CN108375613A - 3 D stereo interdigital electrode - Google Patents

3 D stereo interdigital electrode Download PDF

Info

Publication number
CN108375613A
CN108375613A CN201810307445.2A CN201810307445A CN108375613A CN 108375613 A CN108375613 A CN 108375613A CN 201810307445 A CN201810307445 A CN 201810307445A CN 108375613 A CN108375613 A CN 108375613A
Authority
CN
China
Prior art keywords
interdigital electrode
interdigital
electrode
top layer
stereo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201810307445.2A
Other languages
Chinese (zh)
Other versions
CN108375613B (en
Inventor
唐龙华
赵慧
江涛
刘旭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang University ZJU
Original Assignee
Zhejiang University ZJU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang University ZJU filed Critical Zhejiang University ZJU
Priority to CN201810307445.2A priority Critical patent/CN108375613B/en
Publication of CN108375613A publication Critical patent/CN108375613A/en
Application granted granted Critical
Publication of CN108375613B publication Critical patent/CN108375613B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/307Disposable laminated or multilayered electrodes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3275Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
    • G01N27/3278Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction involving nanosized elements, e.g. nanogaps or nanoparticles

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)

Abstract

The invention discloses a kind of 3 D stereo interdigital electrodes.Including substrate, bottom interdigital electrode, sacrificial layer and the top layer interdigital electrode being sequentially arranged from top to bottom;Bottom interdigital electrode and top layer interdigital electrode are that interdigital electrode, sacrificial layer are fixed and be supported between bottom interdigital electrode and top layer interdigital electrode in the face of Different Plane, and substrate is the adhesive layer of entire 3 D stereo interdigital electrode.The present invention can reach the nano-scale at interdigital interval, the sensitivity of detection of interdigital electrode can be enhanced, there are many interdigital combinations of electrode, meet a variety of applicable cases, break through the limitation of existing interdigital electrode single substance detection, highly sensitive detection is realized to many kinds of substance, realizes that more substances sense parallel.

