CN108571939A - Positioning device and three-coordinates measuring machine - Google Patents
Positioning device and three-coordinates measuring machine Download PDFInfo
- Publication number
- CN108571939A CN108571939A CN201810374880.7A CN201810374880A CN108571939A CN 108571939 A CN108571939 A CN 108571939A CN 201810374880 A CN201810374880 A CN 201810374880A CN 108571939 A CN108571939 A CN 108571939A
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- positioning
- product
- positioning device
- workbench
- interconnecting piece
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The present invention relates to product field of measuring technique, a kind of positioning device and three-coordinates measuring machine are provided.The positioning device includes three positioning regions, three positioning regions are each attached on workbench, the shape on distribution triangular in shape and the surface of distributing position and product matches on the table for three positioning regions, by the way that the surface of product is in contact with three positioning regions simultaneously, product can be made to be fixed the predeterminated position determined by three positioning regions on the table.After the position of product is fixed, subsequent processing can be carried out to product, and subsequent process flow is made to be simplified.The three-coordinates measuring machine includes measuring instrument ontology and above-mentioned positioning device, and positioning device is fixed on the workbench of measuring instrument ontology.When being taken multiple measurements to the three-dimensional dimension of product using the three-coordinates measuring machine, product can be positioned by positioning device, without establishing measuring coordinate system every time, measurement efficiency is higher.
Description
Technical field
The present invention relates to product field of measuring technique, in particular to a kind of positioning device and three-coordinates measuring machine.
Background technology
Wafer carrier (Wafer Carrier) is a kind of device that field of semiconductor manufacture is used to carry wafer, common to be
It is discoid.To detect the processing quality of wafer carrier, the size of wafer carrier can be measured using three-coordinates measuring machine.
Three-coordinates measuring machine is a kind of equipment of three-dimensional dimension that capableing of automatic measurement product, and common three-coordinates measuring machine can be divided into
Contact, contactless and contact and the types such as contactless.When measuring, wafer carrier is placed on three-dimensional coordinates measurement
A certain position on the workbench of instrument, three-coordinates measuring machine needs set up a measuring coordinate system at this location first, so
After could be based on the coordinate system carry out automatic measurement.However, the position that each wafer carrier is placed on the table when repeatedly measuring
Setting might not be identical, and three-coordinates measuring machine will establish one newly at the placement location of wafer carrier when causing to measure every time
Measuring coordinate system, need expend longer time, cause measurement efficiency low.
Invention content
In view of this, a kind of positioning device of offer of the embodiment of the present invention and three-coordinates measuring machine, are asked with solving above-mentioned technology
Topic.
The embodiment of the present invention is achieved through the following technical solutions：
In a first aspect, the embodiment of the present invention provides a kind of positioning device, for placing product progress on the table
Positioning, including：
Three positioning regions, three positioning regions are each attached on workbench, triangular in shape point on the table of three positioning regions
The shape on the surface of cloth and distributing position and product matches, by the way that the surface of product is in contact with three positioning regions simultaneously,
Product can be made to be fixed the predeterminated position determined by three positioning regions on the table.
Typically, workbench is the plane of a placement product, and there are three degree of freedom in workbench for product, are respectively
Translation in x-axis direction, translation on y-axis direction and is rotated around z-axis.Pass through.Pass through setting for above three positioning region
Mode is set, degree of freedom of the product in workbench can be defined, so that product is fixed with three simultaneously on its surface
With the position uniquely determined when position portion is in contact, that is, it is fixed on the predeterminated position determined by three positioning regions of workbench
Place.After the position of product is fixed, subsequent processing can be carried out to product, and subsequent process flow is made to be simplified.
Such as the workbench can be the workbench of three-coordinates measuring machine, product can be wafer carrier, by using this
Wafer carrier, can be fixed on same position by the positioning device that inventive embodiments provide when measuring every time, three coordinates are surveyed
Amount instrument need not establish measuring coordinate system every time, improve measurement efficiency.
With reference to first aspect, in the first possible embodiment of first aspect, product is discoid, three positioning
The circumscribed circle of triangle and the disc of product that the line in portion is constituted match.
It is discoid as discoid for a kind of common shape of product, such as many wafer carriers, to this kind of product, position
The distributing position in portion is specific, needs to meet above-mentioned matching condition.
