CN108533712A - A kind of high-precision vertical lift control system - Google Patents
A kind of high-precision vertical lift control system Download PDFInfo
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- CN108533712A CN108533712A CN201810559035.7A CN201810559035A CN108533712A CN 108533712 A CN108533712 A CN 108533712A CN 201810559035 A CN201810559035 A CN 201810559035A CN 108533712 A CN108533712 A CN 108533712A
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- sliding shoe
- servo motor
- control system
- ball screw
- linear guide
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- 230000033001 locomotion Effects 0.000 claims abstract description 26
- 230000005540 biological transmission Effects 0.000 claims abstract description 11
- 230000001360 synchronised effect Effects 0.000 claims description 10
- 238000005096 rolling process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 11
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H37/00—Combinations of mechanical gearings, not provided for in groups F16H1/00 - F16H35/00
- F16H37/12—Gearings comprising primarily toothed or friction gearing, links or levers, and cams, or members of at least two of these types
- F16H37/124—Gearings comprising primarily toothed or friction gearing, links or levers, and cams, or members of at least two of these types for interconverting rotary motion and reciprocating motion
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/2015—Means specially adapted for stopping actuators in the end position; Position sensing means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/22—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members
- F16H25/2204—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members with balls
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H2025/2037—Actuator supports or means for fixing piston end, e.g. flanges
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H2025/2062—Arrangements for driving the actuator
- F16H2025/2081—Parallel arrangement of drive motor to screw axis
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H2025/2062—Arrangements for driving the actuator
- F16H2025/2096—Arrangements for driving the actuator using endless flexible members
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
Abstract
The present invention provides a kind of high-precision vertical lift control system, including mounting seat, guiderail base, the linear guide, ball screw, sliding shoe and servo motor, guiderail base is vertically arranged in mounting seat, the linear guide is vertically arranged in guiderail base, and ball screw is also disposed at guiderail base vertically;Sliding shoe be arranged on ball screw, sliding shoe is threadedly coupled with ball screw, and sliding shoe can move up and down along the linear guide, sliding shoe be used for be connected with extemal component and with the extemal component synchronize pump;Servo motor setting is drivingly connected in mounting seat, servo motor by transmission mechanism and ball screw.Its is simple in structure, and positioning accuracy is high, and movement speed is fast, and stability is good, at low cost, is moved easily so that vertical lift is more steady reliable.
Description
Technical field
The present invention relates to high precision technical field of automation in industry more particularly to a kind of high-precision vertical lift control systems
System.
Background technology
With the development and progress of science and technology, robot technology is widely used in modern manufacturing industry, and majority is to pass through
Mechanical arm device carries out that material is mobile or materiel machining.But the smoothness of existing vertical lifting equipment is relatively low,
Shaking is easy tod produce in handling process, control accuracy is low, and movement speed is slower, and the stability of long time continuous working is poor.
Especially in the semicon industry high to required precision, by taking the wafer production of semicon industry as an example, partly leading
In body factory, wafer final production will pass through procedures up to a hundred at chip, wherein to pass through works such as a series of " carve, erosion, grind "
Sequence, each procedure is transported toward next process after the completion, in transport process, often needs to be transferred to separately from an operating platform
On one operating platform, and two platforms are sometimes not in the same plane, this is required to go by wafer transport robot
It completes.And wafer transport robot has to reach the requirements such as high precision, high stability.
Invention content
In view of the present situation of the prior art, the purpose of the present invention is to provide a kind of high-precisions to be vertically moved up or down control system,
Simple in structure, positioning accuracy is high, and movement speed is fast, and stability is good, at low cost so that vertical lift is more steady reliable.
