CN108362910A - A kind of open loop micro-acceleration gauge - Google Patents
A kind of open loop micro-acceleration gauge Download PDFInfo
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- CN108362910A CN108362910A CN201810137325.2A CN201810137325A CN108362910A CN 108362910 A CN108362910 A CN 108362910A CN 201810137325 A CN201810137325 A CN 201810137325A CN 108362910 A CN108362910 A CN 108362910A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
Abstract
The present invention discloses a kind of open loop micro-acceleration gauge.The sensitive structure equivalent circuit of the open loop micro-acceleration gauge includes top crown, bottom crown, movable agency and corrective capacity, and top crown is connected with positive pole by first switch and is connect with negative feedback network by second switch；Bottom crown is switched by third to be connected with power cathode and is connect with negative feedback network by the 4th switch；Two capacitance compensation arrays of corrective capacity are connected, and the top crown of the first capacitance compensation array is connect with negative feedback network by the 5th switch and is connected with positive pole by the 6th switch；The bottom crown of second capacitance compensation array is connect with negative feedback network by the 7th switch and is connected with power cathode by the 8th switch.The connection relation that the present invention passes through change corrective capacity and sensitive structure and subsequent process circuit, nonlinear fitting compensation tache is digitized before output can be saved, hardware spending is reduced, while avoiding needing gamma correction to cause efficiency low and problem of high cost when production.
Description
Technical field
The present invention relates to microcomputer electrical domains, more particularly to a kind of open loop micro-acceleration gauge.
Background technology
Micro-acceleration gauge be using a mass block as sensitive structure, when carrier has the acceleration of a direction, quality
Block is deviated to a direction, and then by electrode measurement, this displacement (or generating the inertia force of offset) is scaled acceleration.
Because there is parasitic or stray capacitance influence in sensitive structure so that sensitive structure deviates perfect condition, and the acceleration of measurement is deposited
In error.Existing method is that the zero compensation of open loop micro-acceleration gauge is realized by building compensating electric capacity array, in micro- acceleration
Gamma correction is carried out by nonlinear fitting compensating module before degree meter output, to lower the error of output result.But right and wrong
The process that linear fit compensating module obtains non-linear correction parameter needs to use precision centrifuge, and equipment is expensive, needs simultaneously
It puts into a large amount of manpower and carries out acceleration transducer correction.Therefore, traditional open loop micro-acceleration gauge cost is higher, and before production
It is low to correct efficiency.
Invention content
The object of the present invention is to provide a kind of open loop micro-acceleration gauges, by the structure inside changing, to improve correction effect
Rate reduces cost.
To achieve the above object, the present invention provides following schemes：
A kind of open loop micro-acceleration gauge, the open loop micro-acceleration gauge include：Sensitive structure equivalent circuit, multiple simulations are opened
Pass, charge amplifier, charge transport circuit, charge integrator and negative-feedback network；
The sensitive structure equivalent circuit includes top crown, bottom crown, movable agency and corrective capacity, the movable agency
Between the top crown and the bottom crown；The top crown forms third capacitance, the upper pole with the movable agency
Plate is connected with positive pole by the first analog switch and is connect with the negative feedback network by the second analog switch；It is described can
Motivation structure forms the 4th capacitance with the bottom crown, and the bottom crown is connected and is passed through with power cathode by third analog switch
4th analog switch is connect with the negative feedback network；
The corrective capacity includes the first capacitance compensation array, the second capacitance compensation array；The first capacitance compensation battle array
Row are connected with the second capacitance compensation array, the bottom crown of the first capacitance compensation array and the second capacitance compensation battle array
The top crown of row connects；The top crown of the first capacitance compensation array is connected by the 5th analog switch and the negative feedback network
It connects and is connected with the positive pole by the 6th analog switch；The bottom crown of the second capacitance compensation array passes through the 7th mould
Quasi- switch connect with the negative feedback network and is connected with the power cathode by the 8th analog switch；
The first capacitance compensation array is in parallel with the third capacitance, the second capacitance compensation array and the described 4th
Capacitance is in parallel；The movable agency is connected to the bottom crown of the first capacitance compensation array and the second capacitance compensation array
Top crown between connecting line on, while the movable agency is connected to the charge amplifier；
The output end of the charge amplifier connects the charge integrator, the charge by the charge delivery circuit
The output end of integrator connects the negative-feedback network；
The open and-shut mode of first analog switch and second analog switch is on the contrary, when first analog switch closes
When conjunction, second analog switch disconnects；When first analog switch disconnects, second analog switch is closed；It is described
First analog switch, the third analog switch, the 5th analog switch, the open and-shut mode of the 7th analog switch are homogeneous
Together, the opening and closing of second analog switch, the 4th analog switch, the 6th analog switch, the 8th analog switch
State all same.
