CN108550539B - 一种二极管酸洗处理系统 - Google Patents
一种二极管酸洗处理系统 Download PDFInfo
- Publication number
- CN108550539B CN108550539B CN201810491382.0A CN201810491382A CN108550539B CN 108550539 B CN108550539 B CN 108550539B CN 201810491382 A CN201810491382 A CN 201810491382A CN 108550539 B CN108550539 B CN 108550539B
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- rotating
- rotating shaft
- plate
- pickling
- cooling module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810491382.0A CN108550539B (zh) | 2018-05-21 | 2018-05-21 | 一种二极管酸洗处理系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810491382.0A CN108550539B (zh) | 2018-05-21 | 2018-05-21 | 一种二极管酸洗处理系统 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108550539A CN108550539A (zh) | 2018-09-18 |
CN108550539B true CN108550539B (zh) | 2020-09-04 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201810491382.0A Expired - Fee Related CN108550539B (zh) | 2018-05-21 | 2018-05-21 | 一种二极管酸洗处理系统 |
Country Status (1)
Country | Link |
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CN (1) | CN108550539B (zh) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102244001A (zh) * | 2011-06-29 | 2011-11-16 | 常州佳讯光电产业发展有限公司 | 二极管酸洗脱水工艺及其设备 |
WO2014039928A1 (en) * | 2012-09-08 | 2014-03-13 | Skyworks Solutions, Inc. | Systems and methods related to ablation and cleaning during manufacture of radio-frequency modules |
CN105390424A (zh) * | 2015-12-10 | 2016-03-09 | 重庆凯西驿电子科技有限公司 | 二极管酸洗装置 |
CN106128981A (zh) * | 2016-08-29 | 2016-11-16 | 天津汉德威药业有限公司 | 一种轴向二极管酸洗装置 |
CN107658251A (zh) * | 2017-11-06 | 2018-02-02 | 重庆长捷电子有限公司 | 二极管芯片酸洗设备 |
-
2018
- 2018-05-21 CN CN201810491382.0A patent/CN108550539B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102244001A (zh) * | 2011-06-29 | 2011-11-16 | 常州佳讯光电产业发展有限公司 | 二极管酸洗脱水工艺及其设备 |
WO2014039928A1 (en) * | 2012-09-08 | 2014-03-13 | Skyworks Solutions, Inc. | Systems and methods related to ablation and cleaning during manufacture of radio-frequency modules |
CN105390424A (zh) * | 2015-12-10 | 2016-03-09 | 重庆凯西驿电子科技有限公司 | 二极管酸洗装置 |
CN106128981A (zh) * | 2016-08-29 | 2016-11-16 | 天津汉德威药业有限公司 | 一种轴向二极管酸洗装置 |
CN107658251A (zh) * | 2017-11-06 | 2018-02-02 | 重庆长捷电子有限公司 | 二极管芯片酸洗设备 |
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Publication number | Publication date |
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CN108550539A (zh) | 2018-09-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: 230009 Guoxuan K Xijia, No. 502 Wangjiangxi Road, Shushan District, Hefei City, Anhui Province Applicant after: Li Hui Address before: 214432 Jiangsu Sfeir Electric Co., Ltd. No. 99 Chengjiang East Road, Jiangyin City, Wuxi City, Jiangsu Province Applicant before: Li Hui |
|
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20200811 Address after: 221300 west side of Taihu Avenue and south side of Fumei Road, Pizhou high tech Industrial Development Zone, Xuzhou City, Jiangsu Province Applicant after: Pizhou Anda Electronics Co.,Ltd. Address before: 230009 Guoxuan K Xijia, No. 502 Wangjiangxi Road, Shushan District, Hefei City, Anhui Province Applicant before: Li Hui |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200904 |