To achieve the above object, technical scheme is as follows:
A kind of high-precision vertical lift control system, including:
Mounting seat;
Guiderail base, the guiderail base are vertically arranged in the mounting seat;
The linear guide, the linear guide are vertically arranged in the guiderail base;
Ball screw, the ball screw are vertically arranged in the guiderail base;
Sliding shoe, the sliding shoe are arranged on the ball screw, and the sliding shoe connects with the ball screw screw thread
It connects, the sliding shoe can move up and down along the linear guide, and the sliding shoe with extemal component for being connected
And with the extemal component synchronize pump;
Servo motor, the servo motor are arranged in the mounting seat, and the servo motor passes through transmission mechanism and institute
State ball screw drive connection.
Preferably, the transmission mechanism includes step belt wheel and synchronous belt, and the quantity of the step belt wheel is two, one of them
The affixed ball screw of step belt wheel, walks the driving end of the affixed servo motor of belt wheel described in other in which, two
The step belt wheel is connected by toothed belt transmission.
Further, the high-precision vertical lift control system further includes electric machine support, and the electric machine support setting exists
The mounting seat, the servo motor are mounted on the electric machine support, and the servo motor is installed by the electric machine support
In the mounting seat.
Preferably, the both ends of the ball screw are both provided with fixed plate, and the ball screw is solid by the fixed plate
It is scheduled on the guiderail base.
Preferably, sliding block is installed, the sliding shoe is fixed on the sliding block, and the sliding shoe is logical in the linear guide
The sliding block is crossed to be slidably connected with the linear guide.
Further, the quantity of the linear guide is two, two the linear guide parallel interval settings, every institute
The linear guide is stated to be respectively provided with there are two the sliding block.
Preferably, the high-precision vertical lift control system further includes servo-driver and main controller, and the servo is driven
Dynamic device is used to send out corresponding drive signal to the servo motor according to the control signal of the main controller, to realize to institute
The motion state for stating servo motor carries out accurate control.
Further, high-precision vertical lift control system further includes position locator and position sensor, described
Position locator is fixed on the sliding shoe, and the position sensor is used to detect the lowest order confidence of the position locator
It ceases and the extreme lower position information is fed back into the main controller.
Further, the position locator includes sequentially connected first segment plate, second segment plate and third section plate,
In, the first segment plate is vertically arranged with the third section plate, and the first segment plate is parallel with the third section plate, described
Second segment plate level is arranged, and the first end of the second segment plate connects the lower end of the first segment plate, the second segment plate
Second end connects the upper end of the third section plate;The position sensor is photoelectric sensor.
Further, two step belt wheels are located at the upside of the mounting seat, and the sliding shoe also is located at the peace
Fill the upside of pedestal.
The beneficial effects of the invention are as follows:
The high-precision of the present invention is vertically moved up or down control system, simple in structure, and positioning accuracy is high, and movement speed is fast, stablizes
Property it is good, it is at low cost, be moved easily the continuous work, it can be achieved that long-time stable, by by the convert rotational motion of lead screw at hang down
Straight elevating movement limits movement as a result of the linear guide and sliding shoe so that vertical lift is more steady reliable;
Vertical displacement control can be made more accurate using servo motor;Additionally, due to using guiderail base so that equipment load carries significantly
Height also further improves the stationarity of equipment in use.Transmission mechanism is driven using servo motor, in main controller and is watched
Rotary screw rod under the control of driver is taken, so that sliding shoe thereon is pumped along the linear guide, main controller
Equipped with high-accuracy high-efficiency control software, can be accurately controlled under the driving of dedicated servo driver servo motor rotating speed,
The movable informations such as acceleration, position, brake drive sliding shoe along the side of the linear guide under the driving of high precision ball lead screw
High-precision quick control is realized upwards.
Description of the drawings
Fig. 1 is that the high-precision of the present invention is vertically moved up or down the decomposition diagram of one embodiment of control system;
Reference sign:
1 mounting seat;2 guiderail bases;3 the linear guides;4 ball screws;5 sliding shoes;
6 servo motors;7 electric machine supports;8 step belt wheels;9 synchronous belts;10 position sensors;
11 position locators;12 main controllers;13 servo-drivers.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, right with reference to the accompanying drawings and embodiments
The high-precision vertical lift control system of the present invention is further elaborated.It should be appreciated that specific reality described herein
It applies example to be only used for explaining the present invention, be not intended to limit the present invention.
