CN108550546A - A kind of high-precision telescopic mechanical arm - Google Patents
A kind of high-precision telescopic mechanical arm Download PDFInfo
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- CN108550546A CN108550546A CN201810559085.5A CN201810559085A CN108550546A CN 108550546 A CN108550546 A CN 108550546A CN 201810559085 A CN201810559085 A CN 201810559085A CN 108550546 A CN108550546 A CN 108550546A
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- 238000009434 installation Methods 0.000 claims description 12
- 230000009471 action Effects 0.000 claims description 5
- 230000004044 response Effects 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 description 9
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
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- Manufacturing & Machinery (AREA)
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
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- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
The present invention provides a kind of high-precision telescopic mechanical arm, including：The first end of underarm case is mounted on mounting seat, and the first transmission step belt wheel is provided in underarm case；It is equipped with terminal in upper arm case and walks belt wheel, the end face of terminal step belt wheel is connected with clamping jaw firm banking；The second end that the second end of upper arm case walks belt wheel and underarm case by the second transmission is rotatablely connected, second transmission step belt wheel includes the top step belt wheel being fixedly connected sequentially, mounting disc and lower part step belt wheel, top step belt wheel is located in upper arm case, top walks belt wheel and is connect with terminal step belt wheel transmission by terminal synchronous belt, mounting disc connects the second end of upper arm case, lower part step belt wheel is located in underarm case, and lower part walks belt wheel and connect with the first transmission step belt wheel transmission by being driven stepping band；The output end of harmonic speed reducer and the first transmission step belt wheel are affixed and rotate synchronously：The input terminal of the driving affixed harmonic speed reducer in end of servo motor.Its is simple in structure, registration, fast response time, and stability is good, at low cost.
Description
Technical field
The present invention relates to high precision technical field of automation in industry more particularly to a kind of high-precision telescopic mechanical arms.
Background technology
Nowadays, with the development of science and technology, robot application is more and more extensive, Intelligent telescopic conveying mechanical arm is automatic
Metaplasia production use in the process it is a kind of there is crawl and the automation of travelling workpiece function, intelligent device, it be mechanization,
A kind of new device to grow up during automated production.Intelligent telescopic conveying mechanical arm has evolved into flexible manufacturing system
An important component in system FMS and flexible manufacturing unit FMC can make complicated and cumbersome thing becomes simple, completion
The high precision that manually cannot achieve carries work, reduces the danger manually carried, improves production efficiency and product is good
Rate.
But existing extension type mechanical arm system, stability is not good enough, and precision is poor, especially to required precision pole
High semicon industry.By taking the wafer production of semicon industry as an example, from Silicon Wafer final production at chip, need by a system
Processes, the positioning accuracies that wafer is transmitted and placed between different processes such as " photoetching, the burn into depositions " of row are to ensure that core
The key of piece processing quality.And the control accuracy and long time continuous working stability of wafer transport robot are to restrict semiconductor
The key of chip production quality.Therefore, wafer transport robot has to reach the requirements such as high precision, high stability.
Invention content
Based on this, the purpose of the present invention is to provide a kind of high-precision telescopic mechanical arm, simple in structure, registration,
Fast response time, stability is good, at low cost, and it is quick to be particularly suitable for the needs progress high-precision such as wafer carrying of semicon industry
The application field of rotation attitude control.To achieve the above object, technical scheme is as follows：
A kind of high-precision telescopic mechanical arm, including：
Mounting seat；
The first end of underarm case, the underarm case is mounted on the mounting seat, and the first biography is provided in the underarm case
Dynamic step belt wheel, the first transmission step belt wheel are located at the first end of the underarm case；
Upper arm case, is provided with terminal step belt wheel in the upper arm case, and the terminal step belt wheel is located at the of the upper arm case
The end face of one end, the terminal step belt wheel is connected with the clamping jaw firm banking for clamping jaw to be arranged；The second end of the upper arm case
The second end that belt wheel and the underarm case are walked by the second transmission is rotatablely connected, and the second transmission step belt wheel includes fixing successively
Top step belt wheel, mounting disc and the lower part of connection walk belt wheel, and the top step belt wheel is located in the upper arm case, the top step
Belt wheel walks belt wheel transmission with the terminal by terminal synchronous belt and connect, and the mounting disc connects the second end of the upper arm case,
The lower part step belt wheel is located in the underarm case, and the lower part step belt wheel is by being driven stepping band and the first transmission step band
Wheel is sequentially connected；
Harmonic speed reducer, the output end of the harmonic speed reducer is affixed with the first transmission step belt wheel and rotates synchronously；
Servo motor, the driving end of the servo motor connect the input terminal of the harmonic speed reducer by pin key.
