CN108455875A - A kind of preparation method of low radiation coated glass - Google Patents
A kind of preparation method of low radiation coated glass Download PDFInfo
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- CN108455875A CN108455875A CN201810148789.3A CN201810148789A CN108455875A CN 108455875 A CN108455875 A CN 108455875A CN 201810148789 A CN201810148789 A CN 201810148789A CN 108455875 A CN108455875 A CN 108455875A
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- coated glass
- radiation coated
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3639—Multilayers containing at least two functional metal layers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3681—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
The invention discloses a kind of preparation methods of low radiation coated glass, including step：Glass restocking；Cleaning treatment；Observation ward is observed；Filming process includes：The first SiNx film layers, the first nickel chromium triangle film layer, Ag film layers, the second nickel chromium triangle film layer, the 2nd SiNx film layers are sequentially formed on the glass substrate.The preparation method of the low radiation coated glass of the present invention, has plated stratified film, coating is securely wear-resisting on the glass substrate using magnetron sputtering embrane method.The preparation method of the low radiation coated glass of the present invention, the coating glass of preparation have used SiNx film layers, can directly be plated on glass surface and make sodium ion barrier layer, acid-proof alkaline is good, and scratch resistance.
Description
Technical field
The present invention relates to glass art more particularly to a kind of preparation methods of low radiation coated glass.
Background technology
Low radiation coated glass is to use high-tech vacuum magnetic-control sputtering technology, nanometer is plated on large-size glass substrate
What the silverskin and multilevel oxide anti-reflection film of grade (1 nanometer=0.000001 millimeter) thickness manufactured.According under Different climate environment
Requirement can make a series of product of different models of the visible light transmittance between 40%~80%.With a piece of low
The hollow glass that radiation film coating glass and another 12 millimeters of gas blankets in sheet glass interval make has magical energy-saving effect, summer
It reflects and obstruct the far infrared radiation in the near-infrared radiation and outdoor environment in sunlight, and (far infrared radiation is also referred to as hot spoke
Penetrate), keep indoor refrigerant comfortable；It reflected and obstructed the far infrared radiation that room heater is sent out winter, maintained warm interior
Temperature.Everything is attributed to the fact that the perfect combination of the high infrared reflection performance of silverskin and the low convection current performance of hollow internal gas.It is low
The magical place of radiant glass is, not only keeps good daylighting function, but also effectively stop too as heat-reflecting glass
The direct heat radiation of sun, it more difficult to and though can be valuable be to play the effect for stopping heat radiation always at daytime or night.
Preparing low-emissivity coated hollow glass can be largely used to heavy construction glass curtain wall and the glass door and window of residential houses,
It can also be used in the public activities place such as perspectivity and the exigent exhibition center of thermal insulation, market, can be also used for keeping low
The windowpane of the refrigerator-freezer of temperature.
Low radiation coated glass can be made into laminated glass use, and this glass is in addition to certain blocking sun spoke
Outside the function of penetrating, also there is quite outstanding security personnel's performance and sound insulation value.When doubling glass is attacked by external force, toughness is very
Good PVB films can promptly absorb energy, and glass fragment is kept completely to stick together, thus it can resist bullet,
Earthquake, the injury of typhoon, hail prevent the criminal offence forced open the door, broken window is entered the room.PVB films also play in terms of obstructing sound wave
Important role makes doubling glass product reduce by 30 decibels of ambient noise or more.
Low emissivity (low-e) coated glass has the advantages that through visible light and reflects infrared ray, so as to significantly
It reduces the air conditioning energy consumption of automobile and improves the comfort level of driver and passenger, therefore built as a kind of green product
And have the huge market demand above the vehicles.The core material of Silver-based low emissivity coated glass is the silver of one layer or multilayer
(Ag) layer, since silver (Ag) layer is easy to be corroded and aoxidizes, so must all be deposited in the upper and lower of silver-colored (Ag) layer, have can be saturating
Cross the transparent dielectric layer of visible light；The necessary compactness of these dielectric layers is good, thermal stability is high, enough to be provided for silver layer
Heat, power and chemoproection.In the dielectric layer of Silver-based low emissivity coated glass, near glass substrate dielectric layer and farthest away from
Dielectric layer above the silver layer of glass substrate is especially important to the protection of silver layer, especially must near the dielectric layer of glass substrate
It can must at high temperature obstruct the osmosis of the alkali metal ion and oxygen atom in glass.On the other hand, these media
Layer can also play the role of the antireflective to visible light, be combined together with silver layer and realize that visible light preferably penetrates and reflection is special
Property.
