CN108436683B - Carrier for processing sheet wafer - Google Patents
Carrier for processing sheet wafer Download PDFInfo
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- CN108436683B CN108436683B CN201810298297.2A CN201810298297A CN108436683B CN 108436683 B CN108436683 B CN 108436683B CN 201810298297 A CN201810298297 A CN 201810298297A CN 108436683 B CN108436683 B CN 108436683B
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- shell
- product
- magnetorheological fluid
- cavity
- piston rod
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- 238000012545 processing Methods 0.000 title claims abstract description 26
- 239000012530 fluid Substances 0.000 claims abstract description 52
- 239000007788 liquid Substances 0.000 claims abstract description 29
- 230000007246 mechanism Effects 0.000 claims abstract description 26
- 238000003860 storage Methods 0.000 claims description 24
- 230000005284 excitation Effects 0.000 claims description 14
- 238000005192 partition Methods 0.000 claims description 7
- 238000004804 winding Methods 0.000 claims description 7
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 6
- 239000012634 fragment Substances 0.000 abstract description 2
- 238000012797 qualification Methods 0.000 abstract description 2
- 239000000047 product Substances 0.000 description 49
- 235000012431 wafers Nutrition 0.000 description 47
- 229920006351 engineering plastic Polymers 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000001802 infusion Methods 0.000 description 4
- 238000000227 grinding Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000000565 sealant Substances 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
- B24B19/22—Single-purpose machines or devices for particular grinding operations not covered by any other main group characterised by a special design with respect to properties of the material of non-metallic articles to be ground
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0088—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being angularly adjustable
Abstract
The invention discloses a carrier for processing a flaky wafer, which comprises a shell with an upward opening, wherein an adjusting mechanism for adjusting the horizontal inclination angle of a product is arranged in the shell, magnetorheological fluid is filled in the shell to ensure that the adjusting mechanism is immersed in the magnetorheological fluid, when the lower part of the product is connected to the adjusting mechanism, the adjusting mechanism drives the product to swing to a set position and then to stand, the part to be processed of the product is positioned above the liquid level of the magnetorheological fluid, and a magnetic field generator is arranged on the shell and used for driving the magnetorheological fluid in the shell to be solidified or reset to be in a fluid state. The invention provides a carrier for processing a sheet wafer, which has low performance requirement on a slide wafer, so that the material consumption cost is low, and meanwhile, the fragment rate of a functional wafer is low on the basis of firm clamping, so that the qualification rate of the whole product is high.
Description
Technical Field
the invention relates to the technical field of wafer processing, in particular to a carrier for processing a sheet-shaped wafer.
Background
the sheet wafer, especially the sheet wafer with a thickness less than 1mm, often needs to be temporarily bonded on a wafer carrier during the processing process, so as to improve the strength of the functional wafer, so as to facilitate the processing treatment, such as thinning, polishing, etching, cutting, etc., and finally, the functional wafer is separated from the wafer carrier to complete the processing of the functional wafer.
In addition, in order to facilitate separation of the functional wafer and the carrier wafer in the prior art and reduce processing cost, the carrier wafer is mostly made of engineering plastics, and the carrier wafer made of the engineering plastics is cut synchronously along with the cutting process of the functional wafer, so that the carrier wafer made of the engineering plastics in the prior art is mostly disposable consumables.
However, in the prior art, the product obtained by temporarily bonding the functional wafer and the slide glass wafer is easily cracked in the process of clamping through a conventional mechanical included angle on a processing machine tool, so that the processing difficulty is high. And the engineering plastics with better strength and hardness performance are selected, so that the processing cost is increased, and the enterprise production and operation are not facilitated.
Disclosure of Invention
the present invention is directed to solving, at least to some extent, one of the technical problems in the related art: the carrier for processing the flaky wafer has low requirement on the performance of a slide wafer, so that the material consumption cost is low, and meanwhile, the fragment rate of a functional wafer is low on the basis of firm clamping, so that the qualification rate of the whole product is high.