Preferably, top step belt wheel is different with the lower part step number of teeth of belt wheel, the top walk belt wheel with it is described
The number of teeth of terminal step belt wheel also differs.
Preferably, it is additionally provided with tension adjusting member holder in the underarm case, is set on the tension adjusting member holder
It is equipped with for adjusting transmission first tension adjusting member of the stepping with tightness；It is additionally provided with and passes through in the upper arm case
The position of itself is adjusted to adjust the second tension adjusting member of the terminal tightness of synchronous belt degree, second tension adjusting member
Quantity be two, be distributed in the both sides of the terminal synchronous belt.
Preferably, the mounting seat is hollow cylindrical.
Further, the high-precision telescopic mechanical arm further includes floor installation plate, and the first end of the underarm case passes through
The floor installation plate is mounted on the mounting seat, and the servo motor is mounted on the floor installation plate, the servo electricity
Machine is placed in the mounting seat.
Preferably, the high-precision telescopic mechanical arm further includes upper arm sealing plate for sealing the upper arm case and is used for
Seal the underarm sealing plate of the underarm case.
Preferably, the high-precision telescopic mechanical arm further includes servo-driver and main controller, and the servo-driver is used
In sending out corresponding drive signal to the servo motor according to the control signal of the main controller, to realize to the servo
The motion state of motor carries out accurate control.
Further, the high-precision telescopic mechanical arm further includes position locator and position sensor, and the position is fixed
Position device is fixed on the first transmission step belt wheel, the rotation angle that the position sensor passes through the perception position locator
Come judge it is described first transmission step belt wheel whether reached the extreme position of rotational action, if then will determine that result feeds back to institute
State main controller.
Further, the position locator includes annular plate and the fan-shaped extension at the annular plate edge is arranged,
The annular plate is generally aligned in the same plane with the fan-shaped extension, and the annular plate is integrally formed with the fan-shaped extension, institute
It is photoelectric sensor to state position sensor.
The beneficial effects of the invention are as follows：
The high-precision telescopic mechanical arm of the present invention, simple in structure, positioning accuracy is high, and stability is good, at low cost, using watching
Taking motor drives harmonic speed reducer, harmonic speed reducer that can effectively adjust reduction ratio and the stability of movement, improves mechanical arm
The stability of movement；Can determine the relative position of upper arm and clamping jaw by multistage synchronous belt and step belt wheel, to ensure each section
Location accuracy when movement.The set mechanical arm registration, fast response time are particularly suitable for wafer carrying etc. and need to carry out
The high-precision application field that quickly rotation attitude controls.Under the control of main controller and servo-driver, by using multistage same
The movement that step wheel and stepping band control two sections mechanical arm and clamping jaw are completed the whole extension of mechanical arm and shunk；Master control
Machine can accurately control turning for servo motor equipped with high-accuracy high-efficiency control software under the driving of dedicated servo driver
The movable informations such as speed, acceleration, position, brake.
Description of the drawings
Fig. 1 is the high-precision telescopic mechanical arm decomposition diagram of one embodiment of the invention；
Reference sign：
1 upper arm sealing plate；2 terminal synchronous belts；3 upper arm casees；4 underarm sealing plates；5 second transmission step belt wheels；
6 transmission stepping bands；7 first tension adjusting members；8 tension adjusting member holders；9 underarm casees；
10 harmonic speed reducers；11 floor installation plates；12 servo motors；13 mounting seats；
14 first transmission step belt wheels；15 position locators；16 position sensors；17 second tension adjusting members；
18 terminals walk belt wheel；19 clamping jaw firm bankings；20 servo-drivers；21 main controllers.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, right with reference to the accompanying drawings and embodiments
The high-precision telescopic mechanical arm of the present invention is further elaborated.It should be appreciated that specific embodiment described herein is only
For explaining the present invention, it is not intended to limit the present invention.
