literature discloses a kind of power battery aluminum hull Pneumatic cleaning device (publication number:CN 206981325 U), including service sink, the bottom of service sink is fixedly connected with outlet pipe, and the thread surface of outlet pipe is connected with close It covers, the first strainer is fixedly connected on the inner wall of service sink, the one side fixation of service sink is inlaid with steel pipe, the surface of steel pipe Fixation is inlaid with escape pipe, and escape pipe is located at the lower section of the first strainer, and the one side of service sink is fixedly connected with the first fixation The upper surface of plate, the first fixed plate is fixedly connected with air pump, and the gas outlet of air pump is connected by hose with the inlet end of steel pipe, The upper surface of first strainer is connected with cleaning basket.Above-mentioned scheme can remove the dirty of bulky grain to a certain extent, but It is that at least there is also following defects for this scheme:First, the floating powder with charge can not be removed, is unfavorable for welding and influences power The performance of battery, second, device energy-wasting is larger, causes production cost higher.
Invention content
It is an object of the present invention to:In view of the deficiencies of the prior art, a kind of cleaning dress of power battery head cover is provided It sets, can clean on power battery head cover and carry the floating powder of charge, and not damage power battery, while realizing that automation is clear It washes, human contact is avoided to influence cleaning performance, improve production efficiency, and prevent from generating burst point in welding process, improve power The quality of battery.
To achieve the goals above, the present invention adopts the following technical scheme that:
A kind of cleaning device of power battery head cover includes plasma cleaning mechanism for cleaning power battery head cover and is used for Power battery is transported to the conveyer of the plasma cleaning mechanism, the plasma cleaning mechanism includes matching with power battery The cleaning chamber of conjunction and the plasma generator being connected to the cleaning chamber.Plasma cleaning will not generate on power battery surface Damage, and be to be cleaned in a vacuum, ensure that cleaning surface is not secondary polluted, meanwhile, plasma cleaner compares It is relatively inexpensive, reduce production cost.
As a kind of a kind of improvement of the cleaning device of power battery head cover of the present invention, the cleaning chamber is provided with One end of input pipe, efferent duct and exhaust tube, the input pipe, the efferent duct and the exhaust tube is communicated with the cleaning The other end of chamber, the input pipe is communicated with plasma generator, and the other end of the efferent duct is communicated with reclaimer, described The other end of exhaust tube is communicated with vacuum pump, and the input pipe, the efferent duct and the exhaust tube are equipped with electronic valve.Clearly Chamber setting reclaimer is washed, the plasma after preventing the floating powder with charge dirty and cleaning causes secondary dirt to power battery Dye.
As a kind of a kind of improvement of the cleaning device of power battery head cover of the present invention, the cleaning chamber is cube One kind in structure, cylindrical structure, oval structure and sphere structure.Cleaning chamber is set as cube structure, cylindrical structure, oval knot One kind in structure and sphere structure contributing to the shape for coordinating whole device, meets the demand of battery of different shapes, improves clear The utilization rate of cleaning device.
As a kind of a kind of improvement of the cleaning device of power battery head cover of the present invention, the plasma generator Inside it is passed through at least one of argon gas, nitrogen, helium, hydrogen, purity oxygen and ozone.Argon gas, nitrogen, helium, hydrogen, purity oxygen and Ozone forms plasma by plasma generator, can be quickly by the dirty removal of power battery head cover.
As a kind of a kind of improvement of the cleaning device of power battery head cover of the present invention, on the cleaning cavity wall It is provided with the sealing structure for sealing the gap that the cleaning chamber is formed with power battery.Sealing structure contributes to form closed Space prevents the plasma dropout of cleaning intracavitary, causes to clean insufficient.
As a kind of a kind of improvement of the cleaning device of power battery head cover of the present invention, the sealing structure is close Seal.The advantages of sealing ring can prevent the case where gas leakage or leakage, and relatively low with cost, long lifespan.
