CN108517504A - Multiple film layer continuous coating device and method - Google Patents
Multiple film layer continuous coating device and method Download PDFInfo
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- CN108517504A CN108517504A CN201810696329.4A CN201810696329A CN108517504A CN 108517504 A CN108517504 A CN 108517504A CN 201810696329 A CN201810696329 A CN 201810696329A CN 108517504 A CN108517504 A CN 108517504A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
It includes sequentially connected surface treatment chamber, multiple film layer coating chamber and slice vacuum chamber that the present invention, which discloses a kind of multiple film layer continuous coating device and method, equipment, and workpiece reciprocating device is equipped in each vacuum chamber；Workpiece reciprocating device is set to below substrate frame, magnetic steering mechanism is equipped with above substrate frame, active drive support roller and driven bogie wheel in workpiece reciprocating device are respectively arranged in the indoor mounting bracket of vacuum, multiple driven bogie wheels are distributed between two adjacent active drive support rollers, under the drive of active drive support roller, substrate frame is moved back and forth along driven bogie wheel and magnetic steering mechanism.Its method is that workpiece reciprocating device drives substrate frame and workpiece to carry out multiple roughing in surface and cleaning treatment in the indoor reciprocating movement of surface treatment；Then it is moved back and forth in multiple film layer coating chamber, realizes multiple film layer plated film；Finally sent out from slice vacuum chamber by workpiece.The present invention can effectively simplify device structure, improve plating membrane efficiency and evenness of membranous layer.
Description
Technical field
The present invention relates to technical field of vacuum plating, more particularly to a kind of multiple film layer continuous coating device and method.
Background technology
It is right in either linear filming equipment or coiled filming equipment in existing vacuum coating equipment
It is all made of one-time continuous in the plated film mode of workpiece or base material and carries out plated film by way of, in this case, one in filming equipment
As need multiple vacuum film coating chambers for continuously connecting of setting or multiple film coating units and multiple targets to carry out multiple plated film,
Can just thicknesses of layers be made to reach required thickness.In actual production, the device structure bulky complex of which, equipment cost is high,
Simultaneously as the different indoor vacuum degrees of plated film are difficult to reach highly consistent, therefore even if workpiece or base material continue through by
The uniformity of multiple plated film, superficial film is also difficult to be protected.In addition, workpiece be usually used the structure of friction roller into
Row transmission, which easy to produce slipping phenomenon in equipment high-speed cruising, influence the normal conveying of workpiece, also influence workpiece
Surface coating quality.
In addition, in existing vacuum coating equipment, target door generally uses laterally opened structure, but is directed to large scale equipment
It says, opening ways operation is very inconvenient, for target, replaces or maintenance cost is also just quite high.And for side
Just it installs, generally using smaller (be generally less than 150mm) the target pipe of diameter, sputtering area is small, plating membrane efficiency also the, it is difficult to realize
Quick plated film operation.
Invention content
That it is an object of the invention to overcome the deficiencies of the prior art and provide a kind of plated films is efficient, evenness of membranous layer is high and
The relatively simple multiple film layer continuous coating device of device structure.
Another object of the present invention is to provide a kind of multiple film layer continuous coating methods realized by above equipment.
The technical scheme is that：A kind of multiple film layer continuous coating device, including it is sequentially connected surface treatment chamber, more
Film layer coating chamber and slice vacuum chamber are equipped with workpiece in surface treatment chamber, multiple film layer coating chamber and slice vacuum chamber and back and forth move
Motivation structure；Workpiece reciprocating device is set to the lower section of substrate frame, and the top of substrate frame is equipped with magnetic steering mechanism, and workpiece back and forth moves
Motivation structure includes active drive support roller and driven bogie wheel, and active drive support roller and driven bogie wheel are respectively arranged on vacuum chamber (should
Vacuum chamber be surface treatment chamber, multiple film layer coating chamber or slice vacuum chamber) in mounting bracket on, adjacent two active drives
Multiple driven bogie wheels are distributed between support roller, under the drive of active drive support roller, substrate frame is along driven bogie wheel and magnetic conductance
It is moved back and forth to mechanism.In multiple film layer coating chamber, be positioned over the workpiece in substrate frame workpiece reciprocating device band
Under dynamic, magnetic control target (i.e. following rotary targets) multiple reciprocating movement made above can be effective due to being carried out in same vacuum chamber
Avoid the problem that existing equipment is once inconsistent (i.e. aberration) by front and back film layer caused by magnetic control target progress plated film, to improve
The uniformity of film layer before and after workpiece surface.In addition, workpiece fast moves back and forth before magnetic control target, the hair of workpiece surface can be reduced
Heat, realizes low temperature plated film, the workpiece for keeping some heatproofs not high can also realize multilayer film and compared with thick film layers plated film (because of plated film
Layer is thicker, and its calorific value is bigger).Wherein, surface treatment chamber carries out workpiece surface at roughening and cleaning before workpiece plated film
Reason, improves the adhesive force of film plating layer, improves the quality of film layer, and another aspect ion surface processing procedure is a kind of effective
Degassing procedure can thoroughly remove the gas of the substrate surface of plated film, to realize the plated film film layer of high-purity in plated film.
The lower part of the substrate frame is equipped with support square steel, and support square steel is equipped with towards the side of workpiece reciprocating device and leads
To slot, rack and compressed spring are equipped in guide groove, the active drive support roller in workpiece reciprocating device is equipped with gear, tooth
The bottom surface of item is matched with gear, and the top surface of rack is connected by compressed spring with support square steel；The side of support square steel is equipped with
The side of slot hole, rack is equipped with positioning pin, and positioning pin is active in slot hole.Wherein, rack on the guide groove of substrate frame can on
Lower activity, and match running position and positioning to limit rack by the way that positioning pin and slot hole is arranged.Base is driven by gear
Rack on horse, makes substrate frame move forward, since the effect of rack-and-pinion can make work rest movement speed uniformly, steadily,
Reduce the structure of friction wheel employed in existing equipment, avoids the generated slipping phenomenon when high speed moves back and forth.In this way
It has been greatly improved the stability of coating process, the uniformity of reliability and film layer.Compressed spring allows rack to float, in this way
When the gear on different active drive wheels generates asynchrony phenomenon, can be moved through by the floating of rack to reduce substrate frame
The jitter phenomenon generated in journey.
In the workpiece reciprocating device, active drive support roller includes power input shaft, power input seat, the first idler wheel
Axis, the first front wheel and the first rear roller, power input seat and are set in mounting bracket, and power input shaft is set to power and inputs seat
In, one end of power input shaft and the first idler wheel axis connection, the first front wheel and the first rear roller are installed on by bearing respectively
On first roller shaft, it is also equipped with gear between the first front wheel and the first rear roller, is rolled after the first front wheel, gear and first
Wheel is coaxially installed on the first roller shaft.
In the workpiece reciprocating device, driven bogie wheel after the second roller shaft, the second front wheel and second including rolling
Wheel, one end of the second roller shaft are set in mounting bracket, and the second front wheel and the second rear roller are installed on the by bearing respectively
Formed on second wheel axis, between the second front wheel and the second rear roller for rack by groove (i.e. the recess width is about etc.
In rack width, during substrate frame moves, which can play the role of positioning to rack, place substrate frame sideslip).
In the surface treatment chamber, multiple film layer coating chamber and slice vacuum chamber, workpiece reciprocating device is in same vacuum
When interior is equipped with multiple active drive wheels, one of active drive wheel is equipped with driving motor, leads between each active drive wheel
Cross power transmission chain and drive sprocket be attached (structure and transmission principle of the power transmission chain and drive sprocket with it is existing
There are similar devices identical).
The magnetic steering mechanism includes magnet fixed frame, preceding magnet, rear magnet and center magnet, and magnet fixed frame is set to peace
It fills on holder, for magnet fixed frame in the U-shaped shape that Open Side Down, magnet is stretched into the side of substrate frame from the opening of magnet fixed frame
In fixed frame, the both sides up and down of magnet fixed frame opening are respectively equipped with preceding magnet and rear magnet, during the top of substrate frame is equipped with
Between magnet, preceding magnet, center magnet and rear magnet are arranged in parallel successively, in adjacent two magnet, adjacent two pendant polar phases
Together.The setting of magnetic steering mechanism can reduce the frictional force generated with directive wheel or guide groove in traditional equipment, also reduce Yin Mo
The dust generated is wiped, the pin hole generated when plated film, therefore the use of magnetic steering mechanism are influenced, reduces upper guiding under substrate frame
It rubs, and the dust generated by friction, realizes the plated film of high quality.
The both sides up and down of substrate frame, by the collective effect of magnetic steering mechanism and workpiece reciprocating device, rack is in base
Can be freely up and down movable on the guide groove of horse, rack downstream position and positioning are limited by positioning pin；Compressed spring by rack to
It pushes, the magnet on magnet fixed frame is generated to be oriented to and be used, and so that substrate frame is located in magnet fixed frame always by its guiding role
Centre.
Multigroup rotary target is equipped in the multiple film layer coating chamber, every group of rotary target includes two target pipes being set up in parallel, respectively
Target pipe structure is identical, and water proof set is equipped in target pipe, cooling duct is formed between the outer wall and the inner wall of target pipe of water proof set, target pipe
Center is equipped with water inlet pipe, and one end of water inlet pipe is connected to cooling duct；Water proof set carries the tubular structure of scalloped recess in outer wall,
Scalloped recess is located at the side of water proof set, and scalloped recess is connected to form one with cooling duct, and sputtering is equipped in scalloped recess
Component.Wherein, sputtering component includes magnetic conductive board, multiple magnet (i.e. following center magnetic patch and side magnetic patch), fixed screw and tune
Screw is saved, magnetic conductive board is installed on by fixed screw on the fixed block of water proof set, and multiple magnet are distributed in sector on magnetic conductive board,
Adjusting screw is used to adjust the installation site of magnetic conductive board.It is the water inlet pipe of cooling water among target pipe, water enters from upper end through water inlet
Pipe is flowed out through to the lower end of target pipe, water by lower end, and the cooling-water duct through water proof set outside up flows to the upper end of target pipe, warp
Outside the water outlet outflow target pipe of upper end, for magnetic conductive board to be fixedly mounted, magnetic conductive board is adjusted the fixed block of waterproof jacket by adjusting screw
Highly, center magnetic patch is housed, both sides are equipped with side magnetic patch, the magnetic direction in the magnetic field and side magnetic patch of intermediate magnetic patch on magnetic conductive board
On the contrary.Wherein, since target pipe diameter is larger, because needing to carry out water cooling in the rotary target course of work, if entire target pipe carries out
Water flowing, then the weight of target pipe can be very big, and the bearing support of entire target pipe is made to afford larger load, and target pipe rotates reliable
Property and stability can relatively be deteriorated, the present invention increases water proof set in target pipe, and plastic filler is arranged, and greatly reduces in this way
The weight of water in target pipe, alleviates the overall weight of target, is also substantially increased to the stability and reliability of target rotation.Its
In, multigroup rotary target can be carried out at the same time plated film work, also can independently carry out plated film work, and the film layer needed for workpiece is thick
Degree or film layer quantity are selected.
