CN108489923A - Infrared-gas imaging focal plane based on sensitive member differential signal and imaging method - Google Patents
Infrared-gas imaging focal plane based on sensitive member differential signal and imaging method Download PDFInfo
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- CN108489923A CN108489923A CN201810089425.2A CN201810089425A CN108489923A CN 108489923 A CN108489923 A CN 108489923A CN 201810089425 A CN201810089425 A CN 201810089425A CN 108489923 A CN108489923 A CN 108489923A
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- infrared
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- 238000003384 imaging method Methods 0.000 title claims abstract description 28
- 238000001514 detection method Methods 0.000 claims abstract description 15
- 230000035945 sensitivity Effects 0.000 claims abstract description 11
- 238000013461 design Methods 0.000 claims abstract description 9
- 239000000523 sample Substances 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 10
- 230000003595 spectral effect Effects 0.000 claims description 9
- 230000005457 Black-body radiation Effects 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 238000001228 spectrum Methods 0.000 claims description 2
- 230000005855 radiation Effects 0.000 abstract description 15
- 229920006395 saturated elastomer Polymers 0.000 abstract description 4
- 239000003990 capacitor Substances 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 49
- 229910018503 SF6 Inorganic materials 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000001273 butane Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005247 gettering Methods 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 230000004298 light response Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0014—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation from gases, flames
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J2005/0077—Imaging
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The invention discloses a kind of sensitive member signal differential infrared-gas imaging focal planes and imaging method, focal plane to be made of pixel array chip and readout circuit chip, and wherein each pixel on pixel array chip is combined by two sensitivity member A and B and constituted.The response peak position design of wherein sensitive member B is absorbed in gas to be detected at stronger fingerprint wavelength, and the response peak position of sensitive member A modulates to be staggered the wavelength.A, the signal output end of the sensitive member of B two is connected with difference channel, difference channel as reading circuit input stage a part to reading circuit output difference signal.The concentration and amount of the signal and detected gas in detection light path are proportional, and institute's probe gas can be imaged by exporting the difference signal using reading circuit.Advantages of the present invention：One, the influence of background radiation can directly be eliminated；Two, high with the relevant useful signal ratio of gas imaging；Three, integrating capacitor is not easy to be saturated, and useful signal dynamic range is big；Four, background radiation noise can be eliminated.
Description
Technical field
The present invention relates to a kind of infrared focus planes of detecting technique, in particular to basic pixel to have combination sensitive
Meta structure, the differential signal by combining sensitive member carry out the infrared focus plane of detection of gas and imaging.
Background technology
Most of gas only with visually can't see, wherein being no lack of some hazardous gases, there is many fields in modern industry
Conjunction will come into contacts with these gases, and the technology for detecting these gases has important answer in fields such as chemical industry, mineral products, electric power and environmental protection
With.For example there is an urgent need for can remote probe and positioning sulfur hexafluoride (SF in electric power facility field6) leakage technology and instrument, SF6Gas exists
It is used as dielectric in high-voltage circuitbreaker and switchgear, once leakage occurs will be to electric power facility, environment and people
Member causes damages, therefore finds and position SF in time6Leakage point is of great significance to the steady operation of preserving peace of electric power facility.
The detection of gas technology of early stage carries out detection of gas, this proximity or contact using gas " sniff " sensor
Detection limits its application scenario.The gas imaging technology developed later based on infrared camera because of its remote sensing, in real time
The advantages that the features such as detection and visualization is caused safe efficient, portable, becomes a kind of superior detection of gas technology.This
Smoke can be presented on the image captured by camera to scanning area real time imagery, leaked gas in kind infrared-gas imaging technique
The state of mist, user can intuitively see the gas leakage being invisible to the naked eye originally very much.Its basic principle and our naked eyes
See that the principle of smog is similar：In the presence of having smog, absorption, scattering and spoke of the visible optical radiation because of smog of human eye are reached
It penetrates and changes, so smog is just seen, and infrared thermoviewer is when occurring using detected gas, on imaging focal plane
Infra-red radiation that photosensitive member receives changes and is imaged.
Passive type infrared-gas imaging technique is to utilize an optical filter or spectro-grating at present, to make photosensitive member only receive
The radiation of distinctive infra-red bands, if the wave band is designed at the fingerprint wavelength of detected gas, since gas is in the wave band
With stronger absorption, in the presence of gas, reaching the radiation of photosensitive member can be much less because of the absorption of gas, to enhance
Gas imaging contrast.This method can be used to the leakage of real-time detection gas, such as in the detectable SF of long wave infrared region6(fingerprint
10.6 μm of wavelength), in a series of detectable volatile organic matters of medium-wave infrared wave band such as methane, propane and butane.It is but this
Detection method needs to combine light splitting part with exploring block, necessarily causes detector volume larger, and the technique of realization is also more
It is complicated.In addition, this method cannot eliminate background photo current in integrating circuit, high background lower integral capacitance is easily saturated, so
Detector sensitivity is relatively low, and dynamic detecting range is also smaller, and the application in high background, complex scene is restricted.
