CN108512488A - 射频收发机中长条型热电与pn结纳米光电集成发电机 - Google Patents
射频收发机中长条型热电与pn结纳米光电集成发电机 Download PDFInfo
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Abstract
本发明的射频收发机中长条型热电与PN结纳米光电集成发电机,衬底为N型硅片,制作有绒面、氧化铝膜、光电P型掺杂区、光电N型掺杂区、SiO2隔离层和光电电极,其中光电电极如图2所示进行连接,然后制备了第一氮化硅隔离层,用于隔离热电光电。热电式发电机的主要单元为热电堆,热电堆是由一系列的P型多晶硅纳米线簇和N型多晶硅纳米线簇构成的,溅射一层金属Ti/Au层作为热电堆电极,串联得到热电堆结构。本发电机实现了对太阳光能和射频收发组件工作时产生的热能的转化,热电光电集成能量收集,实现了跨能域的能量转换,采用的硅纳米的热导率远低于传统体材料,可以一边维持电子运输,一边抑制热量输送,从而提高了热电发电效率。
Description
技术领域
本发明提出了一种射频收发机中长条型热电与PN结纳米光电集成发电机,属于微电子机械系统(MEMS)的技术领域。
背景技术
随着物联网的发展,短距离无线通信技术的应用越来越广,其中,无线传感网络WSN作为感知外界的末梢神经网络,在军事、物流管理等领域有着巨大的应用需求,也成为了无线通信领域的焦点。射频收发机是实现传感节点间以及节点和终端设备之间无线通信的主要模块,该模块消耗无线传感网的绝大部分功耗,与此同时,射频收发机也存在大量的能源浪费。
采用长条型热电与PN结纳米光电集成发电机,采用的硅纳米的热导率远低于传统体材料,可以实现一边维持电子运输,一边抑制热量输送,从而极大的提高了热电发电效率,在热电发电实用化上具有重要意义。可以对射频收发机工作时产生的大量浪费的热能进行回收,然后通过DC-DC升压稳压电路存贮到电池中,再提供给无线传感网系统中的低功耗模块。此外,太阳能电池能够解决能源衰竭和环境污染问题,光电部分将太阳能直接转化为电,作为热电能量收集的补充。
发明内容
技术问题:本发明的目的是提供一种射频收发机中长条型热电与PN结纳米光电集成发电机,光电池部分采用PN结纳米结构,热电能量收集则采用长条型,同时集成热电光电可对环境中的热能和光能进行多能源利用,在复杂野外环境下,两种收集方式也可以互为补充,协同供电。
技术方案:为解决上述技术问题,本发明提出了一种射频收发机中长条型热电与PN结纳米光电集成发电机。该结构主要包括光电池部分和热电能量收集部分,两者制备于同一衬底之上,实现了光电-热电的单片集成。选择4寸的N型硅片作为衬底,其厚度为350μm,晶向为<100>,电阻率为10Ω/□,少子寿命大于500us。采用一种添加剂制绒优化工艺,得到绒面。接着,利用ADL(原子层沉积法是一种镀膜工艺)备制氧化铝膜,清洗除杂。采用纳米改性工艺进行表面微区修饰清洗,去除硅片表面的微缺陷和有害杂质。制备多孔阳极氧化铝模板,将多孔阳极氧化铝模板转移到硅衬底得到样片,对样片进行掺杂,得到太阳能光电器件纳米阵列结构的P型掺杂区和N型掺杂区,去除多孔阳极氧化铝模板,通过PECVD法在样片上淀积一层SiO2隔离层。开孔,利用PECVD在样片上电极一层金作为电极和汇流条,电极金属连接如图2所示,利用PECVD在样片上淀积一层第一氮化硅隔离层作为电隔离。然后,采用LPCVD工艺生长一层厚度为2um的多晶硅,进行N型磷离子掺杂和P型硼离子掺杂,形成热电堆的N型臂和P型臂,并刻蚀成型,得到热电堆的P型臂和热电堆的N型臂,深紫外光刻得到多晶硅纳米线。再溅射一层厚度为0.15μm的Ti/Au层,干法刻蚀成型,形成热电堆的电极,热电堆电极连接如图3所示。采用PECVD工艺生长一层厚度为0.1μm Si3N4层,作为第二氮化硅隔离层,最后电镀一层厚度为2μm的Al金属层,作为器件的散热板。
本发电机用于射频收发组件中,光电池部分,其受光面朝外,用于接受环境中的不同方向的光线,由于采用背面结结构,消除了正面电极遮光,提升了光电效率。热电部分,由于射频收发组件热耗损严重,故将一端贴在其上方,对射频收发组件工作时产生的大量热能进行收集,实现可持续的绿色能源。光电和热电能量收集之后,通过DC-DC升压稳压电路后,存贮在电池中,可为无线传感网中的低功耗模块供电。