Optionally, top crown, movable agency and the bottom crown of the sensitive structure equivalent circuit are all made of heavily doped silicon material
Material.
Optionally, the movable agency of the sensitive structure equivalent circuit specifically includes：Movable mass, frame, cantilever beam；
One end of the movable mass is fixed on by the cantilever beam on the frame of side, the other end of the movable mass with
The frame of the other side does not contact；Two are filled between the upper surface of the frame and the top crown of the sensitive structure equivalent circuit
Silica material is also filled with silica between the lower surface of the frame and the bottom crown of the sensitive structure equivalent circuit
Material.
Optionally, the stray capacitance C that the third capacitance generatesf3With the capacitance C of the first capacitance compensation arraycom1Phase
Deng；The stray capacitance C that 4th capacitance generatesf4With the capacitance C of the second capacitance compensation arraycom2It is equal.
Optionally, the movable agency is connected to the charge amplifier, specifically includes：
The movable agency by the 9th analog switch connects the normal phase input end of the charge amplifier and by the ten
Analog switch connects the inverting input of the charge amplifier, and the 9th analog switch is opened with first analog switch
Closed state is identical, and the tenth analog switch is identical as the open and-shut mode of the second analog switch.
Optionally, the charge delivery circuit includes the 5th capacitance；The top crown of 5th capacitance passes through the 11st mould
Quasi- switch is grounded and connects the output end of the charge amplifier by the 12nd analog switch；The bottom crown of 5th capacitance
The inverting input of the charge integrator is connected by the 13rd analog switch and is grounded by the 14th analog switch；It is described
The positive input end grounding of charge integrator；11st analog switch, the 13rd analog switch, first simulation
The open and-shut mode all same of switch, the 12nd analog switch, the 14th analog switch, second analog switch
Open and-shut mode all same.
Optionally, the charge amplifier includes the first operational amplifier and the 6th capacitance；First operational amplifier
Inverting input and the output end of first operational amplifier between connect the 6th capacitance and the 15th analog switch；
6th capacitance is in parallel with the 15th analog switch, and the 15th analog switch is opened with first analog switch
Closed state is identical.
Optionally, the charge integrator includes second operational amplifier and the 7th capacitance, the second operational amplifier
Inverting input and the output end of the second operational amplifier between connect the 7th capacitance.
According to specific embodiment provided by the invention, the invention discloses following technique effects：
The present invention passes through the first compensating electric capacity array of ingenious change and the second compensated array and sensitive structure and subsequent processing
The connection relation of circuit, can be achieved at the same time accelerometer zero and gamma correction so that simulation output VM and acceleration a are straight
It is connected into linear relationship.Nonlinear fitting compensation tache is digitized before output can be saved, hardware spending is reduced, avoids centrifugal calibration
Required high input, while avoiding the problem for needing gamma correction to cause efficiency low when production.
Description of the drawings
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the present invention
Example, for those of ordinary skill in the art, without having to pay creative labor, can also be according to these attached drawings
Obtain other attached drawings.
Fig. 1 is the structural schematic diagram of open loop micro-acceleration gauge of the present invention；
Fig. 2 is the three-dimensional structure diagram of sensitive structure equivalent circuit in open loop micro-acceleration gauge of the present invention；
Fig. 3 is the explosive view of sensitive structure equivalent circuit in open loop micro-acceleration gauge of the present invention；
Fig. 4 is the sectional view of sensitive structure equivalent circuit in open loop micro-acceleration gauge of the present invention；
Fig. 5 is the capacitance schematic diagram of sensitive structure equivalent circuit in open loop micro-acceleration gauge of the present invention.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below in conjunction with the accompanying drawings and specific real
Applying mode, the present invention is described in further detail.
