CN108516838A - Method for sintering aluminum nitride ceramic substrate in graphite furnace - Google Patents
Method for sintering aluminum nitride ceramic substrate in graphite furnace Download PDFInfo
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- CN108516838A CN108516838A CN201810381216.5A CN201810381216A CN108516838A CN 108516838 A CN108516838 A CN 108516838A CN 201810381216 A CN201810381216 A CN 201810381216A CN 108516838 A CN108516838 A CN 108516838A
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- aluminum nitride
- ceramic substrate
- graphite furnace
- nitride ceramic
- sintering
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- 239000000919 ceramic Substances 0.000 title claims abstract description 51
- 239000000758 substrate Substances 0.000 title claims abstract description 45
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 37
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims abstract description 37
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 37
- 239000010439 graphite Substances 0.000 title claims abstract description 37
- 238000000034 method Methods 0.000 title claims abstract description 33
- 238000005245 sintering Methods 0.000 title claims abstract description 29
- 239000000843 powder Substances 0.000 claims abstract description 15
- 235000015895 biscuits Nutrition 0.000 claims abstract description 10
- 230000032683 aging Effects 0.000 claims abstract description 7
- 229910052582 BN Inorganic materials 0.000 claims abstract description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000007599 discharging Methods 0.000 claims abstract description 4
- 239000003292 glue Substances 0.000 claims abstract description 4
- 238000003475 lamination Methods 0.000 claims description 10
- 229910017083 AlN Inorganic materials 0.000 claims description 8
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 3
- 238000005488 sandblasting Methods 0.000 claims description 3
- 238000002791 soaking Methods 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 239000004411 aluminium Substances 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 238000005266 casting Methods 0.000 claims description 2
- 238000002955 isolation Methods 0.000 abstract description 2
- 238000003825 pressing Methods 0.000 abstract 2
- 238000010030 laminating Methods 0.000 abstract 1
- 238000004080 punching Methods 0.000 abstract 1
- 239000002994 raw material Substances 0.000 abstract 1
- 230000007547 defect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
Abstract
The invention discloses a method for sintering an aluminum nitride ceramic substrate in a graphite furnace, which comprises the following steps: preparing the aluminum nitride ceramic green body into a ceramic green sheet; punching the blank into a blank specification to be sintered by using a die; stacking the punched green bodies for pressing and ageing; performing glue discharging; spreading isolation powder on each piece of the biscuit after the rubber is removed, and sintering and laminating; pressing a boron nitride weight plate on the biscuit, and then putting the biscuit into a graphite furnace for sintering; and removing the isolating powder after sintering. The invention has the advantages that: sintering the aluminum nitride substrate in the graphite furnace can not only ensure the flatness of the ceramic substrate, but also ensure the roughness of the surface of a product; meanwhile, the cost of electric power resources, human resources and raw materials is saved.
Description
Technical field
The present invention relates to a kind of methods of graphite furnace sintered aluminum nitride ceramic substrate.
Background technology
Aluminum nitride ceramic substrate, be sintered thin slice 0.15-0.50mm ceramic substrate when, product edge be easy to generate wave
Phenomena such as unrestrained side, out-of-flatness, unqualified warpage, cause client in use, because of the electronics after product out-of-flatness, metallization
Generation metal thickness is inconsistent when slurry prints, causes product performance unstable.
General technology needs to ensure the flatness of substrate to meet requirement by correcting or grinding.Using amendment work
Skill ensures the flatness of substrate, that is, carries out double sintering, although second of sintering temperature is relatively low, double sintering can cause
Make aluminium nitride substrate grain growth, crystal grain is caused to be grown up, reduces the bending strength of product.Secondly, double sintering can cause to set
Standby utilization rate declines, and manpower, energy cost rise, and original cost is made to become higher with regard to higher aluminum nitride ceramic substrate cost,
It is unfavorable for the large-scale production and marketing of product.
