CN108336010A - The sintering equipment being used to prepare in the production system of cell piece - Google Patents
The sintering equipment being used to prepare in the production system of cell piece Download PDFInfo
- Publication number
- CN108336010A CN108336010A CN201810063481.9A CN201810063481A CN108336010A CN 108336010 A CN108336010 A CN 108336010A CN 201810063481 A CN201810063481 A CN 201810063481A CN 108336010 A CN108336010 A CN 108336010A
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- Prior art keywords
- fixed
- rod
- push
- falsework
- electric machine
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- 238000005245 sintering Methods 0.000 title claims abstract description 28
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 26
- 238000004140 cleaning Methods 0.000 claims abstract description 50
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 30
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 30
- 239000010703 silicon Substances 0.000 claims abstract description 30
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 11
- 230000007246 mechanism Effects 0.000 claims description 56
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 42
- 238000005507 spraying Methods 0.000 claims description 15
- 238000001514 detection method Methods 0.000 claims description 13
- 230000003028 elevating effect Effects 0.000 claims description 6
- 238000005485 electric heating Methods 0.000 claims description 5
- 230000009471 action Effects 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 2
- 238000009434 installation Methods 0.000 description 31
- 238000007790 scraping Methods 0.000 description 30
- 238000005530 etching Methods 0.000 description 18
- 239000010453 quartz Substances 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 18
- 238000000034 method Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 230000008569 process Effects 0.000 description 8
- 239000003708 ampul Substances 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 239000004411 aluminium Substances 0.000 description 6
- 239000003351 stiffener Substances 0.000 description 6
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- 244000025254 Cannabis sativa Species 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000007596 consolidation process Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 235000008216 herbs Nutrition 0.000 description 1
- 238000002386 leaching Methods 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 235000021419 vinegar Nutrition 0.000 description 1
- 239000000052 vinegar Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Cleaning In General (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Abstract
The present invention provides a kind of sintering equipments being used to prepare in the production system of cell piece.The technical problems such as it is simple in structure that it solves existing cleaning device, cannot continuously be diffused, etches, scratches and be sintered to it, and speed of production is slow.Originally the sintering equipment being used to prepare in the production system of cell piece, the production system for being used to prepare cell piece includes pedestal, workbench is provided on pedestal, sintering equipment includes falsework, falsework is arranged on the table, and falsework both ends are respectively arranged with driving shaft and driven shaft, and driving shaft can drive its second actuating unit rotated to be connected with one, it is arranged with chain belt in a ring on driving shaft and driven shaft, 100 the second locating pieces for positioning silicon chip are provided on chain band.The present invention has the advantages that good product quality.
Description
Technical field
The present invention relates to a kind of sintering equipments being used to prepare in the production system of cell piece.
Background technology
Solar cell is a kind of device having response to light and can convert light energy into electric power.Solar cell is partly to lead
A kind of semiconductor devices with energy conversion function based on body material, is the most crucial device of solar energy power generating
Part.
Through retrieval, as Chinese patent literature discloses a kind of Quick cleaning device【Application number：201520753687.6；It is public
The number of opening：CN 205056521U】.This Quick cleaning device, which is characterized in that including cleaning case, spraying mechanism, driver
Structure and liquid storage babinet, between the cleaning case and the liquid storage babinet be equipped with drain pipe and return duct, the drain pipe and return
The equal one end of flow tube is inserted into the cleaning case, and the other end is inserted into the liquid reserve tank body, the spraying mechanism and the biography
Motivation structure is installed in the cleaning case, and the spraying mechanism is divided into spraying mechanism and lower spraying mechanism, the upper spray
Leaching mechanism includes upper jet pipe and the upper control valve for adjusting flow rate of liquid, and the upper jet pipe is equipped with upper hole, described
The quantity of upper hole is one or more, and the lower spraying mechanism includes lower jet pipe and the lower adjusting for adjusting flow rate of liquid
Valve, the lower jet pipe are equipped with lower hole, and the quantity of the lower hole is one or more, and the transmission mechanism is located at upper spray
It drenches between mechanism and lower spraying mechanism, the transmission mechanism support carries part to be cleaned.
Although cleaning device cleaning performance disclosed in the patent is good, the cleaning device is simple in structure, cannot be continuous
It is diffused, etch, scratch and is sintered, speed of production is slow, therefore, designs a kind of production system being used to prepare cell piece
Sintering equipment in system is necessary.
Invention content
The purpose of the present invention is there is the above problem in view of the prior art, it is proposed that a kind of life being used to prepare cell piece
Production system, the production system have the characteristics that production efficiency is high.
Object of the invention can be realized by the following technical scheme：A kind of production system being used to prepare cell piece, packet
Include pedestal, which is characterized in that workbench is provided on the pedestal, workbench and one can drive the lower lifting structure lifted thereon
It is connected, disperser, etching device, cleaning device, squeegee apparatus and sintering equipment is disposed on workbench；Lifting structure
Including guide post, guide sleeve and cylinder, guide post is fixed on the base, and guide sleeve is fixed on the table, and guide sleeve is slidably socketed on guide post,
The cylinder body of cylinder is fixed on the base, and straight up, the piston rod end of cylinder is connected the piston rod of cylinder with workbench.
The operation principle of this production system is as follows：The piston rod of control cylinder moves up and down, and the piston rod band of cylinder is started building
It is moved up and down as platform, workbench can be made to can be suitably used for the different demands using height, it is adaptable；By disperser to making herbs into wool
Good silicon chip is diffused, and is performed etching to silicon chip by etching device, is cleaned to silicon chip by cleaning device, by scraping
Coating device scratches silicon chip, is sintered to silicon chip by sintering equipment, it can be achieved that continuous uninterrupted production, production efficiency
It is high.
The disperser includes quartz ampoule, and quartz ampoule is arranged on the table, and quartz boat is provided in quartz ampoule, quartz
Boat includes two first supports being oppositely arranged, two bottom locating rods and two side locating rods, two bottom locating rods point
It is not fixed mutually with the bottom edge of two first supports, two side locating rods are mutually solid with two sides of two first supports respectively
Fixed, the first support takes the shape of the letter U, and first support includes cross bar and two montants, and two montants are separately positioned on the both ends of cross bar,
Be provided with regulating mechanism between montant and cross bar, regulating mechanism include the guide groove being opened on cross bar, T-shaped guide pad and
First locating piece, guide pad one end are mutually fixed with montant, and the guide pad other end is arranged in guide groove, and guide pad can be along guiding
Slot moves horizontally, and several location holes is further opened on cross bar, and location hole and guide groove connect, positioning is offered on guide pad
Slot, and locating slot can connect with any one location hole, the first locating piece is threaded through in locating slot and location hole successively；Two
Locating rod opposite side in side is equipped with several first placing grooves, and the upside of two bottom locating rods is equipped with and the first placing groove phase
The section of matched second placing groove, the first placing groove and the second placing groove is V-arrangement.
The process of the disperser is as follows：Silicon chip is inserted on quartz boat, quartz boat is sent into quartz ampoule, it can be carried out
Diffusion；By moving horizontally guide pad along guide groove, guide pad drives montant to move horizontally, and montant drives side locating rod to move
It is dynamic, side locating rod is adjusted to required position, the first locating piece is threaded through in locating slot and location hole successively, montant is consolidated
It is scheduled on cross bar, can position the silicon chip of different size, it is versatile；The section of first placing groove and the second placing groove is equal
The silicon chip of different-thickness can be adapted to using the structure for V-arrangement, it is highly practical.
The spacing of two adjacent first placing grooves is 2.25mm~2.35mm.
The material of first locating piece is quartz.
Several hanging rings for carrying are provided in the first support.
The first idler wheel is additionally provided in the first support, the first idler wheel and one can drive its first swing mechanism swung
It is connected.
Using the above structure, by the rolling of the first idler wheel, moving horizontally for first support, rapid operation can be facilitated.
First swing mechanism includes the first oscillating rod and limited block, and first oscillating rod one end is mutually cut with scissors with first support
It connects, the first oscillating rod other end and the first idler wheel are connected, and limited block is fixed in first support, and the first oscillating rod energy and limit
Position block leans.
When needing using the first idler wheel, the first oscillating rod is rotated, the first oscillating rod drives the first idler wheel to swing, by first
Idler wheel is put down, and is limited by the first oscillating rod of limited block pair；When that need not use the first idler wheel, rotation first is swung
Bar, the first oscillating rod drive the first idler wheel to swing, the first idler wheel are packed up.
The etching device includes rack, and rack is arranged is fixed with etching case on the table, in rack, also solid in rack
There are work box, work box to be connected with etching case by telescoping tube surely；Discharge electrode is fixed in work box, in the work box
It is provided with for carrying out cooling fan to it, fan can drive its first actuating unit rotated to be connected with one, the first power
Mechanism includes driving motor, the second oscillating rod and positioning plate, and positioning plate is arranged in work box, and positioning plate and one can drive thereon
The mobile mechanism of lower movement is connected, and driving motor is fixed on positioning plate, the output shaft of driving motor straight up, driving motor
Output shaft and second oscillating rod one end be hinged, the hinged place of the output shaft of driving motor and the second oscillating rod is limited equipped with angle
Position block, the second oscillating rod other end are mutually fixed with fan；Mobile mechanism includes driving cylinder and the first mounting plate, drives cylinder
Cylinder body is fixed on the rack, the piston rod for driving cylinder straight up, drive the piston rod end of cylinder stretch into work box and
First mounting plate is mutually fixed, and positioning plate is arranged on the first mounting plate, and the first bullet is provided between positioning plate and the first mounting plate
Spring, the first spring one end are connected with positioning plate, and the first spring other end and the first mounting plate are connected.
The process of the etching device is as follows：In etching case etching reaction occurs for silicon chip, and ozone is generated by discharge electrode,
Ozone is transported in etching case by delivery pipe；During being somebody's turn to do work the temperature inside the box can increase, the work of control driving cylinder
Stopper rod moves up and down, and drives the piston rod of cylinder that the first mounting plate is driven to move up and down, the first mounting plate drives positioning plate or more
Mobile, positioning plate adjusts fan to suitable height；It controls driving motor and drives the rotation of the second oscillating rod, the second oscillating rod band
Dynamic fan rotation, with the rotation of fan, can cool down work box, it is ensured that normal to provide ozone for etching machine, work is steady
It is qualitative good.
The temperature measuring mechanism of work the temperature inside the box can be detected by being additionally provided in the rack.
Using the above structure, the temperature in work box can be quickly detected by temperature measuring mechanism.
The temperature measuring mechanism includes the first controller, temperature sensor, the first push-rod electric machine, the first guide rail and the first cunning
Block, the first guide rail are fixed in work box vertically, and the first sliding block is arranged on the first guide rail, and the first push-rod electric machine is fixed on rack
On, straight up, the push rod end of the first push-rod electric machine is connected the push rod of the first push-rod electric machine with the first sliding block, temperature sensor
It is fixed on the first sliding block by connecting rod, display screen is fixed on the rack, and the first push-rod electric machine, temperature sensor and display screen are equal
It is connected with first controller.
When needing to detect work the temperature inside the box, the push rod of the first push-rod electric machine of control moves up and down, the first push-rod electric machine
Push rod drive the first sliding block moved up and down along the first guide rail, the first sliding block drive connecting rod move up and down, connecting rod band dynamic temperature
Sensor moves up and down, and the signal detected is passed to the first controller, the first controller control display screen by temperature sensor
Work, its temperature value detected is shown by display screen, can collecting work case many places since temperature sensor can move up and down
Data, thermometric is accurate, reliable.
The driving cylinder is connected with above-mentioned first controller.
Using the above structure, pass through the controllable driving cylinder movement of the first controller.
The second idler wheel, the second swing mechanism phase that the second idler wheel can drive its swing with one are additionally provided in the rack
Even.
Using the above structure, by the rolling of the second idler wheel, moving horizontally for rack, rapid operation can be facilitated.
Second swing mechanism includes head rod and positioning bolt, and head rod one end and rack are hinged,
The head rod other end and the second idler wheel are connected, and positioning bolt is threaded on head rod, and positioning bolt end
It portion can be against in rack.
When needing using the second idler wheel, head rod is rotated, head rod drives the second idler wheel to swing, by second
Idler wheel is put down, and is positioned to head rod by positioning bolt；When the second idler wheel need not be used, the first connection of rotation
Bar, head rod drive the second idler wheel to swing, the second idler wheel are packed up, is determined head rod by positioning bolt
Position, it is highly practical.
The squeegee apparatus includes locating rack, and locating rack setting is provided with oblique scraper, tiltedly scrapes on the table, on locating rack
Knife includes scraping article, installation part and knife rest, and the section of the scraping article is square, and scraping article is being installed by detachable structure setting
On part, installation part is arranged on knife rest, and installation part can drive its third swing mechanism swung to be connected with one, third swing mechanism
Including the second push-rod electric machine and third oscillating rod, third oscillating rod one end and knife rest are hinged, the third oscillating rod other end and peace
Piece installing is fixedly connected with, and the second push-rod electric machine is hinged on knife rest, and the push rod of the second push-rod electric machine is obliquely installed, the second push-rod electric machine
It is hinged in the middle part of push rod end and third oscillating rod, angle indicating mechanism is additionally provided on knife rest.
The process of the squeegee apparatus is as follows：When needing to scratch silicon chip, the push rod of the second push-rod electric machine of control comes
Return is dynamic, and the push rod of the second push-rod electric machine drives third oscillating rod to move back and forth, and third oscillating rod drives installation part to move back and forth,
Installation part drives scraping article to move back and forth, and so that scraping article is adjusted with horizontal plane angulation, is suitable for different blade coating requirements,
The two angulation value is may indicate that by angle indicating mechanism, it is highly practical.
The material of the scraping article is rubber.
The material of the installation part is stainless steel, also has several stiffeners on installation part.
Using the above structure, the integral strength of installation part can be increased by stiffener, consolidation effect is good.
The detachable structure includes mounting groove and the positioning screw opened up on mountings, and scraping article can be inserted into mounting groove
In, positioning screw is threadedly coupled on mountings, and the end of positioning screw can be resisted against on scraping article.
Using the above structure, by rotational positioning screw, scraping article can be taken out from the mounting groove of installation part, dismounting side
Just.
As another situation, the detachable structure includes the mounting groove and gag lever post opened up on mountings, scraping article
It can be inserted into mounting groove, gag lever post one end and installation part are hinged, and the gag lever post other end can lean with scraping article, on mounting groove
Also there is the limiting section of protrusion, scraping article to offer limiting slot corresponding with limiting section on four sides.
Using the above structure, by rotary spacing bar, scraping article can be taken out from the mounting groove of installation part, it is convenient for disassembly and assembly.
The angle indicating mechanism includes the indicator board and pointer for having angle value, and indicator board is fixed on third oscillating rod
On, pointer is fixed on knife rest, and pointer is towards indicator board.
Using the above structure, indicator board is driven to swing by third oscillating rod, pointer indicates the angle value on indicator board, refers to
Show intuitive.
The sintering equipment includes falsework, and falsework is arranged on the table, and falsework both ends are respectively arranged with actively
Axis and driven shaft, driving shaft can drive its second actuating unit rotated to be connected, be arranged on driving shaft and driven shaft and be in one
The chain belt of annular is provided with several the second locating pieces for positioning silicon chip on chain band, and the second locating piece includes one He of locating rod
Locating rod two, locating rod one and locating rod two are separately fixed at the both sides of chain belt, have the limiting section one of protrusion in locating rod one,
The limiting section two in locating rod two with protrusion forms the positioning region for positioning silicon chip between limiting section one and limiting section two；
It can includes rinse bath for holding cleaning solution to the cleaning structure that chain belt is cleaned, cleaning structure to be provided on falsework,
Rinse bath is arranged on falsework, and rinse bath can drive the elevating mechanism of lower lifting to be thereon connected with one, be provided in rinse bath
Several cleaning rollers, and cleaning roller can be in contact with chain belt.
The process of the sintering crawler belt is as follows：In silicon chip sintering process, it is located by locating rod one and locating rod two
On chain band, the aluminium paste of fusing can be set on chain band while cooling, driven rinse bath to move up and down by elevating mechanism, cleaned
Slot drives cleaning roller to move up and down, and cleaning roller and chain belt is made to be in contact；Driving shaft rotation is driven by the second actuating unit, actively
Axis drives chain belt rotation, chain belt to drive cleaning roller rotation, and the cleaning solution in rinse bath is coated on chain band by cleaning roller, make aluminium paste from
It is detached from chain band, it is easy to clean；The limiting section 1 on second locating piece one with protrusion, two have protrusion on the second locating piece
Limiting section two forms the positioning region for positioning silicon chip and changes tradition using the structure between limiting section one and limiting section two
Thimble positioning method, avoid silicon chip back side from thimble point, good product quality occur.
The cleaning structure further includes the water tank, sparge pipe and water receiver for holding clear water, and sparge pipe passes through locating rod
It is fixed on rinse bath, sparge pipe one end is blind end, and the sparge pipe other end is connected by delivery pipe with water tank, sparge pipe side
It is further opened with several hole for water sprayings, hole for water spraying is provided with water pump towards chain belt in delivery pipe, and water receiver is fixed on falsework, and
Water receiver is located at immediately below sparge pipe.
Using the above structure, the water in water tank is transported to by delivery pipe in sparge pipe by water pump, and sparge pipe will be on chain band
Cleaning solution and aluminium paste rinse out, waste water is collected by water receiver.
Second actuating unit includes motor, driving gear and driven gear, and motor is fixed on falsework, motor
Output shaft is horizontally disposed, and driving gear is fixed on the output shaft of motor, and driven gear is fixed on driving shaft, driving gear with
Driven gear is meshed.
When needing that driving shaft is made to rotate, the output shaft rotation of motor is controlled, the output shaft of motor drives driving tooth rotation
Dynamic, driving gear drives driven gear rotation, and driven gear drives driving shaft rotation, so as to make driving shaft rotate.
The elevating mechanism includes third push-rod electric machine, the second guide rail, the second sliding block and mounting bracket, and the second guide rail is solid vertically
It is scheduled on falsework, the second sliding block is arranged on the second guide rail, and third push-rod electric machine is fixed on falsework, third push-rod electric machine
Push rod straight up, the push rod end of third push-rod electric machine is connected with the second sliding block, and mounting bracket is fixed on the second sliding block, clearly
Washing trough is fixed on mounting bracket.
When needing that rinse bath is made to move up and down, the push rod of control third push-rod electric machine moves up and down, third push-rod electric machine
Push rod drive the second sliding block moved up and down along the second guide rail, the second sliding block drive mounting bracket move up and down, mounting bracket drive
Rinse bath moves up and down, so as to make rinse bath move up and down.
The control mechanism of third push-rod electric machine action can be controlled by being additionally provided on the rinse bath, and control mechanism includes third
Idler wheel, second support, the second mounting plate, travel switch, detection bar and second controller, the second mounting plate are fixed on rinse bath
On, second support is arranged on the second mounting plate, and third spring, third spring are provided between second support and the second mounting plate
One end is fixed on the secondary support bracket, and the third spring other end is fixed on the second mounting plate, and third idler wheel is connected to second support
On, and third idler wheel can be in contact with chain belt, travel switch is fixed on the secondary support bracket, and detection bar is fixed on the second mounting plate
On, and detection bar can be in contact with travel switch, third push-rod electric machine, travel switch are connected with the second controller.
When detection bar and travel switch contact, cleaning roller is just in contact with chain belt, using the above structure, passes through third
When push-rod electric machine makes rinse bath move up, rinse bath makes third idler wheel and chain belt be in contact, as rinse bath continues up shifting
Dynamic, the second mounting plate overcomes the elastic force of third spring to continue to move up, and the second mounting plate drives detection bar to move up, and detects
Bar and travel switch are in contact, and signal is passed to second controller by travel switch, and second controller controls third push-rod electric machine
It is stopped, it is ensured that cleaning roller is contacted with chain belt always, easy to control.
It can include air pump to the dry body that chain belt is dried up, dry body and several for being additionally provided on the falsework
The outlet side of appendix, several appendixs is fixed on by the second connecting rod on falsework, and the outlet side is towards chain belt, several
The inlet end of appendix is connected by connecting tube with air pump, has several electric heating tubes in connecting tube.
When needing to dry up cleaned chain belt, motor heat pipe is connected, the air after heating is passed through company by air pump
It takes over and is transported in appendix, the air flowed to dries up chain belt, and drying is convenient.
It is additionally provided with flow control valve in the connecting tube.
Using the above structure, the flow in connecting tube is adjusted by flow control valve, it is easy to adjust.
Compared with prior art, the present invention has the following advantages：
1, continuously silicon chip can be diffused, etch, clean, scratch and be sintered in the present invention, it can be achieved that continuous uninterrupted
Production, production efficiency are high.
2, by moving horizontally guide pad along guide groove, guide pad drives montant to move horizontally, and montant drives side fixed
Position bar movement, can position the silicon chip of different size, versatile.
It 3, can be to work by driving cylinder to suitable height, so that fan is rotated by driving motor fan adjusting
Case is cooled down, it is ensured that the normal preparation of ozone, good operating stability.
4, it drives scraping article to move back and forth by push-rod electric machine, so that scraping article is adjusted with horizontal plane angulation, can fit
Different blade coating requirements is answered, it is highly practical.
5, the positioning region formed by limiting section one and limiting section two is positioned silicon chip and is changed traditional using the structure
Thimble positioning method avoids silicon chip back side from thimble point, good product quality occur.
Description of the drawings
Fig. 1 is the dimensional structure diagram of disperser.
Fig. 2 is the dimensional structure diagram that disperser removes part.
Fig. 3 is the planar structure schematic diagram that disperser removes part.
Fig. 4 is the sectional view of etching device.
Fig. 5 is the dimensional structure diagram of squeegee apparatus.
Fig. 6 is the planar structure schematic diagram of squeegee apparatus.
Fig. 7 is the planar structure schematic diagram of sintering equipment.
Fig. 8 is the close-up schematic view at A in Fig. 7.
Fig. 9 is the sectional view that sintering equipment removes part.
Figure 10 is the dimensional structure diagram of sparge pipe in sintering equipment.
Figure 11 is the planar structure schematic diagram of dry body in sintering equipment.
Figure 12 is the planar structure schematic diagram of the second actuating unit in sintering equipment.
Figure 13 is the planar structure schematic diagram that the present invention removes part.
In figure, 1, first support；1a, montant；1b, cross bar；1b1, guide groove；1b2, location hole；2, side locating rod；
2a, the first placing groove；3, bottom locating rod；3a, the second placing groove；4, hanging ring；5, the first locating piece；6, guide pad；6a, positioning
Slot；7, limited block；8, the first idler wheel；9, the first oscillating rod；10, rack；11, work box；12, fan；13, positioning plate；14,
One spring；15, cylinder is driven；16, the first mounting plate；17, the first push-rod electric machine；18, positioning bolt；19, head rod；
20, the second idler wheel；21, display screen；22, the first controller；23, the first sliding block；24, temperature sensor；25, the first guide rail；26、
Driving motor；27, angle limit block；28, the second oscillating rod；29, discharge electrode；30, knife rest；31, positioning screw；32, scraping article；
33, stiffener；34, installation part；34a, mounting groove；35, third oscillating rod；36, the second push-rod electric machine；37, indicator board；38, refer to
Needle；39, falsework；40, water tank；41, delivery pipe；42, water pump；43, water receiver；44, second controller；45, driving shaft；46、
Chain belt；47, driven shaft；48, mounting bracket；49, third push-rod electric machine；50, the second sliding block；51, the second guide rail；52, the second installation
Plate；53, detection bar；54, third spring；55, travel switch；56, second support；57, third idler wheel；58, cleaning roller；59, it sprays
Water pipe；59a, hole for water spraying；60, rinse bath；61, locating rod one；61a, limiting section one；62, locating rod two；62a, limiting section two；
63, air pump；64, electric heating tube；65, flow control valve；66, connecting tube；67, appendix；68, motor；69, driven gear；70、
Driving gear；71, pedestal；72, cylinder；73, guide post；74, guide sleeve；75, workbench.
Specific implementation mode
Following is a specific embodiment of the present invention in conjunction with the accompanying drawings, technical scheme of the present invention will be further described,
However, the present invention is not limited to these examples.
As shown in figure 13, it is originally used to prepare the production system of cell piece, including pedestal 71, workbench is provided on pedestal 71
75, workbench 75 can drive the lifting structure of lower lifting to be thereon connected with one, and disperser is disposed on workbench 75, is carved
Device, cleaning device, squeegee apparatus and sintering equipment are lost, in the present embodiment, cleaning device is used and retrieved in the prior art
Quick cleaning device；Lifting structure includes guide post 73, guide sleeve 74 and cylinder 72, and guide post 73 is fixed on pedestal 71, guide sleeve 74
It is fixed on workbench 75, guide sleeve 74 is slidably socketed on guide post 73, and the cylinder body of cylinder 72 is fixed on pedestal 71, cylinder 72
Straight up, the piston rod end of cylinder 72 is connected piston rod with workbench 75.
As shown in Figure 1 and Figure 2, disperser includes quartz ampoule, and quartz ampoule is arranged on workbench 75, setting in quartz ampoule
There is a quartz boat, quartz boat includes two first supports being oppositely arranged, 1, two bottom locating rod 3 and two side locating rods 2,
Two bottom locating rods 3 are mutually fixed with the bottom edge of two first supports 1 respectively, two side locating rods 2 respectively with two first
Two sides of holder 1 are mutually fixed, and first support 1 takes the shape of the letter U, and first support 1 includes cross bar 1b and two montant 1a, two montants
1a is separately positioned on the both ends of cross bar 1b, and regulating mechanism is provided between montant 1a and cross bar 1b, and regulating mechanism includes being opened in
The material of guide groove 1b1 on cross bar 1b, T-shaped guide pad 6 and the first locating piece 5, the first locating piece 5 is quartz, is oriented to
The material of block 6 is also quartz；6 one end of guide pad is fixed with montant 1a phases, and 6 other end of guide pad is arranged in guide groove 1b1, and
Guide pad 6 can be moved horizontally along guide groove 1b1, and several location hole 1b2 are further opened on cross bar 1b, in the present embodiment, positioning
The quantity of hole 1b2 is ten；And location hole 1b2 and guide groove 1b1 connect, and locating slot 6a are offered on guide pad 6, and position
Slot 6a can connect with any one location hole 1b2, and the first locating piece 5 is threaded through successively in locating slot 6a and location hole 1b2；Two
The opposite side of a side locating rod 2 is equipped with several first placing groove 2a, and the upside of two bottom locating rods 3 is equipped with puts with first
The section for setting the second placing groove 3a, the first placing groove 2a and the second placing groove 3a that slot 2a matches is V-arrangement, in the present embodiment
In, the quantity of the first placing groove 2a and the second placing groove 3a are 500, using the structure, can adapt to different-thickness
Silicon chip, it is highly practical；By moving horizontally guide pad 6 along guide groove 1b1, guide pad 6 drives montant 1a to move horizontally, montant
1a drives side locating rod 2 to move, and side locating rod 2 is adjusted and arrives required position, the first locating piece 5 is threaded through positioning successively
In slot 6a and location hole 1b2, montant 1a is fixed on cross bar 1b, can position the silicon chip of different size, it is versatile.
As shown in Figure 1, the ratio between the length of side locating rod 2 and the adjacent spacing of two the first placing groove 2a are 500：1
Or 450：1, in the present embodiment, the length of side locating rod 2 and the ratio between the spacing of two adjacent the first placing groove 2a are
500：1；The spacing of two adjacent the first placing groove 2a is 2.25mm~2.35mm, in the present embodiment, adjacent two the
The spacing of one placing groove 2a is 2.30mm.
As shown in Figure 1, being provided with several hanging rings 4 for carrying, in the present embodiment, the number of hanging ring 4 in first support 1
Amount is four, and the material of hanging ring 4 is quartz.
As shown in figure 3, be additionally provided with the first idler wheel 8 in first support 1, the first idler wheel 8 and one can drive that it swings the
One swing mechanism is connected；First swing mechanism includes the first oscillating rod 9 and limited block 7,9 one end of the first oscillating rod and first support
1 is hinged, and 9 other end of the first oscillating rod and the first idler wheel 8 are connected, and limited block 7 is fixed in first support 1, and the first pendulum
Lever 9 can lean with limited block 7；In the present embodiment, the material of the first oscillating rod 9 and limited block 7 is quartz；Using this
Structure rotates the first oscillating rod 9, the first oscillating rod 9 drives the first idler wheel 8 to swing, by first when needing using the first idler wheel 8
Idler wheel 8 is put down, and is limited to the first oscillating rod 9 by limited block 7；When the first idler wheel 8 need not be used, the first pendulum of rotation
Lever 9, the first oscillating rod 9 drive the first idler wheel 8 to swing, the first idler wheel 8 are packed up.
As shown in figure 4, etching device includes rack 10, rack 10 is arranged on workbench 75, and quarter is fixed in rack 10
Case is lost, work box 11 is further fixed in rack 10, work box 11 is connected by telescoping tube with etching case；It is fixed in work box 11
There is discharge electrode 29, discharge electrode 29 is using the existing product that can be bought in the market；It is provided with for it in work box 11
Cooling fan 12 is carried out, fan 12 can drive its first actuating unit rotated to be connected with one, and the first actuating unit includes driving
Dynamic motor 26, the second oscillating rod 28 and positioning plate 13, positioning plate 13 are arranged in work box 11, and positioning plate 13 and one can drive it
The mobile mechanism moved up and down is connected, and driving motor 26 is fixed on positioning plate 13, the side that driving motor 26 is bolted
Formula is fixed on positioning plate 13；The output shaft of driving motor 26 straight up, the output shaft of driving motor 26 and the second oscillating rod
28 one end are hinged, and the hinged place of the output shaft of driving motor 26 and the second oscillating rod 28 is equipped with angle limit block 27, passes through angle
Degree limited block 27 limits when can be swung up and down to the second oscillating rod 28；Second oscillating rod, 28 other end is mutually consolidated with fan 12
Fixed, the other end of the second oscillating rod 28 is mutually fixed with fan 12 by bolted connection；Mobile mechanism includes driving cylinder
15 and first mounting plate 16, the cylinder body of driving cylinder 15 be fixed in rack 10, the cylinder body of driving cylinder 15 is bolted
Mode be fixed in rack 10；The piston rod for driving cylinder 15 straight up, drives the piston rod end of cylinder 15 to stretch into work
Make mutually to fix with the first mounting plate 16 in case 11, positioning plate 13 is arranged on the first mounting plate 16, and positioning plate 13 and first is installed
The first spring 14 is provided between plate 16,14 one end of the first spring is connected with positioning plate 13,14 other end of the first spring and first
Mounting plate 16 is connected, and is acted on by the elastic force of the first spring 14, can carry out damping to positioning plate 13.
As shown in figure 4, be additionally provided with the temperature measuring mechanism that can detect temperature in work box 11 in rack 10, using the structure,
The temperature in work box 11 can be quickly detected by temperature measuring mechanism；Temperature measuring mechanism include the first controller 22, temperature sensor 24,
First push-rod electric machine 17, the first guide rail 25 and the first sliding block 23, the first guide rail 25 are fixed on vertically in work box 11, the first guide rail
25 are fixed on by bolted connection in work box 11；First sliding block 23 is arranged on the first guide rail 25, the first push rod electricity
Machine 17 is fixed in rack 10, and the first push-rod electric machine 17 is fixed on by bolted connection in rack 10；First push rod electricity
Straight up, the push rod end of the first push-rod electric machine 17 is connected the push rod of machine 17 with the first sliding block 23, the first push-rod electric machine 17
Push rod end is connected with the first sliding block 23 by bolted connection；Temperature sensor 24 is fixed on the first sliding block by connecting rod
On 23, display screen 21 is fixed in rack 10, and display screen 21 is fixed on by bolted connection in rack 10；First push rod
Motor 17, temperature sensor 24 and display screen 21 are connected with first controller 22, in the present embodiment, the first controller 22
Using the microcontroller that can be bought in the market, microcontroller control motor, cylinder, sensor and display screen program have it is existing,
Program need not update；Driving cylinder 15 is connected with the first controller 22, can by the first controller 22 using the structure
Control driving cylinder 15 acts.
As shown in figure 4, being additionally provided with the second idler wheel 20 in rack 10, the second idler wheel 20 and one can drive the second of its swing
Swing mechanism is connected；Second swing mechanism includes head rod 19 and positioning bolt 18,19 one end of head rod and rack
10 are hinged, and 19 other end of head rod and the second idler wheel 20 are connected, and positioning bolt 18 is threaded in head rod
On 19, and 18 end of positioning bolt can be against in rack 10；Using the structure, when needing using the second idler wheel 20, rotation the
One connecting rod 19, head rod 19 drive the second idler wheel 20 to swing, the second idler wheel 20 are put down, by positioning bolt 18 to the
One connecting rod 19 is positioned；When the second idler wheel 20 need not be used, head rod 19 is rotated, head rod 19 drives
Second idler wheel 20 is swung, and the second idler wheel 20 is packed up, is positioned to head rod 19 by positioning bolt 18.
The process of the etching device is as follows：In etching case etching reaction occurs for silicon chip, is generated by discharge electrode 29 smelly
Oxygen is transported to by delivery pipe in etching case；Should during temperature can be made to increase in work box 11, the first controller 22 control the
The push rod of one push-rod electric machine 17 moves up and down, and the push rod of the first push-rod electric machine 17 drives the first sliding block 23 to move up and down, and first slides
Block 23 drives connecting rod to move up and down, and connecting rod drives temperature sensor 24 to move up and down, the signal that temperature sensor 24 will detect
The first controller 22 is passed to, 22 control display screen 21 of the first controller shows its temperature value detected, meanwhile, the first control
The piston rod of the control driving cylinder 15 of device 22 moves up and down, and the piston rod of driving cylinder 15 drives to be moved down on the first mounting plate 16
Dynamic, the first mounting plate 16 drives positioning plate 13 to move up and down, and fan 12 is adjusted and arrives desired height；Driving motor 26 is controlled to drive
Second oscillating rod 28 rotates, and the second oscillating rod 28 drives fan 12 to rotate, and with the rotation of fan 12, can be carried out to work box 11
It is cooling, it is ensured that the normal preparation of ozone.
As shown in Figure 5, Figure 6, squeegee apparatus includes locating rack, and locating rack is arranged on workbench 75, is arranged on locating rack
It includes scraping article 32, installation part 34 and knife rest 30 to have oblique scraper, oblique scraper, and the material of scraping article 32 is rubber；The section of scraping article 32 is
Square, scraping article 32 are arranged by a detachable structure on installation part 34, and installation part 34 is arranged on knife rest 30, installation part 34
Its third swing mechanism swung can be driven to be connected with one, third swing mechanism includes the second push-rod electric machine 36 and third oscillating rod
35,35 one end of third oscillating rod and knife rest 30 are hinged, and 35 other end of third oscillating rod and installation part 34 are fixedly connected with, and third is swung
The other end of bar 35 is fixedly connected with installation part 34 by bolted connection；Second push-rod electric machine 36 is hinged on knife rest 30,
The push rod of second push-rod electric machine 36 is obliquely installed, and the push rod end of the second push-rod electric machine 36 is mutually cut with scissors with 35 middle part of third oscillating rod
It connects, angle indicating mechanism is additionally provided on knife rest 30.
As shown in Figure 5, Figure 6, the material of installation part 34 is stainless steel, also has several stiffeners 33 on installation part 34,
In the present embodiment, the quantity of stiffener 33 is ten；Using the structure, the whole strong of installation part 34 can be increased by stiffener 33
Degree.
As shown in Figure 5, Figure 6, detachable structure includes the mounting groove 34a being opened on installation part 34 and positioning screw 31,
Scraping article 32 can be inserted into mounting groove 34a, and positioning screw 31 is threaded on installation part 34, and the end energy of positioning screw 31
It is resisted against on scraping article 32, it, can be by scraping article 32 from the mounting groove 34a of installation part 34 by rotational positioning screw 31 using the structure
Middle taking-up, it is convenient for disassembly and assembly；According to actual conditions, this kind of embodiment may be used, detachable structure includes being opened in installation part
Mounting groove 34a on 34 and gag lever post, scraping article 32 can be inserted into mounting groove 34a, and gag lever post one end and installation part 34 are hinged,
The gag lever post other end can lean with scraping article 32, and also there is the limiting section of protrusion, scraping article to be opened on 32 4 sides on mounting groove 34a
Equipped with limiting slot corresponding with limiting section.
As shown in Figure 5, Figure 6, angle indicating mechanism includes the indicator board 37 and pointer 38 for having angle value, and indicator board 37 is solid
It is scheduled on third oscillating rod 35, indicator board 37 is fixed on by bolted connection on third oscillating rod 35；Pointer 38 is fixed
On knife rest 30, pointer 38 is fixed on by bolted connection on knife rest 30；And pointer 38 is towards indicator board 37.
The process of the squeegee apparatus is as follows：When needing to scratch silicon chip, the push rod of the second push-rod electric machine 36 is controlled
Move back and forth, the push rod of the second push-rod electric machine 36 drives third oscillating rod 35 to move back and forth, and third oscillating rod 35 drives installation part
34 move back and forth, and installation part 34 drives scraping article 32 to move back and forth, and scraping article 32 is enable to be adjusted with horizontal plane angulation, adapt to
Different blade coating requirements；In the present embodiment, it is 70 ° that can make scraping article 32 and horizontal plane angulation.
As shown in Fig. 7, Fig. 8, Fig. 9, sintering equipment includes falsework 39, and falsework 39 is arranged on workbench 75, work
39 both ends of frame are respectively arranged with driving shaft 45 and driven shaft 47, the second actuating unit phase that driving shaft 45 can drive its rotation with one
Even, it is arranged with chain belt 46 in a ring on driving shaft 45 and driven shaft 47, is provided in chain belt 46 several for positioning silicon chip
Second locating piece, in the present embodiment, the quantity of the second locating piece is 100；Second locating piece includes locating rod 1 and determines
Position bar 2 62, locating rod 1 and locating rod 2 62 are separately fixed at the both sides of chain belt 46, have protrusion in locating rod 1
One 61a of limiting section, has two 62a of limiting section of protrusion in locating rod 2 62, shape between two 62a of one 61a of limiting section and limiting section
Traditional thimble positioning method is changed, silicon chip back side is avoided to push up using the structure at the positioning region for positioning silicon chip
Pin mark, good product quality；The cleaning structure that can be cleaned to chain belt 46 is provided on falsework 39, cleaning structure includes being used for
The rinse bath 60 of cleaning solution is held, in the present embodiment, cleaning solution can be grass using the acid solution that can be bought in the market
Acid or light-coloured vinegar；Rinse bath 60 is arranged on falsework 39, and rinse bath 60 can drive the elevating mechanism of lower lifting to be thereon connected with one,
Several cleaning rollers 58 are provided in rinse bath 60, in the present embodiment, the quantity of cleaning roller 58 is five；And cleaning roller 58 can and
Chain belt 46 is in contact.
As shown in Fig. 7, Fig. 8, Figure 10, cleaning structure further includes the water tank 40, sparge pipe 59 and water receiving for holding clear water
Box 43, sparge pipe 59 are fixed on by locating rod on rinse bath 60, and 59 one end of sparge pipe is blind end, and 59 other end of sparge pipe is logical
It crosses delivery pipe 41 with water tank 40 to be connected, 59 side of sparge pipe is further opened with several hole for water spraying 59a, in the present embodiment, hole for water spraying
The quantity of 59a is ten；Hole for water spraying 59a is provided with water pump 42, water receiver 43 is fixed on work towards chain belt 46 in delivery pipe 41
On frame 39, water receiver 43 is fixed on by bolted connection on falsework 39；And under water receiver 43 is located at sparge pipe 59 just
Side.
As shown in figure 12, the second actuating unit includes motor 68, driving gear 70 and driven gear 69, and motor 68 is fixed on
On falsework 39, motor 68 is fixed on by bolted connection on falsework 39；The output shaft of motor 68 is horizontally disposed, main
Moving gear 70 is fixed on the output shaft of motor 68, and driven gear 69 is fixed on driving shaft 45, driving gear 70 and driven tooth
Wheel 69 is meshed.
As shown in Figure 7, Figure 8, elevating mechanism includes third push-rod electric machine 49, the second guide rail 51, the second sliding block 50 and installation
Frame 48, the second guide rail 51 are fixed on vertically on falsework 39, and the second guide rail 51 is fixed on falsework by bolted connection
On 39；Second sliding block 50 is arranged on the second guide rail 51, and third push-rod electric machine 49 is fixed on falsework 39, third push-rod electric machine
49 are fixed on by bolted connection on falsework 39；Straight up, third push rod is electric for the push rod of third push-rod electric machine 49
The push rod end of machine 49 is connected with the second sliding block 50, and mounting bracket 48 is fixed on the second sliding block 50, and mounting bracket 48 is connected by bolt
The mode connect is fixed on the second sliding block 50；Rinse bath 60 is fixed on mounting bracket 48, and rinse bath 60 is solid by welding
It is scheduled on mounting bracket 48.
As shown in Figure 7, Figure 8, the control mechanism of the action of third push-rod electric machine 49 can be controlled by being additionally provided on rinse bath 60, control
Mechanism processed includes third idler wheel 57, second support 56, the second mounting plate 52, travel switch 55, detection bar 53 and second controller
44, the second mounting plate 52 is fixed on rinse bath 60, and the second mounting plate 52 is fixed on rinse bath 60 by bolted connection
On；Second support 56 is arranged on the second mounting plate 52, and third spring is provided between second support 56 and the second mounting plate 52
54,54 one end of third spring is fixed in second support 56, and 54 other end of third spring is fixed on the second mounting plate 52, third
Idler wheel 57 is connected in second support 56, and third idler wheel 57 can be in contact with chain belt 46, and travel switch 55 is fixed on second
On frame 56, travel switch 55 is fixed on by bolted connection in second support 56；Detection bar 53 is fixed on the second installation
On plate 52, detection bar 53 is fixed on by bolted connection on the second mounting plate 52；And detection bar 53 can and travel switch
55 are in contact, and third push-rod electric machine 49, travel switch 55 are connected with the second controller 44, in the present embodiment, the second control
Device 44 is using the microcontroller that can be bought in the market, and it is existing that microcontroller, which controls motor and the program of travel switch, and program is not
It updates.
As shown in figure 11, the dry body that can be dried up to chain belt 46, dry body packet are additionally provided on falsework 39
Air pump 63 and several appendixs 67 are included, the outlet side of several appendixs 67 is fixed on by the second connecting rod on falsework 39, and
The outlet side is connected with air pump 63 by connecting tube 66, is had in connecting tube 66 towards chain belt 46, the inlet end of several appendixs 67
There are several electric heating tubes 64；In the present embodiment, the quantity of appendix 67 is five, and the quantity of electric heating tube 64 is three；Even
Flow control valve 65 is additionally provided in take over 66.
The operation principle of the sintering crawler belt is as follows：In silicon chip sintering process, pass through locating rod 1 and locating rod 2 62
It is located in chain belt 46, the aluminium paste of fusing can be set in chain belt 46 while cooling；Control third push-rod electric machine 49 pushes away
Bar moves up and down, and the push rod of third push-rod electric machine 49 drives the second sliding block 50 to move up and down, and the second sliding block 50 drives mounting bracket 48
It moves up and down, mounting bracket 48 drives rinse bath 60 to move up and down, and rinse bath 60 drives cleaning roller 58 to move up and down, and makes cleaning roller 58
It is in contact with chain belt 46；The output shaft rotation of motor 68 is controlled, the output shaft of motor 68 drives driving gear 70 to rotate, driving tooth
Wheel 70 drives driven gear 69 to rotate, and driven gear 69 drives driving shaft 45 to rotate, and driving shaft 45 drives chain belt 46 to rotate, chain belt
46 drive cleaning roller 58 to rotate, and the cleaning solution in rinse bath 60 is coated in chain belt 46 by cleaning roller 58, makes aluminium paste from chain belt 46
It is detached from；The water in water tank 40 is transported in sparge pipe 59 by water pump 42, sparge pipe 59 is by the cleaning solution and aluminium in chain belt 46
Slurry rinses out；The air in the air delivery after heating to appendix 67, flowed to is dried up chain belt 46 by air pump 63.
Claims (6)
1. being used to prepare the sintering equipment in the production system of cell piece, the production system for being used to prepare cell piece includes pedestal,
Workbench is provided on pedestal, which is characterized in that the sintering equipment includes falsework, and falsework is arranged on the table, work
Make frame both ends and be respectively arranged with driving shaft and driven shaft, driving shaft can drive its second actuating unit rotated to be connected with one, main
It is arranged with chain belt in a ring on moving axis and driven shaft, 100 the second locating pieces for positioning silicon chip are provided on chain band,
Second locating piece includes locating rod one and locating rod two, and locating rod one and locating rod two are separately fixed at the both sides of chain belt, positioning
There is the limiting section one of protrusion on bar one, there is the limiting section two of protrusion, between limiting section one and limiting section two in locating rod two
Form the positioning region for positioning silicon chip；Being provided on falsework can be to the cleaning structure that chain belt is cleaned, cleaning structure packet
The rinse bath for holding cleaning solution is included, rinse bath is arranged on falsework, and rinse bath and one can drive the lower liter lifted thereon
Descending mechanism is connected, and there are five cleaning rollers for setting in rinse bath, and cleaning roller energy and chain belt are in contact；The second actuating unit packet
Motor, driving gear and driven gear are included, motor is fixed on falsework by bolted connection, the output shaft water of motor
Flat setting, driving gear are fixed on the output shaft of motor, and driven gear is fixed on driving shaft, driving gear and driven gear
It is meshed.
2. the sintering equipment according to claim 1 being used to prepare in the production system of cell piece, which is characterized in that described
Cleaning structure further includes the water tank, sparge pipe and water receiver for holding clear water, and sparge pipe is fixed on rinse bath by locating rod
On, sparge pipe one end is blind end, and the sparge pipe other end is connected by delivery pipe with water tank, and sparge pipe side is further opened with ten
Hole for water spraying, hole for water spraying are provided with water pump, water receiver is fixed on falsework by bolted connection towards chain belt in delivery pipe
On, and water receiver is located at immediately below sparge pipe.
3. the sintering equipment according to claim 1 being used to prepare in the production system of cell piece, which is characterized in that described
Elevating mechanism includes third push-rod electric machine, the second guide rail, the second sliding block and mounting bracket, and the second guide rail is fixed on falsework vertically
On, the second sliding block is arranged on the second guide rail, and third push-rod electric machine is fixed on falsework by bolted connection, third
Straight up, the push rod end of third push-rod electric machine is connected the push rod of push-rod electric machine with the second sliding block, and mounting bracket is connected by bolt
The mode connect is fixed on the second sliding block, and rinse bath is fixed on mounting bracket by welding.
4. the sintering equipment according to claim 3 being used to prepare in the production system of cell piece, which is characterized in that described
Be additionally provided on rinse bath can control third push-rod electric machine action control mechanism, control mechanism include third idler wheel, second
Frame, the second mounting plate, travel switch, detection bar and second controller, the second mounting plate are fixed on rinse bath, and second support is set
It sets on the second mounting plate, third spring is provided between second support and the second mounting plate, third spring one end is fixed on
On two holders, the third spring other end is fixed on the second mounting plate, and third idler wheel connects on the secondary support bracket, and third idler wheel
Can be in contact with chain belt, travel switch fix on the secondary support bracket, detection bar is fixed on the second mounting plate, and detection bar can and
Travel switch is in contact, and third push-rod electric machine, travel switch are connected with the second controller.
5. the sintering equipment according to claim 4 being used to prepare in the production system of cell piece, which is characterized in that described
It can includes air pump and several appendixs to the dry body that chain belt is dried up, dry body to be additionally provided on falsework, several
The outlet side of appendix is fixed on by the second connecting rod on falsework, and the outlet side is towards chain belt, several appendixs into
Gas end is connected by connecting tube with air pump, has several electric heating tubes in connecting tube.
6. the sintering equipment according to claim 5 being used to prepare in the production system of cell piece, which is characterized in that described
Flow control valve is additionally provided in connecting tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810063481.9A CN108336010A (en) | 2016-03-16 | 2016-03-16 | The sintering equipment being used to prepare in the production system of cell piece |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810063481.9A CN108336010A (en) | 2016-03-16 | 2016-03-16 | The sintering equipment being used to prepare in the production system of cell piece |
| CN201610150436.8A CN105789104B (en) | 2016-03-16 | 2016-03-16 | A kind of production system for being used to prepare cell piece |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610150436.8A Division CN105789104B (en) | 2016-03-16 | 2016-03-16 | A kind of production system for being used to prepare cell piece |
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| Publication Number | Publication Date |
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| CN108336010A true CN108336010A (en) | 2018-07-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810063481.9A Pending CN108336010A (en) | 2016-03-16 | 2016-03-16 | The sintering equipment being used to prepare in the production system of cell piece |
| CN201810063129.5A Pending CN108091731A (en) | 2016-03-16 | 2016-03-16 | The disperser being used to prepare in the production system of cell piece |
| CN201810063155.8A Active CN108281375B (en) | 2016-03-16 | 2016-03-16 | Production system for preparing battery piece |
| CN201610150436.8A Expired - Fee Related CN105789104B (en) | 2016-03-16 | 2016-03-16 | A kind of production system for being used to prepare cell piece |
| CN201810063552.5A Pending CN108321111A (en) | 2016-03-16 | 2016-03-16 | The etching device being used to prepare in the production system of cell piece |
| CN201810063860.8A Pending CN108321112A (en) | 2016-03-16 | 2016-03-16 | The squeegee apparatus being used to prepare in the production system of cell piece |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810063129.5A Pending CN108091731A (en) | 2016-03-16 | 2016-03-16 | The disperser being used to prepare in the production system of cell piece |
| CN201810063155.8A Active CN108281375B (en) | 2016-03-16 | 2016-03-16 | Production system for preparing battery piece |
| CN201610150436.8A Expired - Fee Related CN105789104B (en) | 2016-03-16 | 2016-03-16 | A kind of production system for being used to prepare cell piece |
| CN201810063552.5A Pending CN108321111A (en) | 2016-03-16 | 2016-03-16 | The etching device being used to prepare in the production system of cell piece |
| CN201810063860.8A Pending CN108321112A (en) | 2016-03-16 | 2016-03-16 | The squeegee apparatus being used to prepare in the production system of cell piece |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108857116B (en) * | 2018-08-07 | 2020-12-18 | 无锡旭邦精密机械有限公司 | Universal welding system for flower basket |
| CN109360868B (en) * | 2018-11-15 | 2020-01-14 | 浙江艾能聚光伏科技股份有限公司 | Processing production line of solar cell |
| CN109610003A (en) * | 2019-01-02 | 2019-04-12 | 天津大学 | A kind of novel controllable organic crystal growth apparatus and its method for preparing organic single-crystal |
| CN112372466A (en) * | 2020-10-27 | 2021-02-19 | 杭州职业技术学院 | Grinding machine special for machining automobile parts |
| CN113062896B (en) * | 2021-03-18 | 2022-09-27 | 秦皇岛金辰太阳能设备有限公司 | Driving method of ejector pin rod and negative pressure jacking type photovoltaic assembly laminating machine |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3732062A (en) * | 1972-01-20 | 1973-05-08 | J Porteus | Method of and apparatus for reducing air pollution in the thermal processing of ores and other materials |
| CN102437078A (en) * | 2011-12-06 | 2012-05-02 | 兴安吉阳设备有限公司 | Method and device for reducing deviation rate of cell when conveying solar cell through mesh belt |
| CN105789376A (en) * | 2016-03-10 | 2016-07-20 | 浙江晶能光电有限公司 | Preparation method of solar cell |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2811505C2 (en) * | 1978-03-16 | 1985-11-21 | Gustav Schade Maschinenfabrik Gmbh & Co, 4600 Dortmund | Removal scratches |
| JP2002122340A (en) * | 2000-10-16 | 2002-04-26 | Sony Corp | Apparatus for manufacturing semiconductor device |
| CN101154718A (en) * | 2006-09-28 | 2008-04-02 | 天津众拓科技有限公司 | Needle type battery sealing method and its special device |
| CN201240843Y (en) * | 2008-07-31 | 2009-05-20 | 江阴华东医疗科技有限公司 | Small-sized efficient tubular centralized ozone generator |
| KR101106100B1 (en) * | 2009-08-28 | 2012-01-18 | 주식회사 포틱스 | The pitch adjust device for solar cell wafer |
| CN102544228B (en) * | 2011-09-22 | 2013-12-25 | 浙江绿远光伏科技有限公司 | Gas dynamic diffusion device of crystalline silicon solar cell |
| CN202758856U (en) * | 2012-07-23 | 2013-02-27 | 恒昇新能源光伏（苏州）科技有限公司 | Quartz boat |
| CN203085500U (en) * | 2012-12-28 | 2013-07-24 | 常州亿晶光电科技有限公司 | Diffusion quartz boat |
| CN203449751U (en) * | 2013-09-02 | 2014-02-26 | 浙江劲豹机械有限公司 | Angular adjustment and locking device of scraper |
| CN204118098U (en) * | 2014-07-22 | 2015-01-21 | 广东爱康太阳能科技有限公司 | A kind of production system of Cu electrode solar cell |
| CN104409562B (en) * | 2014-10-30 | 2016-06-22 | 广东爱康太阳能科技有限公司 | The preparation method of a kind of selectivity emission electrode solaode and preparation system |
| CN105006444A (en) * | 2015-07-03 | 2015-10-28 | 陈�光 | Production technology for high-efficiency crystal silicon solar cell piece |
| CN204732429U (en) * | 2015-07-03 | 2015-10-28 | 陈�光 | A kind of production equipment of crystal silicon solar batteries sheet |
-
2016
- 2016-03-16 CN CN201810063481.9A patent/CN108336010A/en active Pending
- 2016-03-16 CN CN201810063129.5A patent/CN108091731A/en active Pending
- 2016-03-16 CN CN201810063155.8A patent/CN108281375B/en active Active
- 2016-03-16 CN CN201610150436.8A patent/CN105789104B/en not_active Expired - Fee Related
- 2016-03-16 CN CN201810063552.5A patent/CN108321111A/en active Pending
- 2016-03-16 CN CN201810063860.8A patent/CN108321112A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3732062A (en) * | 1972-01-20 | 1973-05-08 | J Porteus | Method of and apparatus for reducing air pollution in the thermal processing of ores and other materials |
| CN102437078A (en) * | 2011-12-06 | 2012-05-02 | 兴安吉阳设备有限公司 | Method and device for reducing deviation rate of cell when conveying solar cell through mesh belt |
| CN105789376A (en) * | 2016-03-10 | 2016-07-20 | 浙江晶能光电有限公司 | Preparation method of solar cell |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105789104A (en) | 2016-07-20 |
| CN108281375B (en) | 2021-05-28 |
| CN108281375A (en) | 2018-07-13 |
| CN108321111A (en) | 2018-07-24 |
| CN105789104B (en) | 2018-03-16 |
| CN108091731A (en) | 2018-05-29 |
| CN108321112A (en) | 2018-07-24 |
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