有益效果:本发明相对于现有的发电机具有以下优点:
1.本发明的微纳发电机工艺上采用成熟的CMOS工艺和MEMS工艺制造,其原理、结构简单,可批量制造,能够和微电子电路实现单片集成;
2.本发明的微纳发电机采用硅纳米,其热导率远低于传统体材料,可以实现一边维持电子运输,一边抑制热量输送,从而极大的提高了热电发电效率,在热电发电实用化上具有重要意义;
3.本发明的微纳发电机实现了热电-光电两种能量收集方式的单片集成,在复杂周围环境下,两种收集方式可相互补充,协同供电;
4.光电池部分采用背面结结构以及异质结,相对传统光电池结构,消除了正面电极遮光,同时减少了载流子复合和光线反射,大大提高了光电效率;
5.热电式发电机部分采用平面加工工艺,制备成功后垂直使用,同时兼顾光电的受光和热电的温差实现;
6.光电池与热电式发电机部分都没有可动部件,可靠性高,使用寿命长,无需维护。
附图说明
图1为本发明射频收发机中长条型热电与PN结纳米光电集成发电机剖面图;
图2为本发明射频收发机中长条型热电与PN结纳米光电集成发电机光电结构俯视图;
图3为本发明射频收发机中长条型热电与PN结纳米光电集成发电机热电结构俯视图;
图中包括:N型硅衬底1,绒面2,氧化铝膜3,光电P型掺杂区4,光电N型掺杂区5,SiO2隔离层6,光电电极7,第一氮化硅隔离层8,热电堆的P型臂9,热电堆的N型臂10,热电堆的电极11,第二氮化硅隔离层12,散热板13。
具体实施方式
下面结合附图对本发明的具体实施方式做进一步说明。
参见图1-3,本发明提出了一种射频收发机中长条型热电与PN结纳米光电集成发电机。该结构主要包括光电池部分和热电能量收集部分,两者制备于同一衬底之上,实现了光电-热电的单片集成。
选择4寸的N型硅片作为衬底1,其厚度为350μm,晶向为<100>,电阻率为10Ω/□,少子寿命大于500us。采用一种添加剂制绒优化工艺,制绒液中HF/HNO3的体积比为1:2~1:6(例,1:3,1:4),分散剂小于0.1%(例,0.09%、0.05%,0.01%)腐蚀温度为6~25℃(例6℃、15℃、25℃),硅片单面减薄量约4~5um,得到绒面2。接着,利用ADL(原子层沉积法是一种镀膜工艺)备制氧化铝膜3,清洗除杂。采用纳米改性工艺进行表面微区修饰清洗,去除硅片表面的微缺陷和有害杂质。制备多孔阳极氧化铝模板,将多孔阳极氧化铝模板转移到硅衬底得到样片,对样片进行掺杂,得到太阳能光电器件纳米阵列结构的P型掺杂区4和N型掺杂区5,去除多孔阳极氧化铝模板,通过PECVD法在样片上淀积一层SiO2隔离层6。开孔,利用PECVD在样片上电极一层金作为电极7和汇流条,电极金属连接如图2所示,利用PECVD在样片上淀积一层第一氮化硅隔离层8作为电隔离。然后,采用LPCVD工艺生长一层厚度为2um的多晶硅,进行N型磷离子掺杂和P型硼离子掺杂,形成热电堆的N型臂和P型臂,并刻蚀成型,得到热电堆的P型臂9和热电堆的N型臂10,深紫外光刻得到多晶硅纳米线。再溅射一层厚度为0.15μm的Ti/Au层,干法刻蚀成型,形成热电堆的电极11,热电堆电极连接如图3所示。采用PECVD工艺生长一层厚度为0.1μm Si3N4层,作为第二氮化硅隔离层12,最后电镀一层厚度为2μm的Al金属层,作为器件的散热板13。
本发明的射频收发机中长条型热电与PN结纳米光电集成发电机的制备方法如下:
1)选择4寸的N型硅片作为衬底1,其厚度为350μm,晶向为<100>,电阻率为10Ω/□,少子寿命大于500us;
2)制绒。采用一种添加剂制绒优化工艺,制绒液中HF/HNO3的体积比为1:2~1:6(例,1:3,1:4),分散剂小于0.1%(例,0.09%、0.05%,0.01%)腐蚀温度为6~25℃(例6℃、15℃、25℃),硅片单面减薄量约4~5um,得到绒面2;
3)利用ADL(原子层沉积法是一种镀膜工艺)备制氧化铝膜3;
4)清洗除杂。采用纳米改性工艺进行表面微区修饰清洗,纳米改性工艺是以含有有机碱和浸润剂的碱性水溶液处理扩散后的硅片,去除硅片表面的微缺陷和有害杂质有机碱为烷基铵类,有机碱在水溶液中的重量百分含量为0.1~10%(例0.1%,5%,10%);浸润剂在水溶液中的重量百分含量小于0.1%(例0.09%、0.05%,0.01%);