As shown in Figure 1, the high-precision telescopic mechanical arm of one embodiment of the invention includes mounting seat 13, underarm case 9, upper arm
Case 3, harmonic speed reducer 10, servo motor 12.
Wherein, the first end (left end in Fig. 1) of underarm case 9 is mounted on mounting seat 13, and the first biography is provided in underarm case 9
Dynamic step belt wheel 14, the first transmission step belt wheel 14 are located at the first end (left end in Fig. 1) of underarm case 9.
Terminal step belt wheel 18 is provided in upper arm case 3.The first end that terminal step belt wheel 18 is located at upper arm case 3 is (left in Fig. 1
End), the end face of terminal step belt wheel 18 is connected with the clamping jaw firm banking 19 for clamping jaw to be arranged.
The second end (right end in Fig. 1) of upper arm case 3 is by the second end of the second transmission step belt wheel 5 and underarm case 9 (in Fig. 1
Right end) rotation connection；Second transmission step belt wheel 5 includes that top step belt wheel, mounting disc and the lower part being fixedly connected sequentially walk belt wheel,
The top step belt wheel, mounting disc and lower part step belt wheel are preferably arranged concentrically.
The top step belt wheel is located in upper arm case 3, and the top step belt wheel walks belt wheel by terminal synchronous belt 2 and terminal
18 are sequentially connected, and terminal walks belt wheel 18 under the drive that terminal walks belt wheel 2, the rotation of control clamping jaw firm banking 19.Clamping jaw is solid
Pedestal 19 is determined for fixed external clamping jaw to realize external function, is walked the rotation of belt wheel with terminal and is rotated.
The second end (right end in Fig. 1) of the mounting disc connection upper arm case 3, the lower part step belt wheel are located in underarm case 9,
The lower part step belt wheel is sequentially connected by being driven the transmission step belt wheel 14 of stepping band 6 and first.
The output end (flexbile gear) of harmonic speed reducer 10 is affixed with the first transmission step belt wheel 14 and rotates synchronously：Servo motor 12
Driving end by pin key connect harmonic speed reducer 10 input terminal (wave producer), servo motor 12 as the mechanical arm move
Power source.Harmonic speed reducer 10 is mounted on underarm case 9, and the firm gear of harmonic speed reducer 10 can be fixed in underarm case 9.
In the present embodiment, top step belt wheel and the lower part step number of teeth of belt wheel are different, the top walk belt wheel and
The number of teeth of terminal step belt wheel 18 also differs.When the second transmission step belt wheel 5 turns over certain angle, the top step belt wheel, institute
It is identical to state the angle that lower part step belt wheel and upper arm case 3 rotate, but due to top step belt wheel and lower part step belt wheel
The number of teeth it is different, therefore the stroke of synchronous belt is different, forms decelerations, and reduction ratio walks the tooth of belt wheel with top step belt wheel, lower part
Number is related, simultaneously as the number of teeth that top walks belt wheel and terminal step belt wheel 18 also differs, further slows down.Preferably,
Transmission step belt wheel (the first transmission step belt wheel 14, second will be less than by being fixed on the angular speed of the external clamping jaw in clamping jaw fixed seat 19
Transmission step belt wheel 5) rotation angular speed.
As a kind of preferable mode, tension adjusting member holder 8 is additionally provided in underarm case 9, in tension adjusting member branch
The first tension adjusting member 7 for adjusting 6 tightness of transmission stepping band is provided on frame 8；Adjustment part holder 8 is used for fixed
Power adjustment part, it is ensured that the degree of synchronous belt tensioning.
It is additionally provided in upper arm case 3 and adjusts the second of 2 tightness of terminal synchronous belt by adjusting the position of itself
The quantity of tension adjusting member 17, the second tension adjusting member 17 is two, is distributed in the both sides of terminal synchronous belt 2.