It is offline at present it is low-emission coated can be divided into two kinds of single silver low radiation film, low-radiation film by film layer structure, before the latter's ratio
Person has lower radiance E and U values, and general single silver Low-E films are mainly by the silver layer (Ag) for being evenly distributed on middle layer
To play the role of reflecting far-infrared thermal radiation, entire thicknesses of layers about 45~75nm；And then completely different, its overall structure
It is relatively complicated, mainly there is two layers or more of silver layer to be evenly distributed between the metal oxide that other shield, film
Silver layer (Ag) in layer is to be separated by and overlap middle layer, the thickness of silver-based film layer about between 5~12nm, formed metal layer with absolutely
The cross one another Special Film structure of edge layer.
Invention content
The present invention provides a kind of preparation methods of low radiation coated glass.
The present invention is achieved by the following technical solutions：
A kind of preparation method of low radiation coated glass, includes the following steps：
Glass loading：Upper piece is carried out to glass using upper piece machine, the air surface side of glass is placed upward；
Cleaning treatment：Cleaning glass substrate is clean, then polishing powder and water are uniformly sprayed on clean glass substrate
Mixed solution, then wash with water glass substrate；
Observation ward is observed：Glass after cleaning is delivered to observation ward to observe, certified products are delivered to subsequent processing, it will
Defective work is back to cleaning treatment step；Observation glass surface has water stain-free, an oil stain, cleaning it is whether clean；
Filming process：The vacuum film coating chamber that glass substrate is put into vacuum magnetron sputtering film plating machine installs gold in coating chamber
Belong to target；It is passed through the mixed gas of argon, nitrogen and oxygen into coating chamber, and discharges excitation current simultaneously, what excitation current released
The lotuses energy particle bombardment target material surface such as argon ion makes target occur with the sputtering of atom or molecular forms, and in the mistake of sputtering
It is reacted with nitrogen and oxygen generation in journey, and is deposited to glass surface and forms film plating layer；
The filming process includes：The first SiNx film layers, the first nickel chromium triangle film layer, Ag films are sequentially formed on the glass substrate
Layer, the second nickel chromium triangle film layer, the 2nd SiNx film layers.
Preferably, further include after the filming process：
On-line checking：Whether qualified detect coated glass product；
It is online to dust or pad pasting：It is dusted on certified products or pad pasting operates, transport is stacked convenient for glass.
Preferably, it is 0.1Pa-0.3Pa that the vacuum degree after mixed gas is filled in the coating chamber.
Preferably, the thickness of the first SiNx film layers is 30-40nm.
Preferably, the thickness of the first nickel chromium triangle film layer is 15-30nm.
Preferably, the thickness of the Ag film layers is 1-8nm.
Preferably, the thickness of the second nickel chromium triangle film layer is 10-30nm.
Preferably, the thickness of the 2nd SiNx film layers is 20-40nm.
The beneficial effects of the invention are as follows：
(1) preparation method of low radiation coated glass of the invention, is plated on the glass substrate using magnetron sputtering embrane method
Stratified film, coating are securely wear-resisting.
(2) preparation method of low radiation coated glass of the invention, the coating glass of preparation have used SiNx film layers, can
Make sodium ion barrier layer to be directly plated on glass surface, acid-proof alkaline is good, and scratch resistance.
(3) preparation method of low radiation coated glass of the invention, after glass cleaning and after plated film to product into
Observation of having gone detects, and improves the qualification rate of finished product.
Specific implementation mode
The technical scheme in the embodiments of the invention will be clearly and completely described below, it is clear that described implementation
Example is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is general
The every other embodiment that logical technical staff is obtained under the premise of not making creative work, belongs to protection of the present invention
Range.