Description

3 D stereo interdigital electrode
Technical field
The present invention relates to electrochemical sensing device more particularly to a kind of 3 D stereo interdigital electrodes.
Background technology
Plane electrode because of its high sensitivity, is easy to the features such as miniaturization by extensive concern as electrochemical sensing device.And And electrochemical response may be implemented to detect in real time.And there are periodic patterns in interdigital electrode finger-like or the plane of dressing Electrode has the excellent characteristic that plane electrode senses as most widely used one of plane electrode, is surveyed in non-destructive The extensive uses such as examination, telecommunications, test chemical.
The sensing principle of plane interdigital electrode is:The concentration of measured target analyte can influence test wrapper by certain methods The electric signal in border, and between target analyte concentration and electric signal be in proportionate relationship.It can be seen that increase the interdigital electricity of plane Pole detectivity, can optimum structural parameter, including interdigital length-width ratio, adjacent tine refers to the gap and interdigital height electrode finger logarithm, To reduce resistance value, ambient noise is reduced.It will be appreciated, however, that the optimization of above structure parameter be in order to increase it is interdigital between Electric field strength, reinforce and measured target object between effect.It is therefore, interdigital that logarithm, for the raising of signal-to-noise ratio, there is no shadows It rings, the optimization of performance finally needs the reduction of electrode size.
There is plane interdigital electrode of the interdigital spacing in nanometer scale at present, can delicately detect interdigital electrode knot Faint change in electric between structure.But the device of nanometer scale is more demanding for manufacture craft, and cost relative increase.Cause This makes more highly sensitive interdigital electrode senser element and necessitates under the process environments of original maturation.
Meanwhile the plane interdigital electrode sensor for occurring at present, it can be common that utilize oxidation/reduction method, immune inspection Survey method etc. is for the content detection of single substance, such as ethyl glucuronide aldehydic acid glycosides (Etg), Hepatitis C Virus (HCV) antigen Deng, and more substances detect then not yet occur simultaneously.To improve the detection efficiency of its sensing, more substance parallel detections are interdigital electricity The inexorable trend of pole sensing.
Invention content
In view of the deficiencies of the prior art, the purpose of the present invention is to provide a kind of 3 D stereo interdigital electrodes.The electrode knot Structure improves the deficiency of original plane interdigital electrode, and the nano-scale at interdigital interval is reached using original plane interdigital electrode technique, The sensitivity of detection of interdigital electrode can be enhanced, there are many interdigital combinations of electrode, meet a variety of applicable cases, break through existing The limitation of interdigital electrode single substance detection realizes highly sensitive detection to many kinds of substance, realizes that more substances sense parallel.
The technical solution adopted by the present invention is:
The present invention includes the substrate being sequentially arranged from top to bottom, bottom interdigital electrode, sacrificial layer and top layer interdigital electrode;Bottom Layer interdigital electrode and top layer interdigital electrode are the interdigital electrode in the face of Different Plane, and sacrificial layer is fixed and is supported on bottom fork Refer between electrode and top layer interdigital electrode, substrate is the adhesive layer of entire 3 D stereo interdigital electrode, ensures structural stability.
The bottom interdigital electrode is located at plane A, and it is parallel that top layer interdigital electrode is located at plane C, plane A and plane C.
The substrate and sacrificial layer is insulating materials so that between bottom interdigital electrode and top layer interdigital electrode and bottom It is electrically insulated between top layer interdigital electrode inside inside layer interdigital electrode.
The substrate and sacrificial layer is using polymer, semi-conducting material etc..
When face corresponds to arrangement up and down for bottom interdigital electrode and top layer interdigital electrode interdigital, i.e. top layer interdigital electrode Each interdigital positioned at each interdigital surface of bottom interdigital electrode, the sacrificial layer is arranged in bottom interdigital electrode and top It is spaced apart the hole equipped with periodic arrangement between layer interdigital electrode and along interdigital direction.
When the interdigital staggeredly corresponding arrangement up and down of bottom interdigital electrode and top layer interdigital electrode, i.e. top layer interdigital electrode It is each it is interdigital positioned at bottom interdigital electrode it is adjacent it is interdigital between gap surface, it is interdigital that the sacrificial layer is arranged in top layer It is spaced apart the hole equipped with periodic arrangement between electrode and substrate and along interdigital direction.