As a kind of a kind of improvement of the cleaning device of power battery head cover of the present invention, the conveyer includes Lifting gear and the objective table for being installed on the lifting gear, the lifting gear include pedestal and the company that is connect with the pedestal One end of extension bar, the connecting rod connects the objective table, and the other end of the connecting rod connects lifting motor, the objective table It is provided with conveyor-belt apparatus.Objective table is realized by lifting motor to be increased and reduces, to which power battery is sent to cleaning intracavitary Cleaning, increases conveyor-belt apparatus, and the conveyer belt of stopping can prevent power battery from moving, influence cleaning performance, while conveying band logical Motor driving is crossed, after helping to realize cleaning, conveyor-belt apparatus drives power battery movement, and power battery is made to be transported to life In producing line.
As a kind of a kind of improvement of the cleaning device of power battery head cover of the present invention, the cleaning chamber passes through branch Strut is fixed on the pedestal.Cleaning chamber is fixed on pedestal, contributes to the distance for reducing power battery transport, prevents power battery It is contaminated during transport.
As a kind of a kind of improvement of the cleaning device of power battery head cover of the present invention, the cleaning chamber is provided with Control device and for monitor it is described cleaning chamber environment sensor, the plasma generator, the sensor, the electronics Valve is electrically connected with the control device, and the control device is provided with display and control button.Using control device, carry The degree of automation of high cleaning device, accurately controls scavenging period, to improve production efficiency.
The second object of the present invention is to additionally provide a kind of cleaning method of power battery head cover, include the following steps:
1) power battery is sent to by cleaning chamber by conveyer, keeps the cleaned chamber of the head cover of power battery fully wrapped around, and will Cleaning chamber vacuumizes;
2) plasma generator is opened, plasma enters cleaning intracavitary, and is cleaned to the head cover of power battery;
3) after cleaning, power battery is sent back to original position by conveyer.
In the cleaning method of the present invention, step 1) keeps the cleaned chamber of the head cover of power battery fully wrapped around, prevents cleaning chamber Interior plasma dropout, and after evacuation, form the environment of a 80Pa ~ 100Pa, plasma is contributed to clean faster The head cover of power battery, step 2) argon gas, nitrogen, helium, hydrogen, purity oxygen and ozone by plasma generator formed etc. from Son, quickly by the dirty removal of power battery head cover, since cleaning speed depends on flow and the power supply of the plasma of movement The power of equipment, the flow for cleaning intracavitary plasma is bigger, and the speed of cleaning is faster, helps to improve cleaning efficiency, meanwhile, it fits When raising power supply unit power, it helps improve the speed of cleaning, step 3)Since objective table can increase and decline, make Power battery comes back to production line, is further processed, seamless realization pipelined operation.
Description of the drawings
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the cross-sectional view that chamber is cleaned in the present invention.
Wherein:1- plasma cleanings mechanism;2- conveyers;11- cleans chamber;12- plasma generators;13- sealing knots Structure;111- input pipes;112- efferent ducts;113- exhaust tubes;114- control devices;115- sensors;1141- displays;1142- Control button;21- lifting gears;22- objective tables;211- pedestals;212- connecting rods;6- reclaimers;7- vacuum pumps;8- electronics Valve;9- lifting motors;10- supporting rods.
Specific implementation mode
Some vocabulary has such as been used to censure specific components in specification and claim.Those skilled in the art answer It is understood that hardware manufacturer may call the same component with different nouns.This specification and claims are not with name The difference of title is used as the mode for distinguishing component, but is used as the criterion of differentiation with the difference of component functionally.Such as logical The "comprising" of piece specification and claim mentioned in is an open language, therefore should be construed to " include but do not limit In "." substantially " refer in acceptable error range, those skilled in the art can solve technology within a certain error range Problem basically reaches technique effect.
In the description of the present invention, it is to be understood that, term "upper", "lower", "front", "rear", "left", "right", level " The orientation or positional relationship of equal instructions is to be based on the orientation or positional relationship shown in the drawings, be merely for convenience of the description present invention and Simplify description, does not indicate or imply the indicated device or element must have a particular orientation, with specific azimuth configuration And operation, therefore be not considered as limiting the invention.
