CN108355726A - A kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect - Google Patents
A kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect Download PDFInfo
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- CN108355726A CN108355726A CN201810013745.XA CN201810013745A CN108355726A CN 108355726 A CN108355726 A CN 108355726A CN 201810013745 A CN201810013745 A CN 201810013745A CN 108355726 A CN108355726 A CN 108355726A
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- 230000000694 effects Effects 0.000 title claims abstract description 27
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 239000012530 fluid Substances 0.000 claims abstract description 25
- 238000001816 cooling Methods 0.000 claims abstract description 17
- 238000010438 heat treatment Methods 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 7
- 229920000642 polymer Polymers 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000003921 oil Substances 0.000 claims description 4
- 241000276425 Xiphophorus maculatus Species 0.000 claims description 3
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000007769 metal material Substances 0.000 claims description 2
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical group C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 2
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 2
- 239000003153 chemical reaction reagent Substances 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000013461 design Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000005086 pumping Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000005485 electric heating Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000002779 inactivation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 210000003205 muscle Anatomy 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/12—Specific details about manufacturing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/18—Means for temperature control
- B01L2300/1805—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks
- B01L2300/1827—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks using resistive heater
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/18—Means for temperature control
- B01L2300/1894—Cooling means; Cryo cooling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
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- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Hematology (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Micromachines (AREA)
Abstract
The present invention discloses a kind of interdigitation speedup Micropump chip driven based on AC Electric Heater effect, including channel cover plate, substrate, temperature control groove and electrode pair;The restriction of fluid mass may be implemented in channel cover plate;The size ratio of interdigital electrode pair is 1:1‑1:100, in the case where applying alternating current to electrode, fluid can be driven to be flowed from small electrode direction to large electrode direction under AC Electric Heater effect.Cooling groove and heating groove with fluid is respectively set in the position below substrate corresponding to electrode, cooling piece and resistance wire are placed respectively to realize the generation of channel interior temperature gradient, greatly enhance AC Electric Heater effect, to realize the promotion of the fluid-flow rate under same alternating voltage, improve the low problem of the pump rate of the interdigital electrode chip without temperature offset.Interdigitation speedup Micropump chip manufacturing of the present invention is easy, safe to use, on the basis of ensureing high-precision, has the characteristics that saving reagent, easy to carry.
Description
Technical field
The present invention relates to microbe chip technical field, it is related to a kind of Micropump chip improving fluid flow rate, specifically one
The interdigitation speedup Micropump chip that kind is driven based on AC Electric Heater effect.
Background technology
With the development of modern science and technology, the Product Precision produced is higher and higher, experimental implementation process is more and more cumbersome, it
The preceding mode that fluid pumping is carried out using syringe pump has gradually been replaced by some micro-fluidic chips manipulated by dynamic electric principle.By
, saving reagent cost high, easy to operate, easily fabricated in micro-fluidic chip precision, so being constantly subjected to the extensive utilization of people.
For interdigitated electrodes, since electrode is in parallelly distribute on, therefore it is called parallel pole again.Four major parameters are:
The logarithm of interdigital electrode pair, interdigital width, it is adjacent it is interdigital between clearance distance and interdigital electrode thickness.Wherein, interdigital
Length-width ratio it is bigger, interdigital density is bigger, and speed is bigger;Rate can also be effectively improved by reducing interdigital electrode spacing;Electricity
Pole is thicker, and electric field strength is smaller, and electrode is thinner, and the electric field of generation is stronger, and electric field force is bigger, and electrode edge forms non-equal with gap
Even electric field region, providing alternating voltage can make fluid generate the flowing of better electric heating, and fluid is from small electrode direction to big
Electrode direction circulates.
AC Electric Heater (Alternating C μ rrent electrothermal, ACET) is mainly used for high conductance stream
In the driving of body, temperature gradient that Joule heat and range of small of the AC Electric Heater effect based on fluid are brought.For conductivity
Fluid more than 100mS/m, under AC field effect of the frequency higher than 100kHz, joule heating effect enhancing, so as to cause stream
Volume property changes, to which fluid generates electric heating flowing.Therefore increase input heat to increase internal fluid temperature gradient, change electricity
Pressure size, raising fluid muscle power etc. can improve the flow velocity of fluid.Wherein, if voltage may well cause very much band in fluid
Some detection cells or particle damage inactivation;Volume heating power is excessive to be likely to result in active reduction;Applying external temperature gradient can
In the form of improving electric heating flowing velocity size in micro-fluidic chip, flow direction and be vortexed.Need to only it apply phase on this basis
The pumping effect of higher flow rate can be realized on the basis of same alternating current.