Fig. 1 is the structural schematic diagram of open loop micro-acceleration gauge of the present invention.As shown in Figure 1, the open loop micro-acceleration gauge packet
It includes：Sensitive structure equivalent circuit 1, multiple analog switches (being indicated with Φ in figure), charge amplifier 2, charge transport circuit 3, electricity
Lotus integrator 4 and negative-feedback network 5；
The sensitive structure equivalent circuit 1 includes top crown 1-1, bottom crown 1-2, movable agency 1-3 and corrective capacity, institute
Movable agency 1-3 is stated between the top crown 1-1 and the bottom crown 1-2；The top crown 1-1 and the movable agency
Third capacitance C3, the top crown 1-1 is formed between 1-2 to be connected and pass through with positive pole VS by the first analog switch Φ 1
Second analog switch Φ 2 is connect with the negative feedback network 5；Is formed between the movable agency 1-3 and the bottom crown 1-2
Four capacitance C4, the bottom crown 1-2 are connected with power cathode-VS by third analog switch Φ 3 and by the 4th analog switches
Φ 4 is connect with the negative feedback network 5；
The corrective capacity includes the first capacitance compensation array Ccom1, the second capacitance compensation array Ccom2；First capacitance
Compensated array Ccom1With the second capacitance compensation array Ccom2Series connection, the first capacitance compensation array Ccom1Bottom crown with
The second capacitance compensation array Ccom2Top crown connection；The first capacitance compensation array Ccom1Top crown pass through the 5th
Analog switch Φ 5 connect with the negative feedback network 5 and is connected with the positive pole VS by the 6th analog switch Φ 6；Institute
State the second capacitance compensation array Ccom2Bottom crown connect and pass through with the negative feedback network 5 by the 7th analog switch Φ 7
8th analog switch Φ 8 is connected with the power cathode-VS；The upper pole of the movable agency and the sensitive structure equivalent circuit
The stray capacitance C that plate, that is, third capacitance C3 is generatedf3With the capacitance C of the first capacitance compensation arraycom1It is equal；It is described can motivation
The bottom crown stray capacitance C that i.e. the 4th capacitance C4 is generated of structure and the sensitive structure equivalent circuitf4It is mended with second capacitance
Repay the capacitance C of arraycom2It is equal.
The movable agency 1-3's is connected to the first capacitance compensation array Ccom1Bottom crown and second capacitance
Compensated array Ccom2Top crown between connecting line on, while the movable agency 1-3 is also connected with the charge amplifier 2.
The movable agency 1-3 by the 9th analog switch Φ 9 connects the normal phase input end of the charge amplifier 2 and by the tenth mould
Quasi- switch Φ 10 connects the inverting input of the charge amplifier 2.
The output end of the charge amplifier 2 connects the charge integrator 4 by the charge delivery circuit 3, described
The output end of charge integrator 4 connects the negative-feedback network 5.
The charge amplifier 2 includes the first operational amplifier A 1 and the 6th capacitance C6；First operational amplifier A 1
Inverting input and the output end of first operational amplifier A 1 between connect the 6th capacitance C6 and the 15th simulation
Switch Φ 15；6th the capacitance C6 and the 15th analog switch Φ 15 are in parallel.Charge amplifier collects sensitive structure capacitance pair
(third capacitance and the 4th capacitance) COn TAnd CUnder TThe charge of transfer.In 1 clock phases of Φ, feedback capacity C6 is switched on and off short circuit reset.
The intermediate movable plate (movable agency) of 2 clock phases of Φ, 1 reverse side of operational amplifier A and sensitive structure equivalent circuit is connected.This
When capacitance COn TAnd CUnder TOn charge start transfer electric discharge, feedback capacity C6 collects the charge of transfer.
The charge delivery circuit 3 includes the 5th capacitance C5；The top crown of the 5th capacitance C5 passes through the 11st simulation
Switch Φ 11 is grounded and connects the output end of the charge amplifier 2 by the 12nd analog switch Φ 12；5th capacitance
The bottom crown of C5 by the 13rd analog switch Φ 13 connects the inverting input of the charge integrator 4 and by the 14th mould
Quasi- switch Φ 14 is grounded；The positive input end grounding of the charge integrator 4.It is connected respectively to ground at 1 both ends clock phase C5 Φ
With 2 backward end of operational amplifier A.Understand that 2 backward end of operational amplifier A is ground level, i.e. capacitance C5 both end voltages phase by void is short
Deng capacitance C5 electric discharges at this time.In 2 clock phases of Φ, capacitance C5 is coupled with the output of operational amplifier A 1 and calculates amplifier A2 outputs
VM.Operational amplifier A 1 has charge to generate output voltage Vo due to being collected on C5, is pre-charged to capacitance C5.Capacitance C5 two
Electrode plate needs and analog switch accurate fit so that it is negative anti-that the operational amplifier A 2 of charge integrator 2, which exports feedback network 5,
Feedback.
The charge integrator 4 includes second operational amplifier A2 and the 7th capacitance C7, the second operational amplifier A2
Inverting input and the output end of the second operational amplifier A2 between connect the 7th capacitance C7.1 clocks of Φ are opposite
To input termination capacitor C5, collects the charge of its release and it is integrated.2 clock phase reverse input ends of Φ are disconnected with C5, operation
Amplifier A2 outputs are kept.
The output of operational amplifier A 2 is fed back to capacitance C5 and operational amplifier A 1 and sensitive structure by negative feedback network 5
Top crown, intermediate movable plate, bottom crown.Due to the effect of charge integrator 4, profound and negative feedbck is constituted, realizes that charge is certainly flat
Weighing apparatus, i.e., under the action of 1 clock phase supply voltage VS of Φ ,-VS and operational amplifier A 2 export VM, capacitance COn TAnd CUnder TCharging is total
Amount is 0, COn TRefer to the capacitance between movable plate and top crown, CUnder TIt refer to the capacitance between movable plate and bottom crown.
The open and-shut mode of the first analog switch Φ 1 and the second analog switch Φ 2 is on the contrary, pass through clock signal control
System, when the first analog switch Φ 1 is closed, the second analog switch Φ 2 is disconnected；As the first analog switch Φ 1
When disconnection, the second analog switch Φ 2 is closed；When it is implemented, the first analog switch can be enabled mutually to be closed in the first clock,
Second analog switch is mutually closed in second clock, and the first clock phase is mutually complementary with second clock.The first analog switch Φ 1,
The third analog switch Φ 3, the 5th analog switch Φ 5, the 7th analog switch Φ 7, the 9th analog switch
Φ 9, the 11st analog switch Φ 11, the 13rd analog switch Φ 13, the 15th analog switch Φ 15 are opened
Closed state all same；It is the second analog switch Φ 2, the 4th analog switch Φ 4, the 6th analog switch Φ 6, described
8th analog switch Φ 8, the tenth analog switch Φ 10, the 12nd analog switch Φ 12, the 14th simulation are opened
Close the open and-shut mode all same of Φ 14.
Traditional micro-acceleration gauge is connected to positive supply VS in 1 clock phases of Φ, top crown, and bottom crown is connected to negative supply-VS, in
Between movable plate be connected to operational amplifier A 2 export VM, positive-negative power is to COn TAnd CUnder TCharging.In 2 clock phases of Φ, upper and lower pole plate
It is connected to operational amplifier A 2 and exports VM, intermediate movable plate is connected to 1 reverse side of operational amplifier A.At this point, due to operational amplifier
A1 void is short, and reverse side equal with in-phase end voltage is VM, i.e., top crown, intermediate movable plate, bottom crown (electrode voltage is equal,
Capacitance COn TAnd CUnder TElectric discharge, electric charge transfer.In order to realize the accelerometer zero brought due to stray capacitance and nonlinear compensation school
Just, two compensating electric capacity arrays are built and realizes zero compensation.Between first compensating electric capacity array and intermediate movable agency, top crown
The capacitance of formation is in parallel.The capacitance formed between second compensating electric capacity array and intermediate movable agency, bottom crown is in parallel.Pass through tune
The size for saving two compensating electric capacity arrays, can compensate stray capacitance Cft1And Cft2The inconsistent zero-bit problem brought is eliminated and is added
Speedometer zero-bit.Due to compensating electric capacity array and stray capacitance Cf1And Cf2Presence so that accelerometer output voltage VM with plus
There is non-linear relation in speed a.In order to be compensated to accelerometer is non-linear, when application, is compensated by digitlization nonlinear fitting
Link carries out numerical non-linear correction to accelerometer output voltage VM.