The possible embodiment of with reference to first aspect the first, in second of possible embodiment of first aspect
In, positioning device further includes：
Interconnecting piece, three positioning regions are arranged on interconnecting piece, and interconnecting piece is fixed on the table, and interconnecting piece is fixed by three
Position portion is connected as an entirety, can increase the structural strength of positioning device.
Second of possible embodiment with reference to first aspect, in the third possible embodiment of first aspect
In, interconnecting piece is L-type, and the first positioning region and the second positioning region protrusion in three positioning regions are arranged in the first side of interconnecting piece
Bian Shang, the third positioning region protrusion in three positioning regions are arranged on the second side different from first side of interconnecting piece.
Its shape of the workpiece of L-type is common, and processing is simple, is easy to mass production, by the first positioning region in three positioning regions
And second positioning region setting in first side, third positioning region is arranged can also ensure that three positioning regions are in third side
Triangle-Profile.
The third possible embodiment with reference to first aspect, in the 4th kind of possible embodiment of first aspect
In, the first positioning region is arranged in the one end of first side not connect with second side, and third positioning region is arranged in second side
The one end not connect with first side, above-mentioned set-up mode can save the making material of positioning device.
The third or the 4th kind of possible embodiment with reference to first aspect, in the 5th kind of possible reality of first aspect
It applies in mode, the lower surface of interconnecting piece and the upper surface of workbench are bonded by adhesive or bonding medium, thus by interconnecting piece
It is fixed together with workbench.
The third or the 4th kind of possible embodiment with reference to first aspect, in the 6th kind of possible reality of first aspect
It applies in mode, workbench is made of ferrimagnet, and the lower surface of interconnecting piece is provided with magnetic sticker, between interconnecting piece and workbench
It is fixed together by magnetic sticker and the adelphotaxy of ferromagnetism material.
The third or the 4th kind of possible embodiment with reference to first aspect, in the 7th kind of possible reality of first aspect
It applies in mode, the upper surface of workbench is smooth surface, and the lower surface of interconnecting piece is provided with vacuum cup, interconnecting piece and workbench
Between be fixed together by the actuation of vacuum cup effect.
The third or the 4th kind of possible embodiment with reference to first aspect, in the 8th kind of possible reality of first aspect
It applies in mode, interconnecting piece further includes：Rotary shaft, first side and second side are rotatably coupled with rotary shaft, and first
Side can turn to along rotary shaft and be overlapped with second side.
By the way that rotary shaft is arranged so that positioning device can folded when not used, to convenient for collecting.
Second aspect, a kind of three-coordinates measuring machine of offer of the embodiment of the present invention, the size for measuring product, including：
Measuring instrument ontology, measuring instrument ontology include workbench；
The positioning device of any one of first aspect and first aspect embodiment, positioning device are fixed on workbench
On.
It, can be by determining on workbench when being taken multiple measurements to the three-dimensional dimension of product using the three-coordinates measuring machine
Position device positions product, to which only measuring coordinate system need to be established at the placement location of product when measuring first time,
The first measuring coordinate system established can be used by repeatedly measuring later, so as to save time of measuring, improve measurement efficiency.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 shows a kind of structural schematic diagram for the positioning device that first embodiment of the invention provides；
Fig. 2 shows the first structural schematic diagrams for the positioning device that second embodiment of the invention provides；
Fig. 3 shows second of structural schematic diagram of the positioning device that second embodiment of the invention provides；
Fig. 4 shows the third structural schematic diagram for the positioning device that second embodiment of the invention provides.
In figure：10- positioning devices；The first positioning regions 100-；The second positioning regions 110-；120- thirds positioning region；
130- interconnecting pieces；The first sides 132-；The second sides 134-；136- rotary shafts；20- products.
Specific implementation mode
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.
Therefore, below the detailed description of the embodiment of the present invention to providing in the accompanying drawings be not intended to limit it is claimed
The scope of the present invention, but be merely representative of the present invention selected embodiment.Based on the embodiments of the present invention, this field is common
The every other embodiment that technical staff is obtained without creative efforts belongs to the model that the present invention protects
It encloses.
It should be noted that：Similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined, then it further need not be defined and explained in subsequent attached drawing in a attached drawing.
