CN108364900A - A kind of cylinder calibration console - Google Patents
A kind of cylinder calibration console Download PDFInfo
- Publication number
- CN108364900A CN108364900A CN201810284180.9A CN201810284180A CN108364900A CN 108364900 A CN108364900 A CN 108364900A CN 201810284180 A CN201810284180 A CN 201810284180A CN 108364900 A CN108364900 A CN 108364900A
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- Prior art keywords
- cylinder
- solenoid valve
- fixing bracket
- guide table
- air cylinder
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- 230000033001 locomotion Effects 0.000 claims abstract description 32
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 9
- 238000009434 installation Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 230000005540 biological transmission Effects 0.000 abstract description 2
- 230000007246 mechanism Effects 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 description 11
- 239000004020 conductor Substances 0.000 description 3
- 230000008602 contraction Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of cylinder calibration consoles, including fixing bracket, the fixing bracket bottom is provided with Z-direction linear motion unit, Z-direction linear motion unit top connects R rotary motion units, R rotary motion units top connects plummer, the top of plummer passes through the round mouth on supporting and mounting bracket top, and the fixing bracket bottom is symmetrically arranged in guide table formula cylinder front and rear sides；Present invention reasonable design in structure, the present invention can realize the quick positioning of wafer, the working efficiency of equipment can greatly be improved, the being switched fast when positioning of size dimension wafer may be implemented simultaneously, keep the use scope of the calibration console wider, and this cylinder calibration console manufacturing cost is low, it is easy to operate, the configuration of the present invention is simple is easily installed and debugs；It is at low cost, the transmission mechanisms such as servo motor, leading screw are not needed, therefore control section is also relatively easy；Prealignment process steps are simple, efficient.
Description
Technical field
The present invention relates to semiconductor processing technology fields, specifically provide a kind of cylinder calibration console.
Background technology
Semiconductor (semiconductor) refers under room temperature electric conductivity between conductor (conductor) and insulator
(insulator) material between.Semiconductor has a wide range of applications on radio, television set and thermometric.Such as diode
It is exactly the device using semiconductor fabrication.Semiconductor, which refers to a kind of electric conductivity, to be controlled, range can from insulator to conductor it
Between material.No matter from the perspective of science and technology or economic development, the importance of semiconductor is all very huge.Today is big
Partial electronic product, as the core cell in computer, mobile phone or digital audio tape all has pole with semiconductor
For close connection.Common semi-conducting material has silicon, germanium, GaAs etc., and silicon is even more in various semi-conducting materials, in business
Using upper most influential one kind.
With semiconductor equipment diversification, also more and more to wafer-process technique, many techniques are to wafer position precision
It is required that not high, but quickly, this just proposes prealignment device new requirement to corresponding detection speed：Detection method and step
Make every effort to simple, improve detection efficiency, precision can be reduced suitably, and since precision reduces, and cost is also required to reduce and just can guarantee
Suitability, this just needs to redesign a low cost, high efficiency, prealignment device easy to operate.
Therefore, those skilled in the art provide a kind of cylinder calibration console, to solve mentioned above in the background art ask
Topic.
Invention content
The purpose of the present invention is to provide a kind of cylinder calibration consoles, to solve the problems mentioned in the above background technology.
To achieve the above object, the present invention provides the following technical solutions：
A kind of cylinder calibration console, including fixing bracket, the fixing bracket bottom are provided with Z-direction linear motion unit, Z-direction
Linear motion unit top connects R rotary motion units, and R rotary motion units top connects plummer, and the top of plummer is worn
The round mouth on supporting and mounting bracket top is crossed, the fixing bracket bottom is symmetrically arranged in guide table formula cylinder front and rear sides, described solid
Fixed rack upper end is symmetrically arranged with left platform air cylinder and right platform air cylinder, left platform air cylinder and right platform gas at left and right sides of round mouth
Left tooling and right tooling are correspondingly arranged on cylinder, the fixing bracket upper end is at the opposite place of left platform air cylinder and right platform air cylinder
It is respectively arranged with platform air cylinder left limit part and platform air cylinder right limit part, is provided on rear side of the fixing bracket upper end and seeks side list
Member；It is a kind of photoelectric sensor to seek side unit main body, is fixed in the linear guide that wafer is positioned radially, and guide rail is fixed on
It on fixed rack, can be moved radially along wafer, seeking side unit when size dimension wafer switches is moved to corresponding position；Left and right tooling
It is driven respectively by platform air cylinder, it can be along moving radially perpendicular to wafer-supporting platform axis, to the calibration wafer center of circle.In different height
The calibration in the size dimension wafer center of circle can be accepted respectively；Wafer-supporting platform unit with vacuum suction effect is coaxially fixed in the rotation of R axis
It transports on moving cell, the wafer adsorbed is driven to be rotated jointly with it.