Referring to Fig.1, the high-precision vertical lift control system of one embodiment of the invention includes mounting seat 1, guiderail base
2, the linear guide 3, ball screw 4, sliding shoe 5, servo motor 6.
Wherein, guiderail base 2 is vertically arranged in mounting seat 1, and the linear guide 3 is vertically arranged in guiderail base 2, ball wire
Bar 4 is also vertically arranged in guiderail base 2;Sliding shoe 5 is arranged on ball screw 4, and sliding shoe 5 is threadedly coupled with ball screw 4,
Sliding shoe 5 can move up and down along the linear guide 3, sliding shoe 5 for be connected with extemal component and with the outside
Functional component, which synchronizes, to pump.Sliding shoe 5 is connected with extemal component, realizes the purpose to pump,
In the present embodiment, extemal component can be grabbing device.In other embodiments, extemal component is alternatively with processing
The device of function.
Preferably, being equipped with sliding block in the linear guide 3, sliding shoe 5 is fixed on the sliding block, and sliding shoe 5 passes through the cunning
Block is slidably connected with the linear guide 3, so may further ensure that the stability loaded on sliding shoe during the motion.This reality
It applies in example, the quantity of the linear guide 3 can be two, and two 3 parallel interval of the linear guide settings, every the linear guide 3 is respectively provided with
There are two the sliding blocks, that is to say, that there are four the sliding blocks for setting altogether in two the linear guides 3.So design can be further
Improve the stationarity that sliding shoe 5 moves up and down.
The setting of servo motor 6 is drivingly connected in mounting seat 1, servo motor 6 by transmission mechanism and ball screw 4.It watches
Take power resources of the motor 6 as the jacking system.In the present embodiment, servo motor 6 is mounted on installation bottom by electric machine support 7
Seat 1;Wherein the setting of electric machine support 7 is mounted on electric machine support 7 in mounting seat 1, servo motor 6.Using 7 support of electric machine support carry and
Fixed servo motor 6 ensures that servo motor 6 steadily operates.Preferably, the both ends of ball screw 4 are both provided with fixed plate, ball
Lead screw 4 is fixed on guiderail base 2 by the fixed plate.Guiderail base 2 is used for fixing and debugging the linear guide 3 and roller silk
The both ends fixed plate of thick stick 4.The fixed plate at 4 both ends of ball screw can be identical, can also differ.
In the present embodiment, the profile of guiderail base 2 is in quadrangle, and the middle part of guiderail base 2 is provided with opening or groove, sliding
The cross section of motion block 5 is in T shape, and the protrusion of sliding shoe 5 is partially disposed in the opening or groove, the opening or groove conduct
Bit space is kept away in the protrusion part of sliding shoe 5.
Open slot is equipped on the left and right side of guiderail base 2, the fixed plate of 4 lower end of ball screw includes T-shaped
There is lug boss, the lug boss to be formed and be limited with the T-shaped main body on the surface of main body, the lateral part of the T-shaped main body
Position step, the lateral part of the T-shaped main body are matched with the open slot, the lateral part part of the T-shaped main body
Ground is nested in the open slot, and the lug boss is placed in outside the open slot, that is to say, that in the transverse direction of the T-shaped main body
When part is matched with the open slot, the lug boss can limit the lateral part of the T-shaped main body.In this way
The stability that can effectively improve ball screw 4, to further increase the running stability of sliding shoe 5.The linear guide 3 can be
I-shaped guide rail, the sliding block are slidably snap-fitted in the linear guide 3, in this way it is also possible that sliding shoe 5 run it is more stable.
