CN108436749B - Liquid metal polishing device and method with electrode moving up and down - Google Patents
Liquid metal polishing device and method with electrode moving up and down Download PDFInfo
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- CN108436749B CN108436749B CN201810491138.4A CN201810491138A CN108436749B CN 108436749 B CN108436749 B CN 108436749B CN 201810491138 A CN201810491138 A CN 201810491138A CN 108436749 B CN108436749 B CN 108436749B
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- positive electrode
- liquid metal
- permanent magnet
- electrode
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- 238000005498 polishing Methods 0.000 title claims abstract description 149
- 229910001338 liquidmetal Inorganic materials 0.000 title claims abstract description 85
- 238000000034 method Methods 0.000 title claims description 11
- 239000007788 liquid Substances 0.000 claims abstract description 33
- 239000002245 particle Substances 0.000 claims abstract description 24
- 230000005684 electric field Effects 0.000 claims abstract description 23
- -1 gallium ions Chemical class 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 4
- 229910052792 caesium Inorganic materials 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 3
- 229910052733 gallium Inorganic materials 0.000 claims description 3
- 229910001419 rubidium ion Inorganic materials 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 5
- 229910021645 metal ion Inorganic materials 0.000 abstract description 3
- 239000000956 alloy Substances 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 2
- 238000005111 flow chemistry technique Methods 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/003—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor whereby the workpieces are mounted on a holder and are immersed in the abrasive material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/12—Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/12—Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
- B24B31/14—Abrading-bodies specially designed for tumbling apparatus, e.g. abrading-balls
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
Abstract
The invention discloses a liquid metal polishing device with an electrode moving up and down, which comprises an operating platform, a first permanent magnet, a motor, a ball screw seat, a supporting plate, a screw nut, a blade, a connecting piece, a positive electrode, a second permanent magnet, a negative electrode, liquid metal polishing liquid, a polishing container, a working platform, a fixed shaft and a polishing cavity, wherein the polishing cavity for containing the liquid metal polishing liquid is arranged in the polishing container; according to the invention, the workpiece is polished by metal ions in the polishing metal liquid, so that the finer surface can be polished, and the obtained polishing precision is higher; the lead screw driving module is used for driving the positive electrode to move up and down, so that a sine wave electric field formed by the positive electrode and the negative electrode is stabilized in the area where the blade is located, and the edge of the blade is polished by using abrasive particles efficiently.
Description
Technical Field
The invention relates to the technical field of liquid metal polishing, in particular to a liquid metal polishing device and method with an electrode moving up and down.
Background
Liquid metal generally refers to alloy functional materials that are liquid at normal temperatures, such as metals and their alloys having melting points below 30 ℃, and also includes low melting point alloy materials that are liquid in the operating temperature range of 40 ℃ to 300 ℃. The liquid metal polishing solution polishing technology refers to that when the liquid metal polishing solution mixed with abrasive materials moves relative to the polishing surface of a workpiece under the action of a magnetic field, a flexible grinding head on a liquid metal polishing solution wire belt generates large cutting force on the polishing surface, so that the polishing surface of the workpiece is polished.
For complex curved surface processing, for example, processing a blade cannot be performed by using traditional polishing, so methods similar to abrasive particle flow processing and liquid metal processing are generated, however, simple liquid metal polishing or abrasive particle flow processing has lower efficiency, has certain limitation on processing quality, has strong dependence on the self skills of workers, has low production efficiency and long processing period, is easy to cause a damage layer and a deterioration layer on the surface, is difficult to ensure the processing quality, and has great influence on the processed surface.
Disclosure of Invention
The invention aims to solve the problems of low processing efficiency, strong technical dependence and long processing period caused by the prior art that abrasive particle flow is solely utilized for polishing or liquid metal is solely utilized for polishing, and provides a liquid metal polishing device and method for electrode up-and-down movement.
