CN108326442A - A kind of laser carving device - Google Patents

A kind of laser carving device Download PDF

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Publication number
CN108326442A
CN108326442A CN201810459763.0A CN201810459763A CN108326442A CN 108326442 A CN108326442 A CN 108326442A CN 201810459763 A CN201810459763 A CN 201810459763A CN 108326442 A CN108326442 A CN 108326442A
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CN
China
Prior art keywords
wall
cavity
face
sliding
threaded rod
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Granted
Application number
CN201810459763.0A
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Chinese (zh)
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CN108326442B (en
Inventor
何龙飞
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Hercynian (fujian) Branch Co Ltd General Institute Of Mechanical Science
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Individual
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Publication of CN108326442A publication Critical patent/CN108326442A/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/361Removing material for deburring or mechanical trimming
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention discloses a kind of laser carving devices,Processing main body including being fixedly mounted on regulating arm subordinate side,It is equipped with to pass in the processing main body inner wall body and connects chamber,Described pass is equipped with adjusting cavity in the processing main body for connecing top of chamber,Being slidably installed in the adjusting cavity has adjusting bracket,The biography connects inner wall connection on the right side of chamber and is equipped with sliding cavity,Being slidably installed in the sliding cavity has sliding seat,It is installed with first motor between the sliding cavity and the adjusting cavity,First motor top power is connected with threaded rod,The upper threaded rod is connect with the adjusting bracket screw-thread fit and top end is rotatably assorted with the adjusting cavity inner roof wall and connect,First motor bottom end power is connected with lower threaded rod,The lower threaded rod is connect with the sliding seat screw-thread fit and bottom end is rotatably assorted with the sliding cavity inner bottom wall and connect.