Present most of factories ensure the flatness of substrate using grinding technics, this needs that sinter is made to reserve centainly
Grind, therefore increase production and the material cost of product.And current grinding technique and not perfect, especially when
When aluminum-nitride-based board size is larger or substrate thickness is relatively thin, it is easy to generate cracking in process of lapping, secretly split and the matter such as defect
Defect is measured, the ratio of these defects is up to 20~25%.
It is sintered using metal furnaces in existing technology, hydrogen is filled with when needing to re-sinter, not only dangerous but also waste of resource.
Invention content
The purpose of the present invention is to solve disadvantages existing in the prior art, and a kind of graphite furnace sintering nitridation proposed
The method of aluminium ceramic substrate.
A kind of method of graphite furnace sintered aluminum nitride ceramic substrate, includes the following steps：
（1）Ceramic green sheet is made in aluminium nitride ceramics green compact；
（2）It is punched into the green compact specification for needing to be sintered with mold；
（3）It is aging that the green compact being punched stack progress ballast；
（4）Carry out dumping；
（5）The good biscuit of dumping applies insulating powder, sintering lamination per on piece；
（6）Boron nitride jointing plate is pressed on biscuit, then is put into graphite furnace and is sintered with crucible；
（7）Removal insulating powder obtains product after the completion of sintering.
Further,（3）The green compact being punched are stacked into 50-200 pieces, in 15-30 DEG C of temperature, relative humidity 60 ± 10%
It is 20-48 hours aging that ballast is carried out in stable environment.
Further,（4）With box draft glue discharging furnace carry out dumping, 400-600 DEG C of dump temperature, 20-48 hours dumping time,
Dumping lamination 2-10 pieces.
Further,（4）Dumping, 400-600 DEG C of dump temperature, 20-48 hours dumping time, dumping are carried out with tunnel oven
Lamination 2-10 pieces.
Further,（7）Sintering time 24-60 hours, 1700-1880 DEG C of sintering temperature, soaking time 4-20 hours.
Further,（8）After the completion of sintering insulating powder is removed with vibrations hand mill.
Further,（8）After the completion of sintering insulating powder is removed with sandblasting mode.
Further,（9）Warpage is examined with the inconsistent glass plate of two pieces of equivalent widths, length of thickness 12mm, centre
It is put into clearance gauge and crosses warpage, product angularity long side≤3 ‰.
Further,（10）After having inspected, obtain corresponding aluminum nitride ceramic substrate.
Further,（1）Aluminium nitride ceramics green compact are cast into ceramic green sheet using special cermacis casting machine through scraper.
Compared with prior art, technical solution of the present invention has the beneficial effect that：Graphite furnace sintered aluminum nitride substrate can either
Ensure the flatness of ceramic substrate and can guarantee the roughness of product surface；Save electric power resource, human resources, former material simultaneously
The cost of material；The cost that safety and sintering are sintered using graphite furnace is low, and yield rate is high.
Specific implementation mode
The present invention is made further to explain with reference to specific embodiment.
A kind of method of graphite furnace sintered aluminum nitride ceramic substrate proposed by the present invention of embodiment 1, includes the following steps：
（1）Ceramic green sheet is made in aluminium nitride ceramics green compact；
（2）It is punched into the green compact specification for needing to be sintered with mold；
（3）It is aging that the green compact being punched stack progress ballast；
（4）Carry out dumping；
（5）The good biscuit of dumping applies insulating powder, sintering lamination 5-20 pieces per on piece；
（6）Boron nitride jointing plate is pressed on biscuit, then is put into graphite furnace and is sintered with crucible；
（7）Removal insulating powder obtains product after the completion of sintering.
A kind of method of graphite furnace sintered aluminum nitride ceramic substrate,（3）The green compact being punched are stacked into 50-200 pieces, in temperature
It is 20-48 hours aging that ballast is carried out in the environment that 15-30 DEG C of degree, relative humidity 60 ± 10% are stablized.
A kind of method of graphite furnace sintered aluminum nitride ceramic substrate,（4）Dumping, dump temperature are carried out with box draft glue discharging furnace
400-600 DEG C, 20-48 hours dumping time, dumping lamination 2-10 pieces.
A kind of method of graphite furnace sintered aluminum nitride ceramic substrate,（4）Dumping, dump temperature 400- are carried out with tunnel oven
600 DEG C, 20-48 hours dumping time, dumping lamination 2-10 pieces.
A kind of method of graphite furnace sintered aluminum nitride ceramic substrate,（7）Sintering time 24-60 hours, sintering temperature 1700-
1880 DEG C, soaking time 4-20 hours.
A kind of method of graphite furnace sintered aluminum nitride ceramic substrate,（8）With vibrations hand mill removal isolation after the completion of sintering
Powder.
A kind of method of graphite furnace sintered aluminum nitride ceramic substrate,（8）After the completion of sintering insulating powder is removed with sandblasting mode.
A kind of method of graphite furnace sintered aluminum nitride ceramic substrate,（9）Warpage examines two pieces of width one with thickness 12mm
The inconsistent glass plate of cause, length, centre are put into clearance gauge and cross warpage, product angularity long side≤3 ‰.
A kind of method of graphite furnace sintered aluminum nitride ceramic substrate,（10）After having inspected, obtain corresponding aluminium nitride pottery
Porcelain substrate.
A kind of method of graphite furnace sintered aluminum nitride ceramic substrate,（2）According to aluminium nitride green compact shrinking percentage, it is punched with mold
The green compact specification being sintered at needs.
A kind of method of graphite furnace sintered aluminum nitride ceramic substrate,（5）The good biscuit of dumping applies insulating powder, sintering per on piece
Lamination 5-20 pieces.
A kind of method of graphite furnace sintered aluminum nitride ceramic substrate,（1）Aluminium nitride ceramics green compact are cast using special cermacis
Machine is cast into ceramic green sheet through scraper.
A kind of method of graphite furnace sintered aluminum nitride ceramic substrate, product edge is smooth, angularity is low, in use
Generation metal thickness is consistent, product performance is stablized.
A kind of method of graphite furnace sintered aluminum nitride ceramic substrate, ensure that product roughness.
The angularity measurement that 10 flake products are randomly selected in the product processed is as follows：
The roughness concentration that 10 flake products are randomly selected in the product processed is as follows：
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto, and it is any
Those familiar with the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its invents
Design is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.
Claims (10)
1. a kind of method of graphite furnace sintered aluminum nitride ceramic substrate, it is characterised in that：Include the following steps：
（1）Ceramic green sheet is made in aluminium nitride ceramics green compact；
（2）It is punched into the green compact specification for needing to be sintered with mold；
（3）It is aging that the green compact being punched stack progress ballast；
（4）Carry out dumping；
（5）The good biscuit of dumping applies insulating powder, sintering lamination per on piece；
（6）Boron nitride jointing plate is pressed on biscuit, then is put into graphite furnace and is sintered with crucible；
（7）Removal insulating powder obtains product after the completion of sintering.
2. the method for graphite furnace sintered aluminum nitride ceramic substrate according to claim 1, it is characterised in that：（3）It is punched
Green compact be stacked into 50-200 pieces, carry out ballast aging 20- in the environment that 15-30 DEG C of temperature, relative humidity 60 ± 10% are stablized
48 hours.
3. the method for graphite furnace sintered aluminum nitride ceramic substrate according to claim 1, it is characterised in that：（4）With box
Draft glue discharging furnace carries out dumping, 400-600 DEG C of dump temperature, 20-48 hours dumping time, dumping lamination 2-10 pieces.
4. the method for graphite furnace sintered aluminum nitride ceramic substrate according to claim 1, it is characterised in that：（4）Use tunnel
Kiln carries out dumping, 400-600 DEG C of dump temperature, 20-48 hours dumping time, dumping lamination 2-10 pieces.
5. the method for graphite furnace sintered aluminum nitride ceramic substrate according to claim 1, it is characterised in that：（7）When sintering
Between 24-60 hours, 1700-1880 DEG C of sintering temperature, soaking time 4-20 hours.
6. the method for graphite furnace sintered aluminum nitride ceramic substrate according to claim 1, it is characterised in that：（8）It has been sintered
Cheng Houyong shakes hand mill and removes insulating powder.
7. the method for graphite furnace sintered aluminum nitride ceramic substrate according to claim 1, it is characterised in that：（8）It has been sintered
Cheng Houyong sandblasting modes remove insulating powder.
8. the method for graphite furnace sintered aluminum nitride ceramic substrate according to claim 1, it is characterised in that：（9）Warpage is examined
It tests and is put into clearance gauge with the inconsistent glass plate of two pieces of equivalent widths, length of thickness 12mm, centre to cross warpage, product angularity long
Side≤3 ‰.
9. the method for graphite furnace sintered aluminum nitride ceramic substrate according to claim 1, it is characterised in that：（10）It has inspected
Cheng Hou, corresponding aluminum nitride ceramic substrate is obtained.
10. the method for graphite furnace sintered aluminum nitride ceramic substrate according to claim 1, it is characterised in that：（1）Nitridation
Aluminium ceramic green is cast into ceramic green sheet using special cermacis casting machine through scraper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810381216.5A CN108516838A (en) | 2018-04-25 | 2018-04-25 | Method for sintering aluminum nitride ceramic substrate in graphite furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810381216.5A CN108516838A (en) | 2018-04-25 | 2018-04-25 | Method for sintering aluminum nitride ceramic substrate in graphite furnace |
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| Publication Number | Publication Date |
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| CN108516838A true CN108516838A (en) | 2018-09-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810381216.5A Pending CN108516838A (en) | 2018-04-25 | 2018-04-25 | Method for sintering aluminum nitride ceramic substrate in graphite furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109678530A (en) * | 2019-01-24 | 2019-04-26 | 中国电子科技集团公司第四十三研究所 | A kind of insulating powder and preparation method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101570437A (en) * | 2009-04-30 | 2009-11-04 | 潮州三环（集团）股份有限公司 | Method for continuous low temperature sintering of high thermal coefficient AIN ceramics and product thereof |
| CN103121848A (en) * | 2013-02-25 | 2013-05-29 | 潮州三环（集团）股份有限公司 | Aluminum nitride ceramic substrate sintering technology |
| CN106631037A (en) * | 2016-12-14 | 2017-05-10 | 潮州三环（集团）股份有限公司 | Binder removal method of aluminum nitride green body and preparation method of aluminum nitride ceramic substrate |
-
2018
- 2018-04-25 CN CN201810381216.5A patent/CN108516838A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101570437A (en) * | 2009-04-30 | 2009-11-04 | 潮州三环（集团）股份有限公司 | Method for continuous low temperature sintering of high thermal coefficient AIN ceramics and product thereof |
| CN103121848A (en) * | 2013-02-25 | 2013-05-29 | 潮州三环（集团）股份有限公司 | Aluminum nitride ceramic substrate sintering technology |
| CN106631037A (en) * | 2016-12-14 | 2017-05-10 | 潮州三环（集团）股份有限公司 | Binder removal method of aluminum nitride green body and preparation method of aluminum nitride ceramic substrate |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109678530A (en) * | 2019-01-24 | 2019-04-26 | 中国电子科技集团公司第四十三研究所 | A kind of insulating powder and preparation method thereof |
| CN109678530B (en) * | 2019-01-24 | 2021-07-23 | 中国电子科技集团公司第四十三研究所 | Isolation powder and preparation method thereof |
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Application publication date: 20180911 |