As a kind of preferable mode, transmission mechanism includes step belt wheel 8 and synchronous belt 9, and the quantity of step belt wheel 8 is two,
One of step 8 affixed ball screw 4 of belt wheel, other in which walk the driving end of 8 affixed servo motor 6 of belt wheel, two step bands
Wheel 8 is sequentially connected by synchronous belt 9.Ball screw 4 is formed dynamic in vertical direction under the driving of step belt wheel 8 and synchronous belt 9
Power pushes the up and down motion of sliding shoe 5.It walks belt wheel 8 and matches the transmission that synchronous belt 9 realizes amount of spin, ensure the steady of rotation load
It is qualitative.In the present embodiment, two step belt wheels 8 are located at the upside of mounting seat 1, and sliding shoe 5 also is located at the upside of mounting seat 1,
So convenient for assembly.In other embodiments, two step belt wheels 8 can be located at the downside of mounting seat 1, and sliding shoe 5 can be located at peace
The upside for filling pedestal 1 can further save space in this way, reduce vibration.
As a kind of preferable mode, it further includes servo-driver 13 and main controller that high-precision, which is vertically moved up or down control system,
12, servo-driver 13 is used to send out corresponding drive signal to servo motor 6 according to the control signal of main controller 12, to real
Accurate control now is carried out to the motion state of servo motor 6.
Preferably, high-precision vertical lift control system further includes position locator 11 and position sensor 10, position is fixed
Position device 11 is fixed on sliding shoe 5, and position sensor 10 is used for the extreme lower position information of test position locator 11 and will be described
Extreme lower position information feeds back to main controller 12.
In the present embodiment, position locator 11 includes sequentially connected first segment plate, second segment plate and third section plate,
In, first segment plate is vertically arranged with third section plate, and first segment plate is parallel with third section plate, the setting of second segment plate level, the
The lower end of the first end connection first segment plate of two sections of plates, the upper end of the second end connection third section plate of second segment plate;Position
Sensor 10 is photoelectric sensor.Position sensor 10 can be mounted in the fixed plate of 4 lower end of ball screw.
Position locator 11 plays the role of marking sliding shoe position, position locator 11 that can carry out with sliding shoe 5
Lower movement, and contacted with position sensor 10 at bottom, position sensor 10 will transmit relevant limit position signal
To main controller 12, to realize limitation and detection to 5 movement position of sliding shoe.Position sensor 10 is positioned by test position
The extreme lower position of device 11, and extreme lower position signal is passed into main controller 12, it is soft that main controller 12 is equipped with high-precision motion control
Part, control servo-driver 13 send out different control drive signals, to realize that the precision to 6 motion state of servo motor is controlled
System.The servo-driver 13 to match with servo motor 6 is by receiving the control signal of main controller 12 (master controller) to servo
Motor 6 sends out corresponding drive signal.
The vertical lift control system of above example, global design structure are mainly made of following components:Driving
Control section, movement transferring portion point, perpendicular positioning motion parts, position locator, position sensor and multiple firm bankings
It constitutes.Wherein drive control part includes main controller and servo-driver;Movement transferring portion point includes servo motor, walk belt wheel,
Synchronous belt etc.;Perpendicular positioning motion parts are by ball screw, the linear guide, sliding shoe, the components such as screw both end fixed plate composition.
When actual operation, control instruction is sent out from main controller to servo-driver, then driving letter is sent out by servo-driver
The rotation of number driving servo motor, the rotation of servo motor pass to ball screw by step belt wheel and synchronous belt, pass through ball wire
Rotating to push sliding shoe under the guiding of two the linear guides for bar, pumps.
Wherein, guiderail base plays the role of fixed and adjusts the linear guide and ball screw both ends fixed plate, can protect
The installation accuracy of each guide rail is demonstrate,proved, so that it is guaranteed that stability and flatness that sliding block moves up and down, position locator can be with sliding block
It moves up and down, and is contacted with alignment sensor at bottom, alignment sensor will pass relevant limit position signal
Main controller is passed, to realize limitation and detection to slide block movement position.