Specific probe is fixed in the different interdigital electrodes of two of the bottom interdigital electrode and top layer interdigital electrode, it is special Modification connection DNA chain on specific probes, metal nanometer line is synthesized by DNA chain, by two different interdigital electrode conductings.
The present invention increases the sensing dimension on electrode plane direction, the dimension on the basis of plane interdigital electrode The size making of degree can be easily reached tens nanometers even several nanometers, technology difficulty be effectively relieved, while improving unit bodies Electric field density in product, to improve overall sensitivity.
In the present invention, bottom interdigital electrode and top layer interdigital electrode in Different Plane cooperate, bottom interdigital electrode The two poles of the earth and the two poles of the earth of top layer interdigital electrode mutually form different positive and negative anodes combination collocations, collectively constitute the interdigital electricity of 3 D stereo The electrode loop of pole, expands the sensing dimension of interdigital electrode, and 3 D stereo interdigital electrode is transformed by plane interdigital electrode.
Compared with the background technology, the present invention, it has an advantageous effect in that:
1) the present invention is based on the designs and production method of original plane interdigital electrode, do not need complicated design and can be realized The interdigital electrode of nanometer scale, technical maturity is at low cost, high yield rate;
2) unit volume internal surface area of the present invention increases, and effectively increases in sensitive zones interdigital electrode in unit volume Integrated area, can be greatly improved the detectivity of interdigital electrode, solve surface area and the detection of classic flat-plate interdigital electrode Contradiction between sensitivity;
3) present invention breaks through the limitation of existing interdigital electrode single substance detection, can be realized to many kinds of substance highly sensitive Detection, realizes that more substances sense parallel.
Structure of the invention can meet a variety of applicable cases there are many interdigital combination of electrode.
Structure of the invention can be easier to realize in technique small in the Directional Extension dimension perpendicular to interdigital electrode, the dimension The making of size, sacrifice layer height can control to tens nanometers even several nanometers, to realize the electrode gap of nanometer scale.
Description of the drawings
Fig. 1 (a) is the structural schematic diagram of the embodiment of the present invention 1, and Fig. 1 (b), Fig. 1 (c) are the vertical view of Fig. 1 (a) respectively And front view.
Fig. 2 (a) is schematic diagram of the embodiment of the present invention 2 in sensing, and Fig. 2 (b), Fig. 2 (c) are the vertical view of Fig. 2 (a) respectively And front view.
Fig. 3 (a) is schematic diagram of the plane electrode combination for Electrode-biofilm sensing based on the embodiment of the present invention 1.
Fig. 3 (b) and Fig. 3 (c) is with the schematic diagram of the A-A section view angle of field of Fig. 3 (a).
Fig. 4 (a) is schematic diagram of the vertical electrode combination for Electrode-biofilm sensing based on the embodiment of the present invention 2.
Fig. 4 (b), Fig. 4 (c) and Fig. 4 (d) are with the schematic diagram of the B-B section view angle of field of Fig. 4 (a).
In figure:1, substrate, 2, bottom interdigital electrode, 3, sacrificial layer, 4, top layer interdigital electrode, 101, plane A, 102, plane B, 103, plane C, 31, hole, 21~22&41~42, interdigital, 51~52&61~62, electrode pair, 531~532&541~ 542, specific probe, 533~534&543, DNA chain, 535~536&544, metal nanometer line.
Specific implementation mode
Below according to drawings and examples, the present invention will be described in detail.
The embodiment of the present invention is as follows:
Embodiment 1
As shown in Fig. 1 (a), the present embodiment includes the substrate 1, bottom interdigital electrode 2, sacrificial layer being sequentially arranged from top to bottom 3 and top layer interdigital electrode 4;Bottom interdigital electrode 2 and top layer interdigital electrode 4 are the interdigital electrode in the face of Different Plane, sacrificial Domestic animal layer 3 is fixed and is supported between bottom interdigital electrode 2 and top layer interdigital electrode 4, and substrate 1 is entire 3 D stereo interdigital electrode Adhesive layer, ensure structural stability.
Fig. 1 (b), Fig. 1 (c) are the front view and vertical view of embodiment 1 respectively, and bottom interdigital electrode 2 is located at plane A, top Layer interdigital electrode 4 is located at plane C, and it is parallel that sacrificial layer 3 is located at plane B, plane A and plane C.
The interdigital face up and down of bottom interdigital electrode 2 and top layer interdigital electrode 4 corresponds to arrangement, i.e. top layer interdigital electrode 4 Each interdigital positioned at each interdigital surface of bottom interdigital electrode 2, top layer interdigital electrode 4 arrives the projection of plane B, overlaps The projection of plane B is arrived in bottom interdigital electrode 2, sacrificial layer 3 is arranged between bottom interdigital electrode 2 and top layer interdigital electrode 4 And it is spaced apart the hole 31 equipped with periodic arrangement along interdigital direction.The hole 31 of periodic arrangement can guarantee under working condition Forceful electric power field distribution between top layer interdigital electrode 4 and bottom interdigital electrode 2.
The present embodiment includes two electrodes of the bottom interdigital electrode 2 positioned at plane A and is located at plane C altogether there are four electrode Top layer interdigital electrode 4 two electrodes, bottom interdigital electrode 2 and top layer interdigital electrode 4 include respectively two electrodes.It can be as needed Electrode combination appropriate is chosen, specific function is completed.
It, can be by the electrode 41 or electrode of the electrode 21 of bottom interdigital electrode 2 and top layer interdigital electrode 4 in specific implementation 42 constitute one pair of electrodes, and remaining two electrodes are then constituted two pairs of electrodes pair.
In specific implementation, the electrode 21 of bottom interdigital electrode 2 and electrode 22 can be constituted one pair of electrodes, top layer is interdigital The electrode 41 and electrode 42 of electrode 4 constitute one pair of electrodes.
Substrate 1 and sacrificial layer 3 select semi-conducting material or polymer as needed, such as silicon, silica, polymethylacrylic acid Methyl esters (PMMA) etc..
Substrate 1, bottom interdigital electrode 2, the size of sacrificial layer 3 and top layer interdigital electrode 4 can design as needed, wherein sacrificial The height of domestic animal layer 3 determines the interdigital spacing between bottom interdigital electrode 2 and top layer interdigital electrode 4, is influenced on the sensitivity of device Bigger.
Embodiment 2
As shown in Fig. 2 (a), the present embodiment includes the substrate 1, bottom interdigital electrode 2, sacrificial layer being sequentially arranged from top to bottom 3 and top layer interdigital electrode 4;Bottom interdigital electrode 2 and top layer interdigital electrode 4 are the interdigital electrode in the face of Different Plane, sacrificial Substrate 1 is fixed and be supported between bottom interdigital electrode 2 and top layer interdigital electrode 4 and extend downwardly into domestic animal layer 3, and substrate 1 is whole The adhesive layer of a 3 D stereo interdigital electrode ensures structural stability.
Fig. 2 (b), Fig. 2 (c) are the front view and vertical view of embodiment 1 respectively, and bottom interdigital electrode 2 is located at plane A, top Layer interdigital electrode 4 is located at plane C, and it is parallel that sacrificial layer 3 is located at plane B, plane A and plane C.
Difference lies in bottom interdigital electrode 2 and the interdigital of top layer interdigital electrode 4 are interlocked up and down for the present invention and embodiment 1 Corresponding arrangement, i.e. top layer interdigital electrode 4 it is each it is interdigital positioned at bottom interdigital electrode 2 it is adjacent it is interdigital between gap just on Side, each interdigital projected position to plane B of top layer interdigital electrode 4, each just at bottom interdigital electrode 2 interdigital arrive Gap between the projected position of plane B, sacrificial layer 3 are arranged between top layer interdigital electrode 4 and substrate 1 and between interdigital direction Separate the hole 31 equipped with periodic arrangement.The hole 31 of periodic arrangement can guarantee under working condition top layer interdigital electrode 4 with Forceful electric power field distribution between bottom interdigital electrode 2.
The present embodiment includes two electrodes of the bottom interdigital electrode 2 positioned at plane A and is located at plane C altogether there are four electrode Top layer interdigital electrode 4 two electrodes, bottom interdigital electrode 2 and top layer interdigital electrode 4 include respectively two electrodes.It can be as needed Electrode combination appropriate is chosen, specific function is completed.
It, can be by the electrode 41 or 42 electricity of the electrode 21 of bottom interdigital electrode 2 and top layer interdigital electrode 4 in specific implementation Pole constitutes one pair of electrodes, and remaining two electrodes are then constituted two pairs of electrodes pair.
In specific implementation, the electrode 21 of bottom interdigital electrode 2 and electrode 22 can be constituted one pair of electrodes, top layer is interdigital The electrode 41 and electrode 42 of electrode 4 constitute one pair of electrodes.
Embodiment 3
Based on embodiment 2, bio-sensing electrode is established in the top layer and floor plane electrode of embodiment 2.Fig. 3 (a)~ (c) it is respectively applicating example of the plane electrode combination for Electrode-biofilm sensing based on the embodiment of the present invention 2.Wherein, Fig. 3 (a) it is the schematic diagram of application structure, Fig. 3 (b) and Fig. 3 (c) are with the schematic diagram of the A-A section view angle of field of Fig. 3 (a).The application The only applicating example of the plane electrode combination of 3 D stereo interdigital electrode, it is intended to illustrate its sensing mode, be not three-dimensional vertical A kind of unique application of the plane electrode combination of body interdigital electrode for sensing.
As shown in Fig. 3 (a), in the application of this Electrode-biofilm sensing, by two lateral electrodes, 21 He in bottom interdigital electrode 2 22 are used as one pair of electrodes 51, by two lateral electrodes 41 and 42 in top layer interdigital electrode 4 as another pair electrode pair 52.It sacrifices Layer 3 is fixed and is supported between bottom interdigital electrode 2 and top layer interdigital electrode 4 and extends downwardly into substrate 1.Substrate 1 is entire The adhesive layer of 3 D stereo interdigital electrode ensures structural stability.
The embodiment uses the electrode sensing method for extending SNP identification technologies based on Allele Specific.It is quasi- to pass through SNP equipotentials Specific recognition extends DNA chain in electrode surface polymerization enzyme spcificity, will using the elecrtonegativity of DNA molecular phosphate backbones Metal ion in the solution such as silver nitrate, copper chloride is adsorbed onto by electrostatic interaction on DNA skeletons, then use hydroquinone or The reducing agents such as sodium borohydride realize the in-situ reducing of metal nanoparticle, build the metal nano gauze with excellence conductor characteristic Network realizes the transmission of electronics between electrode.
As shown in Fig. 3 (b), it is separately fixed at specific probe 531 and 532 different on electrode pair 51 and 52, is passed through The specificity of SNP each extends over out DNA chain 533 and 534, and same DNA chain 531 is arranged on electrode pair 51, is arranged on electrode pair 52 Same DNA chain 532.Later, such as Fig. 3 (c), respectively with above-mentioned DNA chain 533 and 534 for 535 He of templated synthesis metal nanometer line 536, being formed by metal nanometer line 535 and 536 is respectively connected electrode pair 51 and 52.
The embodiment is the plane electrode combination application of 3 D stereo interdigital electrode, respectively in top layer interdigital electrode and bottom Interdigital electrode respectively establishes different bio-sensings, realizes the detection of two kinds of different DNA chain, illustrates that 3 D stereo of the present invention is interdigital Electrode can realize more substance detections, realize the parallel sensing of more substances.
Embodiment 4
Based on embodiment 1, bio-sensing electrode is established in the top layer and floor plane electrode of embodiment 1.Fig. 4 (a)~ (d) it is respectively schematic diagram of the vertical electrode combination for Electrode-biofilm sensing based on the embodiment of the present invention 1.Wherein, Fig. 4 (a) For the schematic diagram of application structure, Fig. 4 (b)~(d) is with the schematic diagram of the B-B section view angle of field of Fig. 4 (a).The application is only three The applicating example of the vertical electrode combination of the three-dimensional interdigital electrode of dimension, it is intended to illustrate its sensing mode, be not vertical electrode only A kind of one application.
As shown in Fig. 4 (a)~(b), this Electrode-biofilm sensing application in, by the electrode 41 of top layer interdigital electrode 4 with The electrode 21 of bottom interdigital electrode 2 is used as electrode pair 61, by the electricity of the electrode 42 and bottom interdigital electrode 2 of top layer interdigital electrode 4 Pole 22 is used as electrode pair 62.Sacrificial layer 3 is fixed and is supported between bottom interdigital electrode 2 and top layer interdigital electrode 4 and to downward Reach substrate 1.Substrate 1 is the adhesive layer of entire 3 D stereo interdigital electrode, ensures structural stability.Meanwhile the thickness of sacrificial layer 3 Interdigital spacing g1s of the d much smaller than the interdigital spacing g2 and bottom interdigital electrode 2 of top layer interdigital electrode 4 is spent, top layer interdigital electrode 4 Height d1 is much smaller than the interdigital spacing g1 of the interdigital spacing g2 and bottom interdigital electrode 2 of top layer interdigital electrode 4, the interdigital electricity of top layer The interdigital width w2 of pole 4 is less than the interdigital width w1 of bottom interdigital electrode 2.
The embodiment utilizes the elecrtonegativity of DNA molecular phosphate backbones, by the metal ion in the solution such as silver nitrate, copper chloride It is adsorbed onto on DNA skeletons by electrostatic interaction, then the reducing agents such as hydroquinone or sodium borohydride is used to realize metallic nanoparticle The in-situ reducing of son builds the metal nanometer line network with excellence conductor characteristic, realizes the transmission of electronics between electrode.
Such as Fig. 4 (c), in the electrode 41 of top layer interdigital electrode 4 and 42 fixed specific probes 541, in the interdigital electricity of bottom Specific probe 542 is fixed on the electrode 21 of pole 2 and 22, specific probe 541 and 542 can distinguish specific recognition target dna Chain 543, to be connected with DNA chain 543 between specific probe 541 and specific probe 542.
As shown in Fig. 4 (d), using the elecrtonegativity of DNA molecular phosphate backbones, with DNA chain 543 for templated synthesis metal nano Line 544, metal nanometer line 544 make the conducting of top layer interdigital electrode 4 and bottom interdigital electrode 2 after depositing.
The embodiment is the vertical electrode combination application of 3 D stereo interdigital electrode, is pitched in top layer interdigital electrode 4 and bottom Electrode sensing is realized between finger electrode 2.Meanwhile using 3 thickness of the sacrificial layer of nanometer scale, realizing the interdigital electrode of nanometer scale Interval, effectively increases the integrated area of interdigital electrode in unit volume in sensitive zones, interdigital electrode can be greatly improved Detectivity solves the contradiction between the surface area and detectivity of classic flat-plate interdigital electrode.