Description

A kind of laser carving device
Technical field
The present invention relates to Computerized Numerical Control processing technology field, specially a kind of laser carving device.
Background technology
Rapid laser carving is using based on Numeric Control Technology, and laser is process medium.Rapidoprint is under laser irradiation The fusing of moment and the physical modification of gasification achieve the purpose that processing, traditional laser engraving facility usually have a single function, only Individual local laser carving function makes material surface in general, rapidoprint needs polishing treatment before carrying out laser engraving In smooth state, therefore, it is badly in need of a kind of laser engraving of design and polishing integral equipment.
Invention content
The purpose of the present invention is to provide a kind of laser carving devices, for overcoming drawbacks described above in the prior art.
A kind of laser carving device according to the present invention, including it is fixedly mounted on the processing main body of regulating arm subordinate side, institute It states to be equipped with to pass in processing main body inner wall body and connects chamber, described pass is equipped with adjusting cavity, the tune in the processing main body for connecing top of chamber Being slidably installed in section chamber has adjusting bracket, and the biography connects inner wall connection on the right side of chamber and is equipped with sliding cavity, is slided in the sliding cavity Cooperation is equipped with sliding seat, and first motor is installed between the sliding cavity and the adjusting cavity, and the first motor top is dynamic Force-fitting is connected with threaded rod, and the upper threaded rod is connect with the adjusting bracket screw-thread fit and top end and the adjusting Intracavitary roof is rotatably assorted connection, and first motor bottom end power is connected with lower threaded rod, the lower threaded rod and institute It states the connection of sliding seat screw-thread fit and bottom end is rotatably assorted with the sliding cavity inner bottom wall and connect, the sliding seat left-hand end The second motor is installed in face, the second motor left-hand end power cooperation, which is equipped with, stretches into the activity cone tooth for passing and connecing intracavitary Wheel, the biography, which connects intracavitary bottom wall and is rotatably assorted, is connected with rotational sleeve, and extended segment is stretched into the biography and connect at the top of the rotational sleeve Intracavitary and outer surface be circumferentially installed with to the movable intermeshing fixed bevel gear of bevel gear, the rotational sleeve bottom Portion extended segment is outside the processing bottom part body end face and end is installed with the head that is loaded, and is equipped in the bottom end face that is loaded Rectangular slot, mating in the rectangular slot to be equipped with polishing wheel, inner wall is arranged at left and right sides of the rectangular slot It is described to be loaded on head up and down through being equipped with the first perforation in the rotational sleeve to lock the locked component of the polishing wheel Lower to run through the second perforation for being equipped with and being oppositely arranged with first perforation, the polishing wheel runs through to be equipped with up and down to be worn with described second The third that hole is oppositely arranged is perforated, and laser engraving machine, the laser engraving machine bottom end are installed in the adjusting bracket bottom end face Equipped with emitting head, the emitting head stretches into successively in first perforation, the second perforation and third perforation and gap is matched therewith Connection is closed, emission port is equipped in the emitting head.
Further technical solution, the adjusting bracket bottom end are installed with electric contact, are equipped with and use in the adjusting cavity inner bottom wall With the shrinkage pool that the electric contact is inserted into, the shrinkage pool bottom wall is installed with the elasticity power supply piece to be contacted with the electric contact.
Further technical solution, the locked component include being symmetricly set on inner wall at left and right sides of the rectangular slot Logical sliding slot, logical sliding slot end face at left and right sides of the head that is loaded, and be slidably installed in the logical sliding slot and have locking Bar, the locking level outside are installed with handle, are arranged in the end face of the polishing wheel left and right sides and are inserted to the locking level The locking mouth entered is equipped with top pressure sliding slot in the logical sliding slot inner roof wall, be slidably installed in the top pressure sliding slot have bottom end with The top pressure sliding block that the locking level is fixedly connected, in the top pressure sliding slot on the outside of the top pressure sliding block top pressure cooperation top is installed Pressing spring.
Further technical solution is slidably connected with slide guide in the adjusting bracket on the left of the laser engraving machine Bar, inner wall is fixedly connected the slide guide bar up and down with the adjusting cavity.
Further technical solution, the processing main body inner bottom wall is interior to be equipped with socket chamber, consolidates in the socket intracavitary roof Equipped with air compressor, the air compressor top is connected with air inlet pipe, and the air inlet pipe is stretched out on the left of the processing main body Outside end face, the air compressor bottom end is equipped with escape pipe, and the outlet tube outer surface is slidably connected with and the socket Chamber sliding connection goes out gas spray gun, it is described go out gas spray gun right end face be installed with connecting plate, the connecting plate top is fixed There are piston rod, piston rod top be connected by power to there is cylinder, the cylinder to be fixedly arranged in the processing main body inner bottom wall.
Further technical solution, the upper threaded rod and the lower threaded rod screw thread are oppositely arranged.