Embodiment 1
The invention discloses a kind of preparation methods of low radiation coated glass, include the following steps：
Glass restocking：Upper piece is carried out to glass using upper piece machine, the air surface side of glass is placed upward；
Cleaning treatment：Cleaning glass substrate is clean, then polishing powder and water are uniformly sprayed on clean glass substrate
Mixed solution, then wash with water glass substrate；
Observation ward is observed：Glass after cleaning is delivered to observation ward to observe, certified products are delivered to subsequent processing, it will
Defective work is back to cleaning treatment step；Observation glass surface has a water stain-free, cleaning it is whether clean；
Filming process：The vacuum film coating chamber that glass substrate is put into vacuum magnetron sputtering film plating machine installs gold in coating chamber
Belong to target；It is passed through the mixed gas of argon, nitrogen and oxygen into coating chamber, and discharges excitation current simultaneously, what excitation current released
The lotuses energy particle bombardment target material surface such as argon ion makes target occur with the sputtering of atom or molecular forms, and in the mistake of sputtering
It is reacted with nitrogen and oxygen generation in journey, and is deposited to glass surface and forms film plating layer；The filming process includes：In glass base
The first SiNx film layers, the first nickel chromium triangle film layer, Ag film layers, the second nickel chromium triangle film layer, the 2nd SiNx film layers are sequentially formed on plate.
On-line checking：Whether qualified detect coated glass product；
It is online to dust or pad pasting：It is dusted on certified products or pad pasting operates, transport is stacked convenient for glass.
It is 0.1Pa that the vacuum degree after mixed gas is filled in the coating chamber.
The thickness of the first SiNx film layers is 40nm.
The thickness of the first nickel chromium triangle film layer is 15nm.
The thickness of the Ag film layers is 6nm.
The thickness of the second nickel chromium triangle film layer is 10nm.
The thickness of the 2nd SiNx film layers is 20nm.
The preparation method of the low radiation coated glass of the present invention, the coating glass of preparation have used SiNx film layers, Ke Yizhi
It connects to be plated on glass surface and makees sodium ion barrier layer, acid-proof alkaline is good, and scratch resistance.
Glass transmitance manufactured in the present embodiment is 70%, and monolithic is naked to put 90h non-oxidations.
Embodiment 2
The invention discloses a kind of preparation methods of low radiation coated glass, include the following steps：
Glass restocking：Upper piece is carried out to glass using upper piece machine, the air surface side of glass is placed upward；
Cleaning treatment：Cleaning glass substrate is clean, then polishing powder and water are uniformly sprayed on clean glass substrate
Mixed solution, then wash with water glass substrate；
Observation ward is observed：Glass after cleaning is delivered to observation ward to observe, certified products are delivered to subsequent processing, it will
Defective work is back to cleaning treatment step；Observation glass surface has a water stain-free, cleaning it is whether clean；
Filming process：The vacuum film coating chamber that glass substrate is put into vacuum magnetron sputtering film plating machine installs gold in coating chamber
Belong to target；It is passed through the mixed gas of argon, nitrogen and oxygen into coating chamber, and discharges excitation current simultaneously, what excitation current released
The lotuses energy particle bombardment target material surface such as argon ion makes target occur with the sputtering of atom or molecular forms, and in the mistake of sputtering
It is reacted with nitrogen and oxygen generation in journey, and is deposited to glass surface and forms film plating layer；The filming process includes：In glass base
The first SiNx film layers, the first nickel chromium triangle film layer, Ag film layers, the second nickel chromium triangle film layer, the 2nd SiNx film layers are sequentially formed on plate.
On-line checking：Whether qualified detect coated glass product；
It is online to dust or pad pasting：It is dusted on certified products or pad pasting operates, transport is stacked convenient for glass.
It is 0.3Pa that the vacuum degree after mixed gas is filled in the coating chamber.
The thickness of the first SiNx film layers is 36nm.
The thickness of the first nickel chromium triangle film layer is 20nm.
The thickness of the Ag film layers is 8nm.
The thickness of the second nickel chromium triangle film layer is 20nm.
The thickness of the 2nd SiNx film layers is 30nm.
The preparation method of the low radiation coated glass of the present invention, the coating glass of preparation have used SiNx film layers, Ke Yizhi
It connects to be plated on glass surface and makees sodium ion barrier layer, acid-proof alkaline is good, and scratch resistance.
Glass transmitance manufactured in the present embodiment is 71%, and monolithic is naked to put 90h non-oxidations.
Embodiment 3
The invention discloses a kind of preparation methods of low radiation coated glass, include the following steps：
Glass restocking：Upper piece is carried out to glass using upper piece machine, the air surface side of glass is placed upward；
Cleaning treatment：Cleaning glass substrate is clean, then polishing powder and water are uniformly sprayed on clean glass substrate
Mixed solution, then wash with water glass substrate；
Observation ward is observed：Glass after cleaning is delivered to observation ward to observe, certified products are delivered to subsequent processing, it will
Defective work is back to cleaning treatment step；Observation glass surface has a water stain-free, cleaning it is whether clean；
Filming process：The vacuum film coating chamber that glass substrate is put into vacuum magnetron sputtering film plating machine installs gold in coating chamber
Belong to target；It is passed through the mixed gas of argon, nitrogen and oxygen into coating chamber, and discharges excitation current simultaneously, what excitation current released
The lotuses energy particle bombardment target material surface such as argon ion makes target occur with the sputtering of atom or molecular forms, and in the mistake of sputtering
It is reacted with nitrogen and oxygen generation in journey, and is deposited to glass surface and forms film plating layer；The filming process includes：In glass base
The first SiNx film layers, the first nickel chromium triangle film layer, Ag film layers, the second nickel chromium triangle film layer, the 2nd SiNx film layers are sequentially formed on plate.
On-line checking：Whether qualified detect coated glass product；
It is online to dust or pad pasting：It is dusted on certified products or pad pasting operates, transport is stacked convenient for glass.
It is 0.25Pa that the vacuum degree after mixed gas is filled in the coating chamber.
The thickness of the first SiNx film layers is 35nm.
The thickness of the first nickel chromium triangle film layer is 22nm.
The thickness of the Ag film layers is 7nm.
The thickness of the second nickel chromium triangle film layer is 12nm.
The thickness of the 2nd SiNx film layers is 28nm.
The preparation method of the low radiation coated glass of the present invention, the coating glass of preparation have used SiNx film layers, Ke Yizhi
It connects to be plated on glass surface and makees sodium ion barrier layer, acid-proof alkaline is good, and scratch resistance.
Glass transmitance manufactured in the present embodiment is 72%, and monolithic is naked to put 90h non-oxidations.
The beneficial effects of the invention are as follows：
(1) preparation method of low radiation coated glass of the invention, is plated on the glass substrate using magnetron sputtering embrane method
Stratified film, coating are securely wear-resisting.
(2) preparation method of low radiation coated glass of the invention, the coating glass of preparation have used SiNx film layers, can
Make sodium ion barrier layer to be directly plated on glass surface, acid-proof alkaline is good, and scratch resistance.
(3) preparation method of low radiation coated glass of the invention, after glass cleaning and after plated film to product into
Observation of having gone detects, and improves the qualification rate of finished product.
The above is the preferred embodiment of the present invention, it should be noted that for those skilled in the art
For, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also considered as
Protection scope of the present invention.
Claims (8)
1. a kind of preparation method of low radiation coated glass, includes the following steps：
Glass restocking：Upper piece is carried out to glass using upper piece machine, the air surface side of glass is placed upward；
Cleaning treatment：Cleaning glass substrate is clean, the mixed of polishing powder and water is then uniformly sprayed on clean glass substrate
Solution is closed, then washes with water glass substrate；
Observation ward is observed：Glass after cleaning is delivered to observation ward to observe, certified products are delivered to subsequent processing, will not conformed to
Lattice product are back to cleaning treatment step；Filming process：Glass substrate is put into the vacuum film coating chamber of vacuum magnetron sputtering film plating machine,
Metal targets are installed in coating chamber；It is passed through the mixed gas of argon, nitrogen and oxygen into coating chamber, and discharges excitation current simultaneously, swashs
The lotuses energy particle bombardment target material surfaces such as the argon ion that power generation stream releases make target occur with the sputtering of atom or molecular forms,
And it is reacted with nitrogen and oxygen generation during sputtering, and is deposited to glass surface and forms film plating layer；
The filming process includes：The first SiNx film layers, the first nickel chromium triangle film layer, Ag film layers, are sequentially formed on the glass substrate
Two nickel chromium triangle film layers, the 2nd SiNx film layers.