Invention content
To solve the deficiencies in the prior art, it is micro- to provide a kind of interdigitation speedup driven based on AC Electric Heater effect by the present invention
Pump chip.The present invention designs a kind of interdigitation high efficiency fluid driving Micropump chip, provides a kind of method of high efficiency fluid driving,
It solves the problems, such as that common interdigital electrode Micropump chip flow velocity is low, saves the time and improve efficiency.Its feature is that speed is adjustable, high-precision
Degree, ensure that the accuracy and practicability of detection.
The technical solution adopted in the present invention is:Design a kind of interdigitation speedup Micropump driven based on AC Electric Heater effect
Chip, including channel cover plate, substrate, temperature control groove and electrode pair;The electrode is to being arranged in the upper surface of substrate, and channel cover
The lower surface of piece is tightly bonded with substrate upper surface, and temperature control groove is provided with below substrate.
The channel cover plate is platy structure, and upper surface is provided with two through-holes penetrated through with lower surface, be respectively into
Mouth channel and exit passageway;Its lower surface is provided with indent rectangular notch, be inner passage, access road and exit passageway with it is interior
Portion channel is connected to;Substrate setting is close to below channel cover piece, and with its lower surface, and the upper surface of substrate covers inner passage;
The lower surface of substrate and the upper surface of temperature control groove are close together;Electrode is sticked in being arranged in the inside of inner passage
On the upper surface of substrate.
For the electrode to including small electrode and large electrode, the small electrode and large electrode are protruding point of body normal
Branch structure, branch's larger electrode of small electrode it is small, small electrode is oppositely arranged with large electrode, the branch of the two it is interlaced and
It does not contact.
The upper surface of temperature control groove is provided with staggeredly and disconnected indent conduit, the both ends of the indent conduit are located at substrate
Outside, one end is heating tank, and the other end is cooling slot;Heating tank is in pectination with cooling slot, and staggered relative is arranged and does not connect
Logical, heating tank divides conduit corresponding with the branch of small electrode respectively and immediately below it;Cooling slot divide conduit respectively with greatly
The branch of electrode is corresponding and immediately below it.
The invention has the characteristics that:
(1) rate of pumping for accelerating fluid in chip, the time required to being greatly shortened;
(2) target is realized by changing temperature gradient, temperature control mode is very simple, and experiment is made to become simple complete
At;
(3) this chip structure is simple, and difficulty of processing is low.
Compared with prior art, advantageous effect of the present invention is:The microfluid that the present invention designs pumps chip, by temperature
It is separately added into resistance wire and cooling piece in control groove to control the heat-conducting fluid in groove into trip temperature, radiates to large electrode
While liter heat is carried out to small electrode to obtain the effect to be realized.The pumping chip that the present invention designs, simple installation are ensureing
On the basis of high-precision, have the characteristics that convenient, fast, efficient.
Description of the drawings
Fig. 1 is the overall structure diagram of an embodiment of the present invention;
Fig. 2 is the interdigitated electrode structure schematic diagram of an embodiment of the present invention;
Fig. 3 is the temperature control groove structure schematic diagram of an embodiment of the present invention;
Fig. 4 is the cross section structure schematic diagram of an embodiment of the present invention.
Specific implementation mode
The specific implementation of the present invention is described in detail in 1-4 below in conjunction with the accompanying drawings.
A kind of interdigitation speedup Micropump chip driven based on AC Electric Heater effect that the present invention designs, including channel cover plate
1, substrate 2, temperature control groove 3 and electrode pair 4.The electrode pair 4 is arranged between channel cover plate 1 and substrate 2, is tightly fitted in base
The lower section of the upper surface of piece 2, substrate 2 is provided with sink 3.
The channel cover plate 1 is platy structure, and upper surface is provided with two through-holes penetrated through with lower surface, be respectively into
Mouth channel 11 and exit passageway 13;Its lower surface is provided with indent rectangular notch, is inner passage 12, access road 11 and outlet
Channel 13 is connected to inner passage 12.The setting of substrate 2 is close to below channel cover plate 1, and with its lower surface, the upper table of substrate 2
Face covers inner passage 12.The lower surface of substrate 2 and the upper surface of temperature control groove 3 are close together.Electrode pair 4 is arranged in inside
The inside in channel 12, and stick on the upper surface of substrate 2.