Therefore, an object of the present invention is to provide a carrier for processing a sheet wafer, including a housing with an upward opening, wherein an adjusting mechanism for adjusting a horizontal tilt angle of a product is disposed in the housing, a magnetorheological fluid is filled into the housing, so that the adjusting mechanism is immersed in the magnetorheological fluid, when a lower portion of the product is connected to the adjusting mechanism, the adjusting mechanism drives the product to swing to a set position and then to stand, and a portion of the product to be processed is located above a liquid level of the magnetorheological fluid, and a magnetic field generator is disposed on the housing for driving the magnetorheological fluid in the housing to solidify or to reset to a fluid state. The adjusting mechanism adjusts the product to enable the product to swing to a position to be processed and to be static, then the magnetorheological fluid is solidified through the magnetic field generator, and the solidified magnetorheological fluid fixes and limits the product which is partially immersed in the magnetorheological fluid originally, so that the product is clamped. In the process, the functional wafer of the product is exposed above the liquid level of the magnetorheological fluid, so that the processing of the functional wafer is not influenced.
According to an example of the invention, the adjusting mechanism comprises at least three cylinders, all the cylinders are arranged at intervals along the horizontal direction, the lower end of each cylinder is connected with the shell, a central channel is arranged in each cylinder, a piston rod is matched in the central channel in a sliding manner, the lower end surface of each piston rod and the inner surface of the corresponding central channel surround to form a control cavity, the upper end of each piston rod is exposed above the corresponding cylinder along the vertical direction, and a connecting piece used for being connected with or disconnected from a product is arranged at the end, exposed above the corresponding cylinder, of each piston rod. The product is adjusted and positioned by using the three connecting pieces as three fulcrums.
According to an example of the present invention, the connecting member is a suction cup having an opening directed upward. The product can be fixed temporarily through the sucking disc, and the product can be separated only by overcoming the suction force of the sucking disc when the product is pulled axially, so that the structure is simple and reliable.
According to an example of the invention, a connecting pipe is arranged in the piston rod, the upper end of the connecting pipe is communicated with the inner cavity of the sucker, the lower end of the connecting pipe is communicated with a control cavity, and the control cavity is connected with a pressure regulating system outside the shell through a control pipe. The automatic control of the suction and the release actions of the sucking disc can be realized through the connecting pipe, and the product damage caused by pulling due to overcoming the suction force of the sucking disc is reduced.
according to one example of the invention, the suction cup and the piston rod are of an integral structure, and the lower end of the cylinder body is in rotating fit with the shell through a universal joint.
according to an example of the invention, the top surface of the control cavity is upwards and inwards concave along the vertical direction to form a groove with an opening direction downwards, magnetorheological fluid in the shell is sequentially poured into the control cavity through the suction disc and the connecting pipe in the piston rod, and the magnetorheological fluid in the control cavity forms a liquid seal in the notch position or the groove of the groove, so that an air cavity for temporarily storing air is formed in the groove. The pressure value in the control cavity is controlled by the compressibility of the air reserved in the groove and by pumping away and inputting the magnetorheological fluid into the control cavity, and the control precision is higher than that of the conventional mode of filling the magnetorheological fluid.
According to an example of the invention, a partition board is arranged in the shell, the partition board and the inner side wall of the shell surround to form a closed storage cavity, a transfusion channel communicated with the inner cavity of the shell is arranged at the bottom of the storage cavity, the transfusion channel is positioned below the liquid level of the magnetorheological fluid in the shell, and an air nozzle used for discharging air in the storage cavity or filling air into the storage cavity is arranged on the side wall of the storage cavity. The air is flushed through the air nozzle, so that the magnetorheological fluid in the storage cavity is supplied to the inner cavity of the shell through the infusion channel, the liquid level of the magnetorheological fluid in the shell overflows, and the surface impurities of the magnetorheological fluid in the shell are removed by the overflow to drive the surface liquid level to flow.
According to an example of the present invention, a liquid inlet pipe is disposed on a side wall of the storage cavity, and the liquid inlet pipe is communicated with the storage cavity for injecting the magnetorheological fluid into the storage cavity. And a new magnetorheological fluid is periodically supplemented into the storage cavity through the liquid inlet pipe.
According to one example of the invention, the magnetic field generator comprises a primary excitation device disposed within the housing and an auxiliary excitation winding integrated within the diaphragm. The magnetic fields generated by the main excitation device and the auxiliary excitation winding are overlapped, so that the inner cavity of the whole shell is favorably covered.
According to an example of the invention, the outer side wall of the shell is provided with an overflow groove, and the overflow groove extends along the circumferential direction of the shell to form an annular structure. Impurity particles generated by wafer processing and overflowing magnetorheological fluid can be converged and discharged through the overflow groove.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
the technical scheme has the following advantages or beneficial effects: firstly, the mold cavity is formed by the solidification of the magnetorheological fluid, so that the product is partially embedded, the positioning is firm, the deformation and the fragmentation of the product caused by the overlarge local clamping force are avoided, secondly, the requirement on the strength and rigidity of the wafer carrying the wafer on the product is low, so that the material cost of the wafer carrying the wafer is low, the processing cost of the whole product is reduced, and secondly, the horizontal inclination angle of the product after being installed in place can be adjusted through the adjusting mechanism, the problem of poor processing precision caused by the inclination of the product is reduced or even eliminated, therefore, the processing precision of the product is improved, finally, the impurity particles on the surface layer are removed along with the overflow of the surface layer of the magnetorheological fluid through the supplement of the magnetorheological fluid in the storage cavity, therefore, continuous processing can be realized, extra labor intensity caused by manual cleaning of surface impurities after multiple times of production is avoided, and the efficiency of continuous production is further improved.
Drawings
FIG. 1 is a schematic structural diagram of a carrier for processing a sheet-like wafer according to the present invention.
Fig. 2 is a schematic view of the product of fig. 1 connected to an adjustment mechanism.
fig. 3 is a partially enlarged view of the region "a" in fig. 2.
Fig. 4 is a partially enlarged view of the region "B" in fig. 3.
The device comprises a shell, a product, 2.1, a functional wafer, 2.2, a slide wafer, 2.3, bonding glue, 3, an adjusting mechanism, 3.1, a barrel, 3.2, a piston rod, 3.3, a control cavity, 3.4, a sucker, 3.5, a connecting pipe, 3.6, a step surface, 4, magnetorheological fluid, 5, a control pipe, 6, a universal joint, 7, a groove, 8, a partition board, 9, a storage cavity, 10, a liquid conveying channel, 11, an air tap, 12, a liquid inlet pipe, 13, a main excitation device, 14, an auxiliary excitation winding, 15, an overflow groove, 16, a pump, 17 and a pressure sensor.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
A carrier for sheet wafer processing according to an embodiment of the present invention will be described in detail below with reference to the accompanying drawings.
The first embodiment is as follows:
the invention provides a carrier for processing a sheet wafer, which comprises a shell 1 with an upward opening direction as shown in figure 1, wherein an adjusting mechanism 3 for adjusting the horizontal inclination angle of a product 2 is arranged in the shell 1, magnetorheological fluid 4 is filled in the shell 1, so that the adjusting mechanism 3 is immersed in the magnetorheological fluid 4, when the lower part of the product 2 is connected to the adjusting mechanism 3, the adjusting mechanism 3 drives the product 2 to swing to a set position and then stand, the part to be processed of the product 2 is positioned above the liquid level of the magnetorheological fluid 4, and a magnetic field generator is arranged on the shell 1 and used for driving the magnetorheological fluid 4 in the shell 1 to be solidified or reset to be in a fluid state.
The preset position refers to a position of a product to be machined on the machine tool, for example, a wafer is thinned through the grinding disc, and the preset position of the product refers to that a surface of the product to be machined swings to be parallel to a grinding surface of the grinding disc. In general, the above-described plurality of set positions are positions where the reference plane of the product is horizontal, but it is needless to say that the machining of the inclined surface can be completed also in the case of a multi-axis machine tool.
Fig. 1, 2 and 3 show that the product 2 is a sheet-shaped functional wafer 2.1, and the functional wafer 2.1 is attached to a slide wafer 2.2 from top to bottom, so that the strength of the functional wafer 2.1 is improved, and the functional wafer 2.1 is conveniently subjected to surface processing, such as thinning and etching. Specifically, the functional wafer 2.1 and the carrier wafer 2.2 are bonded through a bonding glue 2.3.
The horizontal inclination angle refers to an included angle between a reference plane on the product 2 and a horizontal plane, the reference plane may be an upper end surface of the product 2, and since more functional wafers 2.1 in the product 2 are made of a transparent material, the reference plane may also be an attaching surface between the functional wafer 2.1 and the slide glass wafer 2.2, specifically, an attaching surface between the functional wafer 2.1 and the cured bonding adhesive 2.3.
Example two:
The general structure of the embodiment is the same, and the difference is that: the adjusting mechanism 3 comprises at least three cylinders 3.1, preferably four cylinders 3.1, all the cylinders 3.1 are arranged at intervals in the horizontal direction, the lower end of each cylinder 3.1 is connected with the shell 1, a central channel is arranged in each cylinder 3.1, a piston rod 3.2 is in sliding fit in the central channel, the lower end face of the piston rod 3.2 and the inner surface of the central channel surround to form a control cavity 3.3, the upper end of the piston rod 3.2 is exposed above the cylinder 3.1 in the vertical direction, and a connecting piece used for being connected with or disconnected from the product 2 is arranged at the end part of the piston rod 3.2 exposed above the cylinder 3.1.
The general structure of the embodiment is the same, and the difference is that: adjusting mechanism 3 includes a barrel 3.1, and barrel 3.1's lower extreme and 1 fixed connection of casing, barrel 3.1's upper end extend up along vertical direction, be equipped with a center channel in the barrel 3.1, sliding fit has a piston rod 3.2 in the center channel, and the lower terminal surface of piston rod 3.2 encloses with the internal surface of center channel and forms control chamber 3.3, and the upper end of piston rod 3.2 is exposed in barrel 3.1 top along vertical direction, and the tip that the piston rod 3.2 exposes in barrel 3.1 top is equipped with the arbitrary plane wobbling manipulator that can follow piston rod 3.2 axis place, is equipped with the suction head of being connected or disjointing with product 2 on the manipulator.
the general structure of the embodiment is the same, and the difference is that: the adjusting mechanism 3 can be a waterproof mechanical arm, and the mechanical arm is used for grasping the product and adjusting the product to a horizontal position, so that the magnetorheological fluid can be used for fixing and clamping the product.
The general structure of the embodiment is the same, and the difference is that: the adjusting mechanism 3 may be a standard base platform fixedly installed in the casing 1, the upper end surface of the base platform is a reference surface, and when the lower portion of the product 2 is immersed in the magnetorheological fluid 4 of the casing 1, the lower end surface of the product 2, i.e., the lower end surface of the carrier wafer 2.2 of the product 2, is attached to the upper end surface of the base platform, so as to complete automatic calibration of the horizontal inclination angle of the product 2.
Example three:
The structure is the same as the general structure of the second embodiment, and the difference is that: the connecting piece is a sucker 3.4 with an upward opening direction.