2. a kind of preparation method of low radiation coated glass according to claim 1, which is characterized in that the filming process
Further include later：
On-line checking：Whether qualified detect coated glass product；
It is online to dust or pad pasting：It is dusted on certified products or pad pasting operates.
3. a kind of preparation method of low radiation coated glass according to claim 2, which is characterized in that in the coating chamber
It is 0.1Pa-0.3Pa to be filled with the vacuum degree after mixed gas.
4. a kind of preparation method of low radiation coated glass according to claim 3, which is characterized in that the first SiNx
The thickness of film layer is 30-40nm.
5. a kind of preparation method of low radiation coated glass according to claim 4, which is characterized in that first nickel chromium triangle
The thickness of film layer is 15-30nm.
6. a kind of preparation method of low radiation coated glass according to claim 5, which is characterized in that the Ag film layers
Thickness is 1-8nm.
7. a kind of preparation method of low radiation coated glass according to claim 6, which is characterized in that second nickel chromium triangle
The thickness of film layer is 10-30nm.
8. a kind of preparation method of low radiation coated glass according to claim 1 or claim 7, which is characterized in that described second
The thickness of SiNx film layers is 20-40nm.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810148789.3A CN108455875A (en) | 2018-02-13 | 2018-02-13 | A kind of preparation method of low radiation coated glass |
| PCT/CN2018/100326 WO2019157799A1 (en) | 2018-02-13 | 2018-08-14 | Method for preparing low-radiation coated glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810148789.3A CN108455875A (en) | 2018-02-13 | 2018-02-13 | A kind of preparation method of low radiation coated glass |
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| CN108455875A true CN108455875A (en) | 2018-08-28 |
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Cited By (3)
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| CN112321171A (en) * | 2020-11-04 | 2021-02-05 | 威海中玻新材料技术研发有限公司 | Online low-emissivity coated glass and preparation method thereof |
| CN113045219A (en) * | 2021-04-24 | 2021-06-29 | 苏州晶博特镀膜玻璃有限公司 | Glass coating process and coated glass prepared by same |
| CN113185143A (en) * | 2021-04-24 | 2021-07-30 | 苏州晶博特镀膜玻璃有限公司 | Low-emissivity coated glass and preparation method thereof |
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| CN203472228U (en) * | 2013-09-05 | 2014-03-12 | 洛阳新晶润工程玻璃有限公司 | Low-radiance coated glass for improving high-temperature resistance |
| KR20170132563A (en) * | 2016-05-24 | 2017-12-04 | 전자부품연구원 | Low-e glass and forming method of Bus electrode of Low-e glass |
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| US7585396B2 (en) * | 2004-06-25 | 2009-09-08 | Guardian Industries Corp. | Coated article with ion treated overcoat layer and corresponding method |
| CN104891825A (en) * | 2015-05-12 | 2015-09-09 | 金堆城洛阳节能玻璃有限公司 | Scratch-resistant temperable single-silver low-radiation coated glass |
| CN106746726A (en) * | 2016-11-30 | 2017-05-31 | 江苏奥蓝工程玻璃有限公司 | It is a kind of offline can the transmitance low radiation coated glass of tempering 50 and preparation method thereof |
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- 2018-02-13 CN CN201810148789.3A patent/CN108455875A/en active Pending
- 2018-08-14 WO PCT/CN2018/100326 patent/WO2019157799A1/en active Application Filing
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| KR20170132563A (en) * | 2016-05-24 | 2017-12-04 | 전자부품연구원 | Low-e glass and forming method of Bus electrode of Low-e glass |
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| CN112321171A (en) * | 2020-11-04 | 2021-02-05 | 威海中玻新材料技术研发有限公司 | Online low-emissivity coated glass and preparation method thereof |
| CN113045219A (en) * | 2021-04-24 | 2021-06-29 | 苏州晶博特镀膜玻璃有限公司 | Glass coating process and coated glass prepared by same |
| CN113185143A (en) * | 2021-04-24 | 2021-07-30 | 苏州晶博特镀膜玻璃有限公司 | Low-emissivity coated glass and preparation method thereof |
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| WO2019157799A1 (en) | 2019-08-22 |
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