CN108328563B - MEMS chip for measuring viscosity of liquid and measuring method thereof - Google Patents
MEMS chip for measuring viscosity of liquid and measuring method thereof Download PDFInfo
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- CN108328563B CN108328563B CN201810256851.0A CN201810256851A CN108328563B CN 108328563 B CN108328563 B CN 108328563B CN 201810256851 A CN201810256851 A CN 201810256851A CN 108328563 B CN108328563 B CN 108328563B
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- 239000007788 liquid Substances 0.000 title claims abstract description 130
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000003860 storage Methods 0.000 claims abstract description 27
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 230000008859 change Effects 0.000 claims abstract description 15
- 238000010438 heat treatment Methods 0.000 claims description 14
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 10
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 10
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 239000011651 chromium Substances 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 229910052742 iron Inorganic materials 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 239000010937 tungsten Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 230000007123 defense Effects 0.000 abstract description 4
- 238000005272 metallurgy Methods 0.000 abstract description 4
- 239000003208 petroleum Substances 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract description 4
- 239000011324 bead Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000036541 health Effects 0.000 description 3
- 229910001020 Au alloy Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000008280 blood Substances 0.000 description 2
- 210000004369 blood Anatomy 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000005381 potential energy Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 210000004243 sweat Anatomy 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000001124 body fluid Anatomy 0.000 description 1
- 239000010839 body fluid Substances 0.000 description 1
- 230000036760 body temperature Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 210000002700 urine Anatomy 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
- G01N2011/006—Determining flow properties indirectly by measuring other parameters of the system
Abstract
The invention provides a MEMS chip for measuring liquid viscosity, which comprises a substrate, wherein a liquid storage tank, a cantilever beam positioned above the liquid storage tank, a liquid flow channel arranged on one side of the liquid storage tank and a liquid dropping port communicated with the liquid flow channel are arranged on the substrate; the substrate is also provided with a second driving electrode corresponding to the first driving electrode; the liquid storage tank is used for accommodating liquid to be measured; the cantilever beam is used to measure the viscosity change of the liquid. The MEMS chip has simpler structure, lower production cost and higher production efficiency, and can be widely applied to the technical fields of medical treatment and sanitation, petroleum, chemical industry, metallurgy, national defense and the like. In addition, the measuring method for measuring the viscosity of the liquid by adopting the MEMS chip has higher detection precision and higher compatibility with an IC, and is more suitable for personalized and household use.
Description
Technical Field
The invention relates to the field of liquid viscosity measurement, in particular to a chip for measuring liquid viscosity and a measuring method thereof.
Background
Viscosity measurement is a necessary technology in a plurality of fields such as petroleum, chemical industry, metallurgy, national defense, medical treatment and health, and has a dense and indispensible relationship with the acquisition of accurate detection data, the control of production flow, the improvement of product quality, the development and the energy conservation. In particular, when the liquid is flowing steadily, it is generally the case that the laminar flow is stabilized, i.e. the liquid flow conditions on the same level are exactly the same. If the flow rates between the layers within the liquid are different, then relative motion will occur between adjacent layers within the liquid, and an interaction force, referred to as a viscous force, will occur between the two layers within the liquid, and a physical quantity that measures the magnitude of this viscous force is referred to as viscosity.
In recent years, health care has been a field of interest, and in order to solve the health monitoring of numerous people, it is necessary to make the device more portable, easy to operate, economical and accurate. However, the viscosity of the liquid is currently monitored mainly by stirring the magnetic beads, and the viscosity of the liquid is evaluated by the rotation speed of the stirring of the magnetic beads. In the related art, the measured liquid is placed in a smooth glass vessel, a certain mass of magnetic beads are added, the magnetic beads rotate around the bottom of the vessel after being subjected to an external force, and the rotating speed of the magnetic beads is calculated through a counter, so that the liquid viscosity information is obtained. However, the existing viscosity measurement method has the following problems: the operation steps are complicated; the degree of wetting of the glass ware with liquid affects the accuracy of the test; special instruments and equipment are needed for detection, and the detection is complicated; the liquid with larger viscosity can not be detected, and the selectivity is poor; the instrument and equipment are more expensive and the detection cost is higher.