The electrode pair 4 includes small electrode 41 and large electrode 42, and the small electrode 41 and large electrode 42 are body normal
The structure of protruding branch, branch's larger electrode 42 of small electrode 41 it is small, small electrode 41 is oppositely arranged with large electrode 42, two
The branch of person is interlaced and does not contact.
The upper surface of temperature control groove 3 is provided with staggeredly and disconnected indent conduit, the both ends of the indent conduit are located at base
The outside of piece 2, one end are heating tank 31, and the other end is cooling slot 32.Heating tank 31 is in pectination, staggered relative with cooling slot 32
It is arranged and is not connected to, heating tank 31 divides conduit corresponding with the branch of small electrode 41 respectively and immediately below its;Cool down slot 32
Divide conduit corresponding with the branch of large electrode 42 respectively and immediately below its.
The electrode pair 4 is interdigital electrode pair, and width ratio is 1:1-1:100.
As shown in attached drawing 1-4, small electrode 41 and large electrode 42 are respectively arranged with 3 branches, corresponding, heating tank 31 and drop
Warm slot 32 is respectively provided with 3 points of conduits, and the width of each conduit is corresponding with the branch of counter electrode respectively with length.
The channel 12 is rectangle, and length of side 1-20mm is highly 10-100 μm.
For the electrode pair 4 using conductive metallic materials such as gold or ITO, size is 1-500 μm, and logarithm is 1-100 pairs.
The material of substrate 2 can use the other materials, preferably glass or silicon such as silicon, glass, polymer, and size, which combines, to be carried
Slide.
For the temperature control groove 3 in order to preferably radiate, temperature control trench material can be other materials such as glass, polymer, silicon
Material, preferably PDMS.Temperature control groove is square structure, and length of side 1-20mm is highly 1-10mm, the internal stream for being used for temperature control
Body is the good fluid of thermal conductivity, preferably conduction oil.Groove dimensions are 1-500 μm.
By in the corresponding heating tank 31 in substrate lower part and cooling slot 32 where electrode, 31 inner placement resistance wire of heating tank
For being heated to small electrode, cooling 32 inner placement cooling piece of slot is used to radiate to large electrode, to increase the temperature of fluid in channel
Gradient is spent, to promote the circulation of fluid.
Operation principle and process of the present invention are as follows:Fluid is injected from access road 11, through channel 12 to exit passageway 13
In flow process, alternating current is applied to electrode 41 and 42, electrode generates exchange heat, and temperature gradient generates, AC Electric Heater effect production
Raw, large electrode 42 is directed toward in the direction of power by small electrode 41, drives fluid to 13 streams, and resistance wire is added in 31 conduction oil to small
Cooling piece is added in 32 conduction oil and gives large electrode cooling, so that temperature gradient is further increased, to alternating current for heated by electrodes
Fuel factor is stronger, and the improved efficiency time that fluid flows to exit passageway 13 greatly shortens, and can ensure pumping effect well
Stability.
Using technical solutions according to the invention or those skilled in the art under the inspiration of technical solution of the present invention,
Similar technical solution is designed, and reaches above-mentioned technique effect, is to fall into protection scope of the present invention.
The present invention does not address place and is suitable for the prior art.
Claims (10)
1. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect, which is characterized in that including channel cover plate, base
Piece, temperature control groove and electrode pair;The electrode is to being arranged in substrate upper surface, and the lower surface of channel cover plate and substrate upper surface
It is tightly bonded, temperature control groove is provided with below substrate;
The channel cover plate is platy structure, and upper surface is provided with two through-holes penetrated through with lower surface, and respectively entrance is logical
Road and exit passageway;Its lower surface is provided with indent rectangular notch, is that inner passage, access road and exit passageway and inside are logical
Road is connected to;Substrate setting is close to below channel cover piece, and with its lower surface, and the upper surface of substrate covers inner passage;Substrate
Lower surface and the upper surface of temperature control groove be close together;Electrode sticks in substrate to being arranged in the inside of inner passage
Upper surface on;
For the electrode to including small electrode and large electrode, the small electrode and large electrode are the protruding branch of body normal
Structure, branch's larger electrode of small electrode it is small, small electrode is oppositely arranged with large electrode, and the branch of the two is interlaced and does not connect
It touches;
The upper surface of temperature control groove is provided with staggeredly and disconnected indent conduit, the both ends of the indent conduit are located at the outer of substrate
Side, one end are heating tank, and the other end is cooling slot;Heating tank is in pectination with cooling slot, and staggered relative is arranged and is not connected to, adds
Heat channel divides conduit corresponding with the branch of small electrode respectively and immediately below it;Cooling slot divide conduit respectively with large electrode
Branch is corresponding and immediately below it.
2. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 1, feature
It is, the electrode is to for interdigital structure, width ratio ranging from 1:1-1:100.
3. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 1, feature
It is, the channel cover plate is rectangle, and length of side 1-20mm is highly 1-100 μm.
4. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 1, feature
It is, the channel patch material is one kind in glass, polymer, silicon.
5. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 1, feature
It is, the electrode is 1-500 μm to using conductive metallic material, size, and logarithm is 1-100 pairs.
6. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 5, feature
It is, the electrode is to using gold or ITO.
7. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 1, feature
It is, the material of substrate is one kind in silicon, glass, polymer, size combination glass slide.
8. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 1, feature
It is, the temperature control trench material is one kind in glass, polymer, silicon.
9. according to a kind of interdigitation speedup Micropump core based on the driving of AC Electric Heater effect of 1,4,7 any one of them of claim
Piece, which is characterized in that the material of the channel cover plate and temperature control groove is PDMS.
10. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 1, feature
It is, resistance wire is placed in the heating tank of temperature control groove and is used to heat to small electrode, and placing cooling piece in the slot that cools down is used for big
Electrode radiates, and the internal fluid for temperature control is conduction oil.
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CN201810013745.XA CN108355726B (en) | 2018-01-08 | 2018-01-08 | Interdigital type speed-increasing micropump chip based on alternating current thermal effect driving |
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CN201810013745.XA CN108355726B (en) | 2018-01-08 | 2018-01-08 | Interdigital type speed-increasing micropump chip based on alternating current thermal effect driving |
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CN108355726B CN108355726B (en) | 2020-08-04 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110601496A (en) * | 2019-09-05 | 2019-12-20 | 中国科学院力学研究所 | Alternating current electroosmosis driven ethanol asymmetric micropump and working method |
CN110632138A (en) * | 2019-11-01 | 2019-12-31 | 江南大学 | Interdigital electrode chip |
CN113996357A (en) * | 2021-10-29 | 2022-02-01 | 北京理工大学 | Device for controlling liquid to flow directionally under internal heating condition of micro-fluidic chip pipeline |
Citations (3)
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US20110155565A1 (en) * | 2009-12-31 | 2011-06-30 | National Chung Cheng University | Microfluidic driving system |
CN102600919A (en) * | 2012-03-20 | 2012-07-25 | 复旦大学 | Method for limiting one-way transporting of liquid drop of digital micro-flow control chip |
CN105457692A (en) * | 2016-01-05 | 2016-04-06 | 重庆大学 | Microfluidic separation device and method |
-
2018
- 2018-01-08 CN CN201810013745.XA patent/CN108355726B/en not_active Expired - Fee Related
Patent Citations (3)
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US20110155565A1 (en) * | 2009-12-31 | 2011-06-30 | National Chung Cheng University | Microfluidic driving system |
CN102600919A (en) * | 2012-03-20 | 2012-07-25 | 复旦大学 | Method for limiting one-way transporting of liquid drop of digital micro-flow control chip |
CN105457692A (en) * | 2016-01-05 | 2016-04-06 | 重庆大学 | Microfluidic separation device and method |
Non-Patent Citations (1)
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110601496A (en) * | 2019-09-05 | 2019-12-20 | 中国科学院力学研究所 | Alternating current electroosmosis driven ethanol asymmetric micropump and working method |
CN110601496B (en) * | 2019-09-05 | 2021-08-17 | 中国科学院力学研究所 | Alternating current electroosmosis driven ethanol asymmetric micropump and working method |
CN110632138A (en) * | 2019-11-01 | 2019-12-31 | 江南大学 | Interdigital electrode chip |
CN113996357A (en) * | 2021-10-29 | 2022-02-01 | 北京理工大学 | Device for controlling liquid to flow directionally under internal heating condition of micro-fluidic chip pipeline |
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