In the description of the present invention, it should be noted that term "center", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, or be somebody's turn to do
Invention product using when the orientation or positional relationship usually put, be merely for convenience of description of the present invention and simplification of the description, without
It is instruction or implies that signified device or element must have a particular orientation, with specific azimuth configuration and operation, therefore not
It can be interpreted as limitation of the present invention.In addition, term " first ", " second ", " third " etc. are only used for distinguishing description, and cannot manage
Solution is instruction or implies relative importance.
In addition, the terms such as term "horizontal", "vertical", " pendency " are not offered as requiring component abswolute level or pendency, and
It is that can be slightly tilted.It is not to indicate the structure if "horizontal" refers to only that its direction is more horizontal with respect to for "vertical"
It has to fully horizontally, but can be slightly tilted.
In the description of the present invention, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " setting ",
" installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or one
Connect to body；It can be mechanical connection, can also be electrical connection；It can be directly connected, it can also be indirect by intermediary
It is connected, can is the connection inside two elements.For the ordinary skill in the art, it can manage as the case may be
Solve the concrete meaning of above-mentioned term in the present invention.
Other features and advantages of the present invention will be illustrated in subsequent specification, also, partly be become from specification
It is clear that being understood by implementing the embodiment of the present invention.The purpose of the present invention and other advantages can be by being write
Specifically noted structure is realized and is obtained in specification, claims and attached drawing.
First embodiment
Referring to Fig.1, the positioning dress that first embodiment of the invention provides, 10 for being positioned over workbench (not shown)
Product 20 positioned, workbench designated herein can be the workbench of certain equipment, which can be to being positioned over work
Make the product 20 on platform and carry out certain processing, such as dimensional measurement, Image Acquisition, assembly processing etc., and the equipment is to product
The processing of 20 progress is related with the placement location of product 20 on the table.For example, three-coordinates measuring machine is to being positioned over work
When the size of wafer carrier on platform measures, need that the position of wafer carrier on the table is inputted the survey of three coordinates first
Instrument is measured, so that three-coordinates measuring machine establishes measuring coordinate system at this location, measuring coordinate system is then based on and completes to wafer
The measurement of tool.
Fig. 1 shows a kind of structural schematic diagram for the positioning device 10 that first embodiment of the invention provides.In Fig. 1, fixed
Position device 10 includes three positioning regions, is referred to as the first positioning region 100, the second positioning region 110 and third positioning region 120.
Three positioning regions are each attached on workbench.Three positioning regions distribution (as shown in phantom in Figure 1) triangular in shape on the table,
And its distributing position and the shape on the surface of product 20 match.Designated herein matching refers to that product 20 is placed on work
When predeterminated position on platform, surface can be in contact with each positioning region in three positioning regions simultaneously just, that is to say, that
The distributing position of positioning region is designed for the surface shape of product 20.In some embodiments, three positioning regions
Between position relationship can arbitrarily adjust or partial adjustment, in these embodiments can by adjusting three positioning regions it
Between position relationship obtain the distributing position to match with the surface shape of the product 20 to be positioned；In other embodiments
In, the position relationship between three positioning regions is unable to adjust, and then needs clearly to be positioned in advance in these embodiments
Product 20 surface shape, to ensure that the position distribution of three positioning regions and the surface shape of the product to be positioned 20 are phases
Match.
The workbench of equipment is usually horizontal plane, is x-axis side respectively to which there are three degree of freedom in workbench for product 20
Upward translation, translation on y-axis direction and is rotated around z-axis, and wherein x-axis, y-axis and z-axis are orthogonal seat
Parameter.By the set-up mode of above three positioning region distributing position, the three degree of freedom of product 20 can be limited so that when and
Only when product 20 is positioned over the predeterminated position on workbench, surface can be just simultaneously each of with three positioning regions
Positioning region is in contact, therefore the needs of product 20 that the predeterminated position is actually namely determined by three positioning regions are positioned
Position.