Therefore, it is necessary to provide a new chip for measuring the viscosity of a liquid and a measuring method thereof.
Disclosure of Invention
In order to solve the problems, the invention provides a MEMS chip for measuring the viscosity of liquid, which comprises a substrate, wherein a liquid storage tank, a cantilever beam positioned above the liquid storage tank, a liquid flow channel arranged at one side of the liquid storage tank and a liquid dropping port communicated with the liquid flow channel are arranged on the substrate, and a first driving electrode for electrostatic driving is arranged on the cantilever beam; the substrate is also provided with a second driving electrode corresponding to the first driving electrode; the liquid storage tank is used for accommodating liquid to be measured; the cantilever beam is used to measure the viscosity change of the liquid.
Preferably, an electrostatic force is applied to the cantilever beam by the first and second driving electrodes to drive the cantilever beam to vibrate and bring it into contact with the liquid to be measured.
Preferably, the material of the first driving electrode and the second driving electrode is one of gold, chromium, nickel, tungsten, iron, copper, aluminum, platinum, and titanium, or an alloy thereof.
Preferably, the first and second driving electrodes have a width of 50nm to 1cm and a length of 200 μm to 10cm.
Preferably, the MEMS chip further comprises a heating electrode for maintaining the temperature of the liquid to be measured in a constant temperature state, and/or the heating electrode has a width of 50nm to 1cm and a length of 200 μm to 10cm.
Preferably, the liquid flow channel is arranged on one side of the substrate away from the cantilever beam; and/or the liquid flow channel has a depth of 10 μm to 1cm and a width of 2 μm to 1cm.
The invention also provides a measuring method for measuring the viscosity of the liquid by adopting the MEMS chip, which comprises the following steps:
electrostatically driving the cantilever beam to vibrate;
measuring the vibration frequency of the cantilever after the cantilever contacts the liquid in the liquid storage tank;
comparing the vibration frequency before and after the cantilever beam contacts the liquid to obtain the viscosity of the liquid;
obtaining the viscosity change of the liquid according to the vibration frequency change of the cantilever beam after contacting the liquid;
the MEMS chip comprises a substrate, wherein a liquid storage tank, a cantilever beam positioned above the liquid storage tank, a liquid flow channel arranged at one side of the liquid storage tank and a liquid dropping port communicated with the liquid flow channel are arranged on the substrate, and a first driving electrode for electrostatic driving is arranged on the cantilever beam; and a second driving electrode corresponding to the first driving electrode is also arranged on the substrate.
Preferably, the liquid storage tank is used for containing liquid to be measured; and/or the cantilever beam is used to measure a change in viscosity of the liquid.
Preferably, an electrostatic force is applied to the cantilever beam by the first and second driving electrodes to drive the cantilever beam to vibrate and bring it into contact with the liquid to be measured.
Preferably, the MEMS chip further comprises a heating electrode for maintaining the temperature of the liquid to be measured in a constant temperature state.
The invention has the beneficial effects that:
compared with the prior art, the MEMS chip has simpler structure, simplified process flow, lower production cost and higher production efficiency, and can be widely applied to the technical fields of medical treatment and sanitation, petroleum, chemical industry, metallurgy, national defense and the like. In addition, the measuring method for measuring the viscosity of the liquid by adopting the MEMS chip has higher detection precision and higher compatibility with an IC, and is more suitable for personalized and household use.
Drawings
Fig. 1 is a schematic perspective view of a MEMS chip of the present invention.
Fig. 2 is a schematic plan view of a MEMS chip of the present invention.
Fig. 3 is a schematic side view of a MEMS chip of the present invention.
FIG. 4 is a flow chart of the MEMS chip of the present invention for detecting the viscosity of a liquid.
Detailed Description
The following detailed description of specific embodiments of the invention is provided in connection with the accompanying drawings and examples in order to provide a better understanding of the aspects of the invention and advantages thereof. However, the following description of specific embodiments and examples is for illustrative purposes only and is not intended to be limiting of the invention.