As improvement：The Z-direction linear motion unit includes guide table formula cylinder and guide table formula cylinder locating part, the guide table
Formula cylinder is arranged in fixing bracket lower part, and guide table formula cylinder top is provided with connector, and connector top connects R rotary motion lists
Member, the guide table formula cylinder locating part are symmetricly set on the front and rear sides of the guide table formula cylinder of fixing bracket lower part, guide table formula gas
The top of cylinder locating part is arranged in the limiting slot of connector side；In linear motion unit, Z-direction moves subelement by guide table formula
Cylinder drives, the positioning for the displacement that fixes to cylinder, then Z-direction, which has, originates and terminate two positions, is used for size dimension wafer
It is used when switching.R axis rotary motion units are the DD motors that torque motor directly drives, and precision is improved equipped with grating scale feedback, can
As Z-direction movement subelement moves up and down.
As being further improved：The side unit of seeking includes the linear guide, pedestal and installing arm, the linear guide top
Be slidably connected pedestal, and the pedestal upper end connects installing arm by fixing piece, and installing arm upper front is fixedly connected with photoelectric sensing
Device.
As being further improved：The fixing bracket bottom right connects connecting terminal and terminal plate by DIN guide rails.
As being further improved：The fixing bracket bottom right is provided with solenoid valve mounting plate, on solenoid valve mounting plate
Portion is separately installed with platform air cylinder solenoid valve, guide table formula cylinder solenoid valve and vacuum breaking solenoid valve, the platform air cylinder electromagnetism
Valve, guide table formula cylinder solenoid valve and vacuum breaking solenoid valve are separately connected left platform air cylinder by gas-tpe fitting and tracheae, the right side is put down
Platform cylinder, guide table formula cylinder and plummer.
As being further improved：The fixing bracket rear portion is provided with digital-display air pressure table, and the gas outlet of digital-display air pressure table is logical
It crosses gas-tpe fitting and tracheae is separately connected platform air cylinder solenoid valve, guide table formula cylinder solenoid valve and vacuum breaking solenoid valve.
As being further improved：The fixing bracket bottom rear is provided with controller, and controller is electrically connected R rotation fortune
Moving cell, photoelectric sensor, connecting terminal, terminal plate, platform air cylinder solenoid valve, guide table formula cylinder solenoid valve, vacuum breaking electricity
Magnet valve and digital display air gauge.
Compared with the prior art, the advantages of the present invention are as follows：Present invention reasonable design in structure, the present invention can realize
The quick positioning of wafer can greatly improve the working efficiency of equipment, while may be implemented when size dimension wafer positions
It is switched fast, keeps the use scope of the calibration console wider, and this cylinder calibration console manufacturing cost is low, easy to operate, the present invention
It is simple in structure, it is easily installed and debugs；It is at low cost, do not need the transmission mechanisms such as servo motor, leading screw, therefore control section yet phase
To simple；Prealignment process steps are simple, efficient.
Description of the drawings
Below in conjunction with the accompanying drawings and embodiment the present invention is described in further detail：
Fig. 1 is the side view of cylinder calibration console；
Fig. 2 is another visual angle side view of cylinder calibration console.