Accelerometer simulation output VM and acceleration a is at non-proportional relation.In order to be compensated to non-linear, engineering is considered
Realization usually takes the preceding item several times of formula (1) Taylor expansion as nonlinear compensation simplification error model, as shown in formula (2)：
VM=K0+K1a+K2a2+K3a3 (2)
Apply some discrete acceleration values [a1, a2 ... an] arranged to acceleration transducer by precision centrifuge, simultaneously
The corresponding analog voltage output [VM1, VM2 ... VMn] of accelerometer is observed, through least square fitting, is obtained non-in formula (2)
Linearity correction parameter：K0、K1、K2、K3.After having obtained penalty coefficient, it is necessary to will by digitlization nonlinear fitting compensation tache
Analog voltage acquisition is digital quantity, and using formula (2) calculate and realize gamma correction.
In order to realize that above-mentioned gamma correction, digitlization nonlinear fitting compensation tache should at least have high precision analogue and turn
Change conversion function and data processing computing function.Result after correction is still digital quantity, is even had in certain application environments
The digital quantity after correction is become into analog voltage by digital-to-analogue conversion again.Since formula (2) only takes the low of formula (1) Taylor series
Rank, therefore it is only the approximate expression of non-linear relation in formula (1), can not both entirely accurate reactions nonlinear dependence
System.In addition, needing to use precision centrifuge, equipment expensive during obtaining non-linear correction parameter K0, K1, K2, K3.Simultaneously
It needs to put into a large amount of manpower progress acceleration transducer calibration.Above-mentioned reason causes production efficiency lowly and cost is higher.
The present invention by change two compensating electric capacity arrays and sensitive structure top electrode in detection circuit, target and under
The connection relation of electrode and follow-up signal detection circuit, by eliminating stray capacitance item C simultaneouslyf1And Cf2, movable to solve simultaneously
The zero-bit and nonlinear problem that mechanism frame stray capacitance is brought.
The present invention entirely detects network and still constitutes profound and negative feedbck, and realizes charge self-balancing.In 1 clock phases of Φ, electricity
Source VS ,-VS and the output of operational amplifier A 2 charge to capacitance C3 and C4, the first compensating electric capacity array and the second compensating electric capacity array
Short circuit dischange respectively.In 2 clock phases of Φ, the first compensating electric capacity array and the second compensating electric capacity array intervention effect, when extracting Φ 1
Clock phase capacitance C3 and C4 charging charge.Due to profound and negative feedbck, 2 clock phase capacitance compensation arrays of Φ take out electricity should be with extraction Φ 1
Clock phase capacitance C3 and C4 charge volume is equal in magnitude.Shown in 1 clock phase capacitance C3 and C4 charge volumes of Φ such as formula (3)：
Q=C3 (VM-VS)+C4 (VM+VS) (3)
2 clock phase capacitance compensation arrays of Φ are taken out electricity and are entered shown in formula (4)：
Q=Ccom1(VM-VS)+Ccom2(VM+VS) (4)
Formula (4) and formula (3) are subtracted each other and can be obtained：
C3(VM-VS)+C4(VM+VS)-Ccom1(VM-VS)-Ccom2(VM+VS)=0 (5)
Arrangement can obtain：
By formula COn T=COn+Cf1+Ccom1And CUnder T=CUnder+Cf2+Ccom2Bringing formula (6) into can obtain：
By formula (7) it is found that by adjusting two capacitance compensation arrays size, make its respectively with intermediate movable agency with
The stray capacitance C of upper and lower pole platef1And Cf2It is equal, you can while eliminating zero-bit and nonlinear problem that stray capacitance is brought, formula
(7) can abbreviation be
Wherein, VM indicates that micro-acceleration gauge output voltage values, VS indicate supply voltage value, COnIndicate the equivalent electricity of sensitive structure
Capacitance, that is, third capacitance between road pole plate and movable agency, CUnderIndicate sensitive structure equivalent circuit bottom crown and movable agency
Between capacitance i.e. the 4th capacitance, Cf1Indicate the stray capacitance between sensitive structure equivalent circuit top crown and movable agency, Cf2
Indicate the stray capacitance between sensitive structure equivalent circuit bottom crown and movable agency, Ccom1Indicate the first capacitance compensation array
Capacitance, Ccom2Indicate the capacitance of the second capacitance compensation array.