The beneficial effects of the invention are as follows:The configuration of the present invention is simple, it is easy to operate, it is passed by processing to be equipped in main body inner wall body Chamber is connect, passes and is equipped with adjusting cavity in the processing main body for connecing top of chamber, being slidably installed in adjusting cavity has adjusting bracket, and biography connects on the right side of chamber Inner wall connection is equipped with sliding cavity, and being slidably installed in sliding cavity has sliding seat, and first is installed between sliding cavity and adjusting cavity Motor, first motor top power are connected with threaded rod, and upper threaded rod is connect with adjusting bracket screw-thread fit and top end End is rotatably assorted with adjusting cavity inner roof wall to be connect, and first motor bottom end power is connected with lower threaded rod, lower threaded rod and cunning Dynamic seat screw-thread fit connection and bottom end is rotatably assorted with sliding cavity inner bottom wall and connect is installed with the in sliding seat left end face Two motors, the cooperation of the second motor left-hand end power are equipped with the movable bevel gear for stretching into and passing and connecing intracavitary, and biography connects the rotation of intracavitary bottom wall Be connected with rotational sleeve, at the top of rotational sleeve extended segment stretch into biography connect intracavitary and outer surface be circumferentially installed with to activity The intermeshing fixed bevel gear of bevel gear, rotational sleeve bottom extended segment is outside processing bottom part body end face and end is fixed Be loaded head, is loaded in a bottom end face and is equipped with rectangular slot, mating in rectangular slot to be equipped with polishing wheel, rectangular slot Left and right sides inner wall is arranged with to lock the locked component of polishing wheel, perforates up and down through equipped with first in rotational sleeve, Be loaded head up and down through be equipped with first perforation be oppositely arranged second perforation, polishing wheel up and down through be equipped with and second perforation phase It perforates to the third of setting, laser engraving machine is installed in adjusting bracket bottom end face, laser engraving machine bottom end is equipped with emitting head, hair It penetrates that head is stretched into successively in the first perforation, the second perforation and third perforation and clearance fit connects therewith, hair is equipped in emitting head Loophole, so as to make the convenient adjusting of laser engraving and polishing wheel use, regulating step is simple and convenient, when emitting head stretches out, Laser engraving machine connects electricity automatically, meanwhile, fixed bevel gear is off with movable bevel gear, that is, polishing wheel will not be unexpected Or start due to misoperation, moreover, the ash that can be blown to polishing generation by going out gas spray gun in polishing Dirt is blown away, and is increased property easy to use and safety, is effectively increased staff's working efficiency.
Description of the drawings
Fig. 1 is a kind of laser carving device inside overall structure diagram in the present invention;
Fig. 2 is enlarged structure schematic diagram at A in Fig. 1.
Specific implementation mode
With reference to Fig. 1-2, the present invention is described in detail.
Referring to Fig.1-2, a kind of laser carving device according to an embodiment of the invention, including it is fixedly mounted on regulating arm hand The processing main body 10 of 21 downsides, is equipped in 10 inner wall of processing main body to pass and connects chamber 24, and the biography connects described at the top of chamber 24 It processes and is equipped with adjusting cavity 20 in main body 10, being slidably installed in the adjusting cavity 20 has adjusting bracket 18, and it is right that the biography connects chamber 24 Side inner wall connection is equipped with sliding cavity 12, and being slidably installed in the sliding cavity 12 has sliding seat 13, the sliding cavity 12 and institute It states and is installed with first motor 16 between adjusting cavity 20,16 top power of the first motor is connected with threaded rod 19, institute State that threaded rod 19 is connect with 18 screw-thread fit of the adjusting bracket and top end is rotatably assorted with 20 inner roof wall of the adjusting cavity Connection, 16 bottom end power of the first motor are connected with lower threaded rod 11, the lower threaded rod 11 and the sliding seat 13 Screw-thread fit connects and bottom end is rotatably assorted with 12 inner bottom wall of the sliding cavity and connect, in 13 left end face of the sliding seat It is installed with the second motor 36, the cooperation of second motor, 36 left-hand end power, which is equipped with, stretches into the activity cone for passing and connecing in chamber 24 Gear 35, the biography, which connects 24 inner bottom wall of chamber and is rotatably assorted, is connected with rotational sleeve 48, and 48 top extended segment of the rotational sleeve is stretched Enter the biography connect in chamber 24 and outer surface be circumferentially installed with to the intermeshing fixed bevel gear of the movable bevel gear 35 37,48 bottom extended segment of the rotational sleeve through 10 bottom end face of processing main body outside and end is installed with and is loaded first 45, Described be loaded in first 45 bottom end face is equipped with rectangular slot 55, mating in the rectangular slot 55 to be equipped with polishing wheel 41, 55 left and right sides inner wall of the rectangular slot is arranged with to lock the locked component of the polishing wheel 41, the rotational sleeve Up and down through being equipped with the first perforation 47 in 48, described be loaded first about 45 47 is oppositely arranged through being equipped with to perforate with described first Second perforation 46, about 41 polishing wheel runs through the third perforation 56 for being equipped with and being oppositely arranged with second perforation 46, described Laser engraving machine 23 is installed in 18 bottom end face of adjusting bracket, 23 bottom end of the laser engraving machine is equipped with emitting head 50, the hair Penetrate first 50 stretch into successively it is described first perforation 47, second perforation 46 and third perforation 56 in and therewith clearance fit connect, institute It states and is equipped with emission port 57 in emitting head 50.
Valuably or illustratively, 18 bottom end of adjusting bracket is installed with electric contact 15, bottom in the adjusting cavity 20 The shrinkage pool 17 being inserted into the electric contact 15 is equipped in wall, 17 bottom wall of the shrinkage pool is installed with to connect with the electric contact 15 Tactile elasticity power supply piece 14, to which the laser engraving machine 23 is powered and be powered off automatically.
Valuably or illustratively, the locked component includes being symmetricly set on 55 left and right sides inner wall of the rectangular slot Logical sliding slot 54, the logical sliding slot 54 is slidably matched through first 45 left and right sides end face that is loaded in the logical sliding slot 54 Locking level 43 is installed, 43 outside of the locking level is installed with handle 44, and the polishing wheel is symmetrically set in 41 left and right sides end face There is the locking mouth 42 being inserted into the locking level 43, top pressure sliding slot 52, the top pressure are equipped in 54 inner roof wall of logical sliding slot Be slidably installed the top pressure sliding block 51 that bottom end is fixedly connected with the locking level 43 in sliding slot 52, outside the top pressure sliding block 51 In the top pressure sliding slot 52 of side top pressure cooperation top pressure spring 53 is installed, consequently facilitating to the polishing wheel 41 carry out locking with Unlock, and then convenient for being dismounted to the polishing wheel 41.
Valuably or illustratively, it is slidably connected with and leads in the adjusting bracket 18 in 23 left side of the laser engraving machine Slide bar 22, the slide guide bar 22 is fixedly connected with about 20 inner wall of the adjusting cavity, to increase the sliding of the adjusting bracket 18 Stability.
Valuably or illustratively, it is equipped with socket chamber 27 in 10 inner bottom wall of processing main body, is pushed up in the socket chamber 27 Air compressor 26 is installed in wall, 26 top of the air compressor is connected with air inlet pipe 25, and the air inlet pipe 25 stretches out institute It states outside processing 10 left end face of main body, 26 bottom end of the air compressor is equipped with escape pipe 28, and 28 outer surface of the escape pipe is slided Dynamic be connected with goes out gas spray gun 31 with what the socket chamber 27 was slidably connected, it is described go out 31 right end face of gas spray gun it is fixed There are connecting plate 33,33 top of the connecting plate to be installed with piston rod 30,30 top be connected by power of the piston rod has cylinder 34, institute It states cylinder 34 to be fixedly arranged in 10 inner bottom wall of processing main body, the dust generated when consequently facilitating the polishing wheel 41 being worked is blown It walks.
Valuably or illustratively, the upper threaded rod 19 and 11 screw thread of lower threaded rod are oppositely arranged, to simultaneously Adjusting bracket 18 is driven to be slided in the opposite direction with sliding seat 13.
When original state, adjusting bracket 18 is in 20 bottom end of adjusting cavity, and electric contact 15 is contacted with elasticity power supply piece 14, emitting head 50 stretch out 41 bottom end face of polishing wheel, meanwhile, sliding seat 13 is in 12 top of sliding cavity, movable bevel gear 35 and fixed bevel gear 37 are disengaged from, at this point, laser engraving machine 23 can carry out rapid laser carving to material.
When needing polishing, starting first motor 16 makes 18 upward sliding of adjusting bracket and sliding seat 13 to downslide It is dynamic, at this point, polishing wheel 41 is in 50 lower position of emitting head, meanwhile, movable bevel gear 35 and fixed bevel gear 37 are at a fully engaged, Starting the second motor 36 can drive polishing wheel 41 to be rotated, to be polished work, meanwhile, open air compressor 26 By compressed air from going out in gas spray gun 31 to spray, the dust generated to polishing is blown away, and passes through the length of regulating piston bar 30 Adjust out the upper and lower position of gas spray gun 31.
The beneficial effects of the invention are as follows:The configuration of the present invention is simple, it is easy to operate, it is passed by processing to be equipped in main body inner wall body Chamber is connect, passes and is equipped with adjusting cavity in the processing main body for connecing top of chamber, being slidably installed in adjusting cavity has adjusting bracket, and biography connects on the right side of chamber Inner wall connection is equipped with sliding cavity, and being slidably installed in sliding cavity has sliding seat, and first is installed between sliding cavity and adjusting cavity Motor, first motor top power are connected with threaded rod, and upper threaded rod is connect with adjusting bracket screw-thread fit and top end End is rotatably assorted with adjusting cavity inner roof wall to be connect, and first motor bottom end power is connected with lower threaded rod, lower threaded rod and cunning Dynamic seat screw-thread fit connection and bottom end is rotatably assorted with sliding cavity inner bottom wall and connect is installed with the in sliding seat left end face Two motors, the cooperation of the second motor left-hand end power are equipped with the movable bevel gear for stretching into and passing and connecing intracavitary, and biography connects the rotation of intracavitary bottom wall Be connected with rotational sleeve, at the top of rotational sleeve extended segment stretch into biography connect intracavitary and outer surface be circumferentially installed with to activity The intermeshing fixed bevel gear of bevel gear, rotational sleeve bottom extended segment is outside processing bottom part body end face and end is fixed Be loaded head, is loaded in a bottom end face and is equipped with rectangular slot, mating in rectangular slot to be equipped with polishing wheel, rectangular slot Left and right sides inner wall is arranged with to lock the locked component of polishing wheel, perforates up and down through equipped with first in rotational sleeve, Be loaded head up and down through be equipped with first perforation be oppositely arranged second perforation, polishing wheel up and down through be equipped with and second perforation phase It perforates to the third of setting, laser engraving machine is installed in adjusting bracket bottom end face, laser engraving machine bottom end is equipped with emitting head, hair It penetrates that head is stretched into successively in the first perforation, the second perforation and third perforation and clearance fit connects therewith, hair is equipped in emitting head Loophole, so as to make the convenient adjusting of laser engraving and polishing wheel use, regulating step is simple and convenient, when emitting head stretches out, Laser engraving machine connects electricity automatically, meanwhile, fixed bevel gear is off with movable bevel gear, that is, polishing wheel will not be unexpected Or start due to misoperation, moreover, the ash that can be blown to polishing generation by going out gas spray gun in polishing Dirt is blown away, and is increased property easy to use and safety, is effectively increased staff's working efficiency.
Those skilled in the art can define, can in the case of not departing from overall spirit and the design of the present invention To make the various modifications for above example.It each falls within protection scope of the present invention.The protection scheme of the present invention It is subject to claims appended hereto.

Claims (6)

1. a kind of laser carving device, including it is fixedly mounted on the processing main body of regulating arm subordinate side, it is characterised in that:It is described to add It is equipped with to pass in work main body inner wall body and connects chamber, described pass is equipped with adjusting cavity, the adjusting cavity in the processing main body for connecing top of chamber In be slidably installed and have adjusting bracket, the biography connects inner wall connection on the right side of chamber and is equipped with sliding cavity, is slidably matched in the sliding cavity Sliding seat is installed, first motor is installed between the sliding cavity and the adjusting cavity, first motor top power is matched Conjunction is connected with threaded rod, and the upper threaded rod connect with the adjusting bracket screw-thread fit and in top end and the adjusting cavity Roof is rotatably assorted connection, and first motor bottom end power is connected with lower threaded rod, the lower threaded rod and the cunning Dynamic seat screw-thread fit connects and bottom end is rotatably assorted with the sliding cavity inner bottom wall and connect, in the sliding seat left end face It is installed with the second motor, the second motor left-hand end power cooperation, which is equipped with, stretches into the movable bevel gear for passing and connecing intracavitary, The biography, which connects intracavitary bottom wall and is rotatably assorted, is connected with rotational sleeve, and extended segment stretches into the biography and connects intracavitary at the top of the rotational sleeve And outer surface be circumferentially installed with to the movable intermeshing fixed bevel gear of bevel gear, the rotational sleeve bottom is prolonged Section is stretched outside the processing bottom part body end face and end is installed with the head that is loaded, and rectangle is equipped in the bottom end face that is loaded Slot, it is mating in the rectangular slot that polishing wheel is installed, at left and right sides of the rectangular slot inner wall be arranged with to The locked component of the polishing wheel is locked, is perforated up and down through equipped with first in the rotational sleeve, the head that is loaded passes through up and down Be equipped with it is described first perforation be oppositely arranged second perforation, the polishing wheel up and down through be equipped with and it is described second perforation phase It perforates to the third of setting, is installed with laser engraving machine in the adjusting bracket bottom end face, the laser engraving machine bottom end is equipped with Emitting head, the emitting head stretches into successively in first perforation, the second perforation and third perforation and clearance fit connects therewith It connects, emission port is equipped in the emitting head.
2. a kind of laser carving device according to claim 1, it is characterised in that:The adjusting bracket bottom end, which is installed with, connects electricity Head, is equipped with the shrinkage pool being inserted into the electric contact in the adjusting cavity inner bottom wall, the shrinkage pool bottom wall be installed with to institute State the elasticity power supply piece of electric contact contact.
3. a kind of laser carving device according to claim 1, it is characterised in that:The locked component includes being symmetrical arranged The logical sliding slot of inner wall at left and right sides of the rectangular slot, logical sliding slot end face at left and right sides of the head that is loaded, and institute It states to be slidably installed in logical sliding slot and has locking level, handle, polishing wheel left and right sides end are installed on the outside of the locking level It is arranged with the locking mouth being inserted into the locking level in face, top pressure sliding slot, the top are equipped in the logical sliding slot inner roof wall Be slidably installed the top pressure sliding block that bottom end is fixedly connected with the locking level in pressure sliding slot, the institute on the outside of the top pressure sliding block It states top pressure cooperation in top pressure sliding slot and top pressure spring is installed.
4. a kind of laser carving device according to claim 1, it is characterised in that:It is described on the left of the laser engraving machine Slide guide bar is slidably connected in adjusting bracket, inner wall is fixedly connected the slide guide bar up and down with the adjusting cavity.
5. a kind of laser carving device according to claim 1, it is characterised in that:It is equipped in the processing main body inner bottom wall Socket chamber is installed with air compressor in the socket intracavitary roof, and the air compressor top is connected with air inlet pipe, described Air inlet pipe is stretched out outside the processing main body left end face, and the air compressor bottom end is equipped with escape pipe, the escape pipe appearance Face is slidably connected with goes out gas spray gun with what the socket chamber was slidably connected, it is described go out gas spray gun right end face be installed with Connecting plate, the connecting plate top are installed with piston rod, and piston rod top be connected by power has cylinder, the cylinder to be fixedly arranged on In the processing main body inner bottom wall.
6. a kind of laser carving device according to claim 1, it is characterised in that:The upper threaded rod and the lower screw thread Bar screw thread is oppositely arranged.
CN201810459763.0A 2018-05-15 2018-05-15 A kind of laser carving device Active CN108326442B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810459763.0A CN108326442B (en) 2018-05-15 2018-05-15 A kind of laser carving device

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Application Number Priority Date Filing Date Title
CN201810459763.0A CN108326442B (en) 2018-05-15 2018-05-15 A kind of laser carving device

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CN108326442A true CN108326442A (en) 2018-07-27
CN108326442B CN108326442B (en) 2019-01-11

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109702487A (en) * 2019-01-02 2019-05-03 重庆大学 A kind of device and method of microscopic surfaces structure processing

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07148649A (en) * 1993-10-07 1995-06-13 Ryobi Ltd Polishing device
WO2014164360A1 (en) * 2013-03-13 2014-10-09 Applied Materials, Inc. Laser pad conditioning process control
JP2015023135A (en) * 2013-07-18 2015-02-02 株式会社ディスコ Wafer processing method
CN107363486A (en) * 2017-08-08 2017-11-21 北京航空航天大学 A kind of method of electric knife surface laser cutting polishing integral processing

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07148649A (en) * 1993-10-07 1995-06-13 Ryobi Ltd Polishing device
WO2014164360A1 (en) * 2013-03-13 2014-10-09 Applied Materials, Inc. Laser pad conditioning process control
JP2015023135A (en) * 2013-07-18 2015-02-02 株式会社ディスコ Wafer processing method
CN107363486A (en) * 2017-08-08 2017-11-21 北京航空航天大学 A kind of method of electric knife surface laser cutting polishing integral processing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109702487A (en) * 2019-01-02 2019-05-03 重庆大学 A kind of device and method of microscopic surfaces structure processing

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