For example, the shape of product 20 shown in Fig. 1 is discoid, in the positioning device 10 designed for the product 20
In, the disc of the circumscribed circle and product 20 of the triangle of the line composition of three positioning regions matches, and where the circumscribed circle
Position is exactly the predeterminated position that product 20 is positioned.It is appreciated that Fig. 1 is only a kind of example, product 20 can also be other shapes
Shape, when product 20 is other shapes, the distributing position of three positioning regions correspondingly adjusts.It is appreciated that in certain embodiment party
In formula, positioning device 10 can also include three or more positioning regions.
In conclusion the positioning device 10 by the way that first embodiment of the invention offer is arranged on the table, can will put
The product 20 being placed on workbench is fixed on predeterminated position, to facilitate relevant device to carry out subsequent processing to product 20, simplifies
Process flow.Still by taking three-coordinates measuring machine repeatedly measures the process of the size of wafer carrier as an example, wafer carrier is common for circle
Plate-like, therefore the positioning device 10 shown in Fig. 1 may be used and positioned, all by the surface of wafer carrier and three when measuring every time
A positioning region is close to, so that wafer carrier is fixed on predetermined position determined by three positioning regions, due to three-dimensional coordinates measurement
Instrument all uses the measuring coordinate system established in the predetermined position to measure in each measure, therefore need to only be measured first
Before beginning by the predeterminated position input three-coordinates measuring machine, so that it is established measuring coordinate system, without as in the prior art that
Sample measures every time starts that the position where wafer carrier is all inputted three-coordinates measuring machine before, so as to significantly improve three seats
The measurement efficiency for marking measuring instrument, suitable for being used in needing the scene being detected to considerable wafer carrier.Obviously, the present invention the
The positioning device 10 that one embodiment provides is not limited to apply in above-mentioned scene, such as in image capture device to being positioned over work
It, can also be by using the positioning device 10 so that product 20 is every time when the appearance of product 20 on platform carries out Image Acquisition
The center of visual field in image capture device, it is hereby achieved that the higher product image of quality.In another example processing
It, can also be by using the positioning device 10 so that product 20 when equipment is processed the product 20 being positioned on workbench
It is processed every time in same position, to avoid process equipment from carrying out position adjustment every time, simplifies the control journey of process equipment
The design of sequence.
Second embodiment
In conjunction with referring to Figure 2 to Figure 4, the positioning device 10 that second embodiment of the invention provides includes three positioning regions and company
Socket part 130, three positioning regions are arranged on interconnecting piece 130, and interconnecting piece 130 is fixed on the table.Interconnecting piece 130 is by three
A positioning region is connected as an entirety, can increase the structural strength of positioning device 10.Meanwhile according to first embodiment in explain
It states, in a second embodiment, there is fixed position relationship, therefore the positioning dress that second embodiment provides between three positioning regions
It sets 10 to design specifically for the product 20 with predetermined surface shape, convenient for being directly realized by this with predetermined surface shape
The precise positioning of product 20.Predetermined surface shape designated herein refers to the distribution position with three positioning regions of positioning device 10
Set the surface shape to match.
Fig. 2 shows the first structural schematic diagrams for the positioning device 10 that second embodiment of the invention provides.In fig. 2,
Interconnecting piece 130 is L-type, and the first positioning region 100 and the second positioning region 110 protrusion in three positioning regions are arranged in interconnecting piece
On 130 first side 132, the third positioning region 120 in three positioning regions protrudes to be arranged is different from first in interconnecting piece 130
On the second side 134 of side 132.Fig. 2 shows embodiment in, the interconnecting piece 130 of L-type has processing simple, is easy to
The characteristics of mass production, certainly in the other embodiment of second embodiment, interconnecting piece 130 or other shapes.Fig. 2 shows
The shape of the product 20 gone out is discoid, and distributing position of the disc just with three positioning regions matches, in other words, Fig. 2
Shown in positioning device 10 can dedicated for Fig. 2 shows discoid product 20 position.For example, product 20 is crystalline substance
Justify carrier, then positioning device 10 can in advance be made according to the shape of the wafer carrier of standard.