Claims (7)

1. a kind of 3 D stereo interdigital electrode, it is characterised in that:It is interdigital including the substrate (1) that is sequentially arranged from top to bottom, bottom Electrode (2), sacrificial layer (3) and top layer interdigital electrode (4);Bottom interdigital electrode (2) and top layer interdigital electrode (4) are positioned at difference Interdigital electrode in the face of plane, sacrificial layer (3) is fixed and is supported between bottom interdigital electrode (2) and top layer interdigital electrode (4), Substrate (1) is the adhesive layer of entire 3 D stereo interdigital electrode.
2. a kind of 3 D stereo interdigital electrode according to claim 1, it is characterised in that:The bottom interdigital electrode (2) Positioned at plane A, it is parallel that top layer interdigital electrode (4) is located at plane C, plane A and plane C.
3. a kind of 3 D stereo interdigital electrode according to claim 1, it is characterised in that:The substrate (1) and sacrifice Layer (3) is insulating materials so that between bottom interdigital electrode (2) and top layer interdigital electrode (4) and in bottom interdigital electrode (2) It is electrically insulated between portion and top layer interdigital electrode (4) inside.
4. a kind of 3 D stereo interdigital electrode according to claim 1, it is characterised in that:The substrate (1) and sacrifice Layer (3) is using polymer, semi-conducting material etc..
5. a kind of 3 D stereo interdigital electrode according to claim 1, it is characterised in that:Sacrificial layer (3) arrangement It is spaced apart the hole equipped with periodic arrangement between bottom interdigital electrode (2) and top layer interdigital electrode (4) and along interdigital direction Hole (31).
6. a kind of 3 D stereo interdigital electrode according to claim 1, it is characterised in that:Sacrificial layer (3) arrangement It is spaced apart the hole (31) equipped with periodic arrangement between top layer interdigital electrode (4) and substrate (1) and along interdigital direction.
7. a kind of 3 D stereo interdigital electrode according to claim 1, it is characterised in that:The bottom interdigital electrode (2) and on two Different electrodes of top layer interdigital electrode (4) specific probe is fixed, connection DNA chain is modified on specific probe, Metal nanometer line is synthesized by DNA chain, two Different electrodes are connected.
CN201810307445.2A 2018-04-08 2018-04-08 Three-dimensional interdigital electrode Active CN108375613B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810307445.2A CN108375613B (en) 2018-04-08 2018-04-08 Three-dimensional interdigital electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810307445.2A CN108375613B (en) 2018-04-08 2018-04-08 Three-dimensional interdigital electrode