By the effect of two capacitance compensation arrays, accelerometer output voltage VM and acceleration a are linear, and zero
Position is fully compensated for.
The present invention passes through two compensating electric capacity array C of ingenious changecom1And Ccom2With sensitive structure and subsequent process circuit
Connection relation, while realizing accelerometer zero and gamma correction so that simulation output VM and the directly linear passes acceleration a
System.Digitlization nonlinear fitting compensation tache, small hardware cost can be saved, while avoiding the high throwing needed for centrifugal calibration
Enter.
Fig. 2 is the three-dimensional structure diagram of sensitive structure equivalent circuit in open loop micro-acceleration gauge of the present invention.As shown in Fig. 2, Fig. 2
" sandwich " structure total silicon MEMS sensitive structures made for the present invention.Among sensitive structure top crown 2-1 movable agency 2-2 and
Bottom crown 2-3 is all made of heavily doped silicon material, is isolated by silicon dioxide insulator between three layers of silicon, is bonded through melting and constitutes self sealss
System.Sensitive structure explosive view is as shown in figure 3, Fig. 3 is the quick-fried of sensitive structure equivalent circuit in open loop micro-acceleration gauge of the present invention
Fried figure.Fig. 4 is the sectional view of sensitive structure equivalent circuit in open loop micro-acceleration gauge of the present invention,；Fig. 4 is through the middle sections Fig. 3 AB
The inside solid detail view of the three-decker of visiting.Top crown 2-1 and bottom crown 2-3 is smooth silicon, intermediate movable structure
2-2 is relative complex.The movable mass 2-2-1 of sensitive structure constitutes intermediate movable electrode, and acceleration is constituted with upper and lower pole plate
Detect effective differential capacitance pair.Movable mass 2-2-1 is hanged and is connected on frame 2-2-2 by cantilever beam 2-2-3.During 2-2-4 is
Between silica on movable structure frame, realize top crown 2-1, intermediate movable mass 2-2-1, bottom crown 2-3 it is mutual
Insulation.Due to the presence of silica and air, frame 2-2-2 will generate stray capacitance with upper and lower pole plate, be connected in parallel on respectively
On upper and lower differential capacitance.Fig. 5 is the capacitance schematic diagram of sensitive structure equivalent circuit in open loop micro-acceleration gauge of the present invention.Such as Fig. 5
It is shown, in the capacitance schematic diagram of formation, COnIndicate the capacitance between sensitive structure equivalent circuit top crown and movable agency, CUnderTable
Show the capacitance between sensitive structure equivalent circuit bottom crown and movable agency, Cf1Indicate sensitive structure equivalent circuit top crown with can
Stray capacitance between motivation structure, Cf2Indicate the stray capacitance between sensitive structure equivalent circuit bottom crown and movable agency.
Each embodiment is described by the way of progressive in this specification, the highlights of each of the examples are with other
The difference of embodiment, just to refer each other for identical similar portion between each embodiment.
Principle and implementation of the present invention are described for specific case used herein, and above example is said
The bright method and its core concept for being merely used to help understand the present invention；Meanwhile for those of ordinary skill in the art, foundation
The thought of the present invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification is not
It is interpreted as limitation of the present invention.
Claims (8)
1. a kind of open loop micro-acceleration gauge, which is characterized in that the open loop micro-acceleration gauge includes：Sensitive structure equivalent circuit,
Multiple analog switches, charge amplifier, charge transport circuit, charge integrator and negative-feedback network；
The sensitive structure equivalent circuit includes top crown, bottom crown, movable agency and corrective capacity, and the movable agency is located at
Between the top crown and the bottom crown；The top crown forms third capacitance with the movable agency, and the top crown is logical
The first analog switch is crossed to be connected with positive pole and connect with the negative feedback network by the second analog switch；It is described can motivation
Structure forms the 4th capacitance with the bottom crown, and the bottom crown is connected with power cathode by third analog switch and by the 4th
Analog switch is connect with the negative feedback network；
The corrective capacity includes the first capacitance compensation array, the second capacitance compensation array；The first capacitance compensation array with
The second capacitance compensation array series connection, the bottom crown of the first capacitance compensation array and the second capacitance compensation array
Top crown connects；The top crown of the first capacitance compensation array is connect simultaneously by the 5th analog switch with the negative feedback network
It is connected with the positive pole by the 6th analog switch；The bottom crown of the second capacitance compensation array is opened by the 7th simulation
Pass connect with the negative feedback network and is connected with the power cathode by the 8th analog switch；
The first capacitance compensation array is in parallel with the third capacitance, the second capacitance compensation array and the 4th capacitance
It is in parallel；The movable agency is connected to the upper of the bottom crown of the first capacitance compensation array and the second capacitance compensation array
On connecting line between pole plate, while the movable agency is connected to the charge amplifier；
The output end of the charge amplifier connects the charge integrator, the charge integration by the charge delivery circuit
The output end of device connects the negative-feedback network；
The open and-shut mode of first analog switch and second analog switch is closed on the contrary, working as first analog switch
When, second analog switch disconnects；When first analog switch disconnects, second analog switch is closed；Described
One analog switch, the third analog switch, the 5th analog switch, the open and-shut mode of the 7th analog switch are homogeneous
Together, the opening and closing of second analog switch, the 4th analog switch, the 6th analog switch, the 8th analog switch
State all same.