The angle of the scalloped recess is more than 90 °；A diameter of 250~380mm of target pipe；Target pipe appearance
The distance between face and workpiece in substrate frame are more than 200mm.Wherein, in actual production, target pipe diameter can be usedWithThree kinds of models, sputtering area compared with
Greatly, the film layer amount of formation is also big, compares current minor diameter target pipe, and plating membrane efficiency can be effectively improved, and realize quickly plating
Film operation.The distance between target surface and workpiece are more than 200mm, on the one hand can effectively improve the uniformity of its film layer, on the other hand
The heat that the heat of target pipe surface is radiated workpiece is small, therefore also solves the problem of temperature rise of workpiece, realizes the low substrate of heatproof
Plated film.
The side of the rotary target is equipped with target door, and rotary target is installed on target door；The lower section of target door is equipped with door hinge, and leads to
Door hinge is crossed to connect with the outer wall of multiple film layer coating chamber bottom；The outer wall on multiple film layer coating chamber top is equipped with the steel wire being connected
The top of rope reel and reel driving motor, target door is equipped with steel wire rope, and one end of steel wire rope is fixedly connected with target door, steel wire
The other end of rope is wound on steel wire rope reel.When needing replacing or safeguarding rotary target, reel driving motor drives steel
Cord reel rotates, and releases steel wire rope, and target door rotates around door hinge, is turned into horizontality by vertical state, then carries out
It replaces or safeguards, when needing to close target door, reel driving motor rotates backward, and steel wire rope reel is driven to pack up steel wire rope
Target door can be closed.Since target pipe weight is larger, generally vertical state is used to place when plated film uses, needing replacing or tieing up
When shield, it is transformed into horizontality, it can be easy to operation.
The multiple film layer continuous coating method that the present invention is realized by above equipment, includes the following steps：
(1) surface treatment chamber is vacuumized, when vacuum degree reaches 10Pa~10-1After Pa, workpiece and substrate frame are by work
Part reciprocating device is sent into surface treatment interior and is surface-treated, under the drive of workpiece reciprocating device, substrate frame
It drives workpiece to be moved back and forth in the indoor ion source side of surface treatment, realizes multiple roughing in surface and cleaning treatment；
(2) multiple film layer coating chamber is vacuumized, when vacuum degree reaches 10-2Pa—10-3After Pa, workpiece and substrate frame
It is sent into multiple film layer coating chamber by workpiece reciprocating device and carries out plated film operation, under the drive of workpiece reciprocating device,
Substrate frame drives in workpiece multiple film layer coating chamber and moves back and forth, and realizes multiple film layer plated film；
(3) after the thicknesses of layers on workpiece reaches setting value, workpiece and substrate frame are sent into slice vacuum chamber, then to
It is put into air in slice vacuum chamber, is sent out after vacuum pressure and atmospheric equilibrium, then by workpiece.
Its specific operation process is：
(1) the first vacuum lock positioned at surface treatment chamber side is opened, the substrate frame equipped with workpiece is sent into ion processing
Room；
(2) the first vacuum lock is closed, surface treatment chamber is vacuumized by the first pumped vacuum systems, when vacuum degree reaches
To 10~10-1When Pa, open the indoor ion source of surface treatment, and start workpiece reciprocating device, ion source to workpiece into
Row ion processing；Ion source and workpiece reciprocating device are closed after the completion；
(3) the second vacuum lock between surface treatment chamber and multiple film layer coating chamber, the work that ion processing is crossed are opened
Part and substrate frame are sent into multiple film layer coating chamber；
(5) the second vacuum lock is closed, multiple film layer coating chamber is vacuumized by the second pumped vacuum systems, works as vacuum degree
Reach 10-2Pa~10-3When Pa, it is filled with working gas into multiple film layer coating chamber, starts rotary target and workpiece moves back and forth machine
Structure, workpiece and substrate frame move back and forth before rotary target, carry out multiple plated film；After film layer reaches the thickness of setting, close
Close rotary target and workpiece reciprocating device；
(6) different film layer plated films are if desired carried out, then start new rotary target or flat target, and start workpiece reciprocating movement
Mechanism carries out the plated film operation of next film layer；If without carrying out different film layer plated films, it is directly entered step (7)；
(7) the third vacuum lock between multiple film layer coating chamber and slice vacuum chamber is opened, the work of plated film will be completed
Part and substrate frame are sent into slice vacuum chamber；
(8) third vacuum lock is closed, is delayed the several seconds, is then put into air into slice vacuum chamber, until slice vacuum chamber
Interior pressure and atmospheric equilibrium opens the 4th vacuum lock positioned at slice vacuum chamber side, and workpiece and substrate frame are sent out；
(9) the 4th vacuum lock is closed, slice vacuum chamber is vacuumized by third pumped vacuum systems, so far completes one
Secondary plated film cycle.
First pumped vacuum systems, the second pumped vacuum systems and third pumped vacuum systems used by during aforesaid operations are adopted
With pumped vacuum systems general in existing equipment.