5)制备多孔阳极氧化铝模板。多孔阳极氧化铝模板通过在支撑层上利用两步阳极氧化电化学法获得,用于下步工艺,用于光电太阳能纳米阵列结构的掺杂;
6)P型掺杂。将多孔阳极氧化铝模板转移到硅衬底得到样片,对样片进行P型掺杂物(如,硼)掺杂,得到太阳能光电器件纳米阵列结构的P型掺杂区4;
7)N型掺杂。将多孔阳极氧化铝模板转移到硅衬底得到样片,对样片进行N型掺杂物(如,磷)掺杂,得到太阳能光电器件纳米阵列结构的N型掺杂区5;
8)SiO2淀积。去除多孔阳极氧化铝模板,通过PECVD法在样片上淀积一层SiO2隔离层6;
9)开孔,电极制备。利用PECVD在样片上电极一层金作为电极7和汇流条,电极金属连接如图2所示;
10)Si3N4隔离层制备。利用PECVD在样片上淀积一层第一氮化硅隔离层8作为电隔离;
11)采用LPCVD工艺生长一层厚度为2um的多晶硅,进行N型磷离子掺杂和P型硼离子掺杂,形成热电堆的N型臂和P型臂,并刻蚀成型,得到热电堆的P型臂9和热电堆的N型臂10,采用LPCVD工艺生长一层SiO2,DUV(深紫外)光刻成型,形成多晶硅纳米线结构;
12)溅射一层厚度为0.15μm的Ti/Au层,干法刻蚀成型,形成热电堆的电极11;
13)采用PECVD工艺生长一层厚度为0.1μm Si3N4层,作为第二氮化硅隔离层12;
14)电镀一层厚度为2μm的Al金属层,作为器件的散热板13;
区分是否为该结构的标准如下:
本发明的射频收发机中长条型热电与PN结纳米光电集成发电机,衬底为N型硅片1,绒面2,氧化铝膜3,光电P型掺杂区4,光电N型掺杂区5,SiO2隔离层6,光电电极7,光电电极如图2所示进行连接,然后制备了第一氮化硅隔离层8,用于隔离热电光电。热电式发电机的主要单元为热电堆,热电堆是由一系列的P型多晶硅纳米线簇9和N型多晶硅纳米线簇10构成的,溅射一层金属Ti/Au层作为热电堆电极11,电极连接如图3所示,最后PECVD生长第二氮化硅隔离层12,电镀一层厚度Al金属层作为器件的散热板。采用的硅纳米的热导率远低于传统体材料,可以实现一边维持电子运输,一边抑制热量输送,从而极大的提高了热电发电效率,在热电发电实用化上具有重要意义。
满足以上条件的结构即视为本发明的射频收发机中长条型热电与PN结纳米光电集成发电机。
Claims (2)
1.一种射频收发机中长条型热电与PN结纳米光电集成发电机,其特征是:该微纳发电机由制作于同一N型硅衬底(1)上的光电池和热电发电机两个部分构成,中间隔有第一氮化硅隔离层(8),光电部分制作有绒面(2),氧化铝膜(3),光电P型掺杂区(4),光电N型掺杂区(5),SiO2隔离层(6),光电电极(7);热电发电机部分包括热电堆的P型臂(9)、热电堆的N型臂(10)、热电堆的电极(11),第二氮化硅隔离层(12),散热板(13);背面区域光电P型掺杂区(4)和光电N型掺杂区(5)及其电极(7)相互交错,电极呈叉指形状排列;热电堆的P型臂(9)和热电堆的N型臂(10)中的多晶硅纳米线簇含有的纳米线数量为50-200,多晶硅纳米线由深紫外光刻形成,直径为1-100nm,高度为2-10um;热电堆电极(11)材料为金,金属板(13)材料为铝;采用的纳米硅薄膜的热导率远低于传统体材料,可以实现一边维持电子运输,一边抑制热量输送,从而极大的提高了热电发电效率。
2.根据权利要求1所述的一种射频收发机中长条型热电与PN结纳米光电集成发电机,其特征是:该发电机用于射频收发组件中,光电池部分,其受光面朝外,用于接受环境中的不同方向的光线,由于采用背面结结构,消除了正面电极遮光,提升了光电效率;热电部分,由于射频收发组件热耗损严重,故将一端贴在其上方,对射频收发组件工作时产生的大量热能进行收集,采用的垂直型方柱结构的内阻相对较小,可以得到一定量的可靠的功率输出;光电和热电转换后通过DC-DC升压稳压电路,得到可用的电能,可以为无线传感网中低功耗设备进行供电。
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