First tension adjusting member 7 and the second tension adjusting member 17 are set, can be walked by adjusting the position of itself to adjust
The tightness of forward (FWD).Upper arm case 3 is sealed using upper arm sealing plate 1, and upper arm sealing plate 1 plays the role of sealing and dustproof；Underarm
Case 9 is sealed using underarm sealing plate 4, and underarm sealing plate 4 plays the role of sealing and dustproof.
In the present embodiment, mounting seat 13 be hollow cylindrical, mounting seat of the mounting seat 13 as entire mechanical arm,
And it is attached and fixes with outer structural parts.Preferably, the first end (left end in Fig. 1) of underarm case 9 passes through floor installation plate
11 are mounted on mounting seat 13, and the rotation of underarm case 9 is realized by the rotation of mounting seat 13.Floor installation plate 11 is used
It is connected and fixed underarm case 9 and mounting seat 13, servo motor 12 is mounted on floor installation plate 11, servo motor 12 is placed in installation
In pedestal 13, installation space so can be further saved.
As a kind of preferable mode, high-precision telescopic mechanical arm further includes servo-driver 20 and main controller 21, servo
Driver 20 is used to send out corresponding drive signal to servo motor 12 according to the control signal of the main controller 21, to realize
Accurate control is carried out to the motion state of servo motor 12.
Preferably, high-precision telescopic mechanical arm further includes position locator 15 and position sensor 16, position locator 15
It is fixed on the first transmission step belt wheel 14, position locator 15 can be used in marking the rotation angle of the first transmission step belt wheel 14
Degree, position locator 15 play the role of label and actively walk belt wheel rotation angle.
Position sensor 16 judges whether the first transmission walks belt wheel 14 by the rotation angle of perceived position locator 15
The extreme position of rotational action is reached, if then will determine that result feeds back to main controller 21.In the present embodiment, position locator
15 include annular plate and are arranged the fan-shaped extension at the annular plate edge, the annular plate and the fan-shaped extending part in
Same plane, the annular plate are integrally formed with the fan-shaped extension, and the position sensor 16 is photoelectric sensor.
The telescopic mechanical arm of above example, global design structure are mainly made of following components：Mounting seat 13,
Drive control part, underarm and upper arm.Wherein, drive control part includes main controller 21, servo-driver 20 and servo motor
12；Underarm includes actively walking belt wheel (the first transmission step belt wheel 14), transmission step belt wheel (the second transmission step belt wheel 5), drive coordination
Band 6, the first tension adjusting member 7, tension adjustment fixed frame (tension adjusting member holder 8), position sensor 16, position locator
15, underarm case 9 and underarm sealing plate 4；Upper arm includes transmission step belt wheel (the second transmission step belt wheel 5), terminal step belt wheel 18, terminal
Synchronous belt 2, the second tension adjusting member 17, clamping jaw firm banking 19, upper arm case 3 and upper arm sealing plate 1.
When mechanical arm setting in motion, control instruction is sent out from main controller 21 to servo-driver 20, then by servo-driver
20, which send out drive signal driving servo motor 12, rotates, and rotating-speed modulation to suitable ratio is driven harmonic wave by harmonic speed reducer 10
What retarder was connected actively walks belt wheel (the first transmission step belt wheel 14) rotation, and transmission step belt wheel is driven by drive coordination band 6
(the second transmission step belt wheel 5) rotation, the upper arm case 3 being fixed on transmission step belt wheel (the second transmission step belt wheel 5) will be with transmission
The rotation of step belt wheel (the second transmission step belt wheel 5) rotates, while being driven step belt wheel (the second transmission step belt wheel 5) and passing through drive
Terminal synchronous belt 2 and drive terminal step belt wheel 18 rotate, to drive be fixed on terminal step belt wheel 18 on clamping jaw fix bottom
Seat 19 rotates.
Wherein, belt wheel (the first transmission step belt wheel 14) and harmonic speed reducer 10, upper arm and transmission step belt wheel (second are actively walked
Transmission step belt wheel 5), clamping jaw firm banking 19 and terminal step belt wheel 18 between relative position be fixed, therefore adjoint respectively
The rotation of servo motor 12, the relative position between various pieces is fixed, so as to pass through control servomotor 12
Direction of rotation realize mechanical arm stretching and contraction action.First tension adjusting member 7 is by tension adjustment fixed frame (adjustment part
Holder 8) it is stably mounted at box house, control the pine of drive coordination band 6 by adjusting the position of the first tension adjusting member 7
Tight degree, to ensure that torsion can consolidate uniformly transmits between multiple step belt wheels.Upper arm case 3, underarm case 9, clamping jaw are solid
The flexible of mechanical arm and external clamping jaw is realized in the relative rotation for determining pedestal 19, upper arm case 3 and underarm case 9 be by servo motor with
And realization is transmitted and controlled to the amount that turns of a series of belt pulley and synchronous belt.
Position locator 15 is fixed on actively to walk on belt wheel (the first transmission step belt wheel 14) and can record in itself actively walks band
The turned over angle of wheel, position sensor 16 may determine that by the angle that perceived position locator 15 rotates actively walks belt wheel
Whether (the first transmission step belt wheel 14) has reached the extreme position of rotational action, while providing feedback signal to main controller 21, by
There are interaction relations between each arm of entire mechanical arm, thus to actively walk belt wheel (first transmission step belt wheel 14) position into
Row monitoring, which is also achieved that, detects and controls entire manipulator motion.It is soft that main controller 21 is equipped with high-precision motion control
Part, control servo-driver 20 send out different control drive signals, to realize that the precision to servo motor motion state is controlled
System.Servo-driver 20 is the driver to match with servo motor 12, by receiving the control signal of main controller 21 to servo
Motor sends out corresponding drive signal.Harmonic speed reducer 10 is used for controlling rotating ratio, improves the control accuracy to turned position.
The high-precision telescopic mechanical arm of the above various embodiments, simple in structure, positioning accuracy is high, and stability is good, at low cost,
It drives harmonic speed reducer, harmonic speed reducer that can effectively adjust reduction ratio and the stability of movement using servo motor, improves
The stability of manipulator motion；The relative position that can determine upper arm and clamping jaw by multistage synchronous belt and step belt wheel, to ensure
Each section of location accuracy during exercise.The set mechanical arm registration, fast response time, production efficiency is high, is particularly suitable for
The needs such as wafer carrying carry out the high-precision application field that quickly rotation attitude controls.
Under the control of main controller and servo-driver, by using in multistage synchronizing wheel (step belt wheel) and the control of stepping band
The movement that lower two sections of mechanical arms and clamping jaw are completed the whole extension of mechanical arm and shunk；Main controller is equipped with high-accuracy high-efficiency
Control software can accurately control the rotating speed of servo motor, acceleration, position, brake under the driving of dedicated servo driver
Equal movable informations.
It should be noted that in the absence of conflict, the feature in the above various embodiments and embodiment can be mutual group
It closes.
Although the present invention and its advantage has been described in detail it should be appreciated that without departing from by the attached claims
Defined by can carry out various changes, replacement and transformation in the case of the spirit and scope of the present invention.Moreover, the model of the present invention
Enclose the specific embodiment for being not limited only to process, equipment, means, method and steps described in specification.In the art is common
Technical staff executes and corresponding reality described herein from the disclosure it will be readily understood that can be used according to the present invention
Apply the essentially identical function of example or obtain the result essentially identical with it, existing and process to be developed in future, equipment,
Means, method or step.Therefore, the attached claims are intended to include such process, equipment, hand in the range of them
Section, method or step.