The present invention compared with the existing technology, has the advantages that：
In this multiple film layer continuous coating device and method, by above and below the indoor substrate frame of each vacuum both sides be respectively set
Workpiece reciprocating device and magnetic steering mechanism are, it can be achieved that workpiece carries out multiple ion processing or repeatedly plating in same vacuum chamber
Film, realizes the plated film of arbitrary film layer quantity, and simplifies device structure, reduces occupation area of equipment, can effectively reduce workpiece
Plated film production cost.
In this multiple film layer continuous coating device, it is positioned over drive of the workpiece in substrate frame in workpiece reciprocating device
Under, it is primary to can effectively avoid existing equipment due to being carried out in same vacuum chamber in rotary target multiple reciprocating movement made above
The problem of front and back film layer inconsistent (i.e. aberration) caused by plated film being carried out by magnetic control target, to improve film layer before and after workpiece surface
Uniformity.In addition, workpiece fast moves back and forth before magnetic control target, the calorific value of workpiece surface can be reduced, realizes low temperature plating
Film, the workpiece for keeping some heatproofs not high can also realize multilayer film and compared with the plated film of thick film layers (because of its thicker calorific value of film plating layer
It is bigger).
In this multiple film layer continuous coating device, indoor in surface treatment, the drive of workpiece reciprocator can also be used in workpiece
Repeatedly movement back and forth is carried out, makes ion source that workpiece surface is carried out roughening and cleaning treatment, improves the adhesive force of film plating layer, carry
The high quality of film layer, another aspect ion surface processing procedure are a kind of effective degassing procedures, can be by the substrate table of plated film
The gas in face thoroughly removes, to realize the plated film film layer of high-purity in plated film.
It is matched in substrate frame and the junction setting of workpiece reciprocating device in this multiple film layer continuous coating device
Rack and pinion, wherein rack can be up and down on the guide groove of substrate frame, and is matched by the way that positioning pin and slot hole is arranged
To limit running position and the positioning of rack.The rack in substrate frame is driven by gear, so that substrate frame is moved forward, due to tooth
The effect of wheel rack can make work rest movement speed uniformly, steadily reduce the structure of friction wheel employed in existing equipment, keep away
Exempt from the generated slipping phenomenon when high speed moves back and forth.Be greatly improved in this way the stability of coating process, reliability and
The uniformity of film layer.Compressed spring allows rack to float, in this way when the gear generation on different active drive wheels is asynchronous existing
As when, the jitter phenomenon that substrate frame generates in moving process can be reduced by the floating of rack.
In this multiple film layer continuous coating device, the setting of magnetic steering mechanism, can reduce in traditional equipment and use on the upside of substrate frame
The frictional force that directive wheel or guide groove generate, also reduces the dust generated by friction, influences the pin hole generated when plated film, therefore
The use of magnetic steering mechanism reduces the upper friction being oriented under substrate frame, and the dust generated by friction, realizes high-quality
The plated film of amount.The both sides up and down of substrate frame, by the collective effect of magnetic steering mechanism and workpiece reciprocating device, rack is in base
Can be freely up and down movable on the guide groove of horse, rack downstream position and positioning are limited by positioning pin；Compressed spring by rack to
It pushes, the magnet on magnet fixed frame is generated to be oriented to and be used, and so that substrate frame is located in magnet fixed frame always by its guiding role
Centre, make workpiece conveying more stablize, be also beneficial to the raising of evenness of membranous layer.
In this multiple film layer continuous coating device, rotary target uses large scale target pipe, and water proof set is increased in target pipe, this
Sample greatly reduces the weight of water in target pipe, alleviates the overall weight of target, also big to the stability and reliability of target rotation
It improves greatly.Meanwhile large scale target pipe sputtering area is larger, the film layer amount of formation is also big, compares current minor diameter target pipe,
Plating membrane efficiency can be effectively improved, and realize quick plated film operation.The distance between target surface and workpiece are more than 200mm, on the one hand
The uniformity of its film layer can be effectively improved, the heat that the heat of another aspect target pipe surface is radiated workpiece is small, therefore also solves
The problem of temperature rise of workpiece, realizes the plated film of the low substrate of heatproof.Meanwhile when mounted, substrate frame and vacuum chamber interior walls away from
From less than 50mm, in the moving process of substrate frame, anode voltage becomes smaller smaller, can effectively improve the stability of target work.
In this multiple film layer continuous coating device, the target door of rotary target is arranged to convertible structure, utilizes steel wire rope and door
Its keying is realized in the cooperation of hinge, can facilitate the replacement or maintenance of rotary target, reduces cost of equipment maintenance.
In addition, in this multiple film layer continuous coating device, servo motor drive control can be used in each power drive motor, real
Existing powerdriven high precision and stationarity.
Description of the drawings
Fig. 1 is principle schematic when this multiple film layer continuous coating device is looked up.
Fig. 2 is the structural schematic diagram of each component in multiple film layer coating chamber in Fig. 1.
Fig. 3 is principle schematic when workpiece moves back and forth on the directions A in Fig. 2.
Fig. 4 is in Fig. 3 on the directions B, and knot when magnetic steering mechanism and active drive wheel is respectively set in the upper and lower both sides of substrate frame
Structure schematic diagram.
Fig. 5 is the structural schematic diagram of substrate frame in Fig. 4.
Fig. 6 is the partial structural diagram on the directions C in Fig. 5.
Fig. 7 is the structural schematic diagram of magnetic steering mechanism in Fig. 4.
Fig. 8 is the structural schematic diagram of driven bogie wheel.
Fig. 9 is the mounting structure schematic diagram of rotary target in multiple film layer coating chamber in Fig. 3 on the directions B.
Figure 10 is the schematic cross-section of target pipe in Fig. 9.
Figure 11 is the structural schematic diagram of Figure 10 interval water jackets.
Figure 12 is structural schematic diagram when target door is opened by vertical state anyway to horizontality.
Specific implementation mode
With reference to embodiment, the present invention is described in further detail, and embodiments of the present invention are not limited thereto.
Embodiment
A kind of multiple film layer continuous coating device of the present embodiment, as shown in Figure 1, including sequentially connected surface treatment chamber 1, more
It is reciprocal to be equipped with workpiece in surface treatment chamber, multiple film layer coating chamber and slice vacuum chamber for film layer coating chamber 2 and slice vacuum chamber 3
Mobile mechanism；Workpiece reciprocating device is set to the lower section of substrate frame, and the top of substrate frame is equipped with magnetic steering mechanism, and workpiece is reciprocal
Mobile mechanism includes active drive support roller 4 and driven bogie wheel 5, and active drive support roller and driven bogie wheel are respectively arranged on vacuum chamber
In mounting bracket in (vacuum chamber is surface treatment chamber, multiple film layer coating chamber or slice vacuum chamber), adjacent two actives
Multiple driven bogie wheels are distributed between driving support roller, as shown in Figure 2 or Figure 3, under the drive of active drive support roller, substrate frame
6 move back and forth along driven bogie wheel and magnetic steering mechanism.The side of surface treatment chamber is equipped with the first vacuum lock 7, at surface
It manages room and the junction of multiple film layer coating chamber is equipped with the second vacuum lock 8, multiple film layer coating chamber and the junction of slice vacuum chamber are set
There are third vacuum lock 9, the exit of slice vacuum chamber to be equipped with the 4th vacuum lock 10.Surface treatment chamber is circumscribed with first and vacuumizes
System 11, multiple film layer coating chamber is circumscribed with the second pumped vacuum systems 12, and slice vacuum chamber is circumscribed with third pumped vacuum systems 13.Wherein
Each vacuum lock and each pumped vacuum systems are all made of vacuum lock general in existing equipment and pumped vacuum systems.
Structure such as Fig. 4~8 of magnetic steering mechanism and workpiece reciprocating device set by substrate frame and its upper and lower both sides
It is shown：
As shown in Fig. 4 or Fig. 5, the lower part of substrate frame is equipped with support square steel 14, and support square steel moves back and forth machine towards workpiece
The side of structure is equipped with guide groove 15, and rack 16 and compressed spring 17, the active in workpiece reciprocating device are equipped in guide groove
Support roller is driven to be equipped with gear 18, the bottom surface of rack is matched with gear, and the top surface of rack passes through compressed spring and support square steel
Connect；As shown in fig. 6, the side of support square steel is equipped with slot hole 19, the side of rack is equipped with positioning pin 20, and positioning pin is active in length
In hole.Wherein, rack can be up and down on the guide groove of substrate frame, and is matched by setting positioning pin and slot hole to limit
The running position of rack and positioning.The rack in substrate frame is driven by gear, so that substrate frame is moved forward, due to rack-and-pinion
Effect can make work rest movement speed uniformly, it is steady, reduce the structure of friction wheel employed in existing equipment, avoid in height
Speed generated slipping phenomenon when moving back and forth.It has been greatly improved the stability of coating process, reliability and film layer in this way
Uniformity.Compressed spring allows rack to float, can in this way when the gear on different active drive wheels generates asynchrony phenomenon
The jitter phenomenon that substrate frame generates in moving process is reduced by the floating of rack.
In workpiece reciprocating device, as shown in figure 4, active drive support roller includes power input shaft 21, power input seat
22, the first roller shaft 23, the first front wheel 24 and the first rear roller 25, power input seat and are set in mounting bracket, power input
It is located in power input seat, one end of power input shaft and the first idler wheel axis connection, the first front wheel and the first rear roller point
It is not installed on the first roller shaft by bearing, gear is also equipped between the first front wheel and the first rear roller, is rolled before first
Wheel, gear and the first rear roller are coaxially installed on the first roller shaft.
In workpiece reciprocating device, as shown in figure 8, driven bogie wheel includes the second roller shaft 26, the second front wheel 27
It is set in mounting bracket with one end of the second rear roller 28, the second roller shaft, the second front wheel and the second rear roller pass through respectively
Bearing is installed on the second roller shaft, between the second front wheel and the second rear roller formed for rack by groove (i.e. should
Recess width is approximately equal to rack width, and during substrate frame moves, which can play the role of positioning to rack, places substrate
Frame sideslip).
In surface treatment chamber, multiple film layer coating chamber and slice vacuum chamber, workpiece reciprocating device is in same vacuum chamber
When equipped with multiple active drive wheels, as shown in Fig. 2, one of active drive wheel is equipped with driving motor 29, each active drive
Be attached by power transmission chain 30 and drive sprocket 31 between wheel (structure of the power transmission chain and drive sprocket and
Transmission principle is identical as existing similar devices).