Example 1
As shown in fig. 1 and 2, the present invention provides a MEMS chip for measuring the viscosity of a liquid, the MEMS chip comprising a substrate 10, a liquid storage tank 11 provided on the substrate 10, a cantilever 12 provided above the liquid storage tank 11, a first driving electrode 13 provided on the cantilever 12, and a second driving electrode provided on the substrate, wherein electrostatic force is applied to the cantilever by the first driving electrode 13 and the second driving electrode. In addition, a heating electrode 14 is disposed on the MEMS chip, and the heating electrode 14 is, for example, a loop disposed on the cantilever 12. A liquid flow channel 15 arranged at one side of the liquid storage tank 11 and a liquid drop port 16 communicated with the liquid flow channel 15, wherein the first driving electrode 13 is used for driving the cantilever beam 12 to vibrate and contact with liquid; the pair of heating electrodes 14 and the cantilever beam 12 form a loop to ensure that the liquid to be measured is in a constant temperature state, but the method is not limited to this, and the liquid to be measured is in a constant temperature state in many ways, as long as the liquid to be measured is in a constant temperature state. For example, heating or insulating means are provided below the reservoir 11.
In this embodiment, the cantilever structure may be a single cantilever or two independent and identical cantilevers, and the liquid storage tank 11 is symmetrically provided with a liquid drop port communicated with the liquid storage tank on a side far away from the cantilever, so that a half structure of the MEMS chip is taken as an example for illustration. As shown in fig. 1 and 2, the thickness of the cantilever 12 is 200nm-10 μm, and the material of the cantilever 12 may be silicon, silicon oxide, quartz, silicon nitride, polyimide, polyethylene, etc., see fig. 3; the liquid reservoir 11 has a square cross-sectional shape, and further has a width of 2 μm to 1cm and a height of 10 μm to 1mm, but is not limited thereto, and may have other shapes such as a rectangle, a pentagon, and the like; the drip opening 16 is circular, and the diameter of the drip opening is 2 μm-1cm; the depth of the liquid flow channel 15 is 10 mu m-1cm, and the width is 2 mu m-1cm; the heating electrode 14 is made of one or alloy of gold, chromium, nickel, tungsten, iron, copper, aluminum, platinum and titanium, and the width of the heating electrode 14 is 50nm-1cm, and the length is 200 μm-10cm; the first driving electrode 13 and the second driving electrode are made of one or alloy of gold, chromium, nickel, tungsten, iron, copper, aluminum, platinum and titanium, and the width of the driving electrode is 50nm-1cm, and the length is 200 μm-10cm. The above is merely illustrative, and the MEMS chip is not limited thereto, and the number of the cantilever beams may be two in the present embodiment, but may be one or more.
The liquid may be a body fluid such as blood, sweat, urine, or the like.
Example 2
As shown in fig. 4, the present invention also provides a method for measuring the viscosity of a liquid, which uses the MEMS chip of the present invention to evaluate the frequency change of the nano-cantilever after the introduction of the liquid by comparing the vibration frequencies of the cantilever before and after the contact with the liquid. Specifically, the measurement method includes the steps of:
electrostatically driving the cantilever beam to vibrate;
measuring the vibration frequency of the cantilever after the cantilever contacts the liquid in the liquid storage tank;
comparing the vibration frequency before and after the cantilever beam contacts the liquid to obtain the viscosity of the liquid;
and obtaining the viscosity change of the liquid according to the vibration frequency change of the cantilever beam after contacting the liquid.
Working principle of MEMS chip for measuring viscosity of liquid
When a driving current is applied to the first driving electrode 13, the cantilever beam 12 is subjected to electrostatic force, electrostatic vibration is generated along with the driving current, when liquid drops into the liquid drop port, the liquid flows into the liquid storage tank along with the liquid flow channel, the cantilever beam 12 is contacted with the liquid in the liquid storage tank in the vibration process, the vibration frequency of the cantilever beam is compared with the vibration frequency of the cantilever beam after the liquid is introduced, the vibration frequency variation of the cantilever beam is obtained, and then the viscosity variation of the liquid is obtained according to the vibration frequency before and after the cantilever beam contacts the liquid and the variation of the driving electrostatic force. In addition, in the detection process, it is preferable to use a pair of heating electrodes in this embodiment in order to keep the liquid such as blood, sweat, etc. consistent with the body temperature. See fig. 1 and 2.
The electrostatic drive and the resonant frequency of the micromechanical structure under the electrostatic drive are described below. Electrostatic actuation mainly uses electrostatic forces between different objects to move the objects. The electrostatic force is analyzed mainly according to the theory of the physical electromagnetic field and is deduced and calculated through the electric potential energy stored by the electrostatic field of the structural device. The electrostatic force is formulated as follows:
the potential stored by the capacitance between the upper and lower platesC represents the capacitance between the upper and lower electrode plates, and V represents the voltage applied across the upper and lower electrode plates. When a voltage source is applied to the upper polar plate and the lower polar plate with a constant voltage, a charge and discharge process is carried out on a capacitor formed by the upper polar plate and the lower polar plate, and the potential energy of the cantilever beam can be expressed as:
wherein q=c·v.
Wherein V is a constant voltage, i.e. a constant, so
From the above, it can be seen that the electrostatic force between the upper and lower plates is related to the structural capacitance only, so that the electrostatic force between the upper and lower plates can be obtained by only requiring the change in the structural capacitance.
In addition, the resonant frequency of the micromechanical structure becomes:
f in 0 For the inherent resonance frequency of the cantilever beam, M is the mass of the cantilever beam, k' is the effective elastic coefficient of the capacitance structure system, A is the capacitance area of the upper and lower polar plates, d is the distance between the upper and lower polar plates, epsilon 0 (＝8.854×10 -12 F/m) is the vacuum dielectric constant, ε is the relative dielectric constant of the medium between the polar plates, and V is a constant voltage. Thus, the resonant frequency of the cantilever beam in motion is also a nonlinear function of the drive voltage, and will decrease as the drive voltage amplitude increases.
Compared with the prior art, the MEMS chip has simpler structure, simplified process flow, lower production cost and higher production efficiency, and can be widely applied to the technical fields of medical treatment and sanitation, petroleum, chemical industry, metallurgy, national defense and the like. In addition, the MEMS chip is adopted to measure the viscosity of the liquid, the vibration frequency of the nano cantilever beam before and after the nano cantilever beam contacts the liquid is compared to evaluate the frequency change of the nano cantilever beam after the liquid is introduced so as to measure the viscosity change of the liquid.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the technical scope of the present invention should be covered by the scope of the present invention.
Claims (6)
1. The MEMS chip is characterized by comprising a substrate, wherein a liquid storage tank, a cantilever beam positioned above the liquid storage tank, a liquid runner arranged on one side of the liquid storage tank and a liquid drop port communicated with the liquid runner are arranged on the substrate, one end of the cantilever beam is connected to the substrate, the other end of the cantilever beam is suspended above the liquid storage tank, and a first driving electrode for electrostatic driving is arranged on the cantilever beam; the substrate is also provided with a second driving electrode corresponding to the first driving electrode; the liquid storage tank is used for accommodating liquid to be measured; the cantilever beam is used for measuring the viscosity change of the liquid according to the change of the vibration frequency of the cantilever beam; the width of the first driving electrode and the second driving electrode is 50nm-1cm, and the length is 200 mu m-10cm; the MEMS chip further comprises a heating electrode, wherein the heating electrode is used for keeping the temperature of the liquid to be measured in a constant temperature state, the width of the heating electrode is 50nm-1cm, and the length of the heating electrode is 200 mu m-10cm; the liquid flow channel is arranged on one side of the substrate far away from the cantilever beam; the depth of the liquid flow channel is 10 mu m-1cm, and the width is 2 mu m-1cm.
2. The MEMS chip for measuring the viscosity of a liquid according to claim 1, wherein an electrostatic force is applied to the cantilever beam by the first driving electrode and the second driving electrode to drive the cantilever beam to vibrate and bring it into contact with the liquid to be measured.
3. The MEMS chip for measuring viscosity of liquid according to claim 2, wherein the material of the first driving electrode and the second driving electrode is one of gold, chromium, nickel, tungsten, iron, copper, aluminum, platinum, titanium, or an alloy.
4. A method for measuring the viscosity of a liquid using the MEMS chip for measuring the viscosity of a liquid according to claim 1, comprising the steps of:
electrostatically driving the cantilever beam to vibrate;
measuring the vibration frequency of the cantilever after the cantilever contacts the liquid in the liquid storage tank;
comparing the vibration frequency before and after the cantilever beam contacts the liquid to obtain the viscosity of the liquid;
and obtaining the viscosity change of the liquid according to the vibration frequency change of the cantilever beam after contacting the liquid.
5. The method of measuring the viscosity of a liquid according to claim 4, wherein an electrostatic force is applied to the cantilever beam by the first driving electrode and the second driving electrode to drive the cantilever beam to vibrate and bring it into contact with the liquid to be measured.
6. The method of measuring the viscosity of a liquid according to claim 4, wherein the material of the first driving electrode and the second driving electrode is one of gold, chromium, nickel, tungsten, iron, copper, aluminum, platinum, titanium, or an alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810256851.0A CN108328563B (en) | 2018-03-27 | 2018-03-27 | MEMS chip for measuring viscosity of liquid and measuring method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810256851.0A CN108328563B (en) | 2018-03-27 | 2018-03-27 | MEMS chip for measuring viscosity of liquid and measuring method thereof |
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| CN108328563B true CN108328563B (en) | 2024-03-08 |
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| CN113405947B (en) * | 2021-06-21 | 2022-07-26 | 电子科技大学 | QCM-based liquid viscosity detector |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4938053A (en) * | 1987-08-28 | 1990-07-03 | Thorm EMI Flow Measurement Limited | Fluid metering system |
| US5872309A (en) * | 1996-12-11 | 1999-02-16 | Robert Bosch Gmbh | Method for checking the sealing of a package and apparatus for measuring viscosity |
| JP2003139675A (en) * | 1994-11-25 | 2003-05-14 | Ngk Insulators Ltd | Equipment for measuring viscosity and equipment for measuring characteristics of fluid |
| US7148611B1 (en) * | 2005-10-11 | 2006-12-12 | Honeywell International Inc. | Multiple function bulk acoustic wave liquid property sensor |
| JP2010203992A (en) * | 2009-03-05 | 2010-09-16 | Epson Toyocom Corp | Viscosity sensor and method of measuring viscosity |
| JP2018028451A (en) * | 2016-08-16 | 2018-02-22 | 国立大学法人九州工業大学 | Biological fluid viscosity measurement device |
| CN208150962U (en) * | 2018-03-27 | 2018-11-27 | 苏州原位芯片科技有限责任公司 | It is a kind of for measuring the MEMS chip of liquid viscosity |
-
2018
- 2018-03-27 CN CN201810256851.0A patent/CN108328563B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4938053A (en) * | 1987-08-28 | 1990-07-03 | Thorm EMI Flow Measurement Limited | Fluid metering system |
| JP2003139675A (en) * | 1994-11-25 | 2003-05-14 | Ngk Insulators Ltd | Equipment for measuring viscosity and equipment for measuring characteristics of fluid |
| US5872309A (en) * | 1996-12-11 | 1999-02-16 | Robert Bosch Gmbh | Method for checking the sealing of a package and apparatus for measuring viscosity |
| US7148611B1 (en) * | 2005-10-11 | 2006-12-12 | Honeywell International Inc. | Multiple function bulk acoustic wave liquid property sensor |
| JP2010203992A (en) * | 2009-03-05 | 2010-09-16 | Epson Toyocom Corp | Viscosity sensor and method of measuring viscosity |
| JP2018028451A (en) * | 2016-08-16 | 2018-02-22 | 国立大学法人九州工業大学 | Biological fluid viscosity measurement device |
| CN208150962U (en) * | 2018-03-27 | 2018-11-27 | 苏州原位芯片科技有限责任公司 | It is a kind of for measuring the MEMS chip of liquid viscosity |
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| CN108328563A (en) | 2018-07-27 |
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