2. open loop micro-acceleration gauge according to claim 1, which is characterized in that the upper pole of the sensitive structure equivalent circuit
Plate, movable agency and bottom crown are all made of heavily doped silicon material.
3. open loop micro-acceleration gauge according to claim 2, which is characterized in that the sensitive structure equivalent circuit it is movable
Mechanism specifically includes：Movable mass, frame, cantilever beam；One end of the movable mass is fixed on by the cantilever beam
On the frame of side, the other end of the movable mass is not contacted with the frame of the other side；The upper surface of the frame and institute
It states and is filled with earth silicon material between the top crown of sensitive structure equivalent circuit, the lower surface of the frame sensitive is tied with described
It is also filled with earth silicon material between the bottom crown of structure equivalent circuit.
4. open loop micro-acceleration gauge according to claim 1, which is characterized in that the stray capacitance that the third capacitance generates
Cf3With the capacitance C of the first capacitance compensation arraycom1It is equal；The stray capacitance C that 4th capacitance generatesf4With described second
The capacitance C of capacitance compensation arraycom2It is equal.
5. open loop micro-acceleration gauge according to claim 1, which is characterized in that the movable agency is connected to the charge
Amplifier specifically includes：
The movable agency connects the normal phase input end of the charge amplifier by the 9th analog switch and is simulated by the tenth
Switch connects the inverting input of the charge amplifier, the opening and closing shape of the 9th analog switch and first analog switch
State is identical, and the tenth analog switch is identical as the open and-shut mode of the second analog switch.
6. open loop micro-acceleration gauge according to claim 1, which is characterized in that the charge delivery circuit includes the 5th electricity
Hold；The top crown of 5th capacitance is grounded by the 11st analog switch and connects the charge by the 12nd analog switch
The output end of amplifier；The bottom crown of 5th capacitance connects the reverse phase of the charge integrator by the 13rd analog switch
Input terminal is simultaneously grounded by the 14th analog switch；The positive input end grounding of the charge integrator；11st simulation
The open and-shut mode all same of switch, the 13rd analog switch, first analog switch, the 12nd analog switch,
The open and-shut mode all same of 14th analog switch, second analog switch.
7. open loop micro-acceleration gauge according to claim 1, which is characterized in that the charge amplifier includes the first operation
Amplifier and the 6th capacitance；The output end of the inverting input of first operational amplifier and first operational amplifier it
Between connect the 6th capacitance and the 15th analog switch；6th capacitance is in parallel with the 15th analog switch, described
15th analog switch is identical as the open and-shut mode of the first analog switch.
8. open loop micro-acceleration gauge according to claim 1, which is characterized in that the charge integrator includes the second operation
Amplifier and the 7th capacitance, the output end of the inverting input of the second operational amplifier and the second operational amplifier it
Between connect the 7th capacitance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810137325.2A CN108362910B (en) | 2018-02-10 | 2018-02-10 | Open-loop micro-accelerometer |
Applications Claiming Priority (1)
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| CN108761128A (en) * | 2018-09-05 | 2018-11-06 | 中国工程物理研究院电子工程研究所 | Piezoelectric vibration encourages self diagnosis mems accelerometer watch core and accelerometer |
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| CN108362910B (en) | 2020-02-07 |
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