CN108333654A - A kind of titanium material electromagnetic wave perfection absorber - Google Patents
A kind of titanium material electromagnetic wave perfection absorber Download PDFInfo
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- CN108333654A CN108333654A CN201810177543.9A CN201810177543A CN108333654A CN 108333654 A CN108333654 A CN 108333654A CN 201810177543 A CN201810177543 A CN 201810177543A CN 108333654 A CN108333654 A CN 108333654A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/003—Light absorbing elements
Abstract
The invention discloses a kind of titanium material electromagnetic wave perfection absorbers.The titanium material electromagnetic wave perfection absorber includes substrate, titanium film, deielectric-coating, titanium grain structure layer；Titanium grain structure layer includes multiple first titanium particle rows and multiple second titanium particles row, and the first titanium particle row and the second titanium particle row are staggered；First titanium particle row includes the titanium particle of multiple first sizes, and the second titanium particle row includes the titanium particle of multiple second sizes；The titanium particle of first size equidistantly arranges, the titanium particle of second size equidistantly arranges, the distance between titanium particle barycenter of adjacent first size is equal with the distance between the titanium particle barycenter of the second adjacent size, and the titanium particle of each the second size is located on the perpendicular bisector of the titanium particle of two adjacent first sizes.The present invention can overcome the inherent metal ohmic of traditional electromagnetic wave perfection absorber to be lost, fuel factor and thermal instability problem, can will be seen that the ultra wide band electrically magnetic wave perfection of near infrared band absorbs.
Description
Technical field
The present invention relates to photoelectric functional materials and device arts, are inhaled more particularly to a kind of titanium material electromagnetic wave perfection
Receive device.
Background technology
The free electron that plasmon resonance typically refers to metal structure surface adds caused collection under electromagnetic wave irradiation outside
Oscillation body forms local Electromagnetic enhancement effect in metal surface.Meta Materials refer to made with periodic structure
Composite material.Perfect absorber is a kind of EMR electromagnetic resonance absorber based on Meta Materials.Typical Meta Materials perfection absorber has
Three-decker：Top layer is the two-dimension periodic made of the metal microstructure unit arrangement with single or multiple electromagnetic response patterns
Array, middle layer are one layer of medium or insulating materials tablet, and bottom is typically one layer of complete lighttight metallic plate.By reasonable
The structure size and material parameter of device are designed, can generate and couple with the electromagnetic component of incident electromagnetic wave, to being incident on
Electromagnetic wave realization in the special frequency band of absorber absolutely absorbs.Electromagnetic wave perfection absorber is to realize efficient electromagnetism
Wave spectrum absorbs and one in photoelectric detector indispensable element, and structure is realized in resonance wave by electromagentic resonance phenomenon
Strong point is both without reflection (reflectivity is close to 0) or without transmission (transmissivity 0), to according to absorptivity A=1-R-T (its
Middle A represents absorptivity, and R represents reflectivity, and T represents transmissivity) definition can be absorbed rate A close to 100% perfection inhale
It receives.Ultraviolet, visible waveband, near infrared band electromagnetic wave perfection absorber can be as photoelectric effect or the knot of photoelectric converter
The structural unit of structure unit, heat emitters, or as the wave-absorbing coating material for reducing electromagnetic wave spurious emissions.In infrared filtering
In the application of the technical fields such as device, photodetector, it is desirable that absorber has the characteristic of broadband light absorption.
The research system of existing electromagnetic wave perfection absorber is mainly based upon three layers of electromagentic resonance of metal-dielectric-metal
Structural system or Meta Materials system realize perfect absorb from microwave frequency band to visible light wave range and respond, and are that the light of narrowband is inhaled
It receives.In addition, these electromagnetic wave perfection absorber systems are all based on metal material and metal micro-nano structure, pass through these gold
The free electron oscillation mode for belonging to material realizes that the coupling of electromagnetic wave, the oscillation of these free electrons necessarily cause very strong ohm to damage
Consumption and fuel factor, are unfavorable for the structural stability of metal micro-nano material, have also limited to such absorber in high-strength magnetic wave
Application prospect under irradiation.
Invention content
The object of the present invention is to provide a kind of titaniums being operated in Visible-to-Near InfaRed wave band and energy high temperature resistant and high-heat environment
Material electromagnetic wave perfection absorber.
To achieve the above object, the present invention provides following schemes：
A kind of titanium material electromagnetic wave perfection absorber, including：
Substrate, titanium film, deielectric-coating, titanium grain structure layer；
The titanium film is set to above substrate, and the deielectric-coating is set to above titanium film, the titanium grain structure layer setting
Above deielectric-coating；
The titanium grain structure layer includes multiple first titanium particle rows and multiple second titanium particles row, the first titanium particle
Row and the second titanium particle row are staggered；First titanium particle row includes the titanium particle of multiple first sizes, and described the
Two titanium particles row includes the titanium particle of multiple second sizes；The titanium particle of the first size is less than the titanium of second size
Grain；The titanium particle of the first size equidistantly arranges, and the titanium particle of second size equidistantly arranges, and adjacent described
The distance between titanium particle barycenter of one size is equal with the distance between the adjacent titanium particle barycenter of second size；Often
The titanium particle of one second size is located on the perpendicular bisector of the titanium particle of two adjacent first sizes.
Optionally, the titanium grain structure is cylindrical structure.
Optionally, the material of the substrate is one kind in silicon chip, glass, quartz, dimethyl silicone polymer.
Optionally, the thickness of the titanium film is not less than 100 nanometers.
Optionally, the material of the deielectric-coating is one kind in silica, titanium dioxide, magnesium fluoride, polystyrene.
Optionally, the titanium particle diameter of the first size is 120-210 nanometers；The titanium particle diameter of second size
It is 250-360 nanometers.
Optionally, the titanium grain thickness of the first size is 50-100 nanometers；The titanium grain thickness of second size
It is 50-100 nanometers.
Optionally, the distance between adjacent described titanium particle barycenter is 400-500 nanometers.
Optionally, the thickness of the deielectric-coating is 40-80 nanometers.
Compared with prior art, the beneficial effects of the invention are as follows：
The present invention proposes a kind of titanium material electromagnetic wave perfection absorber, the resonating member structure of entire absorber all by
Titanium material forms, and titanium material is refractory material, has the physical characteristic of high temperature resistant high fever, by the way that titanium film is arranged on substrate,
Poor thermal conductivity, fire resistance is good, previous common total based on noble metal granule array or multi-element metal so as to effectively avoid
The inherent metal ohmic that can not overcome of electromagnetic wave perfection absorber of the systems such as array composite construction of shaking composition is lost, fuel factor
With the problems such as thermal instability；Titanium grain structure layer based on different sizes generates the ultra-wide in Visible-to-Near InfaRed wave band
Band electromagnetic wave perfection absorption characteristic includes infrared acquisition and opto-electronic conversion, infrared in the photoelectric device of high temperature resistant high fever
The fields such as imaging, solar energy anti reflection paint and heat radiator are all with a wide range of applications.
Description of the drawings
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the present invention
Example, for those of ordinary skill in the art, without having to pay creative labor, can also be according to these attached drawings
Obtain other attached drawings.
Fig. 1 is titanium material electromagnetic wave perfection absorber structure schematic diagram in the embodiment of the present invention one；
Fig. 2 is the schematic top plan view of titanium material electromagnetic wave perfection absorber in the embodiment of the present invention one；
Fig. 3 is the light absorption figure of titanium material electromagnetic wave perfection absorber in the embodiment of the present invention one；
Fig. 4 is the schematic top plan view of titanium material electromagnetic wave perfection absorber in the embodiment of the present invention two；
Fig. 5 is the light absorption figure of titanium material electromagnetic wave perfection absorber in the embodiment of the present invention two；
Fig. 6 is the light absorption figure of titanium material electromagnetic wave perfection absorber in the embodiment of the present invention three；
Wherein, 1 in Fig. 1 is substrate, and 2 be titanium film, and 3 be deielectric-coating, and 4 be titanium grain structure layer；
5 in Fig. 2 be the titanium particle of first size, and 6 be the titanium particle of the second size.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The object of the present invention is to provide a kind of titaniums being operated in Visible-to-Near InfaRed wave band and energy high temperature resistant and high-heat environment
Material electromagnetic wave perfection absorber.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below in conjunction with the accompanying drawings and specific real
Applying mode, the present invention is described in further detail.
Embodiment one
Fig. 1 is titanium material electromagnetic wave perfection absorber structure schematic diagram of the embodiment of the present invention.As shown in Figure 1, the present invention carries
The titanium material electromagnetic wave perfection absorber of confession includes：Substrate 1, titanium film 2, deielectric-coating 3, titanium grain structure layer 4.Titanium film 2 is set to
1 top of substrate, deielectric-coating 3 are set to 2 top of titanium film, and titanium grain structure layer 4 is set to 3 top of deielectric-coating.
Fig. 2 is the schematic top plan view of titanium material electromagnetic wave perfection absorber of the embodiment of the present invention.As shown in Fig. 2, titanium particle
Structure sheaf includes multiple first titanium particle rows and multiple second titanium particles row, and the first titanium particle is arranged and the second titanium particle
Row is staggered；The first titanium particle row includes the titanium particle 5 of multiple first sizes, and the second titanium particle row includes multiple
The titanium particle 6 of second size；The titanium particle 5 of the first size is less than the titanium particle 6 of second size；The first size
Titanium particle 5 equidistantly arrange, the titanium particle 6 of second size equidistantly arranges, the titanium of the adjacent first size
The distance between adjacent 6 barycenter of titanium particle of second size of the distance between 5 barycenter of grain is equal；Each described
The titanium particle 6 of two sizes is located on the perpendicular bisector of the titanium particle 5 of two adjacent first sizes.
The material of substrate is silicon chip, and the thickness of titanium film is 100 nanometers, and the material of deielectric-coating is silica, thickness 70
Nanometer.Titanium grain structure is cylindrical structure, and the titanium particle diameter of first size is 170 nanometers, and the titanium particle of the second size is straight
Diameter is 300 nanometers, and the thickness of the titanium particle of first size and the titanium particle of the second size is 60 nanometers, adjacent first size
The distance between the distance between the titanium particle barycenter titanium particle barycenter of the second adjacent size be 400 nanometers.
Fig. 3 is the light absorption figure of titanium material electromagnetic wave perfection absorber of the embodiment of the present invention.As shown in figure 3, micro- 0.485
In rice to 1.492 micron ranges, the spectral absorption of titanium material electromagnetic wave perfection absorber is above under the structural parameters
90%, show that the electromagnetic wave perfection for producing the ultra wide band that an Absorber Bandwidth is more than 1007 nanometers absorbs.At 0.797 micron and
At 1.190 microns, maximum absorbance has reached 97%.Show under this structural parameters, utilizes two various sizes of titanium particles
The composite periodicity cellular construction of composition, the ultra wide band electrically magnetic wave perfection for realizing a covering Visible-to-Near InfaRed wave band absorb.
Embodiment two
Fig. 4 is the schematic top plan view of titanium material electromagnetic wave perfection absorber of the embodiment of the present invention.As shown in figure 4, this implementation
Example and embodiment one the difference lies in that titanium grain structure layer includes multiple first titanium particles row and multiple second titanium particles row,
The multiple first titanium particle row and the multiple second titanium particle row are adjacent；The first titanium particle row includes multiple first rulers
Very little titanium particle 5, the second titanium particle row include the titanium particle 6 of multiple second sizes；The titanium particle 5 of the first size is small
In the titanium particle 6 of second size；The titanium particle 5 of the first size equidistantly arranges, the multiple first titanium particle row
Titanium grain spacing it is equal；Each titanium particle of another first titanium particle row is located at the adjacent of the first titanium particle row
On the perpendicular bisector of two titanium particles；The titanium particle 6 of second size equidistantly arranges, the multiple second titanium particle row
Titanium grain spacing it is equal；Each titanium particle of another second titanium particle row is located at the adjacent of the second titanium particle row
On the perpendicular bisector of two titanium particles；The distance between 5 barycenter of titanium particle of the adjacent first size and adjacent institute
It is equal to state the distance between 6 barycenter of titanium particle of the second size.
The material of substrate is silicon chip, and the thickness of titanium film is 100 nanometers, and the material of deielectric-coating is silica, thickness 70
Nanometer.Titanium grain structure is cylindrical structure, and the titanium particle diameter of first size is 170 nanometers, and the titanium particle of the second size is straight
Diameter is 300 nanometers, and the thickness of the titanium particle of first size and the titanium particle of the second size is 60 nanometers, adjacent first size
The distance between the distance between the titanium particle barycenter titanium particle barycenter of the second adjacent size be 400 nanometers.
Fig. 5 is the light absorption figure of titanium material electromagnetic wave perfection absorber of the embodiment of the present invention.As shown in figure 5, first size
Titanium material electromagnetic wave perfection absorber that an absorptivity is produced in spectral region is from 0.417 micron to 0.943 micron is super
90% broadband absorption spectrum is crossed, i.e. Absorber Bandwidth is 526 nanometers.Reach for the absorptivity at 0.556 micron in wavelength
Maximum value is 99.8%.The titanium material electromagnetic wave perfection absorber of second size is micro- from 1.104 microns to 1.785 in spectral region
The broadband absorption spectrum that an absorptivity is more than 90% is produced in rice, i.e. Absorber Bandwidth is 681 nanometers.It is in wavelength
It is 98.8% that absorptivity at 1.450 microns, which reaches maximum value,.
Embodiment three
The present embodiment and embodiment one the difference lies in that the material of substrate is dimethyl silicone polymer, the thickness of titanium film
It it is 200 nanometers, the material of deielectric-coating is silica, and thickness is 70 nanometers.Titanium grain structure is cylindrical structure, first size
Titanium particle diameter be 200 nanometers, the titanium particle diameter of the second size is 360 nanometers, the titanium particle and the second ruler of first size
The thickness of very little titanium particle is 60 nanometers, the titanium of the distance between titanium particle barycenter of first size and second size
The distance between grain barycenter is 490 nanometers.
Fig. 6 is the light absorption figure of titanium material electromagnetic wave perfection absorber of the embodiment of the present invention.As shown in fig. 6, micro- 0.423
In rice to 1.515 micron ranges, the spectral absorption of titanium material electromagnetic wave perfection absorber is above under the structural parameters
90%, show that producing the ultra wide band electrically magnetic wave perfection that an Absorber Bandwidth is more than 1092 nanometers absorbs.By regulating and controlling titanium particle
The size of distance between the size of structure and adjacent titanium particle barycenter equally realizes one and covers Visible-to-Near InfaRed wave band
Ultra wide band electrically magnetic wave perfection absorbs, and the frequency spectrum that absorption spectrum may be implemented is mobile and absorbs the tuning of response.
Principle and implementation of the present invention are described for specific case used herein, and above example is said
The bright method and its core concept for being merely used to help understand the present invention；Meanwhile for those of ordinary skill in the art, foundation
The thought of the present invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification is not
It is interpreted as limitation of the present invention.
Claims (9)
1. a kind of titanium material electromagnetic wave perfection absorber, which is characterized in that including：
Substrate, titanium film, deielectric-coating, titanium grain structure layer；
The titanium film is set to above substrate, and the deielectric-coating is set to above titanium film, and the titanium grain structure layer is set to Jie
Above plasma membrane；
The titanium grain structure layer includes multiple first titanium particles row and multiple second titanium particles row, the first titanium particle row and
The second titanium particle row is staggered；The first titanium particle row includes the titanium particle of multiple first sizes, second titanium
Particle row includes the titanium particle of multiple second sizes；The titanium particle of the first size is less than the titanium particle of second size；
The titanium particle of the first size equidistantly arranges, and the titanium particle of second size equidistantly arranges, and adjacent described first
The distance between titanium particle barycenter of size is equal with the distance between the adjacent titanium particle barycenter of second size；It is each
The titanium particle of a second size is located on the perpendicular bisector of the titanium particle of two adjacent first sizes.
2. titanium material electromagnetic wave perfection absorber according to claim 1, which is characterized in that the titanium grain structure is circle
Column construction.
3. titanium material electromagnetic wave perfection absorber according to claim 1, which is characterized in that the material of the substrate is silicon
One kind in piece, glass, quartz, dimethyl silicone polymer.
4. titanium material electromagnetic wave perfection absorber according to claim 1, which is characterized in that the thickness of the titanium film is not low
In 100 nanometers.
5. titanium material electromagnetic wave perfection absorber according to claim 1, which is characterized in that the material of the deielectric-coating is
One kind in silica, titanium dioxide, magnesium fluoride, polystyrene.
6. titanium material electromagnetic wave perfection absorber according to claim 1, which is characterized in that the titanium of the first size
A diameter of 120-210 nanometers of grain；The titanium particle diameter of second size is 250-360 nanometers.
7. titanium material electromagnetic wave perfection absorber according to claim 1, which is characterized in that the titanium of the first size
Grain thickness is 50-100 nanometers；The titanium grain thickness of second size is 50-100 nanometers.
8. titanium material electromagnetic wave perfection absorber according to claim 1, which is characterized in that the adjacent titanium particle matter
The distance between heart is 400-500 nanometers.
9. titanium material electromagnetic wave perfection absorber according to claim 1, which is characterized in that the thickness of the deielectric-coating is
40-80 nanometers.
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| CN201810177543.9A CN108333654A (en) | 2018-03-05 | 2018-03-05 | A kind of titanium material electromagnetic wave perfection absorber |
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| CN110376667A (en) * | 2019-07-25 | 2019-10-25 | 江西师范大学 | A kind of broadband electromagnetic wave absorber and preparation method thereof based on refractory material |
| CN110376666A (en) * | 2019-07-25 | 2019-10-25 | 江西师范大学 | A kind of ultra wide band perfection absorber of middle infrared band and preparation method thereof |
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Application publication date: 20180727 |