CN108470696B - A kind of semiconductor material production equipment - Google Patents
A kind of semiconductor material production equipment Download PDFInfo
- Publication number
- CN108470696B CN108470696B CN201810229436.6A CN201810229436A CN108470696B CN 108470696 B CN108470696 B CN 108470696B CN 201810229436 A CN201810229436 A CN 201810229436A CN 108470696 B CN108470696 B CN 108470696B
- Authority
- CN
- China
- Prior art keywords
- cavity
- extending end
- main body
- face
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a kind of semiconductor material production equipments, including main body, cleaning chamber is equipped in the main body, the open slot that setting is connected to the cleaning chamber is equipped in the main body left end face, the first cavity is equipped in the main body on the upside of the cleaning chamber, the second cavity is equipped in the main body on the right side of first cavity, third cavity is equipped in the main body on the right side of the cleaning chamber, the third cavity is located at the second cavity lower position, the cleaning is intracavitary to be slidably connected with lifting frame body, it is rotatably assorted in first cavity and is connected with inner screw sheath extended up and down, the inner screw sheath bottom end communicates setting with the cleaning top of chamber, the inner screw sheath screw-internal thread fit is connected with the lifting screw for extending downwardly setting, lifting screw bottom extending end and the lifting The connection of frame body top end surface secure fit.
Description
Technical field
The present invention relates to semiconductor surface cleaning technical field, specially a kind of semiconductor material production equipment.
Background technique
With cyberage progress, the portable electronic devices such as computer and laptop widely answer by society
With, and it is suitable to manufacture process whether in Silicon Wafer, IC manufacturing or IC chip structure dress etc. for semiconductors manufacture
It is many and diverse, and used chemical classes are also quite a lot of in the fabrication process, and these chemical substances or the residual of solvent are not
Air can only be polluted during the manufacturing, but also can be to the qualification rate of Silicon Wafer, integrated circuit or IC chip
It has an immense impact on, in order to improve the product qualification rate of semiconductors manufacture, in the cleaning process of semiconductor, that is, must assure that half
Chemical substance above conductor has cleaned up, and cannot have any chemical residue, and traditional cleaning equipment is expensive,
It takes up a large area, is unfavorable for medium-sized and small enterprises production and application, and high maintenance cost can be huge to semiconductor factory's profit generation
It influences.
Summary of the invention
The purpose of the present invention is to provide a kind of semiconductor material production equipments, in the prior art above-mentioned scarce for overcoming
It falls into.
A kind of semiconductor material production equipment according to the present invention, including main body, the main body is interior to be equipped with cleaning chamber,
The open slot that setting is connected to the cleaning chamber, the host on the upside of the cleaning chamber are equipped in the main body left end face
It is equipped with the first cavity in vivo, is equipped with the second cavity in the main body on the right side of first cavity, on the right side of the cleaning chamber
Third cavity is equipped in the main body, the third cavity is located at the second cavity lower position, the intracavitary cunning of cleaning
It is dynamic to be connected with lifting frame body, it is rotatably assorted in first cavity and is connected with inner screw sheath extended up and down, it is described
Inner screw sheath bottom end communicates setting with the cleaning top of chamber, and the inner screw sheath screw-internal thread fit, which is connected with, to be extended downwardly
The lifting screw of setting, lifting screw bottom extending end are connect with the lifting frame body top end surface secure fit, institute
It states and is circumferentially installed with the first cone pulley on the inner screw sheath outer wall in the first cavity, first cavity and second cavity
Between part in be rotatably assorted and be connected with the extended rotation axis in left and right, extending end protrudes into described on the left of the rotation axis
The second cone pulley to be cooperatively connected with the first cone pulley power is installed in first cavity and at the extending end of left side, it is described
Extending end protrudes into second cavity and is installed with third cone pulley at the extending end of right side on the right side of rotation axis, and described second is empty
It is rotatably assorted in part between chamber and the third cavity and is connected with internal spline pivoted housing extended up and down, the internal spline
Extending end is protruded into second cavity and is installed at the extending end of top to dynamic with the third cone pulley at the top of pivoted housing
4th cone pulley of force-fitting connection, the third cavity is interior to be slidably connected adjusting slider, and the adjusting slider internal screw thread is matched
It closes and is connected with adjusting screw rod extended up and down, adjusting screw rod bottom extending end and adjusting motor power cooperation connect
It connects, tooth-strip part is installed in the adjusting slider left end face, is slidably connected in the internal spline pivoted housing bottom end face
The male splined shaft of setting is extended downwardly, male splined shaft bottom extending end protrudes into the third cavity and end power
It is connected with driving motor, the driving motor outer surface is embedded in admittedly in the adjusting slider top end surface, the cleaning chamber and institute
It states connection between third cavity and is equipped with through slot, be rotatably assorted in the through slot and be connected with adjustment gear, the adjustment gear
Right end and the tooth-strip part power are cooperatively connected, and are installed with press convex block in the adjustment gear.
Further technical solution, the adjusting outer surface of motor are solid in the third cavity inner bottom wall, and therewith
Fixed to be cooperatively connected, extending end is rotatably assorted with the third cavity inner roof wall at the top of the adjusting screw rod connect.
Further technical solution, the lifting frame body left end face is interior to be equipped with holding tank, inner wall on the right side of the holding tank
It is interior to be equipped with deep gouge, it is slidably connected with storage in the holding tank and receives frame, the storage, which is received, to be equipped with multiple groups in frame and equidistantly arrange setting
Peace joint chair, the storage receives frame right end and is installed with inclined-plane lock slide, be equipped with and lock in bevel lock slider top end face
Slot, the interior connection of the deep gouge inner roof wall are equipped with lock sliding slot, and inclined-plane clamping block is slidably connected in the lock sliding slot, described oblique
Top pressure spring is installed between face clamping block top end surface and the lock sliding slot inner roof wall, in the right end face of the lifting frame body
It is embedded in groove, the part between the insertion groove and the lock sliding slot, which is connected to, is equipped with guide runner, and sliding is matched in the guide runner
Close and be connected with the extended slider guide in left and right, on the left of the slider guide extending end protrude into the lock sliding slot and with it is described oblique
The connection of face clamping block right end face secure fit, slider guide right side extending end protrude into the insertion groove, and therewith
Sliding connection.
Further technical solution, the interior bilateral symmetry of the lifting frame body top end surface, which is equipped with to be connected to the holding tank, to be set
The hole slot set, the intracavitary roof bilateral symmetry of cleaning are equipped with the jet thrust being oppositely arranged with the hole slot.
The beneficial effects of the present invention are: the configuration of the present invention is simple, easy to operate, by setting cleaning chamber, host in main body
The open slot for being connected to setting with cleaning chamber is set in body left end face, sets the first cavity in the main body cleaned on the upside of chamber, first is empty
The second cavity is set in main body on the right side of chamber, third cavity is set in the main body cleaned on the right side of chamber, it is empty that third cavity is located at second
Chamber lower position cleans intracavitary sliding connection and goes up and down frame body, and be rotatably assorted to connect in the first cavity is extended up and down
Inner screw sheath, inner screw sheath bottom end communicate setting with cleaning top of chamber, and the connection of inner screw sheath screw-internal thread fit extends downwardly
The lifting screw of setting, lifting screw bottom extending end is connect with lifting frame body top end surface secure fit, in the first cavity
Inner screw sheath outer wall on circumferential fixed first cone pulley, be rotatably assorted in the part between the first cavity and the second cavity and connect a left side
The extended rotation axis in the right side, on the left of rotation axis extending end protrude into the first cavity and at the extending end of left side it is fixed to
The second cone pulley that first cone pulley power is cooperatively connected, rotation axis right side extending end protrudes into the second cavity and right side extending end
Locate fixed third cone pulley, is rotatably assorted in the part between the second cavity and third cavity and connects internal spline extended up and down
Pivoted housing, internal spline pivoted housing top extending end protrude into the second cavity and fixed to dynamic with third cone pulley at the extending end of top
4th cone pulley of force-fitting connection, is slidably connected adjusting slider in third cavity, in the connection of adjusting slider screw-internal thread fit
Extended adjusting screw rod down, adjusting screw rod bottom extending end and adjusting motor power are cooperatively connected, on the left of adjusting slider
Fixed tooth-strip part in end face, the interior sliding connection of internal spline pivoted housing bottom end face extend downwardly the male splined shaft of setting, outer flower
Key axis bottom extending end protrudes into third cavity and end is connected by power driving motor, and driving motor outer surface is embedded in tune admittedly
It saves in slider top end face, is connected between cleaning chamber and third cavity and sets through slot, be rotatably assorted in through slot and connect adjusting tooth
Wheel, adjustment gear right end and tooth-strip part power are cooperatively connected, fixed press convex block in adjustment gear, to realize realization certainly
Dynamic control Fast Installation and locking work, the firm cleaning of convenience and high-efficiency, meanwhile, it is able to achieve automatic control unlock work
And flash baking work is automatically controlled, it greatly improves work efficiency, and manufacture low with maintenance cost.
Detailed description of the invention
Fig. 1 is a kind of semiconductor material production equipment outside overall structure diagram in the present invention；
Fig. 2 is a kind of semiconductor material production equipment inside overall structure diagram in the present invention；
Fig. 3 is crane body schematic diagram of internal structure in the present invention.
Specific embodiment
Below with reference to Fig. 1-3, the present invention is described in detail.
Referring to Fig.1-3, a kind of semiconductor material production equipment of embodiment according to the present invention, including main body 6, it is described
It is equipped with cleaning chamber 61 in main body 6, the open slot for being connected to setting with the cleaning chamber 61 is equipped in 6 left end face of main body
66, the main body 6 of 61 upside of cleaning chamber is interior to be equipped with the first cavity 62, the host on 62 right side of the first cavity
It is equipped with the second cavity 63 in body 6, is equipped with third cavity 64 in the main body 6 on 61 right side of cleaning chamber, the third is empty
Chamber 64 is located at 63 lower position of the second cavity, is slidably connected in the cleaning chamber 61 and goes up and down frame body 7, and described first
Be rotatably assorted in cavity 62 and be connected with up and down extended inner screw sheath 621,621 bottom end of inner screw sheath with it is described
Setting is communicated at the top of cleaning chamber 61,621 screw-internal thread fit of inner screw sheath is connected with the lifting screw for extending downwardly setting
622, the 622 bottom extending end of lifting screw is connect with the 7 top end surface secure fit of lifting frame body, and described first is empty
The first cone pulley 623, first cavity 62 and second sky are circumferentially installed on 621 outer wall of the inner screw sheath in chamber 62
It is rotatably assorted in part between chamber 63 and is connected with the extended rotation axis 625 in left and right, extend end on the left of the rotation axis 625
End is protruded into first cavity 62 and is installed at the extending end of left side to be cooperatively connected with 623 power of the first cone pulley
The second cone pulley 624, the 625 right side extending end of rotation axis protrudes into second cavity 63 and consolidates at the extending end of right side
Equipped with third cone pulley 631, it is rotatably assorted and is connected with up and down in the part between second cavity 63 and the third cavity 64
Extended internal spline pivoted housing 633, the 633 top extending end of internal spline pivoted housing are protruded into second cavity 63 and are pushed up
The 4th cone pulley 632 to be cooperatively connected with 631 power of third cone pulley, the third cavity are installed at portion's extending end
Adjusting slider 641 is slidably connected in 64,641 screw-internal thread fit of adjusting slider is connected with adjusting extended up and down
Screw rod 642, the 642 bottom extending end of adjusting screw rod and adjusting 643 power of motor are cooperatively connected, the adjusting slider 641
It is installed with tooth-strip part 645 in left end face, is slidably connected with to extend downwardly in 633 bottom end face of internal spline pivoted housing and sets
The male splined shaft 634 set, the 634 bottom extending end of male splined shaft protrudes into the third cavity 64 and end power connects
It is connected to driving motor 644,644 outer surface of driving motor is embedded in admittedly in 641 top end surface of adjusting slider, the cleaning
It is connected between chamber 61 and the third cavity 64 and is equipped with through slot 65, be rotatably assorted in the through slot 65 and be connected with adjustment gear
651,651 right end of adjustment gear and 645 power of tooth-strip part are cooperatively connected, fixed in the adjustment gear 651
There is press convex block 652.
Valuably or illustratively, 643 outer surface of adjusting motor is embedded in 64 inner bottom wall of third cavity, and with
Secure fit connection, the 642 top extending end of adjusting screw rod is rotatably assorted with 64 inner roof wall of third cavity to be connect.
Valuably or illustratively, holding tank 71,71 right side of holding tank are equipped in 7 left end face of lifting frame body
It is equipped with deep gouge 74 in inner wall, storage is slidably connected in the holding tank 71 and receives frame 72, the storage is received and is equipped with multiple groups in frame 72
The peace joint chair 721 of equidistant arrangement setting, the storage receive 72 right end of frame and are installed with inclined-plane lock slide 741, and the bevel lock is sliding
Locking slot 742 is equipped in 741 top end surface of block, connection is equipped with lock sliding slot 75, the lock sliding slot 75 in 74 inner roof wall of deep gouge
Inside be slidably connected with inclined-plane clamping block 751,751 top end surface of inclined-plane clamping block and 75 inner roof wall of lock sliding slot it
Between be installed with top pressure spring 752, the right end face of the lifting frame body 7 is embedded in groove 77, the insertion groove 77 with it is described
The part connection locked between sliding slot 75 is equipped with guide runner 76, is slidably connected with what left and right was extended in the guide runner 76
Slider guide 761, the 761 left side extending end of slider guide protrude into the lock sliding slot 75 and right with the inclined-plane clamping block 751
The connection of side end face secure fit, the 761 right side extending end of slider guide protrude into the insertion groove 77, and sliding is matched therewith
Connection is closed, automatically controls Fast Installation and locking work, the firm cleaning of convenience and high-efficiency to realize.
Valuably or illustratively, bilateral symmetry is equipped with and the holding tank 71 company in 7 top end surface of lifting frame body
The hole slot 73 of logical setting, cleaning 61 inner roof wall of the chamber bilateral symmetry are equipped with the jet thrust 731 being oppositely arranged with the hole slot 73,
To realize the drying work after quickly being cleaned.
When original state, adjusting slider 641 is located at the top position in third cavity 64, meanwhile, by adjusting slider 641
The male splined shaft 634 at 644 top of driving motor is driven utmostly to protrude into internal spline pivoted housing 633, at this point, by adjusting slider
Tooth-strip part 645 in 641 left end faces drives the press convex block 652 in adjustment gear 651 to be located at passing through for 651 downside of adjustment gear
In through slot 65, meanwhile, lifting frame body 7 is located at the top position in cleaning chamber 61, at this point, making 71 left distal end of holding tank and opening
Mouth slot 66 is in complete relative position, meanwhile, protrude into jet thrust 731 utmostly in hole slot 73, at this point, making to be embedded in groove 77
Right end and 65 left distal end of through slot are in relative position.
When needing surface cleaning, it is packed into cleaning solution in cleaning chamber 61 first, the semiconductor work for then cleaning needs
Make to be packed into storage and receive in frame 72, is pushed into holding tank 71 at this point, frame 72 is received in storage, meanwhile, so that storage is received the inclined-plane of 72 right end of frame
Lock slide 741 gradually protrudes into deep gouge 74, at this point, pressing the work that is slidably matched by inclined-plane lock slide 741 and inclined-plane clamping block 751
Make, meanwhile, make inclined-plane clamping block 751 that 752 pressure on top surface of top pressure spring be overcome to be slid completely into lock sliding slot 75, until inclined-plane lock slide
741 when being fully inserted into deep gouge 74, at this point, it is located at locking slot 742 at lock 75 bottom relative position of sliding slot, meanwhile, make inclined-plane
Clamping block 751 is made clamping block 751 bottom end in inclined-plane utmostly protrude into locking slot 742 by 752 pressure on top surface of top pressure spring
It is interior, to realize locking work, then, male splined shaft 634, internal spline pivoted housing 633 and interior flower are driven by driving motor 644
4th cone pulley 632 of 633 top end of key pivoted housing rotates, and then drives third cone pulley 631, rotation axis 625 by the 4th cone pulley 632
And the second cone pulley 624 rotation of 625 left distal end of rotation axis, and the first cone pulley 623 and interior spiral shell are driven by the second cone pulley 624
621 rotation of line set, to realize the lifting frame body for driving lifting screw 622 and 622 bottom of lifting screw by inner screw sheath 621
7 towards the bottom direction sliding in holding tank 71, until lifting frame body 7 slides into the lowest position in holding tank 71, Jin Ershi
Existing cleaning is rotated backward after the completion of cleaning by controlling driving motor 644, until lifting frame body 7 slides into holding tank
Top position in 71 carries out drying work by control 731 jet of jet thrust at this time and adjusts at this time after the completion of drying
Motor 643 controls to adjust screw rod 642 and rotates, and drives adjusting slider 641 towards the bottom side in third cavity 64 by adjusting screw rod 642
To sliding, meanwhile, drive adjustment gear 651 to rotate clockwise by the tooth-strip part 645 in 641 left end face of adjusting slider, in turn
It realizes and drives the press rotation of convex block 652 to slide into insertion groove 77 by adjustment gear 651, meanwhile, by press convex block 652 and slide guide
The press of block 761 is slidably matched, at this point, making slider guide 761 that inclined-plane clamping block 751 be driven to overcome 752 pressure on top surface of top pressure spring, together
When, so that clamping block 751 is utmostly received frame 72 far from locking slot 742, then taking out storage.
The beneficial effects of the present invention are: the configuration of the present invention is simple, easy to operate, by setting cleaning chamber, host in main body
The open slot for being connected to setting with cleaning chamber is set in body left end face, sets the first cavity in the main body cleaned on the upside of chamber, first is empty
The second cavity is set in main body on the right side of chamber, third cavity is set in the main body cleaned on the right side of chamber, it is empty that third cavity is located at second
Chamber lower position cleans intracavitary sliding connection and goes up and down frame body, and be rotatably assorted to connect in the first cavity is extended up and down
Inner screw sheath, inner screw sheath bottom end communicate setting with cleaning top of chamber, and the connection of inner screw sheath screw-internal thread fit extends downwardly
The lifting screw of setting, lifting screw bottom extending end is connect with lifting frame body top end surface secure fit, in the first cavity
Inner screw sheath outer wall on circumferential fixed first cone pulley, be rotatably assorted in the part between the first cavity and the second cavity and connect a left side
The extended rotation axis in the right side, on the left of rotation axis extending end protrude into the first cavity and at the extending end of left side it is fixed to
The second cone pulley that first cone pulley power is cooperatively connected, rotation axis right side extending end protrudes into the second cavity and right side extending end
Locate fixed third cone pulley, is rotatably assorted in the part between the second cavity and third cavity and connects internal spline extended up and down
Pivoted housing, internal spline pivoted housing top extending end protrude into the second cavity and fixed to dynamic with third cone pulley at the extending end of top
4th cone pulley of force-fitting connection, is slidably connected adjusting slider in third cavity, in the connection of adjusting slider screw-internal thread fit
Extended adjusting screw rod down, adjusting screw rod bottom extending end and adjusting motor power are cooperatively connected, on the left of adjusting slider
Fixed tooth-strip part in end face, the interior sliding connection of internal spline pivoted housing bottom end face extend downwardly the male splined shaft of setting, outer flower
Key axis bottom extending end protrudes into third cavity and end is connected by power driving motor, and driving motor outer surface is embedded in tune admittedly
It saves in slider top end face, is connected between cleaning chamber and third cavity and sets through slot, be rotatably assorted in through slot and connect adjusting tooth
Wheel, adjustment gear right end and tooth-strip part power are cooperatively connected, fixed press convex block in adjustment gear, to realize realization certainly
Dynamic control Fast Installation and locking work, the firm cleaning of convenience and high-efficiency, meanwhile, it is able to achieve automatic control unlock work
And flash baking work is automatically controlled, it greatly improves work efficiency, and manufacture low with maintenance cost.
Those skilled in the art can define, can in the case of not departing from overall spirit of the invention and design
To make the various modifications for above embodiments.It falls within the scope of protection of the present invention.Protection scheme of the invention
It is subject to claims appended hereto.
Claims (4)
1. a kind of semiconductor material production equipment, including main body, it is characterised in that: be equipped with cleaning chamber, institute in the main body
State the open slot for being equipped in main body left end face and being connected to setting with the cleaning chamber, the main body on the upside of the cleaning chamber
It is inside equipped with the first cavity, the second cavity, the institute on the right side of the cleaning chamber are equipped in the main body on the right side of first cavity
It states and is equipped with third cavity in main body, the third cavity is located at the second cavity lower position, the intracavitary sliding of cleaning
It is connected with lifting frame body, is rotatably assorted in first cavity and is connected with inner screw sheath extended up and down, it is described interior
Thread bush bottom end communicates setting with the cleaning top of chamber, and the inner screw sheath screw-internal thread fit, which is connected with to extend downwardly, to be set
The lifting screw set, lifting screw bottom extending end is connect with the lifting frame body top end surface secure fit, described
Circumferentially be installed with the first cone pulley on the inner screw sheath outer wall in first cavity, first cavity and second cavity it
Between part in be rotatably assorted and be connected with the extended rotation axis in left and right, extending end protrudes into described the on the left of the rotation axis
It is installed with the second cone pulley to be cooperatively connected with the first cone pulley power in one cavity and at the extending end of left side, described turn
Extending end protrudes into second cavity and is installed with third cone pulley, second cavity at the extending end of right side on the right side of moving axis
It is rotatably assorted in part between the third cavity and is connected with internal spline pivoted housing extended up and down, the internal spline turns
Set top extending end protrude into second cavity and be installed at the extending end of top to the third cone pulley power
The 4th cone pulley being cooperatively connected, the third cavity is interior to be slidably connected adjusting slider, the adjusting slider screw-internal thread fit
It is connected with adjusting screw rod extended up and down, adjusting screw rod bottom extending end and adjusting motor power are cooperatively connected,
It is installed with tooth-strip part in the adjusting slider left end face, is slidably connected in the internal spline pivoted housing bottom end face downwards
Extended male splined shaft, male splined shaft bottom extending end protrudes into the third cavity and end is connected by power
There is driving motor, the driving motor outer surface is embedded in admittedly in the adjusting slider top end surface, the cleaning chamber and described the
Connection is equipped with through slot between three cavitys, is rotatably assorted in the through slot and is connected with adjustment gear, on the right side of the adjustment gear
End and the tooth-strip part power are cooperatively connected, and are installed with press convex block in the adjustment gear.
2. a kind of semiconductor material production equipment according to claim 1, it is characterised in that: described state adjusts motor appearance
Face is in the third cavity inner bottom wall, and mating connection fixed thereto, at the top of the adjusting screw rod extending end with it is described
Third cavity inner roof wall is rotatably assorted connection.
3. a kind of semiconductor material production equipment according to claim 1, it is characterised in that: the lifting frame body left-hand end
It is equipped with holding tank in face, is equipped with deep gouge on the right side of the holding tank in inner wall, storage is slidably connected in the holding tank and receives frame,
The storage is received and is equidistantly arranged the peace joint chair of setting in frame equipped with multiple groups, and the storage receives frame right end and is installed with inclined-plane lock slide,
Locking slot is equipped in bevel lock slider top end face, connection is equipped with lock sliding slot, the lock sliding slot in the deep gouge inner roof wall
It is inside slidably connected with inclined-plane clamping block, is installed between the inclined-plane clamping block top end surface and the lock sliding slot inner roof wall
Top pressure spring, the right end face of the lifting frame body are embedded in groove, the part between the insertion groove and the lock sliding slot
Connection is equipped with guide runner, and the extended slider guide in left and right, the slider guide left side are slidably connected in the guide runner
Extending end is protruded into the lock sliding slot and is connect with the inclined-plane clamping block right end face secure fit, on the right side of the slider guide
Extending end protrudes into the insertion groove, and is slidably connected therewith.
4. a kind of semiconductor material production equipment according to claim 3, it is characterised in that: the lifting frame body top end
Bilateral symmetry is equipped with the hole slot for be connected to setting with the holding tank in face, the intracavitary roof of the cleaning be symmetrically equipped with it is described
The jet thrust that hole slot is oppositely arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810229436.6A CN108470696B (en) | 2018-03-20 | 2018-03-20 | A kind of semiconductor material production equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810229436.6A CN108470696B (en) | 2018-03-20 | 2018-03-20 | A kind of semiconductor material production equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108470696A CN108470696A (en) | 2018-08-31 |
| CN108470696B true CN108470696B (en) | 2019-01-25 |
Family
ID=63265538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810229436.6A Active CN108470696B (en) | 2018-03-20 | 2018-03-20 | A kind of semiconductor material production equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108470696B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111470266B (en) * | 2020-05-07 | 2020-12-11 | 嘉兴暖阳户外用品有限公司 | Transportation equipment capable of automatically sorting according to cargo weight |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9070631B2 (en) * | 2013-03-14 | 2015-06-30 | Mei Llc | Metal liftoff tools and methods |
| CN105097438B (en) * | 2014-05-23 | 2018-03-20 | 沈阳芯源微电子设备有限公司 | A kind of chip back surface cleaning device |
-
2018
- 2018-03-20 CN CN201810229436.6A patent/CN108470696B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN108470696A (en) | 2018-08-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108638820A (en) | A kind of novel power battery device and its application method | |
| CN108470696B (en) | A kind of semiconductor material production equipment | |
| CN109148322A (en) | A kind of follow-on semiconductor material production technology equipment | |
| CN108551048A (en) | A kind of information machine people device | |
| CN108306598A (en) | A kind of device of solar generating | |
| CN109084493A (en) | A kind of solar energy is from trend day tracking device and its application method | |
| CN108470697A (en) | A kind of novel semi-conducting material production technology equipment | |
| CN108322151A (en) | A kind of novel solar power generation device | |
| CN108199589A (en) | A kind of gird-connected inverter equipment | |
| CN207261728U (en) | Multistation valve group and its sealed triple valve | |
| CN108480336B (en) | A kind of snail fever kit device | |
| CN109103999A (en) | Electrical power transfer apparatus and application method | |
| CN108214903A (en) | A kind of improved bridge construction equipment | |
| CN108227757A (en) | A kind of novel environmental monitoring device | |
| CN108095486A (en) | A kind of new cup | |
| CN108538754A (en) | A kind of semi-conducting material production technology equipment | |
| CN108311012A (en) | A kind of multi-function metal composite powder production technology equipment | |
| JP6678851B2 (en) | Ultra-fine powder preparation technology equipment for pottery with superior performance structure | |
| CN108479471B (en) | A kind of enzyme for detergent preparation facilities | |
| CN207629257U (en) | A kind of drill bit converter of drilling machine | |
| CN108345317A (en) | A kind of environmental monitoring installation | |
| CN108202405A (en) | A kind of bridge building operations equipment | |
| CN109012429A (en) | A kind of Wood protective agent device | |
| CN108479605A (en) | A kind of intelligent robot | |
| CN108480337A (en) | A kind of novel snail fever kit device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20181207 Address after: 221000 Yangtun Office Building, No. 1 Zhaoyang Avenue, Yangtun Town, Peixian County, Xuzhou City, Jiangsu Province Applicant after: Jiangsu Tuozheng Maoyuan New Energy Co., Ltd. Address before: 300400 No. 8 Jingbao Road, Beichen District, Tianjin Applicant before: He Guanyue |
|
| TA01 | Transfer of patent application right | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |