CN108398489B - Method for accurately measuring transverse resolution of focused ultrasonic transducer - Google Patents

Method for accurately measuring transverse resolution of focused ultrasonic transducer Download PDF

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CN108398489B
CN108398489B CN201810006549.XA CN201810006549A CN108398489B CN 108398489 B CN108398489 B CN 108398489B CN 201810006549 A CN201810006549 A CN 201810006549A CN 108398489 B CN108398489 B CN 108398489B
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test block
gray value
ultrasonic transducer
focused ultrasonic
accurately measuring
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CN108398489A (en
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肖会芳
陈丹
安元卜
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University of Science and Technology Beijing USTB
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University of Science and Technology Beijing USTB
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/30Arrangements for calibrating or comparing, e.g. with standard objects

Abstract

The invention provides a method for accurately measuring the transverse resolution of a focused ultrasonic transducer, belonging to the technical field of ultrasonic detection. Firstly, processing a stainless steel material into a cubic test block, wherein the edges of the test block are sharp and have no chamfer angle; then, performing high-precision C-scan imaging on the edge of the test block by using a focused ultrasonic transducer to be tested; then, randomly selecting 10 gray value curves V (x) vertical to the edge of the test block in the C-scan image, averaging the gray value curves, and smoothing the gray value curves by adopting a mean filtering method; carrying out derivation operation on the smoothed gray value curve to obtain a gray value change rate curve
Figure DDA0001538800870000011
And finally, calculating the transverse resolution of the focused ultrasonic transducer by adopting a-6 dB descent method for the gray value change rate curve. The method provides a simple and convenient method for accurately measuring the transverse resolution of the focused ultrasonic transducer from experiments, and visually displays the influence of the transverse resolution on the C-scan imaging definition. The method has low preparation requirement on the test block, and the same test block can be suitable for different types of axisymmetric transducers.

Description

Method for accurately measuring transverse resolution of focused ultrasonic transducer
Technical Field
The invention relates to the technical field of ultrasonic detection, in particular to a method for accurately measuring the transverse resolution of a focused ultrasonic transducer.
Background
The lateral resolution of the focused ultrasound transducer is one of the important parameters affecting the detection accuracy and imaging quality of the ultrasonic microscope, and determines the definition of C-scan imaging. The transverse resolution of the focused ultrasonic transducer is related to the numerical aperture and the acoustic wavelength of the transducer, and the transverse resolution of the focused ultrasonic transducer can be effectively improved by improving the convergence degree of the acoustic waves emitted by the transducer in a material to be measured. Currently, methods for determining the lateral resolution of a focused ultrasound transducer are roughly classified into the following three types: 1) calculating the transverse resolution of the focused ultrasonic transducer by adopting a formula omega of 0.51 lambda/N.A. according to a Rayleigh criterion; 2) according to the radial sound pressure distribution of the sound wave emitted by the focusing transducer at the focal plane, calculating the transverse resolution of the sound wave by adopting a-6 dB descent method; 3) and judging the transverse resolution of the focused ultrasonic transducer according to the resolvable degree of the standard grating in the C-scan image. Although the three methods described above are used in different situations, they have certain disadvantages more or less. The lateral resolution calculated according to the rayleigh criterion is only suitable for spherical focusing transducers with a single frequency or approximately a single frequency, and the calculation result error is large for wide-frequency focusing transducers with a wide frequency band range. When the transverse resolution of the focused ultrasonic transducer is calculated according to the radial sound pressure distribution, the radial sound pressure distribution of the focal plane of the transducer needs to be accurately obtained through an experimental or theoretical formula. If the radial sound pressure distribution of the focal plane of the focused ultrasonic transducer is measured through experiments, the measurement result is inevitably influenced by a receiving device, and the frequency spectrum characteristic of the actual transducer must be considered when the radial sound pressure distribution of the focal plane of the focused ultrasonic transducer is calculated according to a theoretical formula, so that the whole measurement process is complex. If the transverse resolution of the focused ultrasonic transducer is judged according to the definition of the standard grating pattern in the C-scan image, a series of grating stripes with different intervals need to be prepared on a test block, the method not only has higher requirement on the processing precision of the test block, but also the imaging definition is inevitably influenced by the axial resolution.
Disclosure of Invention
The technical problem to be solved by the invention is to provide a method for accurately measuring the transverse resolution of a focused ultrasonic transducer, which accurately measures the transverse resolution of the focused ultrasonic transducer through a relatively simple C-scan imaging experiment and an image processing method. The method specifically comprises the steps of processing a cubic test block with sharp edges, carrying out high-precision C-scan imaging on the edges of the test block, and measuring the transverse resolution of the focused ultrasonic transducer by adopting a-6 dB descent method according to the change rate of gray values in the C-scan image in the direction perpendicular to the edges of the test block.
The method comprises the following steps:
(1) processing a stainless steel material into a cubic test block;
(2) carrying out high-precision C-scan imaging on the edges of the cubic test block prepared in the step (1) by using a focused ultrasonic transducer to be tested;
(3) randomly selecting 10 gray value curves V (x) vertical to the edges of the test block in the C-scan image in the step (2), averaging the gray value curves, and smoothing the gray value curves by adopting a mean filtering method, wherein a variable x represents that the gray value curves are parallel to the x-axis direction;
(4) performing derivation operation on the gray value curve smoothed in the step (3) to obtain a gray value change rate curve
Figure GDA0002634150440000031
(5) And (4) calculating the gray value change rate curve in the step (4) by adopting a-6 dB descent method to obtain the transverse resolution of the focused ultrasonic transducer.
The cube test block in the step (1) is processed in a linear cutting mode, and the edges of the cube test block are sharp and have no chamfer.
The side length of the cube test block in the step (1) is 20mm multiplied by 20 mm.
The relation between the scanning step length l of the high-precision C-scan imaging in the step (2) and the wavelength lambda of the sound wave is as follows: l is less than or equal to lambda/100, and the scanning area is 1mm multiplied by 1 mm.
The technical scheme of the invention has the following beneficial effects:
the method has the characteristics of simple preparation of a standard sample, accurate measurement result, wide application range and the like, and can be used as a standard method for measuring the transverse resolution of the focused ultrasonic transducer.
Drawings
FIG. 1 is a side view of a schematic diagram of a method of accurately measuring the lateral resolution of a focused ultrasound transducer of the present invention;
FIG. 2 is a top view of a schematic diagram of measuring the lateral resolution of a focused ultrasound transducer according to the present invention;
FIG. 3 shows the test results of a 10MHz focused ultrasound transducer in an embodiment of the invention;
FIG. 4 shows the test results of a 30MHz focused ultrasound transducer in an embodiment of the invention;
FIG. 5 is a test result of a 50MHz focused ultrasound transducer in an embodiment of the invention;
FIG. 6 shows the test results of a 100MHz focused ultrasound transducer in an embodiment of the invention;
FIG. 7(a) is a diagram showing the spectral characteristics of a 10MHz focused ultrasound transducer in an embodiment of the present invention;
FIG. 7(b) is a diagram showing the spectral characteristics of a 30MHz focused ultrasound transducer in an embodiment of the present invention;
FIG. 7(c) is a diagram showing the spectral characteristics of a 50MHz focused ultrasound transducer in an embodiment of the present invention;
fig. 7(d) shows the spectral characteristics of a 100MHz focused ultrasound transducer in an embodiment of the present invention.
Detailed Description
In order to make the technical problems, technical solutions and advantages of the present invention more apparent, the following detailed description is given with reference to the accompanying drawings and specific embodiments.
The invention provides a method for accurately measuring the transverse resolution of a focused ultrasonic transducer.
The method comprises the following steps:
(1) processing a stainless steel material into a cubic test block;
(2) carrying out high-precision C-scan imaging on the edges of the cubic test block prepared in the step (1) by using a focused ultrasonic transducer to be tested;
(3) randomly selecting 10 gray value curves V (x) vertical to the edges of the test block in the C-scan image in the step (2), averaging the gray value curves, and smoothing the gray value curves by adopting a mean filtering method;
(4) performing derivation operation on the gray value curve smoothed in the step (3) to obtain a gray value change rate curve
Figure GDA0002634150440000041
(5) And (4) calculating the gray value change rate curve in the step (4) by adopting a-6 dB descent method to obtain the transverse resolution of the focused ultrasonic transducer.
The cube test block in the step (1) is processed in a linear cutting mode, and the edges of the cube test block are sharp and have no chamfer.
The side length of the cube test block in the step (1) is 20mm multiplied by 20 mm.
The relation between the scanning step length l of the high-precision C-scan imaging in the step (2) and the wavelength lambda of the sound wave is as follows: l is less than or equal to lambda/100, and the scanning area is 1mm multiplied by 1 mm.
In the concrete implementation process, the attached drawings are combined(see fig. 1-7), the design of the present invention will be described in detail by taking focused ultrasound transducers with nominal center frequencies of 10MHz, 30MHz, 50MHz and 100MHz, respectively, as an example, but not by way of limitation. Fig. 1 and 2 show the basic principle of measuring the lateral resolution of a focused ultrasound transducer. As can be seen from fig. 1 (side view) and fig. 2 (top view), under the condition that the test block edges are sharp and have no chamfer, when the focal spot of the focused ultrasound transducer is gradually scanned from the left area completely on the test block surface to the right area completely in the water, the change of the voltage signal amplitude V caused by the reflected echo depends strictly on the sound pressure change of the incident sound wave which is specularly reflected on the test block surface, so the gray value change V (x) perpendicular to the test block edges (assumed to be parallel to the x-axis direction) in the C-scan image indirectly reflects the radial sound pressure distribution change of the focused ultrasound transducer. By calculating the gray value change rate vertical to the edge of the sample in the C-scan image
Figure GDA0002634150440000051
The lateral resolution of the focused ultrasound transducer was measured using a-6 dB down-fall method.
The method steps for measuring the transverse resolution of a focused ultrasound transducer are given in detail below:
1. processing 304 stainless steel serving as an experimental material into a cubic test block with the side length of 20mm multiplied by 20mm by adopting a linear cutting mode, and then processing the upper surface and the side surface of the test block smoothly on a milling machine and ensuring that the edge of the test block is sharp and has no chamfer;
2. immersing the test block in a water tank, adjusting the height of a scanning mechanism to enable a focused ultrasonic transducer to accurately focus on the upper surface of the test block, and performing C-scanning imaging on sharp edges of the test block by adopting 2-micrometer stepping precision, wherein the imaging area is 1mm multiplied by 1mm, and the imaging results are respectively shown as C-scanning images on the left sides in the images 3 to 6;
3. randomly selecting 10 gray value curves V (x) vertical to the edge of the test block from the C-scan image, averaging the gray value curves, and smoothing the gray value curves by using a mean filtering method, wherein the length of a filter is 20, and the smoothed curves are respectively shown as gray value curves in the middle of the graphs in FIGS. 3 to 6;
4. performing derivation operation on the smoothed gray value curve to obtain a change rate curve of the gray value
Figure GDA0002634150440000061
As shown in the right-hand gray-level change rate curves of fig. 3 to 6, respectively;
5. curve of rate of change of gray value
Figure GDA0002634150440000062
And measuring by adopting a-6 dB descent method to obtain the transverse resolution of the focused ultrasonic transducer. For the four focused ultrasound transducers described above, the lateral resolutions were 316 μm, 98 μm, 150 μm, and 104 μm in this order. To demonstrate the effectiveness of this measurement method, the measurement results were compared with theoretical results calculated using the sharpness criterion formula ω 0.51 λ/n.a., and the results are shown in table 1. In the sharpness criterion formula, λ is the wavelength of sound wave in water, and n.a. ═ D/2F represents the numerical aperture. The columns 2-4 in Table 1 are the geometric parameters of the focused ultrasound transducer.
Table 1 shows that the theoretical calculation results of the lateral resolution are closer to the experimental test results with relative deviations of 3.36% and 9.26% for the focused ultrasound transducers with nominal frequencies of 10MHz and 30MHz, respectively, and are larger with deviations of 47.06% and 153.66% for the focused transducers with nominal frequencies of 50MHz and 100MHz, respectively.
Fig. 7 shows the test results of the frequency spectrum characteristics of the four focused ultrasonic transducers in the factory. Fig. 7(a) and 7(b) show that the frequency bandwidths of the 10MHz focusing transducer and the 30MHz focusing transducer are narrow, the frequency spectrum only includes one peak, the center frequency is closer to the nominal frequency (10MHz and 20MHz), and therefore the deviation between the theoretical calculation result and the experimental test result is small. While fig. 7(c) and 7(d) show that the focused transducers with frequencies of 50MHz and 100MHz have a spectrum with multiple peaks, the actual center frequencies (30 MHz and 35MHz, respectively) are much different from the nominal frequency of the transducer, and therefore the theoretical calculation results deviate much from the experimental test results. Furthermore, it is stated that the sharpness of the C-scan image in actual inspection is not only related to the lateral resolution of the transducer, but also to the axial resolution of the transducer, i.e. the focal column length, the shorter the focal column length, the lower the image sharpness.
TABLE 1 nominal parameters and lateral resolution of differently focused transducers
Figure GDA0002634150440000071
Figure GDA0002634150440000081
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.

Claims (4)

1. A method of accurately measuring the lateral resolution of a focused ultrasound transducer, comprising: the method comprises the following steps:
(1) processing a stainless steel material into a cubic test block;
(2) carrying out high-precision C-scan imaging on the edges of the cubic test block prepared in the step (1) by using a focused ultrasonic transducer to be tested;
(3) randomly selecting 10 gray value curves V (x) vertical to the edges of the test block in the C-scan image in the step (2), averaging the gray value curves, and smoothing the gray value curves by adopting a mean filtering method;
(4) performing derivation operation on the gray value curve smoothed in the step (3) to obtain a gray value change rate curve
Figure FDA0001538800840000011
(5) And (4) calculating the gray value change rate curve in the step (4) by adopting a-6 dB descent method to obtain the transverse resolution of the focused ultrasonic transducer.
2. The method of accurately measuring the lateral resolution of a focused ultrasound transducer as recited in claim 1, wherein: the cube test block in the step (1) is processed in a linear cutting mode, and the edges of the cube test block are sharp and have no chamfer.
3. The method of accurately measuring the lateral resolution of a focused ultrasound transducer as recited in claim 1, wherein: the side length of the cube test block in the step (1) is 20mm multiplied by 20 mm.
4. The method of accurately measuring the lateral resolution of a focused ultrasound transducer as recited in claim 1, wherein: the relation between the scanning step length l of the high-precision C-scan imaging in the step (2) and the wavelength lambda of the sound wave is as follows: l is less than or equal to lambda/100, and the scanning area is 1mm multiplied by 1 mm.
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CN104634876A (en) * 2015-01-30 2015-05-20 北京科技大学 Method for detecting inclusions in metal material by virtue of ultrasonic scanning microscope
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JPH08105869A (en) * 1994-10-07 1996-04-23 Hitachi Constr Mach Co Ltd Standard sample for evaluating ultrasonic probe characteristics and method for evaluating ultrasonic probe characteristics
CN104634876A (en) * 2015-01-30 2015-05-20 北京科技大学 Method for detecting inclusions in metal material by virtue of ultrasonic scanning microscope
CN105403627A (en) * 2015-12-24 2016-03-16 大连理工大学 Method for enhancing lateral resolution of ultrasonic testing images
WO2017194832A1 (en) * 2016-05-10 2017-11-16 Åbo Akademi (Åbo Akademi University) An artifact for determining resolution of imaging based on electromagnetic radiation and/or mechanical waves

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