CN108355726A - A kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect - Google Patents

A kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect Download PDF

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Publication number
CN108355726A
CN108355726A CN201810013745.XA CN201810013745A CN108355726A CN 108355726 A CN108355726 A CN 108355726A CN 201810013745 A CN201810013745 A CN 201810013745A CN 108355726 A CN108355726 A CN 108355726A
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electrode
electric heater
interdigitation
speedup
driving
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CN201810013745.XA
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CN108355726B (en
Inventor
李姗姗
于静怡
张晓琳
陈贵亮
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Hebei University of Technology
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Hebei University of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12Specific details about manufacturing devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/18Means for temperature control
    • B01L2300/1805Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks
    • B01L2300/1827Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks using resistive heater
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/18Means for temperature control
    • B01L2300/1894Cooling means; Cryo cooling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00Moving or stopping fluids
    • B01L2400/04Moving fluids with specific forces or mechanical means
    • B01L2400/0475Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Micromachines (AREA)

Abstract

The present invention discloses a kind of interdigitation speedup Micropump chip driven based on AC Electric Heater effect, including channel cover plate, substrate, temperature control groove and electrode pair;The restriction of fluid mass may be implemented in channel cover plate;The size ratio of interdigital electrode pair is 1:1‑1:100, in the case where applying alternating current to electrode, fluid can be driven to be flowed from small electrode direction to large electrode direction under AC Electric Heater effect.Cooling groove and heating groove with fluid is respectively set in the position below substrate corresponding to electrode, cooling piece and resistance wire are placed respectively to realize the generation of channel interior temperature gradient, greatly enhance AC Electric Heater effect, to realize the promotion of the fluid-flow rate under same alternating voltage, improve the low problem of the pump rate of the interdigital electrode chip without temperature offset.Interdigitation speedup Micropump chip manufacturing of the present invention is easy, safe to use, on the basis of ensureing high-precision, has the characteristics that saving reagent, easy to carry.