Interconnecting piece 130 is fixed on the table, and fixed form can be by a variety of, it might even be possible to be embodied directly in and work
Platform is integrally formed.In view of under different application scenarios, on the predeterminated position not necessarily workbench that product 20 positions
One fixed position should allow to be adjusted according to specific user demand.Therefore, in the portion of second embodiment of the invention
Divide in embodiment, the fixed form between interconnecting piece 130 and workbench is embodied as detachably connected.Specifically,
In a kind of possible realization method, it can be bonded by adhesive or bonding medium between interconnecting piece 130 and workbench, to make
The two is fixed together, and when needing running fix device 10, is firmly separated itself and workbench.Wherein, adhesive
Can be glue, bonding medium can be double faced adhesive tape, naturally it is also possible to be that other common are unlikely to thoroughly to glue dead adhesive
Or bonding medium.In second of possible realization method, workbench is made of ferrimagnets such as iron, cobalt, nickel, ferrites,
The lower surface of interconnecting piece 130 is provided with magnetic sticker, passes through the phase of magnetic sticker and ferromagnetism material between interconnecting piece 130 and workbench
Mutual sucking action is fixed together, additional without using adhesive or bonding medium etc. using such mode stationary positioned device 10
Substance, therefore dismounting when also be not present substance remain, the cleaning of workbench can be kept.In the third possible realization side
In formula, the upper surface of workbench is smooth surface, and the lower surface of interconnecting piece 130 is provided with vacuum cup, positioning device 10 is put
After setting in position, firmly press down on interconnecting piece 130, the air in vacuum cup made be discharged, to interconnecting piece 130 and
It is laminated together under the effect of atmospheric pressure between workbench.Obvious, it can also be adopted between interconnecting piece 130 and workbench
With other fixed forms, particularly, the quality if necessary to the product 20 of positioning is smaller, and the quality of positioning device 10 is larger,
The quality of product 20 is much smaller than the quality of positioning device 10, and positioning device 10 can also be directly placed on workbench, not use
Additional means are fixed.
Fig. 3 shows second of structural schematic diagram of the positioning device 10 that second embodiment of the invention provides.With in Fig. 2
The structure of positioning device 10 is compared, in the embodiment illustrated in fig. 3, the first positioning region 100 be arranged first side 132 not
Not connect with first side 132 in second side 134 is arranged in the one end being connect with second side 134, third positioning region 120
One end.In such embodiment, interconnecting piece 130 just can be by the first positioning region 100, the second positioning region 110 and third
Positioning region 120 connects, and the part of redundancy is not present, can save the making material of positioning device 10.
Fig. 4 shows three kinds of structural schematic diagrams of the positioning device 10 that second embodiment of the invention provides.Reference Fig. 4, with
The structure of positioning device 10 in Fig. 3 is compared, and in the embodiment illustrated in fig. 4, interconnecting piece 130 further includes being arranged in the first side
The rotary shaft 136 of 134 junction of side 132 and second side.In such embodiment, first side 132 and the second side
Side 134 is independent structure rather than integrally formed, and first side 132 and second side 134 are rotatable with rotary shaft 136
Ground connects.Positioning device 10 when not in use, can turn to first side 132 and 134 weight of second side along rotary shaft 136
It closes, or second side 134 is turned to along rotary shaft 136 and is overlapped with first side 132, to fold positioning device 10
Come, facilitates and stored.
In a second embodiment, about the structure, function and advantageous effect of positioning device 10, place is not referred to, it can
With reference to the associated description in first embodiment, to be not repeated to illustrate herein.
3rd embodiment
The three-coordinates measuring machine that third embodiment of the invention provides includes measuring instrument ontology and the first or second of the present invention
The positioning device 10 that embodiment provides.Wherein, measuring instrument ontology is provided with workbench, and positioning device 10 is fixed on the table.
Obvious, which can completely newly manufacture, and can also pass through installation on the basis of existing three-coordinates measuring machine
Positioning device 10 is transformed.Still by taking three-coordinates measuring machine repeatedly measures the process of the size of wafer carrier as an example, Ke Yi
It measures and product 20 is positioned by positioning device 10 for the first time before starting, and is where after wafer carrier is positioned default
Position inputs three-coordinates measuring machine so that it establishes measuring coordinate system, in measurement process afterwards, since wafer carrier is each
It is all positioned to the position, three-coordinates measuring machine without establishing measuring coordinate system coordinate system again, when so as to save measurement
Between, improve measurement efficiency.It is appreciated that the product 20 that the three-coordinates measuring machine can measure is not limited to wafer carrier, measuring
When other products 20, the concrete structure of positioning device 10 is correspondingly adjusted according to the surface shape of product 20.
Obviously, the above embodiment of the present invention is just for the sake of clearly illustrating examples made by the present invention, and it is pair to be not
The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description
To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this
All any modification, equivalent and improvement etc., should be included in the claims in the present invention made by within the spirit and principle of invention
Protection domain within.
Claims (10)
1. a kind of positioning device, for being positioned to the product of placement on the table, which is characterized in that including：
Three positioning regions, three positioning regions are each attached on the workbench, and three positioning regions are in the workbench
Upper distribution triangular in shape and distributing position and the shape on the surface of the product match, by by the surface of the product simultaneously
Be in contact with three positioning regions, can make the product be fixed on the workbench by three positioning regions institute
Determining predeterminated position.
2. positioning device according to claim 1, which is characterized in that the product is discoid, three positioning regions
The disc of circumscribed circle and the product of triangle that constitutes of line match.
3. positioning device according to claim 2, which is characterized in that the positioning device further includes：
Interconnecting piece, three positioning regions are arranged on the interconnecting piece, and the interconnecting piece is fixed on the workbench.
4. positioning device according to claim 3, which is characterized in that the interconnecting piece is L-type, in three positioning regions
The first positioning region and the second positioning region protrusion be arranged on the first side of the interconnecting piece, in three positioning regions
Third positioning region protrusion is arranged on the second side different from the first side of the interconnecting piece.
5. positioning device according to claim 4, which is characterized in that first positioning region is arranged in the first side
The one end not connect with the second side, the third positioning region be arranged the second side not with first side
One end of side connection.
6. positioning device according to claim 4 or 5, which is characterized in that the lower surface of the interconnecting piece and the work
The upper surface of platform is bonded by adhesive or bonding medium.
7. positioning device according to claim 4 or 5, which is characterized in that the workbench is made of ferrimagnet, institute
The lower surface for stating interconnecting piece is provided with magnetic sticker.
8. positioning device according to claim 4 or 5, which is characterized in that the upper surface of the workbench is smooth surface,
The lower surface of the interconnecting piece is provided with vacuum cup.
9. positioning device according to claim 4 or 5, which is characterized in that the interconnecting piece further includes：Rotary shaft, it is described
First side and the second side are rotatably coupled with the rotary shaft, and the first side can be along the rotation
Axis is turned to be overlapped with the second side.
10. a kind of three-coordinates measuring machine, the size for measuring product, which is characterized in that including：
Measuring instrument ontology, the measuring instrument ontology includes workbench；
Positioning device as described in any claim in claim 1-9, the positioning device are fixed on the workbench.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810374880.7A CN108571939A (en) | 2018-04-24 | 2018-04-24 | Positioning device and three-coordinates measuring machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810374880.7A CN108571939A (en) | 2018-04-24 | 2018-04-24 | Positioning device and three-coordinates measuring machine |
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| CN108571939A true CN108571939A (en) | 2018-09-25 |
Family
ID=63575271
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810374880.7A Pending CN108571939A (en) | 2018-04-24 | 2018-04-24 | Positioning device and three-coordinates measuring machine |
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| CN103115639A (en) * | 2013-01-25 | 2013-05-22 | 北京无线电计量测试研究所 | Datum positioner |
| CN204228129U (en) * | 2014-11-20 | 2015-03-25 | 苏州神本精密机械有限公司 | The subsidiary frock of three-D measuring machine |
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2018
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54145565A (en) * | 1978-05-08 | 1979-11-13 | Fujitsu Ltd | Position detecting method |
| CN1593844A (en) * | 2003-09-10 | 2005-03-16 | 河海大学常州校区 | General design method for positioning options of aperture system combined clamp |
| CN201170718Y (en) * | 2008-03-26 | 2008-12-24 | 春兴铸造(苏州工业园区)有限公司 | Measuring apparatus for three coordinates |
| CN201653362U (en) * | 2010-03-16 | 2010-11-24 | 沈阳飞机工业（集团）有限公司 | Auxiliary workbench used for optical coordinate measuring apparatus when probe measures in touching |
| CN103115639A (en) * | 2013-01-25 | 2013-05-22 | 北京无线电计量测试研究所 | Datum positioner |
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Application publication date: 20180925 |