The high-precision of the above various embodiments is vertically moved up or down control system, simple in structure, and positioning accuracy is high, movement speed
Soon, stability is good, at low cost, is moved easily the continuous work, it can be achieved that long-time stable, by turning the rotary motion of lead screw
It is melted into vertical displacement movement, movement is limited as a result of the linear guide and sliding shoe so that vertical lift is more flat
It is steady reliable;Vertical displacement control can be made more accurate using servo motor;Additionally, due to using guiderail base so that equipment load
It greatly improves, also further improves the stationarity of equipment in use.
Transmission mechanism, the rotary screw rod under the control of main controller and servo-driver is driven to make thereon using servo motor
Sliding shoe can pump along the linear guide, main controller is equipped with high-accuracy high-efficiency control software, special
The movable informations such as rotating speed, acceleration, position, the brake of servo motor can be accurately controlled under the driving of servo-driver, in height
Under the driving of precision ball screw, sliding shoe is driven to realize high-precision quick control along the direction of the linear guide.
It should be noted that in the absence of conflict, the feature in the above various embodiments and embodiment can be mutual group
It closes.
Although the present invention and its advantage has been described in detail it should be appreciated that without departing from by the attached claims
Defined by can carry out various changes, replacement and transformation in the case of the spirit and scope of the present invention.Moreover, the model of the present invention
Enclose the specific embodiment for being not limited only to process, equipment, means, method and steps described in specification.In the art is common
Technical staff executes and corresponding reality described herein from the disclosure it will be readily understood that can be used according to the present invention
Apply the essentially identical function of example or obtain the result essentially identical with it, existing and process to be developed in future, equipment,
Means, method or step.Therefore, the attached claims are intended to include such process, equipment, hand in the range of them
Section, method or step.
Claims (10)
1. a kind of high-precision is vertically moved up or down control system, which is characterized in that including:
Mounting seat (1);
Guiderail base (2), the guiderail base (2) are vertically arranged in the mounting seat (1);
The linear guide (3), the linear guide (3) are vertically arranged in the guiderail base (2);
Ball screw (4), the ball screw (4) are vertically arranged in the guiderail base (2);
Sliding shoe (5), the sliding shoe (5) are arranged on the ball screw (4), the sliding shoe (5) and the ball wire
Bar (4) is threadedly coupled, and the sliding shoe (5) can move up and down along the linear guide (3), and the sliding shoe (5) is used for
Be connected with extemal component and with the extemal component synchronize pump;
Servo motor (6), the servo motor (6) are arranged in the mounting seat (1), and the servo motor (6) passes through transmission
Mechanism is drivingly connected with the ball screw (4).
2. high-precision according to claim 1 is vertically moved up or down control system, which is characterized in that the transmission mechanism includes step
The quantity of belt wheel (8) and synchronous belt (9), the step belt wheel (8) is two, one of them described affixed described rolling of step belt wheel (8)
Ballscrew (4) walks the driving end of belt wheel (8) affixed described servo motor (6), two step belt wheels described in other in which
(8) it is sequentially connected by synchronous belt (9).
3. high-precision according to claim 2 is vertically moved up or down control system, which is characterized in that further include electric machine support (7),
In the mounting seat (1), the servo motor (6) is mounted on the electric machine support (7), institute for electric machine support (7) setting
It states servo motor (6) and the mounting seat (1) is mounted on by the electric machine support (7).
4. high-precision according to claim 1 is vertically moved up or down control system, which is characterized in that the ball screw (4)
Both ends are both provided with fixed plate, and the ball screw (4) is fixed on the guiderail base (2) by the fixed plate.
5. high-precision according to claim 1 is vertically moved up or down control system, which is characterized in that on the linear guide (3)
Sliding block is installed, the sliding shoe (5) is fixed on the sliding block, and the sliding shoe (5) is led by the sliding block and the straight line
Rail (3) is slidably connected.