Description

A kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect
Technical field
The present invention relates to microbe chip technical field, it is related to a kind of Micropump chip improving fluid flow rate, specifically one The interdigitation speedup Micropump chip that kind is driven based on AC Electric Heater effect.
Background technology
With the development of modern science and technology, the Product Precision produced is higher and higher, experimental implementation process is more and more cumbersome, it The preceding mode that fluid pumping is carried out using syringe pump has gradually been replaced by some micro-fluidic chips manipulated by dynamic electric principle.By , saving reagent cost high, easy to operate, easily fabricated in micro-fluidic chip precision, so being constantly subjected to the extensive utilization of people.
For interdigitated electrodes, since electrode is in parallelly distribute on, therefore it is called parallel pole again.Four major parameters are: The logarithm of interdigital electrode pair, interdigital width, it is adjacent it is interdigital between clearance distance and interdigital electrode thickness.Wherein, interdigital Length-width ratio it is bigger, interdigital density is bigger, and speed is bigger;Rate can also be effectively improved by reducing interdigital electrode spacing;Electricity Pole is thicker, and electric field strength is smaller, and electrode is thinner, and the electric field of generation is stronger, and electric field force is bigger, and electrode edge forms non-equal with gap Even electric field region, providing alternating voltage can make fluid generate the flowing of better electric heating, and fluid is from small electrode direction to big Electrode direction circulates.
AC Electric Heater (Alternating C μ rrent electrothermal, ACET) is mainly used for high conductance stream In the driving of body, temperature gradient that Joule heat and range of small of the AC Electric Heater effect based on fluid are brought.For conductivity Fluid more than 100mS/m, under AC field effect of the frequency higher than 100kHz, joule heating effect enhancing, so as to cause stream Volume property changes, to which fluid generates electric heating flowing.Therefore increase input heat to increase internal fluid temperature gradient, change electricity Pressure size, raising fluid muscle power etc. can improve the flow velocity of fluid.Wherein, if voltage may well cause very much band in fluid Some detection cells or particle damage inactivation;Volume heating power is excessive to be likely to result in active reduction;Applying external temperature gradient can In the form of improving electric heating flowing velocity size in micro-fluidic chip, flow direction and be vortexed.Need to only it apply phase on this basis The pumping effect of higher flow rate can be realized on the basis of same alternating current.
Invention content
To solve the deficiencies in the prior art, it is micro- to provide a kind of interdigitation speedup driven based on AC Electric Heater effect by the present invention Pump chip.The present invention designs a kind of interdigitation high efficiency fluid driving Micropump chip, provides a kind of method of high efficiency fluid driving, It solves the problems, such as that common interdigital electrode Micropump chip flow velocity is low, saves the time and improve efficiency.Its feature is that speed is adjustable, high-precision Degree, ensure that the accuracy and practicability of detection.
The technical solution adopted in the present invention is:Design a kind of interdigitation speedup Micropump driven based on AC Electric Heater effect Chip, including channel cover plate, substrate, temperature control groove and electrode pair;The electrode is to being arranged in the upper surface of substrate, and channel cover The lower surface of piece is tightly bonded with substrate upper surface, and temperature control groove is provided with below substrate.
The channel cover plate is platy structure, and upper surface is provided with two through-holes penetrated through with lower surface, be respectively into Mouth channel and exit passageway;Its lower surface is provided with indent rectangular notch, be inner passage, access road and exit passageway with it is interior Portion channel is connected to;Substrate setting is close to below channel cover piece, and with its lower surface, and the upper surface of substrate covers inner passage; The lower surface of substrate and the upper surface of temperature control groove are close together;Electrode is sticked in being arranged in the inside of inner passage On the upper surface of substrate.
For the electrode to including small electrode and large electrode, the small electrode and large electrode are protruding point of body normal Branch structure, branch's larger electrode of small electrode it is small, small electrode is oppositely arranged with large electrode, the branch of the two it is interlaced and It does not contact.
The upper surface of temperature control groove is provided with staggeredly and disconnected indent conduit, the both ends of the indent conduit are located at substrate Outside, one end is heating tank, and the other end is cooling slot;Heating tank is in pectination with cooling slot, and staggered relative is arranged and does not connect Logical, heating tank divides conduit corresponding with the branch of small electrode respectively and immediately below it;Cooling slot divide conduit respectively with greatly The branch of electrode is corresponding and immediately below it.
The invention has the characteristics that:
(1) rate of pumping for accelerating fluid in chip, the time required to being greatly shortened;
(2) target is realized by changing temperature gradient, temperature control mode is very simple, and experiment is made to become simple complete At;
(3) this chip structure is simple, and difficulty of processing is low.
Compared with prior art, advantageous effect of the present invention is:The microfluid that the present invention designs pumps chip, by temperature It is separately added into resistance wire and cooling piece in control groove to control the heat-conducting fluid in groove into trip temperature, radiates to large electrode While liter heat is carried out to small electrode to obtain the effect to be realized.The pumping chip that the present invention designs, simple installation are ensureing On the basis of high-precision, have the characteristics that convenient, fast, efficient.
Description of the drawings
Fig. 1 is the overall structure diagram of an embodiment of the present invention;
Fig. 2 is the interdigitated electrode structure schematic diagram of an embodiment of the present invention;
Fig. 3 is the temperature control groove structure schematic diagram of an embodiment of the present invention;
Fig. 4 is the cross section structure schematic diagram of an embodiment of the present invention.
Specific implementation mode
The specific implementation of the present invention is described in detail in 1-4 below in conjunction with the accompanying drawings.
A kind of interdigitation speedup Micropump chip driven based on AC Electric Heater effect that the present invention designs, including channel cover plate 1, substrate 2, temperature control groove 3 and electrode pair 4.The electrode pair 4 is arranged between channel cover plate 1 and substrate 2, is tightly fitted in base The lower section of the upper surface of piece 2, substrate 2 is provided with sink 3.
The channel cover plate 1 is platy structure, and upper surface is provided with two through-holes penetrated through with lower surface, be respectively into Mouth channel 11 and exit passageway 13;Its lower surface is provided with indent rectangular notch, is inner passage 12, access road 11 and outlet Channel 13 is connected to inner passage 12.The setting of substrate 2 is close to below channel cover plate 1, and with its lower surface, the upper table of substrate 2 Face covers inner passage 12.The lower surface of substrate 2 and the upper surface of temperature control groove 3 are close together.Electrode pair 4 is arranged in inside The inside in channel 12, and stick on the upper surface of substrate 2.
The electrode pair 4 includes small electrode 41 and large electrode 42, and the small electrode 41 and large electrode 42 are body normal The structure of protruding branch, branch's larger electrode 42 of small electrode 41 it is small, small electrode 41 is oppositely arranged with large electrode 42, two The branch of person is interlaced and does not contact.
The upper surface of temperature control groove 3 is provided with staggeredly and disconnected indent conduit, the both ends of the indent conduit are located at base The outside of piece 2, one end are heating tank 31, and the other end is cooling slot 32.Heating tank 31 is in pectination, staggered relative with cooling slot 32 It is arranged and is not connected to, heating tank 31 divides conduit corresponding with the branch of small electrode 41 respectively and immediately below its;Cool down slot 32 Divide conduit corresponding with the branch of large electrode 42 respectively and immediately below its.
The electrode pair 4 is interdigital electrode pair, and width ratio is 1:1-1:100.
As shown in attached drawing 1-4, small electrode 41 and large electrode 42 are respectively arranged with 3 branches, corresponding, heating tank 31 and drop Warm slot 32 is respectively provided with 3 points of conduits, and the width of each conduit is corresponding with the branch of counter electrode respectively with length.
The channel 12 is rectangle, and length of side 1-20mm is highly 10-100 μm.
For the electrode pair 4 using conductive metallic materials such as gold or ITO, size is 1-500 μm, and logarithm is 1-100 pairs.
The material of substrate 2 can use the other materials, preferably glass or silicon such as silicon, glass, polymer, and size, which combines, to be carried Slide.
For the temperature control groove 3 in order to preferably radiate, temperature control trench material can be other materials such as glass, polymer, silicon Material, preferably PDMS.Temperature control groove is square structure, and length of side 1-20mm is highly 1-10mm, the internal stream for being used for temperature control Body is the good fluid of thermal conductivity, preferably conduction oil.Groove dimensions are 1-500 μm.
By in the corresponding heating tank 31 in substrate lower part and cooling slot 32 where electrode, 31 inner placement resistance wire of heating tank For being heated to small electrode, cooling 32 inner placement cooling piece of slot is used to radiate to large electrode, to increase the temperature of fluid in channel Gradient is spent, to promote the circulation of fluid.
Operation principle and process of the present invention are as follows:Fluid is injected from access road 11, through channel 12 to exit passageway 13 In flow process, alternating current is applied to electrode 41 and 42, electrode generates exchange heat, and temperature gradient generates, AC Electric Heater effect production Raw, large electrode 42 is directed toward in the direction of power by small electrode 41, drives fluid to 13 streams, and resistance wire is added in 31 conduction oil to small Cooling piece is added in 32 conduction oil and gives large electrode cooling, so that temperature gradient is further increased, to alternating current for heated by electrodes Fuel factor is stronger, and the improved efficiency time that fluid flows to exit passageway 13 greatly shortens, and can ensure pumping effect well Stability.
Using technical solutions according to the invention or those skilled in the art under the inspiration of technical solution of the present invention, Similar technical solution is designed, and reaches above-mentioned technique effect, is to fall into protection scope of the present invention.
The present invention does not address place and is suitable for the prior art.

Claims (10)

1. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect, which is characterized in that including channel cover plate, base Piece, temperature control groove and electrode pair;The electrode is to being arranged in substrate upper surface, and the lower surface of channel cover plate and substrate upper surface It is tightly bonded, temperature control groove is provided with below substrate;
The channel cover plate is platy structure, and upper surface is provided with two through-holes penetrated through with lower surface, and respectively entrance is logical Road and exit passageway;Its lower surface is provided with indent rectangular notch, is that inner passage, access road and exit passageway and inside are logical Road is connected to;Substrate setting is close to below channel cover piece, and with its lower surface, and the upper surface of substrate covers inner passage;Substrate Lower surface and the upper surface of temperature control groove be close together;Electrode sticks in substrate to being arranged in the inside of inner passage Upper surface on;
For the electrode to including small electrode and large electrode, the small electrode and large electrode are the protruding branch of body normal Structure, branch's larger electrode of small electrode it is small, small electrode is oppositely arranged with large electrode, and the branch of the two is interlaced and does not connect It touches;
The upper surface of temperature control groove is provided with staggeredly and disconnected indent conduit, the both ends of the indent conduit are located at the outer of substrate Side, one end are heating tank, and the other end is cooling slot;Heating tank is in pectination with cooling slot, and staggered relative is arranged and is not connected to, adds Heat channel divides conduit corresponding with the branch of small electrode respectively and immediately below it;Cooling slot divide conduit respectively with large electrode Branch is corresponding and immediately below it.
2. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 1, feature It is, the electrode is to for interdigital structure, width ratio ranging from 1:1-1:100.
3. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 1, feature It is, the channel cover plate is rectangle, and length of side 1-20mm is highly 1-100 μm.
4. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 1, feature It is, the channel patch material is one kind in glass, polymer, silicon.
5. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 1, feature It is, the electrode is 1-500 μm to using conductive metallic material, size, and logarithm is 1-100 pairs.
6. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 5, feature It is, the electrode is to using gold or ITO.
7. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 1, feature It is, the material of substrate is one kind in silicon, glass, polymer, size combination glass slide.
8. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 1, feature It is, the temperature control trench material is one kind in glass, polymer, silicon.
9. according to a kind of interdigitation speedup Micropump core based on the driving of AC Electric Heater effect of 1,4,7 any one of them of claim Piece, which is characterized in that the material of the channel cover plate and temperature control groove is PDMS.
10. a kind of interdigitation speedup Micropump chip based on the driving of AC Electric Heater effect according to claim 1, feature It is, resistance wire is placed in the heating tank of temperature control groove and is used to heat to small electrode, and placing cooling piece in the slot that cools down is used for big Electrode radiates, and the internal fluid for temperature control is conduction oil.
CN201810013745.XA 2018-01-08 2018-01-08 Interdigital type speed-increasing micropump chip based on alternating current thermal effect driving Expired - Fee Related CN108355726B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110601496A (en) * 2019-09-05 2019-12-20 中国科学院力学研究所 Alternating current electroosmosis driven ethanol asymmetric micropump and working method
CN110632138A (en) * 2019-11-01 2019-12-31 江南大学 Interdigital electrode chip
CN113996357A (en) * 2021-10-29 2022-02-01 北京理工大学 Device for controlling liquid to flow directionally under internal heating condition of micro-fluidic chip pipeline

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110155565A1 (en) * 2009-12-31 2011-06-30 National Chung Cheng University Microfluidic driving system
CN102600919A (en) * 2012-03-20 2012-07-25 复旦大学 Method for limiting one-way transporting of liquid drop of digital micro-flow control chip
CN105457692A (en) * 2016-01-05 2016-04-06 重庆大学 Microfluidic separation device and method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110155565A1 (en) * 2009-12-31 2011-06-30 National Chung Cheng University Microfluidic driving system
CN102600919A (en) * 2012-03-20 2012-07-25 复旦大学 Method for limiting one-way transporting of liquid drop of digital micro-flow control chip
CN105457692A (en) * 2016-01-05 2016-04-06 重庆大学 Microfluidic separation device and method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
STUART J. WILLIAMS: "Enhanced electrothermal pumping with thin film resistive heaters", 《ELECTROPHORESIS》 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110601496A (en) * 2019-09-05 2019-12-20 中国科学院力学研究所 Alternating current electroosmosis driven ethanol asymmetric micropump and working method
CN110601496B (en) * 2019-09-05 2021-08-17 中国科学院力学研究所 Alternating current electroosmosis driven ethanol asymmetric micropump and working method
CN110632138A (en) * 2019-11-01 2019-12-31 江南大学 Interdigital electrode chip
CN113996357A (en) * 2021-10-29 2022-02-01 北京理工大学 Device for controlling liquid to flow directionally under internal heating condition of micro-fluidic chip pipeline

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