As shown in fig. 7, magnetic steering mechanism includes magnet fixed frame 32, preceding magnet 33, rear magnet 34 and center magnet 35, magnetic
Ferropexy is set up in mounting bracket, and magnet fixed frame is in the U-shaped shape that Open Side Down, and the side of substrate frame is from magnet fixed frame
Opening stretches into magnet fixed frame, and the both sides up and down of magnet fixed frame opening are respectively equipped with preceding magnet and rear magnet, substrate
The top of frame is equipped with center magnet, and preceding magnet, center magnet and rear magnet are arranged in parallel successively, in adjacent two magnet, phase
Adjacent two are pendant polar identical.The setting of magnetic steering mechanism can reduce the friction generated with directive wheel or guide groove in traditional equipment
Power also reduces the dust generated by friction, influences the pin hole generated when plated film, therefore the use of magnetic steering mechanism, reduce
The friction being oriented to is gone up under substrate frame, and the dust generated by friction, realize the plated film of high quality.
The both sides up and down of substrate frame, by the collective effect of magnetic steering mechanism and workpiece reciprocating device, rack is in base
Can be freely up and down movable on the guide groove of horse, rack downstream position and positioning are limited by positioning pin；Compressed spring by rack to
It pushes, the magnet on magnet fixed frame is generated to be oriented to and be used, and so that substrate frame is located in magnet fixed frame always by its guiding role
Centre.
Rotation target structure set by multiple film layer coating chamber is as shown in figs. 9 to 12：
As shown in Fig. 2, being equipped with multigroup rotary target in multiple film layer coating chamber, two groups of rotary targets 36 and one are equipped in the present embodiment
Group flat target 37 (wherein flat target is using flat target mechanism general in existing equipment).Every group of rotary target includes being set up in parallel
Two target pipes, each target pipe structure is identical, is equipped with water proof as shown in fig. 9 or 10, in target pipe 38 and covers 39, the outer wall and target of water proof set
Cooling duct 40 is formed between the inner wall of pipe, the center of target pipe is equipped with water inlet pipe 41, and one end of water inlet pipe is connected to cooling duct；
As shown in figure 11, water proof set in outer wall with scalloped recess tubular structure (its lateral wall using stainless sheet steel support 42, in
The heart be arranged stainless steel tube 43, scalloped recess bottom be arranged fixed plate 44, three formed integral structure), scalloped recess be located at every
The side of water jacket, and scalloped recess is connected to form one with cooling duct, and sputtering component is equipped in scalloped recess.Wherein, it sputters
Component includes magnetic conductive board 45, multiple magnet (i.e. following center magnetic patch 46 and side magnetic patch 47), fixed screw 48 and adjusting screw
49, magnetic conductive board is installed on by fixed screw on the fixed block of water proof set, and multiple magnet are distributed in sector on magnetic conductive board, is adjusted
Screw is used to adjust the installation site of magnetic conductive board.The water inlet pipe of cooling water among target pipe, as shown in the arrow in Fig. 9, water from
Upper end enters through water inlet pipe through to the lower end of target pipe, and water is flowed out by lower end, and the cooling-water duct through water proof set outside is past upper
It to the upper end of target pipe, is flowed out outside target pipe through upper end water outlet, the fixed block of waterproof jacket is for being fixedly mounted magnetic conductive board, magnetic conductive board
Height is adjusted by adjusting screw, center magnetic patch is housed, both sides are equipped with side magnetic patch, the magnetic field and side of intermediate magnetic patch on magnetic conductive board
The magnetic direction of magnetic patch is opposite.Wherein, since target pipe diameter is larger, because needing to carry out water cooling in the rotary target course of work, such as
The entire target pipe of fruit carries out water flowing, then the weight of target pipe can be very big, and the bearing support of entire target pipe is made to afford larger load,
The reliability and stability of target pipe rotation can relatively be deteriorated, and the present invention increases water proof set in target pipe, and plastic filler is arranged
56, the weight of water in target pipe is greatly reduced in this way, alleviates the overall weight of target, to the stability and reliability of target rotation
Also it substantially increases.Wherein, multigroup rotary target can be carried out at the same time plated film work, also can independently carry out plated film work, according to
Thicknesses of layers or film layer quantity needed for workpiece are selected.The angle of scalloped recess is more than 90 °；Target pipe it is a diameter of
250~380mm；The distance between target tube outer surface and workpiece in substrate frame are more than 200mm.Wherein, in actual production, target pipe
Diameter can be used WithThree kinds of models,
Sputtering area is larger, and the film layer amount of formation is also big, compares current minor diameter target pipe, and plating membrane efficiency can be effectively improved,
Realize quick plated film operation.The distance between target surface and workpiece are more than 200mm, on the one hand can effectively improve the uniform of its film layer
Property, the heat that the heat of another aspect target pipe surface is radiated workpiece is small, therefore also solves the problem of temperature rise of workpiece, realizes
The plated film of the low substrate of heatproof.
As shown in figure 12, the side of rotary target is equipped with target door 50, and rotary target is installed on target door；The lower section of target door is equipped with door
Hinge 51, and connect with the outer wall of multiple film layer coating chamber bottom by door hinge；The outer wall on multiple film layer coating chamber top is equipped with
The top of the steel wire rope reel 52 and reel driving motor 53 being connected, target door is equipped with steel wire rope 54, one end of steel wire rope
It is fixedly connected with target door, the other end of steel wire rope is wound on steel wire rope reel.When needing replacing or safeguarding rotary target, volume
The rotation of steel wire rope reel is driven around wheel drive motor, releases steel wire rope, target door is rotated around door hinge, is turned by vertical state
Then horizontality is replaced or is safeguarded that, when needing to close target door, reel driving motor rotates backward, drive steel wire
Rope reel, which packs up steel wire rope, can close target door.Since target pipe weight is larger, vertical state is generally used when plated film uses
It places, when needing replacing or safeguarding, is transformed into horizontality, it can be easy to operation.
The multiple film layer continuous coating method that the present embodiment is realized by above equipment, includes the following steps：
(1) surface treatment chamber is vacuumized, when vacuum degree reaches 10Pa~10-1After Pa, workpiece and substrate frame are by work
Part reciprocating device is sent into surface treatment interior and is surface-treated, under the drive of workpiece reciprocating device, substrate frame
It drives workpiece to be moved back and forth in indoor 55 side of ion source of surface treatment, realizes multiple roughing in surface and cleaning treatment；
(2) multiple film layer coating chamber is vacuumized, when vacuum degree reaches 10-2Pa—10-3After Pa, workpiece and substrate frame
It is sent into multiple film layer coating chamber by workpiece reciprocating device and carries out plated film operation, under the drive of workpiece reciprocating device,
Substrate frame drives in workpiece multiple film layer coating chamber and moves back and forth, and realizes multiple film layer plated film；
(3) after the thicknesses of layers on workpiece reaches setting value, workpiece and substrate frame are sent into slice vacuum chamber, then to
It is put into air in slice vacuum chamber, is sent out after vacuum pressure and atmospheric equilibrium, then by workpiece.
Its specific operation process is：
(1) the first vacuum lock positioned at surface treatment chamber side is opened, the substrate frame equipped with workpiece is sent into ion processing
Room；
(2) the first vacuum lock is closed, surface treatment chamber is vacuumized by the first pumped vacuum systems, when vacuum degree reaches
To 10~10-1When Pa, open the indoor ion source of surface treatment, and start workpiece reciprocating device, ion source to workpiece into
Row ion processing；Ion source and workpiece reciprocating device are closed after the completion；
(3) the second vacuum lock between surface treatment chamber and multiple film layer coating chamber, the work that ion processing is crossed are opened
Part and substrate frame are sent into multiple film layer coating chamber；
(5) the second vacuum lock is closed, multiple film layer coating chamber is vacuumized by the second pumped vacuum systems, works as vacuum degree
Reach 10-2Pa~10-3When Pa, it is filled with working gas into multiple film layer coating chamber, starts rotary target and workpiece moves back and forth machine
Structure, workpiece and substrate frame move back and forth before rotary target, carry out multiple plated film；After film layer reaches the thickness of setting, close
Close rotary target and workpiece reciprocating device；
(6) different film layer plated films are if desired carried out, then start new rotary target or flat target, and start workpiece reciprocating movement
Mechanism carries out the plated film operation of next film layer；If without carrying out different film layer plated films, it is directly entered step (7)；
(7) the third vacuum lock between multiple film layer coating chamber and slice vacuum chamber is opened, the work of plated film will be completed
Part and substrate frame are sent into slice vacuum chamber；
(8) third vacuum lock is closed, is delayed the several seconds, is then put into air into slice vacuum chamber, until slice vacuum chamber
Interior pressure and atmospheric equilibrium opens the 4th vacuum lock positioned at slice vacuum chamber side, and workpiece and substrate frame are sent out；
(9) the 4th vacuum lock is closed, slice vacuum chamber is vacuumized by third pumped vacuum systems, so far completes one
Secondary plated film cycle.
As described above, the present invention can be better realized, above-described embodiment is only presently preferred embodiments of the present invention, is not used
To limit the practical range of the present invention；It is i.e. all according to equivalent changes and modifications made by the content of present invention, all wanted for right of the present invention
Range claimed is asked to be covered.
Claims (10)
1. multiple film layer continuous coating device, which is characterized in that including sequentially connected surface treatment chamber, multiple film layer coating chamber and go out
Piece vacuum chamber is equipped with workpiece reciprocating device in surface treatment chamber, multiple film layer coating chamber and slice vacuum chamber；Workpiece is reciprocal
Mobile mechanism is set to the lower section of substrate frame, and the top of substrate frame is equipped with magnetic steering mechanism, and workpiece reciprocating device includes actively
Driving support roller and driven bogie wheel, active drive support roller and driven bogie wheel are respectively arranged in the indoor mounting bracket of vacuum, phase
Multiple driven bogie wheels, under the drive of active drive support roller, substrate frame edge are distributed between two adjacent active drive support rollers
Driven bogie wheel and magnetic steering mechanism move back and forth.
2. multiple film layer continuous coating device according to claim 1, which is characterized in that the lower part of the substrate frame is equipped with branch
Square steel is supportted, support square steel is equipped with guide groove towards the side of workpiece reciprocating device, rack and compression bullet are equipped in guide groove
Spring, the active drive support roller in workpiece reciprocating device are equipped with gear, and the bottom surface of rack is matched with gear, the top of rack
Face is connected by compressed spring with support square steel；The side of square steel is supported to be equipped with slot hole, the side of rack is equipped with positioning pin, positioning
Pin is active in slot hole.
3. multiple film layer continuous coating device according to claim 2, which is characterized in that the workpiece reciprocating device
In, active drive support roller includes power input shaft, power input seat, the first roller shaft, the first front wheel and the first rear roller, is moved
Power inputs seat and is set in mounting bracket, and power input shaft is set in power input seat, one end of power input shaft and the first idler wheel
Axis connection, the first front wheel and the first rear roller are installed on by bearing on the first roller shaft respectively, the first front wheel and first
Gear is also equipped between rear roller, the first front wheel, gear and the first rear roller are coaxially installed on the first roller shaft.