6. high-precision according to claim 5 is vertically moved up or down control system, which is characterized in that the linear guide (3)
Quantity is two, two the linear guide (3) parallel intervals settings, and every the linear guide (3) is respectively provided with that there are two institutes
State sliding block.
7. according to claim 1-6 any one of them high-precision vertical lift control systems, which is characterized in that further include servo
Driver (13) and main controller (12), the servo-driver (13) are used for according to the control signal of the main controller (12) to institute
It states servo motor (6) and sends out corresponding drive signal, to realize that the motion state to the servo motor (6) carries out accurate control
System.
8. high-precision according to claim 7 is vertically moved up or down control system, which is characterized in that further include position locator
(11) it is fixed on the sliding shoe (5) with position sensor (10), the position locator (11), the position sensor
(10) it is used to detect the extreme lower position information of the position locator (11) and the extreme lower position information is fed back into the master
Control machine (12).
9. high-precision according to claim 8 is vertically moved up or down control system, which is characterized in that the position locator (11)
Including sequentially connected first segment plate, second segment plate and third section plate, wherein the first segment plate is perpendicular with the third section plate
Straight setting, the first segment plate is parallel with the third section plate, and the second segment plate level is arranged, and the of the second segment plate
One end connects the lower end of the first segment plate, and the second end of the second segment plate connects the upper end of the third section plate;Institute
It is photoelectric sensor to state position sensor (10).
10. according to claim 1-6 any one of them high-precision vertical lift control systems, which is characterized in that described in two
Step belt wheel (8) is located at the upside of the mounting seat (1), and the sliding shoe (5) also is located at the upside of the mounting seat (1).
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CN201810559035.7A CN108533712A (en) | 2018-06-01 | 2018-06-01 | A kind of high-precision vertical lift control system |
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CN201810559035.7A CN108533712A (en) | 2018-06-01 | 2018-06-01 | A kind of high-precision vertical lift control system |
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Cited By (9)
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CN109873526A (en) * | 2018-09-30 | 2019-06-11 | 昀智科技(北京)有限责任公司 | Quick high stability vertical movement system |
CN109976389A (en) * | 2019-04-02 | 2019-07-05 | 重庆市恩睿斯科技有限责任公司 | A kind of deviation rectification actuator control system and method for correcting error |
CN110932505A (en) * | 2019-12-12 | 2020-03-27 | 山东中际智能装备有限公司 | Device for quickly adjusting position of notch |
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CN109873526A (en) * | 2018-09-30 | 2019-06-11 | 昀智科技(北京)有限责任公司 | Quick high stability vertical movement system |
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CN109976389A (en) * | 2019-04-02 | 2019-07-05 | 重庆市恩睿斯科技有限责任公司 | A kind of deviation rectification actuator control system and method for correcting error |
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CN110932505A (en) * | 2019-12-12 | 2020-03-27 | 山东中际智能装备有限公司 | Device for quickly adjusting position of notch |
CN111632282A (en) * | 2020-06-19 | 2020-09-08 | 合肥中科离子医学技术装备有限公司 | Beam transport line beam collimation system for superconducting proton treatment |
EP4063690A1 (en) * | 2021-03-23 | 2022-09-28 | Regner Engineering, S.L.U. | Electric linear actuator with a variable stroke |
CN113236726A (en) * | 2021-05-08 | 2021-08-10 | 丽水市杰祥科技有限公司 | Linear module with novel structure and use method thereof |
CN113236726B (en) * | 2021-05-08 | 2022-04-08 | 丽水市杰祥科技有限公司 | Linear module and using method thereof |
CN113915478A (en) * | 2021-11-01 | 2022-01-11 | 中国航空工业集团公司北京长城计量测试技术研究所 | High-precision vertical moving platform device |
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