The invention realizes the above purpose through the following technical scheme: the liquid metal polishing device comprises an operating platform, a first permanent magnet, a motor, a ball screw seat, a supporting plate, a screw nut, a blade, a connecting piece, a positive electrode, a second permanent magnet, a negative electrode, liquid metal polishing liquid, a polishing container, a working platform, a fixed shaft and a polishing cavity, wherein the operating platform and the polishing container are both arranged on the working platform; the polishing container is internally provided with a polishing cavity for containing liquid metal polishing liquid, the two sides of the polishing cavity are respectively provided with a first permanent magnet and a second permanent magnet, the first permanent magnet and the second permanent magnet are vertically arranged in parallel, and the magnetic poles of the two surfaces of the first permanent magnet and the second permanent magnet, which are close to each other, are opposite; the blades are fixedly arranged in the polishing container through the fixed shaft and are all immersed in the liquid metal polishing liquid in the polishing cavity; the positive electrode is arranged on the fixed shaft of the blade, the positive electrode is in a stick shape, the positive electrode is vertically arranged right above the blade, a round hole is formed in the upper end of the polishing container, the positive electrode penetrates through the round hole above the polishing container, the lower end of the positive electrode is immersed into the liquid metal polishing solution, and the upper end of the positive electrode is fixedly connected with the connecting piece; the upper end of the polishing container is further provided with a supporting plate, the motor is vertically arranged on the supporting plate, the upper end of the ball screw is connected with the motor and driven by the motor, and the lower end of the ball screw is connected to the top of the polishing container through a ball screw seat; the connecting piece is further provided with a screw nut, the screw nut is sleeved on the ball screw, and the motor drives the ball screw to rotate during movement, so that the whole formed by the screw nut, the connecting piece and the positive electrode is driven to move up and down.
Further, the negative electrode is arc-shaped, and the negative electrode is attached to the lower end of the fixed shaft for fixing the blade.
Further, the motor is connected with the upper end of the ball screw through a coupler.
Further, the negative electrode and the positive electrode are connected with the operation console, and the electrifying condition of the negative electrode and the positive electrode is controlled by the operation console. Further, the operation panel changes the state in which an electric field is formed by the positive electrode and the negative electrode by changing the magnitude of the frequency of the current or the frequency of the voltage flowing through the positive electrode. The electric field in the liquid metal polishing solution is superposition of the electric fields of the positive electrode and the negative electrode, so that the liquid metal vibrates at high frequency at the edge position of the blade in the liquid metal polishing solution and at the bottom position of the liquid metal polishing solution. The high-frequency vibration of the liquid metal at the bottom can carry abrasive particles which rise and fall at the bottom of the liquid metal polishing liquid, and the high-frequency vibration of the edge of the blade can polish the polishing area with high efficiency.
Further, the sine wave electric field direction formed by the positive electrode and the negative electrode is perpendicular to the magnetic field direction formed by the first permanent magnet and the second permanent magnet.
Further, the liquid metal polishing liquid is a liquid metal polishing liquid containing abrasive particles.
Further, the liquid metal in the liquid metal polishing solution is one or more compounds selected from gallium ions, rubidium ions and cesium ions. The liquid metal is usually an alloy functional material which is liquid at normal temperature, such as metal with melting point below 30 ℃ and alloy material thereof, and also comprises a low-melting-point alloy material which is liquid in a working temperature range of 40-300 ℃ and is mixed with abrasive particles.
A liquid metal polishing method for electrode up-and-down movement comprises the following steps:
step one: the method comprises the steps that a blade is fixedly arranged in a polishing container through a fixed shaft, a first permanent magnet and a second permanent magnet are respectively arranged on two side surfaces of the polishing container in advance, the first permanent magnet and the second permanent magnet are vertically arranged and are parallel to each other, magnetic poles of two opposite surfaces of the first permanent magnet and the second permanent magnet are opposite, and the first permanent magnet and the second permanent magnet form a stable magnetic field in the polishing container;
step two: fixing a negative electrode on a fixed shaft of the blade, and pouring the liquid metal polishing solution mixed with abrasive particles into a polishing container until the part of the whole blade to be processed is immersed;
step three: covering a top cover of a polishing container, wherein a through hole is formed in the top cover of the polishing container, a rod-shaped positive electrode is inserted into the through hole formed in the top cover of the polishing container, the lower end of the positive electrode enters into liquid metal polishing liquid mixed with abrasive particles, the upper end of the positive electrode is connected with a screw driving module capable of driving the positive electrode to move up and down, and the screw driving module consists of a ball screw, a screw nut, a motor, a coupler, a connecting piece and a supporting plate;
step four: the positive electrode and the negative electrode are controlled to be electrified through an operation console, so that a stable sine wave electric field is formed between the negative electrode and the positive electrode in the polishing container;
step five: starting a motor, and driving the positive electrode to move up and down in the vertical direction by using a lead screw driving device of the positive electrode formed by the motor, the ball screw, a lead screw nut, a coupler, a connecting piece and a supporting plate until a sine wave electric field formed by the positive electrode and the negative electrode is stabilized in a region where the blade is positioned; the sine wave electric field formed by the positive electrode and the negative electrode is combined with the magnetic field formed by the first permanent magnet and the second permanent magnet, so that liquid metal ions vibrate at high frequency in the area where the blades in the liquid metal polishing solution are positioned; the liquid metal carries abrasive particles mixed in the liquid metal polishing liquid to move together when vibrating at high frequency, and the abrasive particles polish the area of the blade to be polished with high efficiency.
The invention has the beneficial effects that:
(1) According to the invention, the workpiece is polished by metal ions in the polishing metal liquid, the metal polishing liquid can polish finer surfaces, and the obtained polishing precision is higher.
(2) According to the invention, the blade is polished by the liquid metal polishing solution mixed with the abrasive particles, and the liquid metal ions move under the action of an electric field and a magnetic field, so that the abrasive particles in the liquid metal polishing solution are driven to move, and the surface of the blade is processed by the abrasive particles, so that the processing efficiency is improved.
(3) According to the invention, the lead screw driving module is adopted to drive the positive electrode to move up and down, so that a sine wave electric field formed by the positive electrode and the negative electrode is stabilized in the area where the blade is positioned, and metal ions of the liquid metal in the polishing area where the blade is positioned vibrate at high frequency, so that abrasive particles in the polishing area where the blade is positioned are driven to vibrate at high frequency, and the edge of the blade is polished by the abrasive particles efficiently.
(4) The invention does not need specific machinery to polish the workpiece, but adopts the electric field and the magnetic field to directly control the liquid metal polishing liquid, and has simple control mode, simple integral structure and easy maintenance.
(5) The positive electrode and the negative electrode form an electric field, the two electromagnets form a magnetic field, and the electric field and the magnetic field control are combined, so that the dead angle-free polishing of any angle of the curved surface can be realized.
Drawings
Fig. 1 is an isometric view of a liquid metal polishing apparatus with an electrode moving up and down in accordance with the present invention.
Fig. 2 is a left side view of a liquid metal polishing apparatus with an electrode moving up and down according to the present invention.
Fig. 3 is a schematic view showing a partially sectional structure of a liquid metal polishing apparatus in which an electrode moves up and down according to the present invention.
In the figure, a 1-operation table, a 2-positive electrode, a 3-connecting piece, a 4-ball screw, a 5-ball screw seat, a 6-motor, a 7-supporting plate, an 8-first permanent magnet, a 9-liquid metal polishing liquid, a 10-polishing cavity, 11-blades, a 12-second permanent magnet, a 13-polishing container, a 14-negative electrode, a 15-working platform and a 16-fixed shaft.
Detailed Description
The invention is further described below with reference to the accompanying drawings:
as shown in fig. 1, 2 and 3, the liquid metal polishing device with the electrode moving up and down comprises an operation table 1, a first permanent magnet 8, a motor 6, a ball screw 4, a ball screw seat 5, a supporting plate 7, a screw nut, a blade 11, a connecting piece 3, a positive electrode 2, a second permanent magnet 12, a negative electrode 14, liquid metal polishing liquid 9, a polishing container 13, a working platform 15, a fixed shaft 16 and a polishing cavity 10, wherein the operation table 1 and the polishing container 13 are both arranged on the working platform 15; the polishing container 13 is internally provided with a polishing cavity 10 for containing liquid metal polishing liquid 9, the two sides of the polishing cavity 10 are respectively provided with a first permanent magnet 8 and a second permanent magnet 12, the first permanent magnet 8 and the second permanent magnet 12 are vertically and parallelly arranged, and the magnetic poles of the two surfaces, close to each other, of the first permanent magnet 8 and the second permanent magnet 12 are opposite; the blade 11 is fixedly arranged inside the polishing container 13 through a fixed shaft 16 and is fully immersed in the liquid metal polishing liquid 9 in the polishing cavity 10; the negative electrode 14 is arranged on a fixed shaft 16 of the blade 11, the positive electrode 2 is in a stick shape, the positive electrode 2 is vertically arranged right above the blade 11, a round hole is formed in the upper end of the polishing container 13, the positive electrode 2 penetrates through the round hole above the polishing container 13, the lower end of the positive electrode 2 is immersed into the liquid metal polishing solution 9, and the upper part of the positive electrode 2 is fixedly connected with the connecting piece 3; the upper end of the polishing container 13 is further provided with a supporting plate 7, the motor 6 is vertically arranged on the supporting plate 7, the upper end of the ball screw 4 is connected with the motor 6 and driven by the motor 6, and the lower end of the ball screw 4 is connected to the top of the polishing container 13 through the ball screw seat 5; the connecting piece 3 is also provided with a screw nut, the screw nut is sleeved on the ball screw 4, and the motor 6 drives the ball screw 4 to rotate during movement so as to drive the whole consisting of the screw nut, the connecting piece 3 and the positive electrode 2 to move up and down.
The negative electrode 14 is arc-shaped, and the negative electrode 14 is attached to the lower end of a fixed shaft 16 for fixing the vane 11.
The motor 6 is connected with the upper end of the ball screw 4 through a coupler.
The negative electrode 14 and the positive electrode 2 are connected with an operation console, and the energizing condition of the negative electrode 14 and the positive electrode 2 is controlled by the operation console 1.
The operation panel 1 changes the state in which an electric field is formed by the positive electrode 2 and the negative electrode 14 by changing the magnitude of the frequency of the current or the frequency of the voltage flowing through the positive electrode 2.
The sine wave electric field direction formed by the positive electrode 2 and the negative electrode 14 is perpendicular to the magnetic field direction formed by the first permanent magnet 8 and the second permanent magnet 12.
The liquid metal polishing liquid 9 in the liquid metal liquid storage tank is the liquid metal polishing liquid 9 containing abrasive particles. The liquid metal in the liquid metal polishing solution 9 is one or more compounds selected from gallium ions, rubidium ions and cesium ions.
The liquid metal polishing method for up-and-down movement of the electrode by using the device comprises the following steps:
step one: the blade 11 is fixedly arranged in a polishing container 13 through a fixed shaft 16, a first permanent magnet 8 and a second permanent magnet 12 are respectively arranged on two side surfaces of the polishing container 13 in advance, the first permanent magnet 8 and the second permanent magnet 12 are vertically arranged and are parallel to each other, magnetic poles of two opposite surfaces of the first permanent magnet 8 and the second permanent magnet 12 are opposite, and the first permanent magnet 8 and the second permanent magnet 12 form a stable magnetic field in the polishing container 13;
step two: fixing the negative electrode 14 on the fixed shaft 16 of the blade 11, and pouring the liquid metal polishing liquid 9 mixed with abrasive particles into the polishing container 13 until the whole part of the blade 11 to be processed is immersed;
step three: covering a top cover of a polishing container 13, wherein a through hole is formed in the top cover of the polishing container 13, a rod-shaped positive electrode 2 is inserted into the through hole formed in the top cover of the polishing container 13, the lower end of the positive electrode 2 enters into a liquid metal polishing solution 9 mixed with abrasive particles, the upper end of the positive electrode 2 is connected with a screw driving module capable of driving the positive electrode 2 to move up and down, and the screw driving module consists of a ball screw 4, a screw nut, a motor 6, a coupling, a connecting piece 3 and a supporting plate 7;
step four: controlling the positive electrode 2 and the negative electrode 14 to be electrified through an operation console, so that the negative electrode 14 and the positive electrode 2 form a stable sine wave electric field in the polishing container 13;
step five: a motor 6 is started, and a screw driving device of the positive electrode 2 formed by the motor 6, the ball screw 4, a screw nut, a coupler, a connecting piece 3 and a supporting plate 7 is used for driving the positive electrode 2 to move up and down in the vertical direction until a sine wave electric field formed by the positive electrode 2 and the negative electrode 14 is stabilized in the area where the blade 11 is positioned; the sine wave electric field formed by the positive electrode 2 and the negative electrode 14 is combined with the magnetic field formed by the first permanent magnet 8 and the second permanent magnet 12, so that liquid metal ions vibrate at high frequency in the area where the blades 11 in the liquid metal polishing solution 9 are positioned; the liquid metal moves together with the abrasive grains mixed in the liquid metal polishing liquid 9 when vibrating at high frequency, and the abrasive grains polish the area of the blade 11 to be polished with high efficiency.
The above embodiments are only preferred embodiments of the present invention, and are not limiting to the technical solutions of the present invention, and any technical solution that can be implemented on the basis of the above embodiments without inventive effort should be considered as falling within the scope of protection of the patent claims of the present invention.
Claims (7)
1. The utility model provides a liquid metal burnishing device of electrode up-and-down motion which characterized in that: the polishing device comprises an operation table (1), a first permanent magnet (8), a motor (6), a ball screw (4), a ball screw seat (5), a supporting plate (7), a screw nut, a blade (11), a connecting piece (3), a positive electrode (2), a second permanent magnet (12), a negative electrode (14), liquid metal polishing liquid (9), a polishing container (13), a working platform (15), a fixed shaft (16) and a polishing cavity (10), wherein the operation table (1) and the polishing container (13) are both arranged on the working platform (15); a polishing cavity (10) for containing liquid metal polishing liquid (9) is arranged in the polishing container (13), a first permanent magnet (8) and a second permanent magnet (12) are respectively arranged on two sides of the polishing cavity (10), the first permanent magnet (8) and the second permanent magnet (12) are vertically and parallelly arranged, and magnetic poles of two surfaces, close to each other, of the first permanent magnet (8) and the second permanent magnet (12) are opposite; the blades (11) are fixedly arranged inside the polishing container (13) through the fixed shafts (16) and are all immersed in the liquid metal polishing liquid (9) of the polishing cavity (10); the positive electrode (14) is arranged on a fixed shaft (16) of the blade (11), the positive electrode (2) is in a stick shape, the positive electrode (2) is vertically arranged right above the blade (11), a round hole is formed in the upper end of the polishing container (13), the positive electrode (2) penetrates through the round hole above the polishing container (13), the lower end of the positive electrode (2) is immersed into the liquid metal polishing solution (9), and the upper part of the positive electrode (2) is fixedly connected with the connecting piece (3); the upper end of the polishing container (13) is further provided with a supporting plate (7), the motor (6) is vertically arranged on the supporting plate (7), the upper end of the ball screw (4) is connected with the motor (6) and driven by the motor (6), and the lower end of the ball screw (4) is connected to the top of the polishing container (13) through a ball screw seat (5); the connecting piece (3) is also provided with a screw nut, the screw nut is sleeved on the ball screw (4), and the motor (6) drives the ball screw (4) to rotate during movement so as to drive the whole formed by the screw nut, the connecting piece (3) and the positive electrode (2) to move up and down;
the operation panel (1) changes the state of an electric field formed by the positive electrode (2) and the negative electrode (14) by changing the magnitude of the frequency of the current or the frequency of the voltage flowing through the positive electrode (2);
the sine wave electric field direction formed by the positive electrode (2) and the negative electrode (14) is perpendicular to the magnetic field direction formed by the first permanent magnet (8) and the second permanent magnet (12).
2. A liquid metal polishing apparatus with an electrode moving up and down as set forth in claim 1, wherein: the negative electrode (14) is arc-shaped, and the negative electrode (14) is attached to the lower end of a fixed shaft (16) for fixing the blade (11).
3. A liquid metal polishing apparatus with an electrode moving up and down as set forth in claim 1, wherein: the motor (6) is connected with the upper end of the ball screw (4) through a coupler.
4. A liquid metal polishing apparatus with an electrode moving up and down as set forth in claim 1, wherein: the negative electrode (14) and the positive electrode (2) are connected with the operation table, and the energizing condition of the negative electrode (14) and the positive electrode (2) is controlled by the operation table (1).
5. A liquid metal polishing apparatus with an electrode moving up and down as set forth in claim 1, wherein: the liquid metal polishing liquid (9) is a liquid metal polishing liquid (9) containing abrasive particles.
6. A liquid metal polishing apparatus with an electrode moving up and down as set forth in claim 1, wherein: the liquid metal in the liquid metal polishing solution (9) is one or more compounds of gallium ions, rubidium ions and cesium ions.
7. A liquid metal polishing method for electrode up-and-down movement is characterized in that: the method comprises the following steps:
step one: the method comprises the steps that a blade (11) is fixedly arranged in a polishing container (13) through a fixed shaft (16), a first permanent magnet (8) and a second permanent magnet (12) are respectively arranged on two side surfaces of the polishing container (13) in advance, the first permanent magnet (8) and the second permanent magnet (12) are vertically arranged and are parallel to each other, magnetic poles of two opposite surfaces of the first permanent magnet (8) and the second permanent magnet (12) are opposite, and the first permanent magnet (8) and the second permanent magnet (12) form a stable magnetic field in the polishing container (13);
step two: fixing a negative electrode (14) on a fixed shaft (16) of the blade (11), and pouring the liquid metal polishing solution (9) mixed with abrasive particles into a polishing container (13) until the whole part of the blade (11) to be processed is immersed;
step three: covering a top cover of a polishing container (13), wherein a through hole is formed in the top cover of the polishing container (13), a rod-shaped positive electrode (2) is inserted into the through hole formed in the top cover of the polishing container (13), the lower end of the positive electrode (2) enters into a liquid metal polishing solution (9) mixed with abrasive particles, the upper end of the positive electrode (2) is connected with a screw driving module capable of driving the positive electrode (2) to move up and down, and the screw driving module consists of a ball screw (4), a screw nut, a motor (6), a coupler, a connecting piece (3) and a supporting plate (7);
step four: controlling the electrifying of the positive electrode (2) and the negative electrode (14) through an operation table, so that the negative electrode (14) and the positive electrode (2) form a stable sine wave electric field in the polishing container (13);
step five: starting a motor (6), and driving the positive electrode (2) to move up and down in the vertical direction by using a screw driving device of the positive electrode (2) formed by the motor (6), the ball screw (4), a screw nut, a coupler, a connecting piece (3) and a supporting plate (7) until a sine wave electric field formed by the positive electrode (2) and a negative electrode (14) is stabilized in a region where the blade (11) is positioned; the sine wave electric field formed by the positive electrode (2) and the negative electrode (14) is combined with the magnetic field formed by the first permanent magnet (8) and the second permanent magnet (12), so that liquid metal ions vibrate at high frequency in the area where the blades (11) in the liquid metal polishing solution (9) are positioned; the liquid metal moves together with the abrasive particles mixed in the liquid metal polishing liquid (9) when vibrating at high frequency, and the abrasive particles polish the area of the blade (11) to be polished with high efficiency.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810491138.4A CN108436749B (en) | 2018-05-21 | 2018-05-21 | Liquid metal polishing device and method with electrode moving up and down |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810491138.4A CN108436749B (en) | 2018-05-21 | 2018-05-21 | Liquid metal polishing device and method with electrode moving up and down |
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| CN108436749A CN108436749A (en) | 2018-08-24 |
| CN108436749B true CN108436749B (en) | 2024-03-12 |
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| CN108637883A (en) * | 2018-05-21 | 2018-10-12 | 浙江工业大学 | A kind of continually changing liquid metal burnishing device of electric field and method |
| TWI797922B (en) | 2021-12-28 | 2023-04-01 | 國家中山科學研究院 | Adjustable Fluid Grinding Fixture |
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| JPH1015789A (en) * | 1996-06-28 | 1998-01-20 | Tokyo Seimitsu Co Ltd | Method and apparatus for polishing semiconductor wafer |
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