Invention content
The purpose of the present invention is to propose to a kind of infrared focus planes being made of basic pixel the sensitive member of combination, provide a kind of new
Infrared-gas imaging method, background photo current cannot be completely eliminated by solving existing gas imaging focal plane, detectivity compared with
The smaller problem of low and effective dynamic detecting range.
The technical scheme is that：Infrared focus plane is made of pixel array chip and readout circuit chip, wherein
Each pixel on pixel array chip is made of two independent sensitive member combinations.Two sensitive member A and B have different light
Response characteristic is composed, wherein sensitivity member B obtains more sharp response peak by means such as structural modulations, and peak position design is waiting for
At the fingerprint wavelength of probe gas, the response peak position of sensitive member A modulates to be staggered 0.1-1 microns of the wavelength.Pass through structure design
It demarcates, two sensitive members is adjusted to the spectral response integrated value of black body radiation equal with the later stage.A, the signal output of the sensitive members of B two
End is connected with difference channel, difference channel as reading circuit input stage a part to reading circuit output difference signal.
Steps are as follows for infrared-gas imaging method based on sensitive member signal differential infrared-gas imaging focal plane：
Each pixel on pixel array chip includes two independent sensitive members.Two sensitivity member A and B pass through structure tune
The means such as system obtain more sharp response peak, and the response peak position design of sensitive member B is in the fingerprint wavelength of gas to be detected
The response peak position at place, sensitive member A modulates to be staggered the wavelength.It is demarcated by structure design and later stage, by two sensitive members to black matrix
The spectral response integrated value of radiation is adjusted to equal.A, the signal output end of the sensitive members of B two is connected with difference channel, and difference channel is made
For reading circuit input stage a part to rear class circuit output differential signal.When detector works two are exported by difference channel
The response difference of sensitive member, the response difference are exactly the signal value of the pixels of two sensitive member compositions, the size of the value with it is detected
Gas detection light path on concentration and measure it is proportional, using reading circuit export the difference signal can to institute's probe gas at
Picture.
It is an advantage of the invention that：
1, the differential signal of the sensitive member of this combination can directly eliminate the influence of background radiation, and signal processing system does not need
Background radiation inhibition is carried out again.
2, the imaging signal of existing gas imaging instrument contains response of the pixel to background radiation, this can cause dense with gas
Spend that relevant useful signal ratio is relatively low, and the sensitivity of detection of gas is relatively low, and the output signal of pixel is combination in the present invention
The differential signal of sensitive member, signal strength is directly proportional to the concentration of gas, and theoretically gained signal is entirely dense with gas
Spend relevant useful signal.
3, for the common focus planar detector being operated under high background, signal photoelectric current is generally less than background photo current,
Integrating capacitor is easily saturated when signal is read, thus the ideal signal-to-noise ratio of more difficult acquisition and larger effective dynamic detecting range,
And the differential signal photoelectric current of the present invention does not include background photo current, integrating capacitor is not easy to be saturated, thus useful signal has very
Big dynamic range, to obtain very high detection of gas sensitivity and larger dynamic detecting range.
4, due to this invention removes the influence of background radiation, gained signal also just without background radiation noise, so
The signal noise of the present invention is solely dependent upon the noise of circuit system, can obtain ideal signal-to-noise ratio.
Description of the drawings
Fig. 1 is the structural schematic diagram of infrared-gas imaging focal plane of the present invention.
Fig. 2 is that the basic pixel in the present invention is intended to.
Fig. 3 is SF6The IR image simulation of gas, wherein SF6A concentration of the 0.1% of gas, length of the air mass in light path are
10cm。
Fig. 4 is the spectral response curve of sensitive first material in case study on implementation of the present invention.
Fig. 5 is spectral response curves of the sensitivity member A and B after structural modulation in case study on implementation of the present invention.
Specific implementation mode
According to the technique and scheme of the present invention, the infrared-gas imaging focal plane based on sensitive member differential signal may be implemented
Closely, in, the detection of gas of far infrared wave imaging.The basic structure of the imaging focal plane of the present invention is as shown shown in Figure 1 and Figure 2.
Illustrate that the image-forming principle and method of the present invention, this example are 10.6 μm for fingerprint wavelength with one specific example below
SF6Gas designs, SF6At 10.6 μm, nearby strong absorption infra-red radiation, its transmission spectrum are as shown in Fig. 3.