4. multiple film layer continuous coating device according to claim 2, which is characterized in that the workpiece reciprocating device
In, driven bogie wheel includes the second roller shaft, the second front wheel and the second rear roller, and one end of the second roller shaft is set to installation branch
On frame, the second front wheel and the second rear roller are installed on by bearing on the second roller shaft respectively, after the second front wheel and second
Between idler wheel formed for rack by groove.
5. multiple film layer continuous coating device according to claim 1, which is characterized in that the surface treatment chamber, multiple film layer
In coating chamber and slice vacuum chamber, when workpiece reciprocating device is equipped with multiple active drive wheels in same vacuum chamber, wherein
One active drive wheel is equipped with driving motor, is connected by power transmission chain and drive sprocket between each active drive wheel
It connects.
6. multiple film layer continuous coating device according to claim 1, which is characterized in that the magnetic steering mechanism includes magnet
Fixed frame, preceding magnet, rear magnet and center magnet, magnet fixed frame are set in mounting bracket, and magnet fixed frame is in Open Side Down
U-shaped shape, the side of substrate frame stretches into from the opening of magnet fixed frame in magnet fixed frame, magnet fixed frame opening it is upper
Lower both sides are respectively equipped with preceding magnet and rear magnet, and the top of substrate frame is equipped with center magnet, preceding magnet, center magnet and rear magnet
It is arranged in parallel successively, in adjacent two magnet, adjacent two is pendant polar identical.
7. multiple film layer continuous coating device according to claim 1, which is characterized in that be equipped in the multiple film layer coating chamber
Multigroup rotary target, every group of rotary target include two target pipes being set up in parallel, and each target pipe structure is identical, and water proof set is equipped in target pipe,
Form cooling duct between the outer wall and the inner wall of target pipe of water proof set, the center of target pipe is equipped with water inlet pipe, one end of water inlet pipe with
Cooling duct is connected to；Water proof set carries the tubular structure of scalloped recess in outer wall, and scalloped recess is located at the side of water proof set, and fans
Connected in star is connected to form one with cooling duct, and sputtering component is equipped in scalloped recess.
8. multiple film layer continuous coating device according to claim 7, which is characterized in that the angle of the scalloped recess is more than
90°；A diameter of 250~380mm of target pipe；The distance between target tube outer surface and workpiece in substrate frame are more than 200mm.
9. multiple film layer continuous coating device according to claim 7, which is characterized in that the side of the rotary target is equipped with target
Door, rotary target are installed on target door；The lower section of target door is equipped with door hinge, and passes through the outer of door hinge and multiple film layer coating chamber bottom
Wall connects；The outer wall on multiple film layer coating chamber top is equipped with the steel wire rope reel being connected and reel driving motor, target door
Top be equipped with steel wire rope, one end of steel wire rope is fixedly connected with target door, and the other end of steel wire rope is wound in steel wire rope reel
On.
10. the multiple film layer continuous coating method realized according to any one of claim 1~9 equipment, which is characterized in that including
Following steps：
(1) surface treatment chamber is vacuumized, when vacuum degree reaches 10Pa~10-1After Pa, workpiece and substrate frame from workpiece toward
Multiple mobile mechanism is sent into surface treatment interior and is surface-treated, and under the drive of workpiece reciprocating device, substrate frame drives
Workpiece is moved back and forth in the indoor ion source side of surface treatment, realizes multiple roughing in surface and cleaning treatment；
(2) multiple film layer coating chamber is vacuumized, when vacuum degree reaches 10-2Pa—10-3After Pa, workpiece and substrate frame are by workpiece
Reciprocating device, which is sent into multiple film layer coating chamber, carries out plated film operation, under the drive of workpiece reciprocating device, substrate frame
It drives in workpiece multiple film layer coating chamber and moves back and forth, realize multiple film layer plated film；
(3) after the thicknesses of layers on workpiece reaches setting value, workpiece and substrate frame are sent into slice vacuum chamber, then to slice
It is put into air in vacuum chamber, is sent out after vacuum pressure and atmospheric equilibrium, then by workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810696329.4A CN108517504A (en) | 2018-06-29 | 2018-06-29 | Multiple film layer continuous coating device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810696329.4A CN108517504A (en) | 2018-06-29 | 2018-06-29 | Multiple film layer continuous coating device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108517504A true CN108517504A (en) | 2018-09-11 |
Family
ID=63427952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810696329.4A Withdrawn CN108517504A (en) | 2018-06-29 | 2018-06-29 | Multiple film layer continuous coating device and method |
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| Country | Link |
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| CN (1) | CN108517504A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114427082A (en) * | 2021-12-28 | 2022-05-03 | 凯盛信息显示材料(黄山)有限公司 | Continuous coating equipment substrate frame |
| WO2023178950A1 (en) * | 2022-03-25 | 2023-09-28 | 厦门韫茂科技有限公司 | Material moving structure of continuous ald coating device |
-
2018
- 2018-06-29 CN CN201810696329.4A patent/CN108517504A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114427082A (en) * | 2021-12-28 | 2022-05-03 | 凯盛信息显示材料(黄山)有限公司 | Continuous coating equipment substrate frame |
| CN114427082B (en) * | 2021-12-28 | 2023-07-25 | 凯盛信息显示材料(洛阳)有限公司 | Continuous type coating equipment substrate frame |
| WO2023178950A1 (en) * | 2022-03-25 | 2023-09-28 | 厦门韫茂科技有限公司 | Material moving structure of continuous ald coating device |
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Application publication date: 20180911 |
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