CN108464818B - Miniature LED probe - Google Patents

Miniature LED probe Download PDF

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Publication number
CN108464818B
CN108464818B CN201810331906.XA CN201810331906A CN108464818B CN 108464818 B CN108464818 B CN 108464818B CN 201810331906 A CN201810331906 A CN 201810331906A CN 108464818 B CN108464818 B CN 108464818B
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micro led
transistor
probe
pole
electrically connected
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CN108464818A (en
Inventor
刘召军
覃丽环
王艳
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Southwest University of Science and Technology
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Southwest University of Science and Technology
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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0071Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence by measuring fluorescence emission
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/68Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6846Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive
    • A61B5/6847Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive mounted on an invasive device
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/68Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6846Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive
    • A61B5/6867Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive specially adapted to be attached or implanted in a specific body part
    • A61B5/6868Brain
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/68Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6846Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive
    • A61B5/6867Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive specially adapted to be attached or implanted in a specific body part
    • A61B5/6877Nerve

Abstract

The invention discloses a miniature LED probe. The miniature LED probe comprises a probe head and a connecting part connected with the probe head; the probe head comprises an active panel, a driving circuit and a micro LED array; the driving circuit is integrated on the active panel and comprises a plurality of driving units which are arranged in an array, and the micro LED array is positioned on one side of the driving circuit far away from the active panel and comprises a plurality of micro LEDs which are arranged in a matrix; the driving units are in one-to-one correspondence with the micro LEDs, and each driving unit is used for driving the corresponding micro LED; the driving unit comprises an excitation subunit and a detection subunit, the excitation subunit is used for driving the corresponding micro LED to emit first visible light in an excitation stage, and the detection subunit is used for driving the micro LED to detect second visible light in a detection stage. The technical scheme of the invention realizes direct stimulation and monitoring of the nerve cells, images the activity condition of the nerve cells in real time, and obtains the three-dimensional view effect of the nerve cells.

Description

Miniature LED probe
Technical Field
The embodiment of the invention relates to the nerve diagnosis and treatment technology, in particular to a miniature LED probe.
Background
Mini-nerve probes are an important tool for neuroscience. The nerve probe is mainly used for treating brain diseases such as epilepsy, migraine, alzheimer's disease, dementia and the like in the medical field at present. In recent years, the research of nerve probes has also rapidly advanced and developed under the background of the continuous development and perfection of microelectronics and optogenetics. By implanting nerve probes into different areas of the brain to record and stimulate specific sites in the brain, cell-level detection, processing, and interpretation of nerve data can be performed, thereby helping medical personnel to gain insight into neurological disease and make rational countermeasures.
However, the existing nerve probe can realize the stimulation and monitoring of the brain nerve cells, but the brain needs to be dissected to observe the light signals emitted by fluorescent substances in the nerve cells. Under the condition of no dissection, the activity condition of nerve cells cannot be intuitively displayed in real time, so that medical staff are prevented from further understanding the nerve diseases.
Disclosure of Invention
The invention provides a miniature LED probe, which is used for directly stimulating and monitoring nerve cells and imaging the activity status of the nerve cells in real time without human anatomy.
In a first aspect, an embodiment of the present invention provides a micro LED probe, including a probe head and a connection part connected to the probe head;
the probe head comprises an active panel, a driving circuit and a micro LED array; the driving circuit is integrated on the active panel and comprises a plurality of driving units which are arranged in an array, and the micro LED array is positioned at one side of the driving circuit far away from the active panel and comprises a plurality of micro LEDs which are arranged in a matrix; the driving units are in one-to-one correspondence with the micro LEDs, and each driving unit is used for driving the corresponding micro LED;
the driving unit comprises an excitation subunit and a detection subunit, the excitation subunit is used for driving the corresponding micro LED to emit first visible light in an excitation stage, and the detection subunit is used for driving the micro LED to detect second visible light in a detection stage; the second visible light is visible light emitted by the object to be detected under the excitation of the first visible light.