In invention unless specifically defined or limited otherwise, the arts such as term " installation ", " connected ", " connection ", " fixation " Language shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected;It can be machine Tool connects, and can also be electrical connection;It can be directly connected, can also can be indirectly connected through an intermediary two members Connection inside part.For the ordinary skill in the art, above-mentioned term can be understood in this hair as the case may be Concrete meaning in bright.
Below in conjunction with attached drawing, invention is further described in detail, but not as a limitation of the invention.
Embodiment 1
As shown in Figure 1 and 2, a kind of cleaning device of power battery head cover includes clear for cleaning the plasma of power battery head cover Washing machine structure 1 and conveyer 2 for transporting power battery to plasma cleaning mechanism 1, plasma cleaning mechanism 1 include and move The cleaning chamber 11 of power battery cooperation and the plasma generator 12 being connected to cleaning chamber 11, cleaning chamber 11 are provided with input pipe 111, one end of efferent duct 112 and exhaust tube 113, input pipe 111, efferent duct 112 and exhaust tube 113 is communicated with cleaning chamber 11, The other end of input pipe 111 is communicated with plasma generator 12, and the other end of efferent duct 112 is communicated with reclaimer 6, exhaust tube 113 other end is communicated with vacuum pump 7, and input pipe 111, efferent duct 112 and exhaust tube 113 are equipped with electronic valve 8.Plasma Wiper mechanism 1 will not generate damage on power battery surface, and be cleaned in the cleaning chamber 11 of vacuum, ensure cleaning Surface is not secondary polluted, meanwhile, plasma cleaner is relatively inexpensive, reduces production cost, the cleaning setting recycling of chamber 11 Equipment 6, the plasma after preventing the floating powder with charge dirty and cleaning cause secondary pollution to power battery.
Preferably, cleaning chamber 11 is cube structure, and argon gas is passed through in plasma generator 12.Cleaning chamber 11 is cube knot Structure contributes to the power battery for coordinating cube, argon gas to form plasma by plasma generator 12, and argon gas is easier to obtain, Production cost is reduced, and argon gas is inert gas, is not reacted with power battery generation.
Preferably, the sealing being provided on 11 inner wall of chamber for sealing the gap that cleaning chamber 11 is formed with power battery is cleaned Structure 13, sealing structure 13 are sealing ring.Sealing structure 13 contributes to form confined space, prevents the plasma in cleaning chamber 11 Leakage causes to clean insufficient, the case where sealing ring can prevent gas leakage or leakage, and relatively low with cost, long lifespan it is excellent Point.
The conveyer 2 of the present invention includes lifting gear 21 and the objective table 22 for being installed on lifting gear 21, lifting gear 21 include pedestal 211 and the connecting rod 212 being connect with pedestal 211, and one end of connecting rod 212 connects objective table 22, connecting rod 212 The other end connect lifting motor 9, objective table 22 is provided with conveyor-belt apparatus 221, and cleaning chamber 11 is fixed on by supporting rod 10 Pedestal 211.Objective table 22 is realized by lifting motor 9 to be increased and reduces, to which power battery is sent to cleaning in cleaning chamber 11, Increase conveyor-belt apparatus 221, the conveyer belt of stopping can prevent power battery from moving, influence cleaning performance, while conveyer belt passes through Motor drives, and is controlled by control device 114, and after helping to realize cleaning, conveyor-belt apparatus drives power battery It is mobile, so that power battery is transported on production line.
Preferably, cleaning chamber 11 is provided with control device 114 and the sensor 115 for monitoring cleaning 11 environment of chamber, etc. Ion generator 12, sensor 115, electronic valve 8 are electrically connected with control device 114, and control device 114 is provided with display 1141 and control button 1142.Using control device 114, the degree of automation of cleaning device is improved, scavenging period is accurately controlled, To improve production efficiency.
Embodiment 2
As different from Example 1:The cleaning chamber 11 of the present embodiment is cylindrical structure, and pure oxygen is passed through in plasma generator 12 Gas.Cleaning chamber 11 is cylindrical structure, advantageously reduces the volume of cleaning chamber 11, reduces the cost of cleaning device, and plasma occurs It is passed through purity oxygen in device 12, since oxygen is most abundant, the most wide element of distribution in the earth's crust, so plasma is formed using oxygen, Production cost can be further decreased.
Other structures are same as Example 1, and which is not described herein again.
Embodiment 3
As different from Example 1:The cleaning chamber 11 of the present embodiment is oval structure, be passed through in plasma generator 12 nitrogen, Helium and hydrogen.Chamber 11 or oval structure are cleaned, is adjusted according to the demand of different cell shapes, improves device Adaptability, nitrogen, helium and hydrogen form plasma by plasma generator 12, are conducive to the cost for controlling reaction gas, Prevent pure gas cost is excessively high from causing to clean cost raising.
Other structures are same as Example 1, and which is not described herein again.
Embodiment 4
As different from Example 1:The cleaning chamber 11 of the present embodiment is sphere structure, and ozone is passed through in plasma generator 12. Chamber 11 or sphere structure are cleaned, is adjusted according to the demand of different cell shapes, improves the adaptability of device, ozone Plasma can also be formed by plasma generator 12.
Other structures are same as Example 1, and which is not described herein again.
Embodiment 5
As shown in Figure 1 and 2, a method of cleaning battery cap using 1 ~ 4 any described device of embodiment, include the following steps:
1) power battery is sent to by cleaning chamber 11 by lifting gear 21, the head cover of power battery is made to be cleaned the packet completely of chamber 11 It wraps up in, while the gap that the sealing cleaning chamber 11 of sealing structure 13 is formed with power battery, vacuum pump 7 are vacuumized chamber 11 is cleaned, and are passed Environment in the record cleaning chamber 11 of sensor 115;
2) control device 114 controls plasma generator 12 and generates plasma, and plasma enters in cleaning chamber 11, and to power The head cover of battery is cleaned;
3) after cleaning, reclaimer 6 recycles the floating powder with charge with the plasma after cleaning, and lifting gear 21 will move Power battery sends original position back to, and is transported on production line by conveyor-belt apparatus 221.
It should be noted that:In the cleaning method of the present invention, it is complete that step 1) makes the head cover of power battery be cleaned chamber 11 Full package prevents the plasma dropout in cleaning chamber 11, and after evacuation, forms the environment of a 80Pa ~ 100Pa, have Help the head cover that plasma cleans power battery faster, step 2) argon gas, nitrogen, helium, hydrogen, purity oxygen and ozone pass through Plasma generator 12 forms plasma, quickly by the dirty removal of power battery head cover, since cleaning speed depends on fortune The flow of dynamic plasma and the power of power supply unit, the flow for cleaning plasma in chamber 11 is bigger, and the speed of cleaning is faster, has Help improve cleaning efficiency, meanwhile, the power appropriate for improving power supply unit, it helps improve the speed of cleaning, step 3) Since objective table 22 can increase and decline, so that power battery is come back to production line, be further processed, seamless realization flowing water Wire type operates.
According to the disclosure and teachings of the above specification, those skilled in the art in the invention can also be to above-mentioned embodiment party Formula is changed and is changed.Therefore, the invention is not limited in above-mentioned specific implementation mode, every those skilled in the art exist Made any conspicuously improved, replacement or modification all belongs to the scope of protection of the present invention on the basis of the present invention.This Outside, although having used some specific terms in this specification, these terms are merely for convenience of description, not to the present invention Constitute any restrictions.

Claims (10)

1. a kind of cleaning device of power battery head cover, it is characterised in that:It include the plasma for cleaning power battery head cover Wiper mechanism (1) and conveyer (2) for transporting power battery to the plasma cleaning mechanism (1), the plasma Wiper mechanism (1) includes that the cleaning chamber (11) coordinated with power battery and the plasma being connected to the cleaning chamber (11) occur Device (12).