Claims (9)
1. a kind of high-precision telescopic mechanical arm, which is characterized in that including：
Mounting seat (13)；
The first end of underarm case (9), the underarm case (9) is mounted on the mounting seat (13), is arranged in the underarm case (9)
There is the first transmission to walk belt wheel (14), the first transmission step belt wheel (14) is located at the first end of the underarm case (9)；
Upper arm case (3), the upper arm case (3) is interior to be provided with terminal step belt wheel (18), and the terminal step belt wheel (18) is located at described
The end face of the first end of upper arm case (3), the terminal step belt wheel (18) is connected with the clamping jaw firm banking for clamping jaw to be arranged
(19)；The second end of the upper arm case (3) walks belt wheel (5) by the second transmission and the second end of the underarm case (9) rotates company
It connects, the second transmission step belt wheel (5) includes that top step belt wheel, mounting disc and the lower part being fixedly connected sequentially walk belt wheel, described
Top step belt wheel is located in the upper arm case (3), and the top step belt wheel walks belt wheel by terminal synchronous belt (2) and the terminal
(18) it is sequentially connected, the mounting disc connects the second end of the upper arm case (3), and the lower part step belt wheel is located at the underarm case
(9) in, the lower part step belt wheel is sequentially connected by being driven stepping band (6) with the first transmission step belt wheel (14)；
Harmonic speed reducer (10), the output end of the harmonic speed reducer (10) and the first transmission step belt wheel (14) are affixed and same
Step rotation；
The driving end of servo motor (12), the servo motor (12) connects the input of the harmonic speed reducer (10) by pin key
End.
2. high-precision telescopic mechanical arm according to claim 1, which is characterized in that the top step belt wheel and the lower part
The number of teeth for walking belt wheel is different, and the number of teeth of the top step belt wheel and terminal step belt wheel (18) also differs.
3. high-precision telescopic mechanical arm according to claim 1, which is characterized in that also set up in the underarm case (9)
Tensioned adjustment part holder (8) is provided on the tension adjusting member holder (8) for adjusting the transmission stepping band (6)
The first tension adjusting member (7) of tightness；It is additionally provided in the upper arm case (3) and to be adjusted by adjusting the position of itself
The second tension adjusting member (17) of terminal synchronous belt (2) tightness, the quantity of second tension adjusting member (17) are
Two, it is distributed in the both sides of the terminal synchronous belt (2).
4. high-precision telescopic mechanical arm according to claim 1, which is characterized in that the mounting seat (13) is open circles
Column.
5. high-precision telescopic mechanical arm according to claim 4, which is characterized in that further include floor installation plate (11), institute
The first end for stating underarm case (9) is mounted on the mounting seat (13), the servo motor by the floor installation plate (11)
(12) it is mounted on the floor installation plate (11), the servo motor (12) is placed in the mounting seat (13).
6. high-precision telescopic mechanical arm according to claim 1, which is characterized in that further include for sealing the upper arm case
(3) upper arm sealing plate (1) and the underarm sealing plate (4) for sealing the underarm case (9).
7. according to claim 1-6 any one of them high-precision telescopic mechanical arms, which is characterized in that further include servo-driver
(20) and main controller (21), the servo-driver (20) is used for according to the control signal of the main controller (21) to the servo
Motor (12) sends out corresponding drive signal, to realize that the motion state to the servo motor (12) carries out accurate control.
8. high-precision telescopic mechanical arm according to claim 7, which is characterized in that further include position locator (15) and position
Sensor (16) is set, the position locator (15) is fixed on the first transmission step belt wheel (14), the position sensor
(16) judge whether the first transmission step belt wheel (14) reaches by perceiving the rotation angle of the position locator (15)
The extreme position of rotational action, if then will determine that result feeds back to the main controller (21).
9. high-precision telescopic mechanical arm according to claim 8, which is characterized in that the position locator (15) includes ring
Shape plate is put down with the fan-shaped extending part in same with the fan-shaped extension at the annular plate edge, the annular plate is arranged
Face, the annular plate are integrally formed with the fan-shaped extension, and the position sensor (16) is photoelectric sensor.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810559085.5A CN108550546A (en) | 2018-06-01 | 2018-06-01 | A kind of high-precision telescopic mechanical arm |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810559085.5A CN108550546A (en) | 2018-06-01 | 2018-06-01 | A kind of high-precision telescopic mechanical arm |
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| CN108550546A true CN108550546A (en) | 2018-09-18 |
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| CN201810559085.5A Pending CN108550546A (en) | 2018-06-01 | 2018-06-01 | A kind of high-precision telescopic mechanical arm |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110962157A (en) * | 2019-01-29 | 2020-04-07 | 昀智科技（北京）有限责任公司 | Quick stable intelligent three-joint mechanical arm |
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