The material of sensitive member A, B are GaAs/AlGaAs quantum-well materials in this example, are given birth to using molecular beam epitaxy technique
Long, the Intrinsic Gettering peak position of quantum-well materials designs near 10.6 μm, its spectral response curve is as shown in Fig. 4.Pass through
The quantum-well materials grown is processed into pixel mesa array by microelectronic processing technology, and each pixel includes a pair of sensitive first platform
Face, as shown in Fig. 2.The spectral response characteristic of sensitive member can be modulated by designing different mesa structure, such as metal/absolutely
The Metal cavity structure of mim structure and all-metal the package table top of edge body/metal, this example will be sensitive using mim structure
The response peak position of first A and B is modulated to respectively at 9.6 μm and 10.6 μm, and the spectral response curve of sensitive member A and B is for example attached after modulation
Shown in Fig. 5.The signal output end of sensitive member A and B is connected with difference channel, sensitive to reading circuit output two by difference channel
The differential signal of member.
When there is no SF in the detection light path of sensitive member6When gas, the black matrix response of two sensitive members (is equivalent in attached drawing 5
Integrated value of the response spectra to wavelength) it is equal, i.e., the response difference of two sensitive members is zero.Occur when in the detection light path of sensitive member
SF6When gas, by attached drawing 3 it is found that the infra-red radiation near 10.6 mu m wavebands is because of SF6Gas it is strong absorption and can seldom arrive
Up to sensitivity member, this influence very little to sensitive member A is can be seen that from attached drawing 5, so the response of sensitive member A does not have very greatly
Variation, however the response of sensitive member B can reduce much because the radiation at the wavelength greatly reduces, and detect in light path
SF6Gas concentration is higher, and response just drops more severe, also bigger with the response difference of sensitive member A, utilizes reading circuit
Exporting the difference signal can be to SF6Gas is imaged, and here it is the principle of sensitive member signal differential gas imaging and sides
Method.
Sensitive first material therefor of the invention includes but is not limited only to GaAs/AlGaAs Quantum Well material used by examples detailed above
Material realizes that the means of the different spectral response characteristics of sensitive member are not limited to the mim structure described in example.Above-mentioned embodiment is only
It is the further description to technical scheme of the present invention and principle, the present invention is not imposed any restrictions, it is every according to this
The technical spirit of invention, all any modification, equivalent and improvement etc. done, should be included in the protection domain of patent of the present invention
It is interior.
Claims (2)
1. a kind of sensitive member signal differential infrared-gas imaging focal plane, which is characterized in that
The infrared-gas imaging focal plane includes pixel array chip and readout circuit chip, wherein on pixel array chip
Each pixel combined and constitute by two independent sensitivity member A and sensitivity member B；There is two sensitive member A and B different spectrum to ring
Feature is answered, wherein sensitivity member B obtains sharp response peak by means such as structural modulations, and peak position design is in gas to be detected
Fingerprint wavelength at, the response peak position of sensitive member A modulates to be staggered 0.1-1 microns of the wavelength；It is marked by structure design and later stage
It is fixed, two sensitive members are adjusted to the spectral response integrated value of black body radiation equal；The signal output end of the sensitive members of A and B two with it is poor
Parallel circuit is connected, difference channel as reading circuit input stage a part to reading circuit output difference signal.
2. a kind of infrared-gas imaging side based on sensitive member signal differential infrared-gas imaging focal plane described in claim 1
Method, it is characterised in that method is as follows：
By the response difference of two sensitive member of difference channel output when detector works, which is exactly two sensitive member compositions
Pixel signal value, the concentration and amount of the size of the value and detected gas in detection light path are proportional, utilize reading electric
Road exports the difference signal and can be imaged to institute's probe gas.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810089425.2A CN108489923B (en) | 2018-01-30 | 2018-01-30 | Infrared gas imaging focal plane based on double-sensitive-element differential signal and imaging method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810089425.2A CN108489923B (en) | 2018-01-30 | 2018-01-30 | Infrared gas imaging focal plane based on double-sensitive-element differential signal and imaging method |
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| Publication Number | Publication Date |
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| CN108489923A true CN108489923A (en) | 2018-09-04 |
| CN108489923B CN108489923B (en) | 2020-08-07 |
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| CN201810089425.2A Active CN108489923B (en) | 2018-01-30 | 2018-01-30 | Infrared gas imaging focal plane based on double-sensitive-element differential signal and imaging method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111157478A (en) * | 2020-01-13 | 2020-05-15 | 西北工业大学 | Spectrum type infrared imaging monitoring device and method for SF6 gas leakage |
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2018
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111157478A (en) * | 2020-01-13 | 2020-05-15 | 西北工业大学 | Spectrum type infrared imaging monitoring device and method for SF6 gas leakage |
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