CN108453373B - Laser cutting follow-up control system - Google Patents

Laser cutting follow-up control system Download PDF

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Publication number
CN108453373B
CN108453373B CN201810086349.XA CN201810086349A CN108453373B CN 108453373 B CN108453373 B CN 108453373B CN 201810086349 A CN201810086349 A CN 201810086349A CN 108453373 B CN108453373 B CN 108453373B
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China
Prior art keywords
capacitance
laser cutting
cylindrical rod
section
metal
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Expired - Fee Related
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CN201810086349.XA
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Chinese (zh)
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CN108453373A (en
Inventor
涂明武
杜晓伟
王东锋
吕建民
牛得草
冯葆炜
董俊
张爽
陈名华
汪定江
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Air Force Engineering University of PLA Aircraft Maintenace Management Sergeant School
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Air Force Engineering University of PLA Aircraft Maintenace Management Sergeant School
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Priority to CN201810086349.XA priority Critical patent/CN108453373B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046Automatically focusing the laser beam
    • B23K26/048Automatically focusing the laser beam by controlling the distance between laser head and workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures

Abstract

The invention discloses a laser cutting follow-up control system, which comprises a controller, a capacitance detection chip, a capacitance sensor, a servo motor driving system and an objective lens driving mechanism, wherein the capacitance sensor is arranged on a nozzle of a laser cutting head and used for transmitting sensed capacitance to the capacitance detection chip; the capacitance detection chip is used for outputting a corresponding voltage signal according to the received induction capacitance; the controller is used for receiving the voltage signal and driving the servo motor driving system according to the voltage signal so as to drive the laser cutting head to move upwards or downwards; the objective lens driving mechanism is used for driving the objective lens of the laser head in the nozzle of the laser cutting head to move under the control of the controller. According to the invention, the height of the laser cutting head can be automatically adjusted according to the roughness of the surface of the workpiece to be machined, the preset laser focal length is kept, and the machining precision is high.