In figure：Fixing bracket 1, wafer-supporting platform 2, photoelectric sensor 3, the linear guide 4, left tooling 5, right tooling 6, left platform gas
Cylinder 7, right platform air cylinder 8, platform air cylinder left limit part 9, platform air cylinder right limit part 10, guide table formula cylinder locating part 11, guide table
Formula cylinder 12, R rotary motion units 13, connector 14, controller 15, solenoid valve mounting plate 16, digital-display air pressure table 17, platform gas
Cylinder solenoid valve 18, guide table formula cylinder solenoid valve 19, vacuum breaking solenoid valve 20,21 terminal plate 22 of gas-tpe fitting, connecting terminal 23,
DIN guide rails 24, fixing piece 25.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
It please refers to Fig.1 with 2, in the embodiment of the present invention, a kind of cylinder calibration console, including fixing bracket 1, the fixing bracket
1 bottom is provided with Z-direction linear motion unit, and Z-direction linear motion unit top connects R rotary motion units 13, R rotary motion lists
First 13 tops connect plummer 2, and plummer 2 is passed through with R gyrator unit rotations, the top of plummer 2 in supporting and mounting bracket 1
The round mouth in portion, 1 bottom of the fixing bracket are symmetrically arranged in 12 front and rear sides of guide table formula cylinder, 1 upper end of the fixing bracket
It is symmetrically arranged with left platform air cylinder 7 and right platform air cylinder 8 at left and right sides of round mouth, is corresponded on left platform air cylinder and right platform air cylinder
It is provided with left tooling 5 and right tooling 6, opposite punishment of 1 upper end of the fixing bracket in left platform air cylinder 7 and right platform air cylinder 8
It is not provided with platform air cylinder left limit part 9 and platform air cylinder right limit part 10, is provided on rear side of 1 upper end of the fixing bracket and seeks side
Unit；Left platform air cylinder 7 and right platform air cylinder 8 can be with left tooling 5 and right toolings 6 along the diameter of the wafer after determining the center of circle
It shrinks and expands to direction, wafer is placed on the process on plummer 2 by expansion state for wafer manipulator, and contraction process is used
Calibration in the wafer center of circle, the state after contraction determine the precision of wafer center of circle calibration, therefore need to lead in contraction state
It crosses platform air cylinder left limit part 9 and platform air cylinder right limit part 10 accurately limits left platform air cylinder 7 and right platform air cylinder 8
Position.
The Z-direction linear motion unit includes guide table formula cylinder 12 and guide table formula cylinder locating part 11, the guide table formula gas
Cylinder 12 is arranged in 1 lower part of fixing bracket, and 12 top of guide table formula cylinder is provided with connector 14, and 14 top of connector connects R rotations
Moving cell 13, the guide table formula cylinder locating part 11 are symmetricly set on front and back the two of the guide table formula cylinder 12 of fixing bracket lower part
The top of side, guide table formula cylinder locating part 11 is arranged in the limiting slot of 14 side of connector；Guide table formula cylinder 12 utilizes guide table
Formula cylinder locating part 11 is equipped with along Z-direction originates and terminates two positions, and positional precision ensures by guide table formula cylinder locating part 11,
Wherein initial position is for accepting and calibrating small size cun wafer, and final position is for accepting and calibrating large scale wafer.
The side unit of seeking includes the linear guide 4, pedestal and installing arm, and 4 top of the linear guide is slidably connected pedestal,
The pedestal upper end connects installing arm by fixing piece 25, and installing arm upper front is fixedly connected with photoelectric sensor 3；The linear guide
The radial direction of wafer of 4 directions of motion after determining center location, starting and the limit of final position are set by the linear guide 4,
The linear guide 4 is respectively used to small size and large scale wafer when photoelectric sensor 3 being driven to be positioned at initial position and final position
Seek side, due to photoelectric sensor 3 along the direction (i.e. along Z-direction) of light apart from larger, replace small size and large scale wafer
When photoelectric sensor be not necessarily to Z-direction displacement.
1 bottom right of the fixing bracket connects connecting terminal 23 and terminal plate 22 by DIN guide rails.
1 bottom right of the fixing bracket is provided with solenoid valve mounting plate 16, and 16 top of solenoid valve mounting plate is installed respectively
There are platform air cylinder solenoid valve 18, guide table formula cylinder solenoid valve 19 and a vacuum breaking solenoid valve 20, the platform air cylinder solenoid valve 18,
Guide table formula cylinder solenoid valve 19 and vacuum breaking solenoid valve 20 by gas-tpe fitting 21 and tracheae be separately connected left platform air cylinder 7,
Right platform air cylinder 8, guide table formula cylinder 12 and plummer 2.