2. a kind of cleaning device of power battery head cover as described in claim 1, it is characterised in that:The cleaning chamber (11) sets It is equipped with input pipe (111), efferent duct (112) and exhaust tube (113), the input pipe (111), the efferent duct (112) and institute The one end for stating exhaust tube (113) is communicated with the cleaning chamber (11), and the other end of the input pipe (111) is communicated with plasma hair The other end of raw device (12), the efferent duct (112) is communicated with reclaimer (6), the other end connection of the exhaust tube (113) There are vacuum pump (7), the input pipe (111), the efferent duct (112) and the exhaust tube (113) to be equipped with electronic valve (8)。
3. a kind of cleaning device of power battery head cover as described in claim 1, it is characterised in that:The cleaning chamber (11) is One kind in cube structure, cylindrical structure, oval structure and sphere structure.
4. a kind of cleaning device of power battery head cover as described in claim 1, it is characterised in that:The plasma generator (12) at least one of argon gas, nitrogen, helium, hydrogen, purity oxygen and ozone are passed through in.
5. a kind of cleaning device of power battery head cover as described in claim 1, it is characterised in that:In the cleaning chamber (11) The sealing structure (13) for sealing the gap that the cleaning chamber (11) is formed with power battery is provided on wall.
6. a kind of cleaning device of power battery head cover as claimed in claim 5, it is characterised in that:The sealing structure (13) For sealing ring.
7. a kind of cleaning device of power battery head cover as described in claim 1, it is characterised in that:The conveyer (2) Including lifting gear (21) and it is installed on the objective tables (22) of the lifting gear (21), the lifting gear (21) includes pedestal (211) and with the pedestal (211) one end of the connecting rod (212) connecting, the connecting rod (212) connects the objective table (22), the other end connection lifting motor (9) of the connecting rod (212), the objective table (22) are provided with conveyor-belt apparatus (221)。
8. a kind of cleaning device of power battery head cover as claimed in claim 7, it is characterised in that:The cleaning chamber (11) is logical It crosses supporting rod (10) and is fixed on the pedestal (211).
9. a kind of cleaning device of power battery head cover as claimed in claim 2, it is characterised in that:The cleaning chamber (11) sets It is equipped with control device (114) and the sensor (115) for monitoring described cleaning chamber (11) environment, the plasma generator (12), the sensor (115), the electronic valve (8) are electrically connected with the control device (114), the control device (114) display (1141) and control button (1142) are provided with.
10. a kind of cleaning method of power battery head cover, which is characterized in that include the following steps:
1) power battery is sent to by cleaning chamber (11) by conveyer (2), so that the head cover of power battery is cleaned chamber (11) complete Full package, and cleaning chamber (11) is vacuumized;
2) plasma generator (12) are opened, plasma enters in cleaning chamber (11), and is carried out to the head cover of power battery Cleaning;
3) after cleaning, power battery is sent back to original position by conveyer (2).
CN201810699371.1A 2018-06-29 2018-06-29 A kind of cleaning device and cleaning method of power battery head cover Pending CN108580445A (en)

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Application Number Priority Date Filing Date Title
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CN109671613A (en) * 2018-11-29 2019-04-23 贵州振华风光半导体有限公司 One kind being suitable for substrate circuit nitrogen-hydrogen mixing plasma cleaning method
CN109686650A (en) * 2018-11-29 2019-04-26 贵州振华风光半导体有限公司 One kind being suitable for integrated circuit metal shell nitrogen-hydrogen mixing plasma cleaning method
CN109968697A (en) * 2019-05-07 2019-07-05 深圳市东信高科自动化设备有限公司 A kind of footwear material surface plasma processor
CN110010814A (en) * 2019-04-12 2019-07-12 宁波正锂新能源科技有限公司 A kind of processing method of power battery and its battery case, battery case

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CN109671613A (en) * 2018-11-29 2019-04-23 贵州振华风光半导体有限公司 One kind being suitable for substrate circuit nitrogen-hydrogen mixing plasma cleaning method
CN109686650A (en) * 2018-11-29 2019-04-26 贵州振华风光半导体有限公司 One kind being suitable for integrated circuit metal shell nitrogen-hydrogen mixing plasma cleaning method
CN110010814A (en) * 2019-04-12 2019-07-12 宁波正锂新能源科技有限公司 A kind of processing method of power battery and its battery case, battery case
CN109968697A (en) * 2019-05-07 2019-07-05 深圳市东信高科自动化设备有限公司 A kind of footwear material surface plasma processor

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