Example four:
the three general structures are the same as the three general structures of the embodiment, and the differences are that: the inner part of the piston rod 3.2 is provided with a connecting pipe 3.5, the upper end of the connecting pipe 3.5 is communicated with the inner cavity of the sucker 3.4, the lower end of the connecting pipe 3.5 is communicated with the control cavity 3.3, and the control cavity 3.3 is connected with a pressure adjusting system outside the shell 1 through the control pipe 5. As shown in fig. 1 and 2, the pressure regulating system includes a pump 16 and a pressure sensor 17, one end of the control tube 5 is communicated with the control chamber 3.3, the other end of the control tube 5 is communicated with an output end of the pump 16, the pressure sensor 17 is mounted on the control tube 5 for detecting a pressure value in the control tube, of course, a solenoid valve (not shown) for regulating a flow rate and a pressure value of the control tube 5 may be further provided on the controller, and the pressure sensor 17 transmits a detection signal to the controller (not shown) for regulating a power and/or the solenoid valve of the pump 16 through the controller.
Example five:
The four general structures are the same as the four general structures of the embodiment, and the differences are that: the sucking disc 3.4 and the piston rod 3.2 formula structure as an organic whole, the lower extreme of barrel 3.1 passes through universal joint 6 and 1 normal running fit of casing.
Preferably, the suction cup 3.4 and the piston rod 3.2 are made of hard materials, and the edge of the opening of the suction cup 3.4, which is far away from the piston rod 3.2, is coated with an elastic sealant. The sucking effect of the sucking disc is increased through the elastic sealant, and the sucking state between the sucking disc and the product can be kept through the deformation of the elastic sealant when the piston rod 3.2 swings for a certain angle so that the sucking disc 3.4 and the lower end face of the product form an included angle state, so that the self-adaption is realized.
Preferably, the suction cup 3.4 is hinged with the piston rod 3.2 through a spherical joint. The ball joint can also be understood as a universal joint, so that the suction cup 3.4 can be rotated relative to the piston rod 3.2.
Preferably, the suction cup 3.4 is connected with the piston rod 3.2 through an elastic member. For example by integrally vulcanised rubber.
example six:
The structure is the same as the five general structures of the embodiment, and the difference is that: the top surface of the control cavity 3.3 is upwards and inwards concave along the vertical direction to form a groove 7 with an opening direction downwards, magnetorheological fluid 4 in the shell 1 is sequentially poured into the control cavity 3.3 through the suction disc 3.4 and the connecting pipe 3.5 in the piston rod 3.2, and the magnetorheological fluid 4 in the control cavity 3.3 forms a liquid seal in the notch position of the groove 7 or the groove 7, so that an air cavity for temporarily storing air is formed in the groove 7.
As shown in fig. 4, the central passage is located on the inner side wall corresponding to the control chamber 3.3 and is inscribed in the horizontal direction to form an annular step surface, and the step surface is upwardly and inwardly concave along the vertical direction to form a groove 7 with an opening facing downward.
preferably, the top surface may also refer to a lower end surface of the piston rod 3.2, the lower end surface of the piston rod 3.2 is recessed upwards along a vertical direction to form a groove 7 with a downward opening direction, when the connecting pipe 3.5 is arranged in the piston rod 3.2, the groove 7 is an annular groove, and the annular groove 7 is sleeved outside the connecting pipe 3.5 along a horizontal direction.
Example seven:
The general structure of the embodiment is the same, and the difference is that: be equipped with a baffle 8 in the casing 1, baffle 8 encloses with the inside wall of casing 1 and forms an inclosed reserve chamber 9, and the bottom of reserve chamber 9 is equipped with the infusion passageway 10 with the inner chamber intercommunication of casing 1, just infusion passageway 10 be located the liquid level below of magnetorheological suspensions 4 in casing 1, be equipped with on the lateral wall of reserve chamber 9 and be used for discharging the air in the reserve chamber 9 or towards filling into the air cock 11 in the reserve chamber 9.
Preferably, an upper liquid level sensor for detecting an upper liquid level limit and a lower liquid level sensor for detecting a lower liquid level limit are arranged in the storage cavity 9, the lower liquid level sensor is higher than the position of the infusion channel 10 along the vertical direction, and the upper liquid level sensor is lower than the position of the air faucet 11 along the vertical direction.
example eight:
The structure is the same as the seventh general structure, and the difference is that: a liquid inlet pipe 12 is arranged on the side wall of the storage cavity 9, and the liquid inlet pipe 12 is communicated with the storage cavity 9 and used for injecting magnetorheological fluid into the storage cavity 9.
Example nine:
The structure is the same as the seventh general structure, and the difference is that: the magnetic field generator comprises a primary excitation means 13 housed in the housing 1 and a secondary excitation winding 14 integrated in the partition 8. When the main excitation device 13 and the auxiliary excitation winding 14 are powered on to generate a magnetic field, the magnetorheological fluid in the shell 1 is driven to solidify through the magnetic field, and when the main excitation device 13 and the auxiliary excitation winding 14 are powered off, the magnetorheological fluid in the shell 1 is reset to be in a fluid state.
Example ten:
The general structure of the embodiment is the same, and the difference is that: an overflow groove 15 is arranged on the outer side wall of the shell 1, and the overflow groove 15 extends along the circumferential direction of the shell 1 to form an annular structure. The magnetorheological fluid in the overflow groove 15 is purified and then is communicated with the liquid inlet pipe 12 through a three-way valve.
It should be noted that, in the description of the present invention, it is to be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship indicated based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing and simplifying the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
various alterations and modifications will no doubt become apparent to those skilled in the art after having read the above description. Therefore, the appended claims should be construed to cover all such variations and modifications as fall within the true spirit and scope of the invention. Any and all equivalent ranges and contents within the scope of the claims should be considered to be within the intent and scope of the present invention.
Claims (1)
1. a carrier for processing a sheet wafer is characterized in that: the device comprises a shell (1) with an upward opening direction, wherein an adjusting mechanism (3) for adjusting the horizontal inclination angle of a product (2) is arranged in the shell (1), magnetorheological fluid (4) is poured into the shell (1) so that the adjusting mechanism (3) is immersed in the magnetorheological fluid (4), when the lower part of the product (2) is connected onto the adjusting mechanism (3), the adjusting mechanism (3) drives the product (2) to swing to a set position and then stand, the part of the product (2) to be processed is positioned above the liquid level of the magnetorheological fluid (4), and a magnetic field generator is arranged on the shell (1) and used for driving the magnetorheological fluid (4) in the shell (1) to be solidified or reset to be in a fluid state;
The adjusting mechanism (3) comprises at least three cylinders (3.1), all the cylinders (3.1) are arranged at intervals in the horizontal direction, the lower end of each cylinder (3.1) is connected with the shell (1), a central channel is arranged in each cylinder (3.1), a piston rod (3.2) is in sliding fit in the central channel, the lower end face of the piston rod (3.2) and the inner surface of the central channel surround to form a control cavity (3.3), the upper end of the piston rod (3.2) is exposed above the cylinders (3.1) in the vertical direction, and a connecting piece used for being connected with or disconnected from a product (2) is arranged at the end part of the piston rod (3.2) exposed above the cylinders (3.1);
The connecting piece is a sucker (3.4) with an upward opening direction;
A connecting pipe (3.5) is arranged in the piston rod (3.2), the upper end of the connecting pipe (3.5) is communicated with the inner cavity of the sucker (3.4), the lower end of the connecting pipe (3.5) is communicated with the control cavity (3.3), and the control cavity (3.3) is connected with a pressure regulating system outside the shell (1) through the control pipe (5);
The sucker (3.4) and the piston rod (3.2) are of an integrated structure, and the lower end of the cylinder body (3.1) is in running fit with the shell (1) through a universal joint (6);
The top surface of the control cavity (3.3) is upwards and inwards concave along the vertical direction to form a groove (7) with a downward opening direction, magnetorheological fluid (4) in the shell (1) is sequentially poured into the control cavity (3.3) through a suction disc (3.4) and a connecting pipe (3.5) in the piston rod (3.2), and the magnetorheological fluid (4) in the control cavity (3.3) forms a liquid seal in the notch position of the groove (7) or the groove (7) so as to form an air cavity for temporarily storing air in the groove (7);
A partition plate (8) is arranged in the shell (1), the partition plate (8) and the inner side wall of the shell (1) are encircled to form a closed storage cavity (9), a transfusion channel (10) communicated with the inner cavity of the shell (1) is arranged at the bottom of the storage cavity (9), the transfusion channel (10) is located below the liquid level of the magnetorheological fluid (4) in the shell (1), and an air nozzle (11) used for discharging air in the storage cavity (9) or filling air into the storage cavity (9) is arranged on the side wall of the storage cavity (9);
a liquid inlet pipe (12) is arranged on the side wall of the storage cavity (9), and the liquid inlet pipe (12) is communicated with the storage cavity (9) and is used for injecting magnetorheological fluid into the storage cavity (9);
the magnetic field generator comprises a main excitation device (13) arranged in the shell (1) and an auxiliary excitation winding (14) integrated in the partition plate (8);
an overflow groove (15) is arranged on the outer side wall of the shell (1), and the overflow groove (15) extends along the circumferential direction of the shell (1) to form an annular structure.
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| CN201810298297.2A CN108436683B (en) | 2018-04-03 | 2018-04-03 | Carrier for processing sheet wafer |
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| CN201810298297.2A CN108436683B (en) | 2018-04-03 | 2018-04-03 | Carrier for processing sheet wafer |
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| CN108436683B true CN108436683B (en) | 2019-12-06 |
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| CN110202707B (en) * | 2019-06-19 | 2021-04-20 | 广东先导先进材料股份有限公司 | Multi-wire cutting device and cutting fluid supply assembly thereof |
| CN112405324B (en) * | 2020-10-15 | 2022-05-06 | 东莞市新美洋技术有限公司 | Grinding clamp for sheet product |
| CN112404735B (en) * | 2020-11-09 | 2022-03-04 | 松山湖材料实验室 | Ingot peeling method and ingot peeling device |
| CN112828633B (en) * | 2020-12-31 | 2022-06-21 | 上海理工大学 | Magnetorheological flexible clamp for thin-walled part with any appearance |
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| CN1799784A (en) * | 2004-12-31 | 2006-07-12 | 中国科学技术大学 | Clamping holder with rigidity changeable flexible surface |
| CN106514369A (en) * | 2016-10-31 | 2017-03-22 | 山东大学 | Flexible clamp for milling thin-walled workpiece with complex curved surface |
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| CN106881609A (en) * | 2017-03-01 | 2017-06-23 | 大连理工大学 | A kind of thin-walled flat board magnetic flow liquid flexible support method |
| CN106960807A (en) * | 2016-01-12 | 2017-07-18 | 东京毅力科创株式会社 | The cleaning method of substrate board treatment and substrate board treatment |
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|---|---|---|---|---|
| JP2013169620A (en) * | 2012-02-21 | 2013-09-02 | Tok Engineering Kk | Magnet strainer and polishing device using the same |
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| CN1799784A (en) * | 2004-12-31 | 2006-07-12 | 中国科学技术大学 | Clamping holder with rigidity changeable flexible surface |
| CN106960807A (en) * | 2016-01-12 | 2017-07-18 | 东京毅力科创株式会社 | The cleaning method of substrate board treatment and substrate board treatment |
| CN106514369A (en) * | 2016-10-31 | 2017-03-22 | 山东大学 | Flexible clamp for milling thin-walled workpiece with complex curved surface |
| CN106783683A (en) * | 2016-12-19 | 2017-05-31 | 安徽天裕汽车零部件制造有限公司 | A kind of wafer-scanning cleans swinging arm device |
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