Publications (2)

Publication Number Publication Date
CN108375613A true CN108375613A (en) 2018-08-07
CN108375613B CN108375613B (en) 2023-08-22

Family

ID=63032114

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810307445.2A Active CN108375613B (en) 2018-04-08 2018-04-08 Three-dimensional interdigital electrode

Country Status (1)

Country Link
CN (1) CN108375613B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110808405A (en) * 2019-11-15 2020-02-18 五邑大学 Lithium battery based on interdigital electrode structure
CN111122683A (en) * 2019-12-12 2020-05-08 同济大学 Electrochemical method for detecting cephalosporin by three-dimensional interdigital printed electrode
CN113924167A (en) * 2019-06-05 2022-01-11 捷豹路虎有限公司 Device for manipulating a substance, vehicle and assembly comprising a device and method of using a device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009106906A1 (en) * 2008-02-27 2009-09-03 Budapesti Müszaki És Gazdaságtudományi Egyetem Interdigitated electrode
CN102301221A (en) * 2009-01-27 2011-12-28 皇家飞利浦电子股份有限公司 Fingered electrodes for microfluidic single particle analysis
CN102384934A (en) * 2011-09-23 2012-03-21 东南大学 Method for preparing nano gap electrode on surface of nanopore
CN102832195A (en) * 2012-08-27 2012-12-19 集美大学 Three-dimensional capacitor structure
CN104332513A (en) * 2014-10-22 2015-02-04 中国石油大学(北京) NiO nanowire ultraviolet light detector and preparation method and application thereof
CN106324077A (en) * 2016-08-03 2017-01-11 西安交通大学 Gold-nanometer-hole-film ionizing thionyl-fluoride sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009106906A1 (en) * 2008-02-27 2009-09-03 Budapesti Müszaki És Gazdaságtudományi Egyetem Interdigitated electrode
CN102301221A (en) * 2009-01-27 2011-12-28 皇家飞利浦电子股份有限公司 Fingered electrodes for microfluidic single particle analysis
CN102384934A (en) * 2011-09-23 2012-03-21 东南大学 Method for preparing nano gap electrode on surface of nanopore
CN102832195A (en) * 2012-08-27 2012-12-19 集美大学 Three-dimensional capacitor structure
CN104332513A (en) * 2014-10-22 2015-02-04 中国石油大学(北京) NiO nanowire ultraviolet light detector and preparation method and application thereof
CN106324077A (en) * 2016-08-03 2017-01-11 西安交通大学 Gold-nanometer-hole-film ionizing thionyl-fluoride sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113924167A (en) * 2019-06-05 2022-01-11 捷豹路虎有限公司 Device for manipulating a substance, vehicle and assembly comprising a device and method of using a device
CN110808405A (en) * 2019-11-15 2020-02-18 五邑大学 Lithium battery based on interdigital electrode structure
CN111122683A (en) * 2019-12-12 2020-05-08 同济大学 Electrochemical method for detecting cephalosporin by three-dimensional interdigital printed electrode

Also Published As

Publication number Publication date
CN108375613B (en) 2023-08-22

Similar Documents

Publication Publication Date Title
CN104838249B (en) Biosensor apparatus and method including local desalination system
CN108375613A (en) 3 D stereo interdigital electrode
Farzin et al. Employing AgNPs doped amidoxime-modified polyacrylonitrile (PAN-oxime) nanofibers for target induced strand displacement-based electrochemical aptasensing of CA125 in ovarian cancer patients
Zhou et al. Two orders-of-magnitude enhancement in the electrochemiluminescence of Ru (bpy) 32+ by vertically ordered silica mesochannels
Hasanzadeh et al. An innovative immunosensor for detection of tumor suppressor protein p53 in unprocessed human plasma and cancer cell lysates
CN102692439B (en) Microelectrode system having double-spiral structure, electrochemical sensor and preparation method of the microelectrode system having double-spiral structure
KR101339296B1 (en) A multi­touch force­sensing transparent touch screen based on graphene film
CN104634832B (en) CMOS MEMS capacitive humidity sensors and preparation method thereof
CN110530853A (en) Method based on visualization BPE-ECL technology detection aflatoxin B1
Roushani et al. Screen printed carbon electrode sensor with thiol graphene quantum dots and gold nanoparticles for voltammetric determination of solatol
US20140295573A1 (en) Biosensor with dual gate structure and method for detecting concentration of target protein in a protein solution
KR20120023208A (en) Label-free electrochemical aptamer sensor using nanoparticles
CN208155928U (en) A kind of novel three-dimensional solid interdigital electrode
Wang et al. Electrochemical aptasensor based on exonuclease III-mediated signal amplification for sensitive detection of vomitoxin in cornmeal
KR101024325B1 (en) biomolecular sensors with a plurality of metal plates and method of producing the same
TWM368849U (en) Multi-point capacitive touch sensor
CN203275356U (en) Multi-channel printed electrode array chip
CN108120752A (en) A kind of sensor chip and preparation method with air bridges reference electrode light-shielding structure
CN110376256B (en) Sensor based on nanowire array and suitable for colony cell particle detection and detection method using sensor
KR101709914B1 (en) Bio-sensor having interdigitated microelectrode using hydrogel
CN103477218B (en) For the manufacture of the method for the device for validating analysis thing and device and application thereof
CN104422908A (en) Preparation process of magnetic sensation device
CN103645316A (en) Streptavidin functionalized semiconductor nano material-based tumor marker electrochemical immunosensor and preparation method thereof
Schlecht et al. Detection of Rev peptides with impedance-sensors—Comparison of device-geometries
CN207816892U (en) A kind of sensor chip with air bridges reference electrode light-shielding structure

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant