CN108333493A - Hollow cathode vacuum electronic emitting performance test device, method and screening technique - Google Patents
Hollow cathode vacuum electronic emitting performance test device, method and screening technique Download PDFInfo
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- CN108333493A CN108333493A CN201711403358.9A CN201711403358A CN108333493A CN 108333493 A CN108333493 A CN 108333493A CN 201711403358 A CN201711403358 A CN 201711403358A CN 108333493 A CN108333493 A CN 108333493A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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Abstract
The invention discloses a kind of hollow cathode vacuum electronic emitting performance test device, method and screening techniques.The vacuum electronic emitting performance of the hollow cathode product assembled can be directly tested using the present invention, and can synchronize and carry out the testing experiments such as hollow cathode activation characteristic, ignition condition, flash-over characteristic, can reflect the properties of product of hollow cathode comprehensively.Apparatus of the present invention include：Hollow cathode, non-contact temperature measuring device, Micrometer of current, vacuum chamber, tablet anode, power supply system, storage are for system, vacuum acquiring system.The pre- hot emitter of hollow cathode heater is utilized in high vacuum environment, touching the electronics for holding and connecing constant-current voltage-stabilizing control power supply reception on extremely and being drawn from emitter by cathode epimerite discharge orifice, it is touched with Micrometer of current detection and holds pole electronic current, and cathode top temperature is measured by temperature measuring equipment, Micrometer of current reading is the hollow cathode vacuum electronic emissivities under present hollow cathode heating temperature and vacuum degree.
Description
Technical field
The present invention relates to space electric propulsion technology, Physical Electronics fields, and in particular to a kind of hollow cathode vacuum electronic
Emitting performance test device, method and screening technique.
Background technology
Hollow cathode filler test is the key technique of hollow cathode control of product quality, and hollow cathode performance is main
It is decided by itself structure design and material property, wherein the electron emissivity of emitter material is to determine that hollow cathode is put
The important technology index of electrical property.
Current hollow cathode product quality control method is, in raw material screening stage test emitter raw material sample
Vacuum electronic emitting performance evaluated for raw material property and selection provides reference, tested in the hollow cathode product screening stage empty
The discharge performance of the heart-yin pole is evaluated for hollow cathode properties of product and selection provides reference.However, this method measurement is hollow
The electron emissivity of raw material before cathode processing and manufacturing is deposited during processing, assembly, storage of hollow cathode product etc.
Influence emitter electron emissivity factor, the hollow cathode product screening stage test hollow cathode discharge performance by
It is influenced to factors such as part processing precision, discharge environments, cannot reflect that emitter electronics is sent out in the hollow cathode product assembled
Penetrate ability.Therefore, the true of hollow cathode product emitter cannot be accurately reflected by existing hollow cathode screening test scheme
Empty electron emissivity cannot reflect hollow cathode properties of product comprehensively.
Invention content
In view of this, the present invention provides a kind of hollow cathode vacuum electronic emitting performance test device, can directly survey
The vacuum electronic emitting performance of the hollow cathode product assembled is tried, and can synchronize and carry out hollow cathode activation characteristic, ignition strip
The testing experiments such as part, flash-over characteristic can reflect the properties of product of hollow cathode comprehensively.
The hollow cathode vacuum electronic emitting performance test device of the present invention, including：Hollow cathode, contactless temperature-measuring dress
It sets, Micrometer of current, tablet anode, power supply system, storage is for system, vacuum chamber, high vacuum unit；Wherein, hollow cathode by
It touches and holds pole component and cathode component composition；Tablet anode and hollow cathode are placed in vacuum chamber；Tablet anode is equipped with centre bore,
Vacuum chamber is equipped with windowpane, and the non-contact temperature measuring device outside vacuum chamber penetrates windowpane and the hollow the moon of anodes centre's hole measurement
The temperature on the cathode top of the cathode component of pole；
Power supply system includes the heating power supply of the heating installation power supply in the cathode component for hollow cathode, is tablet anode
The anode supply of power supply holds the tactile of pole assembly power supply and holds power supply, and provides height for hollow cathode igniting for the tactile of hollow cathode
Press the priming supply of pulse；
Storage includes xenon bottle, pressure regulator valve, flowmeter and shut-off valve for system, and xenon is provided for hollow cathode；Xenon bottle is adjusted
Pressure valve, flowmeter, shut-off valve, hollow cathode are sequentially connected in series by supply air line；
Micrometer of current contacts the negative terminals for holding power supply, and pole component reception hollow cathode vacuum hair is held for measuring to touch
Radio electron current.
Further, the vacuum acquiring system is dry molecular pump or cryogenic pump high vacuum unit.
Further, the background vacuum of the vacuum chamber is better than 5.0 × 10-5Pa, the pipeline integral leakage outside vacuum chamber are excellent
In 1.0 × 10-9Pa·m3/ s, the pipeline integral leakage in vacuum chamber are better than 1.0 × 10-6Pa·m3/s。
The present invention also provides a kind of hollow cathode vacuum electronic emitting performance test method, using above-mentioned test device into
Row test, includes the following steps：
Step 1, in the test preparation stage, hollow cathode heater resistance is measured with microhmmeter, heater resistance should be big
In or equal to 300m Ω, hollow cathode cathode component is otherwise replaced；With (500V grades) measurement hollow cathodes of insulation tester
The insulation resistance held between pole component and cathode component is touched, touching the insulation resistance held between pole component and cathode component should be big
In or equal to 10G Ω, the insulating part for touching and holding on the component of pole is otherwise replaced；
Step 2, hollow cathode and anode are mounted in vacuum chamber, connect the supply line of power supply system and store for system
Supply air line；Cathode component is then measured again and touches the insulating resistance value held between the component of pole, if being less than 10G Ω,
Replace the insulating part for touching and holding on the component of pole；HEATER FOR MEASURING resistance checks if heater resistance is less than 300m Ω or abnormal greatly
The wiring of heater；The insulation resistance resistance value between cathode component and tablet anode is tested, if being less than 100k Ω, replaces sun
Insulating part on extremely；
Step 3, vacuum background, hollow cathode material outgassing, opening stop valve are evacuated to vacuum chamber so that storage is for being
The supply air line of system empties；Vacuum chamber is better than 5.0 × 10-5It is kept for 2 hours or more under Pa vacuum states；
Step 4, flowmeter is opened, pretreatment is rinsed to supply air line；
Step 5, it is better than 1.0 × 10 in vacuum chamber vacuum degree-2Under the conditions of Pa, flowmeter controls xenon flow rate, opens heating
Power supply preheats hollow cathode；
Step 6, it after preheating, keeps xenon flow rate constant, hollow cathode is cooled down；After hollow cathode cooling, foundation
Hollow cathode design work parameter carries out 10 hours continuous discharge activation experiments to hollow cathode；
Step 7, after completing hollow cathode activation experiment, power supply system is closed, keeps xenon flow rate constant, to hollow cathode
It is cooled down；After hollow cathode cooling, flowmeter and shut-off valve are closed, vacuum degree be evacuated to better than 5.0 to vacuum chamber
×10-5Pa；
Step 8, Micrometer of current access is touched to the negative terminals for holding power supply, while hollow the moon is measured using temperature measuring equipment
The temperature on pole cathode top starts the test of hollow cathode vacuum electronic emission characteristics：It opens heating power supply and heats hollow cathode to work
Make temperature, open to touch and hold the prefabricated output voltage of power supply, the heated current and voltage, micro-current for recording the heating power supply in two hours are surveyed
Try instrument reading, temperature measuring equipment measuring temperature, vacuum degree, Micrometer of current reading is present hollow cathode heating temperature and very
Hollow cathode vacuum electronic emissivities under reciprocal of duty cycle.
Further, in the step 3, while vacuumizing, heated baking is carried out to vacuum chamber, supply air line.
Further, in the step 5, the preheating is divided into low-temperature prewarming, medium temperature preheating and three step of high temperature preheating：It is first
First, heating power supply is opened, pre- hot hollow cathode is to about 200 DEG C and is kept for 1 hour, carries out low-temperature prewarming；After completing low-temperature prewarming,
Heating power supply is closed, keeps xenon flow rate constant, carries out cooling 30min；Then, it keeps xenon flow rate constant, opens heating electricity
Source, pre- hot hollow cathode is to about 500 DEG C and is kept for 1 hour, carries out medium temperature preheating；After completing medium temperature preheating, heating power supply is closed,
It keeps xenon flow rate constant, carries out cooling 30min；Finally, it keeps xenon flow rate constant, opens heating power supply, preheat hollow the moon
About 1000 DEG C of best is simultaneously kept for 1 hour, carries out high temperature preheating；After completing high temperature preheating, heating power supply is closed, keeps xenon flow rate
It is constant, carry out cooling 30min.
Further, in the step 7, Micrometer of current is before access touches and holds the negative terminals supply line of power supply, first
It opens, Micrometer of current " 0 " value is calibrated after unloaded registration stabilization；Micrometer of current access after calibration is touched
It holds power supply and bears terminals.
The present invention also provides a kind of hollow cathode screening techniques, first using above-mentioned test method test hollow cathode
Then vacuum electronic emitting performance carries out the following steps：
Step 9, power supply system is closed, Micrometer of current is removed, opening stop valve controls xenon stream using flowmeter
Rate cools down hollow cathode；After hollow cathode cooling, the activation examination of continuous discharge in 10 hours is carried out to hollow cathode again
It tests；Then keep xenon flow rate constant, hollow cathode cooling；
Step 10, the seasoned experiment of hollow cathode：Flowmeter controls xenon flow rate, and it is defined point that setting heating power supply, which exports,
Fiery heated current (being reference to heat heated current needed for hollow cathode to operating temperature), heats full 5min records heating electricity
Pressure, heated current value, according to hollow cathode design work parameter prefabricated anode power supply, the tactile output voltage for holding power supply and output electricity
Stream opens priming supply；Lighting a fire, successfully 5s is interior to close heating power supply and priming supply；Then maintain electric discharge 20min；It then closes again
Power supply system is closed, keeps xenon flow rate constant, cooling 40min；It repeats the above process 50 times；It is required that record igniting duration, anode
Electric current and voltage touch and hold the test datas such as electric current and voltage, vacuum degree；
Step 11, hollow cathode performance test：According to mission requirements are used, hollow cathode running parameter, including anode are set
Electric current touches and holds electric current, heated current, working medium flow rate, and carries out parameter near rated operation point and draw partially, and examination hollow cathode exists
Anode voltage under input condition given herein above touches and holds the performance parameters such as voltage, heating voltage, igniting duration, the blow-out frequency；
Step 12, it is obtained according to the hollow cathode vacuum launching electronics electric current of step 8 acquisition and step 10, step 10
Again activate after seasoned experiment and discharge test as a result, with reference to private file technical parameter require to hollow cathode whether
Qualified and working performance makes evaluation.
Advantageous effect：
The present invention overcomes in existing hollow cathode screening test scheme with the discharge power of hollow cathode, igniting duration etc.
Integrated performance index cannot reflect the problem of product quality comprehensively, establish a kind of hollow cathode vacuum electronic emitting performance test
Device and method utilize the pre- hot emitter of hollow cathode heater in high vacuum environment, and constant-current voltage-stabilizing control is connect on extremely touching to hold
Power supply processed receives the electronics drawn from emitter by cathode epimerite discharge orifice, is touched with Micrometer of current detection and holds pole electronics electricity
Stream, and then evaluate the vacuum electronic emissivities of hollow cathode product.The present invention can directly test the hollow cathode production assembled
Product vacuum electronic emitting performance, and ensure under conditions of obstructed xenon is protected, experiment process does not interfere with hollow cathode production
Quality, by hollow cathode vacuum electronic emission current can quantitative identification hollow cathode emitter material whether successfully swash
It is living, and inherently (emitter electron emissivity) explains the discrete basic reason of hollow cathode product comprehensive performance parameter,
The hollow cathode aberrations in property caused by manufacturing process, discharge environment difference is compensated for, and then by comprehensive performances such as discharge powers
Index cannot reflect the deficiency of hollow cathode properties of product comprehensively.
Meanwhile the device can also synchronously complete the seasoned experiment of hollow cathode, discharge test, meet multi items, seriation
Hollow cathode product screening test specification, and the hollow cathode screening test period is shortened, reduce experimentation cost.Through with
Machine selects branched hollow cathode and repeats to test, and hollow cathode vacuum launching electronics electric current, the vacuum transmitting for Startup time of lighting a fire are electric
The test results reproducibility such as electron current and transmitting temperature, igniting duration, discharge voltage is good, it was demonstrated that the test device and survey
Examination scheme can be tested for hollow cathode product screening and performance evaluation provides technical support.
Description of the drawings
Fig. 1 is test device structural schematic diagram of the present invention.
Wherein, 1- temperature measuring equipments；2- glass windows；3- vacuum chambers；4- tablet anodes；5- is touched and is held pole component；6- is heated
Power supply；7- anode supplies；8- shut-off valves；9- flowmeters；10- pressure regulator valves；11- xenon bottles；12- Micrometer of current；13- is touched and is held
Power supply；14- priming supplies；15- cathode components；16- anodes centre hole.
Specific implementation mode
Below in conjunction with the accompanying drawings and implementation example, the present invention will be described in detail.
The present invention provides a kind of hollow cathode vacuum electronic emitting performance test device and methods.
Hollow cathode vacuum electronic emitting performance is the important technology index for determining hollow cathode properties of product, is mainly taken
It certainly in emitter material, transmitting temperature, touches and holds pole tension, also influenced by test conditions such as discharge environment, vacuum degrees, and
The parameter directly affects hollow cathode discharge characteristic, firing characteristic etc..The present invention is by the test device of design, in high vacuum ring
The pre- hot emitter of hollow cathode heater is utilized in border, touch hold connect on extremely Isobarically Control power supply receive hollow cathode from transmitting
The electronics that body area is drawn by cathode epimerite discharge orifice is touched with Micrometer of current detection and holds pole electronic current, and directly test has filled
The vacuum electronic emitting performance for the hollow cathode product matched, it is ensured that under conditions of obstructed xenon is protected, experiment process will not
Hollow cathode product quality is influenced, and can synchronize and carry out the tests such as hollow cathode activation experiment, seasoned experiment, performance test examination
It tests, can reflect the properties of product of hollow cathode comprehensively, obtain the basic reason of hollow cathode parameter discrete properties, disclosure satisfy that
Multi items, seriation hollow cathode product screening test specification, and the hollow cathode screening test period is shortened, it reduces
Experimentation cost.
As shown in Figure 1, test device of the present invention includes：Temperature measuring equipment 1, vacuum chamber 3, tablet anode 4, hollow cathode, confession
Electric system, for system, Micrometer of current 12 and vacuum acquiring system, (vacuum acquiring system and vacuum measurement system do not exist for storage
It is drawn in Fig. 1).Wherein, tablet anode 4 and hollow cathode are placed in vacuum chamber 3, and hollow cathode holds pole component 5 and cathode by touching
Body component 15 forms.Cathode component 15 includes emitter, cathode tube, cathode top and heater.The temperature of hollow cathode emitter
Degree is mainly determined by the heating power of heater, in order to measure vacuum electronic of hollow cathode emitter under the conditions of certain temperature
Emitting performance needs the temperature for demarcating hollow cathode emitter.Since the emitter of hollow cathode, cathode tube, cathode top pass through
Welding procedure connects and is high thermal conductivity materials, essentially identical close to cathode top region three's temperature, therefore, can pass through survey
The temperature for measuring hollow cathode cathode top, obtains the temperature of emitter；The present invention by measure the temperature on hollow cathode cathode top with
And the heating power of corresponding hollow cathode heater, it can also establish hollow cathode heater heating power and emit temperature
The relationship of relationship and hollow cathode running parameter and operating temperature.Specifically, the present invention is equipped in the center of tablet anode 4
Centre bore 16 is equipped with glass window 2 on vacuum chamber 3, non-contact temperature measuring device 1 is arranged outside vacuum chamber, such as optics height
Warm meter, infrared thermoviewer etc., temperature measuring equipment 1, the centre bore 16 of tablet anode 4, hollow cathode axis be located along the same line,
Temperature measuring equipment 1 outside vacuum chamber through glass window 2, anodes centre hole 16 measure the temperature on hollow cathode cathode top to get
To the temperature of hollow cathode emitter；Further, it is also possible to observe product working status in vacuum chamber 3 through glass window 2.
Power supply system is hollow cathode and anode supply, includes 15 heating installation power supply of cathode component for hollow cathode
Heating power supply 6, for tablet anode 4 power anode supply 7, be hollow cathode it is tactile hold pole component 5 power supply it is tactile hold power supply 13,
And the priming supply 14 of high-voltage pulse is provided for hollow cathode igniting, wherein heating power supply 6, anode supply 7 touch and hold power supply
13 control power supply for constant-current voltage-stabilizing, and priming supply 14 is that high-voltage pulse controls power supply.
Storage provides xenon, including xenon bottle 11, pressure regulator valve 10, flowmeter 9 and shut-off valve 8 for system for hollow cathode.Xenon
Xenon in gas cylinder 11 passes sequentially through pressure regulator valve 10, flowmeter 9, shut-off valve 8 and enters hollow cathode.
In hollow cathode warm-up phase, the obstructed xenon of hollow cathode, at this point, the tactile of high potential holds the reception of pole component 5 and come from
The vacuum launching electronics of 15 inner emission of cathode component.In the hollow cathode steady-state discharge stage, hollow cathode leads to xenon, high electricity
It the tablet anode 4 of position and touches and holds pole component 5 and receive the electronics in discharge plasma.
Hollow cathode warm-up phase is measured to touch using Micrometer of current 12 and holds the reception hollow cathode vacuum hair of pole component 5
Radio electron current.Micrometer of current 12 accesses to the negative terminals for touching and holding power supply 13, the negative terminals of Micrometer of current 12
Son ground connection.
Every time before experiment, the first starting up of Micrometer of current 12, registration when zero load uses accurate faint after stablizing
Electric current constant-current source is calibrated, and is measured using the Micrometer of current after calibration, ensures the validity of measurement result.
Wherein, vacuum system uses dry molecular pump or cryogenic pump high vacuum unit, background vacuum to be better than 5.0 × 10- 5Pa, pipeline integral leakage is better than 1.0 × 10 out of my cabin-9Pa·m3/ s, pipeline integral leakage is better than 1.0 × 10 in cabin-6Pa·m3/ s, really
Protecting high temperature preheating under conditions of obstructed Working medium gas is protected will not cause emitter poisoning that hollow cathode properties of product is caused to drop
Grade or failure.
The hollow cathode vacuum electronic emitting performance test method of the present invention is to utilize above-mentioned test device, in high vacuum ring
The pre- hot emitter of hollow cathode heater is utilized in border, is passed through touching to hold to connect constant-current voltage-stabilizing control power supply on extremely and receive from emitter
The electronics that cathode epimerite discharge orifice is drawn is touched with Micrometer of current detection and holds pole electronic current, and then evaluates hollow cathode product
Electron emissivity.By hollow cathode vacuum electronic emission current can quantitative identification hollow cathode emitter material whether
Successful activation, and inherently (emitter electron emissivity) explains the discrete basic reason of hollow cathode properties of product, more
The hollow cathode aberrations in property caused by manufacturing process, discharge environment difference has been mended, and then has been referred to by comprehensive performances such as discharge powers
Mark cannot reflect the deficiency of hollow cathode properties of product comprehensively.Specifically include the following steps：
(1) hollow cathode conductance property test is carried out：
The cathode component 15 of hollow cathode and touch hold pole component 5 between leakage current want as small as possible.It is pre- in hollow cathode
In thermal process, vacuum electronic launching electronics electric current gradually increases to milliampere grade, about tens Naan of starting stage measured value from zero.
In order to ensure the validity of test result, it must strictly control leakage current and be less than 10nA, touch that hold 13 output voltage of power supply usually several
Ten volts to several hectovolts, then require cathode component 15 and touch to hold insulation resistance between pole component 5 and be greater than or be equal to 10G Ω.
Therefore, before carrying out vacuum electronic emitting performance test, i.e., in the experiment preparation stage, hollow cathode electricity is carried out first
Characteristic test is led, is held between pole component 5 and cathode component 15 with (500V grades) measurement the tactile of hollow cathode of insulation tester
Insulation resistance measures hollow cathode heater resistance with microhmmeter.It touches and holds pole component and should be greater than with cathode component insulation resistance
Or it is equal to 10G Ω, otherwise show that the tactile insulating part held on the component of pole is unqualified, replaces the insulating part for touching and holding on the component of pole；Heating
Device resistance should be greater than or be equal to 300m Ω, otherwise show that cathode component is unqualified, replace cathode component.
(2) after due to hollow cathode wiring, conductance property may be led to because of working specification, connection line etc.
It is abnormal, therefore, according to Fig. 1 installations anode, hollow cathode and connect supply line's (being not connected to Micrometer of current), air supply pipe
Lu Hou carries out conductance property test again.In vacuum chamber crossing cabin flange external wiring terminal, pass through insulation tester (500V
Shelves) it tests cathode component 15 and touches the insulating resistance value for holding pole component 5, if being less than 10G Ω, replace tactile hold on the component of pole
Insulating part then continues to test the insulation resistance resistance value between cathode component 15 and anode flat plate 4 if more than or equal to 10G Ω,
If being less than 100k Ω, the insulating part on anode is replaced, if more than or equal to 100k Ω, then shows that the anode is available.Use micro-ohm
Meter measures heater resistance, and heater resistance should be greater than or equal to 300m Ω and without open circuit abnormal phenomenon, otherwise, check heater
Wiring.
(3) anode supply is opened, touches and holds power supply and heating power supply, power-supply system is initialized by control computer, it is prefabricated
Anode supply touches and holds electric power output voltage 60V, output current 1A, confirms that anode supply, tactile power supply of holding are in the work of 60V constant pressures
After state is normal, setting anode supply touches output voltage, the output current 0 for holding power supply；Ready-prepared ovenable electric power output voltage
30V, output current 1A, confirm heating power supply be in 1A constant current operation states it is normal after, setting heating power supply output voltage exports
Electric current is 0.
(4) vacuum chamber is vacuumized, pumping high vacuum to vacuum background, hollow cathode material outgassing, opening stop valve
8 so that supply air line empties；Vacuum chamber is better than 5.0 × 10-5It is kept for 2 hours or more under Pa vacuum states.Period allows to use
Heating tape carries out heated baking to vacuum chamber, supply air line etc., to promote vacuum chamber, the gas of supply air line inner wall absorption de-
It is attached.
(5) flowmeter control xenon flow rate 5sccm keeps 30min, completes supply air line and rinses pretreatment.
(6) it is better than 1.0 × 10 in vacuum chamber vacuum degree-2Under the conditions of Pa, flowmeter control xenon flow rate 1sccm is opened first
Heating power supply is opened, pre- hot hollow cathode is to about 200 DEG C and is kept for 1 hour, carries out low-temperature prewarming, and main purpose is to promote heating
The residual gas such as carbon dioxide, oxygen, the moisture content of the releases such as device, emitter material absorption；After completing low-temperature prewarming, heating is closed
Power supply (6) keeps xenon flow rate constant, carries out cooling 30min；
(7) it keeps xenon flow rate 1sccm constant, opens heating power supply (6), pre- hot hollow cathode is to about 500 DEG C and keeps 1
Hour, carry out medium temperature preheating；Main purpose is on the one hand to continue to promote hollow cathode material outgassing, on the other hand so that hollow
Cathode construction discharges erection stress, and direct hot operation recurring structure is avoided to destroy；After completing medium temperature preheating, heating power supply is closed
(6), it keeps xenon flow rate constant, carries out cooling 30min；(8) it keeps flowmeter control xenon flow rate 1sccm constant, opens and add
Thermoelectric generator increases heating power supply output power, and pre- hot hollow cathode is to about 1000 DEG C and keeps 60min, is carried out to hollow cathode
It preheats again.High temperature preheating has both sides purpose, on the one hand so that hollow cathode structure bears certain thermal stress, further
Stabilization processes are carried out to hollow cathode structure, on the other hand so that hollow cathode emitter surface further cleans, for sky
The work of the heart-yin stage ignition is prepared.After completing high temperature preheating, heating power supply stops output, in the item for keeping xenon flow rate 1sccm
Cooling half an hour under part.
(9) setting heating power supply exports as defined igniting heated current (to heat needed for hollow cathode to operating temperature
Heated current is reference), full 5min records heating voltage, heated current value are heated, it is pre- according to hollow cathode design work parameter
Anode supply processed touches the output voltage for holding power supply and output current and for gas flow rate, opens priming supply；It lights a fire in successfully 5s
Close heating power supply and priming supply；10 hours continuous discharge activation experiments then are carried out to hollow cathode；(10) it completes hollow
After cathode activation experiment, touches and hold power supply, anode supply stopping output, it is cooling under conditions of flowmeter control xenon flow rate 1sccm
Two hours, flowmeter and shut-off valve are then closed, pumping high vacuum is to better than 5.0 × 10-5Pa.Meanwhile Micrometer of current is opened, it waits for
Unloaded registration is calibrated after stablizing with accurate weak current constant-current source, is then touched according to schematic diagram access and is held the negative wiring of power supply
End prepares to start the test of hollow cathode vacuum electronic emission characteristics.
(11) the pre- hot hollow cathode of heating power supply is opened to operating temperature (lanthanum hexaboride hollow cathode operating temperature about 1600
DEG C, barium tungsten hollow cathode operating temperature is about 1200 DEG C, and operating temperature can be used the practical measurement of leucoscope and determine), it opens tactile
The prefabricated output voltage 100V of power supply is held, the heated current and voltage, Micrometer of current for recording the heating power supply in two hours are read
Number, leucoscope measuring temperature, vacuum degree, Micrometer of current reading are present hollow cathode heating temperature and vacuum degree
Under hollow cathode vacuum electronic emissivities, that is, obtain current test strip part under hollow cathode vacuum electronic emission characteristics.
Apparatus of the present invention can also realize the screening of hollow cathode：Hollow cathode vacuum is obtained first, in accordance with (1)~(11)
Then electron emission characteristic executes (12)~(16), completes the screening of hollow cathode.
(12) after the test of hollow cathode vacuum electronic emission characteristics, heating power supply touches and holds power supply, anode supply stopping
Output, removes Micrometer of current from circuit, opens shut-off valve, and flowmeter controls xenon flow rate 1sccm, cooling two hours
Afterwards, hollow cathode reactivation experiment is carried out according to step (8), main purpose is by continuous discharge in 10 hours, by electric discharge etc.
Gas ions carry out bombardment, purified treatment again to emitter surface, and emitter surface is made to keep fresh；Reactivation off-test
Afterwards, xenon flow rate 1sccm is kept to cool down 2 hours.
Step 13, the seasoned experiment of hollow cathode：Flowmeter controls xenon flow rate, and it is defined point that setting heating power supply, which exports,
Fiery heated current (being reference to heat heated current needed for hollow cathode to operating temperature), heats full 5min records heating electricity
Pressure, heated current value, according to hollow cathode design work parameter prefabricated anode power supply, the tactile output voltage for holding power supply and output electricity
Stream opens priming supply；Lighting a fire, successfully 5s is interior to close heating power supply and priming supply；Then maintain electric discharge 20min；It then closes again
Power supply system is closed, keeps xenon flow rate constant, cooling 40min；It repeats the above process 50 times；It is required that record igniting duration, anode
Electric current and voltage touch and hold the test datas such as electric current and voltage, vacuum degree；
Step 14, hollow cathode performance test：According to mission requirements are used, hollow cathode running parameter, including anode are set
Electric current touches and holds electric current, heated current, working medium flow rate, and carries out parameter near rated operation point and draw partially, and examination hollow cathode exists
Anode voltage under input condition given herein above touches and holds the performance parameters such as voltage, heating voltage, igniting duration, the blow-out frequency；
Step 15, it keeps 1sccm working medium flow rate by hollow cathode cooling room temperature (at least 4 hours) after the test, closes
Flowmeter and shut-off valve close power supply system, close vacuum system, open vacuum system vent valve, will be hollow after opened door
Cathode splits out and is sealed.
Step 16, it is obtained according to the hollow cathode vacuum launching electronics electric current of step 8 acquisition and step 13, step 14
Again activate after seasoned experiment and performance test as a result, with reference to private file technical parameter require to hollow cathode whether
Qualified and working performance makes evaluation.
In conclusion the above is merely preferred embodiments of the present invention, being not intended to limit the scope of the present invention.
All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in the present invention's
Within protection domain.
Claims (8)
1. a kind of hollow cathode vacuum electronic emitting performance test device, which is characterized in that including：Non-contact temperature measuring device
(1), vacuum chamber (3), tablet anode (4), hollow cathode, power supply system, storage are obtained for system, Micrometer of current (12) and vacuum
The system of obtaining；Wherein, hollow cathode holds pole component (5) and cathode component (15) forms by touching；Tablet anode (4) and hollow cathode
It is placed in vacuum chamber (3)；Tablet anode (4) is equipped with anodes centre hole (16), and vacuum chamber (3) is equipped with windowpane (2), vacuum chamber
Outer non-contact temperature measuring device (1) measures the cathode component of hollow cathode through windowpane (2) and anodes centre hole (16)
(15) cathode top temperature；
Power supply system includes the heating power supply (6) of the heating installation power supply in the cathode component (15) for hollow cathode, is tablet
The anode supply (7) of anode (4) power supply holds the tactile of pole component (5) power supply and holds power supply (13), and is sky for the tactile of hollow cathode
The heart-yin stage ignition provides the priming supply (14) of high-voltage pulse；
Storage provides xenon for system for hollow cathode；
Micrometer of current (12) contacts the negative terminals for holding power supply (13), and the hollow the moon of pole component (5) reception is held for measuring to touch
Pole vacuum launching electronics electric current.
2. hollow cathode vacuum electronic emitting performance test device as described in claim 1, which is characterized in that the vacuum obtains
The system of obtaining is dry molecular pump or cryogenic pump high vacuum unit.
3. hollow cathode vacuum electronic emitting performance test device as described in claim 1, which is characterized in that the vacuum chamber
Background vacuum be better than 5.0 × 10-5Pa, the pipeline integral leakage outside vacuum chamber are better than 1.0 × 10-9Pa·m3/ s, in vacuum chamber
Pipeline integral leakage be better than 1.0 × 10-6Pa·m3/s。
4. a kind of hollow cathode vacuum electronic emitting performance test method, which is characterized in that using as described in claim 1 empty
The heart-yin pole vacuum electronic emitting performance test device is tested, and is included the following steps：
Step 1, in the test preparation stage, hollow cathode heater resistance is measured, heater resistance should be greater than or be equal to 300m Ω,
Otherwise hollow cathode cathode component is replaced；The tactile of hollow cathode is measured to hold between pole component (5) and cathode component (15)
Insulation resistance touches the insulation resistance held between pole component and cathode component and should be greater than or be equal to 10G Ω, otherwise replaces to touch and hold pole
Insulating part on component (5)；
Step 2, hollow cathode and anode are mounted in vacuum chamber, connect the supply line of power supply system and store the confession for system
Air pipe；Cathode component (15) is then measured again and touches the insulating resistance value held between pole component (5), if being less than 10G Ω,
Then replace the insulating part for touching and holding on the component of pole；HEATER FOR MEASURING resistance is examined if heater resistance is less than 300m Ω or abnormal greatly
Look into the wiring of heater；The insulation resistance resistance value between cathode component (15) and tablet anode (4) is tested, if being less than 100k
Ω then replaces the insulating part on anode；
Step 3,5.0 × 10 are evacuated to vacuum chamber-5Pa is hereinafter, and empty supply air line of the storage for system；
Step 4, storage is opened for system, and pretreatment is rinsed to supply air line；
Step 5, it is better than 1.0 × 10 in vacuum chamber vacuum degree-2Under Pa and the xenon flow rate of setting, it is right to open heating power supply (6)
Hollow cathode is preheated；
Step 6, it after preheating, keeps xenon flow rate constant, hollow cathode is cooled down；After hollow cathode cooling, setting heating
Power supply output is defined igniting heated current, record heating voltage, heated current value, according to hollow cathode design work parameter
Prefabricated anode power supply touches the output voltage and output current for holding power supply, opens priming supply；Heating power supply is closed after lighting a fire successfully
And priming supply；Continuous discharge activation experiment then is carried out to hollow cathode；
Step 7, after completing hollow cathode activation experiment, power supply system is closed, keeps xenon flow rate constant, hollow cathode is carried out
It is cooling；After hollow cathode cooling, storage is closed for system, vacuum degree be evacuated to better than 5.0 × 10 to vacuum chamber-5Pa；
Step 8, Micrometer of current access is touched to the negative terminals for holding power supply, while hollow cathode the moon is measured using temperature measuring equipment
The temperature on pole top starts the test of hollow cathode vacuum electronic emission characteristics：It opens heating power supply and heats hollow cathode to the temperature that works
Degree is opened to touch and holds the prefabricated output voltage of power supply, and the heated current and voltage, Micrometer of current reading, thermometric of heating power supply are recorded
Temperature measurement device, vacuum degree, Micrometer of current reading are hollow under present hollow cathode heating temperature and vacuum degree
Cathode vacuum electron emissivity.
5. hollow cathode vacuum electronic emitting performance test method as claimed in claim 4, which is characterized in that in the step 3,
While vacuumizing, heated baking is carried out to vacuum chamber, supply air line.
6. hollow cathode vacuum electronic emitting performance test method as claimed in claim 4, which is characterized in that in the step 5,
The preheating is divided into low-temperature prewarming, medium temperature preheating and three step of high temperature preheating：First, heating power supply is opened, pre- hot hollow cathode is extremely
200 DEG C, carry out low-temperature prewarming；After completing low-temperature prewarming, heating power supply (6) is closed, keeps xenon flow rate constant, is cooled down；
Then, it keeps xenon flow rate constant, opens heating power supply (6), pre- hot hollow cathode carries out medium temperature preheating to 500 DEG C；In completion
After temperature preheating, heating power supply (6) is closed, keeps xenon flow rate constant, is cooled down；Finally, it keeps xenon flow rate constant, opens
Heating power supply (6), pre- hot hollow cathode carry out high temperature preheating to 1000 DEG C；After completing high temperature preheating, heating power supply (6) is closed,
It keeps xenon flow rate constant, is cooled down.
7. hollow cathode vacuum electronic emitting performance test method as claimed in claim 4, which is characterized in that in the step 7,
Micrometer of current is first opened, before access touches and holds the negative terminals supply line of power supply to micro-current after unloaded registration stabilization
Tester " 0 " value is calibrated；Micrometer of current access after calibration is touched and holds the negative terminals of power supply.
8. a kind of hollow cathode screen method, it is characterised in that：It uses first hollow as described in claim 4~7 any one
Cathode vacuum electron emission capability test method tests the vacuum electronic emitting performance of hollow cathode, then carries out the following steps：
Step 9, power-supply system is closed, Micrometer of current is removed, opens storage for system, under the xenon flow rate of setting, to sky
The heart-yin pole is cooled down；After hollow cathode cooling, continuous discharge activation experiment is carried out to hollow cathode again；Then, xenon is kept
Gas flow rate is constant, and hollow cathode is cooled down；
Step 10, the seasoned experiment of hollow cathode is carried out：Flowmeter controls xenon flow rate, and it is defined point that setting heating power supply, which exports,
Fiery heated current, record heating voltage, heated current value according to hollow cathode design work parameter prefabricated anode power supply, are touched and are held
The output voltage and output current of power supply open priming supply；Heating power supply and priming supply are closed after lighting a fire successfully；Then dimension
Hold electric discharge；It is then turned off power supply system again, keeps xenon flow rate constant, is cooled down；It repeats the above process, it is desirable that record igniting
Duration, anode current and voltage touch and hold electric current, voltage and vacuum degree；
Step 11, hollow cathode discharge experiment is carried out：According to using mission requirements that hollow cathode running parameter is arranged, and specified
It carries out parameter at operating point to draw partially, test parameter draws the anode voltage of hollow cathode to the rear, touches and hold voltage, heating voltage, point
Fiery duration and the blow-out frequency；
Step 12, it is obtained again according to the hollow cathode vacuum launching electronics electric current of step 8 acquisition and step 10, step 11
Seasoned experiment and discharge test after secondary activation as a result, whether qualified and working performance is evaluated to hollow cathode.
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