Description

Laser cutting follow-up control system
The application is a divisional application of an invention patent application with the application number of 201610979378.X, the application date of 2016, 11 and 8, and the name of the invention of a laser cutting follow-up control and objective lens automatic focusing system.
Technical Field
The invention relates to a control device of a laser cutting system. And more particularly to an autofocus control device for a laser cutting system. The follow-up control device can lead the laser cutting head (nozzle) to automatically change along with the height change of the surface of the cut plate when the laser cut plate meets the unevenness change.
Background
Laser cutting is widely applied in the industrial fields of domestic metal material cutting, automobile manufacturing and the like, however, the laser cutting follow-up controller as a key component of a laser cutting system is mainly imported technologies of Germany, America and the like, and has the problems of difficult calibration, complex interface and the like, and domestic similar technologies also have the problems of low precision, difficulty in adapting to high-speed cutting requirements and the like. The follow-up controller for laser cutting, which is suitable for the current operation situation of domestic technicians, has high speed and high precision and is simple and convenient to use, is urgently needed.
One of the important conditions of laser cutting is that good focusing must be ensured, and even if the focal length changes by plus or minus 0.1mm, the focal point temperature changes by hundreds of degrees centigrade and jagged cutting marks are generated in the cutting process, which seriously reduces the cutting quality. In the laser cutting process, the height change of the plate at different positions can reach several millimeters generally, and modern high-speed processing requires that the laser cutting speed reaches 60-120 meters per minute, and in the high-speed cutting process, the realization of high-speed dynamic automatic focusing of laser is undoubtedly one of the key technologies of laser cutting. The invention aims to design a laser cutting follow-up controller, which has the functions of acquiring a height signal of a laser nozzle output by a non-contact sensor at the lower end of a laser cutting head relative to a cut plate, converting the acquired height signal into an analog voltage signal for controlling a servo motor driving system, and enabling a servo motor of the servo motor driving system to rotate forwards or backwards in the vertical direction along with the change of the unevenness of the plane of the cut plate under the control of the analog voltage, so that the height of the laser nozzle relative to the cut plate is kept constant, namely the laser focal length is constant.
Disclosure of Invention
The conventional laser cutting head follow-up controller generally adopts a capacitance distance measurement method, and the measurement principle is that a capacitance is formed between the laser cutting head and a metal workpiece, the capacitance value is related to the distance between the laser cutting head and the metal workpiece, and the distance between the laser cutting head and the metal workpiece can be calculated by measuring the capacitance value between the laser cutting head and the metal workpiece. The existing measurement mode is analog measurement, and capacitance is measured based on the principle of an LC oscillation circuit. In addition, the conventional analog measurement speed is slow, and the main reason is that the sine wave of the LC high-frequency oscillation needs to be converted into square waves, the pulse number in unit time needs to be measured, the frequency is obtained and then converted into the frequency, and the error is large. The invention adopts a single-chip digital measurement mode, has no temperature drift and high speed (more than 1000 times can be measured in 1 second).
In order to realize the purpose of the invention, the following technical scheme is adopted for realizing the purpose:
the utility model provides a laser cutting follow-up control system, includes controller, electric capacity detection chip, capacitive sensor, servo motor actuating system, wherein:
the capacitance sensor is arranged on a nozzle of the laser cutting head and used for transmitting a detected capacitance signal to the capacitance detection chip;
the capacitance detection chip is used for outputting a corresponding voltage signal according to the received detection capacitance signal;
the controller is used for receiving the voltage signal and driving the servo motor driving system according to the voltage signal so as to drive the laser cutting head to move upwards or downwards.
The laser cutting follow-up control system is preferably:
the capacitance sensor comprises a metal induction pole plate, a nozzle of the laser cutting head is of a conical hollow structure, the outer layer of the nozzle is a nozzle metal shell and is grounded, the inner layer of the metal induction pole plate is the capacitance sensor, a ceramic insulation layer is arranged between the metal shell and the metal induction electrode, the metal induction pole plate horizontally extends towards the outside of the nozzle at the lower end of the nozzle, the extending part is approximately annular, and the lower surface of the ceramic insulation layer is partially or completely covered.
The laser cutting follow-up control system is preferably:
the upper part of the metal induction polar plate is provided with a circuit interface, and the circuit interface is connected with the capacitance detection chip through a lead and sends the detection capacitance to the capacitance detection chip.
The laser cutting follow-up control system is preferably:
the metal shell is provided with a through hole, a first counter bore concentric with the through hole is arranged on the ceramic insulating layer opposite to the through hole, the diameter of the first counter bore is the same as that of the through hole on the metal shell, a second counter bore is arranged at the bottom of the first counter bore and concentric with the first counter bore, and the second counter bore penetrates through the ceramic insulating layer; and a blind hole is concentrically arranged on the metal induction pole plate and the second counter bore, the diameter of the blind hole is the same as that of the second counter bore, and the blind hole is provided with internal threads.
The laser cutting follow-up control system is preferably:
the laser cutting follow-up control system further comprises a capacitance sensor connector, the capacitance sensor connector comprises three sections of metal cylindrical rods, the diameter of the first section of cylindrical rod is minimum, the capacitance sensor connector is of an external thread rod-shaped structure, two ends of the middle second section of cylindrical rod are respectively connected with the first section of cylindrical rod and the third section of cylindrical rod, the diameter of the second section of cylindrical rod is larger than that of the first section of cylindrical rod and slightly smaller than that of a through hole in the metal shell, the third section of cylindrical rod is connected with the second section of cylindrical rod, and the diameter of the third section of cylindrical rod is larger than that of the through hole in the metal.
The laser cutting follow-up control system is preferably:
the third section of cylindrical rod is provided with a first hollow hole, the diameter of the first hollow hole is larger than that of the through hole on the metal shell, and the depth of the first hollow hole is smaller than that of the third section of cylindrical rod; the bottom of the first hollow hole is provided with a second elongated hollow hole towards the second section, the diameter of the second hollow hole is smaller than that of the first hollow hole, and the depth of the second hollow hole extends to the second section of the cylindrical rod but does not reach the first section of the cylindrical rod.
The laser cutting follow-up control system is preferably: the second hollow bore is a threaded bore.
The laser cutting follow-up control system is preferably:
a first section of cylindrical rod of the capacitance sensor connector is screwed in a threaded blind hole of the metal induction pole plate, a second cylindrical rod penetrates through a through hole in the metal shell, an insulating pad is arranged between the through hole and the second cylindrical rod and is of a hollow sleeve-shaped structure with an outer flanging edge, a hollow sleeve-shaped main body of the insulating pad is sleeved on the second cylindrical rod, and the flanging edge of the main body of the insulating pad is arranged between a third section of cylindrical rod and the metal shell.
The laser cutting follow-up control system is preferably:
the insulating pad is made of elastic material.
The laser cutting follow-up control system is preferably:
one end of the wire is inserted into the second hollow hole of the connector and then fixed on the connector, and the other end of the wire is connected with the detection chip.
The laser cutting follow-up control system is preferably:
the capacitance detection chip is preset with a standard capacitance value, the standard capacitance value is a capacitance value measured when the nozzle of the laser cutting head is away from the surface of a machined workpiece by a preset distance, when a detection capacitance value sent by the capacitance sensor is received, the capacitance detection chip compares the detection capacitance value with the standard capacitance value, and a voltage signal is output according to a comparison result.
The laser cutting follow-up control system is preferably:
the capacitance detection chip outputs 0 voltage when the detection capacitance value is equal to the standard capacitance value, the former outputs positive voltage when the detection capacitance value is larger than the latter, the former outputs negative voltage when the detection capacitance value is smaller than the latter, and the absolute value of the output positive and negative voltage values is in direct proportion to the absolute value of the capacitance difference value between the detection capacitance value and the standard capacitance value.
The laser cutting follow-up control system is preferably:
after the controller receives the voltage signal sent by the capacitance detection chip, a forward or reverse pulse signal is sent to the servo motor driving system according to the positive or negative of the voltage signal, and a pulse signal with a corresponding pulse number is output according to the absolute value of the voltage signal.
The laser cutting follow-up control system is preferably:
the control system also comprises an objective lens driving mechanism, and the objective lens driving mechanism is used for driving an objective lens of a laser head in a nozzle of the laser cutting head to move under the control of the controller.
The laser cutting follow-up control system is preferably:
the objective lens driving mechanism comprises a stepping motor driving system and a ball screw pair, wherein the ball screw pair comprises a ball screw and a nut matched with the ball screw, and the objective lens of the laser head is installed on the nut.
The laser cutting follow-up control system is preferably:
the laser cutting follow-up control system further comprises an upper computer, an adjusting signal is input through the upper computer, the controller receives the adjusting signal, a forward rotation or reverse rotation driving signal is sent to the stepping motor driving system according to the adjusting signal, a driver of the stepping motor driving system drives the stepping motor to rotate forward or reverse according to the driving signal, the ball screw is driven to rotate, and therefore the nut is driven to move upwards or downwards, and the objective lens is driven to move upwards or downwards.
Drawings
FIG. 1 is a schematic diagram of a laser cutting follow-up control system according to the present invention;
FIG. 2a is a schematic diagram of a capacitive sensor;
FIG. 2b is a schematic bottom view of the capacitive sensor structure;
FIG. 3 is a schematic diagram of a capacitive sensor connector connection;
fig. 4 is a schematic view of an objective lens driving mechanism.
Detailed Description
As shown in fig. 1, the laser cutting follow-up control system includes a controller (for example, a high-speed single chip microcomputer can be selected), a capacitance detection chip, a capacitance sensor, a servo motor driving system, an objective lens driving mechanism, and an upper computer. The capacitance sensor transmits the detected capacitance signal to the capacitance detection chip; the capacitance detection chip outputs a corresponding voltage signal according to the received detection capacitance signal; the controller is used for receiving the voltage signal and driving the servo motor driving system according to the voltage signal so as to drive the laser cutting head to move upwards or downwards. The controller can also receive the instruction of the upper computer and control the stepping motor driving system to enable the focusing lens in the laser head to move up and down so as to control the laser focus to be at a preset distance below the nozzle. As shown in fig. 2a and 2b, the basic structure of a capacitance sensor is shown, the capacitance sensor is arranged on a nozzle of a laser cutting head, the capacitance sensor comprises a metal induction pole plate, the nozzle of the laser cutting head is in a conical hollow structure, the outer layer of the nozzle is a nozzle metal shell, the outer layer of the nozzle is grounded, the inner layer of the nozzle is the metal induction pole plate of the capacitance sensor, a ceramic insulation layer is arranged between the metal shell and the metal induction pole plate, the metal induction pole plate horizontally extends towards the outside of the nozzle at the lower end of the nozzle, the extending part is approximately annular, and covers part of the. A certain distance h is reserved between the laser cutting head and a workpiece (metal workpiece) to be processed, the workpiece is grounded, and a capacitor Cx is generated between the metal induction polar plate and the workpiece. The upper part of the metal induction polar plate is provided with a circuit interface which is connected with a lead, the lead penetrates through a through hole on the metal shell and then is connected with the detection chip, and the capacitance detection value is sent to the measurement chip. On the other hand, as can be seen from FIG. 2, the fixed capacitor is formed between the induction pole plate in the nozzle and the upper metal shell of the laser cutting headFixed capacitor C0In the measurement process, sometimes, for convenience, the total capacitance value after the fixed capacitor and the capacitor Cx are connected in series can be directly measured, and at the moment, the capacitor sensor comprises a metal induction pole plate, a nozzle metal shell and a ceramic insulating layer.
As shown in fig. 3, which is a schematic connection diagram of a capacitance sensor connector, a through hole is formed in a metal shell, a first counter bore concentric with the through hole is formed in a ceramic insulating layer opposite to the through hole, the diameter of the first counter bore is the same as that of the through hole in the metal shell, a second counter bore is formed in the bottom of the first counter bore concentric with the first counter bore, and the second counter bore penetrates through the ceramic insulating layer; and a blind hole (circuit interface) is concentrically arranged on the metal induction pole plate and the second counter bore, the diameter of the blind hole is the same as that of the second counter bore, and the blind hole is provided with internal threads. The whole ladder metal cylinder pole-shaped structure that connects that is of capacitance sensor connector, the diameter of first section cylinder pole is minimum, be external screw thread rod-shaped structure, with the screw thread blind hole cooperation on the metal induction polar plate, middle second section cylinder pole both ends respectively with first section cylinder pole, the third section cylinder pole links to each other, the diameter of second section cylinder pole is greater than the diameter of first section cylinder pole, slightly be less than the diameter of the through-hole on the metal casing, the third section cylinder pole links to each other with second section cylinder pole, the diameter of third section cylinder pole is greater than the diameter of the through-hole on the metal casing. The third section of cylindrical rod is provided with a first hollow hole, the diameter of the first hollow hole is larger than that of the through hole on the metal shell and smaller than that of the third section of cylindrical rod, and the depth of the first hollow hole is smaller than that of the third section of cylindrical rod. The bottom of the first hollow bore is open towards the second section with an elongated second hollow bore having a diameter smaller than the diameter of the first hollow bore, preferably smaller than the diameter of the blind bore, and a depth extending to the second section of the cylindrical shank without reaching the first section of the cylindrical shank, the second hollow bore being a threaded bore.
When the capacitor sensor connector is connected, a first section of cylindrical rod of the capacitor sensor connector sequentially penetrates through a through hole in a metal shell and a first counter bore in a ceramic insulating layer and is screwed in a threaded blind hole of a metal induction polar plate, a second cylindrical rod penetrates through the through hole in the metal shell, an insulating pad is arranged between the through hole and the second cylindrical rod, the insulating pad is of a hollow sleeve-shaped structure with an outward flanging edge and is sleeved on the second cylindrical rod, a hollow sleeve-shaped main body of the insulating pad is arranged between the through hole and the second cylindrical rod, and the outward flanging edge of the insulating pad main body is arranged between a third section of cylindrical rod and the metal shell. The insulating pad is preferably made of an elastic material such as rubber or resin. One end of the wire may be secured to the connector after insertion into the second hollow bore of the connector. The wire can be fixed in the mode that the screw is screwed in the second hollow hole, the wire can also be fixed in the welding mode, and the other end of the wire is connected with the capacitance detection chip.
The capacitance sensor transmits the sensed capacitance to the capacitance detection chip, the capacitance detection chip detects the capacitance at a high frequency (more than 1000 times can be measured in 1 second), and the detected capacitance is converted into a voltage signal to be transmitted to the controller. Specifically, the capacitance detection chip works as follows: the capacitance detection chip is preset with a standard capacitance value, which is the capacitance value measured by a sensor when the nozzle of the laser cutting head is away from the surface of the processed workpiece by a preset distance (such as 0.7 mm). When the capacitance value between the metal induction polar plate and the surface of the processed workpiece is received, the capacitance detection chip compares the detected capacitance value with the standard capacitance value, and outputs output voltage according to the comparison result, wherein, the two are the same and output 0 voltage, the former is larger than the latter and outputs positive voltage, the former is smaller than the latter and outputs negative voltage, and the absolute value of the output positive and negative voltage value is in direct proportion relation with the absolute value of the capacitance difference of the detected capacitance value compared with the standard capacitance value.
The servo motor driving system comprises a servo motor and a driver for driving the servo motor. After the controller receives the output voltage value sent by the capacitance detection chip, forward or reverse pulse signals are sent to a driver of the servo motor driving system according to the positive or negative of the output voltage value, and pulse signals with corresponding pulse quantity are output according to the absolute value of the output voltage value.
When a nozzle of the laser cutting head works, a laser head positioned in a nozzle cavity emits laser beams for cutting metal processing workpieces, the laser head is generally arranged at a fixed position when being arranged in the nozzle cavity, when the laser head is opened, the laser beam can be focused to emit the nozzle, however, in practical cases, the mounting position may deviate, and in operation, the laser head may be displaced due to vibration, etc., and in this case, there may occur a case where the laser beam is not well focused outside the nozzle, in this case, there is a possibility of damage to the nozzle, and for this reason, the present invention is provided with an objective lens driving mechanism in the nozzle, as shown in fig. 4, the objective lens driving mechanism comprises a stepping motor driving system and a ball screw pair, wherein the ball screw pair comprises a ball screw and a nut matched with the ball screw, an objective lens is installed on the nut, and a collimating lens is installed between a laser source and the objective lens. The collimating lens is used for converting laser emitted by the laser source into parallel beams to be incident on the objective lens, and the objective lens converges the parallel beams and then projects the parallel beams onto the working plane. By finely adjusting the moving distance of the objective lens on the optical path, the convergence point of the laser beam can be adjusted, so that the beam can be focused outside the nozzle. The stepping motor driving system comprises a stepping motor and a driver (not shown in the figure) for driving the stepping motor, and the stepping motor can be connected with the ball screw through a coupling, a belt transmission connection and the like.
Before the laser cutting head, when the laser beam is finely adjusted, an adjusting signal is input through an upper computer, the controller receives the adjusting signal, a forward rotation or reverse rotation driving signal is sent to a stepping motor driving system according to the adjusting signal, a driver drives the stepping motor to rotate forward or reverse under the driving of the driving signal, the ball screw is driven to rotate, the nut is driven to move upwards or downwards, the objective lens is driven to move upwards or downwards, the focusing light spot of the laser beam can move at the moment, when the preset distance is reached outside the nozzle, the adjustment signal is stopped being input, and the fine adjustment of the focal length of the laser beam is finished.
When the laser cutting head works, the focal length of a laser beam is finely adjusted through the upper computer, when the laser cutting head starts to perform cutting operation, the capacitance detection chip outputs a voltage signal according to a detection capacitance value transmitted by the capacitance sensor, the controller receives the voltage signal of the capacitance detection chip, and the servo motor driving system is controlled to adjust the nozzle to move up and down according to the voltage signal so as to keep a preset distance between the nozzle and a workpiece.
In the process of cutting the metal plate by the nozzle, the concave-convex change of the surface of the cut plate causes the change of the cutting gap between the nozzle of the laser head and the plate, after the change is detected by the capacitance sensor at the lower part of the laser cutting head, a capacitance signal is sent to the capacitance detection chip for detection, and the detection result is input into the high-speed single chip microcomputer (1000 times per second is detected to ensure the real-time property of the detection of the cutting gap). On one hand, the high-speed single chip microcomputer can control a servo motor driving system according to the change of the cutting gap, so that the laser head moves up and down to keep the laser focal length to be dynamically constant. On the other hand, the high-speed single chip microcomputer can also receive an instruction of an upper computer and control a stepping motor driving system to enable a focusing lens in the laser head to move up and down so as to control the laser focus to be about 0.7mm below the nozzle, and the invention well solves the problems that the nozzle is easily burnt out by the focus of the traditional laser head in the laser head or the protective gas sprayed out by the nozzle is easily dispersed and cannot be protected due to the focus at a far position of the lower part of the nozzle. Meanwhile, the high-speed single chip microcomputer sends the detection result to an upper computer for analysis.
The invention can conveniently adjust the convergence focus of the laser, and can automatically adjust the height of the nozzle at any time according to the concave-convex condition of the surface of the workpiece when the workpiece is cut, so as to keep the laser beam on the preset focal distance and realize high-precision cutting operation.

Claims (2)

1. The utility model provides a laser cutting follow-up control system, includes controller, electric capacity detection chip, capacitive sensor, servo motor actuating system, its characterized in that: the capacitance sensor is arranged on a nozzle of the laser cutting head and used for transmitting a detected capacitance signal to the capacitance detection chip; the capacitance detection chip is used for outputting a corresponding voltage signal according to the received detection capacitance signal; the controller is used for receiving the voltage signal and driving the servo motor driving system according to the voltage signal so as to drive the laser cutting head to move upwards or downwards;
the laser cutting follow-up control system also comprises a capacitance sensor connector, the capacitance sensor connector comprises three sections of metal cylindrical rods, the diameter of the first section of the metal cylindrical rod is the smallest and is in an external thread rod-shaped structure, two ends of the middle second section of the metal cylindrical rod are respectively connected with the first section of the metal cylindrical rod and the third section of the metal cylindrical rod, the diameter of the second section of the metal cylindrical rod is larger than that of the first section of the metal cylindrical rod and is slightly smaller than that of a through hole in the metal shell, the third section of the metal cylindrical rod is connected with the second section of the metal cylindrical rod, and the diameter of the third section;
the metal shell is provided with a through hole, a first counter bore concentric with the through hole is arranged on the ceramic insulating layer opposite to the through hole, the diameter of the first counter bore is the same as that of the through hole on the metal shell, a second counter bore is arranged at the bottom of the first counter bore and concentric with the first counter bore, and the second counter bore penetrates through the ceramic insulating layer; a blind hole is concentrically arranged on the metal induction pole plate and the second counter bore, the diameter of the blind hole is the same as that of the second counter bore, and the blind hole is provided with internal threads;
a first section of cylindrical rod of the capacitance sensor connector is screwed in a threaded blind hole of the metal induction pole plate, a second cylindrical rod penetrates through a through hole in the metal shell, an insulating pad is arranged between the through hole and the second cylindrical rod and is of a hollow sleeve-shaped structure with an outer flanging edge, a hollow sleeve-shaped main body of the insulating pad is sleeved on the second cylindrical rod, and the flanging edge of the main body of the insulating pad is arranged between a third section of cylindrical rod and the metal shell.
2. The laser cutting follow-up control system of claim 1, wherein:
the upper part of the metal induction polar plate is provided with a circuit interface, and the circuit interface is connected with the capacitance detection chip through a lead and sends the detection capacitance to the capacitance detection chip.
CN201810086349.XA 2016-11-08 2016-11-08 Laser cutting follow-up control system Expired - Fee Related CN108453373B (en)

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CN201610979378.XA CN106392307B (en) 2016-11-08 2016-11-08 It is cut by laser servo antrol and object lens automatic focusing system
CN201810086349.XA CN108453373B (en) 2016-11-08 2016-11-08 Laser cutting follow-up control system

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CN108453373B true CN108453373B (en) 2020-04-14

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CN201810086349.XA Expired - Fee Related CN108453373B (en) 2016-11-08 2016-11-08 Laser cutting follow-up control system
CN201610979378.XA Expired - Fee Related CN106392307B (en) 2016-11-08 2016-11-08 It is cut by laser servo antrol and object lens automatic focusing system

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