1 rear portion of the fixing bracket is provided with digital-display air pressure table 17, and the gas outlet of digital-display air pressure table 17 passes through gas-tpe fitting
21 and tracheae be separately connected platform air cylinder solenoid valve 18, guide table formula cylinder solenoid valve 19 and vacuum breaking solenoid valve 20.
1 bottom rear of the fixing bracket is provided with controller 15, controller 15 be electrically connected R rotary motion units 13,
Photoelectric sensor 3, connecting terminal 23, terminal plate 22, platform air cylinder solenoid valve 18, guide table formula cylinder solenoid valve 19, vacuum breaking
Solenoid valve 20 and digital display air gauge 17.
The present invention operation principle be：The left tooling 5 and right tooling 6 in the calibration wafer center of circle, which are in, when the course of work starts expands
Wafer is placed on wafer-supporting platform 2 by the state of opening, wafer manipulator, makes wafer between two valve toolings, starts platform air cylinder electricity
Magnet valve 18 control simultaneously left platform air cylinder 7 and right platform air cylinder 8 drive two valves symmetrically left tooling 5 and right tooling 6 to center of circle side
To contractile motion to the position of platform air cylinder left limit part 9 and platform air cylinder right limit part 10, pushed by the arc-shaped edges of tooling
Wafer makes its center of circle reach designated position, completes the calibration to the wafer center of circle, and then wafer-supporting platform 2 lives wafer adsorption, left tooling 5
It is restored to expansion state under the drive of left platform air cylinder 7 and right platform air cylinder 8 with right tooling 6, adsorbs the wafer-supporting platform 2 after wafer
It is rotated together under the drive of R rotary motion units 13, the position for lacking side is determined using photoelectric sensor 3, until lacking side rotation
Stop when to designated position, completes the positioning in the wafer center of circle and scarce side at this time, wafer-supporting platform 2 is in vacuum breaking solenoid valve 20
Effect is lower to discharge wafer, and wafer is taken away, is put into lower wafer and repeats the above process by wafer manipulator；Small very little wafer switches to
When big cun of wafer, guide table formula cylinder 12 is controlled under the action of guide table formula cylinder solenoid valve 19 and drives 13 He of R rotary motion units
Wafer-supporting platform 2 rises, and reaches designated position using guide table formula cylinder locating part 11 and keeps；Large scale wafer switches to small size crystalline substance
Bowlder is still under the action of guide table formula cylinder solenoid valve 19 and controls 12 drive R rotary motion units of guide table formula cylinder, 13 He
Wafer-supporting platform 2 drops to extreme lower position.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case of without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Profit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent requirements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiment being appreciated that.
Claims (7)
1. a kind of cylinder calibration console, including fixing bracket (1), it is characterised in that：Fixing bracket (1) bottom is provided with Z-direction
Linear motion unit, Z-direction linear motion unit top connect R rotary motion units (13), and R rotary motion units (13) top connects
Plummer (2) is connect, the top of plummer (2) passes through the round mouth on supporting and mounting bracket (1) top, and fixing bracket (1) bottom exists
Guide table formula cylinder (12) front and rear sides are symmetrically arranged with, and fixing bracket (1) upper end is symmetrically arranged at left and right sides of round mouth
Left platform air cylinder (7) and right platform air cylinder (8) are correspondingly arranged on left tooling (5) and the right side on left platform air cylinder and right platform air cylinder
Tooling (6), fixing bracket (1) upper end are respectively arranged with flat at the opposite place of left platform air cylinder (7) and right platform air cylinder (8)
Platform cylinder left limit part (9) and platform air cylinder right limit part (10), fixing bracket (1) the upper end rear side, which is provided with, seeks side list
Member.
2. cylinder calibration console according to claim 1, it is characterised in that：The Z-direction linear motion unit includes guide table formula gas
Cylinder (12) and guide table formula cylinder locating part (11), the guide table formula cylinder (12) are arranged in fixing bracket (1) lower part, guide table formula gas
Cylinder (12) top is provided with connector (14), and connector (14) top connects R rotary motion units (13), the guide table formula cylinder
Locating part (11) is symmetricly set on the front and rear sides of the guide table formula cylinder (12) of fixing bracket lower part, guide table formula cylinder locating part
(11) top is arranged in the limiting slot of connector (4) side.
3. cylinder calibration console according to claim 1, it is characterised in that：The side unit of seeking includes the linear guide (4), pedestal
And installing arm, the linear guide (4) top are slidably connected pedestal, the pedestal upper end passes through fixing piece (25) connection installation
Arm, installing arm upper front are fixedly connected with photoelectric sensor (3).
4. cylinder calibration console according to claim 1, it is characterised in that：Fixing bracket (1) bottom right is led by DIN
Rail connects connecting terminal (23) and terminal plate (22).
5. cylinder calibration console according to claim 1 or claim 2, it is characterised in that：Fixing bracket (1) bottom right is provided with
Solenoid valve mounting plate (16), solenoid valve mounting plate (16) top are separately installed with platform air cylinder solenoid valve (18), guide table formula cylinder
Solenoid valve (19) and vacuum breaking solenoid valve (20), the platform air cylinder solenoid valve (18), guide table formula cylinder solenoid valve (19) and
Vacuum breaking solenoid valve (20) by gas-tpe fitting (21) and tracheae be separately connected left platform air cylinder (7), right platform air cylinder (8),
Guide table formula cylinder (12) and plummer (2).
6. cylinder calibration console according to claim 5, it is characterised in that：Fixing bracket (1) rear portion is provided with digital display gas
Table (17) is pressed, the gas outlet of digital-display air pressure table (17) is separately connected platform air cylinder solenoid valve by gas-tpe fitting (21) and tracheae
(18), guide table formula cylinder solenoid valve (19) and vacuum breaking solenoid valve (20).
7. cylinder calibration console according to claim 6, it is characterised in that：Fixing bracket (1) bottom rear is provided with control
Device (15) processed, controller (15) are electrically connected R rotary motion units (13), photoelectric sensor (3), connecting terminal (23), wiring
Plate (22), platform air cylinder solenoid valve (18), guide table formula cylinder solenoid valve (19), vacuum breaking solenoid valve (20) and digital display air gauge
(17)。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810284180.9A CN108364900B (en) | 2018-04-02 | 2018-04-02 | Cylinder calibration table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810284180.9A CN108364900B (en) | 2018-04-02 | 2018-04-02 | Cylinder calibration table |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108364900A true CN108364900A (en) | 2018-08-03 |
| CN108364900B CN108364900B (en) | 2024-03-08 |
Family
ID=63001969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810284180.9A Active CN108364900B (en) | 2018-04-02 | 2018-04-02 | Cylinder calibration table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108364900B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103730400A (en) * | 2012-10-16 | 2014-04-16 | 沈阳芯源微电子设备有限公司 | Centring device for wafers of various sizes |
| CN204857695U (en) * | 2015-07-16 | 2015-12-09 | 上海微松工业自动化有限公司 | High -efficient wafer prealignment controlling means |
| JP2016054169A (en) * | 2014-09-02 | 2016-04-14 | リンテック株式会社 | Alignment device and alignment method |
| CN208157385U (en) * | 2018-04-02 | 2018-11-27 | 无锡星微科技有限公司 | A kind of cylinder calibration console |
-
2018
- 2018-04-02 CN CN201810284180.9A patent/CN108364900B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103730400A (en) * | 2012-10-16 | 2014-04-16 | 沈阳芯源微电子设备有限公司 | Centring device for wafers of various sizes |
| JP2016054169A (en) * | 2014-09-02 | 2016-04-14 | リンテック株式会社 | Alignment device and alignment method |
| CN204857695U (en) * | 2015-07-16 | 2015-12-09 | 上海微松工业自动化有限公司 | High -efficient wafer prealignment controlling means |
| CN208157385U (en) * | 2018-04-02 | 2018-11-27 | 无锡星微科技有限公司 | A kind of cylinder calibration console |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108364900B (en) | 2024-03-08 |
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