Specifically, the excitation subunit includes a first transistor, a second transistor, a third transistor, and a first capacitance;
the grid electrode of the first transistor is electrically connected with the first control end of the excitation subunit, the first pole of the first transistor is electrically connected with the input end of the excitation subunit, and the second pole of the first transistor is electrically connected with the grid electrode of the second transistor and the first pole of the first capacitor; a first pole of the second transistor and a second pole of the first capacitor are electrically connected with a first voltage line, and a second pole of the second transistor is electrically connected with an anode of the micro LED; the cathode of the micro LED is electrically connected with the first pole of the third transistor, the grid electrode of the third transistor is electrically connected with the second control end of the excitation subunit, and the second pole is grounded;
the detection subunit comprises a fourth transistor, a fifth transistor, a first resistor and a storage element;
the gates of the fourth transistor and the fifth transistor are respectively and electrically connected with the third control end and the fourth control end of the detection subunit, the first pole of the fourth transistor is electrically connected with a second voltage line, the second pole is electrically connected with the first end of the first resistor, and the second end of the first resistor is electrically connected with the cathode of the micro LED; the first pole and the second pole of the storage element are respectively and electrically connected with the anode and the cathode of the micro LED; the anode of the micro LED is electrically connected with the first pole of the fifth transistor, and the second pole of the fifth transistor is grounded.
In particular, the storage element is a second capacitance.
Specifically, the micro LED probe further comprises a first coating layer, and the first coating layer uniformly coats the area of the micro LED probe except the micro LEDs.
Specifically, the material of the first coating layer is Parylene C.
Or, the micro LED probe further comprises a second coating layer and a third coating layer, wherein the second coating layer uniformly coats the area of the probe head except the micro LED, and the third coating layer uniformly coats the connecting part.
Specifically, the micro LED has a size of 5 μm.
Specifically, the probe head has a thickness of 10 μm.
Specifically, the micro LED probe comprises a substrate, wherein the substrate comprises a first sub-part and a second sub-part, the first sub-part is the substrate of the active panel, and the second sub-part is the substrate of the connecting part; the material of the substrate is flexible.
Specifically, the flexible material is Parylene C.
According to the technical scheme, the active panel, the driving circuit and the micro LED array are arranged in the probe head, so that the micro LEDs emit first visible light to stimulate fluorescent substances in brain nerve cells to emit second visible light in an excitation stage, and the visible light emitted by the micro LEDs is matched with the second visible light emitted by the fluorescent substances in a detection stage, so that the detection subunit receives the second visible light emitted by the fluorescent substances and converts photoelectric signals, converts the second visible light emitted by the fluorescent substances into electric signals and transmits the electric signals to external equipment for image display, and therefore direct stimulation and monitoring of nerve cells are achieved, and the activity state of the nerve cells can be imaged in real time under the condition that a human body is not dissected. In addition, each micro LED independently controls the luminous effect by the corresponding driving unit, so that the stimulation of single or multiple nerve cells can be realized, and the three-dimensional view effect of the nerve cells is further obtained.
Drawings
FIG. 1 is a cross-sectional view of a micro LED probe according to an embodiment of the present invention;
FIG. 2 is a top view of a micro LED probe according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a driving unit according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a readout circuit according to an embodiment of the present invention.
Detailed Description
The invention is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present invention are shown in the drawings.
Fig. 1 is a cross-sectional view of a micro LED probe according to an embodiment of the present invention, and fig. 2 is a top view of a micro LED probe according to an embodiment of the present invention, where the embodiment is applicable to a scenario in which a cell activity status is intuitively observed when a human body is not dissected. As shown in fig. 1 and 2, the micro LED probe includes a probe head 100 and a connection part 200 connected with the probe head 100. The probe head 100 includes an active panel 110, a driving circuit 120, and a micro LED array 130; the driving circuit 120 is integrated on the active panel 110 and comprises a plurality of driving units 121 arranged in an array, and the micro LED array 130 is positioned on one side of the driving circuit 120 far away from the active panel 110 and comprises a plurality of micro LEDs 131 arranged in a matrix; the driving units 121 are in one-to-one correspondence with the micro LEDs 131, and each driving unit 121 is used for driving the corresponding micro LED131. The driving unit 121 includes an excitation subunit and a detection subunit, the excitation subunit is configured to drive the corresponding micro LED131 to emit the first visible light in the excitation stage, and the detection subunit is configured to drive the micro LED131 to detect the second visible light in the detection stage; the second visible light is visible light emitted by the object to be detected under the excitation of the first visible light.
Specifically, the micro LEDs in the micro LED array 130 may be arranged in a matrix, including x rows and y columns, and a total of x×y micro LEDs 131, where x and y are any integers greater than or equal to 1, and x and y may be equal or unequal. Correspondingly, the driving circuit 120 may include x×y driving units 121, and each driving unit 121 corresponds to one micro LED131. As shown in fig. 2, the micro LED array 130 includes 5×5 micro LEDs 131 arranged in an array, the driving circuit 120 includes 5×5 driving units 121, each driving unit 121 corresponds to one micro LED131, and each driving unit 121 drives the corresponding micro LED131 to emit light. Fig. 2 is merely illustrative of the micro LED array 130 and is not limiting, and the number of rows and columns of the micro LED array 130 is not limited to that shown in fig. 2.
The driving unit 121 is electrically connected with the micro LEDs 131, and the electrical connection of the micro LED array 130 with the driving unit 121 in the driving circuit 120 may be exemplarily realized through the pad 150, so that the driving sub-circuit in the driving unit 121 can drive the corresponding micro LEDs 131 to emit light.
Specifically, the driving unit 121 includes an excitation subunit and a detection subunit, where the excitation subunit and the corresponding micro LED form an excitation loop, and the micro LED can realize forward conduction under the driving of the excitation subunit. The detection subunit and the corresponding micro LEDs form a detection loop, and the micro LEDs can realize reverse breakdown conduction under the driving of the detection subunit.
In particular, during the operation of the micro LED probe, the driving unit 121 may be divided into an excitation phase and a detection phase. During the excitation stage, the excitation subunit receives an external excitation signal and a first control signal, and when the first control signal is effective, the excitation subunit acts the excitation signal on the anode of the corresponding micro LED to enable the micro LED to emit first visible light. It should be noted that, the wavelength of the first visible light emitted by the micro LED should be able to meet the wavelength requirement of making the object to be detected (typically, fluorescent material) in the human body cell emit light. For example, when the fluorescent substance of the cells in the brain tissue emits light after being stimulated by the visible light having the wavelength range of 420mm to 450mm, the first visible light emitted from the micro LEDs in the micro LED array 130 has the wavelength range of 420mm to 450mm during the excitation stage. Therefore, when the micro LED emits the first visible light, the fluorescent material which stimulates cells inside the brain tissue emits the second visible light. In this embodiment, the active panel 110 is used to integrate the micro LED probe, and the micro LED array 130 can be controlled to emit light in an active driving manner, and at this time, the micro LED array 130 can control whether the excitation subunit acts the excitation signal on the micro LED to make the micro LED emit the first visible light through the first control signal, so that the effective control of the fluorescent material stimulation in the brain nerve cell can be realized, and the monitoring of the nerve cell activity is realized.
During the detection phase, the detection subunit receives an external second control signal, and when the second control signal is valid, the detection subunit reversely breaks down the corresponding micro LED under the active drive of the active panel 110 and emits light. When the wavelength of the light emitted by the micro LED is matched with the wavelength of the second visible light emitted by the fluorescent material, the detection subunit receives the second visible light emitted by the fluorescent material and converts the second visible light into an electrical signal, and stores the electrical signal, and the electrical signal is sent to equipment outside the brain through the connection part 200 connected with the probe head 100, so that an image is formed in the equipment, the activity condition of the nerve cells is reflected, the direct stimulation and monitoring of the nerve cells are realized, and the activity condition of the nerve cells can be imaged in real time without dissecting a human body.
In the excitation stage and the detection stage, the micro LED emits light, and the wavelength of the emitted light can meet the wavelength requirement of the fluorescent material in the human body cell, and the wavelength of the emitted light needs to be matched with the wavelength of the second visible light emitted by the fluorescent material, so that the wavelength range of an excitation signal (for example, the first visible light) for exciting the fluorescent material and the wavelength range of a detection signal (for example, the light emitted by the micro LED in the detection stage) for detecting the second visible light emitted by the fluorescent material have coincident wavelength parts, and the wavelength range of the emitted light of the micro LED includes the coincident wavelength parts, so that the micro LED can excite the fluorescent material to emit the second visible light and detect the second visible light emitted by the fluorescent material, and the micro LED has different functions in different stages.
It should be noted that, the connection portion 200 is electrically connected to the driving circuit 120 in the probe head 100, the driving circuit 120 may be electrically connected to an external device through the connection portion 200, so as to supply power to the driving circuit 120, and meanwhile, it is necessary to send the electrical signal stored in the detection subunit to the external device through the connection portion 200, so that an image is formed in the external device, thereby observing the activity status of the nerve cells in the brain. As shown in fig. 2, the connection part 200 includes a plurality of connection terminals 201 for connecting the probe head 100 with external devices. Specifically, the connection portion 200 includes a connection end 201 of the probe head 100 connected to an external power source, and is capable of continuously providing power to the driving circuit 120 on the probe head 100. In addition, the driving circuit 120 transmits the electric signal stored in the probe subunit to the external device through the connection part 200, and thus the connection part 200 further includes a connection terminal 201 for transmitting the signal.
The plurality of driving units 121 of the driving circuit 120 may respectively drive the plurality of micro LEDs 131 in the micro LED array 130 and may independently drive the corresponding micro LEDs 131 from each other, so that any micro LED131 in the micro LED array 130 may be arbitrarily selected to emit light, and the stimulation of a single or a plurality of nerve cells may be achieved when the fluorescent material in the brain nerve cells is stimulated, thereby obtaining a three-dimensional view effect of the nerve cells. In addition, the driving circuit 120 may be integrated on the active panel 110 through a complementary metal oxide semiconductor (Complementary Metal Oxide Semiconductor, COMS) process, achieving a highly integrated monolithic effect of the driving circuit 120 and the micro LED array 130.
In the process of manufacturing the micro LED131, the substrate of the micro LED array 130 may be removed by a laser lift-off technique after the electrode is manufactured, and the substrate may be a sapphire substrate, for example. The above-mentioned peeling operation of the substrate makes the light emitted from the micro LED131 directly enter the brain tissue after the micro LED131 in the micro LED array 130 emits light, so as to avoid the absorption of the light by the substrate of the micro LED array 130, and make the light source penetrate into the brain tissue, thereby realizing the stimulation of the fluorescent material in the brain tissue and making the fluorescent material emit light. The fluorescent substance in the brain tissue may be provided in the cell itself or may be artificially introduced into the cell.
Illustratively, the micro LED probe provided by the present invention can be used for experiments in transgenic mice, using the ChR2 expressed in the transgenic mice by the optogenetic technique as a fluorescent substance, and inserting the micro LED probe into brain tissue of the transgenic mice by the optogenetic technique to stimulate the ChR2 fluorescent substance of specific cells in a selected brain region. In the excitation stage, when the wavelength of the first visible light emitted by the micro LED array 130 under the driving of the excitation subunit (through the active driving manner) reaches the excitation wavelength of the fluorescent material ChR2, the ChR2 fluorescent material is excited to emit the second visible light; at this time, the micro LED array 130 enters a detection stage, the wavelength of light emitted by the driving of the detection subunit (through an active driving manner) is matched with the wavelength of the second visible light emitted by the ChR2 fluorescent material, the detection subunit receives the second visible light emitted by the ChR2 fluorescent material, converts the second visible light emitted by the ChR2 fluorescent material into an electrical signal, stores the electrical signal, and sends the electrical signal to a device outside the brain through the connection part 200 connected with the probe head 100, so that an image is formed in the device, and the activity condition of nerve cells is observed. Because the excitation subunit and the detection subunit share the same micro LED131 to emit light, the micro LED probe can periodically detect, and in one period, the excitation phase and the detection phase are separated, so that the micro LED emits light in different periods, and different effects are generated.
According to the technical scheme, the active panel, the driving circuit and the micro LED array are arranged in the probe head, so that the micro LEDs emit first visible light to stimulate fluorescent substances in brain nerve cells to emit second visible light in an excitation stage, the visible light emitted in a detection stage is matched with the second visible light emitted by the fluorescent substances, the detection subunit receives the second visible light emitted by the fluorescent substances and converts photoelectric signals, the second visible light emitted by the fluorescent substances is converted into electric signals, and the electric signals are transmitted to external equipment for image display, and therefore direct stimulation and monitoring of nerve cells are achieved, and the activity condition of the nerve cells can be imaged in real time under the condition that a human body is not dissected. In addition, each micro LED independently controls the luminous effect by the corresponding driving unit, so that the stimulation of single or multiple nerve cells can be realized, and the three-dimensional view effect of the nerve cells is further obtained.
On the basis of the above technical solution, fig. 3 is a schematic structural diagram of a driving unit according to an embodiment of the present invention. As shown in fig. 3, the excitation subcell includes a first transistor T1, a second transistor T2, a third transistor T3, and a first capacitor C1.
The grid electrode of the first transistor T1 is electrically connected with the first control end ctrl1 of the excitation subunit, the first pole of the first transistor T1 is electrically connected with the input end in of the excitation subunit, and the second pole of the first transistor T1 is electrically connected with the grid electrode of the second transistor T2 and the first pole of the first capacitor C1; a first pole of the second transistor T2 and a second pole of the first capacitor C1 are electrically connected with a first voltage line VDD1, and a second pole of the second transistor T2 is electrically connected with an anode of the micro LED; the cathode of the micro LED is electrically connected to the first pole of the third transistor T3, the gate of the third transistor T3 is electrically connected to the second control terminal ctrl2 of the exciton unit, and the second pole is grounded.
The detection subunit includes a fourth transistor T4, a fifth transistor T5, a first resistor R1, and a storage element C.
The gates of the fourth transistor T4 and the fifth transistor T5 are electrically connected to the third control terminal ctrl3 and the fourth control terminal ctrl4 of the detection subunit, respectively, the first pole of the fourth transistor T4 is electrically connected to the second voltage line VDD2, the second pole is electrically connected to the first terminal a of the first resistor R1, and the second terminal b of the first resistor R2 is electrically connected to the cathode of the micro LED; the first pole e and the second pole f of the storage element C are respectively electrically connected with the anode and the cathode of the micro LED; the anode of the micro LED is electrically connected to the first pole of the fifth transistor T5, and the second pole of the fifth transistor T5 is grounded.
In the excitation stage, the first control terminal ctrl1 and the second control terminal ctrl2 of the excitation subunit control the first transistor T1 and the third transistor T3 to be turned on, and the first pole of the first transistor T1 receives the signal input by the input terminal in of the excitation subunit and transmits the signal to the gate of the second transistor T2. When the signal input from the input terminal in of the excitation subunit can make the micro LED emit the first visible light signal, the second transistor T2 is controlled to be turned on, so that the voltage of the first voltage line VDD1 is applied to the anode of the micro LED, in general, the voltage of the first voltage line VDD1 is greater than zero, and the cathode of the micro LED is grounded through the third transistor T3, so that the micro LED emits the first visible light when the second transistor T2 is turned on. The first visible light emitted by the micro-LED stimulates fluorescent substances of cells in brain tissue to emit second visible light.
In the detection stage, the third control terminal ctrl3 and the fourth control terminal ctrl4 of the detection subunit control the fourth transistor T4 and the fifth transistor T5 to be turned on, the fourth transistor T4 inputs the voltage of the second voltage line VDD2, the voltage is loaded on the cathode of the micro LED through the first resistor R1, and the anode of the micro LED is grounded through the fifth transistor T5. The micro LED can be a single photon avalanche diode, free carrier electrons and holes in the micro LED drift under the action of an external electric field and move to two electrodes of the micro LED respectively, so that photocurrent is formed on an external loop, a certain voltage drop is generated, and a light signal is detected. In general, the voltage of the second voltage line VDD2 is greater than zero, and in the detection stage, the micro LED breaks down reversely, and the photocurrent generated by the light signal of the micro LED can be amplified by multiplication, so that the micro LED can be applied to the occasion of weak light power. When the detection subunit receives the second visible light emitted by the fluorescent substance, the micro LED absorbs the energy of the second visible light, converts the second visible light into photocurrent to form an electric signal, and stores the electric signal on the storage element C. Further, the electric signal stored in the memory element C can be transmitted to an external device through a correspondingly provided readout circuit formed at the connection portion.
Fig. 4 is a schematic structural diagram of a readout circuit according to an embodiment of the present invention, where the readout circuit is electrically connected to two ends of a storage element C in a detection subunit, and reads an electrical signal on the storage element C. The readout circuit adopts a column parallel reading mode so as to accelerate the speed of the readout circuit for reading the electric signals.
Illustratively, as shown in FIG. 3, the storage element C may be a second capacitance C2. The first resistor R1 is connected with the micro LED in series, when the micro LED breaks down reversely, the current suddenly increases, and at the moment, the first resistor R1 can play a role of current limiting, so that the circuit is prevented from being damaged.
The voltage values of the first voltage line VDD1 and the second voltage line VDD2 are related to the brightness of the micro LED light emission, and the wavelength of the micro LED light emission is related to the emission wavelength of the fluorescent material light emission, so that an appropriate voltage value is selected according to the emission wavelength of the fluorescent material and the micro LED parameters.
The micro LED probe may further include a first coating layer uniformly thick coating the area of the micro LED probe except the micro LED, on the basis of the above embodiments.
Specifically, the first coating layer may entirely cover the probe head and the connection portion. The first coating is a biocompatible material, so that the micro-LED probe has high biocompatibility and high affinity, and can keep free floating in brain tissue, thereby monitoring specific cells in a selected brain region without causing great damage. Illustratively, the material of the first cladding layer is Parylene C. In addition, in the working process of the micro LED probe, the micro LEDs in the micro LED array are required to emit light, so that the micro LEDs are required to be excluded when the first coating layer coats the micro LED probe, and the light emission of the micro LEDs is avoided.
In one embodiment, which is parallel to the above embodiment, the micro LED probe may include a second coating layer and a third coating layer, wherein the second coating layer uniformly coats the region of the probe head except the micro LED, and the third coating layer uniformly coats the connection portion.
Specifically, the materials of the second coating layer and the third coating layer are biocompatible materials, and may be the same or different. The process of coating the micro LED probe can be divided into two steps, the probe head is coated by adopting a second coating layer, the coating process is consistent with the process of coating the micro LED probe by adopting a first coating layer, and the micro LED is required to be exposed outside, so that the light emission of the micro LED is prevented from being blocked; and then the connecting part is coated by a third coating layer.
It should be noted that, the first coating layer is used to entirely coat the micro LED probe, or the second coating layer and the third coating layer are used to coat the probe head and the connecting portion respectively, so long as the materials of the coating layers are biocompatible materials, the micro LED probe has higher biocompatibility and stronger affinity, and the micro LED probe can keep free floating in brain tissue, so that specific cells in a selected brain region can be monitored, and no great damage is caused.
The micro LED may have a size of 5 μm based on the above embodiments. The thickness of the probe head may be 10 μm.
Specifically, the smaller the size of the micro LED, the higher the integration level. In this embodiment, the size of the micro LED is 5 μm, which is similar to the subcellular size, so that more micro LEDs can be integrated on the same size micro LED array, thereby realizing high resolution of the micro LED probe. Also, the thinner the probe head, the better the biocompatibility and affinity of the micro LED probe. After the size of the micro LED is selected, the thickness of the first coating layer or the second coating layer and the third coating layer is as thin as possible after meeting the biocompatibility and affinity of the micro LED probe, and the thickness of the probe head is 10 μm for example, so that the single-chip structure and the higher biocompatibility and affinity of the micro LED probe can be considered.
On the basis of the above embodiments, the micro LED probe includes a substrate, the substrate includes a first sub-portion and a second sub-portion, the first sub-portion is a substrate of the active panel, and the second sub-portion is a substrate of the connection portion; the material of the substrate may be selected to be a flexible material.
Specifically, the substrate includes a first sub-portion as a substrate of the active panel 110 and a second sub-portion as a substrate of the connection portion 200. As shown in fig. 2, the active panel 110 should include a first sub-portion of the substrate and traces (not shown) on the first sub-portion. The connection portion 200 includes a connection terminal 201, which is led out by a connection line of the probe head 100, and a second sub-portion of the substrate. Illustratively, the second sub-portion of the substrate may be an extension of the first sub-portion. The connection terminal 201 and the lead wire connected to the connection terminal 201 are printed on the second sub-portion of the substrate, the connection terminal 201 and the lead wire connected to the connection terminal 201 are fixed, and the probe head 100 is electrically connected to an external device through the connection terminal 201. The structure can be simplified by sharing one substrate for the probe head 100 and the connection part 200 of the micro LED probe.
In addition, the substrate material can be flexible, so that the traction force applied to brain tissues is reduced by the micro LED probe, the biocompatibility and affinity are increased, the rejection reaction of human bodies is reduced, and the application range of the micro LED probe is enlarged. Illustratively, the flexible material of the active panel 110 may be Parylene C.
Note that the above is only a preferred embodiment of the present invention and the technical principle applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.

Claims (9)

1. The miniature LED probe is characterized by comprising a probe head and a connecting part connected with the probe head;
the probe head comprises an active panel, a driving circuit and a micro LED array; the driving circuit is integrated on the active panel and comprises a plurality of driving units which are arranged in an array, and the micro LED array is positioned at one side of the driving circuit far away from the active panel and comprises a plurality of micro LEDs which are arranged in a matrix; the driving units are in one-to-one correspondence with the micro LEDs, and each driving unit is used for driving the corresponding micro LED;
the driving unit comprises an excitation subunit and a detection subunit, the excitation subunit is used for driving the corresponding micro LED to emit first visible light in an excitation stage, and the detection subunit is used for driving the micro LED to detect second visible light in a detection stage; the second visible light is visible light emitted by the object to be detected under the excitation of the first visible light;
the miniature LED array is electrically connected with the driving unit through a bonding pad;
the excitation subunit comprises a first transistor, a second transistor, a third transistor and a first capacitor;
the grid electrode of the first transistor is electrically connected with the first control end of the excitation subunit, the first pole of the first transistor is electrically connected with the input end of the excitation subunit, and the second pole of the first transistor is electrically connected with the grid electrode of the second transistor and the first pole of the first capacitor; a first pole of the second transistor and a second pole of the first capacitor are electrically connected with a first voltage line, and a second pole of the second transistor is electrically connected with an anode of the micro LED; the cathode of the micro LED is electrically connected with the first pole of the third transistor, the grid electrode of the third transistor is electrically connected with the second control end of the excitation subunit, and the second pole is grounded;
the detection subunit comprises a fourth transistor, a fifth transistor, a first resistor and a storage element;
the gates of the fourth transistor and the fifth transistor are respectively and electrically connected with the third control end and the fourth control end of the detection subunit, the first pole of the fourth transistor is electrically connected with a second voltage line, the second pole is electrically connected with the first end of the first resistor, and the second end of the first resistor is electrically connected with the cathode of the micro LED; the first pole and the second pole of the storage element are respectively and electrically connected with the anode and the cathode of the micro LED; the anode of the micro LED is electrically connected with the first pole of the fifth transistor, and the second pole of the fifth transistor is grounded.
2. The micro LED probe of claim 1, wherein the memory element is a second capacitor.
3. The micro LED probe of claim 1, further comprising a first cladding layer that uniformly coats the area of the micro LED probe except for the micro LED.
4. The micro LED probe of claim 3, wherein the material of the first coating layer is Parylene C.
5. The micro LED probe of claim 1, further comprising a second coating layer and a third coating layer, wherein the second coating layer uniformly coats the region of the probe head except the micro LED, and the third coating layer uniformly coats the connection portion.
6. The micro LED probe of claim 1, wherein the micro LED has a size of 5 μm.
7. The micro LED probe of claim 1, wherein the probe head has a thickness of 10 μm.
8. The micro LED probe of claim 1, further comprising a substrate comprising a first sub-portion and a second sub-portion, the first sub-portion being a substrate of the active panel and the second sub-portion being a substrate of the connection portion; the material of the substrate is flexible.
9. The micro LED probe of claim 8, wherein the flexible material is Parylene C.
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